Pressure-controllable batch plane polishing tool and method
By designing a pressure controllable batch plane grinding tooling including metal blocks, workpiece rings, workpiece isolation rings and spring plungers, the problems of difficult grinding pressure and workpiece shape limitations in the prior art are solved, and efficient and accurate batch grinding is achieved.
Patent Information
- Application Number
- CN202510533558.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-27
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2045-04-27
AI Technical Summary
In the prior art, the planar grinding tooling has a complex structure and low processing efficiency. It is impossible to achieve quantitative control of arbitrary grinding pressure, and can only grind workpieces of specific shapes.
A pressure-controllable batch-planar grinding tool including metal blocks, workpiece rings, workpiece isolation rings and spring plungers is designed. By rotating the spring plunger, the downward pressure is controlled, and the gasket is pushed downward and the compression force is homogenized on the workpiece to be grinded.
The research and throwing pressure is achieved constant and easy to adjust, and uniform grinding and additional pressurized grinding of individual workpieces can be achieved according to the research and throwing needs, reducing the production cost of the grinding tooling and improving the research and throwing accuracy.
Smart Images

Figure CN120055979A_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the field of precision machining, and relates to a batch planar lapping tooling and method with controllable pressure. Background Art
[0002] A plane is one of the most common surface types of parts. Plane machining includes processes such as surface grinding, rotary table grinding, and ring polishing. Among them, the ring polishing process can be used to machine wafers with high precision, flat crystals for metrology, and high-precision planar parts, and the machining accuracy can reach the nanometer level. Ring polishing, that is, the annular continuous polishing process, belongs to a kind of replication polishing, which replicates the planar accuracy of the grinding disc onto the workpiece. This process has the advantages of simple machining and low cost, but the machining efficiency is low.
[0003] In the general lapping process, methods such as using a pressure block can be used to provide pressure for lapping, but this method cannot achieve quantitative control of any pressure. In batch grinding, the grinding efficiency is relatively low when relying on the self-weight of the parts. By putting in a pressure block to apply overall pressure, the pressure received by each workpiece is equalized, but it is impossible to apply additional pressure to individual parts that require more material removal.
[0004] Currently, the tooling structures available for batch grinding on the market are more complex, have relatively higher requirements for machining, have relatively high manufacturing costs for the tooling, and generally can only be used to grind workpieces with specific shapes. Patent [CN221111317U] discloses an annular grinding tooling for a large number of small-volume workpieces, which can install multiple workpieces on each mounting member for large-scale grinding. However, this tooling can only grind annular-shaped parts, and the grinding pressure of this tooling relies on the self-weight of the workpieces, resulting in relatively low grinding efficiency. Patent [CN108032196A] discloses a workpiece batch grinding device, whose frame is provided with a transmission device and a grinding assembly, and uses a stepping motor to enable the device to achieve the functions of batch workpiece feeding and batch grinding. However, this device has a complex mechanism and a high cost. Patent [CN206732805U] discloses a full-automatic planar grinding device, which realizes rapid batch grinding of workpieces at one time by reasonably setting the supporting rod and setting the support column to fix the workpiece. This device is designed with multiple motors, has a relatively high cost and relatively complex control, and the grinding pressure of the workpiece only relies on the self-weight of the workpiece, resulting in relatively low grinding efficiency. Summary of the Invention
[0005] In order to solve the problems in the prior art that the structure of the planar grinding and polishing tooling is complex, the processing efficiency is low, the quantitative control of any grinding pressure cannot be achieved, and only workpieces with specific shapes can be ground, etc., a batch planar grinding and polishing tooling with controllable pressure is proposed, including: a metal pressing block for providing pressure to the workpiece to be ground and polished; a workpiece ring is sleeved outside the metal pressing block; a workpiece ring oil groove is arranged at the bottom of the workpiece ring; a spring plunger is axially arranged inside the metal pressing block; a gasket is arranged at one end of the elastic pin of the spring plunger; a workpiece isolation ring is arranged at the bottom of the metal pressing block; a plurality of workpiece placement holes for embedding the workpiece to be ground and polished are axially arranged inside the workpiece isolation ring; a workpiece isolation ring oil groove is arranged between the workpiece placement holes; the spring plunger corresponds to the position of the workpiece placement hole; by rotating the spring plunger to move downward, the downward pressure is controlled, and the gasket is pushed downward to be pressed tightly, and the pressing force of the spring plunger is equalized on the workpiece to be ground and polished.
