Semiconductor chip absorbance detection device

By designing the tilt transformation detection component and the switching detection component, the problem of the semiconductor chip absorbance detection device in the prior art is difficult to quickly switch and detect multiple chip points and realize tilt multi-point detection, achieving more comprehensive and efficient detection.

CN120064126AInactive Publication Date: 2025-05-30ZHEJIANG SIKETE TECH CO LTD
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Patent Information

Application Number
CN202510245289.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-03
Publication Date
2025-05-30
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The existing semiconductor chip absorbance detection device is difficult to quickly switch and detect multiple chip points, and it is difficult to realize tilted multi-point detection, resulting in insufficient comprehensive detection and low efficiency.

Method used

A semiconductor chip absorbance detection device including a tilt conversion detection component, a displacement detection component and a switching detection component are designed. The electric cylinder drives the socket slider to move, and combines the sliding of the guide slider and the inclined guide rod to realize the inclined multi-point detection of the chip. At the same time, by linking the thread transmission of the screw and the threaded sleeve, the positioning and switching of the detection light source and the photosensitive sensor are realized.

Benefits of technology

Comprehensive absorbance detection of different points of semiconductor chips is achieved, which significantly improves detection efficiency and can quickly switch and detect multiple chip points.

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Abstract

The invention discloses a semiconductor chip absorbance detection device, and particularly relates to the technical field of absorbance detection, the semiconductor chip absorbance detection device comprises a sleeve rack, a support frame, a sleeve sliding block and an inclination transformation detection assembly; the inclination conversion detection assembly comprises an electric cylinder, a displacement frame, a guide sliding rod, an inclination sleeve block, an inclination guide rod, an inclination frame, a connecting frame and a supporting frame and further comprises a displacement detection assembly and a switching detection assembly. According to the invention, the inclined transformation detection assembly is adopted, so that the absorbance of different point locations of the detection chip can be conveniently detected, inclined multi-point location detection can be realized, the detection is more comprehensive, and the detection efficiency is greatly improved, thereby solving the problem that the surface of the semiconductor chip has more point locations, and the detection efficiency is greatly improved. The problems that a plurality of semiconductor chips are difficult to quickly switch and detect according to needs, inclined multi-point detection is difficult to realize, the detection is not comprehensive enough, and the detection efficiency is relatively low in the prior art are solved.
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Description

Technical Field

[0001] The present invention relates to the technical field of absorbance detection, and more specifically, to a semiconductor chip absorbance detection device. Background Art

[0002] Semiconductor chip absorbance detection devices play an important role in the semiconductor industry. Their main purpose is to measure the degree of light absorption of chip materials, thereby reflecting certain characteristics of the materials, such as composition, thickness, and uniformity. This is crucial for ensuring the quality and consistency of chip materials. During the production process of semiconductor chips, absorbance detection devices can be used to monitor the quality of the production line. By regularly detecting the absorbance of chips, problems in the production process, such as contamination and defects, can be promptly discovered, and corresponding measures can be taken to correct them, ensuring the yield and reliability of the products.

[0003] In the existing published literature, the patent with the patent publication number CN104641220A discloses a microfluidic chip with a flow cell for absorbance detection and an absorbance detection device including the microfluidic chip. This technology has a light incident part and a detection part. The light incident part is opposite to the light incident port and allows the light of the light source to transmit through. The detection part is opposite to the detection port and allows the light of the light source to transmit through. The second substrate is combined with the first substrate; and a flow cell, one end of which is connected to the light incident port, and the other end is connected to the detection port. The first substrate and the second substrate are formed of light-absorbing materials. However, this technology still has the following defects;

[0004] During the semiconductor chip absorbance detection process, the absorbance of the semiconductor chip is mainly detected by irradiating the semiconductor chip with a light beam and then knowing the light intensity after passing through the semiconductor chip. However, during the absorbance detection, due to the large number of surface points on the semiconductor chip, it is difficult to quickly switch and detect multiple semiconductor chips as needed, and it is also difficult to achieve inclined multi-point detection. Not only is the detection not comprehensive enough, but the detection efficiency is also low. Therefore, a semiconductor chip absorbance detection device is needed. Summary of the Invention

