Resonator element and resonator device

Abstract

The resonator element and the resonator device have excellent G sensitivity characteristics and aging characteristics. The resonator element is composed of an SC cut quartz substrate having a surface perpendicular to the Y ''axis, and the following relationship is satisfied: 0.85 < = L1 / Lx < = 0.97, where Lx is the length from the outer edge of the excitation electrode side of the first portion of the slit to the other end of the SC cut quartz substrate in the first direction, and L1 is the length of the second portion in the first direction.

Description

Technical Field

[0001] The present invention relates to a vibrating piece and a vibrating device. Background Art

[0002] For example, Patent Document 1 discloses a vibrating piece having: an annular support arm portion; a vibrating portion extending from a part of the inner periphery of the support arm portion; a fixing portion disposed on the other part side of the support arm portion opposite to the part; and a connecting portion connecting the end portion of the vibrating portion to the support arm portion. Further, a vibrating piece is disclosed in which the gap between the vibrating portion and the support arm portion is L-shaped and a gap is disposed between the vibrating portion and the fixing portion. The following effect is described: With this structure, the thermal stress accompanying the ambient temperature change at the fixing portion is not easily transmitted to the vibrating portion, and the temperature hysteresis characteristic is improved.

[0003] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2012-134824

[0004] However, although the vibrating piece described in Patent Document 1 reduces the influence of the thermal stress from the fixing portion, there is a problem that no consideration is given to the G sensitivity characteristic. Summary of the Invention

[0005] The vibrating piece is composed of an SC-cut quartz substrate having a plane perpendicular to the Y'' axis of an orthogonal coordinate system (X', Y'', Z'), and the orthogonal coordinate system (X', Y'', Z') is obtained as follows: rotating a prescribed angle around the Z axis of an orthogonal coordinate system (X, Y, Z) and rotating a prescribed angle around the X' axis of a new orthogonal coordinate system (X', Y', Z) obtained by this rotation. The vibrating piece includes a first surface and a second surface in a positive and negative relationship. The vibrating piece includes: a support portion disposed on one end side in a first direction in a top view, and the first surface side is mounted on a container; an excitation portion arranged in the first direction along with the support portion in a top view and provided with an excitation electrode; and a slit. When, in a top view from the second surface side, one end in the first direction faces left and the other end in the first direction faces right, the slit includes: a first portion disposed between the support portion and the excitation electrode and extending along a second direction intersecting the first direction; and a second portion connected to the upper end of the first portion in the second direction, disposed on the outer edge side of the excitation electrode in the upper side of the second direction, and extending along the first direction. When the length from the outer edge on the excitation electrode side of the first portion of the slit to the other end of the SC-cut quartz substrate in the first direction is Lx and the length of the second portion in the first direction is L1, the following relationship is satisfied: 0.85 ≤ L1 / Lx ≤ 0.97.

[0006] The vibrating piece is composed of an SC-cut quartz substrate having a plane perpendicular to the Y" axis of the orthogonal coordinate system (X', Y", Z'), and the orthogonal coordinate system (X', Y", Z') is obtained as follows: rotating a predetermined angle around the Z axis of the orthogonal coordinate system (X, Y, Z) and then rotating a predetermined angle around the X' axis of the new orthogonal coordinate system (X', Y', Z) obtained by this rotation. The vibrating piece includes a first surface and a second surface in a positive and negative relationship, and the vibrating piece includes: a support portion provided on one end side in the first direction in a plan view, and the first surface side is mounted on a container; an excitation portion arranged in alignment with the support portion along the first direction in a plan view and provided with excitation electrodes; and a slit. When, in a plan view from the second surface side, one end in the first direction faces left and the other end in the first direction faces right, the slit includes: a first portion provided between the support portion and the excitation electrodes and extending along a second direction intersecting the first direction; and a third portion connected to the lower end of the first portion in the second direction, arranged on the outer edge side of the excitation electrodes in the lower side of the second direction, and extending along the first direction. When the length from the outer edge of the excitation electrode side of the first portion of the slit to the other end of the SC-cut quartz substrate in the first direction is Lx and the length of the third portion in the first direction is L2, the following relationship is satisfied: 0.38 ≤ L2 / Lx ≤ 0.82.

[0007] The vibration device has: the vibrating piece composed of the SC-cut quartz substrate described above; and a container, and the support portion of the vibrating piece is mounted on the container.

[0008] The vibrating piece is composed of an AT-cut quartz substrate having a plane perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating a prescribed angle around the X-axis of an orthogonal coordinate system (X, Y, Z). The vibrating piece includes a first surface and a second surface in a front-back relationship. The vibrating piece includes: a support portion disposed on one end side in a first direction in a plan view, and the first surface side is mounted on a container; an excitation portion arranged along the first direction with the support portion in a plan view and provided with an excitation electrode; and a slit. When, in a plan view from the second surface side, one end in the first direction faces left and the other end in the first direction faces right, the slit includes: a first portion provided between the support portion and the excitation electrode and extending along a second direction intersecting the first direction; and a second portion connected to an upper end portion of the first portion in the second direction, disposed on an outer edge side of the excitation electrode in the upper side in the second direction, and extending along the first direction. When the length from the outer edge on the excitation electrode side of the first portion of the slit to the other end in the first direction of the AT-cut quartz substrate is Lx and the length of the second portion in the first direction is L3, the following relationship is satisfied: 0.27 ≤ L3 / Lx ≤ 0.95.

[0009] The vibrating piece is composed of an AT-cut quartz substrate having a plane perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating a prescribed angle around the X-axis of an orthogonal coordinate system (X, Y, Z). The vibrating piece includes a first surface and a second surface in a front-back relationship. The vibrating piece includes: a support portion disposed on one end side in a first direction in a plan view, and the first surface side is mounted on a container; an excitation portion arranged along the first direction with the support portion in a plan view and provided with an excitation electrode; and a slit. When, in a plan view from the second surface side, one end in the first direction faces left and the other end in the first direction faces right, the slit includes: a first portion provided between the support portion and the excitation electrode and extending along a second direction intersecting the first direction; and a third portion connected to a lower end portion of the first portion in the second direction, disposed on an outer edge side of the excitation electrode in the lower side in the second direction, and extending along the first direction. When the length from the outer edge on the excitation electrode side of the first portion of the slit to the other end in the first direction of the AT-cut quartz substrate is Lx and the length of the third portion in the first direction is L4, the following relationship is satisfied: 0.27 ≤ L4 / Lx ≤ 0.95.

[0010] The vibrating piece is composed of an AT-cut quartz substrate having a plane perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating a prescribed angle about the X-axis of an orthogonal coordinate system (X, Y, Z). The vibrating piece includes a first surface and a second surface in a front-back relationship. The vibrating piece includes: a support portion provided at one end in a first direction along the X-axis, with the first surface side mounted on a container; an excitation portion arranged in the first direction with the support portion and having an excitation electrode disposed thereon; and a slit. When one end in the first direction is on the left and the other end in the first direction is on the right, when viewed from the second surface side, the slit includes: a first portion provided between the support portion and the excitation electrode and extending in a second direction intersecting the first direction; and a second portion connected to an upper end in the second direction of the first portion, disposed on an outer edge side in the upper side in the second direction of the excitation electrode, and extending in the first direction. When the length from the outer edge on the excitation electrode side of the first portion of the slit to the other end in the first direction of the AT-cut quartz substrate is Lx and the length in the first direction of the second portion is L5, the following relationship is satisfied: 0.0 < L5 / Lx ≤ 0.36.

[0011] The vibrating piece is composed of an AT-cut quartz substrate having a plane perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating a prescribed angle about the X-axis of an orthogonal coordinate system (X, Y, Z). The vibrating piece includes a first surface and a second surface in a front-back relationship. The vibrating piece includes: a support portion provided at one end in a first direction along the X-axis, with the first surface side mounted on a container; an excitation portion arranged in the first direction with the support portion and having an excitation electrode disposed thereon; and a slit. When one end in the first direction is on the left and the other end in the first direction is on the right, when viewed from the second surface side, the slit includes: a first portion provided between the support portion and the excitation electrode and extending in a second direction intersecting the first direction; and a third portion connected to a lower end in the second direction of the first portion, disposed on an outer edge side in the lower side in the second direction of the excitation electrode, and extending in the first direction. When the length from the outer edge on the excitation electrode side of the first portion of the slit to the other end in the first direction of the AT-cut quartz substrate is Lx and the length in the first direction of the third portion is L6, the following relationship is satisfied: 0.0 < L6 / Lx ≤ 0.34.

[0012] The vibrating device includes: a vibrating piece made of an AT-cut quartz substrate as described above; and a container, wherein the supporting portion of the vibrating piece is mounted on the container. Description of the Drawings

[0013] Figure 1 is a top view showing the schematic structure of the vibrating device according to the first embodiment.

[0014] Figure 2 is Figure 1 a cross-sectional view taken along line A1-A1 of

[0015] Figure 3 is a top view showing the schematic structure of the vibrating piece included in the vibrating device according to the first embodiment.

