Anti-pollution vacuum valve

Abstract

The invention relates to the technical field of vacuum valves, and provides an anti-pollution vacuum valve which comprises a valve body and a valve element, the valve body comprises a flange used for being communicated with a pipeline, the valve element is linearly and slidably connected into the valve body through a driving assembly, and the valve element is connected with a protection assembly used for preventing by-products from entering the valve body in the linear sliding direction. When the valve is opened, the protection assembly and the flange are concentrically arranged, the valve body is provided with the first cavity used for containing the valve element and the second cavity used for containing the protection assembly on the two sides of the flange correspondingly, the protection assembly is connected to the valve element, a physical barrier is formed when the valve is opened, and by-products are directly prevented from entering the valve body; the problems that parts in the valve body are eroded and byproducts are deposited in the valve body are solved fundamentally, and the service life of the device is prolonged.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum valves, and more particularly, to an anti-pollution vacuum valve. Background Art

[0002] Vacuum valves, as key components in vacuum systems, are widely used to change the direction of gas flow, regulate the gas flow rate, and open and close pipelines. In traditional designs, valves usually aim to meet the basic life requirements, and their structures are optimized based on sealing and motion stability under normal working conditions. However, the applications of existing valves in high-precision and harsh working condition scenarios such as new energy and semiconductors are gradually showing deficiencies. Especially when facing complex medium environments, their reliability and durability are challenged.

[0003] Currently, vacuum valves often malfunction due to by-products generated by the mixed media in the chamber during actual use. These by-products are likely to invade the interior of the valve body when the valve is opened, causing chemical erosion and physical wear of key components. In addition, the deposition of by-products will also increase the frictional resistance between the valve core roller and the actuator, and even lead to problems such as bearing jamming. Although existing technologies have tried to alleviate such problems through material improvement or sealing structure optimization, the fundamental defects of by-product invasion and deposition have not been effectively solved, resulting in the actual life of the valve being much lower than the design expectation and making it difficult to meet the urgent needs of emerging fields for highly reliable vacuum valves. Summary of the Invention

[0004] The purpose of the present invention is to provide an anti-pollution vacuum valve, which solves the problems of shortened life, increased wear, and jamming caused by by-product erosion and deposition in the chamber during the actual working process of the vacuum valve.

[0005] The present invention is achieved through the following technical solutions: An anti-pollution vacuum valve includes a valve body and a valve core. The valve body includes a flange for connecting pipelines. The valve core is linearly slidably connected to the valve body through a driving component. Along the linear sliding direction, the valve core is connected with a protection component for blocking by-products from entering the valve body. When the valve is opened, the protection component is concentrically arranged with the flange. On both sides of the flange of the valve body, a first cavity for accommodating the valve core and a second cavity for accommodating the protection component are respectively provided.

[0006] Further, the protection component includes an auxiliary plate detachably connected to the valve core. The auxiliary plate is provided with a protection hole, and a protection ring sleeve that is in interference fit with the inner end wall of the valve body and the flange and is in close contact therewith is arranged in the protection hole. When the valve is opened, the inner wall of the inner ring of the protection ring sleeve is flush and butted with the inner hole wall of the flange.

[0007] Further, the valve core includes a connecting plate. On both sides of the connecting plate, a sealing plate and a support plate are respectively connected through spring pieces. Grooves are formed on the sealing plate and the support plate. A ball that cooperates with the groove to change the distance between the sealing plate and the support plate is connected to the connecting plate through a sleeve. After the auxiliary plate is snap-fitted and positioned with the connecting plate, it is fastened with bolts.

[0008] Further, a locking bolt for pressing the protective ring sleeve is threadedly connected to the auxiliary plate along the radial direction of the protective ring sleeve.

[0009] Further, the protective ring sleeve is made of rubber material.

[0010] Further, roller groups are symmetrically and rotatably connected to both sides of the valve core and the protection assembly.

[0011] Further, the roller group includes a first roller that abuts against the inner side wall of the valve body and a second roller that abuts against the inner end wall of the valve body.

[0012] Further, a limiting block for snap-fitting and positioning with the valve core when closing the valve is arranged inside the valve body.

[0013] Further, reinforcing ribs are arranged on the outer end face of the valve body, and a reinforcing plate is arranged on the outer side face of the valve body. The reinforcing plate is located between the two end flanges.

[0014] Further, the driving assembly includes a linear driving cylinder and a link mechanism. The linear driving cylinder is arranged on one side of the valve body. One end of the link mechanism is hinged to the output shaft of the linear driving cylinder, and the other end of the link mechanism is hinged to the valve core.

[0015] The present invention has at least the following advantages and beneficial effects:

[0016] (1) By connecting a protection assembly to the valve core, a physical barrier is formed during valve opening, directly blocking by-products from entering the interior of the valve body, fundamentally avoiding the problems of erosion of internal parts of the valve body and deposition of by-products in the valve body, and prolonging the service life of the device.