[0005] To overcome the above-mentioned defects of the prior art, the present invention provides the following technical solution: a semiconductor chip absorbance detection device, including a sleeve frame, a support frame and a socket slider. The support frame is fixed at the top of the sleeve frame. The socket slider is slidably connected inside the support frame. An inclined transformation detection component is installed at one end of the support frame; the inclined transformation detection component includes an electric cylinder fixedly installed at one end of the support frame. The outer wall of the output end of the electric cylinder is slidably connected with the support frame. The output end of the electric cylinder is fixedly connected with the socket slider; a displacement frame is fixedly installed at the bottom end of the socket slider. A guiding slide bar is slidably connected inside the displacement frame. An inclined sleeve block is fixedly installed at one end of the guiding slide bar. An inclined guide bar is slidably connected inside the inclined sleeve block. The top end of the inclined guide bar is fixedly installed with an inclined frame, and the inclined sleeve block is slidably connected with the inclined frame; a connecting frame is fixedly connected to one side of the inclined guide bar; a support frame is installed at the bottom end of the connecting frame. A displacement detection component is installed inside the support frame; a switching detection component is arranged below the support frame.

[0006] Preferably, the outer wall of the socket slider and the inner wall of the support frame are both smooth surfaces. The electric cylinder is used to push the socket slider to move. There is a gap between the inclined sleeve block and the displacement frame, and the inner wall of the displacement frame and the outer wall of the guiding slide bar are both smooth surfaces. A slide bar is slidably connected inside the socket slider, and the slide bar is fixedly connected with the support frame. Two limiting rings are slidably connected to both sides of the displacement frame, and both of the two limiting rings are fixedly connected with the guiding slide bar; the two limiting rings are symmetrically arranged with respect to the displacement frame. A reinforcing frame is installed at the bottom end of the electric cylinder, and both the inclined guide bar and the electric cylinder are fixedly connected with the reinforcing frame.

[0007] When this technical solution is in use, the electric cylinder drives the socket slider to move to the right. At the same time, the socket slider slides to the right along the inner wall of the support frame. The displacement frame drives the two limiting rings to move to the right. The displacement frame drives the guiding slide bar to incline and move downward. The inclined sleeve block inclines and moves downward along the outer wall of the inclined guide bar. The inclined sleeve block drives the connecting frame to incline and move downward. The support frame drives the linkage screw to incline and move downward. The threaded sleeve block drives the sleeve frame bar to incline and move downward. The sleeve frame bar drives the detection light source to incline and move downward, and the other sleeve frame bar also inclines and moves downward along the detection chip.

[0008] Preferably, the displacement detection component includes a linkage screw rotatably installed inside the support frame; one end of the support frame is fixedly installed with an adjustment motor, the output end of the adjustment motor is fixedly connected to the linkage screw, two threaded sleeve blocks are threadedly connected to the outer wall of the linkage screw, and the threads on the outer wall of the linkage screw are opposite and symmetrically arranged. Both of the two threaded sleeve blocks are slidably connected to the support frame; a sleeve frame bar is fixedly connected to the bottom end of each threaded sleeve block, a detection light source is fixedly installed inside the sleeve frame bar, a photosensitive sensor is arranged on one side of the detection light source, and the photosensitive sensor is fixedly connected to the other sleeve frame bar. The adjustment motor is used to drive the linkage screw to rotate, and the outer walls of both of the two threaded sleeve blocks are smooth surfaces.

[0009] When this technical solution is in use, the adjustment motor starts to drive the linkage screw to rotate. The linkage screw drives the two threaded sleeve blocks to approach each other under the action of the thread driving force. The threaded sleeve blocks drive the sleeve frame bars to move to the right. The detection light source is located on the left side of the detection chip, and the photosensitive sensor is located on the right side of the detection chip. In this way, the detection light source and the photosensitive sensor can be positioned at the detection position of the detection chip.

