Tandem all-energy-region emission spectrum spectrometer and control system

Abstract

The invention discloses a tandem-type all-energy-region emission spectrum spectrometer, and the spectrometer comprises a vacuum transition system which comprises a medium-low vacuum cavity and an atmospheric normal-pressure environment chamber, and is used for carrying out the transition of a vacuum environment where a synchrotron radiation beam line is located, from an ultrahigh vacuum environment to the medium-low vacuum environment, and then from the medium-low vacuum environment to the atmospheric normal-pressure environment; the Von Hamos type spectrograph is used for testing an emission spectrum of a synchrotron radiation beam line in a medium-low energy region, and the Von Hamos type spectrograph is located in a medium-low vacuum cavity of the vacuum transition system; the Johann type spectrograph is used for testing an emission spectrum of a synchrotron radiation beam line in a high-energy region, and the Johann type spectrograph is located in an atmospheric pressure environment chamber behind the vacuum transition system; the base supporting system is used for supporting the vacuum transition system, the Von Hamos type spectrograph and the Johann type spectrograph, and the base supporting system is located at the bottom ends of the vacuum transition system, the Von Hamos type spectrograph and the Johann type spectrograph. According to the invention, high-resolution and high-flux emission spectrum testing in an all-energy region is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrometers, and in particular, to a tandem all-region emission spectrum spectrometer and a control system. Background Art

[0002] Synchrotron radiation X-ray emission spectroscopy (XES) is an optical-in and optical-out X-ray spectroscopy technique based on synchrotron radiation light sources for studying the structure of substances. It can provide information on the electron occupancy state orbitals of elements to be measured, and can reflect information such as the valence state, electron state of atoms, the types, quantities, and local structures of coordinating atoms. When incident light with energy higher than the absorption edge of the target element irradiates the sample, the core-level electrons of the material are excited by X-rays and jump to the vacuum level. Subsequently, the outer-shell level electrons de-excite and recombine with the core-level holes and emit fluorescence. The spectroscopic technique for finely analyzing the emitted fluorescence is X-ray emission spectroscopy.

[0003] To obtain high-throughput and high-resolution XES spectra, current emission spectrum spectrometer devices mainly rely on large scientific devices of synchrotron radiation light sources. In a typical synchrotron radiation facility, the energy of the synchrotron radiation beam can cover the entire energy range. When the synchrotron radiation beam is in the medium and low energy regions, it attenuates severely in an air or other atmosphere environment. Therefore, it is necessary to maintain a certain vacuum environment to ensure the quality of the spectra. When the synchrotron radiation beam is in the higher energy region, there is almost no attenuation, and the set vacuum environment will greatly affect the experimental efficiency and the design of experimental methods. Therefore, it is of great significance to design an emission spectrum spectrometer that can ensure signal quality in the medium and low energy regions and ensure experimental efficiency in the high energy region. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems in the related art to some extent. For this purpose, an object of the present invention is to provide a tandem all-region emission spectrum spectrometer that can effectively utilize the synchrotron radiation beam in the entire energy range.

[0005] In a first aspect, a tandem all-region emission spectrum spectrometer proposed by the present invention includes:

[0006] A vacuum transition system includes a medium and low vacuum cavity and an atmospheric pressure environment chamber, and is used to transition the vacuum environment where the synchrotron radiation beam line is located, from an ultra-high vacuum environment to a medium and low vacuum environment, and then from the medium and low vacuum environment to an atmospheric pressure environment;

[0007] A Von Hamos spectrometer is used for the emission spectrum test of the synchrotron radiation beam line in the medium and low energy regions, and the Von Hamos spectrometer is located in the medium and low vacuum cavity of the vacuum transition system;

[0008] The Johann spectrometer is used for testing the emission spectrum of synchrotron radiation beamlines in the high-energy region, and the Johann spectrometer is located in the atmospheric pressure environment chamber after the vacuum transition system;

[0009] The base support system is used to support the vacuum transition system, the Von Hamos spectrometer and the Johann spectrometer, and the base support system is located at the bottom ends of the vacuum transition system, the Von Hamos spectrometer and the Johann spectrometer.

[0010] Preferably, the base support system includes a first support base. The vacuum transition system further includes a pumping station. A vacuum pump is installed at the bottom end of the pumping station, and the bottom end of the vacuum pump is fixed through the first support base. The inlet of the pumping station is provided with a synchrotron radiation beamline emerging from the ultra-high vacuum environment. The outlet of the pumping station is connected with a vacuum gauge installation pipe. A vacuum gauge connection port for installing a vacuum gauge is provided on the side wall of the vacuum gauge installation pipe. The vacuum gauge installation pipe is connected with a Si 3 N 4 vacuum window installation pipe. An Si 3 N 4 vacuum window is installed at the side wall of the Si 3 N 4 vacuum window installation pipe. The Si 3 N 4 The vacuum window installation pipe is connected with a vacuum pipeline. The vacuum pipeline is internally connected with the middle and low vacuum cavity through a vacuum gate valve. A Be vacuum window is installed on one side of the middle and low vacuum cavity away from the installation position of the vacuum pipeline. The vacuum pipeline and the Be vacuum window are located on the same light beam. The atmospheric pressure environment chamber is located on one side of the middle and low vacuum cavity close to the Be vacuum window.

