Substrate transfer apparatus, substrate processing apparatus, and inspection method

Abstract

The invention relates to a substrate transfer apparatus, a substrate processing apparatus, and an inspection method. The present invention is provided with: an acquisition hand part (11a) which is provided with: a guide member (32a) which is provided on the upper surface of a base member and in which the peripheral edge of a substrate (W) is brought into contact; a sensor (22a) that detects the substrate (W) that comes into contact with the guide member (32a); a guide member (34a) that is provided on the upper surface of the base member (31) and that abuts the peripheral edge of the substrate (W); and a sensor (26a) that detects the substrate (W) that comes into contact with the guide member (34a). And a comparison unit (41) that determines the inclination state of the acquisition hand unit (11a) with respect to the substrate (W) on the basis of the difference between the time sequence of the substrate (W) detected by the sensor (22a) and the time sequence of the substrate (W) detected by the sensor (26a).

Description

Technical Field

[0001] The present invention relates to a substrate transfer device and a substrate processing device including the substrate transfer device, and the substrate transfer device transfers various substrates such as semiconductor substrates, substrates for flat panel displays (FPDs) such as liquid crystal display or organic EL (Electroluminescence) display devices, glass substrates for photomasks, and substrates for optical discs. Background Art

[0002] Conventionally, as a substrate transfer device that realizes substrate transfer required for substrate processing, there is a device having a hand body portion equipped with a plurality of tactile sensors. When a substrate is placed on the plurality of tactile sensors, the tactile sensors detect the force in the v-axis direction. In this way, it is possible to recognize that the substrate is normally placed on the hand body portion. In addition, it is also possible to detect the angular deviation of the hand body portion in the Z-axis direction by the tactile sensors.

[0003] <List of Background Art Documents>

[0004] Japanese Patent Application Laid-Open No. 2022-91240

[0005] However, the conventional substrate transfer device equipped with tactile sensors has not been configured to fully utilize the tactile sensors. For example, according to the configuration of Patent Document 1, it only stays at detecting abnormalities in substrate transfer using tactile sensors.

[0006] Currently, a substrate transfer device that is easy to maintain is required. For easy maintenance, it is only necessary to automatically sense the time when maintenance is required. Although it is considered that a tactile sensor is a device that can detect the deviation of the positional relationship between the substrate and the hand body portion, no specific configuration for realizing this has been explored. Summary of the Invention

[0007] The present invention has been completed in view of such circumstances, and an object thereof is to provide a substrate transfer device and a substrate processing device that automatically sense the time when maintenance is required and are easy to maintain. Another object of the present invention is to provide an inspection method for inspecting the time when the substrate transfer device requires maintenance.

[0008] The present invention adopts the following configuration to solve the above problems.

[0009] That is to say, the present invention is a substrate transfer device, characterized by having a hand portion capable of transferring a substrate in a horizontal posture, and

[0010] the hand portion includes:

[0011] a base member;

[0012] a plurality of guide members disposed on the upper surface of the base member for the peripheral edge of the substrate to abut against; and

[0013] A plurality of sensors are configured to respectively detect substrates abutting against the guide members; and the substrate transport device comprises:

[0014] The determination unit determines the tilt state of the hand relative to the substrate based on the time difference between the timings at which the sensors detect the substrate.

[0015] [Function and effect] According to the above structure, the hand is provided with: a plurality of guides provided on the upper surface of the base member for the periphery of the substrate to abut against; and a plurality of sensors for respectively detecting the substrate abutting against each guide; and a determination unit for determining the tilt state of the hand relative to the substrate based on the time difference of each timing of each sensor detecting the substrate. If the structure is configured in this way, a substrate conveying device that can continuously detect the time-dependent changes of the hand can be provided. The timing of detecting the substrate by one sensor has a predetermined relationship with the timing of detecting the substrate by another sensor. When the predetermined relationship is broken in the process of measuring the timing for each substrate held by the hand, it can be determined that a positional deviation of the hand relative to the substrate has occurred. Therefore, according to the present invention, a substrate conveying device that automatically senses the period when maintenance is required and is easy to maintain can be provided.

[0016] Furthermore, in the substrate transfer device, it is preferred to include:

[0017] The first guide member is provided at the front end portion of the base member;

[0018] The second guide member is provided at the base end of the base member;

[0019] The first sensor detects the substrate abutting against the first guide; and

[0020] The second sensor detects the substrate abutting against the second guide; and

[0021] When the direction connecting the base end portion of the base member and the front end portion of the base member is defined as the front-rear direction,

[0022] The determination unit determines the tilt state of the hand in the front-back direction based on a time difference between a timing at which the first sensor detects a substrate and a timing at which the second sensor detects a substrate.

[0023] [Function and Effect] According to the described configuration, the first guide member is provided at the front end portion of the base member, and the second guide member is provided at the base end portion of the base member. Moreover, a first sensor for detecting a substrate is provided in the first guide member, and a second sensor for detecting a substrate is provided in the second guide member. Further, the determination unit determines the tilting state of the hand portion in the front-rear direction based on the time difference between the timing of substrate detection by the first sensor and the timing of substrate detection by the second sensor. When the substrate transfer device is operated, there may be an aging change of the hand portion in which the tilting state of the front end portion with respect to the base end portion changes. According to the described configuration, since the first guide member is provided at the front end portion of the base member and the second guide member is provided at the base end portion of the base member, such an aging change can be easily detected.

[0024] In addition, in the substrate transfer device, it is preferable that

[0025] when the direction connecting the base end portion and the front end portion of the base member is defined as the front-rear direction and the direction orthogonal to the front-rear direction in the horizontal plane is defined as the left-right direction, it includes

[0026] the first guide member as described above, which is provided on one end side in the left-right direction of the front end portion of the base member;

[0027] the second guide member as described above, which is provided on the other end side in the left-right direction of the front end portion of the base member;

[0028] the first sensor as described above, which detects a substrate abutting against the first guide member; and

[0029] the second sensor as described above, which detects a substrate abutting against the second guide member; and

[0030] the determination unit determines the tilting state of the hand portion in the left-right direction based on the time difference between the timing of substrate detection by the first sensor and the timing of substrate detection by the second sensor.

[0031] [Function and Effect] According to the described configuration, the first guide member is provided on one end side in the left-right direction of the front end portion of the base member, the second guide member is provided on the other end side in the left-right direction of the front end portion of the base member, and the determination unit determines the tilting state of the hand portion in the left-right direction based on the time difference between the timing of substrate detection by the first sensor and the timing of substrate detection by the second sensor. When the substrate transfer device is operated, there may be an aging change of the hand portion in which one of the front end portions is displaced downward relative to the other of the front end portions. According to the described configuration, since the first guide member is provided at one end of the front end portion of the base member and the second guide member is provided at the other end of the front end portion of the base member, such an aging change can be easily detected.

[0032] In addition, in the substrate transfer device, it is preferable that

[0033] The hand part has:

[0034] At least one third guiding member provided at the base end of the base member for the periphery of the substrate to abut; and

[0035] A third sensor for detecting the substrate abutting against the third guiding member; and

[0036] The determination unit

[0037] Based on the time difference between the timing of the substrate detected by the first sensor and the timing of the substrate detected by the third sensor, determines the tilting state of the hand part in the front-rear direction,

[0038] Based on the time difference between the timing of the substrate detected by the first sensor and the timing of the substrate detected by the second sensor, determines the tilting state of the hand part in the left-right direction.

