Electrostatic film motor, two-degree-of-freedom motor and mobile processing robot

Abstract

The invention discloses an electrostatic film motor, a two-degree-of-freedom motor and a mobile processing robot. The electrostatic film motor comprises a top insulating layer, a top cementing layer, a top electrode layer, a substrate layer, a bottom electrode layer, a bottom cementing layer and a bottom insulating layer which are sequentially arranged from top to bottom; the top insulating layer is used for electrically insulating the top electrode layer; the top cementing layer is used for bonding and fixing the top insulating layer and the top electrode layer; the top electrode layer comprises a plurality of electrodes which are arranged in parallel; the substrate layer is used for isolating the top electrode layer from the bottom electrode layer; the bottom electrode layer comprises a multi-phase electrode, and the multi-phase electrode of the bottom electrode layer and the multi-phase electrode of the top electrode layer are orthogonally arranged; the bottom cementing layer is used for bonding and fixing the bottom electrode layer and the bottom insulating layer; the bottom insulating layer electrically isolates the bottom of the electrostatic film motor. The problems that an electrostatic film motor is poor in motion flexibility and low in output force are solved.

Description

Technical Field

[0001] The present invention relates to the field of robots, and particularly to an electrostatic thin-film motor, a two-degree-of-freedom motor, and a mobile processing robot. Background Art

[0002] With the rapid development of social industrialization, the demand for processing and detecting large components such as spacecrafts, ships, large bridges, and wind power generation equipment has increased sharply. These components usually have complex geometric structures and oversized dimensions, making it difficult to transport them to traditional processing equipment for precise processing. Therefore, in order to meet the need for directly processing and detecting large structures on-site, in-situ processing technology has emerged. By combining processing equipment with mobile robots, flexible and efficient processing and detection of complex structures and large components can be achieved.

[0003] Currently, mobile robot technology has been applied to a certain extent in the field of in-situ processing. However, most existing mobile robots adopt rigid structures, resulting in the following limitations in practical applications: 1. Large weight: The rigid structure makes the overall weight of the robot relatively large, which is likely to damage the surface of the workpiece to be processed, and at the same time significantly increases energy consumption and operation burden. 2. Large volume: Due to the limitation of rigid transmission components, the overall volume of the mobile robot is relatively large, making it difficult to operate in narrow spaces. Especially in application scenarios where it is necessary to enter gap spaces, rigid structure robots are difficult to effectively enter or operate, resulting in the inability to complete fine processing and detection tasks. 3. Poor adaptability: Rigid structures are difficult to flexibly adapt to complex curved surfaces or irregular surfaces, which limits their movement and processing capabilities on components with curvature changes. In addition, the robustness of rigid structures is poor, and they are easily affected by vibration and impact during the processing process, reducing the stability of robot operation. As a new type of drive technology, the electrostatic thin-film motor performs linear drive through micro-scale electrodes, and has the advantages of ultra-thin, flexible, light weight, and high open-loop control accuracy, and at the same time has the characteristics of fast movement speed and large output force density. However, existing mobile robots based on electrostatic thin-film motors can only achieve a single degree of freedom of movement and cannot move flexibly in a plane, greatly limiting their application scenarios. Summary of the Invention

[0004] In view of the above deficiencies of the prior art, the purpose of the present invention is to provide an electrostatic thin-film motor, a two-degree-of-freedom motor, and a mobile processing robot to solve the problems of poor movement flexibility and low output force of the electrostatic thin-film motor, and improve the adaptability and operation performance of the mobile processing robot with a two-degree-of-freedom electrostatic thin-film motor in a complex environment.

[0005] The technical solution of the present invention is as follows:

[0006] The present invention provides an electrostatic thin-film motor, which includes a top insulation layer, a top bonding layer, a top electrode layer, a base layer, a bottom electrode layer, a bottom bonding layer, and a bottom insulation layer arranged in sequence from top to bottom;

[0007] The top insulation layer is used for electrically insulating the top electrode layer; the top bonding layer is used for bonding and fixing the top insulation layer and the top electrode layer; the top electrode layer includes multiple phases of electrodes arranged in parallel; the base layer is used for isolating the top electrode layer from the bottom electrode layer; the bottom electrode layer includes multiple phases of electrodes, and the multiple phases of electrodes of the bottom electrode layer are arranged orthogonally to the multiple phases of electrodes of the top electrode layer; the bottom bonding layer is used for bonding and fixing the bottom electrode layer and the bottom insulation layer; the bottom insulation layer provides electrical isolation for the bottom of the electrostatic thin-film motor.

