Transport system, processing system, and article manufacturing method

Abstract

The invention relates to a transport system, a processing system, and an article manufacturing method. A transport system includes: a stator having a plurality of coils, each coil including a winding and an iron core; and a mover having a plurality of magnets, the mover moving in the transport direction by an electromagnetic force generated between the plurality of coils and the magnets; the stator and the mover respectively have one and the other of first and second transport members that guide the mover to move in a transport direction, the first transport member including an upper transport member and a lower transport member, the transport position of the mover being adjusted such that the top surface of the at least one magnet is located below or above the equilibrium position, and the second transport member including an upper transport member and a lower transport member. And a balance position in which a magnetic attraction force generated between the iron core and the magnet and a gravity force on the mover are balanced with each other, and the mover is transported in a state in which the second transport member is in contact with the lower transport member or the upper transport member according to the transport position.

Description

[0001] This application is a divisional application of invention patent application 202110154604.1 filed on February 4, 2021 and entitled “Transportation system, processing system and article manufacturing method”. Technical Field

[0002] The present invention relates to a conveying system, a processing system and a method for manufacturing an article. Background Art

[0003] Generally, a conveying system is used in a production line for assembling industrial products, a semiconductor exposure device, and the like. In particular, a conveying system in a production line conveys workpieces such as parts between a plurality of stations in a factory automation line or between factory automation lines. In addition, such a conveying system can be used as a conveying device in a processing device. As a conveying system, a conveying system having a movable magnet type linear motor has been proposed.

[0004] In a conveying system having a movable magnet type linear motor, a guide device (e.g., a linear guide) involving mechanical contact is used to construct the conveying system. However, in a conveying system using a guide device such as a linear guide, there is a problem of reduced productivity due to contaminants (e.g., wear parts of a rail or a bearing or lubricating oil, volatiles, etc.) generated by a sliding portion of the linear guide. In addition, there is also a problem of shortening the service life of the linear guide due to increased friction of the sliding portion at high-speed conveyance.

[0005] Therefore, Japanese Patent No. 5439762 and Japanese Patent Application Laid-Open No. 2000-24816 disclose a device that can eliminate the self-weight applied to a movable part or a moving member. The device disclosed in Japanese Patent No. 5349762 has an auxiliary mechanism that, together with a guide mechanism that supports the movable part and guides the movement of the movable part, applies a magnetic force to the movable part in a direction that eliminates the self-weight of the movable part acting on the guide mechanism. In addition, the device disclosed in Japanese Patent Application Laid-Open No. 2000-24816 has a guide unit that guides a belt that is connected and suspended at one end of a moving member that moves up and down along a linear travel guide and is connected and suspended at the other end of a counterweight that is the same weight as the moving member. Summary of the invention

[0006] According to one aspect of the present invention, a conveying system is provided, comprising: a stator having a plurality of coils arranged in a conveying direction, wherein each of the plurality of coils includes a winding and an iron core; and a mover having a plurality of magnets arranged to face the plurality of coils and configured to move in the conveying direction by an electromagnetic force generated between the plurality of coils and the magnets. The stator has one of a first conveying member and a second conveying member, and the first conveying member and the second conveying member guide the moving mover in the conveying direction. The first conveying member includes an upper conveying member and a lower conveying member, and the upper conveying member and the lower conveying member are respectively installed to be located above and below the second conveying member. The mover has the other of the first conveying member and the second conveying member, and the conveying position of the mover is adjusted so that the top surface of at least one magnet is located below or above a balanced position, in which the magnetic attraction generated between the iron core and the magnet and the gravity acting on the mover are balanced with each other. The mover is conveyed in a state where the second conveying member contacts the lower conveying member or the upper conveying member according to the conveying position.

[0007] According to another aspect of the present invention, a conveying system is provided, comprising: a stator having a plurality of coils arranged along a conveying direction; and a mover having a plurality of magnets arranged to face the plurality of coils. The stator has one of a first conveying member and a second conveying member, and the first conveying member and the second conveying member guide the movable mover in the conveying direction. The first conveying member includes an upper conveying member and a lower conveying member, and the upper conveying member and the lower conveying member are respectively installed to be located above and below the second conveying member. The mover has the other of the first conveying member and the second conveying member. The conveying system also includes a control device, which supplies current to the coil, generates a force in a direction to eliminate the gravity acting on the mover, presses the second conveying member against the lower conveying member or the upper conveying member, and moves the mover in the conveying direction.

[0008] Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 1 is a schematic diagram showing the overall configuration of a conveying system including a bracket and a stator according to a first embodiment of the present invention when viewed from the Z direction.

[0010] Figure 2 1 is a schematic diagram showing the overall structure of the conveying system including the bracket and the stator according to the first embodiment of the present invention when viewed from the Y direction.

[0011] Figure 3A 1 is a schematic diagram showing a control system in a transport system according to a first embodiment of the present invention.

[0012] Figure 3B1 is a schematic diagram showing a control system in a transport system according to a first embodiment of the present invention.

[0013] Figure 4A 1 is a schematic diagram showing a configuration including a carriage and a stator in the transport system according to the first embodiment of the present invention when viewed from the X direction.

[0014] Figure 4B 1 is a schematic diagram showing a structure including a bracket and a stator in the transport system according to the first embodiment of the present invention when viewed from the X direction.

[0015] Figure 5A 1 is a schematic diagram showing the positional relationship between the carriage and the stator in the transport system according to the first embodiment of the present invention when viewed from the X direction.

[0016] Figure 5B 1 is a schematic diagram showing the positional relationship between the bracket and the stator in the transport system according to the first embodiment of the present invention when viewed from the X direction.

[0017] Figure 5C 1 is a schematic diagram showing the positional relationship between the bracket and the stator in the transport system according to the first embodiment of the present invention when viewed from the X direction.

[0018] Fig. 6A 1 is a schematic diagram showing a configuration including a carriage and a stator in a transport system according to a second embodiment of the present invention when viewed from the X direction.

[0019] Figure 6B 1 is a schematic diagram showing a configuration including a carriage and a stator in a transport system according to a second embodiment of the present invention when viewed from the X direction.

[0020] Figure 7 1 is a schematic diagram showing a structure including a bracket and a stator in a transport system according to a fourth embodiment of the present invention when viewed from the X direction. Specific embodiments

[0021] In conventional conveying systems, it is difficult to reduce contaminants generated by the sliding parts of the mover or stator without increasing the size or complexity of the equipment.

[0022] For example, the device disclosed in Japanese Patent No. 5439762 has an auxiliary mechanism that applies magnetic force to the movable part for canceling its own weight in addition to the linear actuator. Since the auxiliary mechanism is also separately included, it is difficult to avoid an increase in the size of the device disclosed in Japanese Patent No. 5349762.

[0023] Furthermore, in the apparatus disclosed in Japanese Patent Application Laid-Open No. 2000-24816, a moving member connected to a counterweight via a sliding belt stops in a state balanced with a tension applied from the sliding belt caused by a counterweight having the same weight as the self-weight of the moving member, and moves in a vertical direction in response to a slight external force. In the apparatus disclosed in Japanese Patent Application Laid-Open No. 2000-24816, although the moving member can be moved with a small friction force due to the sliding belt being guided by gas, it is difficult to move the moving member in directions other than the vertical direction due to restrictions caused by the sliding belt.

[0024] First embodiment

[0025] A first embodiment of the present invention will be described below with reference to the accompanying drawings.

[0026] First, refer to Figures 1 to 3B The overall configuration of the transport system according to the present embodiment is described. Figure 1 : is a schematic diagram showing the overall configuration of the conveying system including a carriage and a stator according to the present embodiment when viewed from a Z direction described later. Figure 2 : is a schematic diagram showing the entire configuration of the conveying system including the bracket and the stator according to the present embodiment when viewed from a Y direction described later. Figure 3A and Figure 3B : is a schematic diagram showing a control system in a conveying system according to this embodiment. Note that Figure 1 is a perspective view of the bracket 101 and the stator 201 when viewed from the lower side in the Z direction, Figure 2 This is a cross-sectional view of the bracket 101 and the stator 201 when viewed from the Y direction.

[0027] like Figure 1 and Figure 2 As shown, the conveying system 1 according to the present embodiment has a carriage 101 as a mover and a stator 201 constituting a conveying path. The conveying system 1 is a conveying system formed by a movable magnet type linear motor (a movable permanent magnet type linear motor, a movable field magnet type linear motor). The conveying system 1 constitutes a part of a processing system, which also has a processing device that processes a workpiece 102 conveyed by the carriage 101.

