A reticle box with a washable base

Abstract

The present invention relates to the technical field of semiconductor carriers, and particularly relates to a photomask box with a washable base, which includes a base and a locking mechanism. The locking mechanism includes a rotating disk, an elastic connecting member, and a locking plate. The rotating disk includes a disk body, a connecting column, and a sliding groove. Compared with the prior art, by providing the elastic connecting member made of plastic or rubber, self-locking during opening and closing is achieved while avoiding metal ion contamination during pickling, enabling the base to be cleaned and being applicable to both acidic and alkaline environments. The arrangement direction of the elastic limit columns is perpendicular to the movement direction of the locking plate, shortening the length of the elastic connecting member, so that the structural strength of the elastic connecting member made of plastic or rubber meets the usage requirements. And by providing the rollers and the locking inclined blocks, the situation where the elastic connecting member made of plastic or rubber is not strong enough to support the locking plate is prevented.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor carriers, and particularly to a photomask box with a washable base. Background Art

[0002] A photomask box, also known as a photomask cassette or reticle box, is a special container used to store and protect photomasks in semiconductor manufacturing and lithography processes. A photomask is a core component in lithography technology, with tiny patterns engraved on it for manufacturing integrated circuits. Therefore, the integrity and cleanliness of the photomask are crucial for the success of the entire manufacturing process. The photomask box provides a closed and clean environment to prevent dust, particles, and other contaminants from damaging the photomask, ensuring the safety of the photomask during storage and transportation. Also, during transportation within and between semiconductor factories, the photomask may be subject to vibration and shock. Through its structural and material design, the photomask box can effectively absorb these external forces and prevent the photomask from being physically damaged.

[0003] For example, a Chinese utility model with the application number 202323190743.3 discloses a wafer box compatible with multiple specifications of wafer carriers. It uses an S-shaped elastic member in cooperation with a locking piece to achieve locking by inserting the locking piece into the lid through displacement. Although the lid and the base are fixed, the moving friction of the locking piece is relatively large, and a tight connection cannot be guaranteed after insertion into the lid. In addition, when the product needs to be pickled or is in an alkaline environment, conventional materials such as metals or stainless steels will have metal ions precipitated, which will affect the product. Summary of the Invention

[0004] In view of this, the present invention provides a photomask box with a washable base to solve the above technical problems.

[0005] A reticle box with a washable base, which includes a base, a lid fastened to the base, and a locking mechanism disposed within the base. The base includes a bottom plate. On a side of the bottom plate away from the lid, there is a rotating column, two elastic limiting columns disposed on both sides of the rotating column, two locking limiting regions disposed on both sides of the rotating column and the elastic limiting columns, four locking limiting blocks disposed within the locking limiting regions, and four locking inclined blocks disposed within the locking limiting regions. Each of the locking limiting blocks includes two abutting tops, a connecting portion connected between the two abutting tops, and a buckle portion disposed on an abutting top closer to the rotating column. The buckle portion is located at the top of the abutting top away from the bottom plate. The locking mechanism includes a rotating disk, two elastic connecting members disposed between the elastic limiting columns and the rotating disk, and two locking plates disposed within the locking limiting regions. The rotating disk includes a disk body, two connecting columns symmetrically disposed on the disk body, and two sliding grooves symmetrically disposed on the disk body. The extending shapes of the grooves of the two sliding grooves form an ellipse. The two ends of the sliding groove are respectively located at the vertices of the major axis and the minor axis of the ellipse. Each of the elastic connecting members includes an elastic body, a first connecting end located at one end of the elastic body, and a second connecting end located at the other end of the elastic body. The elastic body is an S-shaped structure made of plastic or rubber material. A circular sleeve is disposed on both the first connecting end and the second connecting end. The first connecting end is sleeved on the connecting column, and the second connecting end is sleeved on the elastic limiting column. Each of the locking plates includes a main board, a sliding end inserted into the sliding groove, two limiting holes opened on the main board, two rollers disposed on the main board, and two locking tongues disposed on the main board. A reinforcing plate is disposed at one end of the limiting hole closer to the buckle portion, and when the locking tongue extends out of the locking limiting region, it abuts against the buckle portion. The two rollers are both disposed on the main board and coincide with the positions of the locking inclined blocks. The rotation direction of each roller is the same as the movement direction of the corresponding locking plate. The arrangement direction of the elastic limiting columns is perpendicular to the movement direction of the locking plates.

[0006] Further, the two locking limiting regions are respectively disposed on both sides of the radial direction of the rotating column, and the arrangement directions of the two locking limiting regions are perpendicular to the arrangement direction of the two elastic limiting columns. The two locking limiting regions are respectively centrosymmetrically disposed with the rotating column as the center of symmetry.

