Radiation light source and optical apparatus

Abstract

The invention provides a radiation light source and optical equipment. The radiation light source comprises a cavity, a laser, a first optical element, an excitation device, a second optical element and a collection unit. The cavity accommodates an ionizable medium. The laser and the first optical element are located on one side of the cavity in the first direction, and the laser emits a first laser beam to the first optical element. The first optical element is provided with a first focus located in the cavity, reflects the first laser beam to form a second laser beam, and focuses the second laser beam to the first focus. The excitation device ionizes the ionizable medium around the first focus and forms a first light-emitting area, and the first light-emitting area emits first radiation light from the first focus. The second optical element and the collecting unit are located on one side or two opposite sides of the cavity in the second direction, and the second direction intersects with the first direction. The second optical element couples the first radiation light to the collection unit such that the first radiation light is transmitted in the collection unit. The light-emitting power is high.

Description

Technical Field

[0001] The present application relates to the field of light source technology, and in particular to a radiation light source and an optical device. Background Art

[0002] Optical devices are widely used in the semiconductor industry. Radiant light sources are used in optical devices, and their luminous power and radiant brightness have a great influence on the performance of the optical devices. With the rapid development of the semiconductor industry, there are higher requirements for the performance of radiant light sources used in optical devices. Laser driven white light source (LDLS) is a type of radiant light source, which is widely used due to its high stability, high radiant brightness and long life. However, this type of radiant light source still has the defects of unsatisfactory light source power and radiant brightness. Summary of the invention

[0003] The present application provides a radiation light source and an optical device. The radiation light source is applied to the optical device. The radiation light source and the optical device provided by the present application are intended to reduce the loss of radiation light emitted by the radiation light source and to improve the light source power and radiation brightness of the radiation light source.

[0004] In a first aspect, an embodiment of the present application provides a radiation light source, which includes a cavity, a laser, a first optical element, an excitation device, a second optical element, and a collection unit. The cavity is used to accommodate an ionizable medium. The laser and the first optical element are located on one side of the cavity in a first direction, and the laser is used to emit a first laser beam to the first optical element. The first optical element has a first focus, and the first focus is located in the cavity. The first optical element is used to reflect the first laser beam and form a second laser beam, and focus the second laser beam to the first focus. The excitation device is used to ionize the ionizable medium around the first focus and form a first light-emitting area, and the first light-emitting area emits a first radiation light from the first focus. The second optical element and the collection unit are located on one side or two opposite sides of the cavity in a second direction, and the second direction intersects with the first direction. The second optical element is used to couple the first radiation light to the collection unit so that the first radiation light is transmitted in the collection unit.

[0005] In the radiation light source provided in the embodiment of the present application, the ionizable medium in the cavity (specifically, the ionizable medium around the first focus) can be pumped only by the first optical element. In this way, not only the participation of too many optical elements is avoided, the structure is simple, and the processing cost is low, which is conducive to reducing the processing cost of the radiation light source, and is conducive to reducing the energy loss of the first laser beam emitted by the laser during transmission, and is conducive to improving the pumping efficiency; moreover, after the ionizable medium around the first focus is ionized by the excitation device and the first light-emitting area is formed, the spot formed by the second laser beam focused to the first focus by the first optical element is smaller, which is conducive to improving the light power and light brightness of the first light-emitting area, and further conducive to improving the light source power and radiation brightness of the radiation light source.

[0006] In addition, the first radiation light emitted from the first light-emitting area can be coupled to the collection unit only through the second optical element, so as to realize the collection of the first radiation light. The design that the laser and the first optical element are located on one side of the cavity in the first direction, and the second optical element and the collection unit are located on one side or two opposite sides of the cavity in the second direction ensures that the second optical element and the collection unit are spaced from the second laser beam, so as to avoid the second optical element and the collection unit being located on the optical path of the second laser beam. On the one hand, it can avoid interfering with the focusing of the second laser beam on the first light-emitting area, which is beneficial to improve the luminous power and luminous brightness of the first light-emitting area. On the other hand, it can avoid the second laser beam being coupled to the collection unit during the process of the second optical element coupling the first radiation light emitted from the first light-emitting area to the collection unit, thereby avoiding the loss of the first radiation light due to the separation of the first radiation light and the second laser beam, which is beneficial to improve the collection efficiency of the collection unit for the first radiation light emitted from the first light-emitting area.

[0007] In a possible implementation manner, the second optical element and the collecting unit are both spaced apart from the second laser beam.

[0008] In a possible implementation, the radiation light source includes an auxiliary optical element, the auxiliary optical element has a convergence focus point, the convergence focus point is located in the cavity and is located on one side of the second laser beam, and is spaced apart from the first focus point, the auxiliary optical element is used to reflect the second laser beam emitted from the cavity from the first focus point to form a third laser beam, and focus the third laser beam to the convergence focus point;

[0009] The excitation device can ionize the ionizable medium around the focusing point and form a second light-emitting area, which emits second radiation light from the focusing point. The second optical element is used to couple the second radiation light to the collecting unit so that the second radiation light is transmitted in the collecting unit.

[0010] The design of the auxiliary optical element can reflect the second laser beam emitted from the first focus of the first light-emitting area out of the cavity and form a third laser beam, and focus the third laser beam to the convergence point located in the cavity to achieve pumping of the ionizable medium around the convergence point. After the ionizable medium around the convergence point is ionized by the excitation device and a second light-emitting area is formed, the second light-emitting area can emit a second radiation light. In this way, the radiation light source has two light-emitting areas, which is conducive to improving the light source power and light brightness of the radiation light source, and is conducive to reducing the energy loss of the second laser beam, and further conducive to reducing the energy loss of the first laser beam emitted by the laser.

[0011] In addition, since the focusing point is located on one side of the second laser beam and is spaced apart from the first focal point of the first optical element, the optical path of the third laser beam can be prevented from overlapping with the optical path of the second laser beam, thereby preventing reflection back to the laser through the first optical element and preventing power fluctuations of the laser, which is beneficial to improving the power stability of the laser and the luminous stability of the radiation light source.

[0012] In a possible implementation manner, the auxiliary optical element and the first optical element are located on two opposite sides of the cavity in the first direction.

[0013] The auxiliary optical element and the first optical element are located on opposite sides of the cavity in the first direction, and the second optical element and the collecting unit are located on one side or on opposite sides of the cavity in the second direction. This avoids the auxiliary optical element interfering with the second optical element in coupling the first radiation light and the second radiation light to the collecting unit, which is beneficial to improving the collection efficiency of the collecting unit for the first radiation light and the second radiation light.

[0014] In a possible implementation manner, in the second direction, the convergence point is located between the first focus and the second optical element, and the first focus and the convergence point are both located on the optical axis of the second optical element.

[0015] Due to the design that in the second direction, the convergence point is located between the second optical element and the first focus, and the first focus and the convergence point are both located on the optical axis of the second optical element, it is ensured that the optical path of the third laser beam will not overlap with the optical path of the second laser beam, causing laser power fluctuations and thereby reducing the power stability of the radiation light source. At the same time, it is ensured that the second radiation light emitted from the second light-emitting area at the convergence point can be stably coupled to the collection unit by the second optical element, thereby avoiding affecting the collection efficiency of the second radiation light emitted from the second light-emitting area at the convergence point, which is beneficial to improving the collection efficiency of the collection unit for the second radiation light emitted from the second light-emitting area.

[0016] In a possible implementation manner, the reflective surface of the auxiliary optical element is provided with an auxiliary anti-reflection film.

[0017] The design of the auxiliary antireflection film is beneficial to increasing the reflection efficiency of the auxiliary optical element for the second laser beam, reducing the energy loss of the second laser beam, improving the pumping efficiency of the ionizable medium around the focus point, increasing the luminous power and brightness of the second light-emitting region, and further increasing the light source power and radiation brightness of the radiation light source.

[0018] In a possible implementation, the collection unit and the second optical element are located on opposite sides of the cavity in the second direction, and the second optical element is configured to reflect and focus the first radiation light and the second radiation light onto the collection unit.

[0019] Alternatively, the second optical element is configured to reflect and collimate the first radiation light and the second radiation light and output them to the collection unit.

[0020] The first radiation light emitted from the first light-emitting region and the second radiation light emitted from the second light-emitting region can be reflected and focused onto the collection unit by the second optical element, thereby achieving the collection of the first radiation light and the second radiation light. The first radiation light emitted from the first light-emitting region and the second radiation light emitted from the second light-emitting region can be reflected and collimated and output to the collection unit by the second optical element, thereby achieving the collection of the first radiation light and the second radiation light. By means of the second optical element, it is beneficial to improve the collection efficiency of the collection unit for the first radiation light and the second radiation light.

[0021] In a possible implementation, the reflection surface of the second optical element is provided with a collection antireflection film.

[0022] The design of the collection antireflection film is beneficial to increasing the reflection efficiency of the second optical element for the first radiation light emitted from the first light-emitting region and the second radiation light emitted from the second light-emitting region, reducing the energy loss of the first radiation light and the second radiation light, and improving the collection efficiency of the collection unit for the first radiation light and the second radiation light.

