Power distribution method and related device
By conducting and adjusting the impedance value of the power distribution branch in the RF power supply equipment, the problem of uneven power distribution under multiple loads is solved, and flexible power distribution and efficient RF power transmission are achieved.
Patent Information
- Application Number
- CN202510227549.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-27
- Publication Date
- 2025-05-30
AI Technical Summary
In the case of multiple loads, it is difficult for the prior art to achieve uneven power distribution in the prior art to effectively meet the different requirements of each load for the radio frequency power value.
By turning on the power distribution branch between the input and the target load, and determining the target impedance value according to the power requirements of each target load, the impedance value of each power distribution branch is adjusted to achieve uneven distribution and transmission of initial RF electrical energy.
It realizes convenient uneven power distribution, can meet different power requirements of multiple loads, and improves the flexibility and efficiency of RF power equipment.
Smart Images
Figure CN120074588A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of radio frequency technology, and in particular, to a power distribution method, a power distribution device, a radio frequency power supply device, and a computer-readable storage medium. Background Art
[0002] Currently, with the development of radio frequency power supply technology, radio frequency power supplies are mainly applied to semiconductor devices to provide radio frequency electrical energy for plasma loads. At the same time, the radio frequency electrical energy output by the radio frequency power supply can also be distributed through power distribution to provide radio frequency electrical energy for multiple loads. However, the power values of the radio frequency electrical energy required by each load may not be the same. Therefore, in the case of providing radio frequency electrical energy to multiple loads, how to meet the power value requirements of multiple loads has become an issue that needs to be considered. Summary of the Invention
[0003] This application provides a power distribution method, a power distribution device, a radio frequency power supply device, and a computer-readable storage medium, which can quickly achieve uneven power distribution to meet the power requirements of multiple loads.
[0004] In a first aspect, a power distribution method is provided. The power distribution method is used to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies, and correspondingly transmit the at least two target radio frequency electrical energies to at least two target loads among multiple loads. Among them, there are multiple power distribution branches connected between the input end and the multiple loads, and each power distribution branch is connected between the input end and the corresponding load. The input end can selectively connect to the at least two target loads through at least two target power distribution branches. Wherein, the power distribution method includes: turning on at least two target power distribution branches between the input end and at least two target loads, and turning off the non-target power distribution branches between the input end and each non-target load. Determining the target impedance value of each corresponding target power distribution branch at least according to the target power value required by each target load. Adjusting the impedance value of each target power distribution branch to the corresponding target impedance value, so as to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies through at least two target power distribution branches, and correspondingly transmit the at least two target radio frequency electrical energies to at least two target loads.
[0005] In a possible implementation manner, after adjusting the impedance value of each target power distribution branch to the corresponding target impedance value, so as to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies through at least two target power distribution branches, and correspondingly transmit the at least two target radio frequency electrical energies to at least two target loads, the power distribution method further includes: performing impedance matching on at least each target load and each target power distribution branch.
[0006] In a possible implementation manner, the input end is used to be connected to a radio frequency source to input the initial radio frequency electrical energy output by the radio frequency source. The impedance matching for at least each target load and each target power distribution branch includes: performing impedance matching on the radio frequency source, each target load, and each target power distribution branch according to the impedance value of the radio frequency source, the impedance value of each target load, the impedance value of each target power distribution branch, and a preset characteristic impedance value.
[0007] In a possible implementation manner, the determining of the target impedance value of each corresponding target power distribution branch according to at least the target power value required by each target load includes: determining the proportional relationship of the target power values of at least two target loads according to the target power value of each target load. Determining the proportional relationship of the target impedance values of at least two corresponding target power distribution branches according to at least the proportional relationship of the target power values of at least two target loads. Determining the target impedance value of each corresponding target power distribution branch according to at least the proportional relationship of the target impedance values of at least two corresponding target power distribution branches.
[0008] In a possible implementation manner, the determining of the proportional relationship of the target impedance values of at least two corresponding target power distribution branches according to at least the proportional relationship of the target power values of at least two target loads includes: determining the proportional relationship of the target impedance values of at least two corresponding target power distribution branches according to the proportional relationship of the target power values of at least two target loads and the preset characteristic impedance value.
