Mask plate pre-alignment device and wafer exposure equipment

Abstract

The invention relates to the technical field of photoetching exposure equipment, in particular to a mask plate pre-alignment device and wafer exposure equipment, and the mask plate pre-alignment device comprises a rotating power source, a rotating disc, a first guide piece extending along a first direction and a second guide piece extending along a second direction, the first guide piece is provided with a first clamping piece, and the second guide piece is provided with a second clamping piece; a second clamping piece is arranged on the second guide piece; a plurality of hinging parts which are uniformly spaced in the circumferential direction are arranged on the rotating disc; the first ends of the connecting rods are correspondingly connected with the two first clamping pieces and the two second clamping pieces respectively, and the second ends of the connecting rods are correspondingly connected with the hinge parts respectively; and a reference position surface which coincides with the calibrated mask plate is arranged above the rotating disc. The device is convenient to install, the action consistency of the clamping pieces can be guaranteed, and the alignment precision and the alignment efficiency are improved.

Description

Technical Field

[0001] The present application relates to the technical field of lithography exposure equipment, and more specifically, to a mask pre-aligning device and a wafer exposure equipment. Background Art

[0002] A mask, also known as a lithography mask or a photomask, is a precision component used in the lithography process of microelectronics and integrated optoelectronics manufacturing. The mask is very sensitive to particles or contaminants. Therefore, the mask is stored in a special mask box, and it is only taken out of the mask box by a manipulator and placed on the mask table for exposure during the exposure process. Conventional lithography machines generally directly take the mask out of the mask storage repository and place it on the mask table for rough alignment and fine alignment. Since the displacement of the rough alignment and fine alignment moving mechanisms on the mask table is small, and the mask is very likely to be skewed significantly in the mask box or during the transfer by the manipulator. Once the skew is large, it will cause the adjustment of the skewed position of the mask to be unable to be completed during the rough alignment process on the mask table, thereby affecting the fine alignment and exposure.

[0003] Existing pre-aligning devices use multiple sets of cylinders or other electric telescopic drive sources, and cooperate with multiple sets of spring elements to realize the motion control of the clamping members. On the one hand, due to the large number of drive sources, the clamping members are prone to action delay deviation due to signal delay and mechanical structure errors during the control process. Several clamping members cannot start moving and stop moving at the same time, resulting in very poor action consistency. Eventually, not only the alignment accuracy is reduced, but also the alignment efficiency is low. On the other hand, there are many drive sources in the existing technology, and the structural design is complex, resulting in troublesome positioning during the installation process, which is not conducive to production and rapid maintenance. Summary of the Invention

[0004] The purpose of the present application is to provide a mask pre-aligning device and a wafer exposure equipment, which are not only easy to install, but also can ensure the consistency of the clamping member actions, improve the alignment accuracy and alignment efficiency.

[0005] The embodiments of the present application are implemented as follows: In a first aspect, an embodiment of the present application provides a mask pre-aligning device, including a rotational power source, a rotating disk, a first guiding member extending in a first direction, and a second guiding member extending in a second direction. A first clamping member is provided on the first guiding member, and a second clamping member is provided on the second guiding member; the first direction, the second direction, and the central axis of the rotating disk are perpendicular to each other pairwise; a plurality of hinge portions evenly spaced in the circumferential direction are provided on the rotating disk; further included are a plurality of connecting rods with first ends respectively corresponding to and connected to the first clamping member and the second clamping member, and second ends of the plurality of connecting rods are respectively corresponding to and connected to four hinge portions; above the rotating disk, there is a reference plane that coincides with the mask after calibration; the rotational power source drives the rotating disk to rotate, and the connecting rods drive the first clamping member to slide on the first guiding member and the second clamping member to move synchronously on the second guiding member, so that the first clamping member and the second clamping member push the mask to coincide with the reference plane. As an optional implementation manner, the rotating disk rotates forward, and the first clamping member and the second clamping member move close to the reference plane to a clamping position; the rotating disk rotates reversely, and the first clamping member and the second clamping member move away from the reference plane to an open position; in the open position, the extending direction of the connecting rod is consistent with the extending direction of the first guiding member or the second guiding member to which it is correspondingly connected.