[0023] In a possible implementation, the collection unit includes an incident light end. The second optical element has a first corresponding focus and a second corresponding focus. The first corresponding focus coincides with the first focus, and the second corresponding focus is located at the incident light end. The second optical element can reflect and focus the first radiation light onto the second corresponding focus, and the second optical element can reflect and focus the second radiation light onto the collection focus. The collection focus is located at the incident light end and is spaced apart from the second corresponding focus.

[0024] The second optical element is an ellipsoid mirror. By designing the positional relationship between the first corresponding focus of the second optical element and the first focus, and the positional relationship between the second corresponding focus and the light incident end of the collection unit, it can be ensured that the first radiation light emitted from the first light-emitting area from the first focus (i.e., the first corresponding focus) can be reflected by the second optical element and focused to the collection unit. Since the second optical element can reflect and focus the second radiation light emitted from the second light-emitting area from the convergence point to the collection focus; and since in the second direction, the convergence point is located between the second optical element and the first focus, and the first focus and the convergence point are both located on the optical axis of the second optical element; it can be ensured that the collection focus is located at the light incident end of the collection unit, thereby ensuring that the second radiation light emitted from the second light-emitting area at the convergence point can be stably reflected by the second optical element and focused to the collection unit. Thus, the collection of the first radiation light and the second radiation light is achieved. In addition, since the first optical element is an ellipsoid mirror, the ellipsoid mirror not only has stable performance, but also has low processing cost, is easy to mass produce, and is conducive to reducing the processing cost of the radiation light source.

[0025] In a possible implementation, the second optical element has a first corresponding focus, the first corresponding focus coincides with the first focus, and the collecting unit is located on the optical axis of the second optical element. The second optical element is a parabolic mirror. By designing the positional relationship between the first corresponding focus of the second optical element and the first focus, and the positional relationship between the optical axis of the second optical element and the collecting unit, it can be ensured that the first radiation light emitted from the first focus (i.e., the first corresponding focus) of the first light-emitting area is reflected by the second optical element and collimated and output to the collecting unit. In addition, since in the second direction, the convergence point is located between the second optical element and the first focus, and the first focus and the convergence point are both located on the optical axis of the second optical element; it can be ensured that the second radiation light emitted from the convergence point of the second light-emitting area is reflected by the second optical element and collimated and output to the collecting unit. Thus, the collection of the first radiation light and the second radiation light is achieved. In addition, since the second optical element is a parabolic mirror, the parabolic mirror not only has stable performance, but also has low processing cost, is easy to mass produce, and is conducive to reducing the processing cost of the radiation light source.

[0026] In a possible implementation, the collecting unit is located on a side of the second optical element facing away from the cavity in the second direction, and the second optical element is used to be transmitted by the first radiation light and the second radiation light and collimate the first radiation light and the second radiation light to output to the collecting unit.

[0027] The first radiation light emitted from the first light emitting area and the second radiation light emitted from the second light emitting area can pass through the second optical element, and be collimated by the second optical element and output to the collection unit, so as to collect the first radiation light and the second radiation light. In this way, the second optical element is used to improve the collection efficiency of the collection unit for the first radiation light and the second radiation light.

[0028] In a possible implementation, the second optical element has a first corresponding focus, the first corresponding focus coincides with the first focus, and the collecting unit is located on the optical axis of the second optical element.

[0029] The second optical element is an achromatic lens. By designing the positional relationship between the first corresponding focus and the first focus of the second optical element, and the positional relationship between the optical axis of the second optical element and the collecting unit, it can be ensured that the first radiation light emitted from the first focus (i.e., the first corresponding focus) of the first light-emitting region can pass through the second optical element and be collimated by the second optical element and output to the collecting unit. Also, since in the second direction, the focusing point is located between the second optical element and the first focus, and both the first focus and the focusing point are located on the optical axis of the second optical element; it can be ensured that the second radiation light emitted from the focusing point of the second light-emitting region can pass through the second optical element and be collimated by the second optical element and output to the collecting unit. Thus, the collection of the first radiation light and the second radiation light is achieved. Additionally, since the second optical element is an achromatic lens, the achromatic lens not only has stable performance but also is convenient for mass production and convenient for the processing of the radiation light source.

[0030] In a possible implementation, the laser is a point light source, the laser includes a light-emitting end, the first optical element has a second focus, the second focus is located at the light-emitting end, and the first optical element is configured to reflect the first laser beam emitted by the laser at the second focus to form a second laser beam and focus the second laser beam to the first focus.

[0031] The first optical element is an ellipsoidal mirror. By designing the positional relationship between the second focus and the light-emitting end of the laser, it can be ensured that after the first laser beam emitted by the laser is reflected by the first optical element to form a second laser beam, the second laser beam can be focused by the first optical element to the first focus located in the cavity, realizing the pumping of the ionizable medium around the first focus. Since the first optical element is an ellipsoidal mirror, the ellipsoidal mirror not only has stable performance but also has low processing cost and is convenient for mass production, which is beneficial to reducing the processing cost of the radiation light source.

[0032] In a possible implementation, the laser is a collimated light source, the laser is located on the optical axis of the first optical element, and the first laser beam is parallel to the optical axis of the first optical element.

[0033] The first optical element is a parabolic mirror. The first laser beam emitted by the laser is emitted from the laser to the first optical element, and is reflected by the first optical element to form a second laser beam. The second laser beam is focused by the first optical element to a first focal point located in the cavity. By designing the positional relationship between the optical axes of the laser and the first optical element, it can also be ensured that after the first laser beam emitted by the laser is reflected by the first optical element and forms a second laser beam, the second laser beam can be focused by the first optical element to the first focal point located in the cavity, thereby achieving pumping of the ionizable medium around the first focal point. Moreover, since the first optical element is a parabolic mirror, the parabolic mirror not only has stable performance, but also has low processing cost, is easy to mass produce, and is conducive to reducing the processing cost of the radiation light source.

[0034] In a possible implementation manner, a reflection-enhancing film is provided on the reflective surface of the first optical element.

[0035] The design of the anti-reflection film is beneficial to increasing the reflection efficiency of the first optical element to the first laser beam emitted by the laser, reducing the energy loss of the first laser beam emitted by the laser, improving the pumping efficiency of the ionizable medium around the first focus, and improving the luminous power and luminous brightness of the first light-emitting area, thereby helping to improve the light source power and radiation brightness of the radiation light source.

[0036] In one possible embodiment, the excitation device includes a first electrode and a second electrode, at least a portion of the first electrode and at least a portion of the second electrode are located inside the cavity, the first electrode and the second electrode are spaced apart, the first focus is located between the first electrode and the second electrode, and the first electrode and the second electrode can be energized to excite the ionizable medium around the first focus to ionize and form the first light-emitting area.

[0037] On the basis of the second laser beam pumping the ionizable medium around the first focus, the first electrode and the second electrode can be used to stimulate the ionization of the ionizable medium around the first focus to form a first light-emitting area; the first electrode and the second electrode can be used to stimulate the ionization of the ionizable medium around the focal point to form a second light-emitting area, with stable performance, low processing cost and easy mass production.

[0038] In a second aspect, an embodiment of the present application further provides an optical device, comprising a light collecting device and a radiation light source as described in any one of the first aspects, wherein the light collecting device is connected to a collecting unit of the radiation light source. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0040] Figure 1 is a structural block diagram of an optical device provided in an embodiment of the present application;

[0041] Figure 2 It is a structural schematic diagram of a radiation light source provided in an embodiment of the present application;

[0042] Figure 3 yes Figure 2 A schematic structural diagram of a light emitting device of the radiation light source shown;

[0043] Figure 4 yes Figure 3 The light emitting device shown is a schematic structural diagram omitting the pump device;

[0044] Figure 5 yes Figure 3 The schematic diagram of the structure of the pump device of the light emitting device shown in the figure omitting the auxiliary optical elements;

[0045] Figure 6 yes Figure 5 A partial structural schematic diagram of a pump device in another embodiment is shown;

[0046] Figure 7 yes Figure 3 The pump device of the light emitting device shown is a partial structural schematic diagram omitting the laser and the first optical element;

[0047] Figure 8 yes Figure 2 The schematic diagram of the structure of the radiation source shown omits the pump device;

[0048] Fig. 9 yes Figure 2 The structure diagram of the radiation source shown in another embodiment omitting the pump device;

[0049] Fig.10 yes Figure 2 The radiation source shown is a schematic structural diagram of another embodiment in which the pump device is omitted.

[0050] Description of reference numerals:

[0051] 10-light-emitting device; 11-cavity; 12-excitation device; 13-pumping device;

[0052] 100-radiation light source; 10a-ionizable medium; 10b-avoidance area; 121-first electrode; 122-second electrode; 131-laser;

[0053] 132-first optical element; 133-auxiliary optical element;

[0054] 1311-light end;

[0055] 1000-Optical equipment;

[0056] 20-coupling device; 21-second optical element; 22-collecting unit;

[0057] 200-light collecting device; 211-reflecting surface;

[0058] 300 - Power supply. DETAILED DESCRIPTION

[0059] The embodiment of the present application provides a radiation light source and an optical device. The radiation light source is applied to the optical device. In the radiation light source and the optical device using the radiation light source, the loss of the radiation light emitted by the radiation light source is greatly reduced, which is conducive to improving the light source power and radiation brightness of the radiation light source.

