Connecting device, substrate heat treatment unit and gluing and developing equipment

Abstract

The invention discloses a connecting device, a substrate heat treatment unit and gluing and developing equipment. The connecting device is used for connecting adjacent cavities, vent holes are formed in the opposite sides of the adjacent cavities, and a preset distance is formed between the adjacent cavities. The connecting device is of a tubular structure and can stretch out and draw back in the length direction of the connecting device. In the stretching state, the connecting device has a first preset length larger than the preset distance; and in the compression state, the connecting device has a second preset length smaller than or equal to the preset distance, so that the connecting device can be arranged between the adjacent cavities, the two ends of the connecting device are connected with the corresponding vent holes respectively, and an exhaust channel is formed between the adjacent cavities. By adopting the connecting device in the substrate heat treatment unit, the technical effects of reducing the overall size of the heat treatment unit and facilitating maintenance are achieved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing equipment, and further relates to a connecting device, a substrate heat treatment unit and a coating and developing device. Background Art

[0002] The lithography process mainly includes a coating process, an exposure process and a developing process, as well as a baking process performed between the above-mentioned processes.

[0003] With the development and technological iteration of the semiconductor industry, the requirements for the overall size and production capacity of coating and developing equipment are getting higher and higher. Limited by the design requirements of the overall size of the equipment, increasing the production capacity means a more compact internal structure of the equipment, which in turn leads to a reduction in the internal operating space of the equipment and an increase in the maintenance difficulty.

[0004] A heat treatment unit is configured in the coating and developing device for the above-mentioned baking process. As Figure 14 shown, the heat treatment unit 500 includes multiple columns of heat treatment modules 510 vertically stacked. Each heat treatment module 510 is independent of each other, and generally a vertical exhaust duct 520 is configured for each column of heat treatment modules 510. Each heat treatment module 510 is respectively connected to the corresponding vertical exhaust duct 520 in a conducting manner, so as to timely discharge the hot air generated in the cavity of the heat treatment module 510, thereby maintaining the internal heat balance of the equipment. On the one hand, each column of heat treatment modules 510 is respectively connected by the vertical exhaust duct 520, which occupies a large space and it is impossible to add more other processing modules to increase the production capacity of the equipment; on the other hand, during the maintenance of the heat treatment module 510, it is necessary to separately extract the heat treatment module 510 from the heat treatment unit 500. However, since the heat treatment module 510 is connected to the vertical exhaust duct 520, the connection between the heat treatment module 510 and the vertical exhaust duct 520 needs to be disconnected before extracting the heat treatment module 510, resulting in cumbersome disassembly and increased maintenance costs. Summary of the Invention

[0005] In view of the above technical problems, the present invention discloses a connecting device, a substrate heat treatment unit and a coating and developing device, aiming to reduce the overall size of the heat treatment unit and facilitate maintenance.

[0006] In some embodiments, the connecting device is used to connect adjacent cavities. Ventilation holes are provided on the opposite sides of the adjacent cavities, and the adjacent cavities have a preset distance. The connecting device has a tubular structure and is configured to be telescopic along its length direction; wherein, in the extended state, the connecting device has a first preset length greater than the preset distance; in the compressed state, the connecting device has a second preset length less than or equal to the preset distance, so that the connecting device can be installed between the adjacent cavities, and both ends of the connecting device are respectively connected to the corresponding ventilation holes for forming an exhaust channel between the adjacent cavities.

[0007] In some embodiments, the substrate heat treatment unit includes: a plurality of heat treatment modules, each heat treatment module including a cavity, and a connection device is provided between at least two adjacent heat treatment modules to form an exhaust air channel between the adjacent heat treatment modules.

[0008] In some embodiments, the coating and developing equipment includes an equipment front end module, a process station, and an interface station connected in sequence. The process station includes: a coating unit for coating a substrate; a developing unit for developing the substrate; the above-mentioned substrate heat treatment unit; a transfer unit for transferring the substrate located in the equipment front end module to the coating unit, and then transferring the substrate after the coating process to the interface station; and sending the substrate that has completed the developing process in the developing unit back to the equipment front end module.

