Grinding tool and preparation method thereof

Abstract

The invention discloses a grinding tool and a preparation method thereof.The grinding tool is prepared from, by mass, 62%-83% of Al2O3, 5%-8% of SiO2, 0.5%-1.8% of Cr2O3, 1%-1.45% of TiO2, 1.51%-1.75% of MnO, 1.6%-3.4% of ZrO2, 2%-2.8% of ZnO and 2%-6% of cosolvent, and the grinding tool has the excellent performance of being resistant to high temperature and abrasion, high in hardness, free of toxic and side effects and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of grinding, and particularly to a grinding tool and a preparation method thereof. Background Art

[0002] With the rapid development of the semiconductor industry, the requirements for the flatness and precision of the surface of electronic components are getting higher and higher. During the processing of electronic components, a polishing pad is usually used to process the surface of the electronic components. The performance of the polishing pad affects the flatness and precision of the surface of the electronic components, and the material of the polishing pad plays a key role in its performance. At present, the types of polishing pads include, for example, cast iron, tin plates, diamond, etc., and there are problems such as easy rusting, easy wear, short service life, high cost, etc. Summary of the Invention

[0003] In view of the deficiencies in the prior art, an embodiment of the present invention provides a grinding tool. Based on the total mass of the grinding tool being 100%, the grinding tool includes the following components:

[0004] Al 2 O 3 : 62% - 83%,

[0005] SiO 2 : 5% - 8%,

[0006] Cr 2 O 3 : 0.5% - 1.8%,

[0007] TiO 2 : 1% - 1.45%,

[0008] MnO: 1.51% - 1.75%,

[0009] ZrO 2 : 1.6% - 3.4%,

[0010] ZnO: 2% - 2.8%,

[0011] Flux: 2% - 6%.

[0012] As a preferred solution, the flux is AlF 3 or CaF 2 .

[0013] To solve the same technical problem, an embodiment of the present invention also provides a preparation method of the grinding tool described above, including:

[0014] Processing the components into powdery particles;

[0015] Mixing the powdery particles and water to form a mud-like substance;

[0016] Add a binder to the mud to form a mixture;

[0017] Press the mixture into a shape to form a pressed body;

[0018] Sinter the pressed body to obtain a grinding tool.

[0019] As a preferred solution, the diameter of the powdery particles is 0 to 50 μm.

[0020] As a preferred solution, mixing the powdery particles and water to form a mud specifically includes:

[0021] Stir and mix the powdery particles and water in a ratio of 1:0.5 to form a mud.

[0022] As a preferred solution, adding a binder to the mud to form a mixture specifically includes:

[0023] Add polyvinyl alcohol to the mud to form a mixture, wherein the weight of the polyvinyl alcohol is 0.3% to 0.5% of the weight of the mud.

[0024] As a preferred solution, in the step of pressing the mixture into a shape to form a pressed body, the pressure parameter is 200 to 300 MPa, and the time is 10 to 15 min.

[0025] As a preferred solution, in the step of sintering the pressed body to obtain a grinding tool, the temperature is 1000 to 1200 °C, and the sintering time is 2 hours.

[0026] As a preferred solution, after sintering the pressed body to obtain a grinding tool, it further includes:

[0027] Perform a first roughness detection on the grinding surface of the grinding tool to obtain a first roughness detection result;

[0028] Based on the first roughness detection result, perform a pre-trimming operation on the grinding surface of the grinding tool, and record the pressure of each area of the grinding surface of the grinding tool during the pre-trimming operation to obtain a first pressure detection result;

[0029] Perform a second roughness detection on the grinding surface of the grinding tool to obtain a second roughness detection result;

[0030] Based on the first roughness detection result, the first pressure detection result, and the second roughness detection result, perform a trimming operation on the grinding surface of the grinding tool, and record the pressure of each area of the grinding surface of the grinding tool during the trimming operation to obtain a second pressure detection result;

[0031] Perform the third roughness detection on the grinding surface of the grinding tool to obtain the third roughness detection result;

[0032] When the second pressure detection result and the third roughness detection result do not meet the dressing qualification conditions, return to the step of performing the first roughness detection on the grinding surface of the grinding tool to obtain the first roughness detection result, until the second pressure detection result and the third roughness detection result meet the dressing qualification conditions.

[0033] As a preferred solution, the dressing qualification conditions specifically include:

[0034] Sum the pressure differences between the regions of the grinding surface of the grinding tool in the second pressure detection result;

[0035] When the sum of the pressure differences between the regions of the grinding surface of the grinding tool in the second pressure detection result is less than a preset pressure threshold, and the third roughness detection result meets the roughness requirements of the grinding surface of the grinding tool, it is determined that the second pressure detection result and the third roughness detection result meet the dressing qualification conditions.