[0016] Figure 4 is a top view for explaining the in-plane rotation angle Ψ of the vibrating piece.

[0017] Figure 5 is a graph showing the frequency change amount with respect to the in-plane rotation angle Ψ of the vibrating piece.

[0018] Figure 6 is a graph showing the G sensitivity with respect to L1 / Lx of the vibrating piece.

[0019] Figure 7 is a top view showing the schematic structure of the vibrating device according to the second embodiment.

[0020] Figure 8 is a top view showing the schematic structure of the vibrating piece included in the vibrating device according to the second embodiment.

[0021] Figure 9 is a graph showing the G sensitivity with respect to L2 / Lx of the vibrating piece.

[0022] Figure 10 is a top view showing the schematic structure of the vibrating device according to the third embodiment.

[0023] Figure 11 is a graph showing the G sensitivity with respect to L2 / Lx of the vibrating piece.

[0024] Figure 12 is a top view showing the schematic structure of the vibrating device according to the fourth embodiment.

[0025] Figure 13 is a top view showing the schematic structure of the vibrating piece included in the vibrating device according to the fourth embodiment.

[0026] Figure 14 is a top view for explaining the in-plane rotation angle Ψ of the vibrating piece.

[0027] Figure 15It is a graph showing the frequency change amount with respect to the in-plane rotation angle Ψ of the vibrating piece.

[0028] Figure 16 It is a graph showing the G sensitivity of L3 / Lx with respect to the vibrating piece.

[0029] Figure 17 It is a top view showing the schematic structure of the vibration device of the fifth embodiment.

[0030] Figure 18 It is a graph showing the G sensitivity of L3 / Lx with respect to the vibrating piece.

[0031] Figure 19 It is a top view showing the schematic structure of the vibration device of the sixth embodiment.

[0032] Figure 20 It is a top view showing the schematic structure of the vibrating piece included in the vibration device of the sixth embodiment.

[0033] Figure 21 It is a graph showing the G sensitivity of L4 / Lx with respect to the vibrating piece.

[0034] Figure 22 It is a top view showing the schematic structure of the vibration device of the seventh embodiment.

[0035] Figure 23 It is a graph showing the G sensitivity of L4 / Lx with respect to the vibrating piece.

[0036] Figure 24 It is a top view showing the schematic structure of the vibration device of the eighth embodiment.

[0037] Figure 25 It is Figure 24 a cross-sectional view taken along line A2 - A2.

[0038] Figure 26 It is a top view showing the schematic structure of the vibrating piece included in the vibration device of the eighth embodiment.

[0039] Figure 27 It is a graph showing the G sensitivity of L5 / Lx with respect to the vibrating piece.

[0040] Figure 28 It is a top view showing the schematic structure of the vibration device of the ninth embodiment.

[0041] Figure 29 It is a top view showing the schematic structure of the vibrating piece included in the vibration device of the ninth embodiment.

[0042] Figure 30 It is a graph showing the G sensitivity of L6 / Lx with respect to the vibrating piece.

[0043] Figure 31 This is a top view showing the schematic structure of the vibration device of the tenth embodiment.

[0044] Figure 32 This is a graph showing the G sensitivity of L5 / Lx with respect to the vibration piece.

[0045] Figure 33 This is a top view showing the schematic structure of the vibration device of the eleventh embodiment.

[0046] Figure 34 This is a graph showing the G sensitivity of L6 / Lx with respect to the vibration piece.

[0047] Figure 35 This is a top view showing the schematic structure of the vibration device of the twelfth embodiment.

[0048] Figure 36 is Figure 35 a cross-sectional view taken along line A2 - A2 of

[0049] 1, 1a, 1b, 1c, 1d, 1e, 1f, 1g, 1h, 1i, 1j, 1k: vibration device; 3, 3a, 3b, 3c, 3d, 3e, 3f, 3g, 3h, 3i, 3j, 3k: vibration piece; 10: container; 11, 12: electrode pads; 13: third surface; 14: fourth surface; 15: external terminal; 20: cover; 21: recess; 22: storage space; 25: joining member; 30: quartz substrate; 31a: first surface; 31b: second surface; 32: excitation portion; 33: support portion; 34: gap; 35: first part; 36: second part; 37: third part; 38: excitation electrode; 39: lead electrode; 40: side electrode; 41: first connection electrode; 42: second connection electrode; 43, 44: conductive joining members; 45: bonding wire; L1, L2, L3, L4, Lx: lengths; Ψ: in-plane rotation angle. Detailed Embodiments

[0050] 1. First Embodiment

[0051] First, as an example, a vibrator in which the vibration piece 3 is housed in the container 10 and the cover 20 of the vibration device 1 of the first embodiment will be described with reference to Figures 1 to 6 In addition, in Figure 1 in order to facilitate the description of the internal structure of the vibration device 1, the state where the cover 20 is removed is shown.

[0052] In addition, for ease of explanation, in the following drawings of the vibration devices 1, 1a, 1b, 1c, 1d, 1e, 1f, 1g, 1h, 1i, 1j, 1k, the X-axis, Y-axis, and Z-axis are illustrated as three mutually perpendicular axes. Additionally, the direction along the X-axis is referred to as the "X direction", the direction along the Y-axis is referred to as the "Y direction", and the direction along the Z-axis is referred to as the "Z direction". Also, the end side of the arrow in each axis direction is referred to as the "positive side", and the base end side is referred to as the "negative side".

[0053] Moreover, for ease of explanation, in the following drawings of the vibration plates 3, 3a, three crystal axes X', Y", and Z' that are mutually perpendicular and correspond to the crystal axes of quartz are illustrated. Additionally, the direction along the X'-axis is referred to as the "X' direction", the direction along the Y"-axis is referred to as the "Y" direction", and the direction along the Z'-axis is referred to as the "Z' direction". Also, the end side of the arrow in each axis direction is referred to as the "positive side", and the base end side is referred to as the "negative side". In the present embodiment, the first direction is the X' direction, and the second direction is the Z' direction. Also, in the following drawings of the vibration devices 1, 1a, 1b, 1g, the X-axis coincides with the X' axis of the crystal axis, the Y-axis coincides with the Z' axis of the crystal axis, and the Z-axis coincides with the Y" axis of the crystal axis.

[0054] As Figure 1 and Figure 2 shown, the vibration device 1 includes a container 10, a lid 20, and a vibration plate 3.

[0055] The container 10 has a third surface 13 and a fourth surface 14 that are in a front-back relationship, and the third surface 13 faces the vibration plate 3. Two electrode pads 11, 12 for bonding the vibration plate 3 are arranged and configured along the Y direction on the third surface 13, and a plurality of external terminals 15 for power supply and frequency output are provided on the fourth surface 14. In addition, the electrode pads 11, 12 and the external terminals 15 are electrically connected through wirings and via electrodes (not shown). Additionally, as the constituent material of the container 10, silicon is preferred, and glass, ceramics, etc. may also be used.

[0056] The lid 20 is provided with a recess 21 that opens toward the container 10 side, and is joined to the third surface 13 of the container 10 via a joining member 25, and together with the container 10 forms a storage space 22 for storing the vibration plate 3. Also, the lid 20 and the container 10 may be directly joined without using the joining member 25. In addition, the inside of the storage space 22 is in a reduced-pressure state, and preferably a state closer to a vacuum. Thereby, the viscous resistance is reduced, and the oscillation characteristics of the vibration plate 3 are improved. Additionally, as the constituent material of the lid 20, silicon is preferred, and glass, ceramics, etc. may also be used.

[0057] As Figure 3 shown, the vibration plate 3 has a quartz substrate 30, an excitation electrode 38, a first connection electrode 41, and a second connection electrode 42.

[0058] The quartz substrate 30 is an SC-cut quartz substrate. The SC-cut quartz substrate has crystal axes X, Y, and Z that are perpendicular to each other. The X-axis is called the electrical axis, the Y-axis is called the mechanical axis, and the Z-axis is called the optical axis. It has a plane perpendicular to the Y'' axis of the orthogonal coordinate system (X', Y'', Z'), and the orthogonal coordinate system (X', Y'', Z') is obtained as follows: Rotate the orthogonal coordinate system (X, Y, Z) counterclockwise about the Z-axis by a specified angle, for example, about 22°, and then rotate counterclockwise about the X' axis of the new orthogonal coordinate system (X', Y', Z) obtained by this rotation by a specified angle, for example, about 34°.

[0059] When viewed from above, the quartz substrate 30 is rectangular. The X' direction is the long side direction, the Z' direction is the short side direction, and the Y'' direction is the thickness direction. The plane containing the X' axis and the Z' axis perpendicular to the Y'' axis is the main plane, and thickness-shear vibration is excited as the main vibration in the main plane.

[0060] The quartz substrate 30 has a first surface 31a and a second surface 31b that are in a positive and negative relationship, and has: a support portion 33 that is provided on one end side in the X' direction, which is the first direction, when viewed from above, and the first surface 31a side of the support portion 33 is mounted on the container 10; an excitation portion 32 that is arranged along the X' direction with the support portion 33 when viewed from above, and an excitation electrode 38 is arranged in the excitation portion 32; and a slit 34 that penetrates from the first surface 31a to the second surface 31b.