[0017] (2) By press-fitting the protective ring sleeve onto the auxiliary plate with an interference fit and using the locking bolt connected by radial threading to press the protective ring sleeve, it is convenient for disassembly and replacement, preventing the protective ring sleeve from shifting due to vibration or temperature difference, and ensuring long-term use stability.

[0018] (3) By arranging a limiting block inside the valve body and snap-fitting the limiting block with the support plate of the valve core, it is ensured that the sealing plate is completely aligned with the flange when closing the valve, avoiding leakage caused by uneven pressure on the sealing ring, and realizing the locking of the valve closing position. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic structural diagram of an anti-pollution vacuum valve provided by the present invention.

[0020] Figure 2Schematic structural diagram of a part of the valve body in an anti-pollution vacuum valve provided by the present invention.

[0021] Figure 3 Schematic connection diagram of the valve core, driving assembly and protection assembly in an anti-pollution vacuum valve provided by the present invention.

[0022] Figure 4 Cross-sectional view of the closed valve state of an anti-pollution vacuum valve provided by the present invention.

[0023] Figure 5 Cross-sectional view of the open valve state of an anti-pollution vacuum valve provided by the present invention.

[0024] Figure 6 Front view of the valve core in an anti-pollution vacuum valve provided by the present invention.

[0025] Figure 7 Cross-sectional view of the valve core in an anti-pollution vacuum valve provided by the present invention.

[0026] Figure 8 Schematic structural diagram of the connecting plate in an anti-pollution vacuum valve provided by the present invention.

[0027] Figure 9 Schematic structural diagram of the protection assembly in an anti-pollution vacuum valve provided by the present invention.

[0028] Figure 10 For the present invention Figure 9 Partial enlarged view at position A.

[0029] Figure 11 For the present invention Figure 9 Partial enlarged view at position B.

[0030] Reference numerals: 1-valve body, 10-flange, 11-first cavity, 12-second cavity, 13-limit block, 14-reinforcing rib, 15-reinforcing plate, 2-valve core, 20-socket, 21-connecting plate, 22-sealing plate, 23-supporting plate, 24-spring piece, 25-ball, 26-sealing ring, 3-driving assembly, 31-linear driving cylinder, 32-linkage mechanism, 4-protection assembly, 40-protection hole, 41-auxiliary plate, 42-protection ring sleeve, 43-lock bolt, 5-roller group, 51-first roller, 52-second roller. Detailed implementation manners

[0031] The following are the detailed implementation manners in conjunction with the drawings.

[0032] Embodiment

[0033] As Figures 1 to 11As shown, in this embodiment, a pollution-proof vacuum valve is mainly disclosed, which includes a valve body 1 and a valve core 2. The valve body 1 includes a flange 10 for connecting pipelines. The valve core 2 is linearly slidably connected to the valve body 1 through a driving assembly 3. Along the linear sliding direction, the valve core 2 is connected with a protection assembly 4 for blocking by-products from entering the valve body 1. When the valve is opened, the protection assembly 4 is concentrically arranged with the flange 10. On both sides of the flange 10 of the valve body 1, a first cavity 11 for accommodating the valve core 2 and a second cavity 12 for accommodating the protection assembly 4 are respectively provided. Specifically, when the valve is closed, the valve core 2 is concentrically arranged with the flange 10, blocking the connection of the pipelines connected by the two flanges 10. At this time, the protection assembly 4 is located in the second cavity 12 to avoid the attachment of residual by-products. When the valve is opened, the valve core 2 drives the protection assembly 4 to linearly move until the protection assembly 4 is concentrically and seamlessly butted with the flange 10. At this time, the valve core 2 is located in the first cavity 11. Throughout the process, the protection assembly 4 moves synchronously with the valve core 2 to ensure the dynamic consistency of sealing and protection. By setting the protection assembly 4 coaxial with the flange 10, a physical barrier is formed when the valve is opened, directly blocking by-products from entering the interior of the valve body 1, fundamentally avoiding the erosion of internal parts of the valve body 1 and the deposition of by-products in the valve body 1, and extending the service life of the device.

