Semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation

Abstract

The invention discloses a semiconductor thermal conduction dual-mode hydrogen detection probe structure with temperature and humidity compensation, and belongs to the field of gas detection, the semiconductor thermal conduction dual-mode hydrogen detection probe structure comprises a probe shell with a gas flow channel, and the front end and the rear end of the probe shell are detachably connected with a front end cover and a rear end cover respectively; the front end cover is provided with an air inlet channel communicated with the air flow channel, the rear end cover is provided with an air outlet channel communicated with the air flow channel, a semiconductor detection assembly and a heat conduction type detection assembly are arranged in the probe shell, and the rear end cover is provided with a wire harness connecting assembly. And a metal hose communicated with the air outlet channel is arranged at one end of the rear end cover. According to the semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation, the semiconductor detection assembly is matched with the thermal conductivity type detection assembly based on the thermal conductivity effect to accurately detect hydrogen in different concentration interval ranges, and then high-precision hydrogen concentration detection in the full-scale range is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of gas detection, and particularly to a semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation. Background Art

[0002] At present, air pollution detection has become a key link in ensuring public health and maintaining ecological balance. With the acceleration of the industrialization process and the expansion of urbanization scale, the types of atmospheric pollutants are becoming increasingly complex, and the concentration fluctuation range is increasing, making the demand for precise detection technology extremely urgent.

[0003] It is worth noting that hydrogen, as a special gas, has special significance in the air pollution detection scenario. In the industrial production field, such as the chemical industry, steel industry, and electronic manufacturing industry, hydrogen is both used as a raw material in the production process and may leak into the atmosphere during production accidents or equipment failures. Although hydrogen is not a traditional major air pollutant, a large amount of leakage not only poses an explosion risk but also changes the local atmospheric composition, indirectly affecting the migration and transformation processes of other pollutants. Therefore, real-time monitoring of hydrogen concentration is crucial. As the core device for hydrogen concentration monitoring, the performance and reliability of the hydrogen detection probe are directly related to safe production and accident prevention.

[0004] Currently, the common hydrogen detection probes on the market have many limitations. Traditional single-principle hydrogen detectors, whether based on the semiconductor principle or the thermal conductivity principle, are difficult to achieve high-precision detection in the full concentration range. The detector probe that only adopts the semiconductor principle has a certain sensitivity when detecting low-concentration hydrogen, but when the hydrogen concentration increases, the detection accuracy will significantly decrease, and it is easily affected by environmental factors, resulting in poor stability. On the other hand, the detector probe that solely relies on the thermal conductivity principle has difficulty meeting the accuracy requirements when detecting low-concentration hydrogen and cannot accurately detect trace hydrogen leakage. Summary of the Invention

[0005] The purpose of the present invention is to propose a semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation to solve the problem that the probe of the existing hydrogen detector is difficult to achieve high-precision detection in the full concentration range.

[0006] To achieve the above purpose, the present invention adopts the following technology: A semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation, including a probe housing with an air flow channel. The front and rear ends of the probe housing are respectively detachably connected with a front end cover and a rear end cover. An air intake channel communicating with the air flow channel is opened on the front end cover, and an air outlet channel communicating with the air flow channel is opened on the rear end cover. A semiconductor detection component and a thermal conductivity detection component are arranged in the probe housing. A wire harness connection component is arranged on the rear end cover, and a metal hose communicating with the air outlet channel is arranged at one end of the rear end cover.

[0007] The semiconductor detection component utilizes the high-sensitivity characteristic of semiconductors to hydrogen, and cooperates with a thermal conductivity detection component based on the thermal conductivity effect to accurately detect hydrogen in different concentration ranges, thereby achieving high-precision hydrogen concentration detection within the full range.

[0008] As a further description of the above technical solution: The semiconductor detection component includes a first flexible circuit board disposed on the inner wall of the probe housing, and a semiconductor probe electrically connected thereto is disposed on the first flexible circuit board.

[0009] As a further description of the above technical solution: The semiconductor detection component further includes a first protective cover connected to the inner wall of the probe housing, and the first flexible circuit board is located inside the first protective cover.