[0028] For example, the transport system 1 transports the workpiece 102 held on the carrier 101 to a processing device, where the workpiece 102 is processed by transporting the carrier 101 by the stator 201. The processing device is not particularly limited, and may be, for example, a film forming device (e.g., a vapor deposition device or a sputtering device) to form a film on a glass substrate as the workpiece 102. Note that in Figure 1 and Figure 2In the conveying system 1 , a plurality of the conveying racks 101 may be conveyed on the stator 201 .

[0029] Here, we define the coordinate axes and directions used in the following description. Figure 1 and Figure 2 In the figure, the X-axis is taken along the horizontal direction which is the conveying direction of the carriage 101, and the conveying direction of the carriage 101 is defined as the X-direction. In addition, the Z-axis is taken along the direction perpendicular to the X-direction, that is, the vertical direction, and the vertical direction is defined as the Z-direction. In addition, the Y-axis is taken along the direction perpendicular to the X-direction and the Z-direction, and the Y-direction is defined as the direction perpendicular to the X-direction and the Z-direction. Note that although it is not necessarily required that the conveying direction of the carriage 101 is the horizontal direction, in this case, the Y-direction and the Z-direction can be defined similarly when the conveying direction is defined as the X-direction. In addition, the same coordinate axes and the same directions are used to describe FIG. 4A to FIG. 7 .

[0030] The bracket 101 as a mover movable in the X direction has at least one magnet 103 as a permanent magnet, at least one scale 104, at least one yoke 107 and at least one rotating member 108 as a conveying member. On the other hand, the stator 201 has at least one coil 202, at least one encoder 204 and at least one auxiliary member 205 as a conveying member. The magnet 103 does not have to be a permanent magnet, but can be any magnet. In other words, the magnet 103 includes a group of magnets formed by a plurality of magnets.

[0031] A plurality of magnets 103 are attached and mounted on the top of the bracket 101 via a yoke 107. The yoke 107 is formed of a material having a large magnetic permeability (e.g., iron). A plurality of magnets 103 are mounted to be arranged in two rows on both sides parallel to the X direction on the top of the bracket 101. The magnets 103 on each row are arranged in the X direction so that the polarity of the outer magnetic poles facing the stator 201 side is alternately different. In this way, the plurality of magnets 103 are arranged to be able to face the plurality of coils 202 of the stator 201.

[0032] Each rotating member 108 is a conveying member for conveying the carriage 101 on the carriage 101 side, specifically, a wheel for moving the carriage 101 in the X direction on the stator 201. A plurality of rotating members 108 are attached and mounted on both side portions of the carriage 101 parallel to the X direction. When the carriage 101 travels in the X direction, the rotating members 108 rotate while contacting the auxiliary member 205 as a conveying member on the stator 201 side.

[0033] The scale 104 is fixed along the X direction and installed at a position where it can be read by the encoder 204 of the stator 201 .

[0034] As described above, the carriage 101 on which the magnet 103 and the rotating member 108 are mounted is configured to move and transport in the X direction in response to the electromagnetic force applied to the magnet 103 from the coil 202 of the stator 201. For example, the carriage 101 is configured so that the workpiece 102 is attached to the upper side or the lower side of the carriage 101 or is held and transported by the upper side or the lower side of the carriage 101. Note that, Figure 1 , FIG. 4A to FIG. 5C The state in which the workpiece 102 is attached below the carrier 101 is shown. Note that the mechanism for attaching or holding the workpiece 102 on the carrier 101 is not particularly limited, and a general attaching mechanism, a general holding mechanism, etc. such as a mechanical hook or an electrostatic chuck may be used.

[0035] In the stator 201, each encoder 204 is attached and installed so as to be able to read the scale 104 of the carriage 101. The encoder 204 can detect the relative position of the carriage 101 with respect to the encoder 204 by reading the scale 104 of the carriage 101. A plurality of encoders 204 are installed along the X direction. The plurality of encoders 204 are installed at certain intervals, and in the case of this interval, even when the carriage 101 is transported, the position of one carriage 101 can be always detected by any encoder 204. Each encoder 204 outputs position information indicating the relative position of the carriage 101 with respect to the encoder 204.

[0036] A plurality of coils 202 are attached and mounted on the stator 201 so as to be able to face the magnet 103 of the bracket 101. The plurality of coils 202 are arranged to be able to face the magnet 103 of the bracket 101 from the top. Each of the plurality of coils 202 has a winding 202a and an iron core 202b, and the winding 202a is wound on the iron core 202b. The plurality of coils 202 are installed to be arranged in two rows on both sides parallel to the X direction, so that the coils 202 can face the magnets 103 on the two rows of the bracket 101 from the top respectively along the Z direction. On each row of coils 202, a plurality of coils 202 are installed so that the coil unit 210 formed by the three coils 202 of the U phase, the V phase and the W phase arranged in this order in the X direction is arranged along the X direction. When the coil unit 210 is defined as a unit, the plurality of coils 202 are controlled on a unit basis. When current is applied, the coil 202 generates an attractive force or a repulsive force due to electromagnetic force with respect to the magnet 103 of the carriage 101, thereby being able to apply force to the carriage 101. In this way, in the stator 201, a transport path is formed, on which the coil units 210 capable of applying force to the carriage 101 are arranged along the X direction which is the transport direction of the carriage 101.

[0037] Each auxiliary member 205 is a stator 201 side transport member for transporting the carriage 101, specifically a rail-type member on which the rotating member 108 of the carriage 101 travels in contact. The auxiliary member 205 is attached and mounted to the stator 201 on both sides of the carriage 101 parallel to the X direction so that the rotating members 108 on both side portions of the carriage 101 can travel. The auxiliary member 205 and the rotating member 108 are members that guide the mobile carriage 101 in the X direction.

[0038] The auxiliary member 205 includes an upper auxiliary member 205a as an upper conveying member and a lower auxiliary member 205b as a lower conveying member (see Figure 4A and Figure 4B ). The upper auxiliary member 205a and the lower auxiliary member 205b are track-type members located at different installation positions from each other in the vertical direction. The upper auxiliary member 205a and the lower auxiliary member 205b are installed to be located above and below the rotating member 108 of the bracket 101, respectively. As will be described later, all or some of the multiple rotating members 108 of the bracket 101 are in contact with the lower auxiliary member 205b, which is one of the upper auxiliary member 205a and the lower auxiliary member 205b, and travel between the upper auxiliary member 205a and the lower auxiliary member 205b.

[0039] Note that in this embodiment and the second to fourth embodiments described later, although the coil units 210, magnets 103, yokes 107, rotating members 108, and auxiliary members 205 are described as being arranged in two rows symmetrically on both sides with respect to the conveying direction, the embodiment is not limited thereto. The number of rows of the coil units 210, the number of rows of the magnets 103, the number of rows of the yokes 107, the number of rows of the rotating members 108, and the number of rows of the auxiliary members 205 may be one or more. For example, the number of rows of each unit may be set according to the size, mass, etc. of the bracket 101, the workpiece 102, etc.

[0040] like Figure 3A As shown, the conveying system 1 according to the present embodiment has a control system 2. The control system 2 has an integrated controller 301 and a coil controller 302. Each coil controller 302 is provided for each coil unit 210. The coil controller 302 is connected to the integrated controller 301 in a communication manner. It is noted that the communication specification between the integrated controller 301 and the coil controller 302 is not particularly limited, and a general specification can be used. For example, the communication specification can be a controller area network (CAN), Ethernet (registered trademark), Ethernet for control automation technology (EtherCAT), etc.

[0041] The corresponding coil unit 210 is connected to each coil controller 302. Note that, Figure 3AThe case where the coil 202 of each phase of the coil unit 210 is connected one by one to the coil controller 302 is shown as an example, and the coil unit 210 is formed so that three coils 202 of the U phase, V phase, and W phase are composed into one unit. In addition, the encoder 204 is connected to the coil controller 302.

[0042] The position information about the carriage 101 output from the encoder 204 is transmitted to the integrated controller 301 through the coil controller 302. The integrated controller 301 calculates the position of the carriage 101 on the transport path in the stator 201 based on the position information obtained from the encoder 204 and controls the transport of the carriage 101. The integrated controller 301 transmits the calculated position information indicating the position of the carriage 101 to the coil controller 302.