[0009] In a possible implementation manner, the determining of the target impedance value of each corresponding target power distribution branch according to at least the proportional relationship of the target impedance values of at least two corresponding target power distribution branches includes: determining the target impedance value of each corresponding target power distribution branch according to the proportional relationship of the target impedance values of at least two corresponding target power distribution branches, the preset quality factor, and the angular frequency of the initial radio frequency electrical energy.
[0010] In a possible implementation manner, the target impedance value of each target power distribution branch is obtained from an inductance value and a target capacitance value, and the target capacitance value is adjustable. After determining the target impedance value of each corresponding target power distribution branch according to the proportional relationship of the target impedance values of at least two corresponding target power distribution branches, a preset quality factor, and the angular frequency of the initial radio frequency electrical energy, the power distribution method further includes: determining the target capacitance value of each corresponding target power distribution branch according to the target impedance value and the inductance value of each corresponding target power distribution branch. Adjusting the impedance value of each corresponding target power distribution branch to the target impedance value includes: adjusting the capacitance value of each corresponding target power distribution branch to the target capacitance value so that the impedance value of each corresponding target power distribution branch is the target impedance value.
[0011] In a second aspect, a power distribution device is further provided. The power distribution device uses the above power distribution method to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies, and correspondingly transmits the at least two target radio frequency electrical energies to at least two target loads among a plurality of loads. Wherein, the power distribution device includes: an input end for inputting the initial radio frequency electrical energy; a plurality of power distribution branches, each power distribution branch is connected between the input end and a corresponding load, and the input end can be selectively connected to the at least two target loads through at least two target power distribution branches; a control unit for conducting the at least two target power distribution branches between the input end and the at least two target loads, disconnecting the non-target power distribution branches between the input end and each non-target load, and at least determining the target impedance value of each corresponding target power distribution branch according to the target power value required by each target load, and adjusting the impedance value of each target power distribution branch to the corresponding target impedance value, so as to distribute the initial radio frequency electrical energy input at the input end into the at least two target radio frequency electrical energies through the at least two target power distribution branches, and correspondingly transmit the at least two target radio frequency electrical energies to the at least two target loads.
[0012] In a third aspect, a radio frequency power supply device is further provided. The radio frequency power supply device includes the above power distribution device.
[0013] In a fourth aspect, a computer-readable storage medium is further provided. A computer program is stored in the computer-readable storage medium, and when the computer program runs on a computer or a processor, the above power distribution method is implemented.
[0014] The power distribution method, power distribution device, radio frequency power supply device, and computer-readable storage medium of the present application turn on at least two target power distribution branches between the input end and at least two target loads, and determine the target impedance values of the corresponding target power distribution branches at least according to the target power values required by each target load. Then, the impedance values of each target power distribution branch are adjusted to the corresponding target impedance values, so as to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies through at least two target power distribution branches, and transmit the at least two target radio frequency electrical energies to the at least two target loads correspondingly, thereby conveniently realizing uneven power distribution and meeting the power requirements of multiple loads. Description of the Drawings
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings required to be used in the embodiments of the present application or the background art will be described below.
[0016] Figure 1 It is a flowchart of the power distribution method in an embodiment of the present application.
[0017] Figure 2 It is a flowchart showing another part of the steps of the power distribution method in another embodiment of the present application.
[0018] Figure 3 It is Figure 2 a sub-flowchart of step S400 in
[0019] Figure 4 It is Figure 1 a sub-flowchart of step S200 in
[0020] Figure 5 It is Figure 4 a sub-flowchart of steps S220 and S230 in
[0021] Figure 6 It is a flowchart showing another part of the steps of the power distribution method in still another embodiment of the present application.
[0022] Figure 7 It is a schematic diagram of the power distribution device in an embodiment of the present application.
[0023] Figure 8 It is a schematic diagram of the radio frequency power supply device in an embodiment of the present application.