[0008] Optionally, the electrostatic thin-film motor further includes a bottom bus, a top bus, top bus pads, and bottom bus pads. The electrodes of the top electrode layer are connected to the bottom bus through vias on the base layer and are connected to the corresponding bottom bus pads; the electrodes of the bottom electrode layer are connected to the top bus through vias on the base layer and are connected to the corresponding top bus pads.

[0009] Optionally, the electrostatic thin-film motor further includes:

[0010] An end structure, which is arranged at one or both ends of the electrostatic thin-film motor. The end structure is used for fixing the electrostatic thin-film motor to an external connector and is also used for connecting to an external power supply device.

[0011] Optionally, the end structure includes:

[0012] A mechanical connection through-hole, which is used for fixing the electrostatic thin-film motor to an external connector;

[0013] An electrode bus pad, on which three pads are provided, and electrical connection vias are provided on the pads. The electrode bus pad is used for connecting to an external power supply device to supply power to the electrostatic thin-film motor.

[0014] Optionally, the end structure includes:

[0015] A mechanical connection through-hole, which is used for fixing the electrostatic thin-film motor to an external connector;

[0016] An electrode bus pad is provided on any one end structure of one electrostatic thin-film motor, and six pads are provided on the electrode bus pad, and no electrode bus pad is provided on the other end structure.

[0017] The present invention also provides a two-degree-of-freedom motor, which includes:

[0018] A stator group, including at least two first electrostatic thin-film motors;

[0019] A rotor group, including at least one second electrostatic thin-film motor. Each second electrostatic thin-film motor is disposed between two first electrostatic thin-film motors, and the first electrostatic thin-film motors and the second electrostatic thin-film motor are stacked. The second electrostatic thin-film motor is configured to perform two-degree-of-freedom movement when a driving voltage is applied. The first electrostatic thin-film motor and the second electrostatic thin-film motor are both the electrostatic thin-film motors as described above.

[0020] Optionally, the two-degree-of-freedom motor further includes:

[0021] A gasket, disposed between two adjacent and stacked first electrostatic thin-film motors or second electrostatic thin-film motors. The gasket is used to control the distance between two adjacent first electrostatic thin-film motors or second electrostatic thin-film motors.

[0022] The present invention also provides a mobile processing robot, including the two-degree-of-freedom motor as described above.

[0023] Optionally, the mobile processing robot further includes:

[0024] Controllable adsorption feet, disposed at four ends of the first electrostatic thin-film motor or the second electrostatic thin-film motor in the two-degree-of-freedom motor. The controllable adsorption feet are used to adsorb on an adsorbed substrate.

[0025] Optionally, the mobile processing robot further includes:

[0026] A tool mounting platform, disposed on the first electrostatic thin-film motor or the second electrostatic thin-film motor in the two-degree-of-freedom motor. The tool mounting platform is used to mount a processing tool or a detection device.

[0027] The technical solution of the present invention forms a two-degree-of-freedom motor through a stator group and a rotor group. Among them, the stator group includes at least two first electrostatic thin-film motors; the rotor group includes at least one second electrostatic thin-film motor, and each second electrostatic thin-film motor is arranged between two first electrostatic thin-film motors, and the first electrostatic thin-film motor and the second electrostatic thin-film motor are stacked; the second electrostatic thin-film motor is used for two-degree-of-freedom movement when a driving voltage is applied. The electrostatic thin-film motor includes a top insulating layer, a top bonding layer, a top electrode layer, a base layer, a bottom electrode layer, a bottom bonding layer, and a bottom insulating layer arranged in sequence from top to bottom. Among them, the multi-phase electrodes of the bottom electrode layer are orthogonally arranged with the electrodes of the top electrode layer, and a double-layer orthogonal electrode structure can be formed. In this way, when the driving voltage is applied to the electrodes in two directions, the rotor group of the two-degree-of-freedom motor of this solution can move in a two-dimensional plane, meeting the requirements of multi-directional movement. Moreover, the specific number of stacked sheets of the electrostatic thin-film motors in the stator group and the rotor group can be adjusted according to actual needs, so as to flexibly adjust the output force of the two-degree-of-freedom motor, solve the problems of poor movement flexibility and low output force of the electrostatic thin-film motor, and improve the adaptability and operating performance of the mobile processing robot with the two-degree-of-freedom motor in a complex environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the structures shown in these drawings without creative efforts.