[0039] [Function and effect] According to the above configuration, the hand part has: a third guiding member provided at the base end of the base member for the periphery of the substrate to abut; and a third sensor for detecting the substrate abutting against the third guiding member. Moreover, the determination unit determines the tilting state of the hand part in the front-rear direction based on the time difference between the timing of the substrate detected by the first sensor and the timing of the substrate detected by the third sensor. In addition, the determination unit determines the tilting state of the hand part in the left-right direction based on the time difference between the timing of the substrate detected by the first sensor and the timing of the substrate detected by the second sensor. If configured in this way, since the tilting caused by the aging change of the hand part can be detected in two mutually orthogonal directions, the maintenance of the substrate transfer device becomes easier.

[0040] In addition, in the substrate transfer device, it is preferably provided with:

[0041] A notification unit for notifying that the index value indicating the time difference is greater than a specified value.

[0042] [Function and effect] According to the above configuration, the notification unit notifies that the index value indicating the time difference in the substrate detection timing of the sensor is greater than a specified value. Thereby, the maintenance of the substrate transfer device becomes easier.

[0043] In addition, in the substrate transfer device, it is preferably provided with:

[0044] A lifting mechanism for lifting the hand part; and

[0045] A lifting control unit for controlling the lifting mechanism; and

[0046] The lifting control unit

[0047] Raises the hand part located below the stationary substrate to bring the substrate into contact with the plurality of guiding members.

[0048] [Function, Effect] According to the described configuration, there is a lifting mechanism for lifting the hand and a lifting control unit for controlling the lifting mechanism. Moreover, the lifting control unit raises the hand located below the substrate in a stationary state, causing the substrate to abut against a plurality of guide members. If configured in this way, the substrate can be made to abut against the plurality of guide members simultaneously. Therefore, according to the described configuration, the object of the present invention can be more easily achieved.

[0049] In addition, in the substrate transfer device, it is preferable that

[0050] The determination unit determines the inclination state of the hand with respect to the substrate based on the time difference between the two most separated timings in terms of time among the timings when each of the sensors detects the substrate.

[0051] [Function, Effect] According to the described configuration, the inclination state of the hand with respect to the substrate is determined based on the time difference between the two most separated timings in terms of time among the timings when each of the sensors detects the substrate. If configured in this way, the aging change of the hand can be detected more sensitively. Therefore, according to the described configuration, the object of the present invention can be more easily achieved.

[0052] In addition, in the substrate transfer device, it is preferable that

[0053] Each of the sensors is a tactile sensor and is respectively provided between the base member and each of the guide members.

[0054] [Function, Effect] According to the described configuration, each of the sensors is a tactile sensor and is respectively provided between the base member and each of the guide members. If configured in this way, each tactile sensor can more directly and surely detect the substrate placed on the base member.

[0055] In addition, in the substrate transfer device, it is preferable that

[0056] Each of the guide members includes a support portion for contacting the lower portion of the substrate and a wall portion for contacting the outer peripheral surface of the substrate.

[0057] [Function, Effect] According to the described configuration, each of the guide members includes a support portion for contacting the lower portion of the substrate and a wall portion for contacting the outer peripheral surface of the substrate. If configured in this way, the contact portion between the substrate and the guide member is minimized when holding the substrate. Moreover, by the outer peripheral surface of the substrate abutting against the wall portion, the position shift of the substrate generated when holding the substrate is appropriately prohibited. Therefore, according to the described configuration, a substrate transfer device suitable for transferring the substrate can be provided.

[0058] In addition, in the substrate transfer device, it is preferable that

[0059] The base member includes a plurality of recesses for embedding each of the sensors.

[0060] [Function, Effect] According to the described configuration, the base member has a plurality of recesses for embedding respective sensors. If configured in this way, the thickness of the hand portion in the height direction can be suppressed, and thus a substrate transfer device can be provided in which the hand portion does not collide with the substrate when transferring the substrate.

[0061] In addition, in the substrate transfer device, it is preferable that

[0062] each of the sensors detects whether the substrate contacts the corresponding one of the guides.

[0063] [Function, Effect] According to the described configuration, each of the sensors detects whether the substrate contacts the corresponding one of the guides. If configured in this way, the present invention can be realized by relatively inexpensive sensors.

[0064] In addition, in the substrate processing device including the substrate transfer device, it is preferable to include:

[0065] a carrier placement rack capable of placing a carrier that stacks substrates in a horizontal posture in the vertical direction and stores them, and

[0066] the substrate transfer device transfers substrates into and out of the carrier.

[0067] [Function, Effect] According to the described configuration, there is provided a carrier placement rack capable of placing a carrier that stacks substrates in a horizontal posture in the vertical direction and stores them. Therefore, according to the described configuration, the aging change of the hand portion can be detected based on the carrier.

[0068] In addition, in the substrate transfer device, it is preferable that

[0069] the determination unit determines the inclination state of the carrier relative to the hand portion based on the time differences of respective timings at which the substrate is detected by each of the sensors.

[0070] [Function, Effect] According to the described configuration, when the substrate transferred by the hand portion is stored in the carrier, the determination unit determines the inclination state of the carrier relative to the hand portion based on the time differences of respective timings at which the substrate is detected by each of the sensors. Therefore, according to the described configuration, it can be known whether the carrier can maintain a horizontal state.

[0071] In addition, in the substrate processing device including the substrate transfer device, it is preferable to include:

[0072] a single - substrate processing unit that processes one by one the substrates transferred by the substrate transfer device.

[0073] [Function, Effect] According to the described configuration, there is provided a single - substrate processing unit that performs predetermined processing on the substrates transferred by the substrate transfer device one by one. According to the described configuration, a substrate processing device that is easy to maintain and can perform desired substrate processing can be provided.

[0074] The present specification also discloses the following inventions.

[0075] An inspection method for a substrate transfer device, the substrate transfer device having a hand, the hand including: a base member; a plurality of guides provided on an upper surface of the base member and respectively abutting against a periphery of a substrate; and a plurality of sensors respectively detecting the substrate abutting against each of the guides; and the inspection method is characterized by including:

[0076] An acquisition process of causing the hand to acquire the substrate; and

[0077] A determination process of determining an inclination state of the hand with respect to the substrate based on a time difference between timings at which each of the sensors respectively detects the substrate.

[0078] [Function and effect] According to the above configuration, there are provided: an acquisition process of causing the hand to acquire the substrate; and a determination process of determining an inclination state of the hand with respect to the substrate based on a time difference between timings at which each of the sensors respectively detects the substrate. If configured in this way, an inspection method capable of reliably inspecting aging changes of the hand can be provided.

[0079] As described above, according to the present invention, a substrate transfer device and a substrate processing device capable of automatically sensing a period requiring maintenance and facilitating maintenance can be provided. In addition, according to the present invention, an inspection method for inspecting a period requiring maintenance of a substrate transfer device can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0080] Figure 1 is a top view showing an overall configuration of a substrate processing device according to an embodiment.

[0081] Figure 2 is a side view showing a carrier according to an embodiment.

[0082] Figure 3 is a left side view showing configurations of a hand for acquisition and a hand for return according to an embodiment.

[0083] Figure 4 is a top view showing configurations of a hand for acquisition and a hand for return according to an embodiment.

[0084] Figure 5 is a top view showing an operation of a hand for acquisition according to an embodiment.

[0085] Figure 6 is a cross-sectional view showing an operation of a hand for acquisition according to an embodiment.

[0086] Figure 7 is an exploded perspective view showing a configuration of a hand for acquisition according to an embodiment.

[0087] Figure 8 It is an exploded perspective view showing the configuration of the substrate acquisition hand in the embodiment.