[0009] Compared with the prior art, the present invention has the following beneficial effects:

[0010] In the present application, adjacent cavities are conductively connected through a connection device, thereby forming an exhaust air channel between adjacent cavities. And the connection device is applied to the substrate heat treatment unit, and adjacent heat treatment modules are conductively connected through the connection device, so that adjacent heat treatment modules are mutually conductive. Only one vertical exhaust air pipe needs to be installed in the heat treatment modules in the same row to extract the gas in each heat treatment module in this row. Furthermore, the installation quantity and occupied space of the vertical exhaust air pipes are reduced, and at the same time, the influence of the number of vertical exhaust air pipes on the overall size of the heat treatment unit is reduced. In addition, the above-mentioned connection device has different lengths in the extended state and the compressed state, which is convenient for installation or removal between heat treatment modules, and thus is convenient for extracting heat treatment modules during equipment maintenance. Description of the Drawings

[0011] The following will further illustrate the above characteristics, technical features, advantages and their implementation manners of the present invention in a clear and understandable manner in combination with the drawings in the preferred embodiments.

[0012] Figure 1 is a schematic diagram of the connection device according to an embodiment of the present application;

[0013] Figure 2 is Figure 1 the front view of the connection device shown in the extended state;

[0014] Figure 3 is Figure 1 the front view of the connection device shown in the compressed state;

[0015] Figure 4a is Figure 1 the schematic diagram of the connection device during installation;

[0016] Figure 4b is Figure 4a a view along the viewing direction V1;

[0017] Figure 5a is Figure 1 a schematic diagram of the connecting device shown in a preset position;

[0018] Figure 5b is Figure 5a a view along the viewing direction V2;

[0019] Figure 6 is Figure 1 an exploded view of the connecting device shown;

[0020] Figure 7 is Figure 1 a cross-sectional view of the connecting device shown along section C;

[0021] Figure 8 is a schematic diagram of a heat treatment module according to an embodiment of the present application;

[0022] Figure 9 is a schematic diagram of a substrate heat treatment unit according to an embodiment of the present application;

[0023] Figure 10 is Figure 9 a left view of;

[0024] Figure 11 is Figure 9 an exploded view of;

[0025] Figure 12 is a schematic diagram of a spin coater and developer according to an embodiment of the present application;

[0026] Figure 13 is Figure 12 a cross-sectional view along the a-a direction;

[0027] Figure 14 is a schematic diagram of a substrate heat treatment unit. Detailed implementation manners

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the specific implementation manners of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts, and other implementation manners can also be obtained.

[0029] To simplify the drawings, only the parts related to the invention are schematically shown in each figure, and they do not represent the actual structure of the product. Additionally, to simplify the drawings for better understanding, for components with the same structure or function in some figures, only one of them is schematically shown, or only one of them is labeled. In this article, "one" not only means "only this one" but also can mean "more than one" situation.

[0030] In this article, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", and "joined" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] In addition, in the description of this application, the terms "first", "second", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0032] As Figures 1 to 3 shown, a connection device 130 according to an embodiment of the present application is disclosed, which is used to connect adjacent cavities 600. Vent holes 1121 are provided on the facing sides of the adjacent cavities 600, and a preset distance d1 is provided between the adjacent cavities 600. Referring to Figure 9 , the connection device 130 can be applied to a substrate heat treatment unit 100. The substrate heat treatment unit 100 includes multiple rows of horizontally arranged heat treatment modules 110. The heat treatment modules 110 include cavities 600. The heat treatment modules 110 in each row are stacked in the vertical direction, and a preset distance d1 is provided between adjacent heat treatment modules 110 in the same row or the same column.

[0033] Specifically, the connection device 130 has a tubular structure and is configured to be telescopic along its length direction s. Among them, as Figure 2 shown, in the extended state, the connection device 130 has a first preset length d2 greater than the preset distance d1; as Figure 3 shown, in the compressed state, the connection device 130 has a second preset length d3 less than or equal to the preset distance d1, so that the connection device 130 can be installed between adjacent cavities 600. The two ends of the connection device 130 are respectively connected to the corresponding vent holes 1121, and are used to form an exhaust channel between the adjacent cavities 600.