[0007] Further, two locking tongue outlets are provided on the side wall at one end of each locking limiting region away from the rotating column. The locking tongue outlets are rectangular through holes opened on the side wall of the locking limiting region.

[0008] Further, two locking limit blocks are provided in each of the two locking limit areas as a group. The two locking limit blocks in the same locking limit area are axially symmetrically arranged, and the axis of symmetry is the connection line of the two locking limit areas passing through the rotating column.

[0009] Further, two locking inclined blocks are provided in each of the two locking limit areas as a group. The two locking inclined blocks in the same locking limit area are axially symmetrically arranged, and the axis of symmetry is the connection line of the two locking limit areas passing through the rotating column.

[0010] Further, two limiting parts are provided on the side of the bottom plate away from the box cover and on one side of the locking limit area. The limiting parts are arranged on the side of each locking limit area close to the rotating column, and the two limiting parts are centrosymmetrically arranged with the rotating column as the center of symmetry.

[0011] Further, the base further includes a bottom cover buckled on the bottom plate. Two arc-shaped key grooves are provided on the bottom cover. The key grooves are two through grooves penetrating the bottom cover. The groove bodies are centrosymmetrically arranged with the center point of the bottom cover as the center of symmetry. The centers of the key grooves coincide with the center point of the bottom cover, and the extending directions of the groove bodies of the two key grooves are on the edge of the same circle.

[0012] Further, four lock tongue sockets are provided on the side wall of the box cover. The positions and shapes of the lock tongue sockets correspond to the lock tongue outlets.

[0013] Further, the rotating disc further includes a rotating hole provided at the center point of the disc body, two symmetrically arranged lock holes on the disc body, two symmetrically arranged limiting flanges on the edge of the disc body, and a plurality of connecting shaft sleeves sleeved on the rotating hole and the connecting column.

[0014] Further, the lock holes, the connecting column, the sliding groove and the limiting flanges are all centrosymmetrically arranged with the rotating hole as the center of symmetry.

[0015] Compared with the prior art, the base-cleanable photomask box provided by the present invention is elastically connected by the elastic connecting member made of plastic or rubber, eliminating the use of metal or stainless steel components. While achieving self-locking during opening and closing, it avoids metal ion pollution during pickling. A connecting shaft sleeve made of polytetrafluoroethylene is provided at the rotating connection, reducing friction while enabling the base to be cleaned without affecting the internal structure, and being applicable to both acidic and alkaline environments. By arranging the elastic limiting posts perpendicular to the movement direction of the locking plate, the distance between the elastic limiting posts and the connecting posts is reduced, shortening the length of the elastic connecting member, so that the structural strength of the elastic connecting member made of plastic or rubber meets the usage requirements. By providing the rollers and the locking inclined blocks to replace the elastic limiting posts to compensate for the gap between the lock tongue and the lock tongue socket, it prevents the situation where the elastic connecting member made of plastic or rubber is not strong enough to support the locking plate. At the same time, while the locking limiting block limits the movement of the locking plate, the buckle portion cooperates with the reinforcing plate to prevent the force generated when the lid is separated from the base from being transmitted to the inside through the lever action of the locking plate and damaging the internal structural members made of plastic or rubber. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 FIG. is an exploded structural schematic diagram of a base-cleanable photomask box provided by the present invention.

[0017] Figure 2 is Figure 1 an exploded structural schematic diagram of the base-cleanable photomask box from another perspective.

[0018] Figure 3 is Figure 1 a partial structural schematic diagram of the base-cleanable photomask box.

[0019] Figure 4 is Figure 3 an enlarged schematic diagram of the base-cleanable photomask box at A.

[0020] Figure 5 is Figure 4 a side view structural schematic diagram of the locking limiting block of the base-cleanable photomask box.

[0021] Figure 6 is Figure 1 an exploded structural schematic diagram of the locking mechanism of the base-cleanable photomask box.

[0022] Figure 7 is Figure 1 an assembled structural schematic diagram of the rotating disk, elastic connecting member and locking plate of the base-cleanable photomask box in the upward viewing direction.

[0023] Description of reference numerals: Base 10, bottom plate 11, rotating column 111, elastic limiting column 112, locking limiting area 113, lock tongue outlet 1131, locking limiting block 114, abutting top 1141, connecting portion 1142, buckling portion 1143, locking inclined block 115, limiting portion 116, bottom cover 12, box cover 20, lock tongue socket 21, locking mechanism 30, rotating disk 31, disk body 311, rotating hole 312, lock hole 313, connecting column 314, sliding groove 315, limiting flap 316, connecting shaft sleeve 317, elastic connecting member 32, elastic main body 321, first connecting end 322, second connecting end 323, locking plate 33, main board 331, sliding end 332, limiting hole 333, reinforcing plate 3331, roller 334, lock tongue 335. Detailed implementation manners

[0024] The following further details the specific embodiments of the present invention. It should be understood that the description of the embodiments of the present invention herein does not limit the protection scope of the present invention.