[0060] The embodiments of the present application are described below in conjunction with the drawings in the embodiments of the present application.

[0061] See also Figure 1 , Figure 1 It is a structural block diagram of an optical device 1000 provided in an embodiment of the present application.

[0062] Exemplarily, the optical device 1000 is an optical element detection device. In some other embodiments, the optical device 1000 can also be a thin film detection device, a defect detection device, a spectrometer, a monochromator, an ambient light detection device, a hyperspectral imager, a biological analysis instrument, and an electronic product manufacturing device, etc. The optical device 1000 can be applied to semiconductor measurement, semiconductor metrology and detection, film thickness measurement, material property analysis, light emission electron microscope, semiconductor device lighting source and other fields, and this application does not specifically limit this.

[0063] In some embodiments, the optical device 1000 includes a radiation light source 100, a light receiving device 200 and a power supply 300. The radiation light source 100 is used to emit radiation light. Exemplarily, the radiation light source 100 is an LDLS. The light receiving device 200 is connected to the radiation light source 100. The light receiving device 200 is used to receive the radiation light emitted by the radiation light source 100, and process the radiation light emitted by the radiation light source 100 (including but not limited to reflection, focusing, filtering, etc.). In some other embodiments, the light receiving device 200 can also be used to receive the radiation light emitted by the radiation light source 100, and use the radiation light emitted by the radiation light source 100 for detection or processing, which is not specifically limited in the present application. The power supply 300 is electrically connected to the radiation light source 100. The power supply 300 is used to provide electrical energy to the radiation light source 100 so that the radiation light source 100 emits light.

[0064] See also Figure 2 , Figure 3 and Figure 4 , and combined with Figure 1 , Figure 2 It is a schematic structural diagram of a radiation light source 100 provided in an embodiment of the present application. Figure 3 yes Figure 2 The structure diagram of the light emitting device 10 of the radiation light source 100 is shown. Figure 4 yes Figure 3 The light emitting device 10 shown is a schematic structural diagram after omitting the pump device 13 .

[0065] like Figure 1 and Figure 2 As shown, in some embodiments, the radiation light source 100 includes a light emitting device 10 and a coupling device 20. The light emitting device 10 is used to emit radiation light. The coupling device 20 is used to collect the radiation light emitted by the light emitting device 10. Among them, the light emitting device 10 is electrically connected to the power supply 300. The coupling device 20 is connected to the light receiving device 200. The power supply 300 provides electrical energy to the light emitting device 10 so that the light emitting device 10 emits light. That is, the radiation light source 100 emits radiation light through the light emitting device 10. The light receiving device 200 receives the radiation light emitted by the light emitting device 10 through the coupling device 20. That is, the light receiving device 200 receives the radiation light emitted by the radiation light source 100 through the coupling device 20. For ease of description, any two directions of the radiation light source 100 are defined as a first direction (i.e., the X-axis direction shown in the figure) and a second direction (i.e., the Y-axis direction shown in the figure). Among them, the second direction intersects with the first direction. Specifically, the second direction is perpendicular to the first direction. In some other embodiments, the second direction may also be set at an acute angle or an obtuse angle with the first direction.

[0066] like Figure 1 , Figure 3 and Figure 4 As shown, in some embodiments, the light-emitting device 10 includes a cavity 11, an excitation device 12 and a pumping device 13. Exemplarily, the cavity 11 is made of quartz. In some other embodiments, the cavity 11 may also be made of other transparent materials such as glass, which is not specifically limited in the present application. The cavity 11 is used to accommodate an ionizable medium 10a. Exemplarily, the ionizable medium 10a may be an inert gas including but not limited to helium, neon, argon, krypton, xenon, radon, etc. Among them, the gas pressure of the inert gas is greater than 10atm (atmosphere, standard atmospheric pressure) and less than 30atm. In some other embodiments, the ionizable medium 10a may also be other media that are easily ionized, which is not specifically limited in the present application.

[0067] In some embodiments, the excitation device 12 includes a first electrode 121 and a second electrode 122. The first electrode 121 and the second electrode 122 are spaced apart on opposite sides of the cavity 11. Part of the first electrode 121 and part of the second electrode 122 are located inside the cavity 11. In some other embodiments, the first electrode 121 and the second electrode 122 may also be completely located inside the cavity 11. That is, at least part of the first electrode 121 and at least part of the second electrode 122 are located inside the cavity 11, and the first electrode 121 and the second electrode 122 are spaced apart. Among them, the first electrode 121 and the second electrode 122 are both inclined toward the Y-axis direction relative to the X-axis direction. In some other embodiments, the first electrode 121 and the second electrode 122 may also be vertically arranged relative to the X-axis direction. It can be understood that there is an avoidance area 10b between the first electrode 121 and the second electrode 122.

[0068] Exemplarily, the first electrode 121 and the second electrode 122 are made of tungsten-thorium alloy. In some other embodiments, the first electrode 121 and the second electrode 122 may also be made of tungsten or other alloy materials, which is not specifically limited in this application. The first electrode 121 and the second electrode 122 are both electrically connected to the power supply 300. The power supply 300 can supply power to the first electrode 121 and the second electrode 122.

[0069] See also Figure 5 , Figure 6 and Figure 7 , and combined with Figure 2 and Figure 3 , Figure 5 yes Figure 3 The pump device 13 of the light emitting device 10 shown in the figure omits a part of the auxiliary optical element 133 . Figure 6 yes Figure 5 FIG. 1 is a partial structural diagram of a pumping device 13 according to another embodiment. Figure 7 yes Figure 3 The pump device 13 of the light emitting device 10 shown in the figure omits a portion of the laser 131 and the first optical element 132 .

[0070] like Figure 2 , Figure 3 and Figure 5As shown, in some embodiments, the pump device 13 includes a laser 131, a first optical element 132 and an auxiliary optical element 133. The laser 131 and the first optical element 132 are located on one side of the cavity 11 in the X-axis direction (i.e., the first direction), and the auxiliary optical element 133 is located on the side of the cavity 11 facing away from the first optical element 132. That is, the auxiliary optical element 133 and the first optical element 132 are located on opposite sides of the cavity 11 in the X-axis direction (i.e., the first direction). The laser 131 is used to emit a laser beam to the first optical element 132. Specifically, the laser 131 is used to emit a first laser beam L1 to the first optical element 132. Exemplarily, the laser 131 can be a fiber laser. In some other embodiments, the laser 131 can also be a solid laser, a semiconductor laser, etc., which is not specifically limited in this application. The laser 131 includes a light emitting end 1311, the laser beam emitted by the laser 131 is emitted from the light emitting end 1311, and the first laser beam L1 is emitted from the light emitting end 1311. In this embodiment, the laser 131 is a point light source, the light emitting end 1311 is provided with a light emitting hole, the laser beam emitted by the laser 131 is emitted from the light emitting hole of the light emitting end 1311, and the first laser beam L1 is emitted from the light emitting hole of the light emitting end 1311.

[0071] The first optical element 132 is used to reflect the laser beam emitted by the laser 131 and focus it to the avoidance area 10b. Specifically, the first optical element 132 is used to reflect the first laser beam L1 and form the second laser beam L2, and focus the second laser beam L2 to the avoidance area 10b. Exemplarily, the first optical element 132 is an ellipsoid mirror. In some other embodiments, the first optical element 132 may also be other curved mirrors. Among them, the first optical element 132 has a first focus M1 and a second focus M2. The first focus M1 is located in the avoidance area 10b. That is, the first focus M1 is located between the first electrode 121 and the second electrode 122. Among them, the first focus M1 is located at the middle position between the first electrode 121 and the second electrode 122, and in the axial direction of the first electrode 121 and the second electrode 122, the distance between the first focus M1 and the first electrode 121 and the distance between the first focus M2 and the second electrode 122 are equal. In some other embodiments, the first focus M1 may also be located at other positions of the avoidance area 10b. It can be understood that the first focus M1 is located in the cavity 11 . The second focus M2 is located at the light output end 1311 of the laser 131 .

[0072] The light beam emitted by the laser 131 (i.e., the first laser beam L1) is emitted from the second focus M2 toward the first optical element 132, and is reflected by the first optical element 132 to form the second laser beam L2. The second laser beam L2 is focused by the first optical element 132 to the first focus M1 located in the avoidance area 10b, and the second laser beam L2 pumps the ionizable medium 10a around the first focus M1. In other words, the first optical element 132 is used to reflect the first laser beam L1 emitted by the laser 131 at the second focus M2 and form the second laser beam L2, and focus the second laser beam L2 to the first focus M1. It can be understood that the first optical element 132 is used to reflect the first laser beam L1 and form the second laser beam L2, and focus the second laser beam L2 to the first focus M1.