[0010] Preferably, the switching detection component includes a turntable fixedly arranged below the support frame. A plurality of positioning frames are fixedly connected to the upper surface of the turntable. A detection chip is inserted into the inner wall of each positioning frame; a plurality of induction blocks are fixedly connected to the outer wall of the turntable. A positioning distance sensor is arranged on one side of one of the induction blocks, and the positioning distance sensor is fixedly connected to the sleeve; a rotating rod is fixedly installed on the lower surface of the turntable, a rotating motor is installed at the bottom end of the rotating rod, the output end of the rotating motor is fixedly connected to the rotating rod, and the outer wall of the rotating motor is fixedly connected to a frame; both sides of the frame are fixedly connected with support plates, the support plates are fixedly connected to the sleeve, a controller is fixedly installed on one side of the support plate, and two mounting holes are opened on the lower surface of each support plate. The two support plates are symmetrically arranged with respect to the frame. The rotating motor is used to drive the rotating rod to rotate.

[0011] When this technical solution is in use, the rotating motor drives the rotating rod to rotate. The turntable drives a plurality of positioning frames to rotate, and the detection chip moves out from between the photosensitive sensor and the detection light source. At the same time, the turntable drives another positioning frame to rotate, and the other positioning frame drives the detection chip to rotate into the gap between the detection light source and the photosensitive sensor, and the other induction block rotates to the position of the positioning distance sensor.

[0012] The technical effects and advantages of the present invention:

[0013] 1. The present invention adopts an inclination transformation detection component. The controller starts the electric cylinder, which drives the socket slider to move rightward. The socket slider slides rightward along the inner wall of the support frame. The socket slider drives the displacement frame to move rightward, and the displacement frame drives the guiding slide rod to incline downward. The inclined sleeve block inclines downward along the inner wall of the inclined frame. The inclined sleeve block drives the connecting frame to incline downward, and the connecting frame drives the support frame to incline downward. The linkage screw drives the two threaded sleeve blocks to incline downward, and the threaded sleeve blocks drive the sleeve frame strip to incline downward, facilitating the detection of the absorbance at different points of the detection chip, enabling inclined multi-point detection, not only making the detection more comprehensive but also greatly improving the detection efficiency.

[0014] 2. Through the displacement detection component of the present invention, when the adjustment motor starts, the linkage screw rotates. The linkage screw drives the two threaded sleeve blocks to approach each other under the action of the screw transmission force. One threaded sleeve block moves rightward along the inner wall of the support frame, and the other threaded sleeve block moves leftward along the inner wall of the support frame. The detection light source is located at the left side of the detection chip, and at the same time, the photosensitive sensor is located at the right side of the detection chip. The detection light source and the photosensitive sensor can locate the detection position of the detection chip and adjust to the specified position for detection, making the detection more comprehensive.

[0015] 3. The present invention adopts a switching detection component. The rotation motor drives the rotating rod to rotate, and the rotating rod drives the turntable to rotate. The positioning frame drives the detection chip to rotate. The detection chip moves out from between the photosensitive sensor and the detection light source. The turntable drives another positioning frame to rotate, and the other positioning frame drives the detection chip to rotate into the gap between the detection light source and the photosensitive sensor. When the positioning distance sensor senses the distance to another induction block, the controller closes the adjustment motor, quickly realizing switching detection for multiple detection chips and greatly improving the detection efficiency.

[0016] Due to the mutual influence of the above multiple functions, first, the detection light source is located at the left side of the detection chip, and at the same time, the photosensitive sensor is located at the right side of the detection chip. Then, the absorbance at different points of the detection chip is detected by moving. Finally, the turntable drives another positioning frame to rotate, and the other positioning frame drives the detection chip to rotate into the gap between the detection light source and the photosensitive sensor. In summary, it is convenient to detect the absorbance at different points of the detection chip, enabling inclined multi-point detection, not only making the detection more comprehensive but also greatly improving the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a top view structural schematic diagram of the semiconductor chip absorbance detection device of the present invention.

[0018] Figure 2 It is a partial structural schematic diagram of the truncation at the connection between the sleeve frame and the support frame of the present invention.