[0025] As Figures 1 to 7 shown, it is a schematic structural diagram of a light mask box with a washable base provided by the present invention. The light mask box with a washable base includes a base 10, a box cover 20 buckled on the base 10, and a locking mechanism 30 arranged in the base 10. It can be imagined that the light mask box with a washable base further includes some other functional modules such as valves on the air inlet, limiting buckles for fixing products, etc., which are well-known technologies in the art and will not be elaborated herein one by one.

[0026] The base 10 includes a rectangular box-shaped bottom plate 11 and a bottom cover 12 buckled on the bottom plate 11.

[0027] The bottom plate 11 can be a rectangular box-shaped structure, which can be integrally formed by injection molding, and one side is buckled with the box cover 20 and is used for placing products. The bottom plate 11 is provided with an opening on the other side away from the box cover 20, and the bottom cover 12 can be buckled on this opening, so as to form a receiving cavity for arranging the locking mechanism 30 inside the bottom plate 11. As Figure 3 shown, a rotating column 111 located at the center point, two elastic limiting columns 112 arranged on both sides of the rotating column 111, two locking limiting areas 113 arranged on both sides of the rotating column 111 and the elastic limiting columns 112, four locking limiting blocks 114 arranged in the locking limiting areas 113, four locking inclined blocks 115 arranged in the locking limiting areas 113, and two limiting portions 116 arranged on one side of the locking limiting areas 113 are arranged in this receiving cavity.

[0028] The rotating column 111 is a columnar protrusion provided at the center point of the bottom plate 11, and the protruding direction is from the bottom plate 11 towards the side away from the box cover 20, so as to be used as a rotation center for the following rotating disk 31 of the locking mechanism 30 to rotate around it. Details will be described in combination with the corresponding components of the locking mechanism 30 below.

[0029] Both of the two elastic limit columns 112 are columnar protrusions provided on the bottom plate 11, parallel to and spaced from the rotating column 111, and are respectively located on both sides of the rotating column 111 in the radial direction, and are both centrosymmetrically arranged with the rotating column 111 as the symmetry center, so as to be used for arranging the following elastic connecting member 32 of the locking mechanism 30. Details will be described in combination with the corresponding components of the locking mechanism 30 below.

[0030] The two locking limit areas 113 are used for arranging the following locking plate 33 of the locking mechanism 30. The two locking limit areas 113 are respectively arranged on both sides of the rotating column 111 in the radial direction, and the arrangement direction of the two locking limit areas 113 is perpendicular to the arrangement direction of the two elastic limit columns 112. The specific reason will be described in combination with the elastic connecting member 32 below. The two locking limit areas 113 are both centrosymmetrically arranged with the rotating column 111 as the symmetry center, so that the corresponding components arranged in the two locking limit areas 113 can move synchronously. In addition, two lock tongue outlets 1131 are provided on the side wall of each end of the locking limit area 113 away from the rotating column 111. The lock tongue outlet 1131 is a rectangular through hole opened on the side wall of the locking limit area 113 for the following lock tongue 335 of the locking mechanism 30 to extend or retract. Details will be specifically described in combination with the corresponding components of the locking mechanism 30 below.

[0031] Among the four locking limit blocks 114, two are in a group and are respectively arranged in the two locking limit areas 113 to be used for abutting and limiting the corresponding components arranged in the two locking limit areas 113. The two locking limit blocks 114 in the same locking limit area 113 are axially symmetrically arranged, and the axis of symmetry is the connection line of the two locking limit areas 113 passing through the center of the rotating column 111, so as to ensure a uniform abutting force on the corresponding components arranged in the two locking limit areas 113.

[0032] Each of the locking and limiting blocks 114 is composed of two T-shaped structures butt-jointed, and each includes two abutting tops 1141, a connecting portion 1142 connected between the two abutting tops 1141, and a buckle portion 1143 provided on one of the abutting tops 1141 close to the rotating column 111. The abutting top 1141 is a protruding structure provided on the bottom plate 11, and the two abutting tops 1141 are arranged at intervals and in parallel to play an abutting role. The connecting portion 1142 is connected and supported between the two abutting tops 1141, and the extending direction of the connecting portion 1142 is parallel to the arrangement direction of the two locking and limiting areas 113 to obtain a more stable abutting force. The buckle portion 1143 is provided on the side of the abutting top 1141 facing the rotating column 111 and is located at the top of the abutting top 1141 away from the bottom plate 11. The buckle portion 1143 is a block-shaped protrusion with a right-angled trapezoid cross-section. Specifically, the lower base of the buckle portion 1143 is connected to the abutting top 1141, the upper base is arranged facing the rotating column 111, and the right-angled waist is on the side facing the bottom plate 11, so as to abut and buckle the corresponding components provided in the locking mechanism 30, which will be specifically described in detail below in combination with the corresponding components of the locking mechanism 30.