[0034] In practical applications, the connecting device 130 can be installed between adjacent heat treatment modules 110 in the same row or the same column to directly conduct the adjacent heat treatment modules 110. By analogy, if the connecting device 130 is installed between adjacent heat treatment modules 110 in the same row, assuming the number of heat treatment modules 110 in the same row is n, then the heat treatment modules 110 in the same row can be conducted by (n - 1) connecting devices 130. At this time, only one vertical exhaust duct 120 needs to be connected to the heat treatment modules 110 in this row to extract the gas in all the heat treatment modules 110 in this row. The vertical exhaust duct 120 can be installed at the end of the heat treatment modules 110 in the same row and is conductively connected by the connecting device 130. Moreover, multiple rows of heat treatment modules 110 can be conductively connected to the same vertical exhaust duct 120, thereby reducing the installation quantity and occupied space of the vertical exhaust duct 120 and simultaneously reducing the overall size of the heat treatment unit. In addition, the connecting device 130 has different lengths in the extended state and the compressed state. Without changing the preset distance d1 between adjacent heat treatment modules 110, the connecting device 130 can be quickly installed or removed. After the connecting device 130 is removed, the corresponding heat treatment module 110 can be extracted for maintenance, facilitating equipment overhaul.

[0035] Preferably, the connecting device 130 includes a guiding and sliding member 137. The guiding and sliding member 137 is at least installed at one end of the connecting device 130 and is used to reduce the frictional force between the connecting device 130 and the surface of the cavity 600 when the connecting device 130 is installed between adjacent cavities 600, so as to move the connecting device 130 between adjacent cavities 600. For example, the connecting device 130 is moved from the position shown in Figure 4a along the Figure 4b direction t shown in Figure 5a to the preset position shown in Figure 5b . It should be noted that in combination with the embodiment shown in Figure 1 , the connecting device 130 has a tubular structure. One end of the connecting device 130 includes both end faces of the connecting device 130 along its length direction s and the outer tube wall near the above end faces. And in the embodiment shown in Figure 1 , the guiding and sliding member 137 is installed on the outer tube wall near the end face of the connecting device 130.

[0036] In addition, the connecting device 130 includes a sealing member 138. The sealing member 138 is at least installed on one end face of the connecting device 130 and is used to form a seal between the connecting device 130 and the surface of the cavity 600 to prevent air leakage at the connection between the connecting device 130 and the cavity 600 when the adjacent cavities 600 transport air flow through the connecting device 130.

[0037] Preferably, the connecting device 130 includes a fixed pipe fitting 131, a first pipe fitting 132, and an elastic member 134. Among them, the first pipe fitting 132 is slidably sleeved on one end of the fixed pipe fitting 131, and the elastic member 134 is disposed on the fixed pipe fitting 131 and elastically connected to the first pipe fitting 132 for providing an elastic force along the length direction s to the first pipe fitting 132, so that the connecting device 130 can be switched between an extended state and a compressed state.

[0038] Preferably, the connecting device 130 further includes a second pipe fitting 133. The second pipe fitting 133 is slidably sleeved on the end of the fixed pipe fitting 131 away from the first pipe fitting 132, and the elastic member 134 is elastically connected to the second pipe fitting 133 for providing an elastic force along the length direction s to the second pipe fitting 133. Among them, the end faces of the first pipe fitting 132 and the second pipe fitting 133 away from each other respectively have annular contact surfaces 135 corresponding to the adjacent cavities 600.