[0043] Each coil controller 302 detects the level of each current flowing in each coil 202 of the connected coil unit 210 and controls each current. The coil controller 302 calculates a current value instruction indicating a target current value based on the position information indicating the position of the bracket 101, and controls the current value of the current flowing in each coil 202 of the connected coil unit 210.

[0044] like Figure 3B As shown, the coil controller 302 has a current detection unit 303 each configured to detect the current of the coil 202, a current control unit 304 each configured to control the current of the coil 202, and a current calculation unit 305 each configured to calculate the current of the coil 202. The current detection unit 303 is provided between the current control unit 304 and the coil 202. The current control unit 304 is connected to the current calculation unit 305.

[0045] The current detection unit 303 detects the current flowing between the current control unit 304 and the coil 202. The current detection unit 303 may detect the current flowing in the direction from the current control unit 304 to the coil 202 as a positive current. The current detection unit 303 inputs information about the detected current to the current calculation unit 305.

[0046] The current calculation unit 305 calculates the current value flowing through each coil 202 of the coil unit 210 based on the position information sent from the integrated controller 301 and the information on the current input from the current detection unit 303. The current calculation unit 305 inputs the calculated current value to the current control unit 304.

[0047] The current control unit 304 controls the current flowing in each coil 202 according to the current value input from the current calculation unit 305. Here, when the current values ​​flowing in the respective coils 202 of the U phase, V phase, and W phase are represented as Iu, Iv, and Iw, respectively, the currents Iu, Iv, and Iw are controlled by the current control unit 304 so as to satisfy the relationship of the following equation (1).

[0048] Iu+Iv+Iw=0...(1)

[0049] Note that although Figure 3B A case where the coils 202 are individually connected to the coil controllers 302 is shown, but the coils 202 may be connected to the coil controller 302 by a star connection or the like used in a general three-phase motor.

[0050] Next, we will refer to FIG. 4A to FIG. 5C The position of the carriage 101 transported in the transport system 1 according to the present embodiment in the Z direction is further described. Figure 4A and Figure 4B 1 is a schematic diagram showing a configuration including a carriage 101 and a stator 201 in the conveying system 1 according to the present embodiment when viewed from the X direction. FIG. 5A to FIG. 5C 1 is a schematic diagram showing the positional relationship between the carriage 101 and the stator 201 in the conveying system 1 according to the present embodiment when viewed from the X direction.

[0051] Figure 4A 1 is a cross-sectional view showing the adjustment position of the carriage 101 in the Z direction which is adjusted before the carriage 101 is transported. Figure 4B 2 is a cross-sectional view showing the transport position of the carriage 101 which is the position of the carriage 101 in the Z direction when the carriage 101 is transported in the X direction.

[0052] like Figure 4A and Figure 4B As shown, the auxiliary members 205 of the stator 201 are installed to be respectively located on both sides of the bracket 101. Each auxiliary member 205 has an upper auxiliary member 205a as an upper conveying member located on the upper side and a lower auxiliary member 205b as a lower conveying member located below the upper auxiliary member 205a.

[0053] The rotating members 108 installed in both side portions of the carriage 101 are respectively located between the upper auxiliary member 205a and the lower auxiliary member 205b of the same-side auxiliary members 205. As will be described later, the carriage 101 is transported in a state where its Z-direction position is adjusted.

[0054] Notice, Figure 4A and Figure 4BThe case where the bracket 101 and the stator 201 are embedded in the chamber of the vapor deposition device 401 is shown, and the vapor deposition device 401 is an example of a processing device for performing a processing operation on the workpiece 102. A vapor deposition source 402 is installed in the lower part of the chamber of the vapor deposition device 401. The workpiece 102 is attached to the lower part of the bracket 101, and the bracket 101 is transported to the installation position of the vapor deposition source 402, and a thin film (such as metal or oxide, etc.) is formed on the substrate as the workpiece 102 by vapor deposition of the vapor deposition source 402. As described above, the bracket 101 and the workpiece 102 are transported, the processing device processes the transported workpiece 102, and an article is manufactured.

[0055] The position of the bracket 101 in the Z direction differs depending on the relationship between the magnetic attraction force generated between the magnet 103 and the core 202 b and the gravity acting on the bracket 101 . FIG. 5A to FIG. 5C 2 is a cross-sectional view showing the positional relationship between the bracket 101 and the stator 201 in the Z direction when viewed from the X direction. FIG. 5A to FIG. 5C As shown, a magnetic attraction force Fm is generated in the vertical direction between the iron core 202b of the coil 202 and the magnet 103, that is, between the iron core 202b of the coil 202 and the magnet 103. In addition, a gravity force Fg acts on the bracket 101 in the vertical direction.

[0056] Figure 5A FIG. 1 shows a state where the bracket 101 is arranged at a position where the magnetic attraction force Fm and the gravity force Fg are balanced with each other. Figure 5A In the figure, as a reference, the surface of the coil 202 on the bracket 101 side, that is, the surface of the core 202b on the bracket 101 side, in the Z direction, is indicated by a dotted line as the position P2. In addition, the position of the top surface of the magnet 103 in the Z direction when the magnetic attraction force Fm and the gravity Fg are balanced is indicated by a dotted line as the equilibrium position P1. Note that Figure 4A and Figure 4B The equilibrium position P1 and the position P2 are shown in the same manner.

[0057] Figure 5B The state in which the position P3 of the top surface of the magnet 103 in the Z direction is lower than the equilibrium position P1 in the vertical direction and the gravity Fg is greater than the magnetic attraction Fm is shown. In this case, in the Z direction, a gap G3 between the equilibrium position P1 and the position P3 of the top surface of the magnet 103 is formed on the opposite side of the coil 202 relative to the equilibrium position P1. Note that Figure 5B and Figure 5C , the position P3 is indicated by a double-dashed line. Figure 4A and Figure 4B Position P3 is shown in the same manner.

[0058] Figure 5CThe state where the position P3 of the top surface of the magnet 103 in the Z direction is located above the equilibrium position P1 in the vertical direction and the gravity Fg is smaller than the magnetic attraction Fm is shown. In this case, in the Z direction, a gap G3 is formed between the equilibrium position P1 and the position P3 of the top surface of the magnet 103 on the coil 202 side relative to the equilibrium position P1.

[0059] Generally, if the magnetic attraction and repulsion generated between the coil 202 and the magnet 103 can be increased, the thrust of the linear motor of the conveying carriage 101 can be increased. Since the magnetic attraction and repulsion vary according to the magnitude of the magnetic flux density in the gap between the coil 202 and the magnet 103, the increase in magnetic flux density increases the magnetic attraction. In order to increase the magnetic flux density in the gap, it is considered to select strong magnets such as neodymium magnets and samarium cobalt magnets as the magnet 103. In addition, the increase in the volume of the magnet 103 can increase the magnetic flux in the gap. In addition, in the coil 202, when the iron core 202b with high magnetic permeability is arranged at the center of the winding 202a, this can increase the magnetic flux density. The magnetic resistance of the iron core 202b with high magnetic permeability is small and it is easy to pass the magnetic flux. By arranging the iron core 202b in the winding, since this promotes the magnetic flux generated from the magnet 103 to pass through the coil 202, the magnetic flux density in the gap can be increased. Furthermore, by arranging the magnet 103 and the core 202 b so that the respective centers are substantially the same in the Z direction, this facilitates the passage of magnetic flux, with the result that a force can be efficiently generated between the coil 202 and the magnet 103 .

[0060] On the other hand, when there is a member with high magnetic permeability around the magnet 103, an attractive force is generated between the magnet 103 and the member with high magnetic permeability. That is, the attractive force of the magnet 103 also acts on the iron core 202b of the coil 202 arranged near the magnet 103. For example, in the case of a configuration in which the iron core 202b and the magnet 103 are close to each other, an attractive force works, and a large force is applied to the rotating member 108 or the auxiliary member 205. In a configuration in which both the iron core 202b and the magnet 103 are close to each other, the rotating member 108 or the auxiliary member 205 is required to have a strength sufficient to avoid deformation or breakage due to the attractive force. In a configuration in which the iron core 202b and the magnet 103 are separated from each other, especially when the bracket 101 has a large weight, the rotating member 108 or the auxiliary member 205 supporting the bracket 101 is required to have sufficient strength to avoid deformation or breakage due to gravity.

[0061] As an example, the attraction force is several hundred Newtons when the gap between the core 202b and the magnet 103 is 1 mm in the case where the material of the magnet 103 is a neodymium magnet, the size of the magnet 103 is 50×40×10 mm, and the magnet 103 is attached to the yoke 107. In addition, when a plurality of magnets 103 are arranged on the bracket 101, an attraction force obtained by multiplying the above attraction force by the number of magnets 103 is applied to the bracket 101.