[0088] Figure 9 It is a schematic diagram showing the inspection method of the substrate acquisition hand in the embodiment.

[0089] Figure 10 It is a schematic diagram showing the inspection method of the substrate acquisition hand in the embodiment.

[0090] Figure 11 It is a schematic diagram showing the inspection method of the substrate acquisition hand in the embodiment.

[0091] Figure 12 It is a schematic diagram showing the inspection method of the substrate acquisition hand in the embodiment.

[0092] Figure 13 It is a schematic diagram showing the inspection method of the substrate acquisition hand in the embodiment.

[0093] Figure 14 It is a schematic diagram showing the inspection method of the substrate acquisition hand in the embodiment.

[0094] Figure 15 It is a flowchart showing the inspection method of the substrate acquisition hand in the embodiment.

[0095] Figure 16 (a) to (c) in it are schematic diagrams showing one modification of the present invention.

[0096] Figure 17 It is a top view showing one modification of the present invention.

[0097] Figure 18 It is a cross-sectional view showing one modification of the present invention. Detailed implementation mode

[0098] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The following embodiments are substrate processing apparatuses equipped with the substrate transfer device of the present invention. The substrate transfer device of the present invention corresponds to the transfer block in the substrate processing apparatus of the embodiment. The transfer block has a transfer robot having a hand for transferring a substrate.

[0099] Embodiment

[0100] 1. Overall configuration

[0101] As Figure 1 shown, the substrate processing apparatus 1 of this example has a load port 10, a transfer block 3, and a processing block 5. The substrate processing apparatus 1 of this example is configured to sequentially acquire substrates W in a horizontal posture from a carrier C one by one, perform substrate processing, and then return the substrates W to the carrier one by one for single-substrate processing.

[0102] In this specification, for convenience, the direction in which the transfer block 3 and the processing block 5 in the substrate processing apparatus 1 are arranged is referred to as the "front-rear direction X". The front-rear direction X extends horizontally. The direction from the processing block 5 in the substrate processing apparatus 1 toward the transfer block 3 in the front-rear direction X is referred to as "front". The direction opposite to the front side is referred to as "rear". The direction that extends horizontally and is orthogonal to the front-rear direction X is referred to as the "width direction Y". For convenience, one direction of the "width direction Y" is referred to as "right", and the other direction is referred to as "left" for convenience. For convenience, the direction (height direction) that is orthogonal to the front-rear direction X and the width direction Y is referred to as the "vertical direction Z". In each figure, for reference, front, rear, right, left, up, and down are appropriately indicated.

[0103] The loading port 10 corresponds to the carrier mounting rack of the present invention. The loading port 10 is a carrier mounting rack for mounting the carrier C. A plurality of loading ports 10 are arranged in the width direction Y and can each mount one carrier C. The loading port 10 can mount the carrier C that houses the substrates W in a horizontal posture stacked in the vertical direction.

[0104] That is, the carrier C houses a plurality of substrates W in a horizontal posture with a predetermined interval in the vertical direction Z. In addition, on one side surface of the carrier C, an opening for taking out and housing the substrate is provided. The substrates W are stacked and housed in one carrier C in a horizontal posture with a fixed interval (for example, 25 pieces). Figure 2 It is a cross-sectional view illustrating the configuration of the carrier C. In the carrier C, a comb-shaped member 7 having a plurality of protrusions for mounting the substrate W is provided at both ends of the carrier housing. The protrusions of the comb-shaped member 7 are configured to mount the ends of the substrate W. The protrusions extend in the front-rear direction X. The protrusions are arranged at intervals of 1 cm. As the carrier C, for example, there is a closed-type FOUP (Front Opening Unify Pod). In the present invention, an open-type container can be used as the carrier C.

[0105] The transfer block 3 corresponds to the substrate transfer device of the present invention. The transfer block 3 is a rectangle extending in the width direction Y. In the transfer block 3, there is a transfer robot IR having a pickup hand 11a and a return hand 11b capable of transferring a substrate in a horizontal posture. The transfer robot IR can move horizontally in the width direction Y. The transfer robot IR has a hand capable of holding and transferring the substrate W. The hand is supported by a multi-joint arm configured to be capable of rotational movement, lifting movement, and advancing and retreating movement. The transfer robot IR can pick up the carrier C on the loading port 10 and the passage 24 provided in front of the processing block 5. The transfer robot IR can perform the following two operations: pick up the substrate W in a horizontal posture one by one from the carrier C and place it on the passage 24; and pick up the substrate W in a horizontal posture placed on the passage 24 one by one and return it to the carrier C. The unprocessed substrate W held by the carrier C is transferred to the passage 24 by the transfer robot IR. Then, the processed substrate W is placed on the passage 24 and returned to the carrier C by the transfer robot IR. The transfer block 3 is configured to carry out the loading and unloading of the substrate W to and from the carrier C.

[0106] The processing block 5 is configured to perform a prescribed process on the substrate W. A plurality of single-wafer processing chambers 5a are arranged in the processing block 5. The single-wafer processing chamber 5a corresponds to the single-wafer processing unit of the present invention. The single-wafer processing chamber 5a is configured to process the substrate W transferred by the transfer block 3 one by one.

[0107] The arrangement of the single-wafer processing chambers 5a in the processing block 5 will be described. That is, in the processing block 5 of the present invention, three single-wafer processing chambers 5a are arranged in each of the middle layer region, the upper layer region, and the lower layer region to form a stacked body. Two stacked bodies are arranged in the front and back in the right side of the processing block 5. Similarly, two stacked bodies are arranged in the front and back in the left side of the processing block 5. Therefore, twelve single-wafer processing chambers 5a are mounted in the processing block 5.

[0108] In the central portion of the processing block 5, a substrate transfer region extending in the front-back direction X is provided. The central robot CR can reciprocate in the substrate transfer region, and can pick up the substrate W in a horizontal posture one by one from the passage 24 and transfer it to any one of the single-wafer processing chambers 5a. Moreover, the central robot CR can pick up the substrate W in a horizontal posture held by the single-wafer processing chamber 5a one by one and return it to the passage 24. In this way, the central robot CR can pick up each of the single-wafer processing chambers 5a and the passage 24.

[0109] As the substrate process performed by the single-wafer processing chamber 5a, for example, there is a substrate cleaning process. In addition to the substrate cleaning process, the substrate processing apparatus 1 in this example is also configured to perform various substrate processes using a chemical solution.

[0110] 2. Configuration of the Transfer Robot

[0111] Figure 3Schematically shows the front end related to substrate holding in the transfer robot IR. The transfer robot IR includes a pickup hand 11a and a return hand 11b. The return hand 11b and the pickup hand 11a are held by the arm 12 in a state stacked in the vertical direction Z. The arm 12 can move the return hand 11b and the pickup hand 11a forward and backward in the front-rear direction X. In Figure 3 In the configuration, the return hand 11b and the pickup hand 11a are arranged in order from top to bottom, but the arrangement order of each component can be appropriately changed.

[0112] The pickup hand 11a corresponds to the hand of the present invention. The pickup hand 11a holds the unprocessed substrates W one by one from the carrier C by entering between the vertically adjacent substrates W and transports them to the passage 24.

[0113] The pickup hand 11a has a base member 31 flat in the horizontal plane, a guide member 32a, and a guide member 34a. The base member 31 is shaped so as to be able to enter between substrates. The direction connecting the base end portion and the front end portion of the base member 31 is called the front-rear direction P (reference Figure 4 ). In addition, the direction orthogonal to the front-rear direction in the horizontal plane is called the left-right direction Q (reference Figure 4 ). The guide member 32a corresponds to the first guide member of the present invention. The guide member 34a corresponds to the second guide member of the present invention.