[0011] Preferably, the base support system includes a second support base. The bottom end of the Von Hamos spectrometer is fixed through the second support base. The Von Hamos spectrometer includes:

[0012] The Von Hamos sample stage mechanism: used to install the Von Hamos sample stage of the Von Hamos spectrometer and adjust the position of the Von Hamos sample stage so that the sample receives the synchrotron radiation beam in the middle and low energy regions;

[0013] The Von Hamos bent crystal mechanism: used to install the Von Hamos bent crystal of the Von Hamos spectrometer and adjust the position of the Von Hamos bent crystal to receive the fluorescence signal emitted by the sample after being irradiated by the synchrotron radiation beam in the middle and low energy regions;

[0014] Von Hamos detector mechanism: It is used to install the Von Hamos detector of the Von Hamos spectrometer and adjust the position of the Von Hamos detector to receive the fluorescence signals in the medium and low energy regions after monochromatization by the Von Hamos bent crystal;

[0015] The Von Hamos sample stage mechanism, the Von Hamos bent crystal mechanism and the Von Hamos detector mechanism form a Rowland circle configuration.

[0016] Preferably, the Von Hamos sample stage mechanism includes a Y-axis drive mechanism one, an X-axis drive mechanism one, a Z-axis drive mechanism one and an R-axis drive mechanism one which are sequentially arranged from bottom to top and are all driven by motors. The Von Hamos sample stage is installed at the upper end of the R-axis drive mechanism one;

[0017] The Von Hamos bent crystal mechanism includes an X-axis drive mechanism two, a Z-axis drive mechanism two and an R-axis drive mechanism two which are sequentially arranged from bottom to top and are all driven by motors. The Von Hamos bent crystal is installed at the upper end of the R-axis drive mechanism two;

[0018] Von Hamos detector mechanism: It includes a Z-axis drive mechanism three and an X-axis drive mechanism three which are both driven by motors. The X-axis drive mechanism three is arranged on the side of the Z-axis drive mechanism three close to the Von Hamos bent crystal mechanism. The Von Hamos detector is connected to the X-axis drive mechanism three.

[0019] Preferably, the base support system includes a support base three. The bottom end of the Johann spectrometer is fixed through the support base three. The Johann spectrometer includes:

[0020] Johann sample stage mechanism: It is used to install the Johann sample stage of the Johann spectrometer and adjust the position of the Johann sample stage to receive the synchrotron radiation beam in the high energy region;

[0021] Johann bent crystal mechanism: It is used to install the Johann bent crystal of the Johann spectrometer and adjust the position of the Johann bent crystal to receive the fluorescence signals emitted after the sample is irradiated by the synchrotron radiation beam in the high energy region;

[0022] Johann detector mechanism: It is used to install the Johann detector of the Johann spectrometer and adjust the position of the Johann detector to receive the fluorescence signals in the high energy region after monochromatization by the Johann bent crystal;

[0023] The Johann sample stage mechanism, Johann bent crystal mechanism, and Johann detector mechanism form a Rowland circle configuration.

[0024] Preferably, the Johann sample stage mechanism includes an X-axis drive mechanism four, a Y-axis drive mechanism two, a Z-axis drive mechanism four, and an R-axis drive mechanism three, which are sequentially arranged from bottom to top and are all driven by motors. The Johann sample stage is installed at the upper end of the R-axis drive mechanism four.

[0025] The Johann bent crystal mechanism includes a Z-axis drive mechanism five and multiple groups of spherical bent crystal mechanisms, both of which are driven by motors. A spherical bent crystal mechanism mounting table is provided on one side of the Z-axis drive mechanism five close to the Johann sample stage mechanism. Multiple groups of the spherical bent crystal mechanisms are arranged on the upper end of the spherical bent crystal mechanism mounting table close to the Johann sample stage mechanism.

[0026] The Johann detector mechanism includes a Z-axis drive mechanism six and an X-axis drive mechanism five, both of which are driven by motors. The X-axis drive mechanism five is arranged on one side of the Z-axis drive mechanism six close to the Johann bent crystal mechanism. The Johann detector is connected to the X-axis drive mechanism five.

[0027] Preferably, the Z-axis drive mechanism five includes a support frame. A screw is provided on one side of the support frame close to the Johann sample stage mechanism. A driving motor is provided at the lower end of the screw. The rotating shaft of the driving motor is in transmission connection with the screw through bevel gears. Guide rails are provided on both sides of the support frame where the screw is located. A driving block is provided at the position of the spherical bent crystal mechanism mounting table corresponding to the screw. The driving block is connected to the screw through a threaded hole opened through up and down. A slider is provided at the position of the spherical bent crystal mechanism mounting table corresponding to the guide rail. The slider is slidably connected to the guide rail.