[0061] The first surface 31a of the quartz substrate 30 faces the third surface 13 of the container 10. An excitation electrode 38, a first connection electrode 41, and a second connection electrode 42 are provided on the first surface 31a of the quartz substrate 30. The excitation electrode 38 is arranged in the excitation portion 32, and the first connection electrode 41 and the second connection electrode 42 are arranged in the support portion 33. The first connection electrode 41 and the second connection electrode 42 are arranged along one side, that is, the short side, of the quartz substrate 30. The first connection electrode 41 faces the electrode pad 11 provided on the container 10, and the second connection electrode 42 faces the electrode pad 12 provided on the container 10. An excitation electrode 38 is provided on the second surface 31b of the quartz substrate 30.

[0062] The excitation electrode 38 provided on the first surface 31a is electrically connected to the first connection electrode 41 via a lead electrode 39. The excitation electrode 38 provided on the second surface 31b is electrically connected to the second connection electrode 42 provided on the first surface 31a via a lead electrode 39 and a side surface electrode 40 provided on the side surface of the quartz substrate 30 on the negative side of the X' direction. In addition, the excitation electrode 38 provided on the first surface 31a and the excitation electrode 38 provided on the second surface 31b are arranged to overlap when viewed from above.

[0063] When viewed from the second surface 31b side, when one end in the X' direction is oriented to the left, i.e., the negative side of the X' direction, and the other end in the X' direction is oriented to the right, i.e., the positive side of the X' direction, the slit 34 includes: a first part 35, which is provided between the support part 33 and the excitation electrode 38 and extends along the Z' direction, i.e., the second direction, which intersects the X' direction; and a second part 36, which is connected to the upper end, i.e., the positive side in the Z' direction, of the first part 35, is disposed on the outer edge side of the upper side, i.e., the positive side in the Z' direction, of the excitation electrode 38, and extends along the X' direction. Since the slit 34 is provided between the support part 33 and the excitation electrode 38, it is possible to suppress the transmission of stress due to deformation and temperature change generated when the diaphragm 3 is joined to the container 10 to the excitation part 32.

[0064] As Figure 1 and Figure 2 shown, the support part 33 of the diaphragm 3 and the container 10 are joined via the conductive joining members 43, 44. Specifically, the conductive joining member 43 joins the first connection electrode 41 disposed on the support part 33 and the electrode pad 11 and is electrically connected. The conductive joining member 44 joins the second connection electrode 42 disposed on the support part 33 and the electrode pad 12 and is electrically connected. In addition, as the constituent materials of the conductive joining members 43, 44, there are metal bumps, solder, conductive adhesives, etc.

[0065] Next, with reference to Figure 4 and Figure 5 the relationship with the frequency change amount with respect to the in-plane rotation angle Ψ of the diaphragm 3 will be described. In addition, in order to further clarify the relationship with the frequency change amount with respect to the in-plane rotation angle Ψ, Figure 5 the slit 34 is not provided in the diaphragm 3 used in the simulation of

[0066] As Figure 4 shown, the in-plane rotation angle Ψ of the diaphragm 3 means the angle formed by the imaginary line 50 passing through the center of the support part 33 and the center of the excitation electrode 38 and the X' axis when viewed from above.

[0067] Figure 5 is the result obtained by simulating the frequency change amount based on thermal stress with respect to the in-plane rotation angle Ψ of the diaphragm 3. In addition, the frequency change amount on the vertical axis is represented based on the maximum value of the absolute value of the frequency change amount. In addition, the frequency change amount is a value that is an index for predicting the aging characteristics. When the frequency change amount is positive, the aging characteristics become an ascending characteristic, and when the frequency change amount is negative, the aging characteristics become a descending characteristic. According to Figure 5 the in-plane rotation angle Ψ with a frequency change amount less than ±0.1 is -180° or more and -170° or less, or -20° or more and 5° or less, or 165° or more and 180° or less.

[0068] Next, the in-plane rotation angle Ψ with a frequency variation of the vibrating piece 3 less than ±0.1 is set to 0° or 180°, and reference is made to Figure 6 to explain the relationship with the G sensitivity of the length L1 of the second portion 36 with respect to the slit 34.

[0069] Figure 6 The figure shows the result of simulating the G sensitivity with respect to L1 / Lx when the length from the outer edge on the excitation electrode 38 side of the first portion 35 of the slit 34 to the other end in the X' direction of the quartz substrate 30 is set to Lx and the length of the second portion 36 is set to L1 as shown. In addition, the G sensitivity is Γ which is the square root of the sum of the squares of the G sensitivities in the X direction, Y direction, and Z direction. Figure 3

[0070] Figure 6 According to Figure 6 , the range of L1 / Lx for which Γ is less than 1 ppb / G, that is, the G sensitivities in the X direction, Y direction, and Z direction can be made less than ±1 ppb / G respectively, is 0.85 or more and 0.97 or less, which is the range satisfying the relationship of 0.85 ≤ L1 / Lx ≤ 0.97.

[0071] By setting the in-plane rotation angle Ψ of the vibrating piece 3 to 0° or 180° and satisfying the relationship of 0.85 ≤ L1 / Lx ≤ 0.97, the frequency variation can be made small, and the G sensitivities in the X direction, Y direction, and Z direction can be made less than ±1 ppb / G respectively.

[0072] As described above, the vibration device 1 of the present embodiment has a vibrating piece 3. The in-plane rotation angle Ψ of the vibrating piece 3 with a small frequency variation is 0° or 180°, and the ratio L1 / Lx of the length L1 of the second portion 36 of the slit 34 to the length Lx of the excitation portion 32 satisfies the relationship of 0.85 ≤ L1 / Lx ≤ 0.97. Therefore, the aging characteristics are excellent, and excellent G sensitivity characteristics with G sensitivities in the X direction, Y direction, and Z direction less than ±1 ppb / G respectively can be obtained.

[0073] 2. Second Embodiment

[0074] Next, reference is made to Figure 7 , Figure 8 and Figure 9 to explain the vibration device 1a of the second embodiment. In addition, in Figure 7 , in order to facilitate the explanation of the internal structure of the vibration device 1a, the state where the cover 20 is removed is shown.

[0075] The vibrating device 1a of this embodiment is the same as the vibrating device 1 of the first embodiment, except that the shape of the slit 34a in the vibrating piece 3a is different. In addition, the description will be centered on the differences from the above-mentioned first embodiment, and the same matters will be omitted from the description.

[0076] As Figure 7 shown, the vibrating device 1a includes a container 10, a lid 20, and a vibrating piece 3a.

[0077] As Figure 8 shown, the vibrating piece 3a has a quartz substrate 30a, an exciting electrode 38, a first connection electrode 41, and a second connection electrode 42. The quartz substrate 30a is an SC-cut quartz substrate.

[0078] The quartz substrate 30 includes: a support portion 33 having a first surface 31a and a second surface 31b in a positive and negative relationship, and the first surface 31a side is mounted on the container 10; an exciting portion 32 on which the exciting electrode 38 is disposed; and a slit 34a penetrating from the first surface 31a to the second surface 31b.

[0079] When viewed from the second surface 31b side, when one end in the X' direction is oriented to the left, i.e., the negative side of the X' direction, and the other end in the X' direction is oriented to the right, i.e., the positive side of the X' direction, the slit 34a includes: a first portion 35 provided between the support portion 33 and the exciting electrode 38 and extending along the Z' direction intersecting the X' direction; and a third portion 37 connected to the lower end of the first portion 35 in the Z' direction, i.e., the lower side, disposed on the outer edge side of the lower side of the exciting electrode 38 in the Z' direction, and extending along the X' direction.

[0080] Next, the in-plane rotation angle Ψ of the vibrating piece 3 with a frequency variation of less than ±0.1 is set to 0° or 180°, and with reference to Figure 9 the relationship between the G sensitivity and the length L2 of the third portion 37 of the slit 34a is described.

[0081] Figure 9 Shows the result of simulating the G sensitivity with respect to L2 / Lx when the length from the outer edge on the exciting electrode 38 side of the first portion 35 of the slit 34a to the other end in the X' direction of the quartz substrate 30 is set to Lx and the length of the third portion 37 is set to L2 as Figure 8 shown. In addition, the G sensitivity is Γ which is the square root of the sum of the squares of the G sensitivities in the X direction, Y direction, and Z direction.

[0082] According to Figure 9, the range of L2 / Lx for which Γ is less than 1 ppb / G, that is, the G sensitivities in the X, Y, and Z directions are less than ±1 ppb / G respectively, is 0.38 or more and 0.82 or less, which is a range satisfying the relationship 0.38 ≤ L2 / Lx ≤ 0.82.

[0083] By setting the in-plane rotation angle Ψ of the diaphragm 3 to 0° or 180° and satisfying the relationship 0.38 ≤ L2 / Lx ≤ 0.82, the frequency change amount can be made smaller, and the G sensitivities in the X, Y, and Z directions can be made less than ±1 ppb / G respectively.