[0006] As an optional implementation manner, it further includes a bottom plate for carrying the rotating disk, the first guiding member, and the second guiding member; a blocking portion is provided on the side of the bottom plate; a mechanical limit structural member is provided on the first clamping member or the second clamping member; in the clamping position, the mechanical limit structural member abuts against the blocking portion to block the movement of the first clamping member and the second clamping member.

[0007] As an optional implementation manner, a clamping connection plate is provided on the first clamping member and / or the second clamping member; one or at least two flexible clamping blocks are provided on the clamping connection plate at intervals along the extending direction of the clamping connection plate.

[0008] As an optional implementation manner, a contact plane is provided on the flexible clamping block; when the mask coincides with the reference plane, the contact plane is parallel and abuts against the side of the mask.

[0009] As an optional implementation manner, it further includes a first detection module for detecting the first clamping member and the second clamping member in the clamping position and forming a detection electrical signal; it further includes a controller for receiving the detection electrical signal and controlling the rotational drive source to stop operating.

[0010] As an optional implementation manner, it further includes a second detection module for detecting the first clamping member and the second clamping member in the open position and the clamping position and sending a position electrical signal to the controller.

[0011] As an alternative embodiment, it further includes a mask support platform for carrying the mask; a third detection module is provided on the mask support platform for detecting the mask placed on the mask support platform.

[0012] As an alternative embodiment, a plurality of spaced-apart support structural members are provided on the mask support platform, and it further includes an air nozzle. The air nozzle is communicated with an air pump device through an air pipe; by blowing air to the mask, a thrust force that balances the gravity of the mask can be formed, so that the mask floats and a gap is formed between the mask and the support structural members; by sucking air, a negative pressure suction force acting on the mask can be formed, so that the mask abuts against the support structural members.

[0013] In a second aspect, an embodiment of the present application provides a wafer exposure apparatus, including a mask storage library, a mask table, a grasping mechanism, and the above-mentioned mask pre-alignment device; the grasping mechanism can place the mask placed in the mask storage library on the mask pre-alignment device, and the grasping mechanism can place the pre-positioned mask on the mask table.

[0014] The beneficial effects of the embodiments of the present application include: The mask pre-alignment device provided by the embodiments of the present application only uses one rotational power source, reducing the number of driving components, thereby simplifying the overall structural design, reducing the positioning difficulty during installation, and being beneficial to production manufacturing and rapid maintenance. At the same time, it effectively avoids the action delay deviation caused by signal delay and mechanical error caused by multiple sets of driving sources. When pre-positioning the mask in the embodiments of the present application, by ensuring the consistency of the actions of the clamping members, the position of the mask can be adjusted more accurately to coincide with the reference plane. In this way, the skew problem caused by inconsistent actions of the clamping members can be effectively reduced, the positioning accuracy of the mask can be improved, and the quality of the lithography process can be ensured. Since all clamping members can act simultaneously without waiting for the coordination between different driving sources, the alignment time is greatly shortened, and the working efficiency of the entire exposure process is improved. In addition, the simplified structural design also helps to reduce the failure rate and further improve the stability and reliability of the equipment operation.

[0015] The wafer exposure apparatus provided by the embodiments of the present application calibrates the position of the mask through the mask pre-alignment device, effectively reducing the offset amount of the mask. After the grasping mechanism places the mask on the mask table, the mask table can perform high-precision positioning. Therefore, the embodiments of the present application can effectively improve the mask alignment efficiency and lithography accuracy. Description of the Drawings

[0016] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0017] Figure 1 It is one of the structural schematic diagrams of the mask pre-aligning device according to the embodiment of the present application; Figure 2 It is the second structural schematic diagram of the mask pre-aligning device according to the embodiment of the present application; Figure 3 It is the third structural schematic diagram of the mask pre-aligning device according to the embodiment of the present application; Figure 4 It is the fourth structural schematic diagram of the mask pre-aligning device according to the embodiment of the present application; Figure 5 It is the fifth structural schematic diagram of the mask pre-aligning device according to the embodiment of the present application; Figure 6 It is the sixth structural schematic diagram of the mask pre-aligning device according to the embodiment of the present application; Figure 7 It is the state diagram of the first clamping member and the second clamping member in the open position according to the embodiment of the present application; Figure 8 It is the state diagram of the first clamping member and the second clamping member in the intermediate process position according to the embodiment of the present application; Figure 9 It is the state diagram of the first clamping member and the second clamping member in the clamping position according to the embodiment of the present application.