[0029] Figure 1 It is a schematic diagram of the structural stratification of an embodiment of the electrostatic thin-film motor of the present invention.

[0030] Figure 2 It is a schematic diagram of the structure of an embodiment of the electrostatic thin-film motor of the present invention.

[0031] Figure 3 It is a schematic diagram of the structure of an embodiment of the two-degree-of-freedom motor of the present invention.

[0032] Figure 4 It is a plan view of the electrode structure of the electrostatic thin-film motor in the two-degree-of-freedom motor of the present invention.

[0033] Figure 5 It is a schematic diagram of the structure of an embodiment of the mobile processing robot of the present invention.

[0034] Figure 6 It is a schematic diagram of the structure of another embodiment of the mobile processing robot of the present invention.

[0035] Explanation of the accompanying drawings: 10. stator group; 20. mover group; 1. electrostatic thin film motor; 2. top insulating layer; 3. top bonding layer; 4. top electrode layer; 5. base layer; 6. bottom electrode layer; 7. bottom bonding layer; 8. bottom insulating layer; 11. first electrostatic thin film motor; 21. second electrostatic thin film motor; 31. top bus; 32. bottom bus; 33. top bus pad; 34. bottom bus pad; 35. via; 40. end structure; 41. mechanical connection through hole; 42. electrode bus pad; 43. electrical connection via; 50. gasket; 60. controllable adsorption foot; 70. tool carrying platform; 80. portable drive source. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and effect of the present invention clearer and more specific, the present invention is further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0037] In the embodiments and the scope of the patent application, unless the text specifically defines the article, "a", "an", "the" and "the" may also include plural forms. If there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0038] It should be further understood that the term "comprising" used in the specification of the present invention refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof. It should be understood that when an element is said to be "connected" or "coupled" to another element, it can be directly connected or coupled to the other element, or there can also be intermediate elements. In addition, the "connection" or "coupling" used herein can include wireless connection or wireless coupling. The term "and / or" used herein includes all or any unit and all combinations of one or more associated listed items.

[0039] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as generally understood by those skilled in the art in the art to which the present invention belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as herein.

[0040] In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0041] With the rapid development of social industrialization, the demand for the processing and inspection of large components such as spacecraft, ships, large bridges, and wind power generation equipment has increased sharply. These components usually have complex geometric structures and oversized dimensions, making it difficult to transport them to traditional processing equipment for precise processing. Therefore, in order to meet the demand for directly processing and inspecting large structures on-site, in-situ processing technology has emerged. By combining processing equipment with mobile robots, flexible and efficient processing and inspection of complex structures and large components can be achieved.

[0042] Currently, mobile robot technology has been applied to a certain extent in the field of in-situ processing. However, most existing mobile robots adopt rigid structures, resulting in the following limitations in practical applications: 1. Large weight: The rigid structure makes the overall weight of the robot relatively large, which is likely to damage the surface of the workpiece to be processed, and at the same time significantly increases energy consumption and operation burden. 2. Large volume: Due to the limitations of rigid transmission components, the overall volume of the mobile robot is relatively large, making it difficult to operate in a narrow space. Especially in application scenarios where it is necessary to enter a gap space, it is difficult for a rigid structure robot to effectively enter or operate, resulting in the inability to complete fine processing and inspection tasks. 3. Poor adaptability: The rigid structure is difficult to flexibly adapt to complex curved surfaces or irregular surfaces, which limits its movement and processing capabilities on components with curvature changes. In addition, the robustness of the rigid structure is poor, and it is easily affected by vibration and impact during the processing process, reducing the stability of the robot operation. As a new driving technology, the electrostatic film motor performs linear driving through micro-scale electrodes, and has the advantages of being ultra-thin, flexible, light in weight, and high in open-loop control accuracy. At the same time, it has the characteristics of fast movement speed and large output force density. However, the existing mobile robots based on electrostatic film motors can only achieve a single degree of freedom of movement and cannot move flexibly in a plane, greatly limiting their application scenarios.