[0024] Description of reference numerals: 1. Radio frequency power supply device; 10. Power distribution device; 100. Input end; RF1. Initial radio frequency electrical energy; 200. Power distribution branch; 210. Target power distribution branch; 220. Non-target power distribution branch; RF2. Target radio frequency electrical energy; 300. Control unit; RL. Load; RL1. Target load; RL2. Non-target load. Detailed implementation manners
[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.
[0026] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly defined and limited, the terms "connected" and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present application according to specific situations.
[0027] In the description of the embodiments of the present application, it should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above accompanying drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that such features may be interchanged under appropriate circumstances so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.
[0028] In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or server that includes a series of steps or units does not necessarily have to be limited to those clearly listed steps or units, but may include other steps or units not clearly listed or inherent to these processes, methods, products, or devices.
[0029] Please refer to Figure 1 , Figure 1The flowchart of a power distribution method in an embodiment of the present application. The present application provides a power distribution method, which is used to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies, and transmit the at least two target radio frequency electrical energies to at least two target loads among multiple loads. Among them, there are multiple power distribution branches connected between the input end and the multiple loads, and each power distribution branch is connected between the input end and the corresponding load. The input end can selectively connect to at least two target loads through at least two target power distribution branches. Among them, as Figure 1 shown, the power distribution method includes:
[0030] Step S100: Turn on at least two target power distribution branches between the input end and at least two target loads, and turn off the non-target power distribution branches between the input end and each non-target load.
[0031] Step S200: Determine the target impedance values of the corresponding target power distribution branches at least according to the target power values required by each target load.
[0032] Step S300: Adjust the impedance values of each target power distribution branch to the corresponding target impedance values, so as to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies through at least two target power distribution branches, and transmit the at least two target radio frequency electrical energies to at least two target loads correspondingly.
[0033] Thus, in the above power distribution method of the present application, by turning on at least two target power distribution branches between the input end and at least two target loads, and determining the target impedance values of the corresponding target power distribution branches at least according to the target power values required by each target load, and then adjusting the impedance values of each target power distribution branch to the corresponding target impedance values, so as to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies through at least two target power distribution branches, and transmit the at least two target radio frequency electrical energies to at least two target loads correspondingly, thus conveniently realizing uneven power distribution and being able to meet the power requirements of multiple loads.
[0034] Among them, the target impedance values of each target power distribution branch can be the same or different.
[0035] Please refer to Figure 2 , Figure 2 which is the flowchart showing another part of the steps of the power distribution method in another embodiment of the present application. Among them, Figure 2 Some of the steps in the shown flowchart can be, for example, as Figure 1Step S300 shown: The steps included after adjusting the impedance value of each target power distribution branch to the corresponding target impedance value, so as to distribute the initial radio frequency electrical energy input at the input end into at least two target radio frequency electrical energies through at least two target power distribution branches, and transmitting the at least two target radio frequency electrical energies to at least two target loads correspondingly. That is, as Figure 2 shown, after step S300, the power distribution method further includes:
[0036] Step S400: Perform impedance matching on at least each target load and each target power distribution branch.
[0037] Thus, in the above power distribution method of the present application, not only impedance matching can be performed on each load, but also impedance matching needs to be performed on each target power distribution branch at the same time to avoid large reflected power generated by multiple target power distribution branches.
[0038] Among them, Figure 2 Steps S100 to S300 in can be specifically referred to the relevant introduction in the foregoing Figure 1 and will not be elaborated here.
[0039] Please refer to Figure 3 , Figure 3 which is Figure 2 a sub-flowchart of step S400 in. The input end is used to connect to a radio frequency source to input the initial radio frequency electrical energy output by the radio frequency source. Among them, as Figure 2 , Figure 3 shown, step S400: Perform impedance matching on at least each target load and each target power distribution branch, which may specifically include:
[0040] Step S410: Perform impedance matching on the radio frequency source, each target load, and each target power distribution branch according to the impedance value of the radio frequency source, the impedance value of each target load, the impedance value of each target power distribution branch, and a preset characteristic impedance value.
[0041] Thus, in the above power distribution method of the present application, impedance matching is performed on the radio frequency source, each target load, and each target power distribution branch according to the preset characteristic impedance value to achieve a radio frequency output with less reflected power.