[0018] Icon: 100 - Mask pre-aligning device; 101 - Rotating power source; 102 - Rotating disk; 103 - First guiding member; 104 - Second guiding member; 105 - First clamping member; 106 - Second clamping member; 107 - Hinge portion; 108 - Link; 109 - Reference plane; 110 - Base plate; 111 - Blocking portion; 112 - Mechanical limit structure member; 113 - Clamping connection plate; 114 - Flexible clamping block; 115 - Contact plane; 116 - First detection module; 117 - Mask support table; 118 - Support structure member; 119 - Air nozzle; 120 - Coupling; 121 - Mask. Detailed implementation manners

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the following will clearly and completely describe the technical solutions in the embodiments of this application with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are some, but not all, of the embodiments of this application. Components of the embodiments of this application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of this application that is claimed, but merely represents selected embodiments of this application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of this application without creative efforts fall within the scope of protection of this application.

[0021] It should be noted that like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0022] In the description of this application, it should also be noted that unless otherwise clearly specified and limited, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0023] A reticle, also known as a photolithography reticle or a photomask, is a precision component used in the photolithography process in microelectronics and integrated optoelectronics manufacturing. The reticle is very sensitive to particles or contaminants. Therefore, the reticle is stored in a special reticle cassette and is only taken out of the reticle cassette by a manipulator and placed on the reticle stage for exposure during the exposure process. Conventional lithography machines generally directly take the reticle out of the reticle storage library and place it on the reticle stage for rough alignment and fine alignment. Since the displacement of the rough alignment and fine alignment moving mechanisms on the reticle stage is small, and the reticle is very likely to be skewed significantly in the reticle cassette or during the transfer by the manipulator. Once the skew is significant, it will cause the adjustment of the skewed position of the reticle to be unable to be completed during the rough alignment process on the reticle stage, thereby affecting the fine alignment and exposure.

[0024] Existing pre - alignment devices use multiple groups of cylinders or other electric telescopic drive sources, and cooperate with multiple groups of spring elements to achieve the motion control of the clamping members. On the one hand, due to the large number of drive sources, during the control process, due to signal delay and mechanical structure errors, it is easy to cause delays and deviations in the actions of the clamping members. Several clamping members cannot start moving and stop moving at the same time, resulting in very poor action consistency. Eventually, it not only causes a decrease in alignment accuracy but also leads to low alignment efficiency. On the other hand, the existing technology has a large number of drive sources and a complex structural design, resulting in troublesome positioning during installation, which is not conducive to production and rapid maintenance.

[0025] To solve the above - mentioned technical problems, the embodiment of the present application provides a mask pre - alignment device 100 and a wafer exposure device.

[0026] Referring to Figure 1 、 Figure 2 and Figure 3 As shown, the embodiment of the present application provides a mask pre - alignment device 100, including a rotary power source 101, a rotary disk 102, a first guide member 103 extending along a first direction, and a second guide member 104 extending along a second direction. There are two first clamping members 105 provided on the first guide member 103, and two second clamping members 106 provided on the second guide member 104; the first direction, the second direction, and the central axis of the rotary disk 102 are perpendicular to each other pairwise; there are four circumferentially evenly - spaced hinge portions 107 provided on the rotary disk 102; it also includes four link rods 108 whose first ends are respectively connected to the two first clamping members 105 and the two second clamping members 106 correspondingly, and the second ends of the four link rods 108 are respectively connected to the four hinge portions 107 correspondingly; above the rotary disk 102, there is a reference plane 109 that coincides with the mask 121 after calibration, and the central axis of the rotary disk 102 passes through the geometric center of the reference plane 109.

[0027] The rotary power source 101 drives the rotary disk 102 to rotate, and the link rods 108 drive the first clamping members 105 to slide on the first guide member 103 and the second clamping members 106 to move synchronously on the second guide member 104, so that the first clamping members 105 and the second clamping members 106 push the mask 121 to coincide with the reference plane 109, specifically as shown in the processes of Figure 7 、 Figure 8 and Figure 9 shown.

