X-ray measuring device for inspecting test object by means of X-ray radiation and method for inspecting test object by means of X-ray radiation

Abstract

The invention relates to an X-ray measuring device (1) for inspecting a test object (20) by means of X-ray radiation, comprising: a rotatable receiving device (2); an X-ray inspection device (3) having at least one X-ray source (4) and at least one X-ray detector (5), the at least one X-ray source (4) and the at least one X-ray detector (5) being arranged on the rotatable receptacle device (2); and at least one positioning device (7) configured to arrange at least one predetermined region of interest (20-1) of the test object (20) in an acquisition region (8) of the X-ray inspection device (3) between the at least one X-ray source (4) and the at least one X-ray detector (5) on an axis of rotation (9) of the rotatable receptacle device (2), and maintaining the at least one predetermined region of interest in the acquisition region during the examination. The invention also relates to a method for inspecting a test object (20) by means of X-ray radiation.

Description

[0001] The invention relates to an X-ray measuring device for examining a test object by means of X-ray radiation, and to a method for examining a test object by means of X-ray radiation.

[0002] It is common practice in the field of industrial metrology to perform quality inspections on test objects, in particular workpieces, after production using non-invasive inspection methods in order to identify deviations from the desired properties. In particular, X-ray radiation can be used for this purpose in order to acquire radiographs of the test object. If the test object is radiographed from different directions, the internal structure (object volume) of the test object can be calculated (reconstructed) within the scope of a computed tomography scan.

[0003] The prior art has disclosed industrial computed tomography (CT) scanners, which are typically configured such that the X-ray source and the X-ray detector are stationary when acquiring radiographs, while the test object to be measured is arranged on a rotating table and rotated by the rotating table (e.g., the VoluMax series of computed tomography scanners of Carl Zeiss AG, https: / / www.zeiss.de / messtechnik / produkte / systeme / computertomographie / volumax.html). Such a computed tomography scanner can be integrated in a production line, wherein, for example, a robot arm loads the test object through a loading door and arranges the test object on a rotating table. A disadvantage of this type of computed tomography scanner is that, even if short CT scanning times of about 1-2 seconds are possible, a considerable proportion (typically about 10 to 20 seconds) is required to load, open and close the door and position the region of interest (ROI) of the test object on the beam path or on the rotating table. The region of interest may contain a part of the test object or its entirety.

[0004] Medical engineering has disclosed gantry systems (see, for example, EP 1 646 316 B1) or C-arm systems (see, for example, US 7 170 972 B2). In these systems, the X-ray source and the X-ray detector rotate around a structurally defined axis of rotation, and the measurement object (a patient in the medical field) is placed in a suitable position on the beam path on a stationary platform and remains stationary during the measurement. A substantial disadvantage of these systems is that access to the measurement area (acquisition area) is greatly restricted. For example, in the case of a gantry system, the maximum diameter of the object to be measured is limited by the central opening in the middle.

[0005] The invention is directed to improving an X-ray measuring device for inspecting a test object by X-ray radiation and a method for inspecting a test object by X-ray radiation. In particular, when inspecting a test object, the shortest possible cycle time should be possible.

[0006] This problem is solved according to the invention by an X-ray measuring device having the features of claim 1 and a method having the features of claim 15. Advantageous configurations of the invention are evident from the dependent claims.

[0007] One of the basic ideas of the present invention is to arrange an X-ray inspection device having at least one X-ray source and at least one X-ray detector on a rotatable receiving seat device. In principle, the rotatable receiving seat device can have any desired form; preferably, the rotatable receiving seat device has the form of a rotatable disk or a rotatable rod. In particular, the X-ray inspection device is arranged on the rotatable receiving seat device so that the rotation axis (and therefore in particular the rotation center) of the rotatable receiving seat device extends through the beam path. In the case of a receiving seat device designed as a rotatable disk, the average propagation direction of the beam path between the at least one X-ray source and the at least one X-ray detector extends in particular parallel to the plane of the rotatable disk. In other words, the active detector surface of the at least one X-ray detector is in particular perpendicular to the plane of the rotatable disk. Therefore, a test object arranged on the rotation axis between the at least one X-ray source and the at least one X-ray detector can be radiographed by the X-ray inspection device. The X-ray inspection device also rotates around the rotation axis due to the rotation of the rotatable receiving seat device, and thus the test object arranged in the acquisition area between the at least one X-ray source and the at least one X-ray detector on the rotation axis (in particular in the rotation center) can be captured from different radiation transmission directions. Furthermore, at least one positioning device is provided and is configured to arrange at least one predetermined region of interest of the test object in a collection area of ​​the X-ray examination device between at least one X-ray source and at least one X-ray detector at the axis of rotation of the rotatable receptacle device and to keep the region of interest in the collection area during the examination. The examined region of interest is in particular kept in the center of rotation of the X-ray examination device by the positioning device and thus radiographs can be acquired from different directions. Thus, the region of interest can in particular be examined by means of a computed tomography scan.

[0008] In particular, an X-ray measuring device for inspecting a test object by X-ray radiation has been developed, comprising: a rotatable receiving seat device; an X-ray inspection device having at least one X-ray source and at least one X-ray detector, the at least one X-ray source and the at least one X-ray detector being arranged on the rotatable receiving seat device; and at least one positioning device, the at least one positioning device being configured to arrange at least one predetermined region of interest of the test object in an acquisition region of the X-ray inspection device between the at least one X-ray source and the at least one X-ray detector at the rotation axis of the rotatable receiving seat device, and to keep the region of interest in the acquisition region during inspection.