[0006] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, an elastic pin threaded hole and a metal pressing block screw connection hole are vertically penetrated on the metal pressing block; the spring plunger is fitted in the elastic pin threaded hole; a workpiece isolation ring screw connection hole corresponding to the position of the metal pressing block screw connection hole is arranged on the workpiece isolation ring; screws are fitted in the screw connection holes and the screw connection holes at the corresponding positions; the screws fixedly connect the metal pressing block and the workpiece isolation ring.
[0007] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, the workpiece ring and the workpiece isolation ring are in clearance fit. The workpiece ring is used to prevent the grinding fluid from flowing out of the gap between the workpiece ring and the workpiece isolation ring, so that more grinding fluid flows into the grinding and polishing tooling along the oil groove of the workpiece isolation ring; there is a gap between the workpiece ring and the metal pressing block, which is convenient for the grinding fluid to enter the grinding and polishing tooling.
[0008] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, the metal pressing block is a centrally symmetric cylindrical structure, one end of which is a cylindrical step; the other end is a cylinder with a diameter larger than the cylindrical step; a metal pressing block lifting ring bolt threaded hole is arranged at the center of the end face of the cylindrical step of the metal pressing block; the metal pressing block is bolted with a metal pressing block lifting ring bolt through the metal pressing block lifting ring bolt threaded hole.
[0009] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, a cylindrical step thread is arranged on the cylindrical surface of the cylindrical step of the metal pressing block; a protective cover is arranged on the metal pressing block and is matched with the cylindrical step thread.
[0010] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, the workpiece isolation ring is a vertically symmetric structure, and workpiece isolation ring oil grooves are arranged on both the upper and lower end faces of the workpiece isolation ring.
[0011] According to the above-mentioned batch planar grinding and polishing tooling with controllable pressure, the workpiece placement holes of the workpiece isolation ring are through holes distributed in a matrix, and the workpiece isolation ring oil grooves connect adjacent workpiece placement holes on the upper and lower end faces of the workpiece isolation ring. A circular passage is provided at the center of the upper end face of the workpiece isolation ring oil groove 5-2.
[0012] The method for grinding and polishing a plane using the above-mentioned batch planar grinding and polishing tooling with controllable pressure includes the following steps: S1: Clean the components of the grinding and polishing tooling; S2: Assemble the grinding and polishing tooling: S2.1: Place the workpiece ring on the surface of the workbench, screw the lifting ring bolt of the workpiece isolation ring into the workpiece isolation ring, and place the workpiece isolation ring into the workpiece ring; S2.2: Place the workpiece to be ground and polished into the workpiece isolation ring and place the gasket on the workpiece to be ground and polished, then unscrew the lifting ring bolt of the workpiece isolation ring; S2.2: Screw the lifting ring bolt of the metal pressing block into the metal pressing block, and place the metal pressing block on the workpiece isolation ring; Unscrew the lifting ring bolt of the metal pressing block; S2.3: Screw the spring plunger into the elastic stud threaded hole of the metal pressing block; S2.4: Screw the protective cover into the external cylindrical thread of the metal pressing block; S3: Add grinding fluid to the grinding and polishing tooling; S4: Start grinding the workpiece to be ground and polished.
[0013] According to the above-mentioned batch planar grinding and polishing method with controllable pressure, in step 2.2: First, use a pin to insert into the screw connection holes of the metal pressing block and the workpiece isolation ring for fixation; Then screw the screw into the screw connection hole of the workpiece isolation ring for fixation.
[0014] According to the above-mentioned batch planar grinding and polishing method with controllable pressure, in step S3: Drop the grinding fluid onto the top of the protective cover; The grinding fluid flows along the periphery of the protective cover and into the gap between the metal pressing block and the workpiece ring, and after entering, it flows to the upper end face of the workpiece isolation ring, and flows along the workpiece isolation ring oil groove on the upper end face of the workpiece isolation ring towards the workpiece to be ground and polished inside the workpiece isolation ring, and flows out from the workpiece isolation ring oil groove on the lower end face of the workpiece isolation ring and the workpiece ring oil groove 4-1 of the workpiece ring, forming a cycle of the grinding fluid.