[0084] As described above, since the vibration device 1a of the present embodiment includes the diaphragm 3a, the in-plane rotation angle Ψ of the diaphragm 3a with a small frequency change amount is 0° or 180°, and the ratio of the length L2 of the third part 37 of the slit 34 to the length Lx of the excitation part 32, that is, L2 / Lx, satisfies the relationship 0.38 ≤ L2 / Lx ≤ 0.82. Therefore, excellent aging characteristics and excellent G sensitivity characteristics with G sensitivities in the X, Y, and Z directions less than ±1.0 ppb / G respectively can be obtained.

[0085] 3. Third Embodiment

[0086] Next, with reference to Figure 10 and Figure 11 the vibration device 1b of the third embodiment will be described. In addition, in Figure 10 in order to facilitate the description of the internal structure of the vibration device 1b, the state where the cover 20 is removed is shown.

[0087] The vibration device 1b of the present embodiment is the same as the vibration device 1a of the second embodiment except that the range of L2 / Lx of the diaphragm 3b is different. In addition, the description will be centered on the differences from the above-described second embodiment, and the same matters will be omitted.

[0088] As Figure 10 shown, the vibration device 1b includes a container 10, a cover 20, and a diaphragm 3b.

[0089] In the present embodiment, the in-plane rotation angle Ψ of the diaphragm 3b with a frequency change amount less than ±0.1 is set to 0° or 180°, and the relationship with the G sensitivity with respect to the length L2 of the third part 37 of the slit 34a is the same as Figure 9 the same. Therefore, according to the same Figure 9 same Figure 11, when Γ is less than 0.9 ppb / G, that is, when the G sensitivities in the X direction, Y direction, and Z direction are less than ±0.9 ppb / G respectively, the range of L2 / Lx is 0.48 or more and 0.74 or less, which is a range that satisfies the relationship of 0.48 ≤ L2 / Lx ≤ 0.74.

[0090] As described above, since the vibration device 1b of the present embodiment includes the vibration piece 3b, the in-plane rotation angle Ψ with a small frequency variation amount of the vibration piece 3b is 0° or 180°, and the ratio of the length L2 of the third part 37 of the gap 34 to the length Lx of the excitation part 32, that is, L2 / Lx, satisfies the relationship of 0.48 ≤ L2 / Lx ≤ 0.74. Therefore, excellent aging characteristics and excellent G sensitivity characteristics with G sensitivities in the X direction, Y direction, and Z direction less than ±0.9 ppb / G respectively can be obtained.

[0091] 4. Fourth Embodiment

[0092] Next, refer to Figures 12 to 16 to describe the vibration device 1c of the fourth embodiment. In addition, in Figure 12 , in order to facilitate the description of the internal structure of the vibration device 1c, the state where the cover 20 is removed is shown.

[0093] In addition, for the sake of convenience of explanation, in the following figures of the vibration pieces 3c and 3e, as three mutually perpendicular crystal axes corresponding to the crystal axes of quartz, the X axis, Y' axis, and Z' axis are shown. In addition, the direction along the X axis is called the "X direction", the direction along the Y' axis is called the "Y' direction", and the direction along the Z' axis is called the "Z' direction". In addition, the end side of the arrow in each axis direction is also called the "positive side", and the base end side is called the "negative side". In this embodiment, the first direction is the X direction, and the second direction is the Z' direction. In addition, in the following figures of the vibration devices 1c, 1d, 1e, 1f, 1g, 1h, 1i, and 1j, the X axis coincides with the X axis of the crystal axis, the Y axis coincides with the Z' axis of the crystal axis, and the Z axis coincides with the Y' axis of the crystal axis.

[0094] The vibration device 1c of the present embodiment is the same as the vibration device 1 of the first embodiment except that the quartz substrate 30c of the vibration piece 3c is different. In addition, the description will be centered on the differences from the above-mentioned first embodiment, and the same matters will be omitted.

[0095] As Figure 12 shown, the vibration device 1c includes a container 10, a cover 20, and a vibration piece 3c.

[0096] As Figure 13 shown, the vibration piece 3c has a quartz substrate 30c, an excitation electrode 38, a first connection electrode 41, and a second connection electrode 42.

[0097] The quartz substrate 30c is an AT-cut quartz substrate. The AT-cut quartz substrate has crystal axes X, Y, and Z that are perpendicular to each other. The X-axis is called the electrical axis, the Y-axis is called the mechanical axis, and the Z-axis is called the optical axis. It has a plane perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating left by a specified angle, for example, about 35°15', around the X-axis of the orthogonal coordinate system (X, Y, Z).

[0098] The quartz substrate 30c is rectangular in plan view, with the X direction as the long side direction, the Z' direction as the short side direction, and the Y' direction as the thickness direction. The plane containing the X-axis and the Z'-axis perpendicular to the Y'-axis is the main plane, and thickness-shear vibration is excited as the main vibration on the main plane.

[0099] The quartz substrate 30c includes: a support portion 33 having a first surface 31a and a second surface 31b in a positive and negative relationship, and the first surface 31a side is mounted on the container 10; an excitation portion 32 in which excitation electrodes 38 are arranged; and a slit 34 that penetrates from the first surface 31a to the second surface 31b.

[0100] When viewed from the second surface 31b side, when one end in the X direction faces left, i.e., the negative X direction, and the other end in the X direction faces right, i.e., the positive X direction, the slit 34 includes: a first portion 35 provided between the support portion 33 and the excitation electrode 38 and extending along the Z' direction intersecting the X direction; and a second portion 36 connected to the upper end of the first portion 35 in the Z' direction, i.e., the upper side, arranged on the outer edge side of the excitation electrode 38 in the positive Z' direction, i.e., the upper side, and extending along the X direction.

[0101] Next, with reference to Figure 14 and Figure 15 the relationship with the frequency change amount with respect to the in-plane rotation angle Ψ of the vibrating piece 3c will be described. In addition, in order to further clarify the relationship with the frequency change amount with respect to the in-plane rotation angle Ψ, the vibrating piece 3c used in the simulation of Figure 15 does not have the slit 34 provided.

[0102] As Figure 14 shown, the in-plane rotation angle Ψ of the vibrating piece 3c refers to the angle formed by the imaginary line 50 passing through the center of the support portion 33 and the center of the excitation electrode 38 and the X-axis when viewed from above.

[0103] Figure 15 is the result obtained by simulating the frequency change amount caused by thermal stress with respect to the in-plane rotation angle Ψ of the vibrating piece 3c. In addition, the frequency change amount on the vertical axis is represented based on the maximum value of the absolute value of the frequency change amount. According to Figure 15The in-plane rotation angle Ψ with a frequency variation less than ±0.1 is -110° or more and -70° or less, or 55° or more and 65° or less, or 115° or more and 130° or less.

[0104] Next, in order to reduce both the G sensitivity and the frequency variation, the in-plane rotation angle Ψ with a frequency variation less than ±0.1 is set to -90°, and refer to Figure 16 to explain the relationship between the G sensitivity and the length L3 of the second part 36 with respect to the slit 34.

[0105] Figure 16 Shown is Figure 13 the result of simulating the G sensitivity with respect to L3 / Lx when the length from the outer edge on the excitation electrode 38 side of the first part 35 of the slit 34 to the other end in the first direction of the quartz substrate 30 is set to Lx and the length of the second part 36 is set to L3. In addition, the G sensitivity is Γ which is the square root of the sum of the squares of the G sensitivities in the X direction, Y direction, and Z direction.

[0106] According to Figure 16 , the range of L3 / Lx for which Γ is less than 1 ppb / G, that is, the G sensitivities in the X direction, Y direction, and Z direction can be made less than ±1 ppb / G respectively, is 0.27 or more and 0.95 or less, which is the range satisfying the relationship of 0.27 ≤ L3 / Lx ≤ 0.95.

[0107] By setting the in-plane rotation angle Ψ of the diaphragm 3c to -90° and satisfying the relationship of 0.27 ≤ L3 / Lx ≤ 0.95, the frequency variation can be made small, and the G sensitivities in the X direction, Y direction, and Z direction can be made less than ±1 ppb / G respectively.

[0108] As described above, since the vibration device 1c of the present embodiment includes the diaphragm 3c, the in-plane rotation angle Ψ of the diaphragm 3c with a small frequency variation is -90°, and the ratio of the length L3 of the second part 36 of the slit 34 to the length Lx of the excitation part 32, that is, L3 / Lx satisfies the relationship of 0.27 ≤ L3 / Lx ≤ 0.95. Therefore, excellent aging characteristics and excellent G sensitivity characteristics with G sensitivities in the X direction, Y direction, and Z direction less than ±1 ppb / G respectively can be obtained.

[0109] 5. Fifth Embodiment

[0110] Next, refer to Figure 17 and Figure 18 to explain the vibration device 1d of the fifth embodiment. In addition, in Figure 17 , in order to facilitate the explanation of the internal structure of the vibration device 1d, the state where the cover 20 is removed is illustrated.