[0033] Among the four locking inclined blocks 115, two are in a group and are respectively arranged in the two locking and limiting areas 113. The two locking inclined blocks 115 in the same locking and limiting area 113 are axially symmetrically arranged, and the axis of symmetry is the connection line of the two locking and limiting areas 113 passing through the rotating column 111. Each of the locking inclined blocks 115 is a block-shaped protrusion with a right-angled trapezoid cross-section provided on the bottom plate 11. Specifically, the upper base of the locking inclined block 115 is connected to the bottom plate 11, the lower base is arranged on the side away from the bottom plate 11, and the inclined waist is on the side facing the rotating column 111, so as to cooperate with the roller 334 described below in the locking mechanism 30, which will be specifically described in detail below in combination with the corresponding components of the locking mechanism 30.

[0034] The limiting portion 116 is provided on the side of each locking and limiting area 113 close to the rotating column 111, and the two limiting portions 116 are centrosymmetrically arranged with the rotating column 111 as the center of symmetry, so as to cooperate with the rotation of the rotating disk 31 described below in the locking mechanism 30 and perform limiting and blocking. The position of the limiting portion 116 is determined by the elastic force and size of the elastic connecting member 32, which will be specifically described in detail below in combination with the corresponding components of the locking mechanism 30.

[0035] The bottom cover 12 can be a rectangular plate-like structure, which can be integrally formed by injection molding and is connected and fixed to the opening of the bottom plate 11 through elastic buckles, so as to cover the accommodation cavity of the locking mechanism 30. In addition, a plurality of other components are provided on the bottom cover 12, including but not limited to positioning components, check valves, and equipment nameplates, etc. They are all common technologies used in the field of semiconductor carriers and are not the main content of this application, so they will not be described in detail one by one here.

[0036] Two arc-shaped key slots 121 are provided on the bottom cover 12. The key slots 121 are through slots penetrating the bottom cover 12, and the slot bodies are centrally symmetric with the central axis of the rotating column 111 as the symmetric center. The center of the circle of the key slots 121 is located on the central axis of the rotating column 111, and the extending directions of the slot bodies of the two key slots 121 are on the same circle, so that a single unlocking key can be used for locking and unlocking. This is a well-known technology for those skilled in the art and will not be elaborated here.

[0037] The box cover 20 is a rectangular box with a single-sided opening and has an accommodation cavity for placing a photomask inside. The opening of the box cover 20 is buckled on the base 10 to form a closed rectangular box, so as to place the photomask in the box cover 20 and prevent it from being contaminated by dust or other substances during transportation. Correspondingly, a sealing gasket is also provided on the edge where the box cover 20 contacts the base 10 or on the base 10 to ensure the sealing performance of the interior formed by the box cover 20 and the base 10 after they are in contact.

[0038] Four lock tongue sockets 21 are provided on the side wall of the box cover 20. The positions and shapes of the lock tongue sockets 21 correspond to the lock tongue outlets 1131, for the lock tongues 335 extending from the lock tongue outlets 1131 to be inserted, so as to achieve locking when the box cover 20 is buckled on the base 10 and prevent the box cover 20 from separating from the base 10.

[0039] The locking mechanism 30 includes a rotating disk 31 provided on the rotating column 111, two elastic connectors 32 respectively provided between the elastic limit posts 112 and the rotating disk 31, and two locking plates 33 respectively provided in the locking limit area 113.

[0040] The rotating disk 31 can be made by injection molding of hard plastic and integrally formed to prevent being affected by the acid-base environment when cleaning the base 10. Such as Figure 6As shown in the figure, the rotating disk 31 includes a disk-shaped body 311, a rotating hole 312 provided at the center point of the body 311, two locking holes 313 symmetrically arranged on the body 311, two connecting columns 314 symmetrically arranged on the body 311, two sliding grooves 315 symmetrically arranged on the body 311, and two limiting flanges 316 symmetrically arranged on the edge of the body 311, and a plurality of connecting bushings 317 sleeved in the rotating hole 312 and on the connecting column 314. The above-mentioned locking holes 313, connecting columns 314, sliding grooves 315 and limiting flanges 316 are all centrosymmetrically arranged with the rotating hole 312 as the center of symmetry, so as to rotate together with the rotation of the rotating disk 31.

[0041] The body 311 is of a disk-shaped structure and is used as the main part for connecting the two elastic connectors 32 and the two locking plates 33.