[0028] Preferably, there are five groups of the spherical bent crystal mechanisms. Each group of the spherical bent crystal mechanisms includes an X-axis drive mechanism six, an R-axis drive mechanism four, a Z-axis drive mechanism seven, and a side swing axis drive mechanism, which are sequentially arranged from bottom to top and are all driven by motors. The Johann bent crystal is installed at the upper end of the side swing axis drive mechanism.

[0029] Preferably, an observation window is provided on the side wall of the vacuum gauge installation pipe.

[0030] In a second aspect, a control system proposed by the present invention includes any one of the above-described tandem all-region emission spectrum spectrometers. The control system includes a controller. The signal output end of the controller is connected to the signal input ends of each motor in the Von Hamos type spectrometer and the Johann type spectrometer.

[0031] The beneficial effects of the present invention are as follows:

[0032] (1) A tandem-designed all-region emission spectrum spectrometer is provided. By connecting two sets of emission spectrum spectrometers suitable for different energy regions through a tandem design, the acquisition of the all-region emission spectrum is realized.

[0033] (2) Each spectrometer consists of a sample stage mechanism, a detector mechanism, and a bent crystal monochromator mechanism arranged on the Rowland circle. The emission spectrum spectrometer for the medium and low energy regions is set to work in a vacuum environment. When the synchrotron radiation beam is in the medium and low energy regions, its attenuation is relatively serious in an air or other atmosphere environment. Therefore, it is necessary to maintain a certain vacuum environment to ensure the quality of the spectrum. When the synchrotron radiation beam is in the higher energy regions, there is almost no attenuation, and the set vacuum environment will greatly affect the experimental efficiency and the design of the experimental method. Therefore, the emission spectrum spectrometer for the high energy regions is set to work in an atmospheric environment. The tandem design can ensure a high signal intensity in the medium and low energy regions while realizing high-efficiency spectrum acquisition and diverse in-situ experiment designs in the high energy regions on the premise of sharing a set of light sources.

[0034] (3) High-resolution and high-throughput emission spectrum tests are carried out in the all-region. Covering a wide energy range can provide more comprehensive material and substance information. Through the all-region spectrometer, different elements and compounds can be more accurately identified and analyzed based on their unique spectral characteristics in different energy ranges. Description of the Drawings

[0035] In the drawings:

[0036] Figure 1 is a schematic structural diagram of a tandem all-region emission spectrum spectrometer proposed by the present invention.

[0037] Figure 2 is a schematic structural diagram of the vacuum transition system proposed by the present invention.

[0038] Figure 3 is a schematic structural diagram of the Von Hamos type spectrometer proposed by the present invention.

[0039] Figure 4 is a schematic structural diagram of the Johann type spectrometer proposed by the present invention.

[0040] Figure 5 is a schematic structural diagram of the Von Hamos sample stage mechanism proposed by the present invention.

[0041] Figure 6 is a schematic structural diagram of the Von Hamos bent crystal mechanism proposed by the present invention.

[0042] Figure 7Schematic diagram of the Von Hamos detector mechanism proposed by the present invention.

[0043] Figure 8 Schematic diagram of the Johann sample stage mechanism proposed by the present invention.

[0044] Figure 9 Schematic diagram of the Z-axis drive mechanism five proposed by the present invention.

[0045] Figure 10 Schematic diagram of the mounting table part of the spherical bent crystal mechanism proposed by the present invention.

[0046] Figure 11 Schematic diagram of the spherical bent crystal mechanism proposed by the present invention.

[0047] Figure 12 Exploded view of the spherical bent crystal mechanism proposed by the present invention.

[0048] Figure 13 Schematic diagram of the Johann detector mechanism proposed by the present invention.

[0049] Figure 14 Schematic diagram of the Rowland circle position configuration of the Johann type spectrometer proposed by the present invention.

[0050] Figure 15 Schematic diagram of the Rowland circle position configuration of the Von Hamos type spectrometer proposed by the present invention.