[0073] The first electrode 121 and the second electrode 122 are energized to excite the ionizable medium 10a around the first focus M1 to ionize and form the first light-emitting area S1. In other words, the first electrode 121 and the second electrode 122 can be energized to excite the ionizable medium 10a around the first focus M1 to ionize and form the first light-emitting area S1. In other words, the excitation device 12 is used to ionize the ionizable medium 10a around the first focus M1 and form the first light-emitting area S1. Among them, the first light-emitting area S1 emits the first radiation light L3 from the first focus M1. On the basis of the second laser beam L2 pumping the ionizable medium 10a around the first focus M1, the ionizable medium 10a around the first focus M1 can be excited to ionize and form the first light-emitting area S1 through the first electrode 121 and the second electrode 122, with stable performance, low processing cost, and easy mass production.

[0074] It can be understood that by designing the positional relationship between the second focus M2 and the light output end 1311 of the laser 131, it can be ensured that after the first laser beam L1 emitted by the laser 131 is reflected by the first optical element 132 to form the second laser beam L2, the second laser beam L2 can be focused by the first optical element 132 to the first focus M1 located in the cavity 11, thereby realizing the pumping of the ionizable medium 10a around the first focus M1. In this way, the ionizable medium 10a (specifically, the ionizable medium 10a around the first focus M1) in the cavity 11 can be pumped only by the first optical element 132, which not only avoids the participation of too many optical elements, but also has a simple structure and low processing cost, which is conducive to reducing the processing cost of the radiation light source 100, and is conducive to reducing the energy loss of the first laser beam L1 emitted by the laser 131 during transmission, and is conducive to improving the pumping efficiency; and, after the ionizable medium 10a around the first focus M1 is ionized by the excitation device 12 to form the first light-emitting area S1, the second laser beam L2 reflected by the first optical element 132 and focused to the first focus M1 forms a smaller light spot, which is conducive to improving the light power and light brightness of the first light-emitting area S1, and further conducive to improving the light source power and radiation brightness of the radiation light source 100. In addition, since the first optical element 132 is an ellipsoid mirror, the ellipsoid mirror not only has stable performance, but also has low processing cost, is easy to mass produce, and is conducive to reducing the processing cost of the radiation light source 100. It should be noted that, since the first optical element 132 is an ellipsoidal mirror, the size of the first optical element 132 can be adaptively designed according to the size of the light-emitting hole of the light-emitting end 1311 of the laser 131 .

[0075] It can be understood that the design in which the first focus M1 is located at the middle position between the first electrode 121 and the second electrode 122 is beneficial for the first electrode 121 and the second electrode 122 to excite the ionizable medium 10a around the first focus M1 to ionize, which is beneficial for improving the luminous power and luminous brightness of the first light-emitting area S1, and further beneficial for improving the light source power and radiation brightness of the radiation light source 100.

[0076] In some embodiments, the reflective surface 1321 of the first optical element 132 is provided with an anti-reflection film. The anti-reflection film is used to improve the reflectivity of the first optical element 132. Exemplarily, the anti-reflection film is made of metal materials including but not limited to aluminum, silver or copper, and the present application does not specifically limit this. In the case where the laser beam (i.e., the first laser beam L1) emitted by the laser 131 is emitted from the second focus M2 to the first optical element 132, the first laser beam L1 is emitted to the anti-reflection film, and the first optical element 132 reflects the first laser beam L1 through the anti-reflection film to form a second laser beam L2, and focuses the second laser beam L2 to the first focus M1. The design of the anti-reflection film is conducive to increasing the reflection efficiency of the first optical element 132 to the first laser beam L1 emitted by the laser 131, is conducive to reducing the energy loss of the first laser beam L1 emitted by the laser 131, is conducive to improving the pumping efficiency of the ionizable medium 10a around the first focus M1, is conducive to improving the luminous power and luminous brightness of the first light-emitting area S1, and is conducive to improving the light source power and radiation brightness of the radiation light source 100.

[0077] like Figure 2 and Figure 6 As shown, in some other embodiments, the laser 131 may also be a collimated light source, and the light beam emitted by the laser 131 is a collimated light beam. Correspondingly, the first optical element 132 is a parabolic mirror. Figure 5 Compared with the embodiment shown in the figure, in this embodiment, the first optical element 132 has only one focus. Specifically, the first optical element 132 has only the first focus M1, and the first focus M1 is located in the avoidance area 10b. That is, the first focus M1 is located between the first electrode 121 and the second electrode 122. Among them, the first focus M1 is located in the middle position of the first electrode 121 and the second electrode 122, and in the axial direction of the first electrode 121 and the second electrode 122, the distance between the first focus M1 and the first electrode 121 and the distance between the first focus M2 and the second electrode 122 are equal. In some other embodiments, the first focus M1 may also be located at other positions of the avoidance area 10b. It can be understood that the first focus M1 is located in the cavity 11.

[0078] Among them, the laser 131 is located on the optical axis of the first optical element 132. The first laser beam L1 emitted by the laser 131 is parallel to the optical axis of the first optical element 132 (a small deviation may also be allowed). The first laser beam L1 emitted by the laser 131 is emitted from the light-emitting end 1311 of the laser 131 to the first optical element 132, and is reflected by the first optical element 132 to form a second laser beam L2, and the second laser beam L2 is focused by the first optical element 132 to the first focus M1. The second laser beam L2 can pump the ionizable medium 10a around the first focus M1. It can be understood that the first optical element 132 is used to reflect the first laser beam L1 emitted by the laser 131 and form the second laser beam L2, and focus the second laser beam L2 to the first focus M1. Afterwards, the first electrode 121 and the second electrode 122 are energized to excite the ionizable medium 10a around the first focus M1 to ionize and form the first light-emitting area S1. The first light emitting area S1 emits a first radiation light L3 from a first focus M1.

[0079] By designing the positional relationship between the optical axes of the laser 131 and the first optical element 132, it can also be ensured that after the first laser beam L1 emitted by the laser 131 is reflected by the first optical element 132 and forms the second laser beam L2, the second laser beam L2 can be focused by the first optical element 132 to the first focus M1 located in the cavity 11, thereby achieving the pumping of the ionizable medium 10a around the first focus M1. In this way, the ionizable medium 10a in the cavity 11 (specifically, the ionizable medium 10a around the first focus M1) can be pumped only by the first optical element 132. It not only avoids the involvement of too many optical elements, but also has a simple structure and low processing cost, which is conducive to reducing the processing cost of the radiation light source 100, and is conducive to reducing the energy loss of the first laser beam L1 emitted by the laser 131 during transmission, and is conducive to improving the pumping efficiency of the ionizable medium 10a around the first focus M1; moreover, after the ionizable medium 10a around the first focus M1 is ionized by the excitation device 12 and the first light-emitting area S1 is formed, the second laser beam L2 reflected by the first optical element 132 and focused to the first focus M1 forms a smaller light spot, which is conducive to improving the light power and light brightness of the first light-emitting area S1, and further conducive to improving the light source power and radiation brightness of the radiation light source 100. In addition, since the first optical element 132 is a parabolic mirror, the parabolic mirror not only has stable performance, but also has low processing cost, is easy to mass produce, and is conducive to reducing the processing cost of the radiation light source 100. It should be noted that since the first optical element 132 is a parabolic mirror, the size of the first optical element 132 can be adaptively designed according to the spot diameter of the collimated light beam emitted by the laser 131.

[0080] like Figure 2 , Figure 3 and Figure 7As shown, the auxiliary optical element 133 is used to reflect the laser beam emitted from the first light-emitting area S1 of the cavity 11, and focus it into the avoidance area 10b of the cavity 11. Specifically, the auxiliary optical element 133 is used to reflect the second laser beam L2 emitted from the cavity 11 from the first focus M1 and form a third laser beam L4, and focus the third laser beam L4 into the avoidance area 10b. Exemplarily, the auxiliary optical element 133 is a spherical mirror. In some other embodiments, the auxiliary optical element 133 may also be other curved mirrors, which is not specifically limited in the present application. The auxiliary optical element 133 has a convergence point M3. The convergence point M3 is located in the avoidance area 10b. Specifically, the convergence point M3 is located between the first electrode 121 and the second electrode 122. The convergence point M3 is located on one side of the second laser beam L2, and is spaced apart from the first focus M1 of the first optical element 132. Specifically, in the Y-axis direction (i.e., the second direction), the convergence point M3 is located on one side of the first focus M1 and is spaced apart from the first focus M1. The spacing between the convergence point M3 and the first focus M1 is 100 μm (Micrometre). In some other embodiments, the spacing between the convergence point M3 and the first focus M1 may also be 150 μm, which is not specifically limited in the present application. It can be understood that the convergence point N3 is located in the cavity 11, on one side of the second laser beam L2, and is spaced apart from the first focus M1.

[0081] The second laser beam L2 emitted from the first focus M1 of the first light emitting area S1 out of the cavity 11 is emitted toward the auxiliary optical element 133, and is reflected by the auxiliary optical element 133 to form a third laser beam L4, and the third laser beam L4 is focused by the auxiliary optical element 133 to a convergence point M3 located in the cavity 11, and the third laser beam L4 pumps the ionizable medium 10a around the convergence point M3. It can be understood that the auxiliary optical element 133 is used to reflect the second laser beam L2 emitted from the cavity 11 from the first focus M1 to form the third laser beam L4, and focus the third laser beam L4 to the convergence point M3.