[0042] Among them, the preset characteristic impedance value can be 50Ω, 75Ω, etc., that is, the impedance values presented by the radio frequency source, multiple target loads, and multiple target power distribution branches after impedance matching.
[0043] Among them, Figure 3 Steps S100 to S300 in can be specifically referred to the relevant introduction in the foregoing Figure 1 and will not be elaborated here.
[0044] Please refer to Figure 4 as well, Figure 4 which is Figure 1 a sub - flowchart of step S200 in Figure 1 . As Figure 4 shown in
[0045] Step S200: Determine the target impedance values of the corresponding target power distribution branches according to at least the target power values required for each target load. Specifically, it may include:
[0046] Step S210: Determine the proportional relationship of the target power values of at least two target loads according to the target power values of each target load.
[0047] Step S220: Determine the proportional relationship of the target impedance values of the corresponding at least two target power distribution branches according to at least the proportional relationship of the target power values of at least two target loads.
[0048] Thus, in the above - mentioned power distribution method of the present application, according to the target power values of each target load in sequence, the proportional relationship of the target power values of at least two target loads can be determined, and further, the proportional relationship of the target impedance values of the corresponding at least two target power distribution branches can be determined, thereby obtaining the target impedance values of the corresponding target power distribution branches.
[0049] For example, if the proportional relationship of the target power values of three target loads is 6:4:3, then the proportional relationship of the target impedance values of the three target power distribution branches can be 100:150:200. Among them, the product of the target power value of any one target load and the target impedance value of the corresponding target power distribution branch is equal to a fixed product value. For example, the product of the target power value of the second target load and the target impedance value of the second target power distribution branch is 600, then the fixed product value is 600.
[0050] Among them, according to the target power values of each target load in step S210, that is, according to the target power values required for each target load.
[0051] Please refer to Figure 5 as well, Figure 5 which is Figure 4 a sub - flowchart of step S220 and step S230 in Figure 4 . As Figure 5 shown in
[0052] Step S221: Determine the proportional relationship of the target impedance values of at least two target power distribution branches corresponding thereto according to the proportional relationship of the target power values of at least two target loads and a preset characteristic impedance value.
[0053] Thus, in the power distribution method of the present application, when the preset characteristic impedance value is 50 Ω, the ratio of the reciprocals of each target power value in the proportional relationship of the target power values of at least two target loads is the proportional relationship of the target impedance values of at least two target power distribution branches corresponding thereto.
[0054] As Figure 4 、 Figure 5 shown, Step S230: Determine the target impedance value of each corresponding target power distribution branch according to at least the proportional relationship of the target impedance values of at least two corresponding target power distribution branches, which may specifically include:
[0055] Step S231: Determine the target impedance value of each corresponding target power distribution branch according to the proportional relationship of the target impedance values of at least two corresponding target power distribution branches, a preset quality factor, and the angular frequency of the initial radio frequency electric energy.
[0056] Thus, in the power distribution method of the present application, by means of the preset quality factor and the angular frequency of the initial radio frequency electric energy, the proportional relationship of the target impedance values of at least two corresponding target power distribution branches can be converted into the target impedance value of each corresponding target power distribution branch.
[0057] Wherein, the preset quality factor may be 1. According to the preset quality factor and the angular frequency of the initial radio frequency electric energy, the sum of the target impedance values of at least two corresponding target power distribution branches can be determined, and then the target impedance value of each corresponding target power distribution branch can be determined according to the proportional relationship of the target impedance values of at least two corresponding target power distribution branches.
[0058] Wherein, Figure 5 The steps in Figure 4 may be specifically referred to the relevant introduction in the foregoing
[0059] and will not be elaborated herein. Figure 6 , Figure 6 Please also refer to Figure 6 which shows a flowchart of another part of the steps of the power distribution method in another embodiment of the present application. The target impedance value of each target power distribution branch is obtained from an inductance value and a target capacitance value, and the target capacitance value is adjustable. Wherein, Figure 5The steps S231 shown: After determining the target impedance values of each corresponding target power distribution branch according to the proportional relationship of the target impedance values of at least two corresponding target power distribution branches, the preset quality factor, and the angular frequency of the initial radio frequency electrical energy, the included steps. That is, as Figure 6 shown, after step S231, the power distribution method further includes:
[0060] Step S240: Determine the target capacitance value of each corresponding target power distribution branch according to the target impedance value and the inductance value of each corresponding target power distribution branch.