[0051] In the figure: 1 - Vacuum transition system, 2 - Von Hamos type spectrometer, 3 - Johann type spectrometer, 4 - Base support system; 101 - Pumping station, 102 - Vacuum pump, 103 - Vacuum gauge connection port, 104 - Observation window, 105 - Si 3 N 4 Vacuum window, 106 - Vacuum pipeline, 107 - Vacuum gate valve, 108 - Medium and low vacuum cavity, 109 - Be vacuum window; 201 - Von Hamos sample stage mechanism, 202 - Von Hamos bent crystal mechanism, 203 - Von Hamos detector mechanism; 301 - Johann sample stage mechanism, 302 - Johann bent crystal mechanism, 303 - Johann detector mechanism; 401 - Support base one, 402 - Support base two, 403 - Support base three; 2011 - Y-axis drive mechanism one, 2012 - X-axis drive mechanism one, 2013 - Z-axis drive mechanism one, 2014 - R-axis drive mechanism one; 2021 - X-axis drive mechanism two, 2022 - Z-axis drive mechanism two, 2023 - R-axis drive mechanism two; 2031 - Z - axis drive mechanism III, 2032 - X - axis drive mechanism III; 3011 - height - adjusting base, 3012 - X - axis drive mechanism IV, 3013 - Y - axis drive mechanism II, 3014 - Z - axis drive mechanism IV, 3015 - R - axis drive mechanism III; 3022 - spherical bent crystal mechanism mounting table, 3023 - spherical bent crystal mechanism; 3031 - Z - axis drive mechanism VI, 3032 - X - axis drive mechanism V; 30211 - drive motor, 30212 - guide rail, 30213 - support frame, 30214 - screw, 30215 - drive block, 30216 - slider; 30231 - X - axis drive mechanism VI, 30232 - R - axis drive mechanism IV, 30233 - Z - axis drive mechanism VII, 30234 - side - swing axis drive mechanism. Detailed implementation mode

[0052] Refer to Figure 1 and Figure 2 A tandem - type all - energy - region emission - spectrum spectrometer includes

[0053] The vacuum transition system 1 includes a medium - low vacuum cavity 108 and an atmospheric normal - pressure environment chamber, which is used to transition the vacuum environment where the synchrotron radiation beamline is located, from an ultra - high vacuum environment to a medium - low vacuum environment, and then from the medium - low vacuum environment to an atmospheric normal - pressure environment;

[0054] The Von Hamos type spectrometer 2 is used for the emission - spectrum test of the synchrotron radiation beamline in the medium - low energy region. The Von Hamos type spectrometer 2 is located in the medium - low vacuum cavity 108 of the vacuum transition system 1;

[0055] The Johann type spectrometer 3 is used for the emission - spectrum test of the synchrotron radiation beamline in the high - energy region. The Johann type spectrometer 3 is located in the atmospheric normal - pressure environment chamber after the vacuum transition system 1;

[0056] The base support system 4 is used to support the vacuum transition system 1, the Von Hamos type spectrometer 2 and the Johann type spectrometer 3. The base support system 4 is located at the bottom of the support for the vacuum transition system 1, the Von Hamos type spectrometer 2 and the Johann type spectrometer 3.

[0057] Obviously, based on the above, by connecting the Von Hamos type spectrometer 2 applicable to the emission - spectrum test of the synchrotron radiation beamline in the medium - low energy region and the Johann type spectrometer 3 applicable to the emission - spectrum test of the synchrotron radiation beamline in the high - energy region in a tandem - type design, the spectral map acquisition of the all - energy - region emission spectrum can be realized.

[0058] In this embodiment, refer to Figure 2, the base support system 4 includes a first support base 401. The vacuum transition system 1 further includes a pumping station 101. A vacuum pump 102 is installed at the bottom end of the pumping station 101, and the bottom end of the vacuum pump 102 is fixed by the first support base 401. The inlet of the pumping station 101 is provided with a synchrotron radiation beamline emerging from an ultra-high vacuum environment. The outlet of the pumping station 101 is connected to a vacuum gauge installation pipe. A vacuum gauge connection port 103 for installing a vacuum gauge is provided on the side wall of the vacuum gauge installation pipe. The vacuum gauge installation pipe is connected to a Si 3 N 4 vacuum window installation pipe, Si 3 N 4 At the side wall of the Si 3 N 4 vacuum window 105 is installed, Si 3 N 4 The vacuum window installation pipe is connected to a vacuum pipeline 106. The vacuum pipeline 106 is internally connected to the middle and low vacuum cavity 108 through a vacuum gate valve 107. A Be vacuum window 109 is installed on one side of the middle and low vacuum cavity 108 away from the installation location of the vacuum pipeline 106. The vacuum pipeline 106 and the Be vacuum window 109 are located on the same light beam. The atmospheric pressure environment chamber is located on one side of the middle and low vacuum cavity 108 close to the Be vacuum window 109.

[0059] Obviously, based on the above, the vacuum pump 102 is used to obtain a vacuum environment; the vacuum gauge is used to measure the vacuum degree; Si 3 N 4 The vacuum window 105 is used to separate the ultra-high vacuum environment of the front-end beamline from the middle and low vacuum environment of the rear-end Von Hamos spectrometer 2; the vacuum pipeline 106 is used to connect the components in the vacuum transition system 1; the vacuum gate valve 107 is used to protect the Si3N4 vacuum window 105 during the inflation and commissioning of the Von Hamos spectrometer 2; the Be vacuum window 109 is used to separate the front-end middle and low vacuum cavity 108 from the atmospheric pressure environment of the rear-end Johann spectrometer 3.