[0114] The guide member 32a and the guide member 32b are configured to abut against the end portion of the substrate W at the front end portion of the pickup hand 11a. That is, the guide member 32a is a tab provided at the front end portion of the base member 31 and is a member that contacts the substrate W. On the other hand, the guide member 34a is a tab provided at the base end portion of the base member 31 and is a member that contacts the substrate W. The guide member 32a and the guide member 34a are provided on the upper surface of the base member 31. Therefore, the guide member 32a and the guide member 34a are configured to hold the upper substrate W from below.

[0115] The guide member 32a is provided on one end side in the left-right direction Q at the front end portion of the base member 31. On the other hand, the guide member 32b is provided on the other end side in the left-right direction Q at the front end portion of the base member 31.

[0116] The guide member 32a and the guide member 34a have a thick wall portion and a thin wall portion. Therefore, the thickness of the guide member 32a and the guide member 34a is locally different in the height direction. The wall portion of the thick wall portion of the guide member 32a facing the base end portion of the pickup hand 11a can contact the end portion (beveled surface) of the substrate W. On the other hand, the wall portion of the thick wall portion of the guide member 34a facing the front end portion of the pickup hand 11a can contact the end portion (beveled surface) of the substrate W.

[0117] The flat portions facing upward in the thin-walled portions of the guiding members 32a and 34a can contact the peripheral portion of the lower surface of the substrate. The guiding members 32a and 34a correspond to a plurality of guiding members of the present invention. The guiding members 32a and 34a are configured to be disposed on the upper surface of the base member 31 for the peripheral edge of the substrate to abut against.

[0118] Since the guiding members 32a and 32b provided at the front end portion of the base member 31 are conical in shape, this will be described. As Figure 3 shown, the upper surfaces of the thin-walled portions of the guiding members 32a and 32b are inclined. That is to say, the thin-walled portion is configured such that the thickness in the height direction becomes smaller as it is farther away from the thick-walled portion. In this way, the guiding members 32a and 32b have a support portion (conical portion: thin-walled portion) for contacting the lower portion of the substrate W and a wall portion (side surface of the thick-walled portion) for contacting the outer peripheral surface of the substrate.

[0119] Similarly, as Figure 3 shown, the guiding members 34a and 34b provided at the base end portion of the base member 31 are conical in shape. That is to say, the thin-walled portion is configured such that the thickness in the height direction becomes smaller as it is farther away from the thick-walled portion. In this way, the guiding members 34a and 34b have a support portion (conical portion: thin-walled portion) for contacting the lower portion of the substrate W and a wall portion (side surface of the thick-walled portion) for contacting the outer peripheral surface of the substrate.

[0120] The returning hand portion 11b has the same configuration as the obtaining hand portion 11a. That is to say, the returning hand portion 11b has the base member 31 and the guiding members 32a and 32b. In the returning hand portion 11b, the guiding members 32a and 32b are disposed at the front end portion and the base portion of the base member 31, and the configuration in which the guiding members 32a and 32b have a thick-walled portion and a thin-walled portion is the same as that of the obtaining hand portion 11a. The returning hand portion 11b of this example is provided for transporting the cleaned and clean substrate W. By separately using the hand portion in the forward path and the return path of the reciprocating movement of the substrate W, it is not necessary for the hand portion holding the substrate W before the cleaning process to hold the substrate W after the cleaning process. Therefore, by providing the returning hand portion 11b, the cleanliness of the substrate W after the cleaning process is maintained.

[0121] In addition, in the returning hand portion 11b, it is not necessarily required to have the sensors 22a, the second sensor 22b, the sensor 26a, and the sensor 26b described later.

[0122] Figure 4It is a top view showing the substrate acquisition hand portion 11a and the substrate return hand portion 11b. The substrate acquisition hand portion 11a and the substrate return hand portion 11 are provided with a connecting portion 36, a first blade 33a and a second blade 33b formed by branching from the connecting portion 36. The connecting portion 36 connects the first blade 33a and the second blade 33b. The first blade 33a is a member that holds one end of the substrate W and extends in the front-rear direction P, and the second blade 33b is a member that holds the other end of the substrate W and extends in the front-rear direction P.

[0123] In the first blade 33a, a guiding member 32a is arranged. In the second blade 33b, a guiding member 32b is arranged. In addition, in the first blade 33a, a guiding member 34a is arranged. In the second blade 33b, a guiding member 34b is arranged.

[0124] As Figure 5 shown, the wall portions A of the guiding member 32a, the guiding member 32b, the guiding member 34a, and the guiding member 34b are arranged to belong to a virtual circle slightly larger than the substrate W. Thus, the substrate W can fall into the receiving area of the substrate W formed by the thin wall portions of the guiding member 32a, the guiding member 32b, the guiding member 34a, and the guiding member 34b.

[0125] A push rod 35 is provided at the front end of the connecting portion 36 and can press the substrate W held by the guiding member 32a, the guiding member 32b, the guiding member 34a, and the guiding member 34b in the forward direction. The push rod 35 can move backward to be in an open state and can also move forward to be in a closed state. In order to hold the substrate W by the first blade 33a and the second blade 33b, first, the push rod 35 is set to the open state and the substrate W is held by the guiding member 32a, the guiding member 32b, the guiding member 34a, and the guiding member 34b (refer to Figure 5 ). Then, the push rod 35 is set to the closed state, and the substrate W is clamped between the guiding member 32a, the guiding member 32b, and the push rod 35. Figure 6 It is a cross-sectional view showing the above situation. In this way, the clamping of the substrate W is performed. The push rod 35 is provided on the upper surface of the base member 31 and can shift between an avoidance state of avoiding the outer peripheral surface of the substrate and a contact state of contacting the outer peripheral surface of the substrate.

[0126] 3. Regarding the sensor

[0127] Figure 7 It is an exploded perspective view showing the structure of the substrate acquisition hand portion 11a. In Figure 7In [the above], since the guide members 32a, 32b, 34a, and 34b are omitted, it is easy to understand the case where the sensors 22a, 22b, 26a, and 26b are assembled in the acquisition hand portion 11a. That is to say, at the front end of the first blade 33a, a first recess 37a for burying the sensor 22a is provided. Similarly, at the base end of the first blade 33a, a second recess 38a for burying the sensor 26a is provided. In addition, at the front end portion of the second blade 33b, a recess 37b for burying the sensor 22b is provided. Similarly, at the base end portion of the second blade 33b, a recess 38b for burying the sensor 26b is provided. Thus, the base member 31 has a plurality of recesses for burying the respective sensors. The sensor 22a corresponds to the first sensor of the present invention. The sensor 22b corresponds to the second sensor of the present invention.

[0128] Figure 8 It is an exploded perspective view showing the positional relationship between the sensor 22a and the guide member 32a. The guide member 32a and the sensor 22a are arranged in the Z direction. The sensor 22a is composed of a main body portion 221 and an elastic body 222 made of an elastic member. When the sensor 22a is installed on the first blade 33a, by burying the main body portion 221 in the first recess 37a, the elastic body 222 protrudes from the upper surface of the first blade 33a. In the elastic body 222, the guide member 32a is fixed. Therefore, the sensor 22a is provided between the base member 31 and the guide member 32a. When the substrate W is placed on the guide member 32a, the elastic body 222 deforms. Based on this, the sensor 22a detects whether the substrate W is in contact with the guide member 32a. That is to say, the sensor 22a is a component for detecting the substrate W abutting against the guide member 32a.