[0039] Preferably, the connecting device 130 further includes a first guide wheel 1321 and a second guide wheel 1331. The first guide wheel 1321 and the second guide wheel 1331 are equivalent to the above-mentioned guide sliding members 137. Specifically, the first guide wheel 1321 is installed at the end of the first pipe fitting 132 away from the fixed pipe fitting 131, and the second guide wheel 1331 is installed at the end of the second pipe fitting 133 away from the fixed pipe fitting 131. The axial directions of the first guide wheel 1321 and the second guide wheel 1331 are parallel, and are respectively perpendicular to the above-mentioned length direction s. Moreover, the first guide wheel 1321 and the second guide wheel 1331 respectively protrude from the annular contact surface 135, so that the connecting device 130 can slide between adjacent cavities 600 to a preset position in the compressed state. For example, the connecting device 130 is moved from the position shown in Figure 4a and Figure 4b along the direction t to the preset position shown in Figure 5a and Figure 5b .

[0040] Specifically, grooves 1122 are formed on the opposite sides of the adjacent cavities 600. The grooves 1122 are adapted to the first guide wheel 1321 or the second guide wheel 1331. When the connecting device 130 slides to the preset position, the first guide wheel 1321 and the second guide wheel 1331 are respectively snapped into the corresponding grooves 1122. At this time, the annular contact surface 135 is in sealing contact with the edge of the vent hole 1121. In addition, in combination with the embodiments shown in Figure 4a and Figure 4b , in order to prevent the first guide wheel 1321 and the second guide wheel 1331 from being snapped into the vent hole 1121 before reaching the grooves 1122, the vent hole 1121 is provided with guide sliding strips 1126 along the traveling directions of the first guide wheel 1321 and the second guide wheel 1331 for the first guide wheel 1321 and the second guide wheel 1331 to pass through, and the guide sliding strips 1126 divide the vent hole 1121 into two parts.

[0041] Preferably, sealing gaskets 136 are respectively provided at the ends of the first pipe fitting 132 and the second pipe fitting 133 that are away from each other, and the sealing gasket 136 is equivalent to the above-mentioned seal 138. Specifically, the above-mentioned annular contact surface 135 is located on the end surface of the sealing gasket 136 away from the fixed pipe fitting 131, and when the connecting device 130 slides to the preset position, the first pipe fitting 132 and the second pipe fitting 133 respectively press the corresponding sealing gaskets 136 under the elastic force of the elastic member 134, so that the annular contact surface 135 is in sealing contact with the edge of the ventilation hole 1121. The sealing gasket 136 is preferably made of an elastic material, such as rubber material.

[0042] Specifically, as Figure 6 and Figure 7 shown, the connection structures of the first pipe fitting 132 and the second pipe fitting 133 with the fixed pipe fitting 131 are as follows: One end of the fixed pipe fitting 131 is constructed with a first flange 1311, and the other end of the fixed pipe fitting 131 is constructed with a second flange 1312. A first inner retaining ring 1322 corresponding to the first flange 1311 is constructed on the inner wall of the first pipe fitting 132, and a second inner retaining ring 1332 corresponding to the second flange 1312 is constructed on the inner wall of the second pipe fitting 133. Among them, when the connecting device 130 switches between the extended state and the compressed state, the first inner retaining ring 1322 and the second inner retaining ring 1332 are respectively limited to slide between the first flange 1311 and the second flange 1312 along the length direction s under the elastic force of the elastic member 134, thereby restricting the telescopic distances of the first pipe fitting 132 and the second pipe fitting 133. In addition, gaskets 1313 can be respectively installed on the facing sides of the first flange 1311 and the first inner retaining ring 1322, and on the facing sides of the second flange 1312 and the second inner retaining ring 1332, so as to form a seal between the first flange 1311 and the first inner retaining ring 1322, and between the second flange 1312 and the second inner retaining ring 1332 when the connecting device 130 is in the compressed state.

[0043] Preferably, the above-mentioned elastic member 134 is preferably a torsion spring 1341. At least two fixing posts 1342 for fixing the torsion spring 1341 are provided on the pipe wall of the fixed pipe fitting 131. The main body part of the torsion spring 1341 is sleeved on the fixing posts 1342, and the two elastic contacts of the torsion spring 1341 respectively abut against the facing sides of the first inner retaining ring 1322 and the second inner retaining ring 1332. Specifically, in combination with Figure 6 shown in the embodiment, the fixed pipe fitting 131 has a square tubular structure, including four pipe walls arranged in pairs opposite to each other. At least two pipe walls are provided with fixing posts 1342 on their surfaces, and these two pipe walls correspond to each other.