[0009] Furthermore, a method for inspecting a test object by X-ray radiation is particularly provided, wherein an X-ray measuring device according to the embodiments described in the present disclosure is used, wherein at least one predetermined region of interest of the test object is arranged in an acquisition area of ​​the X-ray inspection device between the at least one X-ray source and the at least one X-ray detector on the rotation axis of a rotatable receiving seat device using the at least one positioning device, and the region of interest is maintained in the acquisition area during acquisition of at least one radiograph by the at least one positioning device.

[0010] An advantage of the X-ray measuring device is the possibility of obtaining short cycle times and thus in particular the in-line inspection and / or testing of workpieces in a manufacturing line can be improved. In particular, this is possible because an arrangement on a rotating table is no longer necessary, since at least one positioning device arranges the region of interest of the test object in the acquisition region and also holds the region of interest in position in the acquisition region while acquiring the radiographs. In this case, the radiographs are acquired from different directions by rotating a rotatable receiving seat device (e.g. a rotatable disk or a rotatable rod), whereby the X-ray inspection device rotates about an axis of rotation and thus about the region of interest arranged there.

[0011] Furthermore, the disclosed X-ray measuring device advantageously also allows for the inspection of regions of interest of larger test objects. For example, if opposite corners of a larger battery or battery cell should be inspected as respective regions of interest (ROI) (first ROI 1 and then ROI 2), the battery has to be shifted so that first ROI 1 and then ROI 2 are arranged at the center of rotation. In order to allow good radiography of the corners of the battery, the radiation has to pass through the battery at a certain angle. Even for battery dimensions of, for example, approximately 500 mm×150 mm×50 mm and an inclination angle of 45°, it is possible to use the disclosed X-ray measuring device without problems, whereas a gantry system would require a very large center opening and therefore a large distance between X-ray source and X-ray detector (>1000 mm). This will result in fewer photons reaching the X-ray detector than at the optimal shorter distance (e.g., approximately 400 mm), and therefore in this case the gantry system will no longer allow shorter measurement times, particularly since the number of photons incident on the X-ray detector is proportional to the square of the distance between the X-ray source and the X-ray detector.

[0012] In particular, the rotatable receptacle device is accessible from at least one side (the side on which the X-ray examination device is arranged).

[0013] In particular, the rotatable receptacle device can be designed as a rotatable disk. In particular, the rotatable disk is a circular disk, i.e. the outer contour is in particular circular. However, the rotatable disk does not need to have a circular shape in principle; in particular, the outer contour of the rotatable disk can also have any other suitable shape. In particular, the rotatable disk can also be referred to as a (flat) plate.

[0014] X-ray measuring devices are X-ray measuring devices, in particular from industrial metrology. Typical applications of X-ray measuring devices are in particular the quality control of test objects at the end of a production line. In particular, the test objects to be checked are similar, and the same test task is always carried out for a plurality of test objects. However, in principle, it is also possible to use the X-ray measuring device to check different test objects. The test objects are in particular workpieces.

[0015] In particular, the X-ray measuring device is configured to allow a computed tomography measurement. In particular, for this purpose, the X-ray measuring device forms a computed tomography scanner. For this purpose, the X-ray measuring device, more particularly the X-ray inspection apparatus, can also in particular comprise a control device for performing a computed tomography evaluation. In particular, the control device is configured to reconstruct and provide an object volume from radiographs acquired from different directions.

[0016] In particular, the test object is arranged from a direction that is substantially coincident with the axis of rotation by means of at least one positioning device. In particular, it is provided that the at least one positioning device is arranged relative to the rotatable receiving seat device such that the test object can be arranged in a direction perpendicular to the accessible side of the rotatable receiving seat device, perpendicular to the (accessible) plane, or in the case of a rotatable disc, perpendicular to the average propagation direction of the beam path of the X-ray inspection device, and removed from this direction.

[0017] For example, the test object can be a battery or a battery cell. The test object, in particular a battery or a battery cell, is in particular an elongated test object, for example with a side length ratio of approximately 50:15:5. For example, the battery or the battery cell can have dimensions of approximately 500 mm × 150 mm × 50 mm.

[0018] In particular, at least one drive is provided for rotating the rotatable receiving seat device. For example, it can be provided that the rotatable receiving seat device is a disc, and an external tooth or a side tooth gear ring is arranged at the outer circumference of the disc, and a pinion connected to the drive meshes in this gear ring. For example, the drive can be an electric motor.

[0019] The electrical connection for supplying the power line and / or the signal line can have a configuration suitable for a specific embodiment. For example, sliding contacts can be provided such that the rotatable receiving seat device can rotate without restriction. In contrast, if a limit is set for the angular range within which the rotatable receiving seat device can rotate (for example, at least approximately 180°), the electrical connection and / or the signal line can also be designed as a wired connection.

[0020] The embodiment provides for moving at least one X-ray source and / or at least one X-ray detector along a linear axis extending perpendicular to the axis of rotation of the rotatable receiving seat device. In particular, the linear axis extends in the radial direction. This allows changing the distance between at least one X-ray source and at least one X-ray detector. This allows for increased flexibility in defining the magnification, which is not possible in gantry systems and C-arm systems. Due to the movable at least one X-ray source and the movable at least one X-ray detector, the magnification and / or resolution of the region of interest of the test object can be flexibly and as required set. In particular, at least one drive is provided by means of which at least one X-ray source and at least one X-ray detector can be moved along the linear axis. For example, such a drive can be a linear motor or a spindle drive. If the rotatable receiving seat device is designed as a rotatable disc, it is in particular provided that at least one X-ray source and at least one X-ray detector can be moved along a linear axis extending radially with respect to the rotatable disc.