[0036] Compared with the prior art, the beneficial effects of the embodiments of the present invention are as follows: The embodiments of the present invention provide a grinding tool and a preparation method thereof. Based on the total mass of the grinding tool being 100%, the grinding tool includes the following components: Al 2 O 3 : 62% - 83%, SiO 2 : 5% - 8%, Cr 2 O 3 : 0.5% - 1.8%, TiO 2 : 1% - 1.45%, MnO: 1.51% - 1.75%, ZrO 2 : 1.6% - 3.4%, ZnO: 2% - 2.8% and a cosolvent: 2% - 6%. The grinding tool has excellent properties such as high temperature resistance, wear resistance, high hardness, and non-toxic side effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 is a schematic flow chart of the preparation method of the grinding tool in the embodiments of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0038] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0039] An embodiment of the present invention provides a grinding tool. Based on the total mass of the grinding tool being 100%, the grinding tool includes the following components:

[0040] Al 2 O 3 : 62% to 83%,

[0041] SiO 2 : 5% to 8%,

[0042] Cr 2 O 3 : 0.5% to 1.8%,

[0043] TiO 2 : 1% to 1.45%,

[0044] MnO: 1.51% to 1.75%,

[0045] ZrO 2 : 1.6% to 3.4%,

[0046] ZnO: 2% to 2.8%,

[0047] Flux: 2% to 6%.

[0048] The grinding tool in the embodiment of the present invention is specifically a ceramic grinding disc, which is used to grind the surface of electronic components to meet the requirements of the surface flatness and precision of the electronic components.

[0049] Specifically, the mass percentage of the Al 2 O 3 in the grinding tool can be, for example, 62%, 63%, 64%, 65%, 66%, 67%, 68%, 69%, 70%, 71%, 72%, 73%, 74%, 75%, 76%, 77%, 78%, 79%, 80%, 81%, 82%, 83%, etc. Of course, the Al 2 O 3 can also be set to other mass percentages within the range of 62% to 83% according to actual usage requirements, and no more details will be elaborated here.

[0050] Specifically, the SiO 2The mass percentage in the grinding tool can be, for example, 5%, 6%, 7%, 8%, etc. Of course, the SiO 2 Other mass percentages within the range of 5% to 8% can also be set according to actual usage requirements, and no more details will be elaborated here.

[0051] Specifically, the Cr 2 O 3 The mass percentage in the grinding tool can be, for example, 0.5%, 0.6%, 0.7%, 0.8%, 0.9%, 1%, 1.1%, 1.2%, 1.3%, 1.4%, 1.5%, 1.6%, 1.7%, 1.8%, etc. Of course, the Cr 2 O 3 Other mass percentages within the range of 0.5% to 1.8% can also be set according to actual usage requirements, and no more details will be elaborated here.

[0052] Specifically, the TiO 2 The mass percentage in the grinding tool can be, for example, 1%, 1.05%, 1.1%, 1.15%, 1.2%, 1.25%, 1.3%, 1.35%, 1.4%, 1.45%, etc. Of course, the TiO 2 Other mass percentages within the range of 1% to 1.45% can also be set according to actual usage requirements, and no more details will be elaborated here.

[0053] Specifically, the mass percentage of MnO in the grinding tool can be, for example, 1.51%, 1.53%, 1.55%, 1.57%, 1.59%, 1.6%, 1.65%, 1.68%, 1.7%, 1.73%, 1.75%, etc. Of course, other mass percentages within the range of 1.51% to 1.75% can also be set according to actual usage requirements, and no more details will be elaborated here.

[0054] Specifically, the ZrO 2 The mass percentage in the grinding tool can be, for example, 1.6%, 1.65%, 1.7%, 1.75%, 1.8%, 1.85%, 1.9%, 1.95%, 2%, 2.5%, 3%, 3.4%, etc. Of course, the ZrO 2 Other mass percentages within the range of 1.6% to 3.4% can also be set according to actual usage requirements, and no more details will be elaborated here.

[0055] Specifically, the mass percentage of ZnO in the grinding tool can be, for example, 2%, 2.1%, 2.2%, 2.3%, 2.4%, 2.5%, 2.6%, 2.7%, 2.8%, etc. Of course, the ZnO can also be set to other mass percentages within the range of 2% to 2.8% according to actual usage requirements, and no more details will be elaborated here.