[0028] It should be noted that, referring to Figure 1 、 Figure 2 shown, the reference plane 109 is rectangular, and the dimensions of this rectangle are the same as the length and width dimensions of the mask 121 to be detected. The two first clamping members 105 are respectively arranged on the opposite sides of the reference plane 109, and the two second clamping members 106 are respectively arranged on the other two sides of the reference plane 109.

[0029] It should be noted that, referring to Figure 2 , Figure 3 and Figure 4 as shown, the rotating disk 102, the connecting rod 108, the first guiding member 103, the second guiding member 104, the first clamping member 105 and the second clamping member 106 of the embodiment of the present application form four crank-slider mechanisms that are circumferentially and evenly spaced around the rotating disk 102. The distance from the central axis of the rotating disk 102 to the hinge portion 107 forms the crank. When the crank is driven by the rotational power source 101, the first clamping member 105 and the second clamping member 106 are driven by the connecting rod 108 to approach or move away from the mask plate 121 on the first guiding member 103 and the second guiding member 104 respectively.

[0030] Exemplarily, referring to Figure 4 , Figure 5 as shown, the rotating disk 102 includes a central rotating portion and four extending rods in a cross-shaped structure, and the hinge portion 107 is provided at the free end of the extending rod.

[0031] In the embodiment of the present application, the rotating disk 102 is arranged at the central position of the reference plane 109, and then the connection relationship of the cranks of the four crank-slider mechanisms is established through the rotating disk 102. Therefore, the central rotating disk 102 can realize the synchronous movement of the two first clamping members 105 and the two second clamping members 106 after rotation. Since the physical structures of the crank, the connecting rod 108 and the sliding structure are the same, the non-delay action of the four clamping members can be realized, specifically reflected in the consistency of the start action, stop action, action stroke, propulsion speed and force of the first clamping member 105 and the second clamping member 106. The structures of the relevant components such as the connecting rods are the same and are arranged in central symmetry, which is convenient for processing, assembly, replacement and maintenance, improves the universality of the product, and can reduce the product cost.

[0032] That is to say, the embodiment of the present application can realize the start action and stop action of the first clamping member 105 and the second clamping member 106 at the same moment in a true sense through the above device, and at the same time ensure the consistency of the propulsion speed and force of the first clamping member 105 and the second clamping member 106.

[0033] Compared with the design of traditional multiple groups of cylinders or electric telescopic drive sources, this solution only uses one rotational power source 101, reduces the number of drive components, thereby simplifies the overall structural design, reduces the positioning difficulty during installation and the cumulative error of the assembly of each component, and is beneficial to production manufacturing and rapid maintenance. At the same time, it effectively avoids the action delay deviation caused by signal delay and mechanical error caused by multiple groups of drive sources.

[0034] When pre-aligning the mask 121 in the embodiment of the present application, by ensuring the consistent movement of the clamping members, the position of the mask 121 can be adjusted more accurately to coincide with the reference plane 109. This can effectively reduce the skew problem caused by inconsistent movement of the clamping members, improve the positioning accuracy of the mask 121, and ensure the quality of the lithography process. Since all the clamping members can move simultaneously without waiting for the coordination between different drive sources, the alignment time is greatly shortened, and the working efficiency of the entire exposure process is improved. In addition, the simplified structural design also helps to reduce the failure rate and further improve the stability and reliability of the equipment operation.

[0035] Description of the rotational power source 101: The rotational power source 101 in the embodiment of the present application can be a drive motor or a pneumatic motor. For example, a servo motor or other types of motors, a rotation drive mechanism, etc.

[0036] The output force of the motor is adjusted by the controller according to the load, which can achieve more precise operation and control, ensure the precise operation and positioning of the machine, and improve the system stability, production efficiency, and product quality.

[0037] Description of the first guiding member 103 and the second guiding member 104: The first guiding member 103 and the second guiding member 104 can adopt structures such as chutes or guide rails, and no special limitation is made thereto. Those skilled in the art can set them according to needs.

[0038] Refer to Figure 6 As shown, a transmission shaft is provided on the rotating disk 102 in the embodiment of the present application, and a coupling 120 is provided between the transmission shaft and the drive motor. The drive motor drives the rotating disk 102 to rotate through the coupling 120 and the transmission shaft.