[0062] When the strength of the rotating member 108 or the auxiliary member 205 is insufficient, the bracket 101 or the stator 201 is deformed by attraction or gravity, and after the deformation, contact or friction occurs between the bracket 101 and the peripheral members. In addition, trying to ensure the strength of the rotating member 108 or the auxiliary member 205 increases the size of each component, thereby increasing the size of the entire conveying system 1. Even if the strength is ensured, when conveying the bracket 101, a problem of increased contaminants, i.e., waste chips, occurs in their sliding parts due to the large force applied to the rotating member 108 or the auxiliary member 205 supporting the bracket 101.

[0063] In this embodiment, if Figure 5A As shown, an equilibrium position P1 is found, in which the magnetic attraction Fm generated between the iron core 202b of the coil 202 and the magnet 103 and the gravity Fg acting on the bracket 101 are balanced with each other, and the transport position of the bracket 101 is determined by taking the equilibrium position P1 as a reference.

[0064] The equilibrium position P1 is the position of the top surface of the magnet 103 in a state where the magnetic attraction Fm generated by the iron core 202b and the magnet 103 facing each other and the gravity Fg are balanced with each other. The equilibrium position P1 reflects the relative positional relationship between the respective faces of the iron core 202b and the magnet 103 facing each other in the vertical direction (Z direction). Note that the magnetic attraction Fm is the sum of the magnetic attraction generated between the plurality of iron cores 202b and the plurality of magnets 103. By taking the position P2 of the bottom surface of the iron core 202b as a reference, the equilibrium position P1 is the position to the top surface of the magnet 103 when the magnetic attraction Fm and the gravity Fg acting on the bracket 101 are balanced with each other.

[0065] An example of a procedure for finding the equilibrium position P1 which is a reference for determining the transport position of the carriage 101 will be described.

[0066] First, in Figure 4A In the state shown, a moderately inflated air jack is pre-arranged between the magnet 103 and the iron core 202b. In addition, the upper auxiliary member 205a is pre-detached from the stator 201. At this time, the position of the bracket 101 is a position where the gravity Fg is greater than the magnetic attraction Fm, that is, the top surface position P3 of the magnet 103 is lower than the equilibrium position P1.

[0067] Next, the bracket 101 is lifted to the core 202b side in the Z direction. When the bracket 101 is lifted so that the top surface of the magnet 103 is located above the equilibrium position P1, magnetic attraction acts between the core 202b and the magnet 103, and the bracket 101 is attracted to the core 202b side due to the magnetic attraction.

[0068] When the bracket 101 is attracted to the core 202b side, since a space is created between the core 202b and the magnet 103 by the air jack, a spacer is arranged in the space. The spacer can be made of any material that is not magnetic, such as a resin. Here, a force sensor such as a dynamometer or a load cell is pre-installed on the spacer. The force sensor is arranged to be able to measure the force in the vertical direction (Z direction). The force sensor measures the sum of the gravity Fg acting on the bracket 101 and the magnetic attraction generated between the core 202b and the magnet 103.

[0069] As described above, the air jack is deflated in a state where a space including a force sensor is arranged. Then, since the bracket 101 is attracted to the core 202b side while sandwiching the spacer and the force sensor, the sum of the gravity Fg and the magnetic attraction Fm can be measured by the force sensor. In this way, the bracket 101 is temporarily positioned along the Z direction, and the sum of the gravity Fg and the magnetic attraction Fm is measured.

[0070] In the case where the position of the bracket 101 is changed in the order from the position close to the core 202b to the position far from the core 202b, the force sensor is used to perform measurement at each position to search for the position of the equilibrium position P1. At the position close to the core 202b, since the distance between the core 202b and the magnet 103 is small, the measured magnetic attraction Fm is large. As the thickness of the spacer gradually increases and the above process is repeated to measure at each position by using the force sensor, the measured value of the force sensor gradually approaches 0 Newton. The top surface position of the magnet 103 when the measured value of the force sensor becomes 0 Newton is defined as the equilibrium position P1. In this way, the equilibrium position P1 can be found.

[0071] It is noted that the equilibrium position P1 can be found even when other components are inserted between the core 202b and the magnet 103. For example, consider storing some coils 202 in a box and arranging them centrally to improve work efficiency. In this case, a part of the box storing the coils 202 is inserted between the core 202b and the magnet 103. In addition, for example, consider the case where the magnet 103 is arranged inside the bracket 101. In this case, a part of the housing of the bracket 101 exists between the core 202b and the magnet 103. Even in these cases, the same considerations can be adopted as long as the equilibrium position P1 is found between the component including the core 202b and the bracket 101 including the magnet 103 by the above procedure and the distance from the other components to the core 202b or the magnet 103 is subtracted therefrom.

[0072] In addition, although the above description uses an example of an air jack, a spacer, and a force sensor as a procedure for finding the equilibrium position P1, the procedure is not limited thereto. Various procedures can be used as long as the Z-direction equilibrium position P1 where the sum of the magnetic attraction Fm and the gravity Fg is 0 Newton can be found by the procedure.

[0073] With respect to the above-mentioned equilibrium position P1, the following positions are considered as the transport positions of the transport bracket 101. That is, the transport position of the bracket 101 may be a position where the position P3 of the top surface of the magnet 103 in the Z direction is closer to the iron core 202b than the equilibrium position P1, a position where the position P3 coincides with the equilibrium position P1, or a position where the position P3 is farther from the iron core 202b than the equilibrium position P1.

[0074] For example, when the carriage 101 is transported at a position closer to the core 202b than the equilibrium position P1 at the position P3, the carriage 101 is tilted to cross the step difference, and a part of the carriage 101 will be too close to the core 202b due to the magnetic attraction and then attached to the core 202b. In this case, if the carriage 101 is transported at this time, the magnet 103 will be damaged due to the impact during the attachment. In addition, the coil 202 will be damaged due to the continuous flow of a large current in the coil 202 due to the strong magnetic attraction that the coil 202 and the carriage 101 are attached together and cannot move.

[0075] In addition, as described above, the magnetic attraction force generated between the magnet 103 and the core 202b is very large. In particular, when transporting a large bracket 101, the number of magnets 103 increases to obtain the thrust required in the transport direction. A large number of magnets 103 makes it more difficult to remove the bracket 101 from the core 202b in the attached state.

[0076] Furthermore, if the carriage 101 is transported at a position where the position P3 coincides with the equilibrium position P1, the direction of the force applied to the carriage 101 in the Z direction changes due to a component change or a component assembly change, etc. As a result, the position of the carriage 101 becomes unstable. Since the position becomes unstable, instability is caused during the transportation of the carriage 101.

[0077] On the other hand, when the top surface position P3 of the magnet 103 drops from the equilibrium position P1, the effect of reducing the deadweight of the carriage 101 by the magnetic attraction force Fm is reduced. In addition, the magnetic flux from the coil 202 is less likely to act on the magnet 103, resulting in a reduced thrust in the transport direction.

[0078] Therefore, the conveying system 1 according to the present embodiment adopts a configuration having the rotating member 108 mounted on the carriage 101 and the auxiliary member 205 receiving the rotating member 108 on the stator 201 side. Figure 4A As shown, in the Z direction, the maximum gap G2 formed between the bottom 108b of the rotating member 108 and the lower auxiliary member 205b is set to be smaller than the gap G1 formed between the iron core 202b and the magnet 103. That is, the position of the bracket 101 including the rotating member 108 and the position of the auxiliary member 205 are adjusted relative to the iron core 202b so that the maximum gap G2 is smaller than the gap G1. The maximum gap G2 is a gap between the bottom 108b of the rotating member 108 and the lower auxiliary member 205b when the top 108a of the rotating member 108 contacts the upper auxiliary member 205a, and the upper auxiliary member 205a restricts the movement of the top 108a of the rotating member 108 to the coil 202 side. Since the maximum gap G2 is smaller than the gap G1, the magnet 103 of the bracket 101 being transported will not be attracted to the iron core 202b of the coil 202.

[0079] Furthermore, in the present embodiment, the position of the bracket 101 including the rotating member 108 and the position of the auxiliary member 205 are adjusted relative to the core 202b so that the top surface position P3 of the magnet 103 is lower than the equilibrium position P1 even at the position where the bracket 101 is closest to the core 202b. The position where the bracket 101 is closest to the core 202b is the position where the top 108a of the rotating member 108 contacts the upper auxiliary member 205a.