[0056] Specifically, the mass percentage of the solubilizer in the grinding tool can be, for example, 2%, 3%, 4%, 5%, 6%, etc. Of course, the solubilizer can also be set to other mass percentages within the range of 2% to 6% according to actual usage requirements, and no more details will be elaborated here.

[0057] In the embodiments of the present invention, the grinding tool has excellent properties such as high temperature resistance, wear resistance, high hardness, and non-toxic side effects.

[0058] In an alternative embodiment, the solubilizer is AlF 3 Or CaF 2 .

[0059] Correspondingly, the embodiments of the present invention also provide a preparation method of the grinding tool as described above. Please refer to Figure 1 , which is a schematic flowchart of the preparation method of the grinding tool in the embodiments of the present invention.

[0060] The preparation method of the grinding tool in the embodiments of the present invention includes:

[0061] Step S101, processing the components into powdery particles;

[0062] Step S102, mixing the powdery particles and water to form a paste;

[0063] Step S103, adding a binder to the paste to form a mixture;

[0064] Step S104, pressing the mixture into a shape to form a pressed body;

[0065] Step S105, sintering the pressed body to obtain the grinding tool.

[0066] In an alternative embodiment, the diameter of the powdery particles is 0 to 50 um, and can be, for example, 0 um, 1 um, 3 um, 5 um, 8 um, 10 um, 15 um, 20 um, 25 um, 30 um, 35 um, 40 um, 45 um, 50 um, etc. Of course, the diameter of the powdery particles can also be set to other values according to actual usage requirements, and no more details will be elaborated here.

[0067] In an alternative embodiment, the step S102 "mix the powdery particles and water to form a paste" specifically includes:

[0068] Stir and mix the powdery particles and water in a ratio of 1:0.5 to form a paste. In specific implementation, the powdery particles and water are uniformly stirred in a ratio of 1:0.5 to mix the powdery particles and water to form a paste, so that the paste is more evenly distributed with other materials for preparing the grinding tool after subsequent mixing.

[0069] In an alternative embodiment, the step S103 "add a binder to the paste to form a mixture" specifically includes:

[0070] Add polyvinyl alcohol to the paste to form a mixture, where the weight of polyvinyl alcohol is 0.3% - 0.5% of the weight of the paste. For example, it can be 0.3%, 0.35%, 0.4%, 0.45%, 0.5%, etc. Of course, the value of the weight of polyvinyl alcohol accounting for the weight of the paste can be set according to actual usage requirements and will not be elaborated further here.

[0071] In an alternative embodiment, in the step S104 "press the mixture into a shape to form a pressed body", the pressure parameter is 200 - 300 MPa and the time is 10 - 15 min.

[0072] Exemplarily, the pressure parameter can be, for example, 200 MPa, 210 MPa, 220 MPa, 230 MPa, 240 MPa, 250 MPa, 260 MPa, 270 MPa, 280 MPa, 290 MPa, 300 MPa, etc. Of course, the pressure parameter can also be set to other values according to actual usage requirements and will not be elaborated further here; the time can be, for example, 10 min, 11 min, 12 min, 13 min, 14 min, 15 min, etc. Of course, the pressing time can also be set to other values according to actual usage requirements and will not be elaborated further here.

[0073] In specific implementation, for example, a hot die casting machine can be used to press the mixture into a shape. Of course, other equipment can also be used to press the mixture into a shape and will not be elaborated further here.

[0074] In an alternative embodiment, in the step S105 "sinter the pressed body to obtain a grinding tool", the temperature is 1000 - 1200 °C and the sintering time is 2 hours.

[0075] Exemplarily, the sintering temperature can be, for example, 1000°C, 1010°C, 1020°C, 1030°C, 1040°C, 1050°C, 1060°C, 1070°C, 1080°C, 1090°C, 1100°C, 1110°C, 1120°C, 1130°C, 1140°C, 1150°C, 1160°C, 1170°C, 1180°C, 1190°C, 1200°C, etc. Of course, the sintering temperature can also be set to other temperatures according to actual usage requirements, and no more details will be elaborated here.