[0019] Figure 3Schematic diagram of the vertical cross-section of the semiconductor chip absorbance detection device of the present invention viewed from below.

[0020] Figure 4 Schematic diagram of a truncated partial structure at the connection between the support frame and the electric cylinder of the present invention.

[0021] Figure 5 Schematic diagram of a truncated partial structure at the connection between the guiding slide rod and the inclined sleeve block of the present invention.

[0022] Figure 6 Schematic diagram of the front view structure of the semiconductor chip absorbance detection device of the present invention.

[0023] Figure 7 Schematic diagram of the front view partial structure at the connection between the support frame and the adjustment motor of the present invention.

[0024] Figure 8 Schematic diagram of the bottom view structure of the semiconductor chip absorbance detection device of the present invention.

[0025] Reference numerals are: 1, sleeve frame; 2, support frame; 3, socket slider; 4, electric cylinder; 5, displacement frame; 6, guiding slide rod; 7, inclined sleeve block; 8, inclined guide rod; 9, inclined frame; 10, connecting frame; 11, slide rod; 12, limit ring; 13, support frame; 14, linkage screw; 15, adjustment motor; 16, threaded sleeve block; 17, sleeve frame bar; 18, detection light source; 19, photosensitive sensor; 20, detection chip; 21, positioning frame; 22, turntable; 23, induction block; 24, positioning distance sensor; 25, rotating rod; 26, rotating motor; 27, frame; 28, support plate; 29, controller; 30, mounting hole; 31, reinforcement frame. Detailed implementation manners

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0027] As shown in the attached Figure 1 -attached Figure 8 A semiconductor chip absorbance detection device as shown, on which an inclined transformation detection component, a displacement detection component, and a switching detection component are provided. The settings of each component can facilitate the detection of the absorbance at different points of the detection chip 20, and can realize inclined multi-point detection. Not only is the detection more comprehensive, but also the detection efficiency is greatly improved. The specific structural settings of each component are as follows.

[0028] In this embodiment, as shown in the attachedFigure 1 - Attached Figure 5 As shown, the support frame 2 is fixed to the top end of the sleeve frame 1. A socket slider 3 is slidably connected inside the support frame 2. An inclination transformation detection component is installed at one end of the support frame 2. The inclination transformation detection component includes an electric cylinder 4 fixedly installed at one end of the support frame 2. The outer wall of the output end of the electric cylinder 4 is slidably connected to the support frame 2, and the output end of the electric cylinder 4 is fixedly connected to the socket slider 3.

[0029] A displacement frame 5 is fixedly installed at the bottom end of the socket slider 3. A guiding slide rod 6 is slidably connected to the inner wall of the displacement frame 5. An inclined sleeve block 7 is fixedly installed at one end of the guiding slide rod 6. An inclined guiding rod 8 is slidably connected to the inner wall of the inclined sleeve block 7. The top end of the inclined guiding rod 8 is fixedly installed with an inclined frame 9, and the inclined sleeve block 7 is slidably connected to the inclined frame 9. A connecting frame 10 is fixedly connected to one side of the inclined guiding rod 8. A support frame 13 is installed at the bottom end of the connecting frame 10. A displacement detection component is installed inside the support frame 13. A switching detection component is provided below the support frame 13. The outer wall of the socket slider 3 and the inner wall of the support frame 2 are both smooth surfaces. The electric cylinder 4 is used to push the socket slider 3 to move. There is a gap between the inclined sleeve block 7 and the displacement frame 5, and the inner wall of the displacement frame 5 and the outer wall of the guiding slide rod 6 are both smooth surfaces.

[0030] In this embodiment, as attached Figure 1 - Attached Figure 4 As shown, a slide rod 11 is slidably connected to the inner wall of the socket slider 3, and the slide rod 11 is fixedly connected to the support frame 2, so as to facilitate the socket slider 3 to slide rightward along the outer wall of the slide rod 11, enabling the socket slider 3 to achieve guiding sliding. Two limit rings 12 are slidably connected to both sides of the displacement frame 5, and both limit rings 12 are fixedly connected to the guiding slide rod 6. The two limit rings 12 are symmetrically arranged with respect to the displacement frame 5, so as to facilitate the displacement frame 5 to drive the two limit rings 12 to move rightward, enabling the two limit rings 12 to perform synchronous limit sliding. A reinforcement frame 31 is installed at the bottom end of the electric cylinder 4, and both the inclined guiding rod 8 and the electric cylinder 4 are fixedly connected to the reinforcement frame 31.

