Film material side face air suction and flat suction device

Abstract

The invention relates to a membrane material side air suction and flat suction device which comprises a detection platform and side air suction assemblies, the detection platform is provided with a horizontal light transmission part, a mounting plane used for bearing a membrane material is formed, no air suction hole exists in the surface, and light transmission uniformity is ensured, and the side air suction assemblies are symmetrically distributed on the two sides of the platform and comprise side air suction plates and direct-current brushless fans. After the fan is started, air above and below the film material is sucked through the air inlet, a low-pressure area adsorption surface is formed above the film material, a negative-pressure area is formed below the film material to press and adhere the film material, wrinkles are eliminated, airflow disturbance is reduced through the profiling design, and the air suction effect is improved. The device is simple in structure and convenient to operate, interference to the central area of the membrane material is avoided, multi-angle and multi-light-source detection is supported, high light transmission of the light-transmitting part is combined with profiling adsorption of side air suction, high-precision adsorption is achieved, interference of a traditional air suction hole to an optical path is avoided, and the industrial-grade high-precision visual detection requirement is met.

Description

Technical Field

[0001] This application relates to the field of visual inspection, and particularly to a device for sucking and flattening the side of a film material. Background Art

[0002] In the field of optical inspection, the flatness and light transmittance of a film material are the core factors affecting the inspection accuracy. Traditional film material flattening devices mostly adopt the method of sucking air through small holes in the bottom surface platform matrix, and fix the film material on the surface of the inspection platform through negative pressure adsorption. However, such devices have significant limitations: First, the dense small hole air suction will cause local depression of the film material (flatness deviation ≥ 0.2mm / m 2 ), affecting the uniformity of the surface morphology; Second, due to the low light transmittance of the material of the air suction platform (usually <5%) and the occlusion of the hole structure, it cannot support direct optical imaging or light source transmission on the back of the film material; In addition, even if the platform is made of transparent material (light transmittance about 80%), the poor light transmission consistency (deviation ≥ 30%) caused by the small hole distribution will cause bright and dark stripe interference in the front detection image, and the misjudgment rate is as high as over 95%. These problems seriously restrict the application of high-precision visual inspection.

[0003] To reduce the interference to visual inspection, the prior art mainly focuses on optimizing the material and structure of the air suction platform. For example, using a transparent substrate (such as glass or acrylic) to replace the traditional metal platform, and evenly opening micropores on its surface to balance the light transmission and adsorption functions. Such a solution attempts to alleviate the difficulties of backlighting and imaging by increasing the light transmittance of the platform (about 80%), and at the same time adsorb the film material through the micropore array. However, this design still relies on the bottom surface air suction principle and cannot solve the problem of local deformation of the film material caused by small hole adsorption. In addition, the existence of micropores will significantly damage the light transmission uniformity. Especially under backlight conditions, the difference in transmitted light intensity (deviation ≥ 30%) between the hole area and the non-hole area will interfere with the imaging quality of the front camera, resulting in a high misjudgment rate in detection.

[0004] Although the prior art attempts to balance the adsorption and light transmission requirements through a transparent platform and a micropore structure, its core defect stems from the inherent contradiction of bottom surface air suction: First, micropore adsorption will inevitably cause local depression of the film material, making it difficult to meet the flatness requirements for high-precision inspection (required ≤ 0.1mm / m 2 ); Second, the solid structure and hole distribution of the air suction platform itself will significantly reduce the light transmittance (effective light transmission area <80%) and introduce light transmission non-uniformity, and cannot be compatible with the backlight light source configuration and double-sided imaging requirements; Third, there is a risk of mechanical interference in the direct contact surface between the platform and the film material, further restricting the detection angle and optical path design. These defects result in the traditional solution being only applicable to low-precision inspection scenarios and unable to meet the technical requirements of the high-end fields such as semiconductors and optical thin films for a non-interference and fully transparent inspection environment. Summary of the Invention

[0005] The purpose of the present application is to provide a side air suction and flattening device for a film material that does not interfere with visual inspection.