[0080] In this embodiment, since the gravity Fg is greater than the magnetic attraction Fm, the bottom 108b of the rotating member 108 of the carriage 101 contacts the lower auxiliary member 205b during the process of transporting the carriage 101. Due to the electromagnetic force between the coil 202 and the magnet 103, the carriage 101 is transported and moves in the X direction while the bottom 108b of the rotating member 108 contacts the lower auxiliary member 205b.

[0081] In this manner, in the present embodiment, the transport position of the carriage 101 is adjusted so that the top surface of the magnet 103 is located below the equilibrium position P1.

[0082] In the conveying system 1 according to the present embodiment having the above-described configuration, since the magnetic attraction force Fm acting on the carriage 101 always acts in the opposite direction with respect to the gravity force Fg acting on the carriage 101, the dead weight of the carriage 101 can be reduced. Since the magnetic attraction force Fm generated between the iron core 202b and the magnet 103 is utilized, the dead weight of the carriage 101 can be reduced without increasing the size or complexity of the device. Since the dead weight of the carriage 101 is reduced and thus the force applied to the rotating member 108 and the auxiliary member 205 can be reduced, waste chips such as contaminants generated from the sliding portion between the rotating member 108 and the auxiliary member 205 can be reduced.

[0083] In this embodiment, since the weight of the carriage 101 is reduced by using the same coil 202 as the coil used to transport the carriage 101, the size of the device is not increased nor is the complexity of the device increased in order to reduce the weight of the carriage 101. In addition, in this embodiment, there are no members that come into contact with other members, such as a belt that suspends the carriage 101, in a direction perpendicular to the transport direction of the carriage 101 and in another direction intersecting the transport direction of the carriage 101. Therefore, in this embodiment, the carriage 101 can be easily moved in the X direction as the transport direction.

[0084] In addition, there is a step difference due to the joints and the like on the auxiliary member 205 on which the rotating member 108 travels. In this embodiment, since the deadweight of the bracket 101 is reduced, even when there is a step difference on the auxiliary member 205, the impact on the bracket 101 when the rotating member 108 passes through the step difference can be reduced.

[0085] In addition, in the present embodiment, since the movement of the rotating member 108 to the coil 202 side is limited by the upper auxiliary member 205a, it is possible to ensure a state where a certain distance is spaced between the iron core 202b and the magnet 103 even in any state of the bracket 101. For example, even in the case where a large bracket 101 equipped with a plurality of magnets 103 approaches the iron core 202b side, since a certain distance state can be ensured, the magnetic attraction force does not become very large. In this way, in the present embodiment, a certain distance state is ensured between the iron core 202b and the magnet 103, so the magnetic attraction force generated between the iron core 202b and the magnet 103 does not become very large. Therefore, according to the present embodiment, it is possible to easily implement maintenance of the transport system 1 including the bracket 101 and the stator 201.

[0086] In addition, in order to improve the travel performance of the carriage 101, a plurality of rotating members 108 may be installed in the carriage 101. In the present embodiment, all or some of the rotating members 108 are in contact with the auxiliary member 205 during transportation. That is, all or some of the plurality of rotating members 108 of the carriage 101 travel between the upper auxiliary member 205a and the lower auxiliary member 205b while contacting each lower auxiliary member 205b of one of the upper auxiliary member 205a and the lower auxiliary member 205b. Therefore, in the present embodiment, oscillation is not likely to occur in the control, and as a result, the response can be improved by increasing the gain.

[0087] As described above, according to the present embodiment, contaminants generated from the sliding portion of the bracket 101 or the stator 201 can be reduced without increasing the size or complexity of the equipment.

[0088] Second embodiment

[0089] Will refer to Fig. 6A and Figure 6B A second embodiment of the present invention is described. Fig. 6A and Figure 6B is a schematic diagram showing a configuration including a carriage 101 and a stator 201 in a conveying system 1 according to the present embodiment when viewed from the X direction. Note that the same components as those in the above-described first embodiment are denoted by the same reference numerals, and description will be omitted or simplified.

[0090] The basic structure of the conveying system 1 according to this embodiment is Figures 1 to 4B The transport system 1 of the first embodiment shown has the same configuration. The transport system 1 according to the present embodiment is different from the transport system 1 according to the first embodiment in the position of the carriage 101 to be transported in the Z direction.

[0091] Fig. 6A 1 is a cross-sectional view showing the adjustment position of the carriage 101 in the Z direction as the adjustment before the carriage 101 is transported in this embodiment. Figure 6B 1 is a cross-sectional view showing the transport position of the carriage 101 in the Z direction as the position of the carriage 101 when transporting the carriage 101 in the X direction in this embodiment.

[0092] First, an example of a procedure for finding the equilibrium position P1 in this embodiment will be described. Fig. 6A In the state shown, a moderately inflated air jack is pre-arranged between the magnet 103 and the core 202b. At this time, the position of the bracket 101 is a position where the magnetic attraction Fm is greater than the gravity Fg, that is, the top surface position P3 of the magnet 103 is above the equilibrium position P1.

[0093] Next, after the bracket 101 is lifted and attracted to the iron core 202b side in the Z direction, the lower auxiliary member 205b is removed. Here, a vertical direction (Z direction) position adjustment mechanism can be set on the lower auxiliary member 205b, and the bracket 101 can be prepared to move so that the top surface position P3 of the magnet 103 is located below the equilibrium position P1. According to this position adjustment mechanism, the top surface position of the magnet 103 can be prevented from being lower than the equilibrium position P1, thereby preventing the bracket 101 from falling during adjustment.

[0094] Next, in the same manner as in the first embodiment, while temporarily positioning using the air jack and the spacer, a force sensor such as a dynamometer is used to measure the sum of the gravity Fg acting on the bracket 101 in the vertical direction and the magnetic attraction Fm generated between the iron core 202b and the magnet 103. As the thickness of the spacer is gradually increased and the above procedure is repeated to measure at each position using the force sensor, the measured value of the force sensor gradually approaches 0 Newton. The top surface position of the magnet 103 when the measured value of the force sensor becomes 0 Newton is defined as the equilibrium position P1. In this way, the equilibrium position P1 can also be found in this embodiment.

[0095] Note that when other members are interposed between the iron core 202 b and the magnet 103 , the same considerations as those of the first embodiment can also be applied to the present embodiment.

[0096] In addition, although an example using the air jack, the spacer, and the force sensor is also taken as a procedure for finding the equilibrium position P1 in this embodiment, various procedures may be adopted in the same manner as in the first embodiment.

[0097] For example, when transported at a position far from the core 202b, the bracket 101 sometimes cannot cross a small step difference due to lack of thrust. If the bracket 101 is transported at this time, the coil 202 for allowing the bracket 101 to cross the step difference will be damaged by continuous flow of a large current.

[0098] Therefore, the conveying system 1 according to the present embodiment adopts a configuration having the rotating member 108 mounted to the carriage 101 and the auxiliary member 205 receiving the rotating member 108 on the stator 201 side in the same manner as in the first embodiment. Fig. 6AAs shown, in the Z direction, the maximum gap G4 formed between the top 108a of the rotating member and the upper auxiliary member 205a is set to be smaller than the gap G1 formed between the core 202b and the magnet 103. That is, the position of the bracket 101 including the rotating member 108 and the position of the auxiliary member 205 are adjusted relative to the core 202b so that the maximum gap G4 is smaller than the gap G1. The maximum gap G4 is the gap between the top 108a of the rotating member 108 and the upper auxiliary frame 205a when the bottom 108b of the rotating member 108 contacts the lower auxiliary member 205b, and the movement of the rotating member 108 to the opposite side of the coil 202 is restricted by the lower auxiliary member 205b. Since the maximum gap G4 is smaller than the gap G1, the magnet 103 of the bracket 101 being transported will not be attracted to the core 202b of the coil 202.

[0099] Furthermore, in the present embodiment, the position of the bracket 101 including the rotating member 108 and the position of the auxiliary member 205 are adjusted relative to the iron core 202b so that the top surface position P3 of the magnet 103 is located above the equilibrium position P1 even at the position where the bracket 101 is farthest from the iron core 202b. The position where the bracket 101 is farthest from the iron core 202b is the position where the bottom 108b of the rotating member 108 contacts the lower auxiliary member 205b.