[0021] An embodiment provides that the rotatable receptacle device is arranged such that the axis of rotation of the rotatable receptacle device extends horizontally. This allows the test objects to be supplied horizontally to and removed from the acquisition area of ​​the X-ray inspection device, which is particularly advantageous for integrating the test object inspection into a production line. In this case, the horizontal range of the axis of rotation can also contain a tolerance range.

[0022] An embodiment provides for the rotatable receiving seat device to be designed so that the rotatable receiving seat device has no restrictions on the rotation angle around the rotation axis. In particular, this allows a full rotation, during which, when collecting radiographs, an angular range of at least 360° can be covered. If the rotatable receiving seat device can continue to be rotated continuously, this allows the drive and gear transmission device (teeth, gears, etc.) to be omitted, because it can be managed without acceleration and deceleration when the test object is interchanged. In this case, the rotatable receiving seat device is rotated without stopping while all measurements are performed. Then, electrical connections and / or signal lines are formed, in particular, by sliding contacts.

[0023] An embodiment provides that the X-ray measuring device comprises at least two positioning devices that are operated independently of one another, and a supply and removal device for supplying and removing the test objects to be inspected, which is respectively assigned to each of the at least two positioning devices in each case. This makes it possible to shorten the time periods during which the X-ray inspection device is not in use, since the arrangement of the test objects can be carried out alternately by the at least two positioning devices. While one of the positioning devices removes an already inspected test object from the acquisition area and transfers it to the removal device, the other of the positioning devices may already have arranged another test object in the acquisition area and is holding it there. The removal device and the supply device can also be assigned jointly to the at least two positioning devices.

[0024] An embodiment provides that at least one positioning device comprises a robotic arm. This allows a particularly great flexibility to be achieved, since a switch to different regions of interest and / or test objects can be made particularly easily, in particular without mechanical modification or mechanical reconfiguration. In particular, the robotic arm is a multi-jointed robotic arm with a plurality of translational and / or rotational degrees of freedom.

[0025] The embodiment provides for at least one positioning device to include a positioning turntable. Such a positioning turntable includes a plurality of holders and / or compartments. The test object is arranged on and / or in at least some of the holders and / or compartments. Rotating the positioning turntable allows the region of interest of one of the test objects to be arranged on the axis of rotation in the acquisition region. It may be provided that the holders and / or compartments have at least one positioning device. For example, it may be provided that a rotating table is provided at each holder and / or each compartment, which allows the test object to rotate, for example in order to be able to arrange a plurality of regions of interest of each test object in the acquisition region.

[0026] The embodiment provides for the X-ray measuring device to include a second linear axis, which is arranged perpendicular to the direction of the axis of rotation and perpendicular to the direction of the linear axis, and at least one X-ray detector of the X-ray inspection device can be displaced along this second linear axis. In particular, the second linear axis extends parallel to the active detector surface of at least one X-ray detector. Thus, at least one X-ray detector can be displaced in a direction perpendicular to the axis of rotation. In particular, this allows for a so-called "half-beam scan", in which the active detector surface of the X-ray detector is not arranged centrally with respect to the axis of rotation, but the axis of rotation is displaced in the direction of the edge of the active detector surface, or the region of the test object corresponding to the axis of rotation is imaged in such a way that it is displaced to the edge. In combination with a 360° rotation, this allows an increase in the measurement volume, as if the active detector surface were maximally twice as large.

[0027] The embodiment provides for the X-ray measuring device to include at least one third linear axis, which extends parallel to the axis of rotation, and at least one X-ray source and / or at least one X-ray detector can be displaced along this at least one third linear axis. This allows the beam path to be displaced along the axis of rotation. For example, when using a positioning turntable, this allows test objects of different sizes to be inspected. Then, by means of at least one third linear axis extending parallel to the axis of rotation, the route of the beam path can be flexibly set by displacing the beam path parallel to the axis of rotation. Further, this also allows incremental measurements of larger volumes. In particular, at least one drive is provided by means of which at least one X-ray source and at least one X-ray detector can be moved along a third linear axis extending parallel to the axis of rotation. For example, such a drive can be a linear motor or a spindle drive. The movement of at least one X-ray source and / or at least one X-ray detector can in principle be carried out jointly (i.e., in a mechanically coupled manner) or separately (i.e., apart from each other).

[0028] An embodiment provides that a drive for moving at least one X-ray source and at least one X-ray detector along a linear axis extending perpendicular to the rotation axis of the rotatable receiving seat device is arranged on the outside of the rotatable receiving seat device. Therefore, when the rotatable receiving seat device rotates, the drive does not need to move with the rotatable receiving seat device, thereby reducing complexity and allowing cost savings. Since the same test tasks are usually always performed on similar test objects, modification or movement is rarely required. However, if this is the case, a drive arranged on the outside of the rotatable receiving seat device is used for this purpose. For example, suitable (coupling) elements are provided for this purpose, through which the drive can be coupled to the linear axis and separated from the linear axis.