[0111] The vibration device 1d of the present embodiment is the same as the vibration device 1c of the fourth embodiment, except that the range of L3 / Lx of the vibration piece 3d is different. In addition, the description will be centered on the differences from the above-mentioned fourth embodiment, and the same matters will be omitted from the description.

[0112] As Figure 17 shown, the vibration device 1d includes a container 10, a lid 20, and a vibration piece 3d.

[0113] In the vibration piece 3d of the present embodiment, the in-plane rotation angle Ψ with a frequency variation of less than ±0.1 is set to -90°, and the relationship with the G sensitivity of the length L3 of the second part 36 with respect to the slit 34 is the same as Figure 16 that. Therefore, according to the same Figure 16 as Figure 18 , the range of L3 / Lx where Γ is less than 0.9 ppb / G, that is, the G sensitivity in the X, Y, and Z directions can be less than ±0.9 ppb / G respectively, is 0.60 or more and 0.88 or less, which is a range that satisfies the relationship of 0.60 ≤ L3 / Lx ≤ 0.88.

[0114] As described above, since the vibration device 1d of the present embodiment includes the vibration piece 3d, the in-plane rotation angle Ψ of the vibration piece 3d with a small frequency variation is -90°, and the ratio of the length L3 of the second part 36 of the slit 34 to the length Lx of the excitation part 32, that is, L3 / Lx, satisfies the relationship of 0.60 ≤ L3 / Lx ≤ 0.88. Therefore, excellent aging characteristics and excellent G sensitivity characteristics with the G sensitivity in the X, Y, and Z directions less than ±0.9 ppb / G respectively can be obtained.

[0115] 6. Sixth Embodiment

[0116] Next, the vibration device 1e of the sixth embodiment will be described with reference to Figure 19 , Figure 20 and Figure 21 . In addition, in Figure 19 , in order to facilitate the description of the internal structure of the vibration device 1e, the state where the lid 20 is removed is shown in the figure.

[0117] The vibration device 1e of the present embodiment is the same as the vibration device 1c of the fourth embodiment, except that the shape of the slit 34a in the vibration piece 3e is different. In addition, the description will be centered on the differences from the above-mentioned fourth embodiment, and the same matters will be omitted from the description.

[0118] As Figure 19 shown, the vibration device 1e includes a container 10, a lid 20, and a vibration piece 3e.

[0119] As shown Figure 20 in FIG. Figure 20 , the vibrating piece 3e includes a quartz substrate 30e, an exciting electrode 38, a first connection electrode 41, and a second connection electrode 42. The quartz substrate 30e is an AT-cut quartz substrate.

[0120] The quartz substrate 30e includes: a supporting portion 33 having a first surface 31a and a second surface 31b in a positive and negative relationship, and the first surface 31a side is mounted on the container 10; an exciting portion 32 in which the exciting electrode 38 is disposed; and a slit 34a penetrating from the first surface 31a to the second surface 31b.

[0121] When viewed from the second surface 31b side, when one end in the X direction faces left, i.e., the negative X direction, and the other end in the X direction faces right, i.e., the positive X direction, the slit 34a includes: a first portion 35 provided between the supporting portion 33 and the exciting electrode 38 and extending along the Z' direction intersecting the X direction; and a third portion 37 connected to the lower end of the first portion 35 in the negative Z' direction, i.e., the lower side, disposed on the outer edge side of the lower side in the Z' direction of the exciting electrode 38, and extending along the X direction.

[0122] Next, the in-plane rotation angle Ψ of the vibrating piece 3 with a frequency variation of less than ±0.1 is set to -90°, and with reference to Figure 21 the relationship with the G sensitivity with respect to the length L4 of the third portion 37 of the slit 34a will be described.

[0123] Figure 21 FIG. Figure 20 shows the result of simulating the G sensitivity with respect to L4 / Lx when the length from the outer edge on the exciting electrode 38 side of the first portion 35 of the slit 34a to the other end in the X direction of the quartz substrate 30 is set to Lx and the length of the third portion 37 is set to L4. In addition, the G sensitivity is Γ which is the square root of the sum of the squares of the G sensitivities in the X direction, Y direction, and Z direction. Figure 20 According to

[0124] , the range of L4 / Lx for which Γ is less than 1 ppb / G, that is, the G sensitivities in the X direction, Y direction, and Z direction can be made less than ±1 ppb / G respectively, is 0.27 or more and 0.95 or less, and is a range satisfying the relationship of 0.27 ≤ L4 / Lx ≤ 0.95. Figure 21 By setting the in-plane rotation angle Ψ of the vibrating piece 3e to -90° and satisfying the relationship of 0.27 ≤ L4 / Lx ≤ 0.95, the frequency variation amount can be made small, and the G sensitivities in the X direction, Y direction, and Z direction can be made less than ±1 ppb / G respectively.

[0125]

[0126] ​As described above, since the vibration device 1e of the present embodiment includes the vibrating piece 3e, the in-plane rotation angle Ψ with a small frequency variation amount of the vibrating piece 3e is -90°, and the ratio of the length L4 of the third part 37 of the slit 34 to the length Lx of the excitation part 32, that is, L4 / Lx satisfies the relationship of 0.27 ≤ L4 / Lx ≤ 0.95. Therefore, excellent aging characteristics can be obtained, and excellent G-sensitivity characteristics with G-sensitivities in the X direction, Y direction, and Z direction being less than ±1.0 ppb / G respectively can be obtained.

[0127] 7. Seventh Embodiment

[0128] Next, with reference to Figure 22 and Figure 23 the vibration device 1f of the seventh embodiment will be described. In addition, in Figure 22 in order to facilitate the description of the internal structure of the vibration device 1f, the state where the cover 20 is removed is shown in the drawing.

[0129] The vibration device 1f of the present embodiment is the same as the vibration device 1e of the sixth embodiment, except that the range of L4 / Lx of the vibrating piece 3f is different. In addition, the description will be centered on the differences from the above-mentioned sixth embodiment, and the same matters will be omitted.

[0130] As Figure 22 shown, the vibration device 1f includes a container 10, a cover 20, and a vibrating piece 3f.

[0131] In the present embodiment, the vibrating piece 3f sets the in-plane rotation angle Ψ with a frequency variation amount less than ±0.1 to -90°, and the relationship between the G-sensitivity with respect to the length L4 of the third part 37 of the slit 34a is the same as Figure 21 the same. Therefore, according to the same Figure 21 as Figure 23 , the range of L4 / Lx for which Γ is less than 0.9 ppb / G, that is, the G-sensitivities in the X direction, Y direction, and Z direction can be made less than ±0.9 ppb / G respectively, is 0.61 or more and 0.88 or less, and is a range that satisfies the relationship of 0.61 ≤ L4 / Lx ≤ 0.88.

[0132] As described above, since the vibration device 1f of the present embodiment includes the vibrating piece 3f, the in-plane rotation angle Ψ with a small frequency variation amount of the vibrating piece 3f is -90°, and the ratio of the length L4 of the third part 37 of the slit 34 to the length Lx of the excitation part 32, that is, L4 / Lx satisfies the relationship of 0.61 ≤ L4 / Lx ≤ 0.88. Therefore, excellent aging characteristics can be obtained, and excellent G-sensitivity characteristics with G-sensitivities in the X direction, Y direction, and Z direction being less than ±0.9 ppb / G respectively can be obtained.

[0133] 8. Eighth Embodiment

[0134] Next, with reference to Figure 24 , Figure 25 and Figure 26 the vibration device 1g of the eighth embodiment will be described. In addition, in Figure 24 , in order to facilitate the description of the internal structure of the vibration device 1g, the state where the lid body 20 is removed is illustrated.

[0135] Compared with the vibration device 1c of the fourth embodiment, the vibration device 1g of the present embodiment is the same as the vibration device 1c of the fourth embodiment except that the in-plane rotation angle Ψ of the vibration piece 3g and the range satisfied by L5 / Lx are different. In addition, the description will be centered on the differences from the above-mentioned fourth embodiment, and the same matters will be omitted.

[0136] The vibration device 1g includes a container 10, a lid body 20, and a vibration piece 3g. As Figure 26 shown, the vibration piece 3g has a quartz substrate 30g, an excitation electrode 38, a first connection electrode 41, and a second connection electrode 42, and the quartz substrate 30g is an AT-cut quartz substrate.

[0137] The in-plane rotation angle Ψ of the quartz substrate 30g is 0° or 180°. In addition, as Figure 14 shown, the in-plane rotation angle Ψ of the quartz substrate refers to the angle formed by an imaginary line 50 passing through the center of the support portion 33 and the center of the excitation electrode 38 and the X-axis when viewed from above.

[0138] The quartz substrate 30g includes: a support portion 33 having a first surface 31a and a second surface 31b in a positive and negative relationship, and being disposed at one end in the X direction as the first direction when viewed from above, with the first surface 31a side being mounted on the container 10; an excitation portion 32 that is arranged along the X direction with the support portion 33 when viewed from above and is provided with the excitation electrode 38; and a slit 34 that penetrates from the first surface 31a to the second surface 31b.