[0100] In this embodiment, since the magnetic attraction force Fm is greater than the gravity Fg, the top 108a of the rotating member 108 of the carriage 101 contacts the upper auxiliary member 205a during the transportation of the carriage 101. Due to the electromagnetic force between the coil 202 and the magnet 103, the carriage 101 is transported and moved in the X direction while the top 108a of the rotating member 108 contacts the upper auxiliary member 205a.

[0101] In this manner, in the present embodiment, the transport position of the carriage 101 is adjusted so that the top surface of the magnet 103 is located above the equilibrium position P1.

[0102] In the transport system 1 according to the present embodiment having the above-described configuration, the magnetic attraction force Fm acting on the bracket 101 always acts in the opposite direction relative to the gravity force Fg acting on the bracket 101. In addition, in the present embodiment, the magnetic attraction force Fm is greater than the gravity force Fg. Therefore, in the present embodiment, the dead weight of the bracket 101 can be eliminated. Also in the present embodiment, since the magnetic attraction force Fm generated between the iron core 202b and the magnet 103 is utilized in the same manner as in the first embodiment, the dead weight of the bracket 101 can be eliminated without increasing the size or complexity of the device. Since the dead weight of the bracket 101 is eliminated and the force applied to the rotating member 108 and the auxiliary member 205 can be reduced, waste chips as contaminants generated by the sliding portion between the rotating member 108 and the auxiliary member 205 can be reduced.

[0103] Furthermore, in this embodiment, since the deadweight of the bracket 101 is eliminated, even if there is a step difference on the auxiliary member 205, the impact on the bracket 101 when the rotating member 108 passes over the step difference can be reduced in the same manner as in the first embodiment.

[0104] In addition, in this embodiment, a state in which a certain distance is ensured between the iron core 202b and the magnet 103 by the upper auxiliary member 205a is ensured in the same manner as in the first embodiment. Therefore, since the magnetic attraction force generated between the iron core 202b and the magnet 103 does not become very large, maintenance of the conveying system 1 including the bracket 101 and the stator 201 can be easily performed.

[0105] Furthermore, in the present embodiment, since the movement of the rotating member 108 to the opposite side of the coil 202 is restricted by the lower auxiliary member 205b, even when the bracket 101 moves away from the core 202b, the position of the bracket 101 is within a certain distance from the coil 202. Therefore, in the present embodiment, there is no shortage of thrust in the conveying direction of the bracket 101.

[0106] In addition, in the present embodiment, also in the same manner as in the first embodiment, when a plurality of rotating members 108 are mounted on the carriage 101, all or some of the rotating members 108 are in contact with the auxiliary member 205 during transportation. That is, all or some of the plurality of rotating members 108 of the carriage 101 travel between the upper auxiliary member 205a and the lower auxiliary member 205b while in contact with the other of the upper auxiliary member 205a and the lower auxiliary member 205b, that is, each upper auxiliary member 205a. Therefore, according to the present embodiment, the response can be improved by increasing the gain.

[0107] As described above, according to the present embodiment, contaminants generated from the sliding portion between the bracket 101 and the stator 201 can be reduced without causing an increase in the size of the device or an increase in the complexity of the device.

[0108] Third embodiment

[0109] A third embodiment of the present invention will be described. Note that the same components as those in the first and second embodiments described above are denoted by the same reference numerals, and description will be omitted or simplified.

[0110] The basic structure of the conveying system 1 according to this embodiment is Figures 1 to 6B The transport system 1 of the first or second embodiment shown has the same construction.

[0111] In this embodiment, a case where the carriage 101 is transported by applying forces in the X direction and the Z direction to the magnet 103 on the carriage 103 by using the plurality of coils 202 of the coil unit 210 in the configuration of the first or second embodiment will be described. The forces in the X direction and the Z direction applied to the magnet 103 by using the plurality of coils 202 of the coil unit 210 are electromagnetic forces generated by the interaction of the current flowing in the coil 202 with the magnetic field generated by the magnet 103, respectively.

[0112] Symbols used in the following description are defined here. Symbol Iu represents the U-phase current flowing in the coil unit 210. Symbol Iv represents the V-phase current flowing in the coil unit 210. Symbol Iw represents the W-phase current flowing in the coil unit 210. Symbol Q represents the position of the bracket 101 along the X direction. Symbol (Iu, Iv, Iw) represents a current vector having elements of Iu, Iv and Iw. Symbol "·" represents a multiplication symbol.

[0113] like Figure 2 As shown, the center Os in the X-axis direction of the bracket 101 is defined as the origin. In addition, the three magnets 103 arranged in sequence in the X direction are distinguished by being represented as "magnet 103c", "magnet 103a" and "magnet 103b" as needed. The center of magnet 103a is located at the origin (center) Os. The distance between the center of magnet 103b and the center of magnet 103c in the X direction is represented as λ. The center of magnet 103b in the X direction is located at +λ / 2 relative to the origin Os as a reference in the X direction. The center of magnet 103c in the X direction is located at -λ / 2 relative to the origin Os as a reference in the X direction.

[0114] In addition, when the origin of the transport path of the stator 201 is represented by O, the origin O is located at the center of the coil 202 . Figure 2 The state where the center Os of the carriage 101 coincides with the origin O of the transport path is schematically shown.

[0115] In addition, the symbols used in the following description will be defined here. The symbol Iq represents a q-axis current, which is a current that helps to generate a force applied to the bracket 101 in the X direction among the currents flowing in the coil 202. The symbol Id represents a d-axis current, which is a current that helps to generate a force applied to the bracket 101 in the Z direction among the currents flowing in the coil 202. The symbol Fq represents the magnitude of the force applied to the bracket 101 and the magnet 103 in the X direction. The symbol Fd represents the magnitude of the force applied to the bracket 101 and the magnet 103 in the Z direction. The symbol Cq represents the magnitude of the force in the X direction generated per unit q-axis current. The symbol Cd represents the magnitude of the force in the Z direction generated per unit d-axis current. The symbol Cq is a thrust constant in the X direction. The symbol Cd is a thrust constant in the Z direction. In addition, the following equation (2) is defined, in which the phase is θ:

[0116] θ=360·Q / λ…(2)

[0117] Then, Iq and Id are expressed by the following equations (3) and (4), respectively.

[0118] Iq=Iu·sin(θ)+Iv·sin(θ+120°)+Iw·sin(θ+240°)…(3)

[0119] Id=Iu·cos(θ)+Iv·cos(θ+120°)+Iw·cos(θ+240°)…(4)

[0120] Furthermore, Fq and Fd are represented by the following equations (5) and (6), respectively. Fq and Fd are electromagnetic forces applied to magnet 103 by coil 202 of coil unit 210 .

[0121] Cq·Iq=Fq…(5)

[0122] Cd·Id=Fd…(6)

[0123] For example, Figure 2 As shown, when the origin O of the transport path and the center Os of the carriage 101 coincide with each other, Q and θ are respectively 0 as shown in the following equation (7).

[0124] Q=θ=0…(7)

[0125] Taking the case where the origin O and the center Os coincide with each other as an example, in this case, equations (3) and (4) can be modified into the following equations (3-1) and (4-1).

[0126] Iq=Iu·0+Iv·√3 / 2+Iw·(-√3 / 2)…(3-1)

[0127] Id=Iu·1+Iv·(-1 / 2)+Iw·(-1 / 2)…(4-1)

[0128] In the above example, the case where the current vector represented by the following equation (8) is applied to the coil unit 210 as the current vector (Iu, Iv, Iw) is considered.

[0129] (Iu, Iv, Iw)=(-1.0[A], 0.5[A], 0.5[A])…(8)

[0130] In this case, Iq and Id are calculated according to the following equations (3-2) and (4-2), respectively.

[0131] Iq=-1.0·0+0.5·√3 / 2+0.5·(-√3 / 2)=0[A]…(3-2)

[0132] Id=-1.0·1+0.5·(-1 / 2)+0.5·(-1 / 2)=-3 / 2[A]…(4-2)

[0133] Here, when Cq is 20√3[N / A] and Cd is 20[N / A], (Fq, Fd) is as shown in the following formula (9).

[0134] (Fq, Fd)=(0[N],-30[N])…(9)

[0135] When the Z direction is used as a reference, Fd is generated in the same direction as gravity.

[0136] Next, consider a case where a current vector whose phase is shifted by 90 degrees expressed by the following equation (10) is applied to the coil unit 210 .

[0137] (Iu,Iv,Iw)=(0[A],√3 / 2[A],-√3 / 2[A])…(10)

[0138] Then, Iq and Id are calculated according to the following equations (3-3) and (4-3), respectively.