[0043] To solve the above problems, the present invention proposes an electrostatic film motor 1.

[0044] Referring to Figure 1 , in one embodiment, the electrostatic film motor 1 includes a top insulating layer 2, a top bonding layer 3, a top electrode layer 4, a base layer 5, a bottom electrode layer 6, a bottom bonding layer 7, and a bottom insulating layer 8, which are arranged in sequence from top to bottom;

[0045] The top insulation layer 2 is used for electrically insulating the top electrode layer 4; the top bonding layer 3 is used for bonding and fixing the top insulation layer 2 and the top electrode layer 4; the top electrode layer 4 includes electrodes arranged in parallel in multiple phases; the base layer 5 is used for isolating the top electrode layer 4 from the bottom electrode layer 6; the bottom electrode layer 6 includes electrodes in multiple phases, and the electrodes in multiple phases of the bottom electrode layer 6 are arranged orthogonally to the electrodes in multiple phases of the top electrode layer 4; the bottom bonding layer 7 is used for bonding and fixing the bottom electrode layer 6 and the bottom insulation layer 8; the bottom insulation layer 8 electrically isolates the bottom of the electrostatic thin-film motor 1.

[0046] In this embodiment, the top insulation layer 2 is usually made of an insulating material, which can provide electrical insulation to prevent short circuits between electrode layers. For example, it isolates the top electrode from other layers to prevent current leakage while maintaining the electric field distribution of the electrodes; the top bonding layer 3 is used to bond the top insulation layer 2 and the top electrode layer 4 together, which can ensure the stability and integrity of the structure; the top electrode layer 4 is the main working layer of the electrostatic thin-film motor 1, usually made of a conductive material, responsible for generating an electric field and interacting with the bottom electrode layer 6 to generate a driving electrostatic field. The top electrode layer 4 can include electrodes arranged in parallel in multiple phases (such as three-phase electrodes), and the specific number of phases can be set according to the actual situation and user requirements; the base layer 5 serves as an isolation layer, electrically isolating the top electrode from the bottom electrode to ensure the independence of the electric field distribution, and it is the support structure of the entire motor for the base layer 5, usually made of a strong material to provide mechanical strength and stability; the electrodes in multiple phases of the bottom electrode layer 6 are arranged orthogonally to the electrodes of the top electrode layer 4, which can form a double-layer orthogonal electrode structure. Such an electrode structure with orthogonal arrangement can achieve the two-degree-of-freedom movement of the electrostatic thin-film motor 1; the bottom bonding layer 7 is used to bond and fix the bottom electrode layer 6 and the bottom insulation layer 8 to ensure the integrity of the structure; the bottom insulation layer 8 provides electrical isolation and protection for the entire structure at the bottom. For example, it isolates the bottom electrode from the base layer 5 to prevent current leakage. In the electrostatic thin-film motor 1 of this embodiment, the orthogonal arrangement of the electrodes in multiple phases of the bottom electrode layer 6 and the top electrode layer 4 solves the problems of poor movement flexibility and low output force of the electrostatic thin-film motor 1.

[0047] Referring to Figure 1 and Figure 4 In one embodiment, the electrostatic thin-film motor 1 further includes a bottom bus 32, a top bus 31, a top bus pad 33, and a bottom bus pad 34. The electrodes of the top electrode layer 4 are connected to the bottom bus 32 through vias 35 on the base layer 5 and are connected to the corresponding bottom bus pads 34; the electrodes of the bottom electrode layer 6 are connected to the top bus 31 through vias 35 on the base layer 5 and are connected to the corresponding top bus pads 33.

[0048] In this embodiment, the orthogonal arrangement design of the top electrode layer 4 and the bottom electrode layer 6 is the key to realizing the two-degree-of-freedom movement of the electrostatic thin-film motor 1. Figure 4 The electrodes represented by solid lines are located in the top electrode layer 4, and the electrodes represented by dashed lines are located in the bottom electrode layer 6. The bottom bus 32 and the top bus 31 can be a metal layer for providing paths for current and signals; the top bus pad 33 and the bottom bus pad 34 are metal areas for connecting other components or wires. The electrodes of the top electrode layer 4 are connected to the bottom bus 32 through vias 35 on the base layer 5 and finally connected to the corresponding bottom bus pad 34. Similarly, the electrodes of the bottom electrode layer 6 are connected to the top bus 31 through vias 35 on the base layer 5 and finally connected to the corresponding top bus pad 33. The design of the electrodes in this embodiment ensures the independent driving ability of the top and bottom electrodes, and by supplying power to the pads through an external power supply, driving voltages can be respectively provided for the top and bottom electrodes, enabling precise electric field control.