[0039] Description of the coupling 120: Due to manufacturing errors, installation errors, or thermal expansion during operation, there may be axial, radial, or angular relative displacements between the two shafts being connected. The coupling 120 can compensate for these displacements within a certain range and reduce the impact on the equipment. In the embodiment of the present application, power is transmitted to the rotating disk 102 through the coupling 120. An elastic element is provided on the coupling 120, and the elastic element can absorb vibrations and reduce impact loads to protect the mask 121 and the mechanical structure from damage.

[0040] As an alternative embodiment, when the rotating disk 102 rotates forward, the first clamping member 105 and the second clamping member 106 move close to the reference plane 109 to the clamping position; when the rotating disk 102 rotates backward, the first clamping member 105 and the second clamping member 106 move away from the reference plane 109 to the open position; Refer to Figure 4As shown, in the open position, the extending direction of the connecting rod 108 is the same as that of the first guiding member 103 or the second guiding member 104 to which it is correspondingly connected.

[0041] It should be noted that the forward rotation of the rotating disk 102 in the embodiment of the present application causes the first clamping member 105 and the second clamping member 106 to move from the open position to the clamping position. The reverse rotation of the rotating disk 102 causes the first clamping member 105 and the second clamping member 106 to move from the clamping position to the open position.

[0042] Refer to Figure 4 、 Figure 7 As shown, in the open position, that is, when the first clamping member 105 and the second clamping member 106 are fully retracted, the extending direction of the connecting rod 108 is the same as that of the corresponding first guiding member 103 or the second guiding member 104. This means that the clamping member is in a position where it is maximally retracted, providing the largest space for the insertion or removal of the reticle 121, and at the same time ensuring the stability and reliability of the mechanical structure. Additionally, it should be noted that when the four connecting rods 108 as shown Figure 4 are respectively in the same extending direction as the first guiding member 103 and the second guiding member 104, at this time, the flexible clamping blocks 114 on the four sides are in the release position with the largest interval. At this time, whether the driving rotating disk 102 rotates forward or backward, it can achieve pulling the flexible clamping blocks 114 closer to the center along the guide rail direction, that is, achieving the clamping of the reticle, being able to adapt to more types of power sources, and facilitating the maintenance and debugging of the equipment.

[0043] It should be noted that in Figure 4 , since the rotating disk 102, or rather the crank, is the driving member, even if the extending direction of the connecting rod 108 is the same as that of the corresponding first guiding member 103 or the second guiding member 104, it will not enter a dead point state. That is to say, in the open position, the included angle between the connecting rod 108 and the guiding member is zero, and when changing from the open position to the clamping position, the included angle between the connecting rod 108 and the guiding member gradually increases. This connection method only requires one rigid connecting rod 108 to achieve the pushing and pulling actions of the first clamping member 105 and the second clamping member 106, and the driving force only depends on the forward or reverse rotation of the rotating driving source.

[0044] It should be noted that in the embodiment of the present application, the opening and closing actions of the clamping member can be achieved by the forward and reverse rotations of a single rotating power source 101, without a complex control system or multiple groups of independent driving sources, greatly simplifying the operation process and maintenance difficulty of the equipment. The forward and reverse rotation design of the rotating disk 102 makes the opening and closing of the clamping member more intuitive and easy to control, and the opening and closing degrees in the four directions are synchronized, improving the operation flexibility of the entire pre-alignment process.

[0045] Since the connecting rod 108 is in the same extending direction as the guide member in the open position, this not only maximizes the loading and unloading space of the mask plate 121, but also optimizes the spatial layout inside the device, reducing unnecessary structural complexity. Among them, the direction consistency of the connecting rod 108 and the guide member ensures the stable state of the clamping member in the open position, avoiding unexpected movement caused by misoperation or other factors, and enhancing the overall stability of the system.

[0046] Referring to Figure 2 , Figure 3 and Figure 4 As shown, as an alternative embodiment, it further includes a bottom plate 110 for carrying the rotating disk 102, the first guide member 103 and the second guide member 104; a blocking portion 111 is provided on the side of the bottom plate 110; a mechanical limit structural member 112 is provided on the first clamping member 105 or the second clamping member 106; in the clamping position, the mechanical limit structural member 112 abuts against the blocking portion 111 to block the movement of the first clamping member 105 and the second clamping member 106.