[0139] The first surface 31a of the quartz substrate 30g faces the third surface 13 of the container 10. The excitation electrode 38, the first connection electrode 41, and the second connection electrode 42 are provided on the first surface 31a of the quartz substrate 30g. The excitation electrode 38 is disposed in the excitation portion 32, and the first connection electrode 41 and the second connection electrode 42 are disposed in the support portion 33. The first connection electrode 41 and the second connection electrode 42 are arranged and disposed along one side, i.e., the short side, of the quartz substrate 30g. The first connection electrode 41 faces the electrode pad 11 provided on the container 10, and the second connection electrode 42 faces the electrode pad 12 provided on the container 10. The excitation electrode 38 is provided on the second surface 31b of the quartz substrate 30g.

[0140] The excitation electrode 38 provided on the first surface 31a is electrically connected to the first connection electrode 41 via the lead electrode 39. The excitation electrode 38 provided on the second surface 31b is electrically connected to the second connection electrode 42 provided on the first surface 31a via the lead electrode 39 and the side electrode 40 provided on the side surface on the negative X-direction side of the quartz substrate 30g. In addition, the excitation electrode 38 provided on the first surface 31a and the excitation electrode 38 provided on the second surface 31b are arranged to overlap in a top view.

[0141] When configured such that one end in the X direction faces left, i.e., the negative X direction, and the other end in the X direction faces right, i.e., the positive X direction, when viewed from the second surface 31b side in a top view, the slit 34 includes: a first portion 35, which is provided between the support portion 33 and the excitation electrode 38 and extends along the Z' direction, i.e., the second direction, intersecting the X direction; and a second portion 36, which is connected to the upper end, i.e., the positive side in the Z' direction, of the first portion 35, is arranged on the outer edge side on the positive side, i.e., the upper side, in the Z' direction of the excitation electrode 38, and extends along the X direction. Since the slit 34 is provided between the support portion 33 and the excitation electrode 38, it is possible to suppress the transmission of stress due to deformation and temperature change generated by the bonding of the diaphragm 3g to the container 10 to the excitation portion 32.

[0142] As Figure 24 and Figure 25 shown, the support portion 33 of the diaphragm 3g and the container 10 are joined via the conductive joining members 43 and 44. Specifically, the conductive joining member 43 joins and electrically connects the first connection electrode 41 arranged on the support portion 33 and the electrode pad 11. The conductive joining member 44 joins and electrically connects the second connection electrode 42 arranged on the support portion 33 and the electrode pad 12. In addition, as the constituent materials of the conductive joining members 43 and 44, there are metal bumps, solder, conductive adhesives, etc.

[0143] Next, the in-plane rotation angle Ψ of the quartz substrate 30g is set to 0° or 180°, and with reference to Figure 27 the relationship between the G sensitivity and the length of the second portion 36 of the slit 34 is described.

[0144] Figure 27 shows the result of simulating the G sensitivity with respect to L5 / Lx when the length from the outer edge on the excitation electrode 38 side of the first portion 35 of the slit 34 to the other end in the X direction of the quartz substrate 30g is set to Lx and the length of the second portion 36 is set to L5 as Figure 26 shown. In addition, the G sensitivity is Γ, which is the square root of the sum of the squares of the G sensitivities in the X direction, Y direction, and Z direction.

[0145] According to Figure 27, the range of L5 / Lx where Γ is less than 0.6 ppb / G, that is, the G sensitivities in the X, Y, and Z directions can be made less than ±0.6 ppb / G respectively, is greater than 0.0 and 0.36 or less, and is a range that satisfies the relationship 0.0 < L5 / Lx ≤ 0.36.

[0146] By setting the in-plane rotation angle Ψ of the vibrating piece 3g to 0° or 180° and satisfying the relationship 0.0 < L5 / Lx ≤ 0.36, the G sensitivities in the X, Y, and Z directions can be made less than ±0.6 ppb / G respectively.

[0147] As described above, since the vibration device 1g of the present embodiment includes the vibrating piece 3g, the in-plane rotation angle Ψ of the vibrating piece 3g is 0° or 180°, and the ratio of the length L5 of the second part 36 of the slit 34 to the length Lx of the excitation part 32, that is, L5 / Lx, satisfies the relationship 0.0 < L5 / Lx ≤ 0.36. Therefore, the influence of the support stress can be reduced, and excellent G sensitivity characteristics with G sensitivities in the X, Y, and Z directions less than ±0.6 ppb / G respectively can be obtained.

[0148] 9. Ninth Embodiment

[0149] Next, with reference to Figure 28 , Figure 29 and Figure 30 the vibration device 1h of the ninth embodiment will be described. In addition, in Figure 28 , in order to facilitate the description of the internal structure of the vibration device 1h, the state where the cover 20 is removed is shown in the figure.

[0150] The vibration device 1h of the present embodiment is the same as the vibration device 1g of the eighth embodiment except that the shape of the slit 34a in the vibrating piece 3h is different. In addition, the description will be centered on the differences from the above-mentioned eighth embodiment, and the same matters will be omitted.

[0151] As Figure 28 shown, the vibration device 1h includes a container 10, a cover 20, and a vibrating piece 3h.

[0152] As Figure 29 shown, the vibrating piece 3h has a quartz substrate 30h, an excitation electrode 38, a first connection electrode 41, and a second connection electrode 42, and the quartz substrate 30h is an AT-cut quartz substrate.

[0153] The quartz substrate 30h includes: a support portion 33 having a first surface 31a and a second surface 31b in a positive and negative relationship, and the first surface 31a side is mounted on the container 10; an excitation portion 32 on which the excitation electrode 38 is disposed; and a slit 34a penetrating from the first surface 31a to the second surface 31b.

[0154] When configured in a manner such that one end in the X direction faces the left side, i.e., the negative side in the X direction, and the other end in the X direction faces the right side, i.e., the positive side in the X direction, when viewed from the second surface 31b side, the gap 34a includes: a first portion 35, which is arranged between the support portion 33 and the excitation electrode 38, and extends along the Z' direction intersecting the X direction; and a third portion 37, which is connected to the negative side, i.e., the lower side, of the first portion 35 in the Z' direction, is arranged on the outer edge side of the negative side, i.e., the lower side, in the Z' direction of the excitation electrode 38, and extends along the X direction.

[0155] Next, the in-plane rotation angle Ψ of the vibrating plate 3 is set to 0° or 180°, and the Figure 29 The relationship between the G sensitivity and the length L6 of the third portion 37 of the slit 34 a will be described.

[0156] Figure 30 It shows that Figure 29 As shown in FIG. 1 , the length from the outer edge of the first portion 35 of the slit 34a on the excitation electrode 38 side to the other end of the quartz substrate 30 in the X direction is Lx, and the length of the third portion 37 is L6, and the G sensitivity with respect to L6 / Lx is simulated. The G sensitivity is Γ, which is the square root of the sum of the squares of the G sensitivities in the X direction, the Y direction, and the Z direction.

[0157] according to Figure 30 , Γ is less than 0.6ppb / G, that is, the range of L6 / Lx that can make the G sensitivity in the X direction, Y direction, and Z direction less than ±0.6ppb / G is greater than 0.0 and less than 0.34, which is the range that satisfies the relationship of 0.0<L6 / Lx≤0.34.

[0158] By setting the in-plane rotation angle Ψ of the vibrating piece 3h to 0° or 180° and satisfying the relationship 0.0<L6 / Lx≤0.34, the G sensitivity in the X direction, the Y direction, and the Z direction can be made less than ±0.6 ppb / G.

[0159] As described above, the vibration device 1h of this embodiment has a vibration piece 3h, the in-plane rotation angle Ψ of the vibration piece 3h is 0° or 180°, and the ratio of the length L6 of the third part 37 of the gap 34a to the length Lx of the excitation part 32, i.e., L6 / Lx satisfies the relationship of 0.0<L6 / Lx≤0.34. Therefore, the influence of the supporting stress can be reduced, and excellent G sensitivity characteristics of less than ±0.6ppb / G in the X direction, Y direction, and Z direction can be obtained.

[0160] 10. Tenth Implementation Method

[0161] Next, refer toFigure 31 and Figure 32 The vibration device 1i of the tenth embodiment will be described. In addition, in Figure 31 , in order to facilitate the description of the internal structure of the vibration device 1i, the state in which the lid 20 is removed is illustrated.

[0162] The vibration device 1i of this embodiment is the same as the vibration device 1g of the eighth embodiment, except that the range of the desired G sensitivity characteristic of L5 / Lx of the vibration piece 3i is different. In addition, the description will be centered on the differences from the above-mentioned eighth embodiment, and the same matters will be omitted.

[0163] As Figure 31 shown, the vibration device 1i includes a container 10, a lid 20, and a vibration piece 3i.