[0015] The beneficial effects of the present invention are as follows: 1. The present invention connects the workpiece isolation ring and the metal pressing block by upper and lower snap-fastening bolts. The workpiece isolation ring with a workpiece placement hole of a corresponding shape is set according to the shape of the workpiece to be polished. The height of the metal pressing block can also be adjusted according to the polishing pressure requirement. As long as the position of the screw is kept unchanged, the reuse of the metal pressing block and the workpiece isolation ring in different workpieces can be ensured. The structure is simple, greatly reducing the production cost of the grinding tooling, and enabling batch polishing of workpieces to be polished in various shapes.
[0016] 2. The polishing pressure of the present invention for this tooling is constant and easy to adjust. By controlling the rotation angle of the spring plunger, the position of the spring plunger can be controlled, and finally the polishing pressure control can be achieved.
[0017] 3. The present invention can achieve uniform grinding and additional pressure grinding of individual workpieces to be polished according to the grinding requirements. Moreover, the pressure application method is flexible pressure application. When polishing a batch of workpieces to be polished at the same time, by controlling the polishing forces applied by different spring plungers, each workpiece to be polished will be subjected to an appropriate pressure during the processing, which is convenient for controlling the removal amount of each workpiece.
[0018] 4. The grinding liquid of the present invention is dripped from above the protective cover of the polishing tooling. The grinding liquid flows in along the gap between the metal pressing block and the workpiece ring around the protective cover. After entering, it flows to the upper end face of the workpiece isolation ring, and then flows along the oil groove on the upper end face of the workpiece isolation ring to the workpiece to be polished inside the workpiece isolation ring, and flows out from the oil groove on the lower end face of the workpiece isolation ring and the oil groove of the workpiece ring of the workpiece ring, forming a cycle of the grinding liquid, saving costs and improving the polishing accuracy at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic diagram of the overall work assembly of a batch plane polishing tooling with controllable pressure according to the present invention.
[0020] Figure 2 It is a schematic diagram of the overall assembly of a batch plane polishing tooling with controllable pressure according to the present invention.
[0021] Figure 3 It is a schematic diagram of the assembly of the workpiece isolation ring of a batch plane polishing tooling with controllable pressure according to the present invention.
[0022] Figure 4 It is a schematic diagram of the structure of the metal pressing block of a batch plane polishing tooling with controllable pressure according to the present invention.
[0023] Figure 5 It is a schematic diagram of the structure of the workpiece ring of a batch plane polishing tooling with controllable pressure according to the present invention.
[0024] Figure 6 It is a schematic diagram of the structure of the workpiece isolation ring of a batch plane polishing tooling with controllable pressure according to the present invention.
[0025] In the figure: 1: Metal block lifting ring bolt; 2: Metal block; 2-1: Cylindrical step; 2-2: Cylinder; 2-3: Elastic pin thread hole; 2-4: Metal block lifting ring bolt thread hole; 2-5: Bottom surface; 2-6: Metal block screw connection hole; 3: Screw; 4: Workpiece ring; 4-1: Workpiece ring oil groove; 5: Workpiece isolation ring; 5-1: Workpiece isolation ring screw connection hole; 5-2: Workpiece isolation ring oil groove; 5-3: Workpiece placement hole; 5-4: Outer cylindrical surface of workpiece isolation ring; 5-5: Lifting ring bolt thread hole; 6: Spring plunger; 7: Gasket; 8: Workpiece to be ground and polished; 9: Protective cover; 10: Workpiece isolation ring lifting ring bolt. Detailed implementation mode
[0026] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.
[0027] As Figures 1 to 4 shown: A batch planar grinding and polishing tooling with controllable pressure, including: a metal block 2 for pressing the workpiece 8 to be ground and polished; a workpiece ring 4 is sleeved outside the metal block 2; a workpiece ring oil groove 4-1 is arranged at the bottom of the workpiece ring 4; a spring plunger 6 is axially arranged inside the metal block 2; a gasket 7 is arranged at one end of the elastic pin of the spring plunger 6; a workpiece isolation ring 5 is arranged at the bottom of the metal block 2; a plurality of workpiece placement holes 5-3 for embedding the workpiece 8 to be ground and polished are axially arranged inside the workpiece isolation ring 5; a workpiece isolation ring oil groove 5-2 is arranged between the workpiece placement holes 5-3; the spring plunger 6 corresponds to the position of the workpiece placement hole 5-3; by rotating the spring plunger 6 to move downward, the downward pressure is controlled, and the gasket 7 is pushed downward to press the workpiece 8 to be ground and polished.