[0061] Furthermore, as Figure 1 、 Figure 6 shown, adjusting the impedance value of each corresponding target power distribution branch in step S300 to the target impedance value may specifically include:
[0062] Step S310: Adjust the capacitance value of each corresponding target power distribution branch to the target capacitance value so that the impedance value of each corresponding target power distribution branch is the target impedance value.
[0063] Thus, in the above power distribution method of the present application, the target impedance value is obtained from the inductance value and the target capacitance value, and further, the target capacitance value of each corresponding target power distribution branch can be determined according to the target impedance value and the inductance value of each corresponding target power distribution branch to achieve the target impedance value.
[0064] The power distribution method of the present application realizes uneven power distribution conveniently through the above steps and can meet the power requirements of multiple loads.
[0065] Please refer to Figure 7 , Figure 7 which is a schematic diagram of a power distribution device in an embodiment of the present application. As Figure 7As shown in the figure, the present application also provides a power distribution device 10. The power distribution device 10 uses the above power distribution method to distribute the initial radio frequency electrical energy RF1 input from the input end 100 into at least two target radio frequency electrical energies RF2, and correspondingly transmits the at least two target radio frequency electrical energies RF2 to at least two target loads RL1 among the multiple loads RL. Among them, the power distribution device 10 includes: an input end 100 for inputting the initial radio frequency electrical energy RF1. A plurality of power distribution branches 200, each power distribution branch 200 is connected between the input end 100 and the corresponding load RL, and the input end 100 can selectively connect to at least two target loads RL1 through at least two target power distribution branches 210. A control unit 300 for conducting at least two target power distribution branches between the input end 100 and at least two target loads RL1, disconnecting the non-target power distribution branches between the input end 100 and each non-target load RL2, and determining the target impedance value of each corresponding target power distribution branch at least according to the target power value required by each target load RL1, and adjusting the impedance value of each target power distribution branch to the corresponding target impedance value, so as to distribute the initial radio frequency electrical energy RF1 input from the input end 100 into at least two target radio frequency electrical energies RF2 through at least two target power distribution branches, and correspondingly transmit the at least two target radio frequency electrical energies RF2 to at least two target loads RL1.
[0066] Please refer to again Figure 1 。As Figure 1 shown, the power distribution method includes:
[0067] Step S100: Conduct at least two target power distribution branches between the input end and at least two target loads, and disconnect the non-target power distribution branches between the input end and each non-target load.
[0068] Step S200: Determine the target impedance value of each corresponding target power distribution branch at least according to the target power value required by each target load.
[0069] Step S300: Adjust the impedance value of each target power distribution branch to the corresponding target impedance value, so as to distribute the initial radio frequency electrical energy input from the input end into at least two target radio frequency electrical energies through at least two target power distribution branches, and correspondingly transmit the at least two target radio frequency electrical energies to at least two target loads.
[0070] Among them, for the more specific steps of the power distribution method, reference can be made to the relevant content of the power distribution method in any of the foregoing embodiments, which will not be elaborated here.
[0071] In some embodiments, each power distribution branch 200 may include an inductor and a capacitor, such that the impedance value of each power distribution branch 200 is obtained from the inductor value and the capacitor value.
[0072] In some embodiments, the power distribution device 10 may further include an impedance matching unit. The impedance matching unit is connected between the input end 100 and the plurality of power distribution branches 200. The impedance matching unit is configured to perform impedance matching for at least each target load RL1 and each target power distribution branch 210.
[0073] Wherein, the control unit 300 is further connected to the impedance matching unit. The control unit 300 is further configured to control the impedance matching unit to perform impedance matching for the radio frequency source, each target load RL1, and each target power distribution branch 210 according to the impedance value of the radio frequency source, the impedance value of each target load RL1, the impedance value of each target power distribution branch 210, and a preset characteristic impedance value.