[0076] Through the grinding tool and its preparation method provided by the embodiments of the present invention, the bulk density of the grinding tool is 3.5 g / cm 3 , the hardness reaches Mohs hardness grade 9, the monomer strength is 220 - 260 MPa, and the wear (wear depth divided by the height of the grinding disc) is 0.02‰

[0077] In an alternative embodiment, after the step S105 "sinter the pressing body to obtain a grinding tool", the following steps are further included:

[0078] Perform a first roughness detection on the grinding surface of the grinding tool to obtain a first roughness detection result;

[0079] Based on the first roughness detection result, perform a pre-trimming operation on the grinding surface of the grinding tool, and record the pressure of each area of the grinding surface of the grinding tool during the pre-trimming operation to obtain a first pressure detection result;

[0080] Perform a second roughness detection on the grinding surface of the grinding tool to obtain a second roughness detection result;

[0081] Based on the first roughness detection result, the first pressure detection result, and the second roughness detection result, perform a trimming operation on the grinding surface of the grinding tool, and record the pressure of each area of the grinding surface of the grinding tool during the trimming operation to obtain a second pressure detection result;

[0082] Perform a third roughness detection on the grinding surface of the grinding tool to obtain a third roughness detection result;

[0083] When the second pressure detection result and the third roughness detection result do not meet the trimming qualification conditions, return to the step of performing a first roughness detection on the grinding surface of the grinding tool to obtain a first roughness detection result, until the second pressure detection result and the third roughness detection result meet the trimming qualification conditions.

[0084] In this embodiment, to ensure that the grinding tool has a good grinding surface, it is trimmed. Specifically, first, a first roughness detection is performed on the grinding surface of the grinding tool, and a pre-trimming operation is carried out based on the first roughness detection result. For example, if the roughness of a certain grinding surface area is too large, the trimming time of the trimming device in this area is extended during pre-trimming. During the pre-trimming operation, the pressure of each area of the grinding surface of the grinding tool is recorded. For example, multiple pressure sensors can be set on the side of the grinding tool opposite to the grinding surface or in the trimming device to detect the pressure of each area of the grinding surface of the grinding tool. After the pre-trimming operation, a second roughness detection is performed on the grinding surface of the grinding tool, and based on the first roughness detection result, the first pressure detection result, and the second roughness detection result, a trimming operation is carried out on the grinding surface of the grinding tool. For example, by comparing the second roughness detection result with the first roughness detection result, the areas of the grinding surface of the grinding tool that do not meet the roughness condition are determined. Based on the comparison result of the second roughness detection result and the first roughness detection result and the first pressure detection result, the surface shape of the trimming device or the trimming time of each area of the grinding surface of the grinding tool can be adjusted during the trimming operation to quickly and accurately determine the areas to be trimmed and the trimming strategy, thereby improving the trimming speed and performing precise trimming at the same time. During the trimming operation, the pressure of each area of the grinding surface of the grinding tool is recorded to obtain the second pressure detection result, and after the trimming operation, a third roughness detection is performed on the grinding surface of the grinding tool to obtain the third roughness detection result. If the second pressure detection result and the third roughness detection result do not meet the trimming qualification conditions, return to the step of performing the first roughness detection on the grinding surface of the grinding tool to obtain the first roughness detection result until the second pressure detection result and the third roughness detection result meet the trimming qualification conditions, thereby ensuring that the grinding surface of the grinding tool can meet the usage requirements and further ensuring that the grinding tool can work properly.

[0085] In addition, it should be noted that each area of the grinding surface of the grinding tool can be divided according to actual usage requirements. For example, it can be divided into 10 areas, 15 areas, 20 areas, etc., and the area of each area is basically equal. Of course, it can also be divided into other numbers of areas according to actual requirements.

[0086] Exemplarily, the trimming qualification conditions specifically include:

[0087] Sum the pressure differences between the areas of the grinding surface of the grinding tool in the second pressure detection result;

[0088] When the sum of the pressure differences between the regions of the grinding surface of the grinding tool in the second pressure detection result is less than a preset pressure threshold, and the third roughness detection result meets the roughness requirement of the grinding surface of the grinding tool, it is determined that the second pressure detection result and the third roughness detection result meet the dressing qualification conditions.

[0089] It should be noted that the dressing qualification conditions can be set according to the actual usage requirements of the user. For example, first sum the pressure differences between the regions in the second pressure detection result. If the sum of the pressure differences between the regions in the second pressure detection result is less than a preset pressure threshold, and the third roughness detection result meets the roughness requirement of the grinding surface of the grinding tool, it is determined that the second pressure detection result and the third roughness detection result meet the dressing qualification conditions; otherwise, they do not meet the dressing qualification conditions.