[0028] An elastic pin thread hole 2-3 and a metal block screw connection hole 2-6 are vertically penetrated on the metal block 2; the spring plunger 6 is arranged in the elastic pin thread hole 2-3 in a matching manner; a workpiece isolation ring screw connection hole 5-1 corresponding to the position of the metal block screw connection hole 2-6 is arranged on the workpiece isolation ring 5; screws 3 are arranged in the screw connection holes 2-6 and the corresponding screw connection holes 5-1 in a matching manner; the screws 3 fixedly connect the metal block 2 and the workpiece isolation ring 5.
[0029] The workpiece ring 4 and the workpiece isolation ring 5 are in clearance fit. The workpiece ring 4 is used to prevent the grinding fluid from flowing out of the gap between the workpiece ring 4 and the workpiece isolation ring 5, so that more grinding fluid flows into the grinding and polishing tooling along the oil groove 5-2 of the workpiece isolation ring 5; the workpiece ring 4 and the metal block 2 are in clearance fit, which is convenient for the grinding fluid to enter the grinding and polishing tooling.
[0030] The metal briquette 2 has a centrally symmetric cylindrical structure. One end is a cylindrical step 2-1, and the other end is a cylinder 2-2 with a diameter larger than that of the cylindrical step 2-1. At the center of the end face of the cylindrical step 2-1 of the metal briquette 2, there is a threaded hole 2-4 for the metal briquette lifting ring bolt. The metal briquette 2 is bolted to the metal briquette lifting ring bolt 1 through the threaded hole 2-4 for the metal briquette lifting ring bolt.
[0031] On the cylindrical surface of the cylindrical step 2-1 of the metal briquette 2, there is a thread for the cylindrical step. A protective cover 9 is provided on the metal briquette 2 and is matched with the thread of the cylindrical step.
[0032] The workpiece isolation ring 5 has an upper and lower symmetric structure, and workpiece isolation ring oil grooves 5-2 are provided on both the upper and lower end faces of the workpiece isolation ring 5.
[0033] The workpiece placement holes 5-3 of the workpiece isolation ring 5 are through holes distributed in a matrix. The workpiece isolation ring oil grooves 5-2 connect adjacent workpiece placement holes 5-3 on the upper and lower end faces of the workpiece isolation ring 5, and a circular passage is provided at the center of the upper end face of the workpiece isolation ring oil groove 5-2.
[0034] A method for polishing a plane by a batch plane polishing tooling with controllable pressure includes the following steps: S1: Clean the components of the polishing tooling. S2: Assemble the polishing tooling: S2.1: Place the workpiece ring 4 on the surface of the workbench. Screw the workpiece isolation ring lifting ring bolt 10 into the workpiece isolation ring 5, and place the workpiece isolation ring 5 into the workpiece ring 4. S2.2: Place the workpiece to be polished 8 into the workpiece isolation ring 5 and place the gasket 7 on the workpiece to be polished 8. Unscrew the workpiece isolation ring lifting ring bolt 10. S2.2: Screw the metal briquette lifting ring bolt 1 into the metal briquette 2, and place the metal briquette 2 on the workpiece isolation ring 5. Unscrew the metal briquette lifting ring bolt 1. S2.3: Screw the spring plunger 6 into the elastic pin threaded hole 2-3 of the metal briquette 2. S2.4: Screw the protective cover 9 onto the external cylindrical thread 2-1 of the metal briquette 2. S3: Add grinding fluid to the polishing tooling. S4: Start grinding the workpiece to be polished 8.
[0035] In step 2.2: First, insert a pin into the metal briquette screw connection hole 2-6 and the workpiece isolation ring screw connection hole 5-1 for fixation; then screw the screw 3 into the workpiece isolation ring screw connection hole 5-1 for fixation.
[0036] In step S3: The grinding fluid is dropped onto the top of the protective cover 9; the grinding fluid flows in along the gap between the metal pressing block 2 and the workpiece ring 4 around the protective cover 9. After entering, the grinding fluid flows to the upper end surface of the workpiece isolation ring 5, and flows along the workpiece isolation ring oil groove 5-2 on the upper end surface of the workpiece isolation ring 5 towards the workpiece 8 to be ground and polished within the workpiece isolation ring 5, and flows out from the workpiece isolation ring oil groove 5-2 on the lower end surface of the workpiece isolation ring 5 and the workpiece ring oil groove 4-1 of the workpiece ring 4, forming a cycle of the grinding fluid.