[0006] According to one aspect of the present application, there is provided a side air suction and flattening device for a film material, comprising:

[0007] A detection platform, including a horizontally arranged light-transmitting member, and the light-transmitting member is formed with an installation plane for carrying the film material;

[0008] A side air suction assembly, including air suction units symmetrically distributed on both sides of the detection platform, and the air suction unit includes:

[0009] A side air suction plate, on one side close to the edge of the film material, there is an air inlet, the air inlet is arranged facing the edge of the film material, and when observed along the plane parallel to the installation plane, the cross-sectional shape of the air inlet is consistent with the contour of the edge of the film material, so that the range of the air inlet covers the entire circumference of the outer edge of the film material;

[0010] A DC brushless fan, communicated with the air inlet, for generating a directional air flow;

[0011] Wherein, after the DC brushless fan is started, the air above and below the film material is sucked through the air inlet, a low-pressure area is formed above the film material, and a negative-pressure area is formed below, so that the whole film material is pressed against the installation plane..

[0012] In a specific embodiment, when observed along the plane parallel to the installation plane, the thickness of the film material is denoted as X, and the vertical distance from the air inlet to the film material along its height direction is Y, and the thickness of the film material and the vertical distance satisfy the following relational expression:

[0013] Y = 5 - 10X.

[0014] In a specific embodiment, when projected along the plane perpendicular to the installation plane, the linear distance from the edge of the air inlet to the edge of the film material is Z, and the edge of the air inlet and the linear distance satisfy the following relational expression:

[0015] Z = 20 - 50X.

[0016] In a specific embodiment, the detection platform further includes:

[0017] A glass carrier plate, for carrying the light-transmitting member;

[0018] A platform support base, placed on the ground, and the glass carrier plate is fixedly arranged on the top.

[0019] In a specific embodiment, the detection platform further includes a bottom light source, the bottom light source is arranged facing the light-transmitting member and is fixedly connected to the lower end of the glass carrier plate.

[0020] In a specific embodiment, the side air suction assembly further includes:

[0021] A fan cover, which forms a receiving cavity penetrating along its axial direction, and the brushless fan is fixed in the receiving cavity;

[0022] A fan base, which is placed on the ground and is used to carry the fan cover.

[0023] In a specific embodiment, the side air suction assembly further includes a filter net board, which is arranged in the fan cover and is connected between the brushless fan and the air inlet, and the filter net board is used to filter impurities.

[0024] In a specific embodiment, when observed along a direction perpendicular to the installation plane, the film side air suction and flattening device includes at least four air suction assemblies symmetrically distributed on both sides of the detection platform.

[0025] In a specific embodiment, the light-transmitting member is optical glass.

[0026] In a specific embodiment, the fan base is provided with a placement groove penetrating along the horizontal direction, and the film side air suction and flattening device further includes a brushless driver, which is arranged in the placement groove and is electrically connected to the DC brushless fan.

[0027] The present application has the following beneficial effects:

[0028] The collaborative design of the detection platform and the side air suction assembly significantly reduces the interference to visual detection. The light-transmitting member of the detection platform adopts a horizontally arranged transparent material, and there are no air suction holes on the surface, forming a complete optical plane, which is compatible with the requirements of backlight transmission and double-sided imaging, and eliminates the uneven light transmission caused by holes in the traditional air suction platform. The side air suction assembly adopts a profiling design, so that the cross-sectional shape of the air inlet is consistent with the edge contour of the film, ensuring that the suction force accurately covers the entire circumference of the outer edge of the film. Combining with the DC brushless fan, a directional air flow is formed above and below the film. The low-pressure area above evenly adsorbs the surface, and the negative-pressure area below generates an overall pressing force through the sealed space between the light-transmitting member and the film, eliminating wrinkles; at the same time, the profiling air inlet fits the shape of the film, reducing the interference of air flow disturbance to the central area of the film and ensuring that the optical path is unobstructed. The non-contact adsorption mechanism enables the air suction plate to only act on the non-detection area at the edge of the film, supporting detection configurations with multiple angles and multiple light sources. In summary, the high light transmittance of the light-transmitting member combined with the profiling edge adsorption of the side air suction realizes high-precision adsorption of the film while completely avoiding the interference of air suction holes and the solid platform structure to the optical path, making the imaging quality and misjudgment rate of the visual detection system meet the industrial-level high-precision requirements. Description of the Drawings

[0029] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0030] Figure 1 Is an axonometric view of a side air suction and flattening device for a film material;

[0031] Figure 2 Is a first structural decomposition view of a side air suction and flattening device for a film material;

[0032] Figure 3 Is a bottom view of a side air suction and flattening device for a film material;

[0033] Figure 4 Is Figure 3 The sectional view A-A of

[0034] Figure 5 Is a second structural decomposition view of a side air suction and flattening device for a film material;

[0035] Figure 6 Is an axonometric view of the air suction unit;

[0036] Figure 7 Is a rear view of the air suction unit;

[0037] Figure 8 Is an axonometric view of the side air suction plate.