[0082] The first electrode 121 and the second electrode 122 are energized to excite the ionizable medium 10a around the convergence focus M3 to ionize and form the second light-emitting area S2. In other words, the first electrode 121 and the second electrode 122 can be energized to excite the ionizable medium 10a around the convergence focus M3 to ionize and form the second light-emitting area S2. In other words, the excitation device 12 can ionize the ionizable medium 10a around the convergence focus M3 to form the second light-emitting area S2. Among them, the second light-emitting area S2 emits the second radiation light L5 from the convergence focus M3. On the basis of the third laser beam L3 pumping the ionizable medium 10a around the convergence focus M3, the ionizable medium 10a around the convergence focus M3 can be excited to ionize and form the second light-emitting area S2 through the first electrode 121 and the second electrode 122, with stable performance, low processing cost, and easy mass production.

[0083] The design of the auxiliary optical element 133 can reflect the second laser beam L2 emitted from the first light-emitting area S1 of the cavity 11 to form a third laser beam L3, and focus the third laser beam L3 to the convergence point M3 located in the cavity 11, so as to achieve pumping of the ionizable medium 10a around the convergence point M3. After the ionizable medium 10a around the convergence point M3 is ionized by the excitation device 12 and the second light-emitting area S2 is formed, the second light-emitting area S2 can emit the second radiation light L5. In this way, the radiation light source 100 has two light-emitting areas, which is conducive to improving the light source power and light brightness of the radiation light source 100, and is conducive to reducing the energy loss of the second laser beam L2, and further conducive to reducing the energy loss of the first laser beam L1 emitted by the laser 131.

[0084] Moreover, since the focal point M3 is located on one side of the second laser beam L2 and is spaced apart from the first focus M1 of the first optical element 132, the optical path of the third laser beam L4 can be prevented from overlapping with the optical path of the second laser beam L2, thereby preventing the laser beam L4 from being reflected back to the laser 131 through the first optical element 132, and preventing the laser 131 from experiencing power fluctuations, which is beneficial to improving the power stability of the laser 131 and the light emission stability of the radiation light source 100. In addition, since the auxiliary optical element 133 is a spherical mirror, the spherical mirror not only has stable performance, but also has low processing cost, is easy to mass produce, and is beneficial to reducing the processing cost of the radiation light source 100.

[0085] In some embodiments, the reflective surface 1331 of the auxiliary optical element 133 is provided with an auxiliary anti-reflection film. The auxiliary anti-reflection film is used to improve the reflectivity of the auxiliary optical element 133. Exemplarily, the auxiliary anti-reflection film is made of metal materials including but not limited to aluminum, silver or copper, and the present application does not specifically limit this. When the second laser beam L2 is emitted from the cavity 11 from the first focus M1 and directed toward the auxiliary optical element 133, the second laser beam L2 is directed toward the auxiliary anti-reflection film, and the auxiliary optical element 133 reflects the second laser beam L2 through the auxiliary anti-reflection film to form a third laser beam L4, and focuses the third laser beam L4 to the convergence point M3, thereby pumping the ionizable medium 10a around the convergence point M3. The design of the auxiliary anti-reflection film is beneficial to increasing the reflection efficiency of the auxiliary optical element 133 to the second laser beam L2, reducing the energy loss of the second laser beam L2, improving the pumping efficiency of the ionizable medium 10a around the focal point M3, and improving the luminous power and luminous brightness of the second light-emitting area S2, thereby improving the light source power and radiation brightness of the radiation light source 100.

[0086] See also Figure 8 , Fig. 9 and Fig.10 , and combined with Figure 1 and Figure 2 , Figure 8 yes Figure 2 The structural diagram of the radiation source 100 shown omits the pump device 13 . Fig. 9 yes Figure 2 The radiation source 100 shown is a schematic structural diagram of another embodiment in which the pump device 13 is omitted. Fig.10 yes Figure 2 The radiation source 100 shown is a schematic structural diagram of another embodiment in which the pump device 13 is omitted.

[0087] like Figure 1 , Figure 2 and Figure 8 As shown, in some embodiments, the coupling device 20 includes a second optical element 21 and a collecting unit 22. The second optical element 21 is located on one side of the cavity 11 in the Y-axis direction (i.e., the second direction). That is, the second optical element 21 and the first optical element 132 are located on two adjacent sides of the cavity 11. Among them, in the Y-axis direction, the second optical element 21 is located on the side of the convergence point M3 facing away from the first focus M1. It can be understood that in the Y-axis direction (i.e., the second direction), the convergence point M3 is located between the first focus M1 and the second optical element 21, and is spaced apart from the first focus M1. Among them, the first focus M1 and the convergence point M3 are both located on the optical axis of the second optical element 21.

[0088] The collecting unit 22 is located on the side of the cavity 11 facing away from the second optical element 21 in the Y-axis direction (i.e., the second direction). That is, the collecting unit 22 and the second optical element 21 are located on opposite sides of the cavity 11 in the Y-axis direction (i.e., the second direction). It can be understood that the second optical element 21 and the collecting unit 22 are both spaced apart from the second laser beam L2. The collecting unit 22 is connected to the light collecting device 200. In other words, the light collecting device 200 is connected to the collecting unit 22 of the radiation light source 100. The second optical element 21 is used to couple the radiation light emitted from the cavity 11 to the collecting unit 22 so that the radiation light is transmitted in the collecting unit 22. Specifically, the second optical element 21 is used to couple the first radiation light L3 emitted from the first light-emitting area S1 to the collecting unit 22 so that the first radiation light L3 is transmitted in the collecting unit 22. And the second optical element 21 is used to couple the second radiation light L5 emitted from the second light-emitting area S2 to the collecting unit 22 so that the second radiation light L5 is transmitted in the collecting unit 22.

[0089] The collecting unit 22 is used to transmit the radiated light to the light receiving device 200. Specifically, the collecting unit 22 is used to transmit the first radiated light L3 and the second radiated light L5 to the light receiving device 200. In other words, the light receiving device 200 collects the radiated light emitted from the cavity 11 through the collecting unit 22. Among them, the collecting unit 22 includes a light input end 221. The collecting unit 22 receives the radiated light through the light input end 221. Exemplarily, the collecting unit 22 is an optical fiber. In some other embodiments, the collecting unit 22 may also be other light collecting devices, which is not specifically limited in the present application.

[0090] Exemplarily, the second optical element 21 is an ellipsoidal mirror. In some other embodiments, the second optical element 21 may also be other curved mirrors, which is not specifically limited in the present application. The second optical element 21 is used to reflect and focus the radiation light emitted from the cavity 11 to the collection unit 22. Specifically, the second optical element 21 can reflect and focus the first radiation light L3 emitted from the first light-emitting area S1 at the first focus M1 to the collection unit 22. Among them, the second optical element 21 has a first corresponding focus M4 and a second corresponding focus M5. The first corresponding focus M4 is located in the avoidance area 10b. Specifically, the first corresponding focus M4 coincides with the first focus M1 (a small deviation may also be allowed). The second corresponding focus M5 is located at the light incident end 221 of the collection unit 22.

[0091] The first radiation light L3 emitted from the first light emitting area S1 at the first focus M1 (i.e., the first corresponding focus M4) is emitted from the cavity 11 and emitted to the second optical element 21. The second optical element 21 reflects and focuses the first radiation light L3 to the second corresponding focus M5, that is, reflects and focuses the first radiation light L3 to the light incident end 221 of the collecting unit 22. The first radiation light L3 can be transmitted to the light receiving device 200 through the collecting unit 22. It can be understood that the second optical element 21 can reflect and focus the first radiation light L3 emitted from the first light emitting area S1 from the first focus M1 (i.e., the first corresponding focus M4) to the second corresponding focus M5.

[0092] In addition, the second radiation light L5 emitted by the second light-emitting area S2 at the convergence focus M3 can be emitted from the cavity 11 and emitted to the second optical element 21, and the second optical element 21 can reflect the second radiation light L5 and focus it to the collection focus M6. Among them, the collection focus M6 is located at the light incident end 221 of the collection unit 22. In the Y-axis direction (i.e., the second direction), the collection focus M6 is located on the side of the second corresponding focus M5 facing away from the cavity 11, and is spaced apart from the second corresponding focus M5. In other words, the second optical element 21 can reflect and focus the second radiation light L5 emitted by the second light-emitting area S2 from the convergence focus M3 to the collection focus M6, and the collection focus M6 is located at the light incident end 221 and is spaced apart from the second corresponding focus M5. It can be understood that the second optical element 21 can reflect and focus the second radiation light L5 emitted by the second light-emitting area S2 from the convergence focus M3 to the collection unit 22. The second radiation light L5 can be transported to the light receiving device 200 through the collection unit 22. That is to say, the second optical element 21 is used to reflect and focus the first radiation light L3 and the second radiation light L5 to the collecting unit 22 , and both the first radiation light L3 and the second radiation light L5 can be transmitted to the light receiving device 200 through the collecting unit 22 .