[0164] The vibration piece 3i of this embodiment sets the in-plane rotation angle Ψ to 0° or 180°, and the relationship between the G sensitivity and the length L5 of the second part 36 with respect to the slit 34 is the same as Figure 27 . Therefore, according to the same Figure 27 , the range of L5 / Lx where Γ is less than 0.3 ppb / G, that is, the G sensitivity in the X, Y, and Z directions can be less than ±0.3 ppb / G respectively, is greater than 0.0 and 0.12 or less, and is a range that satisfies the relationship of 0.0 < L5 / Lx ≤ 0.12. Figure 32 As described above, the vibration device 1i of this embodiment has a vibration piece 3i, the in-plane rotation angle Ψ of which is 0° or 180°, and the ratio of the length L5 of the second part 36 of the slit 34 to the length Lx of the excitation part 32, that is, L5 / Lx, satisfies the relationship of 0.0 < L5 / Lx ≤ 0.12. Therefore, the influence of the support stress can be reduced, and excellent G sensitivity characteristics with G sensitivities in the X, Y, and Z directions less than ±0.3 ppb / G respectively can be obtained.

[0165] 11. Eleventh embodiment

[0166] Next, with reference to

[0167] and Figure 33 and Figure 34 the vibration device 1j of the eleventh embodiment will be described. In addition, in Figure 33 , in order to facilitate the description of the internal structure of the vibration device 1j, the state in which the lid 20 is removed is illustrated.

[0168] The resonator device 1j of this embodiment is the same as the resonator device 1h of the ninth embodiment except that the range of the desired G sensitivity characteristic of L6 / Lx of the resonator plate 3j is different from that of the resonator device 1h of the ninth embodiment. In addition, the description will be centered on the differences from the ninth embodiment described above, and the description of the same matters will be omitted.

[0169] like Figure 33 As shown, the vibration device 1j includes a container 10, a cover 20 and a vibration plate 3j.

[0170] The relationship between the G sensitivity of the vibrating piece 3j in this embodiment and the length L6 of the third portion 37 of the slit 34a is as follows: Figure 30 Therefore, according to Figure 30 Same Figure 34 , Γ is less than 0.3ppb / G, that is, the range of L6 / Lx that can make the G sensitivity in the X direction, Y direction, and Z direction less than ±0.3ppb / G is greater than 0.0 and less than 0.10, which is the range that satisfies the relationship of 0.0<L6 / Lx≤0.10.

[0171] As described above, the vibration device 1j of this embodiment has a vibration piece 3j, the in-plane rotation angle Ψ of the vibration piece 3j is 0° or 180°, and the ratio of the length L6 of the third part 37 of the gap 34a to the length Lx of the excitation part 32, i.e., L6 / Lx satisfies the relationship of 0.0<L6 / Lx≤0.10. Therefore, the influence of the supporting stress can be reduced, and excellent G sensitivity characteristics of less than ±0.3ppb / G in the X direction, Y direction, and Z direction are obtained.

[0172] 12. Twelfth Implementation

[0173] Next, refer to Figure 35 and Figure 36 A resonator device 1k according to a twelfth embodiment will be described. Figure 35 In order to facilitate the description of the internal structure of the vibration device 1k, the state in which the cover body 20 is removed is shown.

[0174] The vibration device 1k of this embodiment is the same as the vibration device 1 of the first embodiment except that the structure of the container 10k and the structure of the vibration plate 3k are different from the vibration device 1 of the first embodiment. The description will focus on the differences from the first embodiment, and the description of the same matters will be omitted.

[0175] like Figure 35 and Figure 36 As shown, the vibration device 1k includes a container 10k, a cover 20 and a vibration piece 3k.

[0176] The container 10k is arranged and configured with two electrode pads 11k and 12k along the X direction, which is the length direction, on the third side 13. A plurality of external terminals 15 for power supply and frequency output are provided on the fourth side 14.

[0177] The vibrating piece 3k has a quartz substrate 30, an exciting electrode 38, a first connection electrode 41k, and a second connection electrode 42k.

[0178] The quartz substrate 30 includes a support portion 33, an exciting portion 32, and a gap 34 provided between the support portion 33 and the exciting electrode 38. In addition, the length L1 of the second part 36 of the gap 34 satisfies the relationship of 0.85 ≤ L1 / Lx ≤ 0.97.

[0179] The quartz substrate 30 has a first surface 31a and a second surface 31b in a positive and negative relationship. The first connection electrode 41k is provided on the first surface 31a of the support portion 33, and the second connection electrode 42k is provided on the second surface 31b of the support portion 33. The first connection electrode 41k and the second connection electrode 42k have a portion that overlaps at the center in the short side direction of the quartz substrate 30 when viewed from above.

[0180] The exciting electrode 38 is provided on the exciting portion 32 of the quartz substrate 30. The exciting electrode 38 provided on the first surface 31a of the exciting portion 32 is electrically connected to the first connection electrode 41k via a lead electrode 39. The exciting electrode 38 provided on the second surface 31b of the exciting portion 32 is electrically connected to the second connection electrode 42k via a lead electrode 39.

[0181] The first connection electrode 41k is arranged at a position overlapping with the electrode pad 11k provided on the container 10k, and is joined and electrically connected to the electrode pad 11k via a conductive bonding member 43k. The second connection electrode 42k is electrically connected to the electrode pad 12k provided on the container 10k via a bonding wire 45.

[0182] In addition, in the vibrating piece 3k of the present embodiment, the SC-cut quartz substrate of the first embodiment, that is, the quartz substrate 30, is used, but it is not limited thereto. It may also be the SC-cut quartz substrate, that is, the quartz substrate 30a, used in the second embodiment and the third embodiment. In addition, it may be the AT-cut quartz substrate, that is, the quartz substrate 30c, used in the fourth embodiment and the fifth embodiment, or the AT-cut quartz substrate, that is, the quartz substrate 30e, used in the sixth embodiment and the seventh embodiment. Moreover, it may be the AT-cut quartz substrate, that is, the quartz substrate 30g, used in the eighth embodiment and the tenth embodiment, or the AT-cut quartz substrate, that is, the quartz substrate 30h, used in the ninth embodiment and the eleventh embodiment.

[0183] By adopting such a structure, it is possible to perform single-point support on the vibrating piece 3k, further reduce the influence of the support stress, and obtain the same effect as that of the first embodiment.

Claims

1. A vibrating plate, comprising an SC-cut quartz substrate, the SC-cut quartz substrate having a surface perpendicular to the Y" axis of an orthogonal coordinate system (X', Y", Z'), the orthogonal coordinate system (X', Y", Z') being obtained by rotating the orthogonal coordinate system (X, Y, Z) by a predetermined angle about the Z axis and rotating the orthogonal coordinate system (X', Y', Z) by a predetermined angle about the X' axis of the new orthogonal coordinate system (X', Y', Z) obtained by the rotation, The vibration plate comprises a first surface and a second surface in a front-rear relationship, The vibrating plate comprises: A support portion provided on one end side in a first direction when viewed from above, wherein the first surface side is mounted on the container; an excitation portion arranged along the first direction with the support portion in a plan view and provided with an excitation electrode; and gap, When viewed from the second surface side, the first end portion is arranged to face left and the other end portion is arranged to face right. The gap comprises: A first portion is provided between the support portion and the excitation electrode and extends along a second direction intersecting the first direction; and a second portion connected to the upper end of the first portion in the second direction, arranged on the upper outer edge of the excitation electrode in the second direction, and extending along the first direction; When the length from the outer edge of the first portion of the slit on the excitation electrode side to the other end of the SC-cut quartz substrate in the first direction is Lx and the length of the second portion in the first direction is L1, the following relationship is satisfied: 0.85≤L1 / Lx≤0.

97.

2. The vibrating piece according to claim 1, wherein: The slit passes through from the first surface to the second surface.

3. The vibrating piece according to claim 1, wherein: The support portion includes a first connection electrode and a second connection electrode disposed on the first surface of the vibrating piece. The first connection electrode and the second connection electrode are arranged along one side of the vibration piece.

4. The vibrating piece according to claim 1, wherein: The support portion comprises: A first connecting electrode, which is disposed on the first surface of the vibrating piece; and a second connecting electrode disposed on the second surface, The first connection electrode and the second connection electrode have overlapping portions in a plan view.

5. A vibrating plate, comprising an SC-cut quartz substrate, the SC-cut quartz substrate having a surface perpendicular to the Y" axis of an orthogonal coordinate system (X', Y", Z'), the orthogonal coordinate system (X', Y", Z') being obtained by rotating the orthogonal coordinate system (X, Y, Z) by a predetermined angle about the Z axis and rotating the orthogonal coordinate system (X', Y', Z) by a predetermined angle about the X' axis of the new orthogonal coordinate system (X', Y', Z) obtained by the rotation, The vibration plate comprises a first surface and a second surface in a front-rear relationship, The vibrating plate comprises: A support portion provided on one end side in a first direction when viewed from above, wherein the first surface side is mounted on the container; an excitation portion arranged along the first direction with the support portion in a plan view and provided with an excitation electrode; and gap, When viewed from the second surface side, the first end portion is arranged to face left and the other end portion is arranged to face right. The gap comprises: A first portion is provided between the support portion and the excitation electrode and extends along a second direction intersecting the first direction; and a third portion connected to the end portion of the first portion on the lower side in the second direction, arranged on the outer edge side of the excitation electrode on the lower side in the second direction, and extending along the first direction; When the length from the outer edge of the first portion of the slit on the excitation electrode side to the other end of the SC-cut quartz substrate in the first direction is Lx and the length of the third portion in the first direction is L2, the following relationship is satisfied: 0.38≤L2 / Lx≤0.