[0038] Explanation of the reference numerals in the drawings:

[0039] 1. Detection platform; 2. Translucent member; 3. Installation plane; 4. Side air suction assembly; 5. Air suction unit; 6. Side air suction plate; 7. Air inlet; 8. DC brushless fan; 9. Glass carrier plate; 10. Platform support base; 11. Bottom light source; 12. Fan cover; 13. Accommodation cavity; 14. Fan base; 15. Filter network plate; 16. Brushless driver; 17. Placing groove; 100. A side air suction and flattening device for a film material. Specific embodiments

[0040] Please refer to Figure 1 - Figure 8 In an embodiment of the present application, a side air suction and flattening device 100 for a film material is provided, including:

[0041] The detection platform 1 includes a horizontally arranged translucent member 2, and the translucent member 2 is formed with an installation plane 3 for carrying the film material;

[0042] The side air suction assembly 4 includes air suction units 5 symmetrically distributed on both sides of the detection platform 1. The air suction unit 5 includes:

[0043] A side air suction plate 6, on one side close to the edge of the film material, is provided with an air inlet 7. The air inlet 7 is arranged facing the edge of the film material. And when observed along the installation plane 3 in parallel, the cross-sectional shape of the air inlet 7 is consistent with the edge contour of the film material, so that the range of the air inlet 7 covers the entire circumference of the outer edge of the film material;

[0044] A DC brushless fan 8 is communicated with the air inlet 7 and is used for generating a directional air flow;

[0045] Wherein, after the DC brushless fan 8 is started, the air above and below the film material is sucked through the air inlet 7. A low-pressure area is formed above the film material, and a negative-pressure area is formed below, so that the whole film material is pressed against the installation plane 3.

[0046] Further, the core feature is that a highly flat installation plane 3 is formed by the horizontal light-transmitting member 2 of the detection platform 1, combined with the symmetrically distributed air suction units 5 of the side air suction assembly 4. Among them, the cross-sectional shape of the air inlet 7 of the side air suction plate 6 is completely matched with the edge contour of the film material, covering the entire circumference of the outer edge of the film material. The DC brushless fan 8 sucks the air above and below the film material through the air inlet 7 to form a low-pressure area and a negative-pressure area, forcing the whole film material to be pressed against the surface of the light-transmitting member 2. Among them, the rotational speed of the brushless fan mentioned in the example is between 10000 rpm and 40000 rmp. The light-transmitting member 2 adopts optical glass (light transmittance ≥ 96%, light transmission deviation ≤ 0.01%), and its surface roughness Ra ≤ 0.1 nm. The hardness is improved through a chemical strengthening process (Mohs hardness ≥ 7) to ensure that the flatness of the bearing surface ≤ 0.01 mm / m 2 , avoiding the problems of low light transmittance (<5%) and uneven light transmission caused by micropores of the traditional metal platform. The air inlet 7 of the side air suction plate 6 is arranged along the entire circumference of the edge of the film material, and the cross-sectional shape is consistent with the contour of the film material (for example, a rectangular film material corresponds to a linear air inlet 7, and a circular film material corresponds to an arc-shaped air inlet 7). The height of the air inlet 7 is in a slender strip shape, and the DC brushless fan 8 is connected through an optimized internal air duct to ensure that the air flow evenly covers the edge of the film material. When the DC brushless fan 8 sucks the air flow through the air inlet 7, a low-pressure area (air pressure lower than the ambient pressure) is formed above the film material, and a negative-pressure area (the air pressure is further reduced) is formed below. The pressure difference above and below makes the film material be evenly adsorbed on the surface of the light-transmitting member 2, avoiding the depression caused by the local suction concentration of the traditional bottom surface adsorption (the traditional flatness ≥ 0.2 mm / m 2 , and the flatness of this solution ≤ 0.01 mm / m 2)。The light-transmitting member 2 directly contacts the film material as the bearing surface. Its high light transmittance and pore-free structure eliminate the occlusion of backlight imaging. The side air suction plate 6 is connected to the fan through an air duct. The air flow path is "film material edge → air inlet 7 → filter screen → fan → outside", forming a unidirectional flow. The symmetrically distributed air suction units 5 achieve dynamic balance of the adsorption force through independent control, adapting to different film material sizes and shapes, and the flatness is improved to ≤0.01 mm / m 2 , the optimization of the light transmittance makes the deviation of the backlight transmitted light intensity consistency ≤0.5% (≥30% for the traditional micro-hole platform), and the non-mechanical contact design eliminates the risk of scratching and supports multi-angle detection.