[0060] In this embodiment, referring to Figure 3 , the base support system 4 includes a second support base 402. The bottom end of the Von Hamos spectrometer 2 is fixed by the second support base 402. The Von Hamos spectrometer 2 includes:

[0061] Von Hamos sample stage mechanism 201: used to install the Von Hamos sample stage of the Von Hamos spectrometer 2 and adjust the position of the Von Hamos sample stage so that the sample receives synchrotron radiation beams in the middle and low energy regions;

[0062] Von Hamos crystal bending mechanism 202: It is used to install the Von Hamos crystal of the Von Hamos spectrometer 2 and adjust the position of the Von Hamos crystal to receive the fluorescence signal emitted after the sample is irradiated by the synchrotron radiation beam in the medium and low energy regions;

[0063] Von Hamos detector mechanism 203: It is used to install the Von Hamos detector of the Von Hamos spectrometer 2 and adjust the position of the Von Hamos detector to receive the fluorescence signal in the medium and low energy regions after monochromatization by the Von Hamos crystal;

[0064] The Von Hamos sample stage mechanism 201, the Von Hamos crystal bending mechanism 202 and the Von Hamos detector mechanism 203 form a Rowland circle configuration, as Figure 15 shown.

[0065] Obviously, based on the above, the Von Hamos sample stage mechanism 201, the Von Hamos crystal bending mechanism 202 and the Von Hamos detector mechanism 203 form a Rowland circle configuration, and the positions of the Von Hamos sample stage, the Von Hamos crystal and the Von Hamos detector are all adjustable, and the emission spectrum test of the synchrotron radiation beamline in the medium and low energy regions can be realized.

[0066] In this embodiment, referring to Figure 5 , the Von Hamos sample stage mechanism 201 includes a Y-axis drive mechanism 2011, an X-axis drive mechanism 2012, a Z-axis drive mechanism 2013 and an R-axis drive mechanism 2014 which are sequentially arranged from bottom to top and are all driven by motors. The Von Hamos sample stage is installed at the upper end of the R-axis drive mechanism 2014;

[0067] Obviously, based on the above, by installing the sample on the Von Hamos sample stage, the Y-axis drive mechanism 2011, the X-axis drive mechanism 2012, the Z-axis drive mechanism 2013 and the R-axis drive mechanism 2014 are used to adjust the position of the sample so that the synchrotron radiation beam can be accurately irradiated on the sample to be tested.

[0068] In this embodiment, referring to Figure 6 , the Von Hamos crystal bending mechanism 202 includes an X-axis drive mechanism 2021, a Z-axis drive mechanism 2022 and an R-axis drive mechanism 2023 which are sequentially arranged from bottom to top and are all driven by motors. The Von Hamos crystal is installed at the upper end of the R-axis drive mechanism 2023;

[0069] Obviously, based on the above, the Von Hamos bent crystal mechanism 202 can ensure that the distance between the cylindrical bent crystal and the sample to be measured is the required Rowland circle radius distance through the X-axis drive mechanism two 2021, the Z-axis drive mechanism two 2022, and the R-axis drive mechanism two 2023. At the same time, according to the required Bragg diffraction angle, the monochromatic separation of the characteristic fluorescence signal to be measured is realized.

[0070] In this embodiment, referring to Figure 7 , the Von Hamos detector mechanism 203: includes a Z-axis drive mechanism three 2031 and an X-axis drive mechanism three 2032 both driven by motors. The X-axis drive mechanism three 2032 is arranged on one side of the Z-axis drive mechanism three 2031 close to the Von Hamos bent crystal mechanism 202, and the Von Hamos detector is connected to the X-axis drive mechanism three 2032.

[0071] Obviously, based on the above, the Von Hamos detector mechanism 203 can ensure that the Von Hamos detector is directly above the sample to be measured by adjusting the Z-axis drive mechanism three 2031 and the X-axis drive mechanism three 2032. At the same time, it ensures that the required Rowland circle spatial relationship is maintained among the sample to be measured, the cylindrical bent crystal, and the Von Hamos detector. The Von Hamos detector receives the characteristic fluorescence signal monochromatized by the cylindrical bent crystal to complete the spectral test.

[0072] In this embodiment, referring to Figure 4 , the base support system 4 includes a support base three 403. The bottom end of the Johann type spectrometer 3 is fixed through the support base three 403. The Johann type spectrometer 3 includes:

[0073] The Johann sample stage mechanism 301: used to install the Johann sample stage of the Johann type spectrometer 3 and adjust the position of the Johann sample stage to receive the synchrotron radiation beam in the high-energy region;

[0074] The Johann bent crystal mechanism 302: used to install the Johann bent crystal of the Johann type spectrometer 3 and adjust the position of the Johann bent crystal to receive the fluorescence signal emitted after the sample is irradiated by the synchrotron radiation beam in the high-energy region;

[0075] The Johann detector mechanism 303: used to install the Johann detector of the Johann type spectrometer 3 and adjust the position of the Johann detector to receive the high-energy region fluorescence signal monochromatized by the Johann bent crystal;

[0076] The Johann sample stage mechanism 301, the Johann bent crystal mechanism 302, and the Johann detector mechanism 303 form a Rowland circle configuration, as Figure 14 shown.