[0093] By designing the positional relationship between the first corresponding focus M4 of the second optical element 21 and the first focus M1, as well as the positional relationship between the second corresponding focus M5 and the light incident end 221 of the collecting unit 22, it can be ensured that the first radiation light L3 emitted from the first light-emitting area S1 from the first focus M1 (i.e., the first corresponding focus M4) can be reflected by the second optical element 21 and focused onto the collecting unit 22.

[0094] Since the second optical element 21 can reflect and focus the second radiation light L5 emitted from the second light emitting area S2 from the convergence focus point M3 to the collection focus point M6; and since in the Y-axis direction (i.e., the second direction), the convergence focus point M3 is located between the second optical element 21 and the first focus point M1, and the first focus point M1 and the convergence focus point M3 are both located on the optical axis of the second optical element 21; it can be ensured that the collection focus point M6 is located at the light incident end 221 of the collection unit 22, thereby ensuring that the second radiation light L5 emitted from the second light emitting area S2 at the convergence focus point M3 can be stably reflected by the second optical element 21 and focused to the collection unit 22. Thus, the first radiation light L3 and the second radiation light L5 are collected.

[0095] It can be understood that the first radiation light L3 emitted from the first light emitting area S1 and the second radiation light L5 emitted from the second light emitting area S2 can be reflected and focused to the collection unit 22 by the second optical element 21, so as to realize the collection of the first radiation light L3 and the second radiation light L5. In this way, the second optical element 21 is used to improve the collection efficiency of the first radiation light L3 and the second radiation light L5 by the collection unit 22. Moreover, the scheme that only the second optical element 21 is needed to realize the collection, on the one hand, avoids the participation of too many optical elements, has a simple structure, and has a low processing cost, which is conducive to reducing the processing cost of the radiation light source 100, and is conducive to reducing the energy loss of the first radiation light L3 and the second radiation light L5 in transmission, and is conducive to improving the collection efficiency of the first radiation light L3 and the second radiation light L5; on the other hand, compared with the existing scheme of realizing the collection of radiation light by a dichroic mirror, this scheme can ensure that all wavelengths of light in the radiation light can be collected, avoid unnecessary loss, and further improve the collection efficiency of the first radiation light L3 and the second radiation light L5. In addition, since the second optical element 21 is an ellipsoidal mirror, the ellipsoidal mirror not only has stable performance but also has low processing cost and is easy to mass produce, which is beneficial to reducing the processing cost of the radiation light source 100 .

[0096] In the Y-axis direction (i.e., the second direction), the convergence point M3 is located between the second optical element 21 and the first focus M1, and the first focus M1 and the convergence point M3 are both located on the optical axis of the second optical element 21. This design ensures that the optical path of the third laser beam L4 will not overlap with the optical path of the second laser beam L2, causing power fluctuations of the laser 131 and thereby reducing the power stability of the radiation light source 100. At the same time, it ensures that the second radiation light L5 emitted from the second light-emitting area S2 at the convergence point M3 can be stably coupled to the collecting unit 22 by the second optical element 21, thereby avoiding affecting the collection efficiency of the second radiation light L5 emitted from the second light-emitting area S2 at the convergence point M3, which is beneficial to improving the collection efficiency of the collecting unit 22 for the second radiation light L5 emitted from the second light-emitting area S2.

[0097] In some embodiments, the reflective surface 211 of the second optical element 21 is provided with a collection anti-reflection film. The collection anti-reflection film is used to improve the reflectivity of the second optical element 21. Exemplarily, the collection anti-reflection film is made of metal materials including but not limited to aluminum, silver or copper, and the present application does not specifically limit this. When the first radiation light L3 emitted from the first light-emitting area S1 from the first focus M1 (i.e., the first corresponding focus M4) is emitted from the cavity 11 and emitted to the second optical element 21, the first radiation light L3 is emitted to the collection anti-reflection film, and the second optical element 21 reflects the first radiation light L3 through the collection anti-reflection film, and focuses the first radiation light L3 to the second corresponding focus M5, so that the collection unit 22 collects the first radiation light L3. When the second radiation light L5 emitted from the second light-emitting area S2 from the focusing point M3 is directed toward the second optical element 21, the second radiation light L5 is directed toward the collecting anti-reflection film, and the second optical element 21 reflects the second radiation light L5 through the collecting anti-reflection film and focuses the second radiation light L5 to the collecting focus M6, so that the collecting unit 22 collects the second radiation light L5.

[0098] The design of the collection anti-reflection film is beneficial to increasing the reflection efficiency of the second optical element 21 for the first radiation light L3 emitted from the first light-emitting area S1 and the second radiation light L5 emitted from the second light-emitting area S2, is beneficial to reducing the energy loss of the first radiation light L3 and the second radiation light L5, and is beneficial to improving the collection efficiency of the collection unit 22 for the first radiation light L3 and the second radiation light L5.

[0099] like Figure 1 and Fig. 9 As shown, in some other embodiments, the second optical element 21 may also be a parabolic mirror, specifically, the second optical element 21 is an off-axis parabolic mirror. In some other embodiments, the second optical element 21 may also be other curved mirrors, which is not specifically limited in the present application.

[0100] Specifically, the second optical element 21 is located on one side of the cavity 11 in the Y-axis direction (i.e., the second direction), and the second optical element 21 and the first optical element 132 are located on two adjacent sides of the cavity 11. In the Y-axis direction (i.e., the second direction), i.e., in the optical axis direction of the second optical element 21, the second optical element 21 is located on the side of the convergence point M3 facing away from the first focus M1. It can be understood that in the Y-axis direction (i.e., the second direction), the convergence point M3 is located between the second optical element 21 and the first focus M1, and is spaced apart from the first focus M1. In the first focus M1 and the convergence point M3 are both located on the optical axis of the second optical element 21. The collecting unit 22 is located on the side of the cavity 11 facing away from the second optical element 21 in the Y-axis direction (i.e., the second direction). That is, the collecting unit 22 and the second optical element 21 are located on opposite sides of the cavity 11 in the Y-axis direction (i.e., the second direction). And the collecting unit 22 is located on the optical axis of the second optical element 21. In the collecting unit 22, the light receiving device 200 is connected.

[0101] The second optical element 21 is used to reflect and collimate the radiation light emitted from the cavity 11 to the collection unit 22. Specifically, the second optical element 21 can reflect and collimate the first radiation light L3 emitted from the first light-emitting area S1 from the cavity 11 from the first focus M1 to the collection unit 22. Among them, the second optical element 21 has only a first corresponding focus M4. The first corresponding focus M4 is located in the avoidance area 10b. Specifically, the first corresponding focus M4 coincides with the first focus M1 (a small deviation may also be allowed).

[0102] The first radiation light L3 emitted from the first light emitting area S1 from the first focus M1 (i.e., the first corresponding focus M4) is emitted from the cavity 11 and emitted to the second optical element 21. Since the first corresponding focus M4 coincides with the first focus M1, the collecting unit 22 is located on the optical axis of the second optical element 21; the second optical element 21 can reflect the first radiation light L3 emitted from the first light emitting area S1 from the first focus M1 (i.e., the first corresponding focus M4) and collimate it to the collecting unit 22; wherein, the first radiation light L3 collimated by the second optical element 21 is parallel to the optical axis of the second optical element 21. That is, the second optical element 21 is used to reflect the first radiation light L3 emitted from the first light emitting area S1 from the first focus M1 and collimate it to the collecting unit 22. The first radiation light L3 can also be transmitted to the light receiving device 200 through the collecting unit 22.

[0103] In addition, the second radiation light L5 emitted from the second light emitting area S2 at the convergence point M3 is emitted from the cavity 11 and emitted to the second optical element 21. Since the convergence point M3 is located between the second optical element 21 and the first focus M1 in the Y-axis direction (i.e., the second direction), and the first focus M1 and the convergence point M3 are both located on the optical axis of the second optical element 21, the collecting unit 22 is located on the optical axis of the second optical element 21; the second optical element 21 can reflect the second radiation light L5 emitted from the second light emitting area S2 from the convergence point M3 and collimate it to the collecting unit 22; wherein, the second radiation light L5 collimated by the second optical element 21 is parallel to the optical axis of the second optical element 21. That is, the second optical element 21 is used to reflect the second radiation light L5 emitted from the second light emitting area S2 from the convergence point M3 and collimate it to the collecting unit 22. The second radiation light L5 can also be transmitted to the light receiving device 200 through the collecting unit 22.

[0104] By designing the positional relationship between the first corresponding focus M4 of the second optical element 21 and the first focus M1, and the positional relationship between the optical axis of the second optical element 21 and the collecting unit 22, it is ensured that the first radiation light L3 emitted from the first focus M1 (i.e., the first corresponding focus M4) of the first light-emitting area S1 is reflected by the second optical element 21 and collimated and output to the collecting unit 22. In addition, since the convergence point M3 is located between the second optical element 21 and the first focus M1 in the Y-axis direction (i.e., the second direction), and the first focus M1 and the convergence point M3 are both located on the optical axis of the second optical element 21; it is ensured that the second radiation light L5 emitted from the convergence point M3 of the second light-emitting area S2 is reflected by the second optical element 21 and collimated and output to the collecting unit 22. Thus, the first radiation light L3 and the second radiation light L5 are collected. In addition, since the second optical element 21 is a parabolic mirror, the parabolic mirror not only has stable performance, but also has low processing cost, is easy to mass produce, and is conducive to reducing the processing cost of the radiation light source 100.