[0047] In a specific embodiment, when observing along the plane parallel to the installation plane 3, the thickness of the film material is denoted as X, and the vertical distance from the air inlet 7 to the film material along its height direction is Y. The thickness of the film material and the vertical distance satisfy the following relationship:

[0048] Y = 5 - 10X.

[0049] Furthermore, the proportional relationship between the height direction of the air inlet 7 and the thickness of the film material is limited to Y = 5 - 10X. The air flow coverage range and adsorption efficiency are optimized through the proportional relationship. If Y < 5X (for example, when X = 0.1 mm, Y = 0.5 mm), the too small height of the air suction port will cause the air flow to act only on the local edge of the film material, unable to cover the upper and lower air layers, and easily cause edge curling; if Y > 10X (for example, when X = 0.1 mm, Y = 1 mm), the too large height of the air suction port will cause the air flow to disperse and the adsorption force to weaken, and the central area of the film material is likely to separate from the light-transmitting member 2. When Y = 5 - 10X, the height of the air suction port matches the thickness of the film material, making the air flow velocity and the air duct resistance reach balance, ensuring that the low-pressure area stably covers the entire surface of the film material. For the ultra-thin film material with a thickness X = 0.05 mm, Y = 0.25 - 0.5 mm, a precision-processed air suction port is adopted, and a low-power fan (rotation speed ≤2000 rpm) is combined to achieve gentle adsorption; for the rigid film material with a thickness X = 0.2 mm, Y = 1 - 2 mm, a high-power fan (rotation speed ≥3000 rpm) is adopted to enhance the adsorption force. This proportional design enables the air flow to cover the entire upper and lower regions of the film material, avoiding local stress concentration in traditional micro-hole adsorption, and the flatness deviation is improved from the traditional ≥0.2 mm / m 2 to ≤0.01 mm / m 2 , and at the same time, by optimizing the balance between the air duct resistance and the flow velocity, the adsorption efficiency is increased by 40%, adapting to different flexible or rigid film materials, and the versatility is significantly improved.

[0050] In a specific embodiment, when projected along the direction perpendicular to the installation plane 3, the linear distance from the edge of the air inlet 7 to the edge of the film material is Z, and the edge of the air inlet 7 and the linear distance satisfy the following relationship:

[0051] Z = 20 - 50X.

[0052] Furthermore, it is defined that the linear distance Z from the edge of the air inlet 7 to the edge of the film material is 20-50X, and the airflow action range and film material deformation control are optimized through the distance parameter. When Z < 20X (for example, X = 0.1 mm, Z = 2 mm), the air suction port is too close to the edge of the film material, and the high-speed airflow directly impacts the film material, easily causing edge jitter or warping; when Z > 50X (for example, X = 0.1 mm, Z = 5 mm), the airflow action range exceeds the edge of the film material, the adsorption efficiency decreases, and the central area is prone to detachment. When Z = 20-50X, an annular adsorption zone is formed at the edge of the film material, and a uniform downward pressure is generated through the Bernoulli effect, forcing the film material to fit the light-transmitting member 2. For a PET film with X = 0.08 mm, Z = 1.6-4 mm. When Z = 3 mm, the peak adsorption force at the edge of the film material reaches 50 Pa, and the flatness of the central area is ≤ 0.008 mm / m 2 ; for a PI film with X = 0.15 mm, Z = 3-7.5 mm. When Z = 5 mm, the air flow velocity is 12 m / s, and the adsorption stability is the best; for a composite film with X = 0.25 mm, Z = 5-12.5 mm. Combining Z = 10 mm with the frequency conversion control of the fan, dynamic adsorption force adjustment is realized. This distance range is determined through fluid simulation and experimental verification to ensure that the air suction port and the edge of the film material form an optimal adsorption coverage area. Combining with the full-circumference matching design of the air inlet 7, the edge of the film material is uniformly pressed, avoiding wrinkles or warping caused by local stress concentration, and the flatness deviation is ≤ 0.01 mm / m 2 , while maintaining no physical contact on the surface of the light-transmitting member 2, eliminating the risk of mechanical interference.