[0029] An embodiment provides that the X-ray measuring device includes at least one wireless communication interface, which is arranged on a rotatable receiving seat device and is configured to provide radiographs and / or evaluation results (e.g., object volumes reconstructed from the collected radiographs) acquired by at least one X-ray detector. This in particular allows a fast transmission of data to the X-ray detector, which can be managed in particular without sliding contacts for signal lines. For example, the communication interface can meet the Wi-Fi 6 standard (IEEE 802.11ax) and thus make data rates of up to 5 Gbit / s possible. It can also be provided that at least multiple parts of the control device of the X-ray measuring device and / or the X-ray inspection device are arranged on the rotatable receiving seat device and communicate, for example, with an external operating unit or a remote control via a wireless communication interface.

[0030] An embodiment provides that at least one X-ray source is a microfocus X-ray source. Thus, a high resolution can be achieved during radiograph acquisition. In this case, a microfocus X-ray source is in particular an X-ray source in which the active region generating the X-ray radiation has a diameter of between 2 μm and 100 μm.

[0031] An embodiment provides that at least one X-ray source comprises an integral X-ray tube. This results in the following advantages: no high-voltage cables with a large diameter need to be carried during the rotation of the rotatable receptacle device. In contrast, a voltage supply via a slip ring and a sliding contact is sufficient. In the case of an integral X-ray tube, the high-voltage generator is already integrated into the X-ray tube.

[0032] An embodiment provides that at least one X-ray detector is implemented as a direct conversion X-ray detector. Thus, it can be managed without a scintillating layer. This allows the readout speed of the at least one X-ray detector to be increased and thus the overall measurement time can be shortened. Thus, this allows the cycle time in which the test object can be inspected to be shortened. For example, the direct conversion X-ray detector can be a photon counting X-ray detector operating with CdTe as active material. Such an X-ray detector can be read out at a readout rate of >1000 frames / second and thus in the case of measurements using a rotatable receiving seat device and continuous rotation of the X-ray inspection device, motion unsharpness can be reduced.

[0033] An embodiment provides for at least one X-ray source and / or at least one X-ray detector to have fluid cooling. This can improve the performance of at least one X-ray source and / or at least one X-ray detector, since brighter X-ray radiation can be generated and / or detector noise can be reduced. For example, fluid cooling can use water or oil as a medium. In particular, in this case, the cooling circuit is arranged completely on the rotatable disk. For example, in the case of water cooling, the cooling medium can be used in particular to distribute the local heat input over a larger area. If passive cooling by simple pumping through the cooling circuit is insufficient, the cooling medium can be efficiently cooled elsewhere.

[0034] An embodiment provides that the X-ray measurement device includes at least one doorless radiation lock. This eliminates the time required to open and close the door of the radiation lock, and radiographs cannot be collected during this period. This also eliminates the wear caused by the continuous and rapid opening and closing of the door. In particular, the doorless radiation lock is configured to prevent primary X-ray radiation from passing through the doorless radiation lock and ensure that the scattered radiation is sufficiently attenuated so that no radiation is detected outside the radiation lock. In particular, the doorless radiation lock works with screens (displaced relative to each other) that form a type of channel through which X-ray radiation cannot pass but test objects can be supplied and removed. Therefore, the supply and removal of test objects can be separated from the operation of the X-ray inspection device. This can shorten the cycle time.

[0035] An embodiment provides that the X-ray inspection device comprises a plurality of X-ray sources and a plurality of X-ray detectors. This can shorten the time required for the measurement. In particular, this can shorten the cycle time. In particular, the respective beam paths are arranged to be offset around the axis of rotation so that a plurality of radiation transmission directions can be collected simultaneously.

[0036] An embodiment provides for the X-ray measuring device to include at least one collimator and / or at least one aperture element and / or at least one filter element, which are configured to limit X-ray radiation emitted from at least one X-ray source to an active detector surface of at least one X-ray detector.

[0037] An embodiment of the method provides that when arranging at least one predetermined region of interest of the test object in the acquisition area, a predetermined last section of the arrangement trajectory extends along the axis of rotation of the rotatable receiving seat device. This can prevent collisions with at least one X-ray source and / or at least one X-ray detector, in particular when the rotatable receiving seat device is rotated during the arrangement, for example in the case of a continuous rotation of the rotatable receiving seat device.

[0038] A further embodiment of the method provides for the use of at least two positioning devices that are operated independently of one another together with a supply and removal device that is assigned to each of the at least two positioning devices in each case for supplying and removing the test object to be checked, so as to arrange at least one predetermined region of interest of the test object in the acquisition area, wherein the at least two positioning devices are used alternately in the process. This can increase the measuring time relative to the clock time. In particular, this can shorten the time during which no test object can be measured. Overall, this can further shorten the inspection cycle time, in particular per test object. In particular, the at least two positioning devices are robot arms.

[0039] The present invention is explained in more detail below based on preferred exemplary embodiments with reference to the accompanying drawings. In the drawings:

[0040] Figure 1 A schematic diagram showing an embodiment of an X-ray measuring device for inspecting a test object by X-ray radiation;

[0041] Figure 2 shows a schematic diagram for illustrating a rotational movement of a rotatable receptacle device and a movement along a linear axis extending perpendicularly to the rotational axis or radially;

[0042] Figure 3 A schematic diagram showing another embodiment of an X-ray measuring device for inspecting a test object by X-ray radiation;

[0043] Figure 4 A schematic diagram is shown for illustrating additional linear axes; and

[0044] Figure 5 A schematic flow chart of an embodiment of a method for examining a test object by means of X-ray radiation is shown.