[0129] More specifically, the sensor 22a is a tactile sensor capable of detecting the load input to the guide member 32a. Therefore, when the substrate W is not placed on the guide member 32a, the sensor 22a outputs a signal indicating 0 mg, and when the substrate W is placed on the guide member 32a, the sensor 22a outputs a signal indicating the weight of the substrate. However, since the substrate W is supported by the guide members 32a, 32b, 34a, and 34b, the weight of the substrate W is dispersed among the respective guide members. Therefore, the sensor 22a only outputs a signal indicating a weight that is at most smaller than the total weight of the substrate W.

[0130] The sensor 26a also has the same configuration as the sensor 22a. That is to say, the sensor 26a is a component for detecting the substrate W abutting against the guide member 34a. Thus, the sensors 22a and 26a respectively detect the substrate W abutting against the corresponding guide member.

[0131] In addition, the sensor 26a can detect the load input to the guiding member 34a. This is the same as the configuration of the sensor 22a.

[0132] The sensors 22b and 26b also have the same configuration as the sensors 22a and 26a. The sensor 22b detects whether the substrate W is in contact with the guiding member 32b. The sensor 26b detects whether the substrate W is in contact with the guiding member 34b. Each sensor is a tactile sensor and is respectively provided between the base member 31 and each guiding member.

[0133] In addition, the sensor 22b can detect the load input to the guiding member 32b. Similarly, the sensor 26a can detect the load input to the guiding member 34a. Similarly, the sensor 26b can detect the load input to the guiding member 34b. This is the same as the configuration of the sensor 22a.

[0134] As described later, the sensors 22a, 22b, 26a, and 26b detect the timing at which the substrate W abuts against the guiding member. Therefore, each sensor only needs to be able to detect whether the substrate W is in contact with the corresponding guiding member, and does not have to have the function of detecting the load input to each guiding member.

[0135] 4. Detection method for aging change of the hand using sensors

[0136] Hereinafter, with reference to Figures 9 to 14 , the inspection method for the acquisition hand 11a using the sensors 22a and 26a will be described. According to the inspection method, the aging change of the acquisition hand 11a can be detected. Specifically, the inspection method is a method for detecting the drooping of the acquisition hand 11a. The transfer robot IR having the acquisition hand 11a is composed of a plurality of rigid members fastened by screws or the like. If the transfer robot IR is used for a long time, the fastening screws or the like become loose and the front end of the acquisition hand 11a droops. If this is left unattended, it will cause malfunction of the transfer robot IR. According to the configuration of the present embodiment, it is possible to immediately detect and prompt the required maintenance during the process in which the drooping of the acquisition hand 11a is relatively slight.

[0137] In addition, regarding the drooping of the return hand 11b, it can be inferred from the condition of the acquisition hand 11a. In this regard, in the case where strictness is required, sensors 22a and 26a can be provided on the return hand 11b. If so, the drooping of the return hand 11b can be detected based on the same principle as the following description. That is, the return hand 11b can perform each of the operations described in Figures 9 to 14 on the substrate W placed on the passage 24.

[0138] With reference to Figure 9, the components related to the inspection will be described. First, the comparison unit 41 will be described. The comparison unit 41 corresponds to the determination unit of the present invention. The comparison unit 41 is a component that determines the tilting state of the substrate W with respect to the substrate W based on the time difference between the timings of detecting the substrate W by the sensor 22a and the timings of detecting the substrate by the sensor 26a. More generally, the comparison unit 41 determines the tilting state of the hand with respect to the substrate W based on the time differences of the respective timings of detecting the substrate W by the respective sensors. Specifically, the comparison unit 41 can determine whether the front end portion of the base member 31 has shifted downward with respect to the base end portion. When the substrate W is not placed, the sensors 22a and 26a do not detect the substrate W. At this time, the comparison unit 41 does not operate. The notification unit 101 does not perform notification based on the non-output of a signal related to notification from the comparison unit 41.

[0139] The notification unit 101 is a component that notifies that the acquisition hand 11a has drooped. As a specific notification method of the notification unit 101, it is not particularly limited, and it is also considered to send an alarm by sound or light, or a warning signal to the main computer of the factory, etc. The notification unit 101 gives a warning about the drooping of the acquisition hand 11a by notifying that the index value indicating the difference in detection timings is greater than a specified value.

[0140] The lifting mechanism 53 is a component that raises and lowers the acquisition hand 11a in the Z direction. The lift control unit 52 is a component that controls the lifting mechanism 53.

[0141] Figure 10 The case where the drooping of the acquisition hand 11a is detected using the substrate W stored in the carrier C will be described. The substrate W used at this time only needs to be flat and can be a wafer for inspection. In the above case, the inspection of the acquisition hand 11a is carried out in cooperation with the stop of the substrate processing. In addition, the substrate W actually used for the substrate processing can be used to detect the drooping of the acquisition hand 11a. In the above case, it is possible to always monitor the necessity of maintenance of the acquisition hand 11a while performing the operation related to the substrate processing.

[0142] Figure 10 The situation when the acquisition hand 11a is located below the substrate W supported by the comb-shaped member 7 of the carrier C is shown. At this time, both the guide member 32a and the guide member 34a are separated from the substrate W. Therefore, neither the sensor 22a nor the sensor 26a detects the substrate W, so the determination operation of the comparison unit 41 or the notification operation of the notification unit 101 is not executed.

[0143] Figure 11 Shows the lifting mechanism 53 from Figure 10actuates according to the state, and shows the situation when the substrate W is picked up by the picking hand 11a. The lifting control unit 52 is configured to lift the picking hand 11a located below the substrate W in the stationary state in the carrier C so that the substrate W abuts against the plurality of guides (guide members 32a, guide members 34a).

[0144] In Figure 11 this case, since the picking hand 11a remains horizontal and does not droop, the guide member 32a and the guide member 34a abut against the substrate W substantially simultaneously. Thus, the sensor 22a and the sensor 26a detect the substrate W at substantially the same timing.

[0145] The sensor 22a sends a detection signal to the comparison unit 41 at the timing of detecting the substrate W. The comparison unit 41 identifies the detection time of the substrate W through the input of the detection signal. The detection time at this time is referred to as the first time t1. Similarly, the sensor 26a sends a detection signal to the comparison unit 41 at the timing of detecting the substrate W. The comparison unit 41 identifies the detection time of the substrate W through the input of the detection signal. The detection time at this time is referred to as the second time t2.

[0146] The comparison unit 41 calculates the difference between the first time t1 and the second time t2, and determines whether the difference falls within a specified range determined by a specified value. Specifically, the comparison unit 41 subtracts the second time t2 from the first time t1 and calculates the absolute value of the result, which is the index value. Then, the comparison unit 41 compares the index value with the specified value. When the index value is larger than the specified value, a signal instructing notification is sent to the notification unit 101. In addition, when the index value is equal to or less than the specified value, the comparison unit 41 does not send a signal instructing notification to the notification unit l01. The specified value is determined based on the index value when the picking hand 11a droops and a difference is generated between the first time t1 and the second time t2. Therefore, when the index value is greater than the specified value, it can be determined that the drooping of the picking hand 11a has reached a level that requires maintenance. In addition, when the index value is equal to or less than the specified value, it can be determined that the drooping of the picking hand 11a is within the allowable range.

[0147] However, in Figure 11 this case, since the picking hand 11a does not droop, the comparison unit 41 does not send a signal instructing notification to the notification unit 101. That is, the comparison unit 41, in Figure 11 this case, determines that the index value is equal to or less than the specified value. Accordingly, the notification unit 101 does not perform notification related to the drooping of the picking hand 11a.