[0044] Among them, in the extended state, under the elastic force of the torsion spring 1341, the distance between the first pipe fitting 132 and the second pipe fitting 133 increases until the first inner retaining ring 1322 abuts against the first flange 1311 and the second inner retaining ring 1332 abuts against the second flange 1312; in the compressed state, under the action of an external force, the first pipe fitting 132 and the second pipe fitting 133 overcome the elastic force of the torsion spring 1341 and the distance therebetween decreases until the overall length of the connecting device 130 is shortened to a second preset length d3 that is less than or equal to the preset distance d1, so as to be inserted between adjacent cavities 600. And after the connecting device 130 is placed between adjacent cavities 600, the first guide wheel 1321 and the second guide wheel 1331 respectively abut against the opposite sides of the adjacent cavities 600, facilitating the pushing of the connecting device 130 to reach the preset position. When the connecting device 130 reaches the preset position, the first guide wheel 1321 and the second guide wheel 1331 are respectively snapped into the corresponding grooves 1122, and the distance between the first pipe fitting 132 and the second pipe fitting 133 slightly increases under the elastic force of the torsion spring until the annular contact surface 135 is in sealing contact with the edge of the vent hole 1121, completing the conduction connection of the adjacent cavities 600 above.

[0045] In practical applications, before the heat treatment module 110 is removed for equipment maintenance, the connecting device 130 between two adjacent heat treatment modules 110 needs to be removed first. When removing the connecting device 130 between two adjacent heat treatment modules 110, push the connecting device 130 to first slide the first guide wheel 1321 and the second guide wheel 1331 of the connecting device 130 out of the corresponding grooves 1122, or compress the connecting device 130 before pushing the connecting device 130 to make it in a compressed state, and then push it out between the two adjacent heat treatment modules 110. In addition, referring to Figure 4a and Figure 4b , to facilitate the sliding of the first guide wheel 1321 or the second guide wheel 1331 out of the groove 1122, a guiding sliding surface 1123 can be provided at the entrance edge of the groove 1122, and the guiding sliding surface 1123 can be configured as a planar chamfer or an arc chamfer.

[0046] As Figures 9 to 11 shown, a substrate heat treatment unit 100 according to an embodiment of the present invention is disclosed. The substrate heat treatment unit 100 includes a plurality of heat treatment modules 110. The heat treatment module 110 includes a cavity 600, and the above-mentioned connecting device 130 is provided between at least two adjacent heat treatment modules 110 to form an exhaust air channel between the adjacent heat treatment modules 110. Combining the connecting device 130 described above, the cavity 600 is specifically implemented as a transfer air chamber 112 of the heat treatment module 110 in the substrate heat treatment unit 100, and the connecting device 130 is installed between the transfer air chambers 112 of adjacent heat treatment modules 110.

[0047] Specifically, the heat treatment modules 110 are arranged horizontally in multiple rows, the multiple rows of heat treatment modules 110 are stacked, and a connecting device 130 is provided between adjacent heat treatment modules 110 in the same row to conductively connect the heat treatment modules 110 in the same row in sequence.

[0048] Preferably, the substrate heat treatment unit 100 includes a vertical exhaust duct 120. The vertical exhaust duct 120 is located at the same end of the multiple rows of heat treatment modules 110, and the vertical exhaust duct 120 is connected to the adjacent heat treatment module 110 through the connecting device 130, so that each row of heat treatment modules 110 is sequentially conductively connected to the vertical exhaust duct 120 for exhausting the gas inside each heat treatment module 110.