[0139] Iq=0·1+(√3 / 2)·(√3 / 2)+(-√3 / 2)·(-√3 / 2)=3 / 2[A]…(3-3)

[0140] Id=0·1+(√3 / 2)·(-1 / 2)+(-√3 / 2)·(-1 / 2)=0[A]…(4-3)

[0141] Here, when Cq is 20√3[N / A] and Cd is 20[N / A], (Fq, Fd) is expressed as in the following formula (11).

[0142] (Fq,Fd)=(30√3[N],0[N])…(11)

[0143] When the X direction is used as a reference, Fq is generated in the conveying direction. That is, even in the case of the same position of the bracket 101, the force Fq in the X direction and the force Fd in the Z direction can be controlled by changing the phase of the applied current. The coil controller 302 as a control device can control the force Fq in the X direction and the force Fd in the Z direction acting on the bracket 101 by changing the value and phase of the current applied to the coil unit 210.

[0144] In use Figures 1 to 4B In the linear motor transport system 1 shown, the force Fq in the transport direction (X direction) is increased by supplying the q-axis current Iq, and the force Fd in the Z direction (ie, the direction perpendicular to the coil 202) is increased by supplying the d-axis current Id.

[0145] In this embodiment, the orientation of the force Fd in the Z direction applied to the carriage 101 can be controlled according to the manner in which the carriage 101 is transported. That is, the orientation of the force Fd in the Z direction can be changed for the case where the carriage 101 is transported as in the first embodiment and for the case where the carriage 101 is transported as in the second embodiment.

[0146] First, when the carriage 101 is transported with the top surface of the magnet 103 below the equilibrium position P1 as in the first embodiment, a d-axis current is provided to apply a force Fd to the carriage 101 in the same direction as the gravity to implement the transport. By implementing the transport using such control, the position of the carriage 101 is stabilized because the bottom 108b of the rotating member 108 of the carriage 101 is pushed against the lower auxiliary member 205b. In the case of a stable position, since the gap G2 between the rotating member 108 and the auxiliary member 205 can be small at the time of initial adjustment, the carriage 101 can be transported near the equilibrium position P1. By transporting the carriage 101 near the equilibrium position P1 where the magnetic attraction force Fm and the gravity Fg are balanced with each other, the force applied to the rotating member 108 or the auxiliary member 205 can be reduced, and the generation of debris as contaminants in their sliding parts can be reduced. In addition, since the force Fd is continuously applied in the Z direction, the position of the carriage 101 is stabilized, and as a result, the workpiece 102 can be processed with high precision.

[0147] On the other hand, when the carriage 101 is transported in a state where the top surface of the magnet 103 is located above the equilibrium position P1 as in the second embodiment, the sign of the d-axis current Id is changed to be opposite to that in the first embodiment. This causes the force Fd to always be applied to the carriage 101 in a direction opposite to the gravity. By transporting using such control, since the top 108a of the rotating member 108 of the carriage 101 is pushed against the upper auxiliary member 205a, the same advantageous effect as described above can be obtained.

[0148] Note that, regarding the d-axis current Id and the q-axis current Iq, the maximum current that can be provided by the coil controller 302 is generally predetermined, respectively. Therefore, the coil controller 302 can control the direction of the generated force by changing the phase of the current. That is, by changing the phase of the current, the coil controller 302 can change the ratio of the amount of shunt current according to the force controlled in the Z direction and the force controlled in the X direction.

[0149] For example, when the thrust required in the conveying direction is small, since a small q-axis current is sufficient, the ratio of the amount divided into the d-axis current Id can be increased, and conveying can be performed while pushing the rotating member 108 against the auxiliary member 205. If conveying can be performed under the condition of pushing in one direction, the carriage 101 can overlap the equilibrium position P1.

[0150] In addition, in the present embodiment, when the weight of the carriage 101 changes, stable transportation of the carriage 101 can be performed by controlling the d-axis current. For example, when an idling drive operation is performed without loading the workpiece 102, or when only some of the carriages 101 are modified when transporting a plurality of carriages 101, carriages 101 having different weights can be mixed.

[0151] For example, consider a case where a reduced-weight bracket 101 is mixed during the transportation of a plurality of brackets 101. Since the reduced-weight bracket 101 is lighter in weight, the equilibrium position P1 where the magnetic attraction force Fm and the gravity Fg are balanced with each other moves to a lower position in the reduced-weight bracket 101 than in the non-reduced-weight bracket 101. Figure 4A In the embodiment, the top surface position P3 of the magnet 103 is adjusted to be lower than the equilibrium position P1. However, in the unweighted bracket 101, since the equilibrium position P1 moves to a lower position, the top surface position P3 of the magnet 103 can be higher. Since the top surface position P3 of the magnet 103 is higher than the equilibrium position P1, the heavy bracket 101 will be Figure 4B The light bracket 101 will be transported at the location of Figure 4AIn this way, for each of the carriages 101 that are transported, the height during transportation will be different. Transporting each of the carriages 101 at different heights will result in different time periods required for processing applied from an external device to the workpiece 102, which may cause abnormalities such as failure to maintain a certain quality. In addition, in the case where the weight of the carriage 101 is slightly light, the position of the carriage 101 in the Z direction in the gap G2 may be unstable, and it may travel unstably.

[0152] In these cases, as described above, the d-axis current can be controlled to flow so as to push the cradle 101 in the gravity direction or the magnetic attraction direction to stably transport the cradle 101. That is, according to this embodiment, even if a plurality of cradles 101 having different weights are mixed, each cradle 101 can be transported more stably at a certain height.

[0153] As described above, according to the present embodiment, contaminants generated from the sliding portion of the carriage 101 or the stator 201 can be reduced without increasing the size of the apparatus or increasing the complexity of the apparatus, and the carriage 101 can also be stably transported.

[0154] Fourth embodiment

[0155] Will refer to Figure 7 A fourth embodiment of the present invention is described. Figure 7 1 is a schematic diagram showing a configuration including a carriage 101 and a stator 201 in a conveying system 1 according to the present embodiment when viewed from the X direction. Note that components identical to those in the above-described first to third embodiments are denoted by the same reference numerals, and descriptions thereof will be omitted or simplified.

[0156] The basic structure of the conveying system 1 according to this embodiment is Figures 1 to 6B The transport system 1 of the first or second embodiment shown is the same in configuration. The transport system 1 according to the present embodiment controls the d-axis current Id for applying the force Fd in the Z direction by utilizing the result of detecting the position of the carriage 101 in the Z direction from the sensor when the force Fd in the Z direction is applied to the carriage 101 according to the third embodiment. In addition to the configuration of the transport system 1 according to the first or second embodiment, the transport system 1 according to the present embodiment further has a sensor 206 that detects the position of the carriage 101 in the Z direction.

[0157] like Figure 7As shown, in the conveying system 1 according to the present embodiment, the sensor 206 is attached and mounted to the stator 201. The sensor 206 serves as a detection unit, and detects the position of the carriage 101 in the Z direction, that is, the height of the carriage 101. Specifically, for example, the sensor 206 is a switch such as a photoelectric switch, a magnetic switch, etc., and detects whether the position of the carriage 101 in the Z direction, that is, the height of the carriage 101 is less than or equal to a predetermined threshold value or exceeds the threshold value. In addition, for example, the sensor 206 can be a position sensor such as a light sensor, a magnetic sensor, an eddy current sensor, etc., for example, continuously detecting the position of the carriage 101 in the Z direction.

[0158] The sensor 206 transmits a detection signal indicating a detection result regarding the position of the carriage 101 in the Z direction to the coil controller 302. Each coil controller 302 controls a d-axis current Id for applying a force in the Z direction to the carriage 101 according to the detection signal received from the sensor 206 (the detection signal is a detection result from the sensor 206). Note that the control of the d-axis current Id according to the detection signal may be performed by other control devices such as the integrated controller 301, a dedicated controller, etc. instead of the coil controller 302.

[0159] In this embodiment, the d-axis current Id for applying the Z-directional force Fd to the carriage 101 can be controlled according to the manner of conveying the carriage 101. That is, the control of the d-axis current can be changed between the case where the carriage 101 is conveyed as in the first embodiment and the case where the carriage 101 is conveyed as in the second embodiment.