[0105] and Figure 8 Compared with the embodiment shown, Fig. 9The difference in the illustrated embodiment is that the second optical element 21 is configured to reflect and collimate the first radiation light L3 and the second radiation light L5 and output them to the collection unit 22. The first radiation light L3 emitted from the first light-emitting region S1 and the second radiation light L5 emitted from the second light-emitting region S2 can be reflected and collimated by the second optical element 21 and output to the collection unit 22, thereby achieving the collection of the first radiation light L3 and the second radiation light L5. In this way, through the second optical element 21, it is beneficial to improve the collection efficiency of the collection unit 22 for the radiation light. Moreover, only the second optical element 21 is required to implement the collection solution. On the one hand, it avoids the participation of too many optical elements, has a simple structure and low processing cost, which is beneficial to reducing the processing cost of the radiation light source 100, reducing the energy loss of the first radiation light L3 and the second radiation light L5 during transmission, and improving the collection efficiency of the first radiation light L3 and the second radiation light L5. On the other hand, compared with the existing solution for collecting radiation light through a dichroic mirror, this solution can also ensure that light of various wavelengths in the radiation light can be collected, avoiding unnecessary losses, and further improving the collection efficiency of the first radiation light L3 and the second radiation light L5.

[0106] As Figure 1 and Fig.10 shown, in some other embodiments, the second optical element 21 is an achromatic lens. In some other embodiments, the second optical element 21 can also be other aspherical mirrors, and the present application does not make specific limitations in this regard. Specifically, the second optical element 21 is located on one side of the cavity 11 in the Y-axis direction (i.e., the second direction). The second optical element 21 and the first optical element 132 are located on adjacent sides of the cavity 11. Among them, in the Y-axis direction (i.e., the second direction), the second optical element 21 is located on the side of the converging point M3 facing away from the first focus M1. It can be understood that in the Y-axis direction (i.e., the second direction), the converging point M3 is located between the second optical element 21 and the first focus M1 and is spaced apart from the first focus M1. Among them, both the first focus M1 and the converging point M3 are located on the optical axis of the second optical element 21.

[0107] The collection unit 22 is located on the side of the second optical element 21 facing away from the cavity 11 in the Y-axis direction (i.e., the second direction). That is, the cavity 11 and the collection unit 22 are located on opposite sides of the second optical element 21 in the Y-axis direction (i.e., the second direction). The second optical element 21 and the collection unit 22 are located on one side of the cavity 11 in the Y-axis direction (i.e., the second direction). And the collection unit 22 is located on the optical axis of the second optical element 21. Among them, the collection unit 22 is connected to the light receiving device 200.

[0108] The second optical element 21 is used to be transmitted by the radiation light emitted from the cavity 11, and collimated to output the radiation light to the collection unit 22. Specifically, the second optical element 21 is used to be transmitted by the first radiation light L3 emitted from the first focus M1 of the first light-emitting area S1, and collimated to output the first radiation light L3 to the collection unit 22. Among them, the second optical element 21 has only a first corresponding focus M4. The first corresponding focus M4 is located in the avoidance area 10b. Specifically, the first corresponding focus M4 coincides with the first focus M1 (a small deviation may also be allowed).

[0109] The first radiation light L3 emitted from the first light emitting area S1 from the first focus M1 (i.e., the first corresponding focus M4) is emitted from the cavity 11 and toward the second optical element 21. Since the first corresponding focus M4 coincides with the first focus M1, the collecting unit 22 is located on the optical axis of the second optical element 21; the second optical element 21 can be penetrated by the first radiation light L3 emitted from the first light emitting area S1 from the first focus M1 (i.e., the first corresponding focus M4), and collimates the first radiation light L3 and outputs it to the collecting unit 22; wherein, the first radiation light L3 collimated by the second optical element 21 is parallel to the optical axis of the second optical element 21. That is, the second optical element 21 is used to be penetrated by the first radiation light L3 emitted from the first light emitting area S1 from the first focus M1, and collimates the first radiation light L3 and outputs it to the collecting unit 22. The first radiation light L3 can also be transmitted to the light receiving device 200 through the collecting unit 22.

[0110] In addition, the second light emitting area S2 emits the second radiation light L5 at the convergence focus M3. The second radiation light L5 emitted by the second light emitting area S2 at the convergence focus M3 can be emitted to the second optical element 21. Since the convergence focus M3 is located between the second optical element 21 and the first focus M1 in the Y-axis direction (i.e., the second direction), and the first focus M1 and the convergence focus M3 are both located on the optical axis of the second optical element 21, the collecting unit 22 is located on the optical axis of the second optical element 21; the second optical element 21 can be penetrated by the second radiation light L5 emitted from the second light emitting area S2 from the convergence focus M3, and collimate the second radiation light L5 to output to the collecting unit 22; wherein, the second radiation light L5 collimated by the second optical element 21 is parallel to the optical axis of the second optical element 21. That is, the second optical element 21 is used to be penetrated by the second radiation light L5 emitted from the second light emitting area S2 from the convergence focus M3, and collimate the second radiation light L5 to output to the collecting unit 22. The second radiation light L5 can also be transmitted to the light collecting device 200 through the collecting unit 22 .

[0111] By designing the positional relationship between the first corresponding focus M4 of the second optical element 21 and the first focus M1, and the positional relationship between the optical axis of the second optical element 21 and the collecting unit 22, it is ensured that the first radiation light L3 emitted from the first focus M1 (i.e., the first corresponding focus M4) of the first light-emitting area S1 can pass through the second optical element 21, and is collimated by the second optical element 21 and output to the collecting unit 22. In addition, since the convergence point M3 is located between the second optical element 21 and the first focus M1 in the Y-axis direction (i.e., the second direction), and the first focus M1 and the convergence point M3 are both located on the optical axis of the second optical element 21; it is ensured that the second radiation light L5 emitted from the second light-emitting area S2 from the convergence point M3 can pass through the second optical element 21, and is collimated by the second optical element 21 and output to the collecting unit 22. Thus, the collection of the first radiation light L3 and the second radiation light L5 is achieved. In addition, since the second optical element 21 is an achromatic lens, the achromatic lens not only has stable performance, but also is easy to mass produce, and is easy to process the radiation light source 100.

[0112] and Figure 8 Compared with the embodiment shown, Fig.10 The difference of the illustrated embodiment is that the second optical element 21 is used to be transmitted by the first radiation light L3 and the second radiation light L5, and collimates the first radiation light L3 and the second radiation light L5 to the collection unit 22. It can be understood that the first radiation light L3 emitted from the first light-emitting area S1 and the second radiation light L5 emitted from the second light-emitting area S2 can be transmitted through the second optical element 21, and collimated by the second optical element 21 to be output to the collection unit 22, so as to realize the collection of the first radiation light L3 and the second radiation light L5. In this way, the second optical element 21 is used to improve the collection efficiency of the collection unit 22 for the first radiation light L3 and the second radiation light L5. Moreover, the solution that only requires the second optical element 21 to realize the collection not only avoids the involvement of too many optical elements, but also has a simple structure and low processing cost, which is beneficial to reducing the processing cost of the radiation light source 100, and is beneficial to reducing the energy loss of the first radiation light L3 and the second radiation light L5 during transmission, and is beneficial to improving the collection efficiency of the first radiation light L3 and the second radiation light L5; moreover, compared with the existing solution of collecting radiation light through a dichroic mirror, this solution can ensure that all wavelengths of light in the radiation light can be collected, avoiding unnecessary losses, and further improving the collection efficiency of the first radiation light L3 and the second radiation light L5.

[0113] Please refer again Figure 1 , Figure 2 and Figure 7In the radiation light source 100 provided in the embodiment of the present application, the laser 131 and the first optical element 132 are located on one side of the cavity 11 in the first direction (i.e., the X-axis direction), the second optical element 21 and the collecting unit 22 are located on one side or two opposite sides of the cavity 11 in the second direction (i.e., the Y-axis direction), and the second direction (i.e., the Y-axis direction) intersects with the first direction (i.e., the X-axis direction). The auxiliary optical element 133 and the first optical element 132 are located on two opposite sides of the cavity 11 in the first direction (i.e., the X-axis direction).

[0114] The laser 131 emits a first laser beam L1 toward the first optical element 132. The first optical element 132 reflects the first laser beam L1 and forms a second laser beam L2, and focuses the second laser beam L2 to a first focus M1 located in the cavity 11, thereby pumping the ionizable medium 10a around the first focus M1. The second laser beam L2 emitted from the cavity 11 from the first focus M1 is emitted toward the auxiliary optical element 133. The auxiliary optical element 133 reflects the second laser beam L2 and forms a third laser beam L4, and focuses the third laser beam L4 to a convergence point M3 located in the cavity 11. The convergence point M3 is located on one side of the second laser beam L2 and is spaced apart from the first focus M1.