[0042] The rotating hole 312 is a through hole passing through the center of the body 311, and a clamping step for facilitating clamping is provided on the inner wall of the rotating hole 312, so as to fixedly sleeve the body 311 on the rotating column 111 for rotation. A snap spring can be provided on the clamping step to fix the positional relationship between the body 311 and the rotating column 111.

[0043] The two locking holes 313 are respectively arranged on both sides of the rotating hole 312 and are two round holes with closed bottoms, so that the locking holes 313 are exposed for the key to be inserted, and external garbage will not enter the inside of the locking mechanism 30 from the locking holes 313. The center line connecting the centers of the two locking holes 313 coincides with the diameter of the rotating hole 312, and the positions of the locking holes 313 and the key groove 121 coincide. Thus, when using the key, the key passes through the key groove 121 and is inserted into the locking hole 313. By rotating the key, the rotating disk 31 can be driven to rotate. The connection between the line connecting the two locking holes 313 and the two connecting columns 314 has a certain angle, and this angle is determined by the positions of the locking holes 313, connecting columns 314, and sliding grooves 315, which will be described in detail below.

[0044] As Figure 4As shown, the connecting columns 314 are respectively arranged on both sides of the rotating hole 312, and are two columnar protrusions arranged on the disc body 311 for respectively connecting one ends of the two elastic connectors 32. The connecting columns 314 are arranged on the other side of the hole orientation of the locking hole 313, that is, the extending direction of the connecting columns 314 is opposite to the opening extending direction of the locking hole 313, so that the connecting structure of the locking mechanism 30 is inside the assembled structure of the base 10, and the position where the key is inserted is outside the assembled structure of the base 10 exposed on the surface, thereby avoiding external dust or impurities from affecting the operation of the connecting structure of the locking mechanism 30. The center line connecting the centers of the two connecting columns 314 coincides with the diameter of the rotating hole 312, so that when the disc body 311 rotates, the two elastic connectors 32 are respectively driven to rotate simultaneously.

[0045] The sliding grooves 315 are arranged on both sides of the rotating hole 312 and are two grooves arranged on the disc body 311 for cooperating with the locking plate 33. The notch directions of the two sliding grooves 315 are both the same as the protruding direction of the connecting columns 314, so as to facilitate the insertion of the corresponding parts of the locking plate 33, which will be specifically described in detail below in combination with the corresponding parts of the locking plate 33. The extending shapes of the bodies of the two sliding grooves 315 form an ellipse, and the two ends of the sliding groove 315 are respectively located at the vertices of the long axis and the short axis of the ellipse, that is, one end of the sliding groove 315 is the farthest from the rotating hole 312, and the other end of the sliding groove 315 is the closest to the rotating hole 312. Thus, when the locking plate 33 is connected to the rotating disc 31, by rotating the rotating disc 31, the distance between the locking plate 33 and the rotating hole 312 will change accordingly, and further the locking plate 33 can reciprocate within the locking and limiting area 113.

[0046] The two limiting flanges 316 are both arranged on the radial side walls of the disc body 311 and are hook-shaped structures protruding along the radius of the disc body 311. When the rotating disc 31 is sleeved on the rotating column 111, the distance from the limiting part 116 to the rotating hole 312 is less than the distance from the free end where the upper bottom of the limiting flange 316 is located to the rotating hole 312, so that when the rotating disc 31 rotates, the limiting flange 316 will abut against the limiting part 116, so that the limiting part 116 can limit the rotation angle of the rotating disc 31, prevent excessive rotation from exceeding the elastic limit range of the elastic connector 32, and avoid elastic fatigue of the elastic connector 32.

[0047] The connecting bushing 317 is arranged between the rotating hole 312 and the rotating column 111, and between the elastic connecting piece 32 and the connecting column 314. The connecting bushing 317 can be made of polytetrafluoroethylene. By utilizing the characteristic of the low friction coefficient of polytetrafluoroethylene itself, when the rotating disk 31 is sleeved on the rotating column 111 and rotates, the friction force is small. At the same time, due to the characteristics of polytetrafluoroethylene having good acid and alkali resistance and resistance to various organic solvents, pickling the product or being in an alkaline environment will not cause the connecting bushing to deform or be damaged. Instead of using metal or stainless steel materials, it avoids the pollution of metal ions and improves the cleanliness of the photomask box.

[0048] Each of the elastic connecting pieces 32 can be integrally formed and each includes an elastic main body 321, a first connecting end 322 located at one end of the elastic main body 321, and a second connecting end 323 located at the other end of the elastic main body 321.

[0049] The elastic main body 321 is an S-shaped structure and can be made of plastic or rubber materials with strong elasticity to replace the metal or stainless steel materials used in traditional equipment, so that when the product is pickled or in an alkaline environment, the precipitation of metal ions can be avoided.