[0160] First, in the first embodiment, the carriage 101 is transported with the top surface of the magnet 103 below the equilibrium position P1. Here, the switch as described above is installed as the sensor 206. In this case, in response to the detection signal from the sensor 206 indicating that the height of the carriage 101 exceeds the threshold, the coil controller 302 provides the d-axis current Id to control the force Fd in the Z direction, and performs control to push the carriage 101 in the direction of the gravity Fg. That is, the coil controller 302 controls the d-axis current Id to push the bottom 108b of the rotating member 108 against the lower auxiliary member 205b.

[0161] On the other hand, in the second embodiment, the carriage 101 is transported with the top surface of the magnet 103 higher than the equilibrium position P1. Here, the switch as described above is installed as the sensor 206. In this case, in response to the detection signal from the sensor 206 indicating that the height of the carriage 101 is less than or equal to a certain threshold, the coil controller 302 provides a d-axis current to control the force in the Z direction, and performs control to push the carriage 101 in the direction of the magnetic attraction force Fm. That is, the coil controller 302 controls the d-axis current Id to push the top 108a of the rotating member 108 against the upper auxiliary member 205a.

[0162] In this way, the coil controller 302 controls the d-axis current Id according to the height of the carriage 101 detected by the sensor 206 to push the rotating member 108 of the carriage 101 against the lower auxiliary member 205b or the upper auxiliary member 205a. In the present embodiment, in the above-mentioned two conveying methods, by conveying the carriage 101 while pushing the carriage 101 according to the position of the carriage in the Z direction, stable conveyance with reduced unstable movement in the Z direction can be achieved.

[0163] In addition, when a position sensor such as a light sensor, an eddy current sensor, or the like as described above is installed as the sensor 206, the coil controller 302 can control the d-axis current Id based on the continuous detection value of the position of the carriage 101 in the Z direction. Therefore, the coil controller 302 can control the d-axis current Id with high precision, so that the d-axis current Id can be provided when necessary during the transportation of the carriage 101. In this case, since it is no longer necessary to continuously provide the d-axis current, energy efficiency can be improved. Therefore, the heating of the coil 202 or the coil controller 302 can be reduced.

[0164] As described above, according to the present embodiment, contaminants generated from the sliding portion of the carriage 101 or the stator 201 can be reduced without causing an increase in the size or complexity of the apparatus, and the carriage 101 can be stably transported.

[0165] Modified Embodiments

[0166] The present invention is not limited to the above-mentioned embodiments, and various modifications are possible. For example, although the above-mentioned embodiments have been described by taking the structure in which the rotating member 108 is installed on the side of the bracket 101 and the auxiliary member 205 is installed on the side of the stator 201 as an example, the present invention is not limited to this. Compared with the construction of the above-mentioned embodiments, the same beneficial effects as described above can be obtained even when the auxiliary member 205 is installed on the side of the bracket 101 and the rotating member 108 is installed on the side of the stator 201. In this case, a plurality of rotating members 108 can be installed to align along the transport path on the side of the stator 201. As described above, the bracket 101 has one of the rotating member 108 and the auxiliary member 205, and the stator 201 has the other of the rotating member 108 and the auxiliary member 205.

[0167] In addition, in the above-mentioned embodiments, the case where the stator 201 forms a conveying path for conveying the bracket 101 in one direction is described as an example, but the present invention is not limited thereto. As a conveying path for conveying the bracket 101, other types of conveying paths may be formed by the stator 201, for example, a conveying path for reciprocating motion of the bracket 101, a conveying path for circling the bracket 101, etc.

[0168] In addition, although the above-mentioned embodiments are described by taking the case where a single coil controller 302 is connected to each coil unit 210 as an example, the present invention is not limited thereto. The connection between the coil controller 302 and the coil unit 210 can be appropriately changed so that a single coil controller 302 can control multiple coil units 210.

[0169] Furthermore, although the above embodiments describe the case where each coil unit 210 is formed of a group of three coils 202, the present invention is not limited thereto. The number of coils 202 forming the coil unit 210 may be appropriately changed.

[0170] In addition, although in the above-mentioned embodiments, the case where the integrated controller 301 is provided separately from the coil controller 302 is described as an example, the present invention is not limited thereto. The coil controller 302 may have all or part of the functions of the integrated controller 301, or may have the function of controlling the entire conveying system 1. The functions of the integrated controller 301 and the coil controller 302 may be implemented by one or more control devices.

[0171] In addition, although the encoder 204 is connected to the coil controller 302 in the above embodiments, the present invention is not limited thereto. The encoder 204 may be connected to and controlled by a controller provided separately from the encoder 204 and dedicated to the encoder 204.

[0172] Other embodiments

[0173] The embodiments of the present invention may also be implemented by a computer of a system or device, the computer reads and executes computer executable instructions (e.g., one or more programs) recorded on a storage medium (which may also be more completely referred to as a "non-transitory computer-readable storage medium") to perform the functions of one or more of the above embodiments, and / or the computer includes one or more circuits (e.g., application-specific integrated circuits (ASICs)) for performing the functions of one or more of the above embodiments; the embodiments of the present invention may also be implemented by a method executed by a computer of a system or device, for example, reading and executing computer executable instructions from a storage medium to perform the functions of one or more of the above embodiments and / or controlling one or more circuits to perform the functions of one or more of the above embodiments. The computer may include one or more processors (e.g., a central processing unit (CPU), a microprocessing unit (MPU)), and may include a network composed of separate computers or separate processors to read and execute computer executable instructions. Computer executable instructions may be provided to the computer, for example, from a network or a storage medium. The storage medium may include, for example, a hard disk, a random access memory (RAM), a read-only memory (ROM), a memory of a distributed computing system, an optical disk (such as a compact disc (CD), a digital versatile disc (DVD), or a Blu-ray disc (BD) TM ), flash memory devices, memory cards, etc.

[0174] While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all modifications and equivalent structures and functions.

Claims

1. A vapor deposition apparatus comprising: A stator having a plurality of coils arranged along a conveying direction, wherein each of the plurality of coils comprises a winding and an iron core; a mover having a plurality of magnets arranged to face the plurality of coils and configured to move in a conveying direction by an electromagnetic force generated between the plurality of coils and the magnets; and a vapor deposition source disposed below the mover and configured to perform deposition on a substrate held by the mover; wherein the stator has one of a first conveying member and a second conveying member, the first conveying member and the second conveying member guiding the movable member in a conveying direction, Wherein, the first transport component is a track-type component, wherein the second conveying member is a rotating member that rotates while in contact with the first conveying member, The mover has the other of the first conveying member and the second conveying member, and the magnetic attraction between the iron core and the magnet reduces at least a part of the gravity generated in the mover, and Here, the movable member is transported in a state where the second transport member contacts the lower transport member or the upper transport member according to the transport position.

2. The vapor deposition apparatus according to claim 1, in, The stator has a first conveying member, The mover has a second transport member. The transport position of the mover is adjusted so that the top surface of the magnet is located below the equilibrium position, and Here, the movable member is transported in a state where the second transport member is in contact with the lower transport member.

3. The vapor deposition apparatus according to claim 2, wherein: A first gap formed between the bottom of the second conveying member and the lower conveying member is smaller than a second gap formed between the iron core and the magnet.

4. The vapor deposition apparatus according to claim 1, in, The stator has a first conveying member, The mover has a second transport member. The transport position of the mover is adjusted so that the top surface of the magnet is located above the equilibrium position, and Here, the movable member is transported in a state where the second transport member is in contact with the upper transport member.

5. The vapor deposition apparatus according to claim 4, wherein: A first gap formed between an upper portion of the second conveying member and the upper conveying member is smaller than a second gap formed between the iron core and the magnet.

6. The vapor deposition apparatus according to claim 1, wherein: The plurality of coils are arranged above the magnet and arranged to be able to face the magnet.

7. The vapor deposition apparatus according to claim 1, in, The second conveying member includes a plurality of second conveying members, and Wherein, all or some of the plurality of second conveying members are in contact with the lower conveying member or the upper conveying member.

8. The vapor deposition device according to claim 1 further includes a control device, which supplies current to the coil to generate a force in a direction to eliminate the gravity acting on the mover, so that the second conveying member is pressed against the lower conveying member or the upper conveying member, and the mover moves along the conveying direction.

9. The conveying system according to claim 9, further comprising a detection unit, the detection unit detecting the height of the mover, in, The control device controls the current according to the detection result from the detection unit.

10. A processing system comprising: The vapor deposition apparatus according to any one of claims 1 to 9; and Processing equipment processes the workpieces transported by the mover.

11. A method for manufacturing an article by using the processing system according to claim 10, the method comprising the steps of: Use a mover to transport the workpiece; and The workpiece transported by the mover is processed by a processing device.

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