[0074] In one or more embodiments, the control unit 300 may be a general-purpose processor such as a Central Processing Unit (CPU), or may be a logic control device such as a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, etc. The control unit 300 may further include an adjustment device such as a rotating motor to perform adjustment steps.
[0075] Wherein, the steps of the power distribution method and the functional operations performed by the power distribution device 10 correspond to each other, and the relevant content can be referred to each other.
[0076] The power distribution method and the power distribution device 10 of the present application conveniently achieve uneven power distribution through the above steps and structures, and can meet the power requirements of multiple loads RL.
[0077] Please refer to Figure 8 , Figure 8 which is a schematic diagram of a radio frequency power supply device in an embodiment of the present application. As Figure 8 shown, the present application further provides a radio frequency power supply device 1. The radio frequency power supply device 1 includes the above-mentioned power distribution device 10.
[0078] Please refer to againFigure 7 As shown in Figure 7 Figure 1, the power distribution device 10 distributes the initial radio frequency electrical energy RF1 input from the input terminal 100 into at least two target radio frequency electrical energies RF2 by using the above power distribution method, and correspondingly transmits the at least two target radio frequency electrical energies RF2 to at least two target loads RL1 among the multiple loads RL. Among them, the power distribution device 10 includes: an input terminal 100 for inputting the initial radio frequency electrical energy RF1; a plurality of power distribution branches 200, each power distribution branch 200 is connected between the input terminal 100 and the corresponding load RL, and the input terminal 100 can selectively connect to at least two target loads RL1 through at least two target power distribution branches 210; a control unit 300 for turning on at least two target power distribution branches 210 between the input terminal 100 and at least two target loads RL1, turning off the non-target power distribution branches 220 between the input terminal 100 and each non-target load RL2, and determining the target impedance values of the corresponding target power distribution branches 210 according to at least the target power values required by each target load RL1, and adjusting the impedance values of each target power distribution branch 210 to the corresponding target impedance values, so as to distribute the initial radio frequency electrical energy RF1 input from the input terminal 100 into at least two target radio frequency electrical energies RF2 through at least two target power distribution branches 210, and correspondingly transmit the at least two target radio frequency electrical energies RF2 to at least two target loads RL1.
[0079] Among them, for the more specific structure of the power distribution device 10, reference can be made to the relevant content of the power distribution device 10 in any of the foregoing embodiments, which will not be elaborated here.
[0080] In some embodiments, the radio frequency power supply device 1 may further include a radio frequency source, which is connected to the power distribution device 10 and is used to output the initial radio frequency electrical energy RF1.
[0081] The power distribution method, the power distribution device 10 and the radio frequency power supply device 1 of the present application conveniently achieve uneven power distribution through the above steps and structures, and can meet the power requirements of multiple loads RL.
[0082] The present application also provides a computer-readable storage medium, in which a computer program is stored. When the computer program runs on a computer or a processor, the power distribution method of any of the foregoing embodiments is implemented.
[0083] In the various embodiments provided in the present application, it should be understood that the disclosed methods, devices, and equipment can be implemented in other ways. For example, the device embodiments described above are merely illustrative; for example, the division of units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed couplings or direct couplings or communication connections between each other can be through some interfaces, and the indirect couplings or communication connections of devices or units can be in electrical, mechanical, or other forms.
[0084] The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.
[0085] In addition, in each embodiment of the present invention, the functional units can be integrated into a processing unit, or each unit can be physically included separately, or two or more units can be integrated into one unit. The above-mentioned integrated units can be implemented in the form of hardware or in the form of a combination of hardware and software functional units.
[0086] The above-mentioned integrated units implemented in the form of software functional units can be stored in a computer-readable storage medium. The above-mentioned software functional units are stored in a storage medium and include several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to execute some steps of the methods in the various embodiments of the present invention. The foregoing storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (ROM), random access memories (RAM), magnetic disks, or optical discs that can store program codes.