[0050] A circular sleeve is provided on each of the first connecting end 322 and the second connecting end 323. The first connecting end 322 is sleeved on the connecting column 314, and the second connecting end 323 is sleeved on the elastic limiting column 112, thereby elastically limiting the rotating disk 31.

[0051] As the rotating disk 31 rotates, when the arrangement directions of the two connecting columns 314 on one elastic connecting piece 32 coincide with the arrangement directions of the two elastic limiting columns 112, the distance from the connecting column 314 to the elastic limiting column 112 is the closest. At this time, the elastic connecting piece 32 is in a compressed state. As the rotating disk 31 continues to rotate, the distance from the connecting column 314 to the elastic limiting column 112 increases, and the elasticity of the elastic connecting piece 32 is released until the rotation ends. At this time, the elastic connecting piece 32 is in a relaxed state, so that the elastic connecting piece 32 only deforms during the rotation of the rotating disk 31 and is in a relaxed state in the states after unlocking or locking. At the same time, since the rotation of the rotating disk 31 will cause the elastic connecting piece 32 to undergo elastic deformation, the locking mechanism 30 can be kept in the open state or the locked state, and locking or unlocking will not occur when the rotating disk 31 is not rotated with a key.

[0052] Since the elastic connecting member 32 is made of plastic or rubber instead of the conventional metal material on the market in order to achieve pickling of the product or use it in an alkaline environment, the structural strength of the elastic connecting member 32 is reduced. Therefore, the arrangement direction of the elastic limiting posts 112 is perpendicular to the moving direction of the locking plate 33. On the one hand, the distance between the elastic limiting posts 112 and the connecting posts 314 can be adjusted, the length of the elastic connecting member 32 can be shortened, and the requirement for the structural strength of the elastic connecting member 32 can be reduced. On the other hand, it can prevent the locking plate 33 from extruding the elastic limiting posts 112 in the axial direction of the rotating disc 31.

[0053] Since the arrangement direction of the elastic limiting posts 112 is perpendicular to the moving direction of the locking plate 33, the elastic connecting member 32 does not directly act on the locking plate 33, and the locking plate 33 is directly driven by the rotating disc 31. Therefore, two sliding grooves 315 are provided on the rotating disc 31. The two sliding grooves 315 are located on both sides of the arrangement direction of the two elastic limiting posts 112. At the same time, in the free state of the elastic connecting member 32, the locking plate 33 is either in a locked state or an unlocked state. Therefore, the positions of the two connecting posts 314 must meet the above requirements. Therefore, on the basis of determining the positions of the two connecting posts 314, the positions of the two locking holes 313 are determined. Thus, the setting of the positions and dimensions of the elastic limiting posts 112, the sliding grooves 315, the connecting posts 314, and the locking holes 313 is completed.

[0054] Each locking plate 33 includes a main board 331 as the main body, a sliding end 332 inserted into the sliding groove 315, two limiting holes 333 opened on the main board 331, two rollers 334 provided on the main board 331, and two locking tongues 335 provided on the main board 331.

[0055] The main board 331 is arranged in the locking and limiting area 113 and can move in the locking and limiting area 113 in two directions close to and away from the rotating column 111.

[0056] The sliding end 332 is located at one end of the main board 331 close to the rotating column 111, and is provided with a columnar protrusion perpendicular to the main board 331, with the protruding direction towards the rotating disc 31, so as to be inserted into the sliding groove 315. When the rotating disc 31 rotates, the columnar protrusion of the sliding end 332 slides along the groove body of the sliding groove 315, thereby driving the locking plate 33 away from and close to the rotating column 111, realizing the reciprocating movement of the locking plate 33 in the locking and limiting area 113. Correspondingly, a connecting shaft sleeve 317 can be sleeved on the columnar protrusion of the sliding end 332 to reduce the friction between the sliding end 332 and the sliding groove 315.