[0053] In a specific embodiment, the detection platform 1 further includes:

[0054] A glass carrier plate 9 for carrying the light-transmitting member 2;

[0055] A platform support base 10 is placed on the ground, and the glass carrier plate 9 is fixedly arranged at the top.

[0056] Furthermore, it is defined that the detection platform 1 includes a glass carrier plate 9 and a platform support base 10. The light-transmitting member 2 is fixed to the upper end of the glass carrier plate 9 through a soft sealant, and the base provides rigid support and ensures that the levelness of the installation plane 3 is ≤ 0.005 mm / m 2。The light-transmitting member 2 (such as optical glass) is bonded to the glass carrier plate 9 through a soft sealant (silicone or polyurethane, elastic modulus ≤ 1 MPa), and the thickness of the adhesive layer is 0.1 - 0.3 mm, which not only buffers mechanical stress but also avoids microcracks in the optical glass caused by hard connection; the platform base is connected to the glass carrier plate 9 through bolts. This structural design disperses mechanical stress through layered loading (light-transmitting member 2 - glass carrier - base), avoiding deformation of the light-transmitting member 2 due to its own weight or external forces. At the same time, a high-precision leveling mechanism is adopted between the base and the carrier plate to adapt to the detection requirements of different thickness films, improving the versatility and detection accuracy of the device.

[0057] In a specific embodiment, the detection platform 1 further includes a bottom light source 11, which is disposed opposite to the light-transmitting member 2 and fixedly connected to the lower end of the glass carrier plate 9.

[0058] In a specific embodiment, the side air suction assembly 4 further includes:

[0059] A blower cover 12, which forms an accommodation cavity 13 penetrating along its axis, and the brushless blower is fixed in the accommodation cavity 13;

[0060] A blower base 14, which is placed on the ground and is used to carry the blower cover 12.

[0061] Furthermore, the side air suction assembly 4 further includes a blower cover 12 and a blower base 14. The axial accommodation cavity 13 of the blower cover 12 fixes the DC brushless blower 8, and the base carries the cover and maintains the coaxiality of the blower axis and the air inlet 7 air duct. This structure reduces air leakage and noise through integrated encapsulation. At the same time, the coaxial design of the blower axis and the air suction plate air duct optimizes the air flow path, reducing the wind speed loss to less than 5%. Compared with the traditional decentralized blower layout, the adsorption efficiency is increased by more than 40%.

[0062] In a specific embodiment, the side air suction assembly 4 further includes a filter net card board 15, which is disposed in the blower cover 12 and connected between the brushless blower and the air inlet 7, and the filter net card board 15 is used to filter impurities.

[0063] Furthermore, a filter net card board 15 is added in the blower cover 12 and connected to the air inlet 7 and the blower. The filter net adopts a composite structure of multi-layer metal wire mesh and activated carbon, intercepting solid particles and volatile impurities with a particle size ≥ 0.1 μm, avoiding pollutants from adhering to the surface of the film material or blocking the blower blades. Combining with the unidirectional air flow characteristic of the side air suction design (air inlet 7 → filter net → blower → outside), the cleaning and maintenance cycle of the traditional bottom adsorption platform is extended from 8 hours to 200 hours, reducing the downtime cost.

[0064] In a specific embodiment, when observing along a direction perpendicular to the installation plane 3, the side air suction and flattening device for the film material includes at least four air suction components symmetrically distributed on both sides of the detection platform 1.

[0065] Furthermore, at least four air suction components are symmetrically distributed on both sides of the detection platform 1. Multiple groups of independently controlled air suction units 5 are adapted to different shaped film materials (such as rectangles, circles, or irregular contours). The air inlets 7 of each group are finely adjusted in position and angle by a servo motor to ensure that the air suction openings fully conform to the edge of the film material around the circumference. Combining with the feedback of the pressure sensor to adjust the fan speed, dynamic adsorption force balance is achieved, which is suitable for the rapid changeover detection of film materials of multiple sizes. The changeover time is shortened from the traditional 30 minutes to within 2 minutes.

[0066] In a specific embodiment, the light-transmitting member 2 is optical glass.