[0049] Refer to Figure 2 , in one embodiment, the electrostatic thin-film motor 1 further includes:

[0050] An end structure 40, provided at one or both ends of the electrostatic thin-film motor 1, for fixing the electrostatic thin-film motor 1 to an external connector, and the end structure 40 is also used to connect an external power supply device.

[0051] In this embodiment, taking the electrostatic thin-film motor 1 as a quadrilateral for illustration, the end structure 40 can be provided at one or both ends of the electrostatic thin-film motor 1, enabling the electrostatic thin-film motor 1 to be connected and fixed to an external connector, and an external power supply can be connected through structures such as pads. By supplying power to the pads through the external power supply, driving voltages can be respectively provided for the top and bottom electrodes on the electrostatic thin-film motor 1, realizing precise electric field control. Specifically, whether to provide the end structure 40 at one end or both ends of the electrostatic thin-film motor 1 can be selected according to actual situations and user requirements.

[0052] Further, refer to Figure 2 , in one embodiment, the end structure 40 includes:

[0053] A mechanical connection through-hole 41 for fixing the electrostatic thin-film motor 1 to an external connector;

[0054] An electrode bus pad 42, on which three pads are provided, and electrical connection vias 43 are provided on the pads. The electrode bus pad 42 is used to connect an external power supply device to supply power to the electrostatic thin-film motor 1.

[0055] In this embodiment, the main function of the mechanical connection through-hole 41 is to provide a mechanical connection point for fixedly connecting the end structure 40 of the motor to other components (such as a circuit board, a packaging structure, etc.); the mechanical connection through-hole 41 can be formed by a metallization process, enabling the electrodes of the motor to be connected to an external circuit. The electrode bus pad 42 is a metal area for connecting the motor electrodes, adjacent to or overlapping with the mechanical connection through-hole 41. The design and layout of the electrode bus pad 42 need to consider the number, position, and electrical characteristics of the electrodes to ensure the normal operation and reliable connection of the motor. In this embodiment, three pads can be provided on the electrode bus pad 42, among which there are electrical connection vias 43 for simultaneously supplying power to multiple thin-film motors inside the entire motor group. This design not only reduces the wiring complexity but also ensures the electrical connection reliability of the motor group. It can be understood that the stator group or the mover group may be composed of multiple electrostatic thin-film motors, and the bus pads can conduct the bus pads on different electrostatic thin-film motors within the same group to achieve electrical connection.

[0056] In another embodiment, the end structure 40 includes:

[0057] A mechanical connection through-hole 41 for fixing the electrostatic thin-film motor 1 to an external connector;

[0058] On any one end structure 40 of one electrostatic thin-film motor 1, an electrode bus pad 42 is provided, and six pads are provided on the electrode bus pad 42, while no electrode bus pad 42 is provided on the other end structure 40.

[0059] In this embodiment, the electrostatic thin-film motor 1 can be fixed by a single-end fixing method. In the above embodiment, three pads are respectively provided on the electrode bus pads 42 at opposite ends of the electrostatic thin-film motor 1 for fixing, while in this embodiment, six pads are provided on the electrode bus pad 42 at any one end of the electrostatic thin-film motor 1 for single-end fixing; the mechanical connection through-hole can also be provided only on the end structure 40 at one end. Whether to specifically adopt double-end fixing or single-end fixing can be selected according to the actual application scenario and the specific needs of the user.

[0060] The present invention also proposes a two-degree-of-freedom motor.

[0061] Referring to Figure 3 , in one embodiment, the two-degree-of-freedom motor includes:

[0062] A stator group 10, including at least two first electrostatic thin-film motors 11;

[0063] The mover group 20 includes at least one second electrostatic thin-film motor 21. Each second electrostatic thin-film motor 21 is disposed between two first electrostatic thin-film motors 11, and the first electrostatic thin-film motors 11 and the second electrostatic thin-film motors 21 are stacked; the second electrostatic thin-film motor 21 is configured to perform two-degree-of-freedom motion when a driving voltage is applied; both the first electrostatic thin-film motor 11 and the second electrostatic thin-film motor 21 are the electrostatic thin-film motors as described above.