[0090] Compared with the prior art, the beneficial effects of the embodiments of the present invention are as follows: The embodiments of the present invention provide a grinding tool and a preparation method thereof. Based on the total mass of the grinding tool being 100%, the grinding tool includes the following components: Al 2 O 3 : 62% - 83%, SiO 2 : 5% - 8%, Cr 2 O 3 : 0.5% - 1.8%, TiO 2 : 1% - 1.45%, MnO: 1.51% - 1.75%, ZrO 2 : 1.6% - 3.4%, ZnO: 2% - 2.8% and a flux: 2% - 6%. The grinding tool has excellent properties such as high temperature resistance, wear resistance, high hardness, and no toxic side effects. In addition, during the transportation, storage of the grinding disk finished product and the transmission of each process during the manufacturing process from the finished product, the grinding disk will show uneven polishing. Therefore, the grinding wheel can be used to dress the surface of the grinding disk to obtain better flatness. The grinding tool provided by the embodiments of the present invention does not need to be dressed frequently, and has the advantages of high cutting and grinding efficiency, excellent surface quality of the processed parts, and greatly reducing the production cost.

[0091] The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and replacements can be made, and these improvements and replacements should also be regarded as the protection scope of the present invention.

Claims

1. A grinding tool, characterized in that based on the total mass of the grinding tool being 100%, the grinding tool comprises the following components: Al 2 O 3 : 62% to 83%, SiO 2 : 5% to 8%, Cr 2 O 3 : 0.5% to 1.8%, TiO 2 : 1% to 1.45%, MnO: 1.51% - 1.75%, ZrO 2 : 1.6% to 3.4%, ZnO: 2% - 2.8%, flux: 2% - 6%.

2. The grinding tool according to claim 1, characterized in that The cosolvent is AlF 3 or CaF 2 .

3. A method for preparing the grinding tool according to claim 1 or 2, characterized in that comprises: processing the components into powdery particles; mixing the powdery particles and water to form a paste; adding a binder to the paste to form a mixture; pressing the mixture into a shape to form a pressed body; sintering the pressed body to obtain the grinding tool.

4. The method for preparing the grinding tool according to claim 3, characterized in that the diameter of the powdery particles is 0 - 50 um.

5. The method for preparing the grinding tool according to claim 3, characterized in that the mixing of the powdery particles and water to form a paste specifically comprises: stirring and mixing the powdery particles and water in a ratio of 1:0.5 to form a paste.

6. The method for preparing the grinding tool according to claim 3, characterized in that the adding of a binder to the paste to form a mixture specifically comprises: adding polyvinyl alcohol to the paste to form a mixture, wherein the weight of the polyvinyl alcohol is 0.3% - 0.5% of the weight of the paste.

7. The method for preparing the grinding tool according to claim 3, characterized in that in the step of pressing the mixture into a shape to form a pressed body, the pressure parameter is 200 - 300 MPa and the time is 10 - 15 min.

8. The method for preparing the grinding tool according to claim 3, characterized in that in the step of sintering the pressed body to obtain the grinding tool, the temperature is 1000 - 1200 °C and the sintering time is 2 hours.

9. The method for preparing the grinding tool according to any one of claims 3 - 8, characterized in that after the step of sintering the pressed body to obtain the grinding tool, it further comprises: performing a first roughness detection on the grinding surface of the grinding tool to obtain a first roughness detection result; based on the first roughness detection result, performing a pre - trimming operation on the grinding surface of the grinding tool and recording the pressure of each area of the grinding surface of the grinding tool during the pre - trimming operation to obtain a first pressure detection result; performing a second roughness detection on the grinding surface of the grinding tool to obtain a second roughness detection result; based on the first roughness detection result, the first pressure detection result and the second roughness detection result, performing a trimming operation on the grinding surface of the grinding tool and recording the pressure of each area of the grinding surface of the grinding tool during the trimming operation to obtain a second pressure detection result; performing a third roughness detection on the grinding surface of the grinding tool to obtain a third roughness detection result; When the second pressure detection result and the third roughness detection result do not meet the dressing qualification conditions, return to the step of performing the first roughness detection on the grinding surface of the grinding tool to obtain the first roughness detection result, until the second pressure detection result and the third roughness detection result meet the dressing qualification conditions.

10. The method for preparing a grinding tool according to claim 9, wherein, the dressing qualification conditions specifically include: summing the pressure differences between the regions of the grinding surface of the grinding tool in the second pressure detection result; when the sum of the pressure differences between the regions of the grinding surface of the grinding tool in the second pressure detection result is less than a preset pressure threshold, and the third roughness detection result meets the roughness requirement of the grinding surface of the grinding tool, it is determined that the second pressure detection result and the third roughness detection result meet the dressing qualification conditions.

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