[0034] Further, in specific implementation, as Figures 3 to 9 shown, the above protection assembly 4 provided in the embodiment of the present invention includes an auxiliary plate 41 detachably connected to the valve core 2. The auxiliary plate 41 is provided with a protection hole 40. An interference fit is provided in the protection hole 40 with a protection ring sleeve 42 that is in close contact with the inner end wall of the valve body 1 and the flange 10. When the valve is opened, the inner wall of the inner ring of the protection ring sleeve 42 is flush and butted with the inner hole wall of the flange 10. Specifically, the auxiliary plate 41 is detachably connected to the valve core 2, which is convenient for replacing the worn protection ring sleeve 42 and reducing the maintenance cost. The protection ring sleeve 42 is flush and butted with the inner hole wall of the flange 10 to eliminate the gap and prevent by-products from seeping in from the edge. The protection ring sleeve 42 has an interference fit with the protection hole 40, and a tight fit can be achieved without additional seals, simplifying the structure and improving reliability. When the valve is opened, the protection ring sleeve 42 extends outward synchronously with the auxiliary plate 41, and when the valve is closed, it retracts into the second cavity 12 with the auxiliary plate 41, and is dynamically adapted to the flange 10 throughout the process to avoid jamming.

[0035] Furthermore, the valve core 2 includes a connecting plate 21, and the two sides of the connecting plate 21 are respectively connected to the sealing plate 22 and the supporting plate 23 through spring sheets 24, and the sealing plate 22 and the supporting plate 23 are provided with a socket 20, and the connecting plate 21 is connected to a ball 25 through a sleeve to cooperate with the socket 20 for changing the distance between the sealing plate 22 and the supporting plate 23, and the auxiliary plate 41 is fastened with bolts after being snap-fitted and positioned with the connecting plate 21. Specifically, the valve core 2 can adopt the existing technology, and a sealing ring 26 is connected to the outside of the sealing plate 22, and the sealing plate 22 and the supporting plate 23 are both provided with a socket 20 that cooperates with the ball 25. When the ball 25 is located at the bottom of the socket 20, the distance between the sealing plate 22 and the supporting plate 23 is the smallest, so that the valve core 2 can pass smoothly in the first cavity 11. When the valve is closed, the valve core 2 reaches a predetermined position, the connecting plate 21 moves relative to the sealing plate 22 and the supporting plate 23, and the ball 25 slides outward from the bottom of the socket 20, opening the sealing plate 22 and the supporting plate 23, so that the sealing ring 26 on the sealing plate 22 is tightly against the flange 10, and the valve is sealed. The positioning by the buckle and the bolt fastening can ensure the positioning accuracy of the auxiliary plate 41 and the connecting plate 21 and simplify the assembly process.

[0036] Preferably, the auxiliary plate 41 is threadedly connected along the radial direction of the protective ring sleeve 42 with a locking bolt 43 for tightening the protective ring sleeve 42. The protective ring sleeve 42 is prevented from being displaced due to vibration or temperature difference, ensuring long-term stability. In addition, the threaded connection allows the locking torque to be adjusted according to the material properties to adapt to the needs of protective ring sleeves 42 with different hardness. In addition, the protective ring sleeve 42 is made of rubber material. It has high elastic deformation ability and can compensate for slight deformation or assembly errors between the flange 10 and the valve body 1. It has good resistance and prolongs the life of the protective component 4. At the same time, the rubber can absorb the impact vibration of the valve core 2 during movement, reduce noise, and is suitable for precision equipment environments.

[0037] Furthermore, in the specific implementation, Figure 6 , Figures 9 to 11 As shown, both sides of the valve core 2 and the protection component 4 provided in the embodiment of the present invention are symmetrically connected with roller groups 5 for rotation. The valve core 2 and the protection component 4 are evenly stressed during the sliding process to avoid jamming or wear caused by deflection. The rotation of the roller replaces the traditional sliding friction, reduces the movement resistance, and prolongs the service life of the valve. The roller is in point contact with the wall of the valve body 1, which reduces the area of ​​byproduct adhesion and reduces the risk of jamming.

[0038] Preferably, the roller assembly 5 includes a first roller 51 abutting against the inner side wall of the valve body 1 and a second roller 52 abutting against the inner end wall of the valve body 1. The first roller 51 contacts the side wall of the valve body 1 to limit lateral deviation; the second roller 52 contacts the end wall to limit longitudinal movement, ensuring the accuracy of the motion trajectory and improving the stability of the device to a limited extent.

[0039] Furthermore, in the specific implementation, Figure 2As shown, the valve body 1 provided in the embodiment of the present invention is provided with a limit block 13 for snapping and positioning with the valve core 2 when closing the valve. Specifically, the limit block 13 is provided on the inner wall of the valve body 1 close to the support plate 23. The limit block 13 snaps with the support plate 23 of the valve core 2 to ensure that the sealing plate 22 is completely aligned with the flange 10 when closing the valve, thereby avoiding leakage caused by the bias of the sealing ring 26. At the same time, when closing the valve, since the ball 25 opens the support plate 23 and the sealing plate 22, the limit block 13 snaps into the bayonet provided in the support plate 23 to lock the valve closing position.