[0115] By energizing the first electrode 121 and the second electrode 122 through the power supply 300, the ionizable medium 10a around the first focus M1 can be excited to ionize and form a first light-emitting region S1, and the first light-emitting region S1 emits a first radiation light L3 from the first focus M1; and by energizing the first electrode 121 and the second electrode 122 through the power supply 300, the ionizable medium 10a around the convergence point M3 can be excited to ionize and form a second light-emitting region S2, and the second light-emitting region S2 emits a second radiation light L5 from the convergence point M3. Then, the power supply 300 can stop energizing the first electrode 121 and the second electrode 122, and the first light-emitting region S1 and the second light-emitting region S2 can continue to emit light under the irradiation of the second laser beam L2 and the third laser beam L4.

[0116] The first radiation light L3 and the second radiation light L5 are both emitted from the cavity 11 and emitted toward the second optical element 21. The second optical element 21 couples the first radiation light L3 and the second radiation light L5 to the collecting unit 22. The collecting unit 22 transmits the received first radiation light L3 and the second radiation light L5 to the light receiving device 200, so that the light receiving device 200 processes the first radiation light L3 and the second radiation light L5 (including but not limited to reflection, focusing, filtering, etc.), or uses the first radiation light L3 and the second radiation light L5 for detection or processing.

[0117] It can be understood that the auxiliary optical element 133 and the first optical element 132 are located on opposite sides of the cavity 11 in the first direction (i.e., the X-axis direction), and the second optical element 21 and the collecting unit 22 are located on one side or on opposite sides of the cavity 11 in the second direction (i.e., the Y-axis direction). This design avoids the auxiliary optical element 133 interfering with the second optical element 21 in coupling the first radiation light L3 and the second radiation light L5 to the collecting unit 22, which is beneficial to improving the collection efficiency of the collecting unit 22 for the first radiation light L3 and the second radiation light L5.

[0118] In the radiation light source 100 provided in the embodiment of the present application, the first laser beam L1 emitted by the laser 131 can be reflected and formed into the second laser beam L2 only by the first optical element 132, and the second laser beam L2 is focused to the first focus M1 located in the cavity 11, so as to realize the pumping of the ionizable medium 10a (specifically the ionizable medium 10a around the first focus M1) in the cavity 11. In this way, not only the participation of too many optical elements is avoided, the structure is simple, and the processing cost is low, which is conducive to reducing the processing cost of the radiation light source 100, and is conducive to reducing the energy loss of the first laser beam L1 emitted by the laser 131 during transmission, and is conducive to improving the pumping efficiency; moreover, after the ionization of the ionizable medium 10a around the first focus M1 by the excitation device 12 and the formation of the first light emitting area S1, the light spot formed by the second laser beam L2 focused to the first focus M1 by the first optical element 132 is small, which is conducive to improving the light emitting power and light emitting brightness of the first light emitting area S1, and further conducive to improving the light source power and radiation brightness of the radiation light source 100.

[0119] In addition, the first radiation light L3 emitted from the first light emitting area S1 can be coupled to the collecting unit 22 only through the second optical element 21, so that the first radiation light L3 can be collected. The laser 131 and the first optical element 132 are located on one side of the cavity 11 in the first direction (i.e., the X-axis direction), and the second optical element 21 and the collecting unit 22 are located on one side or on two opposite sides of the cavity 11 in the second direction (i.e., the Y-axis direction). This ensures that the second optical element 21 and the collecting unit 22 are spaced apart from the second laser beam L2, thereby preventing the second optical element 21 and the collecting unit 22 from being located on the optical path of the second laser beam L2. On the one hand, this can avoid interfering with the focusing of the second laser beam L2 on the first light-emitting area S1, which is beneficial to improving the light-emitting power and brightness of the first light-emitting area S1. On the other hand, it can avoid the second laser beam L2 from being coupled to the collecting unit 22 during the process in which the second optical element 21 couples the first radiation light L3 emitted from the first light-emitting area S1 to the collecting unit 22. This can further avoid the loss of the first radiation light L3 due to the separation of the first radiation light L3 and the second laser beam L2, thereby improving the collection efficiency of the collecting unit 22 for the first radiation light L3 emitted from the first light-emitting area S1.

[0120] The above are only some embodiments and implementation methods of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present invention can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A radiation source, characterized in that: The radiation light source includes a cavity, a laser, a first optical element, an excitation device, a second optical element and a collection unit; The cavity is used to contain an ionizable medium; The laser and the first optical element are located at one side of the cavity in a first direction, and the laser is used to emit a first laser beam toward the first optical element; The first optical element has a first focus, the first focus is located in the cavity, and the first optical element is used to reflect the first laser beam to form a second laser beam, and focus the second laser beam to the first focus; The excitation device is used to ionize the ionizable medium around the first focus and form a first light-emitting area, and the first light-emitting area emits a first radiation light from the first focus; The second optical element and the collecting unit are located on one side or two opposite sides of the cavity in a second direction, the second direction intersects with the first direction, and the second optical element is used to couple the first radiation light to the collecting unit so that the first radiation light is transmitted in the collecting unit.

2. The radiation source according to claim 1, characterized in that The second optical element and the collecting unit are both spaced apart from the second laser beam.

3. The radiation source according to claim 2, characterized in that The radiation light source includes an auxiliary optical element, the auxiliary optical element has a convergence point, the convergence point is located in the cavity and on one side of the second laser beam, and is spaced apart from the first focus, the auxiliary optical element is used to reflect the second laser beam emitted from the cavity from the first focus to form a third laser beam, and focus the third laser beam to the convergence point; The excitation device is capable of ionizing the ionizable medium around the convergence point and forming a second light-emitting area, and the second light-emitting area emits a second radiation light from the convergence point. The second optical element is used to couple the second radiation light to the collecting unit so that the second radiation light is transmitted in the collecting unit.

4. The radiation source according to claim 3, characterized in that The auxiliary optical element and the first optical element are located on two opposite sides of the cavity in the first direction.

5. The radiation source according to claim 3, characterized in that In the second direction, the convergence point is located between the first focus and the second optical element, and both the first focus and the convergence point are located on the optical axis of the second optical element.

6. The radiation source according to any one of claims 3 to 5, characterized in that The reflective surface of the auxiliary optical element is provided with an auxiliary anti-reflection film.

7. The radiation source according to claim 5, characterized in that The collecting unit and the second optical element are located at two opposite sides of the cavity in the second direction, and the second optical element is used for reflecting and focusing the first radiation light and the second radiation light onto the collecting unit; Alternatively, the second optical element is used to reflect and collimate the first radiation light and the second radiation light and output them to the collection unit.

8. The radiation source according to claim 7, characterized in that The reflective surface of the second optical element is provided with a collecting and anti-reflection film.

9. The radiation source according to claim 7, characterized in that The collecting unit includes a light incident end, the second optical element has a first corresponding focus and a second corresponding focus, the first corresponding focus coincides with the first focus, the second corresponding focus is located at the light incident end, the second optical element can reflect and focus the first radiation light to the second corresponding focus, the second optical element can reflect and focus the second radiation light to a collecting focus, the collecting focus is located at the light incident end and is spaced apart from the second corresponding focus.

10. The radiation source according to claim 5, characterized in that The collecting unit is located on a side of the second optical element facing away from the cavity in the second direction. The second optical element is used to be transmitted by the first radiation light and the second radiation light and collimate the first radiation light and the second radiation light to output to the collecting unit.

11. The radiation source according to claim 7 or 10, characterized in that The second optical element has a first corresponding focus, the first corresponding focus coincides with the first focus, and the collecting unit is located on the optical axis of the second optical element.

12. The radiation source according to any one of claims 1 to 5, characterized in that The laser is a point light source, and the laser includes a light-emitting end. The first optical element has a second focus, and the second focus is located at the light-emitting end. The first optical element is used to reflect the first laser beam emitted by the laser at the second focus to form the second laser beam, and focus the second laser beam to the first focus.

13. The radiation source according to any one of claims 1 to 5, characterized in that The laser is a collimated light source, the laser is located on the optical axis of the first optical element, and the first laser beam is parallel to the optical axis of the first optical element.

14. The radiation source according to any one of claims 1 to 5, characterized in that The reflective surface of the first optical element is provided with a reflection-enhancing film.

15. The radiation source according to any one of claims 1 to 5, characterized in that The excitation device includes a first electrode and a second electrode, at least part of the first electrode and at least part of the second electrode are located inside the cavity, the first electrode and the second electrode are spaced apart, the first focus is located between the first electrode and the second electrode, and the first electrode and the second electrode can be energized to excite the ionizable medium around the first focus to ionize and form the first light-emitting area.

16. An optical device, characterized in that: The optical device comprises a light collecting device and the radiation light source according to any one of claims 1 to 15, and the light collecting device is connected to the collecting unit of the radiation light source.

Images