[0010] As a further description of the above technical solution: The thermal conductivity detection component includes a second flexible circuit board disposed on the inner wall of the probe housing, and a thermal conductivity probe electrically connected thereto is disposed on the second flexible circuit board.

[0011] As a further description of the above technical solution: A temperature and humidity sensor for detecting the temperature and humidity of hydrogen in the air flow channel is disposed on the second flexible circuit board.

[0012] As a further description of the above technical solution: The thermal conductivity detection component further includes a second protective cover connected to the inner wall of the probe housing, and the second flexible circuit board is located inside the second protective cover.

[0013] As a further description of the above technical solution: The wire harness connection component includes a wire harness connector located in the air outlet channel. A first wiring row connected to the first flexible circuit board and a second wiring row connected to the second flexible circuit board are disposed on the wire harness connector. One end of the wire harness connector is provided with a connection wire located inside the metal hose.

[0014] As a further description of the above technical solution: The wire harness connector is detachably connected to the rear end cover through a mounting plate, and the air outlet channel and the metal hose are communicated through a plurality of air flow holes on the mounting plate.

[0015] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0016] 1. Utilizing the high-precision characteristic of semiconductors in detecting low-concentration hydrogen, the detection accuracy can reach 0.01 within the range of 0 - 3000 ppm, and low-concentration hydrogen can be accurately detected. In the high-concentration range of 3000 - 100000 ppm, the detection accuracy of the thermal conductivity principle can reach 0.05, which can also meet the high-concentration detection requirements, enabling the probe to have good detection accuracy within the full range;

[0017] 2. Combine the two detection principles of semiconductor and thermal conductivity, enabling the probe to cover a wide range of hydrogen concentrations from extremely low to relatively high, meeting the hydrogen detection requirements in more different scenarios. The detection probe tests or analyzes gases by measuring the physical properties of materials, thereby achieving accurate hydrogen detection.

[0018] 3. When one detection principle or probe fails or is interfered with, the other can be used as a backup or reference, reducing the situation where the detection result is incorrect or unable to detect due to problems with a single detection method, and improving the reliability and stability of the detection system. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Shows a sectional view provided according to an embodiment of the present invention;

[0020] Figure 2 Shows an overall structure diagram provided according to an embodiment of the present invention;

[0021] Figure 3 Shows a partial disassembly diagram provided according to an embodiment of the present invention;

[0022] Figure 4 Shows a structural diagram of a semiconductor detection component provided according to an embodiment of the present invention;

[0023] Figure 5 Shows a structural diagram of a thermal conductivity detection component provided according to an embodiment of the present invention;

[0024] Figure 6 Shows a structural diagram of a wire harness connection component provided according to an embodiment of the present invention;

[0025] Figure 7 Shows a connection diagram of the probe for use provided according to an embodiment of the present invention;

[0026] Figure 8 Shows a control flow diagram provided according to an embodiment of the present invention.

[0027] LEGEND DESCRIPTION:

[0028] 1. Probe housing; 11. Air flow channel; 2. Front end cover; 21. Intake channel; 3. Rear end cover; 31. Exhaust channel; 4. Semiconductor detection component; 41. First protective cover; 42. First flexible circuit board; 43. Semiconductor probe; 5. Thermal conductivity detection component; 51. First protective cover; 52. Second flexible circuit board; 53. Thermal conductivity probe; 54. Temperature and humidity sensor; 6. Wire harness connection component; 61. Wire harness connector; 62. First wiring row; 63. Second wiring row; 64. Mounting plate; 65. Air flow hole; 7. Metal hose. Specific embodiments

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.

[0030] Refer to Figures 1 - 8 , a semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation provided in this embodiment includes a probe housing 1 having an air flow channel 11. The front and rear ends of the probe housing 1 are detachably connected to a front end cover 2 and a rear end cover 3 respectively. An air intake channel 21 communicating with the air flow channel 11 is provided on the front end cover 2, and an air outlet channel 31 communicating with the air flow channel 11 is provided on the rear end cover 3. A semiconductor detection component 4 and a thermal conductivity detection component 5 are arranged in the probe housing 1. A wire harness connection component 6 is arranged on the rear end cover 3, and a metal hose 7 communicating with the air outlet channel 31 is arranged at one end of the rear end cover 3.