[0148] On the other hand, Figure 12 the case where the picking hand 11a droops is described. That is, Figure 12This shows the situation when the downwardly hanging substrate acquisition hand 11a is located below the substrate W supported by the comb-shaped member 7 of the carrier C. At this time, both the guide member 32a and the guide member 34a are separated from the substrate W. Therefore, neither the sensor 22a nor the sensor 26a detects the substrate W, so the determination operation of the comparison unit 41 or the notification operation of the notification unit 101 is not executed.

[0149] Figure 13 This shows the situation when the lifting mechanism 53 operates from Figure 12 this state and the substrate acquisition hand 11a acquires the substrate W. The lifting control unit 52 attempts to raise the substrate acquisition hand 11a located below the stationary substrate W in the carrier C so that the substrate W abuts against the guide member 32a and the guide member 34a.

[0150] In Figure 13 this case, since the substrate acquisition hand 11a is tilted and hanging downward, the guide member 34a abuts against the substrate W earlier than the guide member 32a. Therefore, the sensor 26a detects the substrate W at a timing earlier than the sensor 22a.

[0151] When the lifting mechanism 53 further raises the substrate acquisition hand 11a, as Figure 14 shown, the guide member 32a abuts against the substrate W later than the guide member 34a. Therefore, the sensor 22a detects the substrate at a timing later than the sensor 26a.

[0152] The comparison unit 41 calculates the difference between the first time t1 and the second time t2 and determines whether the difference is within a specified range determined by a specified value. In Figures 12 to 14 this case, since the substrate acquisition hand 11a is hanging downward, the comparison unit 41 sends a signal instructing notification to the notification unit 101. That is, the comparison unit 41 determines that the index value is greater than the specified value in Figure 14 this case. Thus, the notification unit 101 performs a notification related to the downward hanging of the substrate acquisition hand 11a.

[0153] 5. Other configurations

[0154] As Figure 1 shown, the transfer block 3 includes a control unit 100 related to the control of the transfer robot IR. The control unit 100 is constituted by, for example, a CPU (Central Processing Unit). The specific configuration of the control unit 100 is not limited. For example, a single processor can constitute the control related to the comparison unit 41 and the substrate acquisition hand 11a, and the control related to the return hand 11b, or individual processors can be used.

[0155] As controls related to the control unit 100, for example, there are controls related to the forward and backward movements of the acquisition hand part 11a, the forward and backward movements of the return hand part 11b, the rotational movement of the acquisition hand part 11a, the rotational movement of the return hand part 11b, the lifting movement of the acquisition hand part 11a, the lifting movement of the return hand part 11b, and the control of the push rod.

[0156] The storage unit stores programs related to control, or parameters such as prescribed values. The storage unit may be constituted by a single device, or may be constituted by individual devices corresponding to each control. The carrier block 3 of the present invention does not particularly limit the constitution of the device that realizes the storage unit.

[0157] 6. Flowchart of the inspection method

[0158] Hereafter, Figure 15 using the

[0159] shown flowchart, the inspection method of the actual substrate transfer device will be described.

[0160] Step S11: The acquisition hand part 11a acquires the substrate W stored in the carrier C.

[0161] Step S12: Based on the difference in the timing of detecting the substrate W by the sensor 22a and the timing of detecting the substrate by the sensor 26a, the comparison unit 41 determines the inclination state of the acquisition hand part 11a with respect to the substrate W.

[0162] Step S13: When it is determined that the acquisition hand part 11a is inclined, the process proceeds to step S14, and when it is not the case, the process ends.

[0163] 7. Effects of the present invention

[0164] According to the above configuration, it includes: a pickup hand 11a, which includes: a guiding member 32a provided on the upper surface of the base member 31 for the periphery of the substrate W to abut; a sensor 22a for detecting the substrate W abutting against the guiding member 32a; a guiding member 34a provided on the upper surface of the base member 31 for the periphery of the substrate W to abut; and a sensor 26a for detecting the substrate W abutting against the guiding member 34a; and a comparison unit 41 for determining the inclination state of the pickup hand 11a relative to the substrate W based on the time difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate W. If configured in this way, a transfer block 3 capable of continuously detecting the aging change of the pickup hand 11a can be provided. There is a specified relationship between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate W. When the specified relationship is broken during the measurement of the timing for each substrate W held by the pickup hand 11a, it can be determined that a positional shift of the pickup hand 11a relative to the substrate W has occurred. Therefore, according to the present invention, a transfer block 3 capable of automatically sensing the period requiring maintenance and facilitating maintenance can be provided.

[0165] According to the above configuration, the guiding member 32a is provided at the front end portion of the base member 31, and the guiding member 34a is provided at the base end portion of the base member 31. Moreover, in the guiding member 32a, there is a sensor 22a for detecting the substrate W, and in the guiding member 34a, there is a sensor 26a for detecting the substrate W. Moreover, the comparison unit 41 determines the inclination state of the pickup hand 11a in the front-rear direction P based on the time difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate W. The comparison unit 41 determines whether the front end portion of the base member 31 has shifted downward relative to the base end portion. When the transfer block 3 is operated, an aging change of the pickup hand 11a in which the front end portion shifts downward relative to the base end portion sometimes occurs. According to the above configuration, since the guiding member 32a is provided at the front end portion of the base member 31 and the guiding member 34a is provided at the base end portion of the base member 31, such an aging change can be easily detected.

[0166] According to the above configuration, an index value indicating the time difference in the substrate detection timing of the sensors is notified by the notification unit 101 to be greater than a specified value. Thereby, the maintenance of the transfer block 3 becomes easier.

[0167] According to the above configuration, it includes a lifting mechanism 53 for lifting the pickup hand 11a and a lifting control unit 52 for controlling the lifting mechanism 53. Moreover, the lifting control unit 52 raises the pickup hand 11a located below the stationary substrate W so that the substrate W abuts against a plurality of guiding members (guiding member 32a, guiding member 34a). If configured in this way, the substrate W can be made to abut against the guiding member 32a and the guiding member 34a simultaneously. Therefore, according to the above configuration, the object of the present invention can be more easily achieved.

[0168] According to the above configuration, each sensor (sensor 22a, sensor 22b, sensor 26a, sensor 26b) is a tactile sensor, and is disposed between the base member 31 and each guide member (guide member 32a, guide member 32b, guide member 34a, guide member 43b). If configured in this way, each sensor can detect the substrate W placed on the base member 31 more directly and surely.

[0169] According to the above configuration, each guide member (guide member 32a, guide member 32b, guide member 34a, guide member 34b) includes a support portion (conical portion B) that contacts the lower portion of the substrate W and a wall portion A that contacts the outer peripheral surface of the substrate W. If configured in this way, the contact portion between the substrate W and the guide member is extremely reduced. Moreover, by the outer peripheral surface of the substrate W abutting against the wall portion A, the position shift of the substrate W generated when holding the substrate W is appropriately prohibited. Therefore, according to the above configuration, the transfer block 3 suitable for transporting the substrate W can be provided.

[0170] According to the above configuration, the base member 31 includes a plurality of recesses for embedding each sensor (sensor 22a, sensor 22b, sensor 26a, sensor 26b). If configured in this way, the thickness of the acquisition hand part 11a in the height direction can be suppressed, and thus the transfer block 3 in which the acquisition hand part 11a does not collide with the substrate W when transporting the substrate can be provided.