[0031] In this embodiment, as attached Figure 6 - Attached Figure 7 As shown, the displacement detection component includes a linkage screw 14 rotatably installed inside the support frame 13. An adjustment motor 15 is fixedly installed at one end of the support frame 13. The output end of the adjustment motor 15 is fixedly connected to the linkage screw 14. Two threaded sleeve blocks 16 are threadedly connected to the outer wall of the linkage screw 14. The threads on both sides of the outer wall of the linkage screw 14 are opposite and symmetrically arranged, and both threaded sleeve blocks 16 are slidably connected to the support frame 13.

[0032] A sleeve frame bar 17 is fixedly connected to the bottom end of each threaded sleeve block 16. A detection light source 18 is fixedly installed inside the sleeve frame bar 17. A photosensitive sensor 19 is provided on one side of the detection light source 18. The photosensitive sensor 19 is fixedly connected to another sleeve frame bar 17. The adjustment motor 15 is used to drive the linkage screw 14 to rotate. The outer walls of the two threaded sleeve blocks 16 are smooth surfaces.

[0033] In this embodiment, as shown in the attached Figure 7 - attached Figure 8 figure, the switching detection component includes a turntable 22 fixedly arranged below the support frame 13. A plurality of positioning frames 21 are fixedly connected to the upper surface of the turntable 22. A detection chip 20 is inserted into the inner wall of each positioning frame 21; a plurality of induction blocks 23 are fixedly connected to the outer wall of the turntable 22. A positioning distance sensor 24 is provided on one side of one of the induction blocks 23. The positioning distance sensor 24 is fixedly connected to the sleeve rack 1.

[0034] A rotating rod 25 is fixedly installed on the lower surface of the turntable 22. A rotating motor 26 is installed at the bottom end of the rotating rod 25. The output end of the rotating motor 26 is fixedly connected to the rotating rod 25. The outer wall of the rotating motor 26 is fixedly connected to a frame 27; both sides of the frame 27 are fixedly connected to a support plate 28. The support plate 28 is fixedly connected to the sleeve rack 1. A controller 29 is fixedly installed on one side of the support plate 28. Two mounting holes 30 are opened on the lower surface of each support plate 28. The two support plates 28 are symmetrically arranged with respect to the frame 27. The rotating motor 26 is used to drive the rotating rod 25 to rotate.

[0035] The working principle of the semiconductor chip absorbance detection device in this embodiment:

[0036] Step 1. During displacement detection, insert the expansion bolt into the hole position of the mounting hole 30, and perform the fixing operation through the support plate 28. Start the adjustment motor 15 through the controller 29. The adjustment motor 15 starts the linkage screw 14 to rotate. The linkage screw 14 drives the two threaded sleeve blocks 16 to approach each other under the action of the threaded driving force. One threaded sleeve block 16 moves to the right along the inner wall of the support frame 13, and the other threaded sleeve block 16 moves to the left along the inner wall of the support frame 13. The threaded sleeve block 16 drives the sleeve frame bar 17 to move to the right. The sleeve frame bar 17 drives the detection light source 18 to move to the right. The detection light source 18 is located on the left side of the detection chip 20, and at the same time, the photosensitive sensor 19 is located on the right side of the detection chip 20. The turntable 22 supports the positioning frame 21, and the positioning frame 21 positions and supports the detection chip 20. In this way, the detection light source 18 and the photosensitive sensor 19 can be positioned at the detection position of the detection chip 20.