[0045] Figure 1A schematic diagram of an embodiment of an X-ray measuring device 1 for examining a test object 20 by X-ray radiation is shown. The X-ray measuring device 1 comprises a rotatable receiving seat device 2 and an X-ray examination device 3 having at least one X-ray source 4 and at least one X-ray detector 5. The rotatable receiving seat device 2 is designed as a rotatable disk, in particular a circular rotatable disk.

[0046] At least one X-ray source 4 and at least one X-ray detector 5 are arranged on the rotatable receiving seat device 2, wherein the at least one X-ray source 4 and the at least one X-ray detector 5 are movable along a linear axis 6 extending perpendicularly to the rotation axis 9 of the rotatable receiving seat device 2. In particular, the at least one X-ray source 4 and the at least one X-ray detector 5 are movable along a linear axis 6 extending radially of the rotatable disk 2.

[0047] In addition, the X-ray measuring device 1 includes at least one positioning device 7, which is configured to arrange at least one predetermined region of interest 20-1 of the test object 20 in an acquisition area 8 of the X-ray inspection device 3 between at least one X-ray source 4 and at least one X-ray detector 5 at the rotation axis 9 of the rotatable receiving seat device 2, and to keep the region of interest in the acquisition area during the inspection.

[0048] In the illustrated embodiment, the X-ray inspection device 3 comprises an X-ray source 4 and an X-ray detector 5. The X-ray source 4 and the X-ray detector 5 are each arranged on a carrier 10, 11, which are guided by two joint guides 12 on the rotatable receiving seat device 2. Each of the carriers 10, 11 is connected to a dedicated drive 14, wherein the drive 14 is particularly designed as a spindle drive. Therefore, the two carriers 10, 11 with the X-ray source 3 and the X-ray detector 4 can be moved separately and independently of each other. The illustrated embodiment of the device is selected by way of example; in principle, the X-ray source 4 and the X-ray detector 5 can also be arranged on the rotatable receiving seat device 2 in other ways.

[0049] In the embodiment shown, the positioning device 7 comprises a positioning turntable 15 having six holders 16 for the test object 20. In particular, it can be provided that the holders 16 can be rotated about a rotation axis in order to be able to rotate the test object 20 arranged on the holders 16 and in this way bring at least one region of interest 20-1 of the test object 20 into a position suitable for measurement.

[0050] In the embodiment shown, provision is made for a gear ring 17 to be arranged on the outer circumference of a rotatable receiving seat device 2 designed as a rotatable disk. A pinion (not shown) of a drive 18, for example an electric motor, meshes in this gear ring 17 and can thus rotate the rotatable receiving seat device 2 about the axis of rotation 9. Thus, the X-ray examination device 3 can be rotated about a region of interest 20-1 of the test object 20 in the acquisition region arranged on the axis of rotation 9 and can thus acquire radiographs of the region of interest 20-1 from different directions. Figure 2 The rotational movement of the rotatable receptacle device 2 about the rotation axis 9 is schematically shown. Figure 2 Furthermore, a movement of the X-ray source 4 and the X-ray detector 5 along a linear axis 6 extending perpendicularly to the rotation axis 9 of the rotatable receptacle device 2 , in particular along a radially extending linear axis 6 , is explained.

[0051] In the embodiment shown, the rotatable receptacle device 2 designed as a rotatable disk comprises in particular a circular base plate 19. The circular base plate 19 is in particular rotatably mounted on a holding device 21, for example by means of an axis and a pivot bearing. The holding device 21 is arranged on a base 22. During use, the axis of rotation 9 extends in particular horizontally, wherein the plane of the rotatable disk extends vertically. This enables the test objects 20 to be supplied to the collection area 8 and removed from the collection area in a horizontal direction.

[0052] In the X-ray measuring device 1, the acquired radiographs are evaluated in a manner known per se. In particular, the X-ray measuring device 1 can be used to carry out a computed tomography measurement. The control device configured for this is not shown for reasons of clarity, but is configured in a manner known per se, in particular for control and evaluation purposes.

[0053] In the embodiment shown, the test object 20 is examined so that the regions of interest 20-1 of the test object 20, in particular the corners of the battery or battery cell, are arranged successively and individually in the acquisition region 8 between the X-ray source 4 and the X-ray detector 5 on the axis of rotation 9 by rotation of the positioning turntable 15 in each case, and the regions of interest remain in this acquisition region during the measurement. Within the measurement range, radiographs are acquired within an angular range of at least 180°, preferably within an angular range of at least 360°, by means of the rotation of the rotatable receiving seat device 2 around the region of interest 20-1. It can be provided that a plurality of regions of interest 20-1 per test object 20 are measured. For this purpose, the holders 16 of the positioning turntable 15 can each be rotated so that the test object 20 can be rotated and different regions of interest 20-1 can be arranged in the acquisition region 8 between the X-ray source 4 and the X-ray detector 5 on the axis of rotation 9. In particular, for the purpose of rotating the holder 16, a drive (not shown) suitable for the respective application can be provided.

[0054] In particular, the X-ray measuring device 1 can be used for quality control in a production line. Test objects 20 that have not yet been inspected can then be fed to the positioning carousel 16 from the side facing away from the rotatable receptacle device 2 and already inspected test objects 20 can be removed.