[0047] Exemplarily, the mechanical limit structural member 112 includes a limit set screw provided on the first clamping member 105. A threaded hole is provided on the first clamping member 105, and the limit set screw is inserted into the threaded hole. When the limit set screw abuts against the blocking portion 111, the movement of both the first clamping member 105 and the second clamping member 106 is restricted and they cannot move further towards the center.

[0048] It should be noted that the protruding length of the limit set screw can be adjusted to facilitate specific adjustment of the clamping position.

[0049] It should be noted that a limit set screw can also be provided on the second clamping member 106, and those skilled in the art can set it according to needs.

[0050] Referring to Figure 4 , Figure 5 As shown, as an alternative embodiment, a clamping connection plate 113 is provided on the first clamping member 105 and / or the second clamping member 106; one or at least two flexible clamping blocks 114 are arranged at intervals along the extending direction of the clamping connection plate 113 on the clamping connection plate 113.

[0051] Exemplarily, referring to Figure 4 , Figure 5 As shown, two long-side clamping connection plates 113 and two short-side clamping connection plates 113 are used. Two flexible clamping blocks 114 are provided on the long-side clamping connection plate 113, and one flexible clamping block 114 is provided on the short-side clamping connection plate 113. The two long-side clamping connection plates 113 are arranged adjacent to each other, and the two short-side clamping connection plates 113 are arranged adjacent to each other.

[0052] According to requirements, the two long sides can also be arranged relatively with the connecting plate 113 clamped, and the two short sides can be arranged relatively with the clamping plates.

[0053] Or two or three flexible clamping blocks 114 are respectively arranged on the four sides of the reference plane 109 to further increase the contact area with the side of the reticle 121.

[0054] Among them, referring to Figure 5 As shown, a contact plane 115 is provided on the flexible clamping block 114; when the reticle 121 coincides with the reference plane 109, the contact plane 115 is parallel and in contact with the side of the reticle 121.

[0055] Among them, the flexible clamping block 114 can be a polyurethane rectangular block. It has good buffering performance and can effectively protect the reticle 121 when contacting the reticle 121; secondly, polyurethane has excellent wear resistance and can effectively reduce friction when contacting the reticle 121.

[0056] It should be noted that the clamping surface of the flexible clamping block 114 in the embodiment of the present application is a plane, which has a larger contact surface when contacting and abutting against the reticle 121, so as to generate better and more accurate position correction ability.

[0057] In the embodiment of the present application, by increasing the contact area with the side of the reticle 121, specifically when calibrating the position, more parts of the flexible clamping block 114 are in contact with the side of the reticle 121 to limit the reticle 121. Therefore, the flexible clamping block 114 in the embodiment of the present application can provide more stable and accurate positioning, which helps to improve the alignment efficiency and alignment accuracy of the reticle 121.

[0058] Referring to Figure 5 As shown, as an optional implementation manner, it further includes a first detection module 116 for detecting the first clamping member 105 and the second clamping member 106 at the clamping position and forming a detection electrical signal; it further includes a controller for receiving the detection electrical signal and controlling the rotation drive source to stop operating.

[0059] It should be noted that the setting of the first detection module 116 facilitates the controller to control the rotation drive source to stop rotating and realize the electronic limit function. It should be noted that the electronic limit and the above-mentioned mechanical limit can be set at the same time to improve the safety and reliability of the entire device and prevent the first clamping member 105 and the second clamping member 106 from damaging the reticle 121.

[0060] Due to the consistency of the actions of the first clamping member 105 and the second clamping member 106, only one first detection module 116 can be provided in the embodiment of the present application, and only the clamping position of one first clamping member 105 needs to be detected. When the rotating disk 102 stops rotating, both the two first clamping members 105 and the two second clamping members 106 will stop acting. The above setting is beneficial to reducing the manufacturing cost and avoiding the use of multiple first detection modules 116.

[0061] As an alternative implementation manner, it further includes a second detection module for detecting the first clamping member 105 and the second clamping member 106 at the open position and the clamping position and sending a position electrical signal to the controller.