[0077] Obviously, based on the above, the Johann sample stage mechanism 301, the Johann bent crystal mechanism 302, and the Johann detector mechanism 303 form a Rowland circle configuration, and the positions of the Johann sample stage mechanism 301, the Johann bent crystal mechanism 302, and the Johann detector mechanism 303 are all adjustable, enabling the emission spectrum test of the synchrotron radiation beamline in the high-energy region.

[0078] In this embodiment, referring to Figure 8 , the Johann sample stage mechanism 301 includes an X-axis drive mechanism four 3012, a Y-axis drive mechanism two 3013, a Z-axis drive mechanism four 3014, and an R-axis drive mechanism three 3015 that are sequentially arranged from bottom to top and are all driven by motors. The Johann sample stage is installed at the upper end of the R-axis drive mechanism four 3012;

[0079] Obviously, based on the above, by installing the sample on the Johann sample stage and using the X-axis drive mechanism four 3012, the Y-axis drive mechanism two 3013, the Z-axis drive mechanism four 3014, and the R-axis drive mechanism three 3015 to adjust the position of the sample, the synchrotron radiation beam can be accurately irradiated on the sample to be tested.

[0080] In this embodiment, referring to Figure 4 , Figure 9 and Figure 10 , the Johann bent crystal mechanism 302 includes a Z-axis drive mechanism five and multiple groups of spherical bent crystal mechanisms 3023 that are all driven by motors. A spherical bent crystal mechanism mounting table 3022 is provided on the side of the Z-axis drive mechanism five close to the Johann sample stage mechanism 301, and multiple groups of spherical bent crystal mechanisms 3023 are arranged on the side of the spherical bent crystal mechanism mounting table 3022 close to the Johann sample stage mechanism 301 and at the upper end;

[0081] Specifically, referring to Figure 9 and Figure 10 , the Z-axis drive mechanism five includes a support frame 213. A screw 214 is provided on the side of the support frame 213 close to the Johann sample stage mechanism 301. A drive motor 30211 is provided at the lower end of the screw 214. The rotating shaft of the drive motor 30211 is connected to the screw 214 through bevel gears. Guide rails 30212 are provided on both sides of the support frame 213 where the screw 214 is located. A drive block 30215 is provided at the position of the spherical bent crystal mechanism mounting table 3022 corresponding to the screw 214. The drive block 30215 is connected to the screw 214 through a threaded hole that penetrates up and down. A slider 30216 is provided at the position of the spherical bent crystal mechanism mounting table 3022 corresponding to the guide rail 30212. The slider 30216 is slidably connected to the guide rail 30212.

[0082] Specifically, referring toFigure 11 and Figure 12 There are five spherical bent crystal mechanisms 3023. The spherical bent crystal mechanism 3023 includes an X-axis drive mechanism six 30231, an R-axis drive mechanism four 30232, a Z-axis drive mechanism seven 30233, and a side swing axis drive mechanism 30234 that are sequentially arranged from bottom to top and are all driven by motors. The Johann bent crystal is installed at the upper end of the side swing axis drive mechanism 30234.

[0083] Obviously, based on the above, the Johann bent crystal mechanism 302 can adjust the heights of the five spherical bent crystal mechanisms through the Z-axis drive mechanism five, the X-axis drive mechanism six 30231, the R-axis drive mechanism four 30232, the Z-axis drive mechanism seven 30233, and the side swing axis drive mechanism 30234 according to the characteristic fluorescence signal to be tested, and then adjust different Bragg diffraction angles to achieve the monochromatic separation of the characteristic fluorescence signal to be tested.

[0084] In this embodiment, referring to Figure 13 , the Johann detector mechanism 303 includes a Z-axis drive mechanism six 3031 and an X-axis drive mechanism five 3032 that are both driven by motors. The X-axis drive mechanism five 3032 is arranged on the side of the Z-axis drive mechanism six 3031 close to the Johann bent crystal mechanism 302, and the Johann detector is connected to the X-axis drive mechanism five 3032.

[0085] Obviously, based on the above, the Johann detector mechanism 303 can ensure that the Johann detector is directly above the sample to be measured by adjusting the Z-axis drive mechanism six 3031 and the X-axis drive mechanism five 3032, and at the same time ensure that the required Rowland circle spatial relationship is maintained among the sample to be measured, the spherical bent crystal, and the Johann detector. The Johann detector receives the characteristic fluorescence signal monochromatized by the cylindrical bent crystal to complete the spectral test.

[0086] In this embodiment, referring to Figure 2 , an observation window 104 is provided on the side wall of the vacuum gauge installation pipe.

[0087] Obviously, based on the above, the working state of the Si 3 N 4 vacuum window 105 can be observed through the observation window 104.