[0037] A batch planar grinding and polishing tooling with controllable pressure according to this embodiment includes a metal pressing block lifting ring bolt 1, a metal pressing block 2, a screw 3, a workpiece ring 4, a workpiece isolation ring 5, a spring plunger 6, a gasket 7, a protective cover 9, and a workpiece isolation ring lifting ring bolt 10.
[0038] The screw 3 is threadedly connected to the workpiece isolation ring through the connecting metal pressing block screw connection hole 2-6 and the workpiece isolation ring threaded hole 5-1 to tightly connect the metal pressing block 2 and the workpiece isolation ring 5; The elastic plunger threaded hole 2-3 of the metal pressing block 2 is threadedly connected to the spring plunger 6; the gasket 7 is arranged between the spring plunger 6 and the workpiece 8 to be ground and polished, and it is in point contact with the spring plunger 6 and surface contact with the workpiece 8 to be ground and polished; The metal pressing block lifting ring bolt 1 is threadedly connected to the metal pressing block 2 through the metal pressing block lifting ring bolt threaded hole 2-4; there is a gap between the inner cylindrical surface of the workpiece ring 4 and the cylindrical surface of the cylinder 2-2 of the metal pressing block 2 and the outer cylindrical surface 5-4 of the workpiece isolation ring to facilitate the grinding fluid to enter the grinding and polishing tooling; The workpiece ring 4 and the workpiece isolation ring 5 are in clearance fit. The workpiece ring 4 restricts the grinding fluid from flowing out through the gap between the workpiece ring 4 and the workpiece isolation ring 5, so that the grinding fluid flows into the grinding tooling along the workpiece isolation ring oil groove 5-2 of the workpiece isolation ring 5; The protective cover 9 is threadedly connected to the outer cylindrical thread 2-1 of the metal pressing block 2. The protective cover 9 is used to prevent the grinding fluid from entering the elastic pin threaded hole 2-3, the metal pressing block lifting ring bolt threaded hole 2-4, and the screw connection hole 2-6 on the metal pressing block 2, resulting in blockage; at the same time, it can also disperse the grinding fluid sprayed on the grinding and polishing tooling and make it flow into the gap between the inner cylindrical surface of the workpiece ring 4 and the cylindrical surface of the cylinder 2-2 of the metal pressing block 2 around the protective cover 9.
[0039] The metal pressing block 2 is a centrally symmetric structure, and its material is a high-density metal material to have a larger pressure range and is used to provide the grinding and polishing pressure for the workpiece 8 to be ground and polished.
[0040] The workpiece isolation ring 5 has a vertically symmetric structure and is provided with a workpiece placement hole 5-3 for placing the workpiece 8 to be polished. Both the upper and lower end faces of the workpiece isolation ring 5 are provided with workpiece isolation ring oil grooves 5-2. During the grinding process, the grinding fluid flows from the gap between the metal pressing block 2 and the workpiece ring 4 and the workpiece isolation ring oil groove 5-2 on the upper end face of the workpiece isolation ring 5 into the gap between the workpiece isolation ring 5 and the workpiece 8 to be polished, and then flows out through the workpiece isolation ring oil groove 5-2 on the lower end face of the workpiece isolation ring 5 and the workpiece ring oil groove 4-1 of the workpiece ring 4. The grinding fluid flows down from the edge of the grinding plate and returns to the liquid path of the ring polishing machine, and is dripped out again from the nozzle above the tooling in cooperation with an external liquid pump to achieve the circulating flow of the grinding fluid. Since the lower end face of the workpiece isolation ring 5 is in direct contact with the grinding plate of the workbench, wear will occur during the working process, and the workpiece isolation ring 5 is made of wear-resistant material.
[0041] The grinding pressure is achieved by controlling the relative position of the spring plunger 6 and the metal pressing block 2. By controlling the screwing depth of the spring plunger 6, the relative height between the spring plunger 6 and the metal pressing block 2 is changed. The greater the compression amount of the spring plunger 6, the greater the generated pressure. Finally, the pressure is evenly transmitted to the workpiece 8 to be polished through the gasket 7.