[0057] The limiting hole 333 is arranged on the main board 331. When the locking plate 33 is assembled in the locking and limiting area 113, the limiting hole 333 coincides with the position of the locking and limiting block 114, and the length of the limiting hole 333 in the moving direction of the locking plate 33 is greater than the distance between the outer sides of the two abutting tops 1141 of the locking and limiting block 114, so as to limit the moving range of the locking plate 33 when the locking plate 33 moves in the locking and limiting area 113. A reinforcing plate 3331 is arranged at one end of the limiting hole 333 close to the buckle part 1143 for engaging and abutting against the buckle part 1143 when the lock tongue 335 extends out of the locking and limiting area 113. Since there must be tolerances between the box cover 20 and the lock tongue 335, and between the lock tongue 335 and the bottom plate 11, and at the same time the locking plate 33 is not directly driven by the elastic connecting piece 32, in order to ensure the structural stability between the box cover 20 and the locking plate 33, and between the locking plate 33 and the bottom plate 11, that is, no looseness occurs between them, the locking and limiting block 114, the roller 334, and the locking inclined block 115 are provided. When the roller 334 rolls onto the locking inclined block 115, it will become a fulcrum, thus forming a lever structure among the buckle part 1143, the roller 334, and the lock tongue 335. Through this lever structure, the structural stability between the box cover 20 and the locking plate 33, and between the locking plate 33 and the bottom plate 11 can be ensured, and shaking can be avoided. The downward pressure of the box cover 20 on the lock tongue 335 will be converted into a pressure towards the rotating disc 31 at the sliding end 332, which will not only affect the rotation efficiency of the rotating disc 31, but also damage the internal structural parts made of plastic or rubber when the pressure is too large. Therefore, setting the reinforcing plate 3331 and the buckle part 1143 can effectively prevent this situation.

[0058] Both of the two rollers 334 are arranged on the main board 331 and coincide with the position of the locking wedge 115. The rotation direction of each roller 334 is consistent with the movement direction of the corresponding locking plate 33. When the locking plate 33 moves in the locking limit area 113, the roller 334 moves on the inclined side of the locking wedge 115 to reduce the friction of the movement of the locking plate 33. It can be imagined that in the prior art, by arranging the overlapping locking plate 33 and the elastic connecting piece 32, and through the support of the elastic connecting piece 32 for the locking plate 33, the displacement of the locking plate 33 in the axial direction of the rotating disc 31 is prevented. However, in order to realize the pickling of the product or use it in an alkaline environment in this application, the elastic connecting piece 32 made of plastic or rubber material cannot effectively support the locking plate 33. Therefore, by arranging the roller 334 and the locking wedge 115 to make up for the gap, the displacement of the locking plate 33 in the axial direction of the rotating disc 31 is prevented. During locking, due to the arrangement of the locking wedge 115, when the lock tongue 335 is inserted into the lock tongue socket 21, the distance between the lock tongue 335 and the bottom plate 11 will gradually increase, so as to abut against the edge of the lock tongue socket 21, thereby making up for the gap between the lock tongue 335 and the lock tongue socket 21 and preventing abnormal noise from occurring due to vibration during transportation. In addition, during the unlocking process, when the locking plate 33 moves towards the rotating column 111, the roller 334 will roll down along the locking wedge 115 due to the action of gravity, ensuring that the lock tongue 335 completely retracts from the lock tongue outlet 1131 and will not hinder the removal of the box cover 20.

[0059] Both of the two lock tongues 335 are arranged at one end of the main board 331 away from the sliding end 332, and respectively correspond to the positions of the two lock tongue outlets 1131, and can completely pass through the lock tongue outlets 1131. Chamfers are also arranged at the free ends of the two lock tongues 335 away from the main board 331 to play a guiding role when passing through the lock tongue outlets 1131 and inserting into the lock tongue sockets 21.

[0060] Compared with the prior art, the base of the cleanable photomask box provided by the present invention is elastically connected by the elastic connecting member 32 made of plastic or rubber, eliminating the use of metal or stainless steel components. While achieving opening and closing self-locking, it avoids metal ion pollution during pickling. The connecting shaft sleeve 317 made of polytetrafluoroethylene is provided at the rotating connection, reducing friction while enabling the base 10 to be cleaned without affecting the internal structure, and being applicable to acidic or alkaline environments. By setting the arrangement direction of the elastic limit posts 112 perpendicular to the movement direction of the locking plate 33, the distance between the elastic limit posts 112 and the connecting posts 314 is reduced, and the length of the elastic connecting member 32 is shortened, so that the structural strength of the elastic connecting member 32 made of plastic or rubber meets the use requirements. By setting the rollers 334 and the locking inclined blocks 115 to replace the elastic limit posts 112 to make up for the gap between the lock tongue 335 and the lock tongue socket 21, it prevents the situation where the elastic connecting member 32 made of plastic or rubber has insufficient strength and cannot support the locking plate 33. At the same time, while setting the locking limit block 114 to limit the movement of the locking plate 33, the buckle portion 1143 cooperates with the reinforcing plate 3331 to prevent the force generated when the lid 20 moves away from the base 10 from being transmitted to the inside through the lever action of the locking plate 33 and damaging the internal structural parts made of plastic or rubber.

[0061] The above are only the preferred embodiments of the present invention and are not used to limit the protection scope of the present invention. Any modifications, equivalent replacements or improvements within the spirit of the present invention are covered within the scope of the claims of the present invention.