[0037] Step 2: When performing tilt transformation detection, the support frame 2 is supported by the mounting frame 1, the electric cylinder 4 is supported by the support frame 2, the controller 29 starts the electric cylinder 4, the electric cylinder 4 drives the socket slider 3 to move rightward, the socket slider 3 slides rightward along the outer wall of the slide bar 11, and at the same time the socket slider 3 slides rightward along the inner wall of the support frame 2. The socket slider 3 drives the displacement frame 5 to move rightward, the displacement frame 5 drives the two limit rings 12 to move rightward, the guide slide bar 6 drives the displacement frame 5 to move rightward, the displacement frame 5 drives the guide slide bar 6 to tilt downward, and the guide slide bar 6 drives the tilt sleeve block 7 to tilt downward.

[0038] The tilt sleeve block 7 tilts downward along the outer wall of the tilt guide bar 8, and at the same time the tilt sleeve block 7 tilts downward along the inner wall of the tilt frame 9. And the electric cylinder 4 supports the reinforcement frame 31, the reinforcement frame 31 supports the tilt frame 9 to increase the stability of the tilt frame 9. The tilt sleeve block 7 drives the connecting frame 10 to tilt downward, the connecting frame 10 drives the support frame 13 to tilt downward, the support frame 13 drives the linkage screw rod 14 to tilt downward, the linkage screw rod 14 drives the two threaded sleeve blocks 16 to tilt downward, and the threaded sleeve blocks 16 drive the sleeve frame strip 17 to tilt downward. The sleeve frame strip 17 drives the detection light source 18 to tilt downward, and the other sleeve frame strip 17 also tilts downward along the detection chip 20. The detection light source 18 irradiates the detection chip 20 with a light beam, and the light intensity is received by the photosensitive sensor 19, so as to conveniently detect the absorbance of different points of the detection chip 20.

[0039] Step 3: When performing switching detection, the frame 27 is supported by the support plate 28, the frame 27 supports the rotary motor 26, the controller 29 starts the rotary motor 26, the rotary motor 26 drives the rotating rod 25 to rotate, the rotating rod 25 drives the turntable 22 to rotate, the turntable 22 drives the multiple positioning frames 21 to rotate, and the positioning frame 21 drives the detection chip 20 to rotate. The detection chip 20 moves out from between the photosensitive sensor 19 and the detection light source 18. At the same time, the turntable 22 drives another positioning frame 21 to rotate, the other positioning frame 21 drives the detection chip 20 to rotate into the gap between the detection light source 18 and the photosensitive sensor 19. At the same time, the turntable 22 drives the multiple induction blocks 23 to rotate, and another induction block 23 rotates to the position of the positioning distance sensor 24. When the positioning distance sensor 24 senses the distance of another induction block 23, the controller 29 turns off the adjustment motor 15.

[0040] The content not described in detail in the specification belongs to the prior art well-known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited. Conventional equipment can be used. In this technical solution, the electrical control components not mentioned are not shown in the figure because they belong to the prior art and will not be described here either.

[0041] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A semiconductor chip absorbance detection device, comprising a sleeve frame (1), a support frame (2) and a sleeve slider (3), wherein the support frame (2) is fixed to the top of the sleeve frame (1), and the sleeve slider (3) is slidably connected inside the support frame (2), characterized in that: An inclination change detection component is installed at one end of the support frame (2); The tilt change detection assembly comprises an electric cylinder (4) fixedly mounted on one end of the support frame (2), the outer wall of the output end of the electric cylinder (4) being slidably connected to the support frame (2), and the output end of the electric cylinder (4) being fixedly connected to the sleeve slide block (3); A displacement frame (5) is fixedly mounted on the bottom end of the sleeve sliding block (3); a guide sliding rod (6) is slidably connected to the inner wall of the displacement frame (5); an inclined sleeve block (7) is fixedly mounted on one end of the guide sliding rod (6); an inclined guide rod (8) is slidably connected to the inner wall of the inclined sleeve block (7); an inclined frame (9) is fixedly mounted on the top end of the inclined guide rod (8); and the inclined sleeve block (7) and the inclined frame (9) are slidably connected; A connecting frame (10) is fixedly connected to one side of the inclined guide rod (8); A support frame (13) is installed at the bottom end of the connecting frame (10), and a displacement detection component is installed inside the support frame (13); A switching detection component is provided below the support frame (13).