[0042] The gasket 7 is arranged between the spring plunger 6 and the workpiece 8 to be polished. Its main function is to transmit the pressure from the spring plunger 6 to the workpiece 8 to be polished and equalize the pressure to the workpiece 8 to be polished during this process. The gasket 7 avoids the direct contact between the spring plunger 6 and the workpiece 8 to be polished and effectively protects the surface integrity of the workpiece 8 to be polished. The gasket 7 is made of soft materials such as copper.
[0043] The assembly steps of a batch planar grinding and polishing tooling with controllable pressure in this embodiment are as follows: First, place the workpiece ring 4 on the surface of the workbench. Screw the workpiece isolation ring lifting bolt 10 into the workpiece isolation ring 5, place the workpiece isolation ring 5 into the workpiece ring 4, place the workpiece 8 to be polished into the workpiece isolation ring 5 and place the gasket 7 on the workpiece 8 to be polished, and then unscrew the workpiece isolation ring lifting bolt 10.
[0044] Second, screw the metal pressing block lifting bolt 1 into the metal pressing block 2, and place the metal pressing block 2 on the workpiece isolation ring 5; unscrew the metal pressing block lifting bolt 1.
[0045] If the metal pressing block 2 rotates relative to the lower workpiece isolation ring 5 and the screw 3 cannot be matched with the screw connection hole 5-1 of the lower workpiece isolation ring 5, a pin can be first inserted into the screw connection hole 2-6 of the metal pressing block 2 and the screw connection hole 5-1 of the workpiece isolation ring 5 for fixation, and then the screw 3 is screwed into the screw connection hole 5-1 of the workpiece isolation ring 5 for fixation; Then, screw the spring plunger 6 into the elastic pin threaded hole 2-3 of the metal pressing block 2 and rotate it to an appropriate depth according to the grinding and polishing requirements.
[0046] Finally, the protective cover 9 is screwed into the outer cylindrical thread 2 - 1 of the metal pressing block 2 .
[0047] Taking grinding a cubic workpiece as an example, the specific implementation method of the present invention is described. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.
[0048] The workpiece 8 to be polished is a cubic block with a length, width and height of 20 mm, made of bearing steel; the diameter of the workpiece isolation ring 5 is , the material is acrylic. The workpiece isolation ring 5 is a centrally symmetrical and upper and lower symmetrical structure, and includes workpiece insertion holes 5-3 for placing 20 workpieces 8 to be ground and polished. A workpiece isolation ring lifting eye bolt 10 is set in the center of the workpiece isolation ring 5. Since the workpiece isolation ring 5 and the workpiece ring 4 are clearance-matched, the use of the workpiece isolation ring lifting eye bolt 10 can prevent the workpiece isolation ring 5 from getting stuck when it is inserted into the workpiece ring 4. Workpiece isolation ring oil grooves 5-2 are set at the upper and lower ends of the workpiece isolation ring 5, and each workpiece insertion hole 5-3 has a workpiece isolation ring oil groove 5-2 that penetrates in both the horizontal and vertical directions. The workpiece isolation ring oil groove 5-2 is a semicircular shape with a cross-section of R1.5, and a circular passage is set in the center of the upper end surface of the workpiece isolation ring oil groove 5-2 to prevent the grinding fluid from entering the threaded hole 5-5 of the lifting eye bolt.
[0049] The outer cylindrical diameter of the metal pressing block 2 is 158mm, the material is stainless steel, and the weight is 5.4kg. There is a 2mm gap between the metal pressing block 2 and the workpiece ring 4, so that the grinding liquid can flow from the gap to the workpiece isolation ring 5. 20 elastic pin threaded holes 2-3 are set corresponding to the 20 workpiece insertion holes 5-3 in the workpiece isolation ring 5; the metal pressing block 2 is provided with a metal pressing block eyebolt threaded hole 2-4 at the center; four screw connection holes 2-6 are set on the metal pressing block 2; the cylindrical step thread on the metal pressing block 2 is threadedly matched with the protective cover 9. The metal pressing block 2 and the workpiece isolation ring 5 can provide a maximum pressure of 59.82N.
[0050] A spring plunger 6 with a suitable elastic modulus is selected. If the elastic modulus of the spring plunger 6 is too small, the pressure of the metal pressure block 2 cannot be completely released; if the elastic modulus of the spring plunger 6 is too large, the sensitivity of the pressure adjustment will decrease, resulting in an increase in the difficulty of controlling the pressure.