Claims

1. A photomask cassette with a washable base, characterized in that: The cleanable reticle box of the base includes a base, a box cover buckled on the base, and a locking mechanism arranged in the base. The base includes a bottom plate, a rotating column arranged on one side of the bottom plate away from the box cover, two elastic limiting columns arranged on both sides of the rotating column, two locking limiting areas arranged on both sides of the rotating column and the elastic limiting columns, four locking limiting blocks arranged in the locking limiting areas, and four locking inclined blocks arranged in the locking limiting areas. Each of the locking limiting blocks includes two abutting tops, a connecting portion connected between the two abutting tops, and a buckle portion arranged on the abutting top close to the rotating column side. The buckle portion is located at the top of the abutting top away from the bottom plate. The locking mechanism includes a rotating disk, two elastic connecting pieces arranged between the elastic limiting column and the rotating disk, and two locking plates arranged in the locking limiting areas. The rotating disk includes a disk body, two connecting columns symmetrically arranged on the disk body, and two sliding grooves symmetrically arranged on the disk body. The extending shapes of the grooves of the two sliding grooves form an ellipse. The two ends of the sliding groove are respectively located at the vertices of the major axis and the minor axis of the ellipse. Each of the elastic connecting pieces includes an elastic body, a first connecting end located at one end of the elastic body, and a second connecting end located at the other end of the elastic body. The elastic body is an S-shaped structure made of plastic or rubber material. Circular sleeves are arranged on both the first connecting end and the second connecting end. The first connecting end is sleeved on the connecting column, and the second connecting end is sleeved on the elastic limiting column. Each of the locking plates includes a main board, a sliding end inserted into the sliding groove, two limiting holes opened on the main board, two rollers arranged on the main board, and two locking tongues arranged on the main board. A reinforcing plate is arranged at one end of the limiting hole close to the buckle portion. When the locking tongue extends out of the locking limiting area, it abuts against the buckle portion. The two rollers are both arranged on the main board and coincide with the positions of the locking inclined blocks. The rotating direction of each roller is consistent with the moving direction of the corresponding locking plate. The arrangement direction of the elastic limiting columns is perpendicular to the moving direction of the locking plate.

2. The base of the photomask cassette according to claim 1, wherein: The two locking limiting areas are respectively arranged on both sides of the radial direction of the rotating column, and the arrangement directions of the two locking limiting areas are perpendicular to the arrangement directions of the two elastic limiting columns. The two locking limiting areas are respectively centrosymmetrically arranged with the rotating column as the center of symmetry.

3. The base of the photomask cassette according to claim 2, wherein: Two locking tongue outlets are arranged on the side wall of one end of each locking limiting area away from the rotating column. The locking tongue outlet is a rectangular through hole opened on the side wall of the locking limiting area.

4. The base of the photomask cassette according to claim 1, wherein: Two of the locking limit blocks are provided in each of the two locking limit areas as a group. The two locking limit blocks in the same locking limit area are axially symmetrically arranged, and the axis of symmetry is the line connecting the two locking limit areas passing through the rotating column.

5. The mask box with a washable base according to claim 1, characterized in that: Two of the locking inclined blocks are provided in each of the two locking limit areas as a group. The two locking inclined blocks in the same locking limit area are axially symmetrically arranged, and the axis of symmetry is the line connecting the two locking limit areas passing through the rotating column.

6. The base of the photomask cassette according to claim 1, wherein: On the side of the bottom plate away from the box cover, there are also two limiting parts provided on one side of the locking limit area. The limiting parts are provided on the side of each locking limit area close to the rotating column, and the two limiting parts are centrosymmetrically arranged with the rotating column as the center of symmetry.

7. The base of the photomask cassette as claimed in claim 1, wherein: The base further includes a bottom cover buckled on the bottom plate. There are two arc-shaped key slots provided on the bottom cover. The key slots are two through slots penetrating the bottom cover. The slot bodies are centrosymmetrically arranged with the center point of the bottom cover as the center of symmetry. The center of the key slot coincides with the center point of the bottom cover, and the extending directions of the slot bodies of the two key slots are on the edge of the same circle.

8. The base of the photomask cassette according to claim 3, wherein: There are four lock tongue sockets provided on the side wall of the box cover. The positions and shapes of the lock tongue sockets correspond to the lock tongue outlets.

9. The base of the photomask cassette according to claim 1, wherein: The rotating disk further includes a rotating hole provided at the center point of the disk body, two symmetrically arranged lock holes on the disk body, two symmetrically arranged limiting flanges on the edge of the disk body, and a plurality of connecting shaft sleeves sleeved in the rotating hole and on the connecting column.

10. The base of the photomask cassette according to claim 9, wherein: The lock holes, connecting columns, sliding grooves and limiting flanges are all centrosymmetrically arranged with the rotating hole as the center of symmetry.

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