2. The semiconductor chip absorbance detection device according to claim 1, characterized in that: The outer wall of the sleeve sliding block (3) and the inner wall of the support frame (2) are both smooth surfaces, and the electric cylinder (4) is used to push the sleeve sliding block (3) to move.

3. The semiconductor chip absorbance detection device according to claim 1, characterized in that: A gap is provided between the tilting sleeve block (7) and the displacement frame (5), and the inner wall of the displacement frame (5) and the outer wall of the guide slide bar (6) are both smooth surfaces.

4. The semiconductor chip absorbance detection device according to claim 1, characterized in that: The inner wall of the sleeve sliding block (3) is slidably connected with a sliding rod (11), and the sliding rod (11) is fixedly connected to the support frame (2).

5. The semiconductor chip absorbance detection device according to claim 1, characterized in that: Both sides of the displacement frame (5) are slidably connected to limit rings (12), and the two limit rings (12) are fixedly connected to the guide slide rod (6); The two limiting rings (12) are symmetrically arranged with respect to the displacement frame (5).

6. The semiconductor chip absorbance detection device according to claim 1, characterized in that: A reinforcement frame (31) is installed at the bottom end of the electric cylinder (4), and the inclined guide rod (8) and the electric cylinder (4) are fixedly connected to the reinforcement frame (31).

7. The semiconductor chip absorbance detection device according to claim 1, characterized in that: The displacement detection component comprises a linkage screw (14) rotatably mounted inside the support frame (13); An adjusting motor (15) is fixedly mounted on one end of the support frame (13); an output end of the adjusting motor (15) is fixedly connected to a linkage screw (14); an outer wall of the linkage screw (14) is threadedly connected to two threaded sleeves (16); the two threads on the outer wall of the linkage screw (14) are opposite and symmetrically arranged; and the two threaded sleeves (16) are both slidably connected to the support frame (13); The bottom end of each threaded sleeve block (16) is fixedly connected to a sleeve frame strip (17), a detection light source (18) is fixedly installed inside the sleeve frame strip (17), a photosensitive sensor (19) is provided on one side of the detection light source (18), and the photosensitive sensor (19) is fixedly connected to another sleeve frame strip (17).

8. The semiconductor chip absorbance detection device according to claim 7, characterized in that: The regulating motor (15) is used to drive the linkage screw (14) to rotate, and the outer walls of the two threaded sleeve blocks (16) are both smooth surfaces.

9. The semiconductor chip absorbance detection device according to claim 1, characterized in that: The switching detection component comprises a rotating disk (22) fixedly arranged below the supporting frame (13); a plurality of positioning frames (21) are fixedly connected to the upper surface of the rotating disk (22); and a detection chip (20) is inserted into the inner wall of each positioning frame (21); A plurality of induction blocks (23) are fixedly connected to the outer wall of the rotating disk (22); a positioning distance sensor (24) is provided on one side of one of the induction blocks (23); and the positioning distance sensor (24) is fixedly connected to the sleeve frame (1); A rotating rod (25) is fixedly mounted on the lower surface of the rotating disk (22), a rotating motor (26) is mounted on the bottom end of the rotating rod (25), an output end of the rotating motor (26) is fixedly connected to the rotating rod (25), and a frame (27) is fixedly connected to the outer wall of the rotating motor (26); Support plates (28) are fixedly connected to both sides of the frame (27); the support plates (28) are fixedly connected to the sleeve frame (1); a controller (29) is fixedly mounted on one side of the support plates (28); and two mounting holes (30) are provided on the lower surface of each support plate (28).

10. The semiconductor chip absorbance detection device according to claim 9, characterized in that: The two support plates (28) are symmetrically arranged with respect to the frame (27), and the rotary motor (26) is used to drive the rotating rod (25) to rotate.

Citation Information

Patent Citations

  • Microfluidic chip having flow cell for absorbance detection and absorbance detection device including same

    CN104641220A