[0062] Furthermore, the embodiment of the present application further includes a second detection module. The second detection module is used to send a position electrical signal to the controller so that the controller can confirm whether the first clamping member 105 and the second clamping member 106 of the pre-aligning device are in the open position or the clamping position, which is beneficial for the grasping mechanism of the wafer exposure device to automatically load and unload the pre-aligning device and improve the automation working efficiency of the pre-alignment of the mask 121.

[0063] As an alternative implementation manner, referring to Figure 1 As shown, it further includes a mask support table 117 for carrying the mask 121; a third detection module is provided on the mask support table 117 for detecting the mask 121 placed on the mask support table 117.

[0064] In the embodiment of the present application, a third detection module is provided on the mask support table 117 to detect whether the mask 121 is placed on the mask support table 117. When the third detection module detects that the mask 121 is placed on the mask support table 117, the controller controls the rotating disk 102 to rotate so that the first clamping member 105 and the second clamping member 106 quickly calibrate the position of the mask 121.

[0065] It should be noted that the specific types of the above first detection module 116, second detection module, and third detection module can be set by those skilled in the art according to needs, and no special limitation is made thereto.

[0066] Exemplarily, the above detection module includes a photoelectric sensor, a microswitch, and a Hall effect sensor. The photoelectric sensor includes a transmissive type, a reflective type, etc.

[0067] Referring to Figure 1 and Figure 4As shown, as an alternative embodiment, a plurality of spaced-apart support structural members 118 are provided on the mask support table, and air nozzles 119 are provided on the mask support table 117. The air nozzles 119 are connected to an air pump device through air pipes; by blowing air through the air nozzles 119, a thrust force that balances the gravity of the mask 121 can be formed, so that the mask 121 floats and forms a gap with the support structural members 118; by sucking air, a negative pressure suction force acting on the mask 121 can be formed, so that the mask 121 abuts against the support structural members 118.

[0068] To ensure the levelness of the floating mask 121, a plurality of spaced-apart air nozzles 119 can be provided below the mask. Exemplarily, as Figure 4 shown, four evenly spaced air nozzles 119 are provided below the mask 121.

[0069] It should be noted that in the embodiment of the present application, by blowing air, the mask 121 is suspended, which can avoid friction between the mask 121 and the support structural members 118 during the centering process of the pre-alignment adjustment, reduce the frictional force received by the mask 121, improve the flexibility during the clamping and positioning process, and avoid abrasion of the mask 121. After the position of the mask 121 is adjusted in the embodiment of the present application, the blowing stops, and the mask 121 falls downward under its own gravity onto the support structural members 118. The lower surface of the mask 121 contacts the end of the air nozzle 119, and then the air nozzle 119 starts to pump air to vacuum-adsorb the mask 121. Therefore, in the present application, negative pressure fixation is achieved by pumping air, so that the mask 121 can be stably maintained in the alignment position, and even if the first clamping member 105 and the second clamping member 106 are removed, the mask 121 can be prevented from shifting, having strong attitude stability.

[0070] Among them, the size of the gap between the mask 121 and the support structural members 118 can be selected by those skilled in the art according to needs. It should be noted that the maximum gap between the mask 121 and the support structural members 118 does not exceed the size of the flexible clamping block 114 in the direction perpendicular to the mask 121 to prevent the flexible clamping block 114 from being unable to clamp the mask 121.

[0071] The embodiment of the present application provides a wafer exposure device, including a mask 121 storage library, a mask table, a grasping mechanism, and the above-mentioned mask pre-alignment device 100; the grasping mechanism can place the mask 121 placed in the mask 121 storage library on the mask pre-alignment device 100, and the grasping mechanism can place the pre-positioned mask 121 on the mask table.

[0072] In the embodiment of the present application, the position of the mask 121 can be calibrated by the mask pre-alignment device 100, effectively reducing the offset of the mask 121. After the grasping mechanism places the mask 121 on the mask table, it is convenient for the mask table to perform high-precision positioning. Therefore, the embodiment of the present application can effectively improve the mask alignment efficiency and lithography accuracy.