[0067] Furthermore, the light-transmitting member 2 is defined as optical glass, with its surface roughness Ra ≤ 0.1 nm and light transmittance deviation ≤ 0.01%. The scratch resistance performance is improved through a chemical strengthening process (Mohs hardness ≥ 7). Compared with transparent materials such as acrylic (light transmittance ≤ 80%, prone to aging and yellowing), optical glass maintains light transmittance stability during long-term use, supports detection in the ultraviolet to near-infrared bands, and expands the application of the device in scenarios such as spectral analysis and laser interference detection.

[0068] In a specific embodiment, the fan base 14 is provided with a placement groove 17 penetrating along the horizontal direction. The side air suction and flattening device for the film material further includes a brushless driver 16, and the brushless driver 16 is arranged in the placement groove 17 and electrically connected to the DC brushless fan 8.

[0069] Furthermore, the fan base 14 is provided with a horizontal placement groove 17 and internally houses a brushless driver 16. The brushless driver is connected to the upper computer through a CAN bus, and can receive instructions for starting and stopping the fan and adjusting the speed in real time. At the same time, it integrates overcurrent protection and temperature monitoring functions. Compared with the traditional external control cabinet, this design improves the integration degree of electrical components by 60%, reduces the risk of external wiring faults, and reduces electromagnetic interference through the shielding structure of the groove body, ensuring the signal stability of high-sensitivity optical detection equipment.

[0070] The above-described embodiments only represent several embodiments of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several deformations and improvements can still be made, and these all belong to the protection scope of the present application.

Claims

1. A device for sucking and leveling the side of a membrane, characterized in that: include: The detection platform comprises a horizontally arranged light-transmitting member, wherein the light-transmitting member forms a mounting plane for carrying the film material; The side suction assembly includes suction units symmetrically distributed on both sides of the detection platform, and the suction units include: A side air suction plate, wherein an air inlet is provided on a side close to the edge of the membrane material, the air inlet is arranged directly opposite the edge of the membrane material, and when observed along a plane parallel to the installation plane, the cross-sectional shape of the air inlet is consistent with the edge contour of the membrane material, so that the air inlet range covers the entire periphery of the outer edge of the membrane material; a DC brushless fan, connected to the air inlet, for generating a directional airflow; After the DC brushless fan is started, air above and below the membrane material is sucked through the air inlet, forming a low-pressure area above the membrane material and a negative-pressure area below the membrane material, so that the entire membrane material is pressed against the installation plane.

2. The membrane side suction and flattening device according to claim 1, characterized in that: Observed along the installation plane parallel to the membrane material thickness is recorded as X, the vertical distance of the air inlet from the membrane material along its height direction is Y, and the membrane material thickness and the vertical distance satisfy the following relationship: Y=5~10X.

3. The membrane side suction and flattening device according to claim 1, characterized in that: Along the projection perpendicular to the protected installation plane, the straight-line distance between the edge of the air inlet and the edge of the membrane material is Z, and the edge of the air inlet and the straight-line distance satisfy the following relationship: Z=20~50X.

4. The membrane side suction and flattening device according to claim 1, characterized in that: The detection platform also includes: A glass carrying plate, used for carrying the light-transmitting member; The platform support base is placed on the ground, and the glass bearing plate is fixedly arranged on the top.

5. The membrane side suction and flattening device according to claim 4, characterized in that: The detection platform also includes a bottom light source, which is arranged opposite to the light-transmitting member and is fixedly connected to the lower end of the glass carrying plate.

6. The membrane side suction and flattening device according to claim 1, characterized in that: The side suction assembly also includes: The fan cover is formed with a receiving cavity penetrating along its axial direction, and the brushless fan is fixed in the receiving cavity; The fan base is placed on the ground, and the fan base is used to support the fan cover.

7. The membrane side suction and flattening device according to claim 6, characterized in that: The side air suction assembly also includes a filter card plate, which is arranged in the fan cover and connected between the brushless fan and the air inlet, and the filter card plate is used to filter impurities.

8. The membrane side suction and flattening device according to claim 1, characterized in that: Observing along a plane perpendicular to the installation plane, the membrane side suction and leveling device includes at least four suction components symmetrically distributed on both sides of the detection platform.

9. The film material side suction and flattening device according to claim 1, characterized in that: The light-transmitting member is optical glass.

10. The membrane side suction and flattening device according to claim 6, characterized in that: The fan base is provided with a placement groove which runs through in the horizontal direction, and the film material side suction and flattening device also includes a brushless driver, which is arranged in the placement groove and is electrically connected to the DC brushless fan.

Images