[0031] In the present invention, the probe is connected to the handheld main body part of the hydrogen detector through the metal hose 7 at the tail of the rear end cover 3. When detecting hydrogen, the suction pump of the handheld main body starts and enters the working state. The front end cover 2 of the probe is aligned with the position where hydrogen needs to be extracted. Then, hydrogen enters the air flow channel 11 in the probe housing 1 through the air intake channel 21 of the front end cover 2. The air flow channel 11 flows around the semiconductor detection component 4 and the thermal conductivity detection component 5 inside the probe housing 1. When hydrogen passes through the air flow channel 11 and enters the air outlet channel 31 of the rear end cover 3, the semiconductor detection component 4 utilizes the high sensitivity characteristics of the semiconductor to hydrogen, and cooperates with the thermal conductivity detection component 5 based on the thermal conductivity effect to accurately detect hydrogen in different concentration ranges, thereby realizing high-precision hydrogen concentration detection within the full range.

[0032] Specifically, as Figure 1 and Figure 4 shown, the semiconductor detection component 4 includes a first flexible circuit board 42 arranged on the inner wall of the probe housing 1. A semiconductor probe 43 electrically connected to it is arranged on the first flexible circuit board 42. The semiconductor detection component 4 further includes a first protective cover 41 connected to the inner wall of the probe housing 1. The first flexible circuit board 42 is located inside the first protective cover 41.

[0033] Among them, the first protective cover 41 is detachably mounted on the mounting seat extending from the inner wall of the probe housing 1 by screws. The first flexible circuit board 42 is isolated and protected by the first protective cover 41. When the hydrogen to be detected enters the air flow channel 11, the hydrogen contacts the sensitive material of the semiconductor probe 43 and reacts or adsorbs, producing an effect that changes the electrical properties such as the resistance of the sensitive material. Then, the hydrogen concentration is determined by measuring this change.

[0034] It should be noted that, taking advantage of the high accuracy of semiconductors in detecting low-concentration hydrogen, the detection accuracy can reach 0.01 within the range of hydrogen concentration from 0 to 3000 ppm, so that the hydrogen concentration can be accurately detected at low concentrations.

[0035] Specifically, as Figure 1 and Figure 5 shown, the thermal conductivity detection component 5 includes a second flexible circuit board 52 provided on the inner wall of the probe housing 1. A thermal conductivity probe 53 electrically connected thereto is provided on the second flexible circuit board 52. The thermal conductivity detection component 5 further includes a second protective cover 51 connected to the inner wall of the probe housing 1. The second flexible circuit board 52 is located inside the second protective cover 51.

[0036] Among them, the second protective cover 51 is detachably mounted on the mounting seat extending from the inner wall of the probe housing 1 by screws. The second flexible circuit board 52 is isolated and protected by the second protective cover 51. Among common gases, hydrogen has extremely high thermal conductivity. The thermal conductivity probe 53 has a detection element made of a high-resistance material inside. When the gas in the environment contacts the detection element, due to the thermal conduction of hydrogen, the temperature of the detection element will change. This temperature change will further cause the resistance value of the detection element to change, so as to detect the hydrogen concentration by detecting the change in the resistance value of the detection element.

[0037] It should be noted that in the high-concentration range of hydrogen concentration from 3000 to 100000 ppm, the detection accuracy of the thermal conductivity principle can reach 0.05, so that the hydrogen concentration can be accurately detected at high concentrations.

[0038] Specifically, a temperature and humidity sensor 54 for detecting the temperature and humidity of hydrogen in the air flow channel 11 is provided on the second flexible circuit board 52. The temperature and humidity sensor 54 is used to detect the temperature and humidity in the air flow channel 11. Since the electrical properties of semiconductor materials are very sensitive to temperature, the temperature change will cause changes in the resistance and other characteristics of the semiconductor chip, thus affecting its detection accuracy of hydrogen. The temperature and humidity sensor 54 can monitor the ambient temperature in real time, so as to compensate and correct the detection results of the semiconductor chip according to the temperature change, ensuring that the hydrogen concentration can be accurately detected in different temperature environments.