[0049] In addition, in other embodiments of the present application, the connecting device 130 can be installed between two adjacent heat treatment modules 110 in the same column to conductively connect the heat treatment modules 110 in the same column in sequence. Specifically, the substrate heat treatment unit 100 includes a horizontal exhaust duct. The horizontal exhaust duct passes through each column of heat treatment modules 110 in sequence, and the horizontal exhaust duct is connected to the adjacent heat treatment module 110 through the connecting device 130, so that each column of heat treatment modules 110 is sequentially conductively connected to the horizontal exhaust duct for exhausting the gas inside each heat treatment module 110.

[0050] Preferably, as Figure 8 shown, the heat treatment module 110 includes a heat treatment module main body 111 and a transfer air chamber 112. Among them, the heat treatment module main body 111 is used for substrate heat treatment. The transfer air chamber 112 is arranged on the front side or the rear side of the heat treatment module main body 111 and is in communication with the inside of the heat treatment module main body 111. And the above-mentioned cavity 600 includes the transfer air chamber 112, that is, ventilation holes 1121 are provided on the facing sides of adjacent transfer air chambers 112 in the same row. The ventilation holes 1121 are in communication with the inside of the transfer air chamber 112. Both ends of the connecting device 130 have annular contact surfaces 135 corresponding to the adjacent transfer air chambers 112. When the connecting device 130 slides to a preset position, the annular contact surfaces 135 are in sealing contact with the edges of the ventilation holes 1121. Specifically, the heat treatment module main body 111 is conductively connected to the transfer air chamber 112 through a conduit 1125.

[0051] Preferably, the heat treatment module 110 further includes a control unit 113. The control unit 113 is installed on the side of the transfer air chamber 112 away from the heat treatment module main body 111 and is used to control substrate treatment parameters such as the substrate treatment temperature, gas flow rate, and gas type of the heat treatment module 110.

[0052] Preferably, referring again to Figure 3, the heat treatment module 110 includes a plugging mechanism 1124. The plugging mechanism 1124 cooperates with the vent hole 1121 of the cavity 600 to open the vent hole 1121 when the connecting device 130 is in a preset position and plug the vent hole 1121 when the connecting device 130 is not in the preset position. Specifically, the plugging mechanism 1124 includes a sealing plate and a driving member. When the vent hole 1121 needs to be plugged, the driving member drives the sealing plate to cover and block the vent hole 1121; when the vent hole 1121 needs to be conducted, the driving member drives the sealing plate away from the vent hole 1121.

[0053] In practical applications, if only one heat treatment module 110 is extracted for maintenance or repair, first extract the connecting device 130 connected thereto. After extracting the connecting device 130 connected thereto, the heat treatment module 110 adjacent to this heat treatment module 110 can automatically plug the corresponding vent hole 1121 through the plugging mechanism 1124, preventing gas from leaking from the vent hole 1121 of the intermediate gas chamber 112 and affecting the exhaust of other heat treatment modules 110.

[0054] In addition, in some preferred embodiments, grooves 1122 are further provided on the opposite sides of adjacent intermediate gas chambers 112 in the same row. The grooves 1122 are located near the vent holes 1121 and are used to fit the guiding members 137 of the connecting device 130, such as the first guide wheel 1321 and the second guide wheel 1331. When the connecting device 130 slides to the preset position, the first guide wheel 1321 and the second guide wheel 1331 are respectively snapped into the corresponding grooves 1122, and the annular contact surface 135 is in sealing contact with the edge of the vent hole 1121.

[0055] Preferably, the substrate heat treatment unit 100 is configured with multiple vertical exhaust pipes 120, and each vertical exhaust pipe 120 is respectively connected to the heat treatment modules 110 in different rows. As an example, in Figure 9 , there are three columns and twelve rows of heat treatment modules 110, and three vertical exhaust pipes 121, 122 and 123. The vertical exhaust pipes 121, 122 and 123 are installed on the same side (right side) of each row of heat treatment modules 110, and each of the vertical exhaust pipes 121, 122 and 123 is simultaneously connected in communication with four rows of heat treatment modules 110. It should be noted that in practical applications, the number and arrangement of the heat treatment modules 110, as well as the number of the vertical exhaust pipes 120 and the number of rows of heat treatment modules 110 connected by each vertical exhaust pipe 120, can be adjusted adaptively according to the actual situation.