[0064] In this embodiment, the structures of the first electrostatic thin-film motor 11 and the second electrostatic thin-film motor 21 are the same as those of the electrostatic thin-film motor in the above embodiment. The two-degree-of-freedom motor can be composed of a stator group 10 and a mover group 20. The stator group 10 is the stationary part of the two-degree-of-freedom motor, and the mover group 20 is the rotating part of the two-degree-of-freedom motor. The stator group 10 can generate a magnetic field, and the mover group 20 moves under the force in this magnetic field, thereby realizing the conversion from electrical energy to mechanical energy; in this embodiment, the stator group 10 is composed of at least two first electrostatic thin-film motors 11, and the mover group 20 is composed of at least one second electrostatic thin-film motor 21. Moreover, the specific number of stacked first electrostatic thin-film motors 11 and second electrostatic thin-film motors 21 can be adjusted according to the output required by the application scenario. The total output force of the two-degree-of-freedom motor is proportional to the number of stacked electrostatic thin-film motors. Through this modular stacking design, the mover group 20 of the two-degree-of-freedom motor can meet multi-directional motion while flexibly adjusting the output force according to actual needs, further enhancing its adaptability and practicality.

[0065] It can be understood that the electrostatic thin-film motor (i.e., the first electrostatic thin-film motor 11 and the second electrostatic thin-film motor 21) utilizes the action of electrostatic force. Usually, an electric field is generated by applying a voltage between electrodes, so that the thin film or other moving components are driven by the electric field force. The moving part of the motor is usually a thin-film structure, and this thin film can be an insulating material that can deform or displace under the action of the electric field; therefore, during the driving process, a polyphase alternating current (such as three-phase alternating current with a phase difference of 120°) can be applied to the electrodes arranged in a preset direction in the two-degree-of-freedom motor, thereby realizing the linear motion of the mover group 20 along this direction. The specific preset direction can be set according to the actual situation and user needs. The speed of the linear motion can be determined by the formula v = 6pf, where p is the electrode pitch of the electrostatic thin-film motor, f is the frequency of the driving voltage, and v is the speed of the linear motion. When driving voltages are simultaneously applied to the electrodes in two directions, the mover group 20 can move in a two-dimensional plane. By regulating the frequency and energization time of the driving voltage, the mover group 20 can be made to complete complex trajectory motions.

[0066] The technical solution of the present invention constitutes a two-degree-of-freedom motor through a stator group 10 and a rotor group 20. Among them, the stator group 10 includes at least two first electrostatic thin-film motors 11; the rotor group 20 includes at least one second electrostatic thin-film motor 21, and each second electrostatic thin-film motor 21 is arranged between two first electrostatic thin-film motors 11, and the first electrostatic thin-film motor 11 and the second electrostatic thin-film motor 21 are stacked; the second electrostatic thin-film motor 21 is used to perform two-degree-of-freedom movement when a driving voltage is applied. In this way, when the driving voltage is applied to the electrodes in two directions, the two-degree-of-freedom motor of this solution can enable the rotor group 20 to move in a two-dimensional plane, meeting the requirements of multi-directional movement. Moreover, the specific number of stacked sheets of the electrostatic thin-film motors of the stator group 10 and the rotor group 20 can be adjusted according to actual needs, so as to flexibly adjust the output force of the two-degree-of-freedom motor, solve the problems of poor movement flexibility and low output force of the electrostatic thin-film motor, and improve the adaptability and operating performance of the mobile processing robot with the two-degree-of-freedom motor in a complex environment.

[0067] Referring to Figure 3 , in an embodiment, the two-degree-of-freedom motor further includes:

[0068] A gasket 50 is arranged between two adjacent stacked first electrostatic thin-film motors 11 or the second electrostatic thin-film motors 21, and the gasket 50 is used to control the distance between two adjacent first electrostatic thin-film motors 11 or the second electrostatic thin-film motors 21.