[0039] Specifically, as Figure 1 andFigure 6 As shown, the wire harness connection assembly 6 includes a wire harness connector 61 located in the air outlet channel 31. On the wire harness connector 61, there is a first wiring row 62 connected to the first flexible circuit board 42, and a second wiring row 63 connected to the second flexible circuit board 52. One end of the wire harness connector 61 is provided with a connecting wire located inside the metal hose 7. The wire harness connector 61 is detachably connected to the rear end cover 3 through a mounting plate 64. The air outlet channel 31 and the metal hose 7 are communicated through a plurality of air flow holes 65 on the mounting plate 64.

[0040] Among them, by using the first wiring row 62 and the second wiring row 63 to connect the circuit boards of the semiconductor detection component 4 and the thermal conductivity detection component 5 respectively, the efficiency and stability of signal transmission are realized, ensuring that when the semiconductor detection component 4 detects low-concentration hydrogen at 0 - 3000 ppm, and when the thermal conductivity detection component 5 detects high-concentration hydrogen at 3000 - 100000 ppm, their respective detection signals can be accurately transmitted to the subsequent processing unit. The wire harness connector 61 is detachably installed in the rear end cover 3 through the mounting plate 64, greatly improving the installation convenience and maintenance convenience of the device. The air flow holes 65 on the mounting plate 64 realize the communication between the air outlet channel 31 and the metal hose 7, so as to ensure that the gas to be detected can be sucked into the probe structure when the suction pump of the handheld body works.

[0041] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation, characterized in that: The probe housing (1) comprises a probe housing (1) having an air flow channel (11), the front and rear ends of the probe housing (1) are respectively detachably connected with a front cover (2) and a rear cover (3), the front cover (2) is provided with an air inlet channel (21) connected to the air flow channel (11), and the rear cover (3) is provided with an air outlet channel (31) connected to the air flow channel (11), a semiconductor detection component (4) and a thermal conductivity detection component (5) are arranged in the probe housing (1), the rear cover (3) is provided with a wiring harness connection component (6), and one end of the rear cover (3) is provided with a metal hose (7) connected to the air outlet channel (31); The semiconductor detection component (4) utilizes the high sensitivity of semiconductors to hydrogen and cooperates with a thermal conductivity detection component (5) based on thermal conductivity effect to accurately detect hydrogen within different concentration ranges, thereby achieving high-precision hydrogen concentration detection within the full range.

2. According to the semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation as described in claim 1, it is characterized in that: The semiconductor detection component (4) comprises a first flexible circuit board (42) arranged on the inner wall of the probe housing (1), and a semiconductor probe (43) electrically connected thereto is arranged on the first flexible circuit board (42).

3. A semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation according to claim 2, characterized in that: The semiconductor detection component (4) further comprises a first protective cover (41) connected to the inner wall of the probe housing (1), and the first flexible circuit board (42) is located inside the first protective cover (41).

4. A semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation according to claim 2 or 3, characterized in that: The thermal conductivity detection component (5) comprises a second flexible circuit board (52) arranged on the inner wall of the probe housing (1), and a thermal conductivity probe (53) electrically connected thereto is arranged on the second flexible circuit board (52).

5. A semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation according to claim 4, characterized in that: The second flexible circuit board (52) is provided with a temperature and humidity sensor (54) for detecting the temperature and humidity of the hydrogen gas in the air flow channel (11).

6. A semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation according to claim 5, characterized in that: The thermal conductivity detection component (5) further comprises a second protective cover (51) connected to the inner wall of the probe housing (1), and the second flexible circuit board (52) is located inside the second protective cover (51).

7. A semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation according to claim 4, characterized in that: The wiring harness connection assembly (6) comprises a wiring harness connector (61) located in the air outlet channel (31), the wiring harness connector (61) being provided with a first wiring row (62) connected to the first flexible circuit board (42), and a second wiring row (63) connected to the second flexible circuit board (52), and one end of the wiring harness connector (61) being provided with a connecting wire located inside the metal hose (7).

8. A semiconductor thermal conductivity dual-mode hydrogen detection probe structure with temperature and humidity compensation according to claim 7, characterized in that: The harness connector (61) is detachably connected to the rear end cover (3) via a mounting plate (64), and the air outlet channel (31) is connected to the metal hose (7) via a plurality of air flow holes (65) on the mounting plate (64).

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