82.

6. The vibrating piece according to claim 5, wherein: The following relationship is satisfied: 0.48≤L2 / Lx≤0.

74.

7. The vibrating piece according to claim 5 or 6, wherein: The slit passes through from the first surface to the second surface.

8. The vibrating piece according to claim 5 or 6, wherein: The support portion includes a first connection electrode and a second connection electrode disposed on the first surface of the vibrating piece. The first connection electrode and the second connection electrode are arranged along one side of the vibration piece.

9. The vibrating piece according to claim 5 or 6, wherein: The support portion comprises: A first connecting electrode, which is disposed on the first surface of the vibrating piece; and a second connecting electrode disposed on the second surface, The first connection electrode and the second connection electrode have overlapping portions in a plan view.

10. A vibration device, comprising: A vibrating piece comprising an SC-cut quartz substrate as claimed in any one of claims 1 to 9; and A container is provided in which the support portion of the vibrating piece is mounted.

11. A vibrating piece, comprising an AT-cut quartz substrate having a surface perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating the orthogonal coordinate system (X, Y, Z) around the X-axis by a predetermined angle, The vibration plate comprises a first surface and a second surface in a front-rear relationship, The vibrating plate comprises: A support portion provided on one end side in a first direction when viewed from above, wherein the first surface side is mounted on the container; an excitation portion, which is arranged along the first direction with the support portion in a plan view and is provided with an excitation electrode; as well as gap, When viewed from the second surface side, the first end portion is arranged to face left and the other end portion is arranged to face right. The gap comprises: A first portion is provided between the support portion and the excitation electrode and extends along a second direction intersecting the first direction; and a second portion connected to the upper end of the first portion in the second direction, arranged on the upper outer edge of the excitation electrode in the second direction, and extending along the first direction; When the length from the outer edge of the first portion of the slit on the excitation electrode side to the other end of the AT-cut quartz substrate in the first direction is Lx and the length of the second portion in the first direction is L3, the following relationship is satisfied: 0.27≤L3 / Lx≤0.

95.

12. The vibrating piece according to claim 11, wherein: The following relationship is satisfied: 0.60≤L3 / Lx≤0.

88.

13. The vibrating piece according to claim 11 or 12, wherein: The slit passes through from the first surface to the second surface.

14. The vibrating piece according to claim 11 or 12, wherein: The support portion includes a first connection electrode and a second connection electrode disposed on the first surface of the vibrating piece. The first connection electrode and the second connection electrode are arranged along one side of the vibration piece.

15. The vibrating piece according to claim 11 or 12, wherein: The support portion comprises: A first connecting electrode, which is disposed on the first surface of the vibrating piece; and a second connecting electrode disposed on the second surface, The first connection electrode and the second connection electrode have overlapping portions in a plan view.

16. A vibrating piece, comprising an AT-cut quartz substrate, the AT-cut quartz substrate having a surface perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating the orthogonal coordinate system (X, Y, Z) around the X-axis by a predetermined angle, The vibration plate comprises a first surface and a second surface in a front-rear relationship, The vibrating plate comprises: A support portion provided on one end side in a first direction when viewed from above, wherein the first surface side is mounted on the container; an excitation portion arranged along the first direction with the support portion in a plan view and provided with an excitation electrode; and gap, When viewed from the second surface side, the first end portion is arranged to face left and the other end portion is arranged to face right. The gap comprises: A first portion is provided between the support portion and the excitation electrode and extends along a second direction intersecting the first direction; and a third portion connected to the end portion of the first portion on the lower side in the second direction, arranged on the outer edge side of the excitation electrode on the lower side in the second direction, and extending along the first direction; When the length from the outer edge of the first portion of the slit on the excitation electrode side to the other end of the AT-cut quartz substrate in the first direction is Lx and the length of the third portion in the first direction is L4, the following relationship is satisfied: 0.27≤L4 / Lx≤0.

95.

17. The vibrating piece according to claim 16, wherein: The following relationship is satisfied: 0.61≤L4 / Lx≤0.

88.

18. The vibrating piece according to claim 16 or 17, wherein: The slit passes through from the first surface to the second surface.

19. The vibrating piece according to claim 16 or 17, wherein: The support portion includes a first connection electrode and a second connection electrode disposed on the first surface of the vibrating piece. The first connection electrode and the second connection electrode are arranged along one side of the vibration piece.

20. The vibrating piece according to claim 16 or 17, wherein: The support portion comprises: A first connecting electrode, which is disposed on the first surface of the vibrating piece; and a second connecting electrode disposed on the second surface, The first connection electrode and the second connection electrode have overlapping portions in a plan view.

21. A vibrating piece, comprising an AT-cut quartz substrate, the AT-cut quartz substrate having a surface perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating the orthogonal coordinate system (X, Y, Z) around the X-axis by a predetermined angle, The vibration plate comprises a first surface and a second surface in a front-rear relationship, The vibrating plate comprises: A support portion provided at one end portion in a first direction along the X-axis, the first surface side of which is mounted on a container; an excitation portion, which is arranged along the first direction with the support portion and is provided with an excitation electrode; and gap, When the first end portion is arranged so that one end portion in the first direction is on the left side and the other end portion in the first direction is on the right side, when viewed from the second surface side, The gap comprises: A first portion is provided between the support portion and the excitation electrode and extends along a second direction intersecting the first direction; and a second portion connected to the upper end of the first portion in the second direction, arranged on the upper outer edge of the excitation electrode in the second direction, and extending along the first direction; When the length from the outer edge of the first portion of the slit on the excitation electrode side to the other end of the AT-cut quartz substrate in the first direction is Lx and the length of the second portion in the first direction is L5, the following relationship is satisfied: 0.0<L5 / Lx≤0.

36.

22. The vibrating piece according to claim 21, wherein: The following relationship is satisfied: 0.0<L5 / Lx≤0.

12.

23. The vibrating piece according to claim 21 or 22, wherein: The slit passes through from the first surface to the second surface.

24. The vibrating piece according to claim 21 or 22, wherein: The support portion includes a first connection electrode and a second connection electrode disposed on the first surface of the vibrating piece. The first connection electrode and the second connection electrode are arranged along one side of the vibration piece.

25. The vibrating piece according to claim 21 or 22, wherein: The support portion comprises: A first connecting electrode, which is disposed on the first surface of the vibrating piece; and a second connecting electrode disposed on the second surface, The first connection electrode and the second connection electrode have overlapping portions in a plan view.

26. A vibrating piece, comprising an AT-cut quartz substrate, the AT-cut quartz substrate having a surface perpendicular to the Y'-axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating the orthogonal coordinate system (X, Y, Z) around the X-axis by a predetermined angle, The vibration plate comprises a first surface and a second surface in a front-rear relationship, The vibrating plate comprises: A support portion provided at one end portion in a first direction along the X-axis, the first surface side of which is mounted on a container; an excitation portion, which is arranged along the first direction with the support portion and is provided with an excitation electrode; and gap, When the first end portion is arranged so that one end portion in the first direction is on the left side and the other end portion in the first direction is on the right side, when viewed from the second surface side, The gap comprises: A first portion is provided between the support portion and the excitation electrode and extends along a second direction intersecting the first direction; and a third portion connected to the end portion of the first portion on the lower side in the second direction, arranged on the outer edge side of the excitation electrode on the lower side in the second direction, and extending along the first direction; When the length from the outer edge of the first portion of the slit on the excitation electrode side to the other end of the AT-cut quartz substrate in the first direction is Lx and the length of the third portion in the first direction is L6, the following relationship is satisfied: 0.0<L6 / Lx≤0.

34.

27. The vibrating piece according to claim 26, wherein: The following relationship is satisfied: 0.0<L6 / Lx≤0.

10.

28. The vibrating piece according to claim 26 or 27, wherein: The slit passes through from the first surface to the second surface.

29. The vibrating piece according to claim 26 or 27, wherein: The support portion includes a first connection electrode and a second connection electrode disposed on the first surface of the vibrating piece. The first connection electrode and the second connection electrode are arranged along one side of the vibration piece.

30. The vibrating piece according to claim 26 or 27, wherein: The support portion comprises: A first connecting electrode, which is disposed on the first surface of the vibrating piece; and a second connecting electrode disposed on the second surface, The first connection electrode and the second connection electrode have overlapping portions in a plan view.

31. A vibration device, comprising: A vibrating piece comprising an AT-cut quartz substrate as claimed in any one of claims 11 to 30; and A container is provided in which the support portion of the vibrating piece is mounted.

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