[0069] In this embodiment, the function of arranging the gasket 50 between two adjacent stacked first electrostatic thin-film motors 11 or the second electrostatic thin-film motors 21 is to control the distance between the motors, reduce the friction between the motors, and improve the running stability and efficiency of the motors. The composition of the gasket 50 can be the same as that of the end structure 40, and the specific description can refer to the above embodiment and will not be elaborated here.

[0070] The present invention also proposes a mobile processing robot.

[0071] In an embodiment, the mobile processing robot includes the two-degree-of-freedom motor as described above. It can be understood that since the above two-degree-of-freedom motor is used in the mobile processing robot of the present invention, therefore, the embodiments of the mobile processing robot of the present invention include all the technical solutions of all the embodiments of the above two-degree-of-freedom motor, and the achieved technical effects are also exactly the same, which will not be elaborated here.

[0072] Referring to Figure 5 , in an embodiment, the mobile processing robot further includes:

[0073] The controllable adsorption foot 60 is arranged on four ends of the first electrostatic thin-film motor 11 or the second electrostatic thin-film motor 21 in the two-degree-of-freedom motor, and the controllable adsorption foot 60 is used for adsorbing on the adsorbed substrate.

[0074] In this embodiment, based on the two-degree-of-freedom electrostatic thin-film motor 1, a mobile processing robot is designed. As Figure 5 shown, the robot is respectively connected with controllable adsorption feet 60 based on the electrostatic adsorption technology at four ends of the first electrostatic thin-film motor 11 or the second electrostatic thin-film motor 21. The controllable adsorption foot 60 is composed of two interdigitated electrodes, and its working principle is to generate a stable adsorption force through the electrostatic induction effect: when the adsorption foot approaches the substrate, one of the electrodes is grounded, and the other electrode is connected to a DC or AC power supply with a certain potential difference, and charges are induced on the surface of the conductor or non-conductor, so as to generate an electrostatic adsorption force between the controllable adsorption foot 60 and the adsorbed substrate. This design enables the mobile processing robot to have a stable attachment ability during movement in the plane, and through dynamically adjusting the adsorption force, the movement control can be flexibly realized, and it can stably adhere to the surface of the conductor or non-conductor. In this way, the robot can maintain reliable attachment on the surfaces of different materials and shapes, and through dynamically adjusting the adsorption force, the attachment and release operations can be flexibly adjusted, improving the movement and processing efficiency in the restricted space.

[0075] Refer to Figure 6 , in an embodiment, the mobile processing robot further includes:

[0076] A tool mounting platform 70 is arranged on the first electrostatic thin-film motor 11 or the second electrostatic thin-film motor 21 in the two-degree-of-freedom motor, and the tool mounting platform 70 is used for mounting a processing tool or a detection device.

[0077] In this embodiment, by setting the tool mounting platform 70, the mobile processing robot further expands its functions, can adapt to different curved surface environments (such as convex surfaces, concave surfaces and slit spaces, etc.) to realize flexible movement and high-precision processing tasks; the mobile processing robot uses the first electrostatic thin-film motor 11 or the second electrostatic thin-film motor 21 to provide the two-dimensional movement driving force in the plane, and combines the electrostatic adsorption ability of the controllable adsorption foot 60 to realize reliable attachment and flexible movement regulation. In this embodiment, the first electrostatic thin-film motor 11 is taken as an example for illustration, and specifically, it can be referred to Figure 6 ; multiple tool mounting platforms 70 are arranged in the robot structure (such as Figure 6Multiple tool mounting platforms 70) therein can be used to install and support processing tools or inspection equipment, supporting multi-task flexible operation; the controllable adsorption feet 60 can achieve stable attachment of the robot on curved surfaces or in slits by regulating the electrostatic adsorption force, providing a reliable guarantee for efficient movement and precise positioning in complex processing environments; further, a portable drive source 80 can be set in this embodiment to provide wireless drive capabilities and signal transmission functions, further expanding the application capabilities in different scenarios.

[0078] It can be understood that the mobile processing robot of this solution adopts a modular design, significantly improving its adaptability and practicality. Through the modular design concept, each functional unit of the mobile processing robot of the present invention (such as the electrostatic film motor, tool mounting platform 70, portable drive power supply 80) can be flexibly combined and replaced according to requirements, ensuring that different working conditions and task requirements can be completed. Through the high-precision two-dimensional movement achieved by the electrostatic film motor group and the attachment ability based on the electrostatic adsorption technology, the robot can complete slit processing, surface inspection and other flexible manufacturing tasks in a variety of complex environments, especially suitable for scenarios with high requirements for high precision and high flexibility, such as industrial manufacturing and precision machining fields.