[0056] In the above way of connecting each vertical exhaust duct 120 to the heat treatment modules 110 in different rows respectively, on the one hand, it can prevent a large error in the exhaust air volume of the heat treatment modules 110 connected to different positions of the vertical exhaust duct 120, and ensure that the exhaust efficiency of the vertical exhaust duct 120 for each row of heat treatment modules 110 is basically the same; on the other hand, the exhaust states of the heat treatment modules 110 connected to different vertical exhaust ducts 121 do not affect each other. When extracting a certain row of heat treatment modules 110 for maintenance or repair, only the vertical exhaust duct 120 connected thereto needs to be closed, and the remaining vertical exhaust ducts 120 can still perform the exhaust operation for the heat treatment modules 110 connected thereto.

[0057] As Figure 12 and Figure 13 shown, the present application also discloses a coating and developing apparatus 10, which includes a front-end module 11, a process station 12, and an interface station 13 connected in sequence.

[0058] Specifically, the process station 12 includes: a coating unit 200, a developing unit 300, a transfer unit 400, and the substrate heat treatment unit 100 in the above embodiment. Among them, the coating unit 200 is used to perform coating treatment on the substrate; the developing unit 300 is used to perform developing treatment on the substrate; the transfer unit 400 is used to transfer the substrate between the front-end module 11, the process station 12 and the interface station 13, and transfer the substrate within the process station 12.

[0059] It should be noted that the above embodiments can be freely combined as needed. The above are only the preferred embodiments of the present invention. For those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A connecting device for connecting adjacent cavities. Ventilation holes are provided on the facing sides of the adjacent cavities, and a preset distance is provided between the adjacent cavities. Characterized in that, The connecting device has a tubular structure and is configured to be telescopic along its length direction; wherein, In the extended state, the connecting device has a first preset length greater than the preset distance; In the compressed state, the connecting device has a second preset length less than or equal to the preset distance, so that the connecting device can be installed between the adjacent cavities, and both ends of the connecting device are respectively connected to the corresponding ventilation holes for forming an exhaust passage between the adjacent cavities.

2. The connecting device according to claim 1, Characterized in that, Comprising: A guiding and sliding member, at least installed at one end of the connecting device, for reducing the friction between the connecting device and the surface of the cavity when the connecting device is installed between the adjacent cavities.

3. The connecting device according to claim 1, Characterized in that, Comprising: A sealing member, at least installed on one end face of the connecting device, for forming a seal between the connecting device and the surface of the cavity.

4. The connecting device according to claim 1, Characterized in that, Comprising: A fixed pipe fitting; A first pipe fitting, slidably sleeved on the end of the fixed pipe fitting; An elastic member, arranged on the fixed pipe fitting and elastically connected to the first pipe fitting, for providing an elastic force along the length direction for the first pipe fitting to enable the connecting device to switch between the extended state and the compressed state.

5. The connecting device according to claim 4, Characterized in that, Further comprising: A second pipe fitting, slidably sleeved on the end of the fixed pipe fitting away from the first pipe fitting, and the elastic member is also elastically connected to the second pipe fitting for providing an elastic force along the length direction for the second pipe fitting; wherein, The sides of the first pipe fitting and the second pipe fitting away from each other respectively have annular contact surfaces corresponding to the adjacent cavities.

6. The connecting device according to claim 5, Characterized in that, Further comprising: A first guide wheel, installed at the end of the first pipe fitting away from the fixed pipe fitting; A second guide wheel, installed at the end of the second pipe fitting away from the fixed pipe fitting; wherein, The axial directions of the first guide wheel and the second guide wheel are parallel, respectively perpendicular to the length direction, and the first guide wheel and the second guide wheel respectively protrude from the annular contact surface, so that the connecting device can slide between the adjacent cavities to a preset position in the compressed state.