[0073] The foregoing is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. A mask pre-alignment device (100), characterized in that: The invention comprises a rotating power source (101), a rotating disk (102), a first guide member (103) extending along a first direction, and a second guide member (104) extending along a second direction, wherein the first guide member (103) is provided with a first clamping member (105), and the second guide member (104) is provided with a second clamping member (106); the first direction, the second direction and the central axis of the rotating disk (102) intersect each other perpendicularly; the rotating disk (102) is provided with a plurality of hinged portions (107) evenly spaced around the circumference; and the plurality of connecting members (107) whose first ends are respectively connected to the first clamping member (105) and the second clamping member (106). The invention relates to a rod (108), wherein the second ends of the plurality of connecting rods (108) are respectively connected to the four hinged parts (107); a reference plane (109) is provided above the rotating disk (102) and coincides with the mask plate (121) after calibration; the rotating power source (101) drives the rotating disk (102) to rotate, and the connecting rod (108) drives the first clamping member (105) to slide on the first guide member (103) and the second clamping member (106) to move synchronously on the second guide member (104), so that the first clamping member (105) and the second clamping member (106) push the mask plate (121) to coincide with the reference plane (109).

2. The mask pre-alignment device (100) according to claim 1, characterized in that: When the rotating disk (102) rotates forward, the first clamping member (105) and the second clamping member (106) move close to the reference plane (109) to a clamping position; when the rotating disk (102) rotates reversely, the first clamping member (105) and the second clamping member (106) move away from the reference plane (109) to an open position; in the open position, the extension direction of the connecting rod (108) is consistent with the extension direction of the first guide member (103) or the second guide member (104) connected thereto.

3. The mask pre-alignment device (100) according to claim 2, characterized in that: It also includes a bottom plate (110) for supporting the rotating disk (102), the first guide member (103) and the second guide member (104); a blocking portion (111) is provided on the side of the bottom plate (110); a mechanical limiting structure (112) is provided on the first clamping member (105) or the second clamping member (106); in the clamping position, the mechanical limiting structure (112) abuts against the blocking portion (111) to block the movement of the first clamping member (105) and the second clamping member (106).

4. The mask pre-alignment device (100) according to claim 1, characterized in that: The first clamping member (105) and / or the second clamping member (106) is provided with a clamping connection plate (113); the clamping connection plate (113) is provided with one or at least two flexible clamping blocks (114) arranged at intervals along the extension direction of the clamping connection plate (113).

5. The mask pre-alignment device (100) according to claim 4, characterized in that: The flexible clamping block (114) is provided with a contact plane (115); when the mask plate (121) and the reference position plane (109) coincide with each other, the contact plane (115) and the side edge of the mask plate (121) are parallel and in contact with each other.

6. The mask pre-alignment device (100) according to claim 2, characterized in that: It also includes a first detection module (116) for detecting the first clamping member (105) and the second clamping member (106) at the clamping position and generating a detection electrical signal; and a controller for receiving the detection electrical signal and controlling the rotation drive source to stop.

7. The mask pre-alignment device (100) according to claim 6, characterized in that: It also includes a second detection module, which is used to detect the first clamping member (105) and the second clamping member (106) in the open position and the clamping position and send a position electrical signal to the controller.

8. The mask pre-alignment device (100) according to claim 1, characterized in that: It also comprises a mask support platform (117) for carrying the mask (121); a third detection module is arranged on the mask support platform (117) for detecting the mask (121) placed on the mask support platform (117).

9. The mask pre-alignment device (100) according to claim 8, characterized in that: The mask plate support platform (117) is provided with a plurality of support structures (118) arranged at intervals; it also includes an air nozzle (119), the air nozzle (119) being connected to an air pump device via an air pipe; the air nozzle (119) can form a thrust to balance the gravity of the mask plate (121) by blowing air toward the mask plate (121), so that the mask plate (121) is suspended and a gap is formed between the mask plate (121) and the support structure (118); the air nozzle (119) can form a negative pressure suction force acting on the mask plate (121) by sucking air, so that the mask plate (121) and the support structure (118) are in contact.

10. A wafer exposure device, characterized in that: The invention comprises a mask plate (121) storage library, a mask stage, a gripping mechanism, and the mask plate pre-alignment device (100) according to any one of claims 1 to 9; the gripping mechanism can place the mask plate (121) placed in the mask plate (121) storage library on the mask plate pre-alignment device (100), and the gripping mechanism can place the pre-positioned mask plate (121) on the mask stage.

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