[0088] As another embodiment of the present application, this embodiment proposes a control system that includes any one of the above-described tandem all-region emission spectrum spectrometers. The control system includes a controller, and the signal output end of the controller is connected to the signal input ends of each motor in the Von Hamos type spectrometer 2 and the Johann type spectrometer 3.

[0089] Obviously, based on the above, the output control of each motor in the spectrometer can be achieved through the controller, so as to realize the position adjustment of each component in the Von Hamos spectrometer 2 and the Johann spectrometer 3.

Claims

1. A tandem full-energy range emission spectrum spectrometer, characterized in that: include: The vacuum transition system (1) comprises a medium-low vacuum cavity (108) and an atmospheric pressure environment chamber, and is used to transition the vacuum environment of the synchrotron radiation beam line from an ultra-high vacuum environment to a medium-low vacuum environment, and then from the medium-low vacuum environment to an atmospheric pressure environment; The Von Hamos spectrometer (2) is used for emission spectrum testing of a synchrotron radiation beamline in the medium and low energy region, and the Von Hamos spectrometer (2) is located in a medium and low vacuum cavity (108) of the vacuum transition system (1); The Johann type spectrometer (3) is used for emission spectrum testing of a synchrotron radiation beam line in a high energy region, and the Johann type spectrometer (3) is located in an atmospheric pressure environment room behind the vacuum transition system (1); The base support system (4) is used for supporting the vacuum transition system (1), the Von Hamos type spectrometer (2) and the Johann type spectrometer (3), and the base support system (4) is located at the bottom of the supporting vacuum transition system (1), the Von Hamos type spectrometer (2) and the Johann type spectrometer (3).

2. A tandem full-energy range emission spectrum spectrometer according to claim 1, characterized in that: The base support system (4) comprises a support base 1 (401), and the vacuum transition system (1) further comprises a pump station (101), a vacuum pump (102) is installed at the bottom end of the pump station (101), and the bottom end of the vacuum pump (102) is fixed by the support base 1 (401), the inlet of the pump station (101) is provided with a synchrotron radiation beam line emitted from an ultra-high vacuum environment, the outlet of the pump station (101) is connected to a vacuum gauge installation pipe, the side wall of the vacuum gauge installation pipe is provided with a vacuum gauge connection port (103) for installing a vacuum gauge, the vacuum gauge installation pipe is connected to a Si3N4 vacuum window installation pipe, and the Si3N4 vacuum window installation pipe is provided with a vacuum gauge connection port (103) for installing a vacuum gauge. A Si3N4 vacuum window (105) is installed on the side wall of the empty window installation tube, and the Si3N4 vacuum window installation tube is connected to a vacuum pipe (106). The vacuum pipe (106) is communicated with the inside of the medium-low vacuum cavity (108) through a vacuum gate valve (107). A Be vacuum window (109) is installed on a side of the medium-low vacuum cavity (108) away from the installation location of the vacuum pipe (106). The vacuum pipe (106) and the Be vacuum window (109) are located on the same light beam, and the atmospheric pressure environment chamber is located on a side of the medium-low vacuum cavity (108) close to the Be vacuum window (109).

3. A tandem full-energy range emission spectrum spectrometer according to claim 1, characterized in that: The base support system (4) comprises a second support base (402), and the bottom end of the Von Hamos type spectrometer (2) is fixed by the second support base (402). The Von Hamos type spectrometer (2) comprises: A Von Hamos sample stage mechanism (201): used to install the Von Hamos sample stage of the Von Hamos type spectrometer (2) and adjust the position of the Von Hamos sample stage so that the sample receives the synchrotron radiation beam in the medium and low energy range; Von Hamos bent crystal mechanism (202): used to install the Von Hamos bent crystal of the Von Hamos type spectrometer (2) and adjust the position of the Von Hamos bent crystal to receive the fluorescence signal emitted by the sample after being irradiated by the synchrotron radiation beam in the medium and low energy range; Von Hamos detector mechanism (203): used to install the Von Hamos detector of the Von Hamos spectrometer (2) and adjust the position of the Von Hamos detector to receive the fluorescence signals in the middle and low energy regions after the Von Hamos bent crystal is monochromatized; The Von Hamos sample stage mechanism (201), the Von Hamos crystal bending mechanism (202) and the Von Hamos detector mechanism (203) form a Rowland circle configuration.