[0040] Furthermore, in the specific implementation, if Figure 1 , Figure 2 As shown, the outer end surface of the valve body 1 provided in the embodiment of the present invention is provided with a reinforcing rib 14, and the outer side surface of the valve body 1 is provided with a reinforcing plate 15, and the reinforcing plate 15 is located between the flanges 10 at both ends. The strength and rigidity of the valve body 1 structure are improved by providing the reinforcing rib 14 and the reinforcing plate 15. The reinforcing plates 15 are distributed between the flanges 10, which can effectively disperse the thermal deformation caused by the temperature difference and maintain the coaxiality of the flanges 10.

[0041] Furthermore, in the specific implementation, Figure 3 As shown, the above-mentioned drive assembly 3 provided in the embodiment of the present invention includes a linear drive cylinder 31 and a connecting rod mechanism 32. The linear drive cylinder 31 is arranged on one side of the valve body 1, one end of the connecting rod mechanism 32 is hinged to the output shaft of the linear drive cylinder 31, and the other end of the connecting rod mechanism 32 is hinged to the valve core 2. Specifically, the side-mounted layout of the cylinder combined with the connecting rod mechanism 32 effectively saves installation space and adapts to narrow installation environments. The connecting rod mechanism 32 amplifies the small stroke of the linear drive cylinder 31 to the large stroke of the valve core 2, reducing the size and energy consumption requirements of the linear drive cylinder 31. When the valve is opened, the linear drive cylinder 31 retracts, driving the valve core 2 to move toward the first cavity 11; when the valve is closed, the linear drive cylinder 31 extends outward, driving the valve core 2 to move toward the flange 10.

Claims

1. An anti-pollution vacuum valve, comprising a valve body (1) and a valve core (2), wherein the valve body (1) comprises a flange (10) for connecting a pipeline, and the valve core (2) is linearly slidably connected to the valve body (1) via a drive assembly (3), characterized in that: The valve core (2) is connected to a protection component (4) along a linear sliding direction for preventing by-products from entering the valve body (1); when the valve is opened, the protection component (4) is arranged concentrically with the flange (10); and the valve body (1) is provided with a first cavity (11) for accommodating the valve core (2) and a second cavity (12) for accommodating the protection component (4) on both sides of the flange (10).

2. The anti-pollution vacuum valve according to claim 1, characterized in that: The protection assembly (4) comprises an auxiliary plate (41) detachably connected to the valve core (2), the auxiliary plate (41) being provided with a protection hole (40), the protection hole (40) being provided with a protection ring sleeve (42) which is interference-fitted with the inner end wall of the valve body (1) and the flange (10), and the inner ring wall of the protection ring sleeve (42) is flush with the inner hole wall of the flange (10) when the valve is opened.

3. An anti-pollution vacuum valve according to claim 2, wherein the valve core (2) comprises a connecting plate (21), and the two sides of the connecting plate (21) are respectively connected to a sealing plate (22) and a supporting plate (23) through spring sheets (24), and the sealing plate (22) and the supporting plate (23) are provided with a groove (20), and the connecting plate (21) is connected to a ball (25) through a sleeve and cooperates with the groove (20) for changing the distance between the sealing plate (22) and the supporting plate (23), characterized in that: The auxiliary plate (41) and the connecting plate (21) are fastened by bolts after being snap-fitted into position.

4. The anti-pollution vacuum valve according to claim 2, characterized in that: The auxiliary plate (41) is threadedly connected along the radial direction of the protective ring sleeve (42) with a locking bolt (43) for pressing the protective ring sleeve (42).

5. The anti-pollution vacuum valve according to claim 2, characterized in that: The protective ring sleeve (42) is made of rubber material.

6. The anti-pollution vacuum valve according to claim 1, characterized in that: The valve core (2) and the protective component (4) are both symmetrically rotatably connected to roller groups (5).

7. The anti-pollution vacuum valve according to claim 6, characterized in that: The roller assembly (5) comprises a first roller (51) abutting against the inner side wall of the valve body (1) and a second roller (52) abutting against the inner end wall of the valve body (1).

8. The anti-pollution vacuum valve according to claim 1, characterized in that: A limit block (13) is provided in the valve body (1) and is used for locking and positioning with the valve core (2) when closing the valve.

9. The anti-pollution vacuum valve according to claim 1, characterized in that: The outer end surface of the valve body (1) is provided with a reinforcing rib (14), and the outer side surface of the valve body (1) is provided with a reinforcing plate (15), and the reinforcing plate (15) is located between the flanges (10) at both ends.

10. The anti-pollution vacuum valve according to claim 1, characterized in that: The drive assembly (3) comprises a linear drive cylinder (31) and a connecting rod mechanism (32); the linear drive cylinder (31) is arranged on one side of the valve body (1); one end of the connecting rod mechanism (32) is hinged to the output shaft of the linear drive cylinder (31); and the other end of the connecting rod mechanism (32) is hinged to the valve core (2).

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