7. The connecting device according to claim 6, Characterized in that, Grooves are provided on the facing sides of the adjacent cavities, and the grooves are adapted to the first guide wheel or the second guide wheel. When the connecting device slides to the preset position, the first guide wheel and the second guide wheel are respectively snapped into the corresponding grooves, and the annular contact surface is in sealing contact with the edge of the ventilation hole.

8. The connecting device according to claim 5, Characterized in that, Sealing gaskets are respectively arranged at the ends of the first pipe fitting and the second pipe fitting away from each other.

9. The connecting device according to claim 5, characterized in that, one end of the fixed pipe fitting is configured with a first flange, and the other end of the fixed pipe fitting is configured with a second flange; a first inner retaining ring corresponding to the first flange is configured on the inner wall of the first pipe fitting, a second inner retaining ring corresponding to the second flange is configured on the inner wall of the second pipe fitting, the inner diameter of the first inner retaining ring is smaller than the outer diameter of the first flange, and the inner diameter of the second inner retaining ring is smaller than the outer diameter of the second flange. Wherein, when the connecting device switches between the extended state and the compressed state, the first inner retaining ring and the second inner retaining ring are respectively defined to slide between the first flange and the second flange along the length direction under the elastic force of the elastic member.

10. A substrate heat treatment unit, characterized in that, comprising: a plurality of heat treatment modules, the heat treatment modules include cavities, and a connecting device as described in any one of claims 1-9 is provided between at least two adjacent heat treatment modules to form an exhaust air channel between the adjacent heat treatment modules.

11. The substrate heat treatment unit according to claim 10, characterized in that, the heat treatment modules are arranged horizontally in multiple rows, the multiple rows of heat treatment modules are stacked, and a connecting device is provided between adjacent heat treatment modules in the same row to conductively connect the heat treatment modules in the same row in sequence.

12. The substrate heat treatment unit according to claim 11, characterized in that, comprising: a vertical exhaust air pipe, located on the same side of the multiple rows of heat treatment modules, and the vertical exhaust air pipe is connected to the adjacent heat treatment module through the connecting device to conductively connect each row of heat treatment modules to the vertical exhaust air pipe in sequence for exhausting the gas inside each heat treatment module.

13. The substrate heat treatment unit according to claim 12, characterized in that, the heat treatment module further includes: a heat treatment module main body for substrate heat treatment; the cavity includes a transfer air chamber, the transfer air chamber is in communication with the inside of the heat treatment module main body, the ventilation holes are opened on the opposite sides of adjacent transfer air chambers, and both ends of the connecting device have annular contact surfaces corresponding to the adjacent transfer air chambers. When the connecting device slides to a preset position, the annular contact surface is in sealing contact with the edge of the ventilation hole.

14. The substrate heat treatment unit according to claim 10, characterized in that, comprising: a blocking mechanism, which cooperates with the ventilation hole to open the ventilation hole when the connecting device is in the preset position and block the ventilation hole when the connecting device is not in the preset position.

15. The substrate heat treatment unit according to claim 13, characterized in that, the connecting device includes a guiding and sliding member, and the guiding and sliding member is at least installed at one end of the connecting device for reducing the friction between the connecting device and the surface of the cavity when the connecting device is installed between adjacent transfer air chambers. On the facing sides of the adjacent transfer air chambers in the same row, grooves are provided, and the grooves are adapted to the guide sliding members. When the connecting device slides to the preset position, the guide sliding members are snapped into the grooves, and the annular contact surfaces are in sealing contact with the edges of the ventilation holes.

16. The substrate heat treatment unit according to claim 12, wherein, A plurality of vertical exhaust air pipes are provided, and each of the vertical exhaust air pipes is connected to the heat treatment modules in different rows.

17. A coating and developing device, comprising a front-end module of the device, a process station, and an interface station connected in sequence, wherein, The process station includes: The substrate heat treatment unit according to any one of claims 10 to 16; A coating unit for performing a coating process on the substrate; A developing unit for performing a developing process on the substrate; A transfer unit for transferring the substrate between the front-end module of the device, the process station, and the interface station, and for transferring the substrate within the process station.

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