[0171] According to the above configuration, each sensor (sensor 22a, sensor 22b, sensor 26a, sensor 26b) only needs to detect whether the substrate W is in contact with the corresponding guide member (guide member 32a, guide member 32b, guide member 34a, guide member 34b). If configured in this way, the present invention can be realized by relatively inexpensive sensors.

[0172] According to the above configuration, there is provided a carrier mounting rack capable of mounting a carrier C that stacks and stores substrates W in a horizontal posture in the vertical direction. Therefore, according to the above configuration, the aging change of the acquisition hand part 11a can be detected based on the carrier C.

[0173] According to the above configuration, there is provided a single-piece processing unit that performs a prescribed process on each substrate W transported by the transfer block 3 one by one. According to the above configuration, a substrate processing apparatus that is easy to maintain and can perform a desired substrate process can be provided.

[0174] According to the above configuration, there are provided: an acquisition process of causing the acquisition hand part 11a to acquire a flat substrate W; and a determination process of determining the inclination state of the acquisition hand part 11a with respect to the substrate W based on the time difference of each timing at which each sensor (sensor 22a, sensor 26) detects the substrate W. If configured in this way, an inspection method capable of surely determining the inclination state of the acquisition hand part 11a can be provided.

[0175] 8. Variation

[0176] The present invention is not limited to the above-described configuration and can be implemented with variations as follows.

[0177] <Variation 1>

[0178] In the above-described embodiment, the sensor 22a is provided at the front end portion of the base member 31, and the sensor 26a is provided at the base end portion of the base member 31. However, the present invention is not limited to the above-described configuration. The sensor 26a may be provided at the front end portion of the base member 31. In this case, the guide member 32a is provided at one end of the front end portion of the base member 31, and the guide member 34a is provided at the other end of the front end portion of the base member 31. In addition, in the variation, it is not necessary to provide a sensor at the base end portion of the base member 31.

[0179] Specifically, Variation 1 is a configuration in which the guide member 32a is provided at the front end portion of the first blade 33a, and the guide member 34a is provided at the front end portion of the second blade 33b. The comparison unit 41 of this variation operates in the same manner as in the above-described embodiment based on the outputs of the sensor 22a provided on the guide member 32a and the sensor 26a provided on the guide member 34a. That is, the comparison unit 41 determines whether the guide member 32a is displaced in the vertical direction relative to the guide member 34a, that is, whether the base member 31 is tilted in the left-right direction Q, based on the detection results of the sensor 22a and the sensor 26a.

[0180] According to the above-described configuration, the guide member 32a is provided on one end side in the left-right direction Q of the front end portion of the base member 31, the guide member 34a is provided on the other end side in the left-right direction Q of the front end portion of the base member 31, and the comparison unit 41 determines the tilting state of the pickup hand 11a in the left-right direction Q based on the time difference between the timing when the sensor 22a detects the substrate and the timing when the sensor 26a detects the substrate W. It is determined whether the guide member 32a is displaced in the vertical direction relative to the guide member 34a. When the transfer block 3 is operated, there is sometimes an aging change in the pickup hand 11a in which one of the front end portions is displaced downward relative to the other of the front end portions. According to the above-described configuration, since the guide member 32a is provided at one end of the front end portion of the base member 31 and the guide member 34a is provided at the other end of the front end portion of the base member 31, such an aging change can be easily detected.

[0181] <Variation 2>

[0182] Even if the guide member 32a is provided at one end of the base end portion of the base member 31 and the guide member 34a is provided at the other end of the base end portion of the base member 31, the same effect as in Variation 1 can be obtained.

[0183] <Variation 3>

[0184] As a further variant implementation of Variant Example 1, it is also possible to adopt a configuration in which three sensors are used to simultaneously detect the hanging of the acquisition hand part 11a and the inclination of the acquisition hand part 11a in the left-right direction Q of the base member 31. Regarding the operation of the comparison unit 41 related to the hanging of the acquisition hand part 11a, reference can be made to the embodiment. Regarding the operation of the comparison unit 41 related to the inclination of the acquisition hand part 11a in the left-right direction Q, reference can be made to Variant Example 1.

[0185] In this variant example, the acquisition hand part 11a has a guide member 32a and a sensor 22a at the front end of the first blade 33a, and a guide member 34a and a sensor 26a at the base end of the first blade 33a. Moreover, the acquisition hand part 11a of this variant example is provided with a guide member 32b and a sensor 22b at the front end of the second blade 33b. To understand the positional relationship of each, reference can be made to Figure 5 、 Figure 7 。The guide member 32a corresponds to the first guide member of this variant example, and the sensor 22a corresponds to the first sensor of the present invention. The guide member 34a corresponds to the third guide member of this variant example, and the sensor 26a corresponds to the third sensor of the present invention. The guide member 32b corresponds to the second guide member of this variant example, and the sensor 22b corresponds to the second sensor of the present invention.

[0186] The acquisition hand part 11a of this variant example includes: a guide member 34a provided at the base end of the base member 31 for the periphery of the substrate to abut; and a sensor 26a for detecting the substrate W abutting against the guide member 34a. The comparison unit 41 of this variant example determines the inclination state of the acquisition hand part 11a in the front-rear direction P based on the time difference between the timings at which the sensor 22a detects the substrate W and the sensor 26a detects the substrate W. In particular, the comparison unit 41 can determine whether the front end of the base member 31 has shifted downward relative to the base end. Moreover, the comparison unit 41 of this variant example determines the inclination state of the acquisition hand part 11a in the left-right direction Q based on the time difference between the timings at which the sensor 22a detects the substrate W and the sensor 26b detects the substrate. In particular, the comparison unit 41 determines whether the guide member 32a has shifted in the vertical direction relative to the guide member 32b. If configured in this way, it is possible to detect the inclination in two mutually orthogonal directions caused by the aging change of the acquisition hand part 11a, so the maintenance of the transfer block 3 becomes easier.

[0187] <Variant Example 4>

[0188] In Variation 3, although the first guide member is configured as guide member 32a, the second guide member is configured as guide member 32b, and the third guide member is configured as guide member 34a, the arrangements of the first guide member, the second guide member, and the third guide member can be freely changed. For example, in the configuration where the first guide member is guide member 32a and the third guide member is guide member 34a, even if the second guide member is set as guide member 34b, the same effect as in Variation 3 can be obtained. Additionally, in the configuration where the first guide member is guide member 32a and the second guide member is guide member 32b, even if the third guide member is set as guide member 34b, the same effect as in Variation 3 can be obtained. Further, in the configuration where the third guide member is guide member 34a, even if the first guide member is set as guide member 32b and the second guide member is set as guide member 34b, the same effect as in Variation 3 can be obtained.

[0189] <Variation 5>

[0190] As a variation in which more than three sensors are used for operation, the comparison unit 41 has the following configuration: between the first time t1, the second time t2, and the third time t3, based on the two most temporally separated times, the inclination state of the substrate W with respect to the pickup hand 11a is determined. The first time t1 is the time indicating the timing at which the first sensor (e.g., sensor 26a) detects the substrate W, the second time t2 is the time indicating the timing at which the second sensor (e.g., sensor 22a) detects the substrate W. Moreover, the third time t3 is the time indicating the timing at which the third sensor (e.g., sensor 26b) detects the substrate W.