[0055] It may be provided that the rotatable receptacle device 2 is designed such that it does not have any restrictions on the angle of rotation about the rotation axis 9. The electrical connection and / or the wired signal line is then realized in particular by means of sliding contacts.

[0056] Figure 3 A further embodiment of an X-ray measuring device 1 is shown. In principle, the design of this embodiment is similar to Figure 1 The embodiment shown. Figure 3 The same reference numerals in the figure represent the same Figure 1 and Figure 2 The same features and terms are used in the embodiment. This embodiment provides that the X-ray measuring device 1 comprises at least two positioning devices 7 that are operated independently of one another, and a supply and removal device 23 for supplying and removing the test object 20 to be inspected, which is respectively assigned to each of the at least two positioning devices 7 in each case. The supply and removal device 23 comprises a total of four conveyor belts. The positioning devices 7 each comprise a robot arm 24, in particular a multi-jointed robot arm 24. The robot arm 24 is configured to grip the test object 20, in particular a battery or a battery cell, supplied by the supply and removal device 23, and to arrange a predetermined region of interest 20-1 of the test object 20 in the acquisition region 8 between the X-ray source 4 and the X-ray detector 5 on the axis of rotation 9. After the inspection, i.e. after the acquisition of the radiographs for reconstructing the tomographic object volume, the robot arm 24 transfers the inspected test object 20 back to the supply and removal device 23. In this case, the robot arm 24 operates alternately and can therefore optimally utilize the capacity of the X-ray inspection device 3 in terms of time. In this case, it can be provided that the rotation of the rotatable receptacle device 2 is continuous even if no radiographs are currently being acquired. This prevents repeated acceleration and deceleration of the rotatable receptacle device 2 and thus prevents increased wear of bearings and drives etc.

[0057] Figure 4 FIG. 1 shows a part of another embodiment of an X-ray measuring device 1. In principle, the design of this embodiment is similar to the previous embodiment. In this case, Figure 4 The same reference numerals in the figure represent the same Figures 1 to 3The same features and terms are used in the embodiment. This embodiment provides that the X-ray inspection device 1 includes a second linear axis 25, which is arranged perpendicular to the direction of the rotation axis 9 and perpendicular to the direction of the linear axis 6, and along which at least one X-ray detector 5 of the X-ray inspection device 3 can be displaced. For example, the movement along the second linear axis 25 can be implemented by a suitable drive (not shown), such as a linear motor or a spindle drive.

[0058] Figure 4 A further embodiment is also explained. In this embodiment, it is provided that the X-ray measuring device 1 comprises at least one third linear axis 26, which extends parallel to the rotation axis 9 and along which the X-ray source 4 and / or the X-ray detector 5 can be displaced. For example, the movement along the third linear axis 26 can be implemented by a suitable drive (not shown), for example by a linear motor or a spindle drive.

[0059] It can be provided that a drive for moving the at least one X-ray source 4 and the at least one X-ray detector 5 along a linear axis 6 extending perpendicularly (in particular radially) to the rotation axis 9 of the rotatable receptacle device 2 is arranged outside the rotatable receptacle device 2. A coupling device (not shown) is then provided, by which a mechanical connection to the drive can be established if a movement along the axis is required.

[0060] It can be provided that the X-ray measuring device 1 comprises at least one wireless communication interface (not shown) which is arranged on the rotatable receiving seat device 2 and is configured to provide radiographs acquired by the at least one X-ray detector 5. In this case, sliding contacts for the signal lines are not required.

[0061] It may be provided that at least one X-ray source 4 is a microfocus X-ray source.

[0062] It may be provided that at least one X-ray source 4 comprises an integral X-ray tube.

[0063] It may be provided that the at least one X-ray detector 5 is embodied as a direct conversion X-ray detector. For example, the at least one X-ray detector 5 may comprise CdTe as active material.

[0064] It can be provided that at least one X-ray source 4 and / or at least one X-ray detector 5 has fluid cooling (not shown). In this case, the fluid-cooled elements are arranged in particular on the rotatable receptacle device 2 and move along during the rotation.

[0065] It can be provided that the X-ray measuring device 1 comprises at least one doorless radiation lock 27. This is based on Figure 3 The embodiment shown in FIG is schematically illustrated. In particular, the doorless radiation lock 27 comprises a plurality of screens 28 (opaque to the used X-ray radiation), which are arranged such that there is no direct line of sight from the outer area 30 to the at least one X-ray source 4, and thus the primary radiation of the at least one X-ray source 4 cannot escape to the outside, and secondary radiation or scattered radiation can no longer be detected in the outer area 30.

[0066] It can be provided that the X-ray inspection device 3 comprises a plurality of X-ray sources 4 and a plurality of X-ray detectors 5. The corresponding beam paths are then arranged to be offset by different angles around the rotation axis 9 and thus radiographs of the test object 20 can be acquired simultaneously from a plurality of different directions.

[0067] It can be provided that the X-ray measuring device 1 includes at least one collimator (not shown) and / or at least one aperture element (not shown) and / or at least one filter element (not shown), which at least one collimator and / or at least one aperture element and / or at least one filter element are configured to limit the X-ray radiation emitted by at least one X-ray source 4 to an active detector surface of at least one X-ray detector 5.