[0051] The following operations must be performed before grinding: Clean all parts to prevent residual grinding fluid from the previous processing from affecting the current processing.
[0052] According to the material removal amount required for each workpiece 8 to be lapped, adjust the screwing depth of each plunger. If some workpieces 8 to be lapped require more material removal, additional pressure should be applied to grind them. Therefore, these workpieces 8 to be lapped are symmetrically arranged on the workpiece isolation ring 5, and the screwing depth of the spring plunger 6 is relatively deeper. The remaining workpieces 8 to be lapped that only require a small amount of material removal can still be arranged therein, and the screwing depth of the spring plunger 6 is relatively shallower, so that different material removal effects can be achieved in the same machining process. If all workpieces 8 to be lapped require the same amount of material removal, only arrange the workpieces 8 to be lapped evenly on the workpiece isolation ring 5 and screw the spring plunger 6 into the same depth, so that each workpiece 8 to be lapped has the same amount of material removal.
[0053] The grinding process is as follows: First, set the entire grinding duration according to the requirements. Since grinding will cause the temperature of the parts to change, the grinding time should not be too long.
[0054] Next, control the grinding fluid so that it drips above the protective cover 9. The grinding fluid will flow in from the gap between the metal pressing block 2 and the workpiece ring 4 along the periphery of the protective cover 9. After entering, the grinding fluid flows to the upper end face of the workpiece isolation ring 5 and flows along the workpiece isolation ring oil groove 5-2 on the upper end face of the workpiece isolation ring 5 to the workpiece 8 to be lapped inside the workpiece isolation ring 5, and flows out from the workpiece isolation ring oil groove 5-2 on the lower end face of the workpiece isolation ring 5 and the workpiece ring oil groove 4-1 of the workpiece ring 4, finally forming a cycle of the grinding fluid.
[0055] Finally, after the lapping is completed, unscrew the protective cover 9, unscrew the spring plunger 6 and the screw 3, screw in the metal pressing block lifting ring bolt 1 to remove the metal pressing block 2, and remove the gasket 7, the workpiece 8 to be lapped and the workpiece isolation ring 5.
[0056] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.
Claims
1. A pressure-controllable batch plane polishing tool, characterized in that: include: A metal pressing block (2) for providing pressure to a workpiece (8) to be ground and polished; a workpiece ring (4) is sleeved on the outside of the metal pressing block (2); a workpiece ring oil groove (4-1) is provided at the bottom of the workpiece ring (4); a spring plunger (6) is axially provided inside the metal pressing block (2); a gasket (7) is provided at one end of the elastic pin of the spring plunger (6); a workpiece isolation ring (5) is provided at the bottom of the metal pressing block (2); a plurality of workpiece insertion holes (5-3) capable of inserting the workpiece (8) to be ground and polished are axially provided inside the workpiece isolation ring (5); a workpiece isolation ring oil groove (5-2) is provided between the workpiece insertion holes (5-3); the positions of the spring plunger (6) and the workpiece insertion holes (5-3) correspond to each other; the spring plunger (6) is rotated to move downward, thereby controlling the downward pressure, pushing the gasket (7) downward to press, and evenly distributing the pressing force of the spring plunger (6) on the workpiece (8) to be ground and polished.
2. A pressure-controllable batch plane polishing tool according to claim 1, characterized in that: The metal pressing block (2) is vertically penetrated by an elastic pin threaded hole (2-3) and a metal pressing block screw connection hole (2-6); the spring plunger (6) is cooperatively arranged in the elastic pin threaded hole (2-3); the workpiece isolation ring (5) is provided with a workpiece isolation ring screw connection hole (5-1) corresponding to the position of the metal pressing block screw connection hole (2-6); a screw (3) is cooperatively arranged in the screw connection hole (2-6) and the screw connection hole (5-1) at the corresponding position; the screw (3) fixes the metal pressing block (2) and the workpiece isolation ring (5) together.
3. A pressure-controllable batch plane polishing tool according to claim 1, characterized in that: The workpiece ring (4) and the workpiece isolation ring (5) are clearance-matched, and the workpiece ring (4) is used to prevent the grinding liquid from flowing out from the gap between the workpiece ring (4) and the workpiece isolation ring (5), so that more grinding liquid flows into the grinding and polishing tool along the oil groove (5-2) of the workpiece isolation ring (5); There is a gap between the workpiece ring (4) and the metal pressing block (2), which facilitates the entry of the grinding liquid into the grinding and polishing tooling.