[0191] Figure 16 Specifically, this variation will be described below. Figure 16 In (a) of which is a plan view of the embodiment Figure 13 of the state. Figure 16 In (a) of which shows the situation when the substrate W abuts against the guide member 34a. The sensor 26a detects the abutment of the substrate W. The time when the sensor 26a detects the substrate W is the first time t1. Figure 16 In (b) of which shows the situation after that, when the substrate W abuts against the guide member 34b. The sensor 26b detects the abutment of the substrate W. The time when the sensor 26b detects the substrate W is the second time t2. Figure 16 In (c) of which shows the situation after that, when the substrate W abuts against the guide member 32a. The sensor 22a detects the abutment of the substrate W. The time when the sensor 22a detects the substrate W is the third time t3.

[0192] Therefore, in the described case, there are three index values representing the differences in detection timings. The first index value is the index value representing the difference between the first time t1 and the second time t2, the second index value is the index value representing the difference between the second time t2 and the third time t3, and the third index value is the index value representing the difference between the first time t1 and the third time t3. The comparison unit 41 determines the tilting state of the substrate W with respect to the acquisition hand part 11a based on the time difference between the two most separated timings in terms of aging among the timings detected by each sensor for the substrate W. That is to say, the comparison unit 41 decides whether to send a signal related to notification to the notification unit 101 by comparing the third index value with a specified value. The reason is that the first time t1 and the third time t3 are the most separated among the timings. If configured in this way, the aging change of the acquisition hand part 11a can be detected more sensitively. Therefore, according to the described configuration, the object of the present invention can be more easily achieved.

[0193] <Variation Example 6>

[0194] Even when it is clear that the acquisition hand part 11a is not tilted, it is also possible to detect to what extent the carrier C of the loading port 10 is tilted with the acquisition hand part 11a as a reference. In such a case, the comparison unit 41 determines the tilting state of the carrier C with respect to the acquisition hand part 11a based on the time difference between the timings detected by each sensor for the substrate W. In particular, the comparison unit 41 can determine the tilting state of the carrier C with respect to the acquisition hand part 11a in the front - rear direction P based on the time difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate W.

[0195] <Variation Example 7>

[0196] In the configuration of the embodiment, the substrate W stored in the carrier C is used to determine the drooping condition of the acquisition hand part 11a, but the present invention is not limited to this configuration. As Figure 17 shown, a placement part 25 capable of placing a flat - shaped substrate W can be provided near the passage 24 in the processing block 5. The placement part 25 can place the substrate W in a horizontal posture, and the transfer robot IR can pick it up. In addition, the placement part 25 can be located in the transfer block 3.

[0197] <Variation Example 8>

[0198] In the above - mentioned embodiment, it is detected by the tactile sensor that the substrate W is placed on the guiding members 32a and 34a, but the present invention is not limited to this configuration. As Figure 18As shown, a configuration may be provided in which the distance measurement sensors 27a and 27b are provided on the first blade 33a. The distance measurement sensor 27a is provided at a position shifted from the guide member 32a to the base end side of the base member 31. The distance measurement sensor 27b is provided at a position shifted from the guide member 34b to the front end side of the base member 31. With such a configuration, the distance measurement sensors 27a and 27b are covered by the substrate W held by the acquisition hand part 11a, and the detection timing of the substrate W can be surely detected.

[0199] <Variant Example 9>

[0200] The present invention is not limited to the transfer block 3 and can be applied as a whole to a substrate transfer device of a robot that transfers a substrate W in a horizontal posture.

Claims

1. A substrate transport device, characterized in that having a hand capable of carrying a substrate in a horizontal position, and The hand has: Base components; a plurality of guide members disposed on the upper surface of the base member for the peripheral edge of the substrate to abut against; and A plurality of sensors are configured to respectively detect substrates abutting against the guide members; and the substrate transport device comprises: The determination unit determines the tilt state of the hand relative to the substrate based on the time difference between the timings at which the sensors detect the substrate.

2. The substrate transfer device according to claim 1, characterized in that have: The first guide member is provided at the front end portion of the base member; The second guide member is provided at the base end of the base member; The first sensor detects the substrate abutting against the first guide; and The second sensor detects the substrate abutting against the second guide; and When the direction connecting the base end portion of the base member and the front end portion of the base member is defined as the front-rear direction, The determination unit determines the tilt state of the hand in the front-back direction based on a time difference between a timing at which the first sensor detects a substrate and a timing at which the second sensor detects a substrate.

3. The substrate transfer device according to claim 1, characterized in that When a direction connecting the base end portion of the base member and the front end portion of the base member is defined as a front-rear direction and a direction perpendicular to the front-rear direction in a horizontal plane is defined as a left-right direction, the method comprises: The first guide member is provided at one end side in the left-right direction of the front end portion of the base member; The second guide member is provided at the other end side in the left-right direction of the front end portion of the base member; The first sensor detects the substrate abutting against the first guide; and The second sensor detects the substrate abutting against the second guide; and The determination unit determines the tilt state of the hand in the left-right direction based on a time difference between a timing at which the first sensor detects the substrate and a timing at which the second sensor detects the substrate.

4. The substrate transfer device according to claim 3, characterized in that The hand has: at least one of the third guide members is provided at a base end portion of the base member for abutting against a peripheral edge of the substrate; and a third sensor for detecting the substrate abutting against the third guide; and The determination unit The tilt state of the hand in the front-back direction is determined based on the time difference between the timing of the first sensor detecting the substrate and the timing of the third sensor detecting the substrate, The tilt state of the hand in the left-right direction is determined based on the time difference between the timing at which the first sensor detects the substrate and the timing at which the second sensor detects the substrate.

5. The substrate transfer device according to claim 1, characterized in that have: A notification unit is provided to notify that the index value indicating the time difference is greater than a predetermined value.

6. The substrate transfer device according to claim 1, characterized in that have: A lifting mechanism to lift the hand; and A lifting control unit controls the lifting mechanism; and The lifting control unit The hand located below the substrate in a stationary state is raised to make the substrate contact the plurality of guides.

7. The substrate transfer device according to claim 1, characterized in that The determination unit determines the tilt state of the hand with respect to the substrate based on a time difference between two timings that are most separated in terms of time between timings at which the sensors detect the substrate.

8. The substrate transfer device according to claim 1, characterized in that The sensors are tactile sensors and are respectively disposed between the base member and the guide members.

9. The substrate transfer device according to claim 1, characterized in that Each of the guides includes a support portion that contacts the lower portion of the substrate, and a wall portion that contacts the outer peripheral surface of the substrate.

10. The substrate transfer device according to claim 1, characterized in that The base member includes a plurality of recessed portions in which the sensors are embedded.

11. The substrate transfer device according to claim 1, characterized in that The sensors detect whether the substrate is in contact with the corresponding guides.

12. A substrate processing device, characterized in that have: The substrate transfer device according to claim 1; and The carrier loading rack can load the carriers that stack the horizontal substrates in a vertical direction and store them; and The substrate transfer device carries a substrate into and out of the carrier.

13. The substrate processing device according to claim 12, characterized in that The determination unit determines the tilt state of the carrier relative to the hand based on a time difference between timings at which the sensors detect the substrate.

14. The substrate processing device according to claim 12, characterized in that have: A single wafer processing section processes the substrates transferred by the substrate transfer device one by one.

15. A method for inspecting a substrate transporting device, the substrate transporting device having a hand, the hand comprising: a base member; a plurality of guides provided on the upper surface of the base member, for the peripheral edges of the substrates to abut against respectively; and a plurality of sensors, for respectively detecting the substrates abutting against the guides; and the inspection method is characterized by comprising: an acquisition process, wherein the hand acquires the substrate; and The determination process determines the tilt state of the hand relative to the substrate based on the time difference between the timings of the respective sensors detecting the substrate.

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