[0068] Figure 5 A schematic flow chart of an embodiment of a method for examining a test object by X-ray radiation is shown. In this embodiment, the method is performed according to Figure 3 The method is performed by an X-ray measuring device of the embodiment shown (i.e., using a positioning device comprising two mechanical arms). Method steps 100-103 are performed by a first positioning device, method steps 200-203 are performed by an X-ray inspection device and a rotatable receiving seat device, and method steps 300-303 are performed by a second positioning device, wherein, as shown in the flow chart and the following description, the processes are synchronized with each other. Within the scope of the method, in particular a test object is inspected and / or measured by computer tomography, and for this purpose the test object is irradiated from different directions.

[0069] In method step 100 , a first robot arm grips a test object, in particular a battery or a battery cell, from one of the supply or removal devices.

[0070] In method step 101, a predetermined region of interest of the clamped test object, in particular a corner of a battery or a battery cell, is arranged in a collection area of ​​the X-ray inspection device between the X-ray source and the X-ray detector on the axis of rotation. In this case, it can be provided that when at least one predetermined region of interest of the test object is arranged in the collection area, a predetermined last section of the arrangement trajectory extends along the axis of rotation of the rotatable receiving seat device to avoid collisions with the X-ray source and the X-ray detector. In parallel with this, the rotatable receiving seat device starts to rotate, or the rotatable receiving seat device rotates continuously, i.e. without interruption.

[0071] In a method step 200 a region of interest of the test object is measured, wherein the measurement is started when a predetermined angular velocity of the rotatable receptacle device has been reached.

[0072] In method step 102, the first robot repositions the test object so that another predetermined region of interest of the test object, in particular the opposite corner of a battery or a battery cell, is arranged in the acquisition region between the X-ray source and the X-ray detector on the axis of rotation. In particular, for this purpose, the test object is removed from the acquisition region along the axis of rotation, repositioned and then introduced back along the axis of rotation into the acquisition region with the other predetermined region of interest. In parallel with this, the rotatable receptacle device can be accelerated again, or the rotational movement can be maintained.

[0073] In method step 201 , another predetermined region of interest is measured in a similar manner.

[0074] In method step 103 , the test object is removed from the acquisition region again, in particular along the axis of rotation, and transferred to the supply and removal device.

[0075] In parallel, in method step 300 , the second robot grips another test object, in particular another battery or battery cell, from one of the supply or removal devices and moves the gripped further test object into the vicinity of its waiting collection area without obstructing the first robot in the process.

[0076] In method step 301, once the acquisition region has been cleared after method step 103, a predetermined region of interest of the clamped further test object, in particular a corner of a further battery or battery cell, is arranged in the acquisition region between the X-ray source and the X-ray detector on the axis of rotation. In this case, it can also be provided that when arranging at least one predetermined region of interest of the further test object in the acquisition region, a predetermined last section of the arrangement trajectory extends along the axis of rotation of the rotatable receiving seat device in order to avoid collisions with the X-ray source and the X-ray detector. In parallel with this, the rotatable receiving seat device starts to rotate, or the rotatable receiving seat device rotates continuously, i.e. without interruption.

[0077] In method step 202 , a predetermined region of interest of the further test object is measured, wherein the measurement is started when a predetermined angular velocity of the rotatable receptacle device has been reached.

[0078] In method step 302, the second robot arm repositions the further test object so that another predetermined region of interest of the further test object, in particular the opposite corner of the further battery or battery cell, is arranged in the acquisition region between the X-ray source and the X-ray detector on the axis of rotation. In particular, for this purpose, the further test object is removed from the acquisition region along the axis of rotation, repositioned and then introduced back along the axis of rotation into the acquisition region with the further predetermined region of interest. In parallel with this, the rotatable receptacle device can be accelerated again, or the rotational movement can be maintained.

[0079] In method step 203 , another predetermined region of interest is measured in a similar manner.

[0080] In method step 303 , the further test object is again removed from the acquisition region, in particular along the axis of rotation, and transferred to the supply and removal device.

[0081] The method is then repeated for further test objects, wherein the positioning device always alternately arranges and holds the test objects.

[0082] In principle, other positioning devices can be provided, wherein the procedure is in principle similar.

[0083] The embodiment provides that method steps 200 to 203 are carried out in a different order: in particular, if, for example, the movement for changing the region of interest (method steps 102 and 302) takes longer than the exchange of the two positioning devices for the test object, it can be provided that after method step 200, method step 202 is first carried out and the repositioning (method step 102) is carried out in parallel therewith, followed by method step 201 and method steps 302 and 103 are carried out in parallel therewith. For two test objects each having two regions of interest, the inspection is then carried out in particular in the following order: inspection of the first region of interest of the first test object, inspection of the first region of interest of the second test object, inspection of the second region of interest of the first test object and inspection of the second region of interest of the second test object. The method is carried out analogously in the case of further test objects and further regions of interest.