4. A pressure-controllable batch plane polishing tool according to claim 1, characterized in that: The metal pressing block (2) is a centrally symmetrical cylindrical structure, one end of which is a cylindrical step (2-1); the other end is a cylinder (2-2) having a diameter greater than the cylindrical step (2-1); a metal pressing block eyebolt threaded hole (2-4) is provided at the center of the end surface of the cylindrical step (2-1) of the metal pressing block (2); and the metal pressing block (2) is bolted to the metal pressing block eyebolt (1) via the metal pressing block eyebolt threaded hole (2-4).
5. The pressure-controllable batch plane polishing tool according to claim 1, characterized in that: A cylindrical step thread is provided on the cylindrical surface of the cylindrical step (2-1) of the metal pressing block (2); and a protective cover (9) matching the cylindrical step thread is provided on the metal pressing block (2).
6. The pressure-controllable batch plane polishing tool according to claim 1, characterized in that: The workpiece isolating ring (5) has a vertically symmetrical structure, and workpiece isolating ring oil grooves (5-2) are provided on the upper and lower end surfaces of the workpiece isolating ring (5).
7. The pressure-controllable batch plane polishing tool according to claim 1, characterized in that: The workpiece insertion holes (5-3) of the workpiece isolation ring (5) are through holes distributed in a matrix, the workpiece isolation ring oil groove (5-2) connects adjacent workpiece insertion holes (5-3) on the upper and lower end surfaces of the workpiece isolation ring (5), and a circular passage is provided at the center of the upper end surface of the workpiece isolation ring oil groove 5-2.
8. A pressure-controlled batch plane polishing method using the pressure-controlled batch plane polishing tool according to claim 1, characterized in that: The following steps are involved: S1: Cleaning and polishing tooling parts; S2: Assemble the polishing tool: S2.1: Place the workpiece ring (4) on the worktable surface, screw the workpiece isolation ring eye bolt (10) into the workpiece isolation ring (5), and place the workpiece isolation ring (5) into the workpiece ring (4); S2.2: Place the workpiece to be ground (8) into the workpiece isolation ring (5) and place the gasket (7) on the workpiece to be ground (8), and unscrew the eye bolt (10) of the workpiece isolation ring; S2.2: screw the metal pressing block eye bolt (1) into the metal pressing block (2), and place the metal pressing block (2) on the workpiece isolation ring (5); screw out the metal pressing block eye bolt (1); S2.3: Screw the spring plunger (6) into the elastic pin threaded hole (2-3) of the metal pressure block (2); S2.4: Screw the protective cover (9) into the outer cylindrical thread (2-1) of the metal pressing block (2); S3: Adding abrasive liquid into the polishing tool; S4: Start grinding the workpiece to be polished (8).
9. A pressure-controlled batch plane polishing method according to claim 8, characterized in that: In step 2.2: first, insert the pin into the metal pressure block screw connection hole (2-6) and the workpiece isolation ring screw connection hole (5-1) to fix them; then screw the screw (3) into the workpiece isolation ring screw connection hole (5-1) to fix them.
10. A pressure-controlled batch plane polishing method according to claim 9, characterized in that: In step S3: the grinding liquid is dripped into the top of the protective cover (9); the grinding liquid flows along the periphery of the protective cover (9) from the gap between the metal pressing block (2) and the workpiece ring (4); after entering, the grinding liquid flows to the upper end surface of the workpiece isolation ring (5); along the workpiece isolation ring oil groove (5-2) on the upper end surface of the workpiece isolation ring (5) toward the workpiece (8) to be ground and polished in the workpiece isolation ring (5); and flows out from the workpiece isolation ring oil groove (5-2) on the lower end surface of the workpiece isolation ring (5) and the workpiece ring oil groove 4-1 of the workpiece ring (4), thereby forming a circulation of the grinding liquid.
Citation Information
Patent Citations
Workpiece batch grinding device
CN108032196A
Full -automatic plane lapping device
CN206732805U
Annular grinding tool for large-batch small-size workpieces
CN221111317U
A silicon carbide wafer polishing process
CN116810500A
Ring polishing machine for optical cold machining
CN212399080U
Cited By
Grinding device with constant grinding pressure
CN121608050A