4. A tandem full-energy range emission spectrum spectrometer according to claim 3, characterized in that: The Von Hamos sample stage mechanism (201) comprises a Y-axis drive mechanism (2011), an X-axis drive mechanism (2012), a Z-axis drive mechanism (2013) and an R-axis drive mechanism (2014) which are arranged in sequence from bottom to top and are all driven by motors, and the Von Hamos sample stage is installed at the upper end of the R-axis drive mechanism (2014); The Von Hamos crystal bending mechanism (202) comprises, from bottom to top, an X-axis driving mechanism 2 (221), a Z-axis driving mechanism 2 (222), and an R-axis driving mechanism 2 (23), all of which are driven by motors, and the Von Hamos crystal bending mechanism is mounted on the upper end of the R-axis driving mechanism 2 (223); The Von Hamos detector mechanism (203) comprises a Z-axis drive mechanism 3 (2031) and an X-axis drive mechanism 3 (2032), both of which are driven by motors. The X-axis drive mechanism 3 (2032) is arranged on a side of the Z-axis drive mechanism 3 (2031) close to the Von Hamos crystal bending mechanism (202), and the Von Hamos detector is connected to the X-axis drive mechanism 3 (2032).

5. The tandem full-energy range emission spectrum spectrometer according to claim 1, characterized in that: The base support system (4) comprises a support base three (403), and the bottom end of the Johann type spectrometer (3) is fixed by the support base three (403). The Johann type spectrometer (3) comprises: Johann sample stage mechanism (301): used to install the Johann sample stage of the Johann type spectrometer (3) and adjust the position of the Johann sample stage to receive the synchrotron radiation beam in the high energy region; Johann bent crystal mechanism (302): used to install the Johann bent crystal of the Johann type spectrometer (3) and adjust the position of the Johann bent crystal to receive the fluorescence signal emitted by the sample after being irradiated by the synchrotron radiation beam in the high energy region; Johann detector mechanism (303): used to install the Johann detector of the Johann type spectrometer (3) and adjust the position of the Johann detector to receive the high energy region fluorescence signal after the Johann bent crystal is monochromatized; The Johann sample stage mechanism (301), the Johann crystal bending mechanism (302) and the Johann detector mechanism (303) form a Rowland circle configuration.

6. A tandem full-energy range emission spectrum spectrometer according to claim 5, characterized in that: The Johann sample stage mechanism (301) comprises, from bottom to top, an X-axis drive mechanism 4 (3012), a Y-axis drive mechanism 2 (3013), a Z-axis drive mechanism 4 (3014) and an R-axis drive mechanism 3 (3015), all of which are driven by motors, and the Johann sample stage is mounted on the upper end of the R-axis drive mechanism 4 (3012); The Johann crystal bending mechanism (302) comprises a Z-axis driving mechanism five and a plurality of groups of spherical crystal bending mechanisms (3023) both driven by motors, a spherical crystal bending mechanism mounting platform (3022) being provided on a side of the Z-axis driving mechanism five close to the Johann sample stage mechanism (301), and a plurality of groups of spherical crystal bending mechanisms (3023) being arranged on a side of an upper end of the spherical crystal bending mechanism mounting platform (3022) close to the Johann sample stage mechanism (301); The Johann detector mechanism (303) comprises a Z-axis drive mechanism six (3031) and an X-axis drive mechanism five (3032), both of which are driven by motors. The X-axis drive mechanism five (3032) is arranged on a side of the Z-axis drive mechanism six (3031) close to the Johann crystal bending mechanism (302), and the Johann detector is connected to the X-axis drive mechanism five (3032).

7. A tandem full-energy range emission spectrum spectrometer according to claim 6, characterized in that: The Z-axis driving mechanism five comprises a support frame (213), a screw rod (214) is provided on one side of the support frame (213) close to the Johann sample stage mechanism (301), a driving motor (30211) is provided at the lower end of the screw rod (214), a rotating shaft of the driving motor (30211) is transmission-connected to the screw rod (214) via a bevel gear, guide rails (30212) are provided on both sides of the support frame (213) located on the screw rod (214), a driving block (30215) is provided at a position of the spherical crystal bending mechanism mounting platform (3022) corresponding to the screw rod (214), the driving block (30215) is connected to the screw rod (214) via a threaded hole that penetrates from top to bottom, a slider (30216) is provided at a position of the spherical crystal bending mechanism mounting platform (3022) corresponding to the guide rail (30212), and the slider (30216) is slidably connected to the guide rail (30212).

8. The tandem full-energy range emission spectrum spectrometer according to claim 6, characterized in that: The spherical crystal bending mechanism (3023) is divided into five groups, and the spherical crystal bending mechanism (3023) comprises, from bottom to top, an X-axis driving mechanism six (30231), an R-axis driving mechanism four (30232), a Z-axis driving mechanism seven (30233) and a side swing axis driving mechanism (30234), all of which are driven by motors, and the Johann bent crystal is mounted on the upper end of the side swing axis driving mechanism (30234).

9. The tandem full-energy range emission spectrum spectrometer according to claim 1, characterized in that: An observation window (104) is provided on the side wall of the vacuum gauge mounting tube.

10. A control system, characterized in that: It comprises a tandem full-energy-range emission spectrum spectrometer as described in any one of claims 1 to 9, wherein the control system comprises a controller, and the signal output end of the controller is connected to the signal input ends of each motor in the Von Hamos type spectrometer (2) and the Johann type spectrometer (3).

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