[0084] List of Reference Numerals

[0085] 1 X-ray measuring device

[0086] 2 Rotatable receiving seat equipment

[0087] 3 X-ray inspection equipment

[0088] 4 X-ray sources

[0089] 5 X-ray detector

[0090] 6 (First) Linear Axis

[0091] 7 Positioning equipment

[0092] 8 Collection Area

[0093] 9 Axis of rotation

[0094] 10 Carrier

[0095] 11 Carrier

[0096] 12 Guide Rail

[0097] 14 Driver

[0098] 15 Positioning turntable

[0099] 16 Holder

[0100] 17 Gear Ring

[0101] 18 Driver

[0102] 19 (round) bottom plate

[0103] 20 Test subjects

[0104] 20-1 Area of ​​interest

[0105] 21. Holding device

[0106] 22 Base

[0107] 23 Supply and removal device

[0108] 24 Robotic Arm

[0109] 25 Second linear axis (direction perpendicular to the rotation axis)

[0110] 26 Third linear axis (parallel to the rotation axis)

[0111] 27 Doorless Radiation Lock

[0112] 28 Screen

[0113] 30 External Area

[0114] 100-103 Method steps (first positioning device)

[0115] 200-203 Methods and Steps (X-ray Inspection Equipment)

[0116] 300-303 Method steps (second positioning device)

Claims

1. An X-ray measuring device (1) for examining a test object (20) by means of X-ray radiation, include: A rotatable receiving seat device (2), An X-ray inspection device (3) having at least one X-ray source (4) and at least one X-ray detector (5), The at least one X-ray source (4) and the at least one X-ray detector (5) are arranged on the rotatable receiving seat device (2), and at least one positioning device (7) is configured to arrange at least one predetermined region of interest (20-1) of the test object (20) in an acquisition area (8) of the X-ray inspection device (3) between the at least one X-ray source (4) and the at least one X-ray detector (5) at the rotation axis (9) of the rotatable receiving seat device (2), and to keep the region of interest in the acquisition area during the inspection.

2. The X-ray measuring device according to claim 1, It is characterized in that The at least one X-ray source (4) and / or the at least one X-ray detector (5) can be moved along a linear axis (6) extending perpendicularly to the rotation axis (9) of the rotatable receptacle device (2).

3. The X-ray measuring device (1) according to claim 1 or 2, It is characterized in that The rotatable receptacle device (2) is arranged such that the rotation axis (9) of the rotatable receptacle device (2) extends horizontally.

4. The X-ray measuring device (1) as claimed in any one of the preceding claims, It is characterized in that The rotatable receptacle device (2) is designed such that the rotatable receptacle device does not have any restrictions on the rotation angle around the rotation axis (9).

5. The X-ray measuring device (1) as claimed in claim 1 , characterized by at least two positioning devices (7) which are operated independently of one another, and a supply and removal device (23) for supplying and removing the test object to be inspected which is respectively assigned to each of the at least two positioning devices (7) in each case.

6. X-ray measuring device (1) according to any one of the preceding claims, It is characterized in that The at least one positioning device (7) comprises a robotic arm (24).

7. X-ray measuring device (1) according to any one of the preceding claims, It is characterized in that The at least one positioning device (7) comprises a positioning turntable (15).

8. An X-ray measuring device (1) as claimed in any of the preceding claims, characterized by a second linear axis (25) which is arranged perpendicular to the direction of the rotation axis (9) and perpendicular to the direction of the linear axis (6), and along which at least one X-ray detector (4) of the X-ray inspection device (3) can be displaced.

9. An X-ray measuring device (1) as claimed in any of the preceding claims, characterized by at least one third linear axis (26), which extends parallel to the rotation axis (9) and along which the at least one X-ray source (4) and / or the at least one X-ray detector (5) can be displaced.

10. The X-ray measuring device (1) according to any one of claims 2 to 9, It is characterized in that A drive (14) for moving the at least one X-ray source (4) and / or the at least one X-ray detector (5) along a linear axis (6) extending perpendicularly to the rotation axis (9) of the rotatable receiving seat device (2) is arranged outside the rotatable receiving seat device (2).

11. An X-ray measuring device (1) as claimed in any one of the preceding claims, characterized by at least one wireless communication interface, which is arranged on the rotatable receiving seat device (2) and is configured to provide radiographs acquired by the at least one X-ray detector (5).

12. The X-ray measuring device (1) as claimed in claim 1, characterized by at least one doorless radiation lock (27).

13. The X-ray measuring device (1) as claimed in any one of the preceding claims, It is characterized in that The X-ray inspection device (3) comprises a plurality of X-ray sources (4) and a plurality of X-ray detectors (5).

14. The X-ray measuring device (1) as claimed in any of the preceding claims, characterized by at least one collimator and / or at least one aperture element and / or at least one filter element, which are configured to limit the X-ray radiation emitted by the at least one X-ray source (4) to an active detector surface of the at least one X-ray detector (5).

15. A method for examining a test object (20) by means of X-ray radiation, in, Using the X-ray measuring device (1) as claimed in any one of claims 1 to 14, The at least one positioning device (7) is used to arrange at least one predetermined region of interest (20-1) of the test object (20) in a collection area (8) between the at least one X-ray source (4) and the at least one X-ray detector (5) on the rotation axis (9) of the rotatable receiving seat device (2) of the X-ray inspection device (3), and the region of interest is maintained in the collection area by the at least one positioning device (7) during the collection of at least one radiograph.

16. The method of claim 15, It is characterized in that When at least one predetermined region of interest (20-1) of the test object (20) is arranged in the acquisition region (8), a predetermined last section of the arrangement trajectory extends along the rotation axis (9) of the rotatable receiving seat device (2).

17. The method according to claim 15 or 16, It is characterized in that At least two positioning devices (7) operated independently of one another are used together with a supply and removal device (23) which is respectively assigned to each of the at least two positioning devices (7) for supplying and removing test objects (20) to be inspected, in order to arrange at least one predetermined region of interest (20-1) of the test objects (20) in the acquisition region (8), wherein the at least two positioning devices (7) are used alternately in the process.

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