[0079] It should be understood that the application of the present invention is not limited to the above examples. For those of ordinary skill in the art, improvements or transformations can be made according to the above description, and all such improvements and transformations should fall within the protection scope of the appended claims of the present invention.

Claims

1. An electrostatic thin film motor, characterized in that: The electrostatic thin film motor comprises a top insulating layer, a top adhesive layer, a top electrode layer, a base layer, a bottom electrode layer, a bottom adhesive layer and a bottom insulating layer which are arranged in sequence from top to bottom; The top insulating layer is used to electrically insulate the top electrode layer; the top adhesive layer is used to bond and fix the top insulating layer and the top electrode layer; the top electrode layer includes multi-phase parallel arranged electrodes; the base layer is used to isolate the top electrode layer from the bottom electrode layer; the bottom electrode layer includes multi-phase electrodes, and the multi-phase electrodes of the bottom electrode layer are arranged orthogonally to the multi-phase electrodes of the top electrode layer; the bottom adhesive layer is used to bond and fix the bottom electrode layer and the bottom insulating layer; the bottom insulating layer electrically isolates the bottom of the electrostatic thin film motor.

2. The electrostatic thin film motor according to claim 1, characterized in that: The electrostatic thin film motor also includes a bottom bus, a top bus, a top bus pad and a bottom bus pad. The electrodes of the top electrode layer are connected to the bottom bus through vias on the base layer and are connected to the corresponding bottom bus pads; the electrodes of the bottom electrode layer are connected to the top bus through vias on the base layer and are connected to the corresponding top bus pads.

3. The electrostatic thin film motor according to claim 1, characterized in that: The electrostatic thin film motor also includes: The end structure is arranged on one end or both ends of the electrostatic film motor, and the end structure is used to fix the electrostatic film motor to an external connecting member, and the end structure is also used to connect an external power supply device.

4. The electrostatic thin film motor according to claim 3, characterized in that: The end structure comprises: A mechanical connection through hole, used to fix the electrostatic thin film motor to an external connection member; The electrode bus pad is provided with three pads, the pads are provided with electrical connection vias, and the electrode bus pad is used to connect an external power supply device to supply power to the electrostatic film motor.

5. The electrostatic thin film motor according to claim 3, characterized in that: The end structure comprises: A mechanical connection through hole, used to fix the electrostatic thin film motor to an external connection member; Any one end structure on a piece of the electrostatic thin film motor is provided with an electrode bus pad, and six pads are provided on the electrode bus pad, while the other end structure is not provided with an electrode bus pad.

6. A two-degree-of-freedom motor, characterized in that: The two-degree-of-freedom motor comprises: The stator assembly includes at least two first electrostatic film motors; The mover group includes at least one second electrostatic film motor, each of which is arranged between two of the first electrostatic film motors, and the first electrostatic film motor and the second electrostatic film motor are arranged in a superimposed manner; the second electrostatic film motor is used to perform two-degree-of-freedom movement when a driving voltage is applied; the first electrostatic film motor and the second electrostatic film motor are both electrostatic film motors as described in any one of claims 1 to 5.

7. The two-degree-of-freedom motor according to claim 6, characterized in that: The two-degree-of-freedom motor also includes: A gasket is disposed between two adjacent stacked first electrostatic thin film motors or second electrostatic thin film motors, and is used to control the distance between the two adjacent first electrostatic thin film motors or second electrostatic thin film motors.

8. A mobile processing robot, characterized in that: It comprises a two-degree-of-freedom motor as described in any one of claims 6 to 7.

9. The mobile processing robot according to claim 8, characterized in that: The mobile processing robot also includes: The controllable adsorption foot is arranged on the four ends of the first electrostatic film motor or the second electrostatic film motor in the two-degree-of-freedom motor, and the controllable adsorption foot is used for adsorbing on the adsorbed substrate.

10. The mobile processing robot according to claim 8, characterized in that: The mobile processing robot also includes: A tool carrying platform is arranged on the first electrostatic thin film motor or the second electrostatic thin film motor in the two-degree-of-freedom motor, and the tool carrying platform is used for installing processing tools or detection equipment.

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