[0087] The above description is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed in the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application; without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.
Claims
1. A power distribution method, characterized in that: The power distribution method is used to distribute the initial radio frequency electric energy inputted from the input end into at least two target radio frequency electric energies, and transmit the at least two target radio frequency electric energies to at least two target loads among a plurality of loads, wherein a plurality of power distribution branches are connected between the input end and the plurality of loads, each power distribution branch is connected between the input end and the corresponding load, and the input end can be selectively connected to the at least two target loads through at least two target power distribution branches; Wherein, the power allocation method comprises: Turning on at least two target power distribution branches between the input terminal and at least two target loads, and disconnecting non-target power distribution branches between the input terminal and each non-target load; Determine a target impedance value of each corresponding target power distribution branch at least according to a target power value required by each target load; The impedance value of each target power distribution branch is adjusted to a corresponding target impedance value, so that the initial RF power inputted into the input end is distributed into at least two target RF power energies through at least two target power distribution branches, and the at least two target RF power energies are transmitted to at least two target loads accordingly.
2. The power distribution method according to claim 1, characterized in that: After adjusting the impedance value of each target power distribution branch to a corresponding target impedance value, so as to distribute the initial RF power inputted from the input end into at least two target RF power energies through at least two target power distribution branches, and transmitting the at least two target RF power energies to at least two target loads respectively, the power distribution method further comprises: Impedance matching is performed at least on each target load and each target power distribution branch.
3. The power distribution method according to claim 2, characterized in that: The input end is used to be connected to a radio frequency source to input the initial radio frequency electric energy output by the radio frequency source; The step of performing impedance matching on at least each target load and each target power distribution branch includes: According to the impedance value of the RF source, the impedance value of each target load, the impedance value of each target power distribution branch and the preset characteristic impedance value, impedance matching is performed on the RF source, each target load and each target power distribution branch.
4. The power distribution method according to claim 1, characterized in that: The step of determining the target impedance value of each corresponding target power distribution branch at least according to the target power value required by each target load includes: Determining a proportional relationship between target power values of at least two target loads according to the target power value of each target load; Determining a proportional relationship between target impedance values of at least two corresponding target power distribution branches based at least on a proportional relationship between target power values of at least two target loads; The target impedance value of each corresponding target power distribution branch is determined at least according to the proportional relationship between the target impedance values of the corresponding at least two target power distribution branches.
5. The power distribution method according to claim 4, characterized in that: The determining the proportional relationship of the target impedance values of the corresponding at least two target power distribution branches at least according to the proportional relationship of the target power values of the at least two target loads includes: According to the proportional relationship between the target power values of at least two target loads and the preset characteristic impedance value, the proportional relationship between the target impedance values of at least two corresponding target power distribution branches is determined.
6. The power distribution method according to claim 4, characterized in that: The step of determining the target impedance value of each corresponding target power distribution branch at least according to the proportional relationship of the target impedance values of the corresponding at least two target power distribution branches comprises: The target impedance value of each corresponding target power distribution branch is determined according to the proportional relationship of the target impedance values of the corresponding at least two target power distribution branches, the preset quality factor and the angular frequency of the initial radio frequency electric energy.
7. The power distribution method according to claim 6, characterized in that: The target impedance value of each target power distribution branch is obtained by the inductance value and the target capacitance value, and the target capacitance value is adjustable; After determining the target impedance value of each corresponding target power distribution branch according to the proportional relationship of the target impedance values of the corresponding at least two target power distribution branches, the preset quality factor and the angular frequency of the initial RF power, the power distribution method further includes: Determine a target capacitance value of each target power distribution branch according to a target impedance value and an inductance value of each target power distribution branch; The adjusting the impedance value of each target power distribution branch corresponding to the target impedance value includes: The capacitance value of each corresponding target power distribution branch is adjusted to a target capacitance value, so that the impedance value of each corresponding target power distribution branch is adjusted to a target impedance value.
8. A power distribution device, characterized in that: The power distribution device distributes the initial RF power inputted from the input end into at least two target RF power energies by using the power distribution method according to any one of claims 1 to 7, and transmits the at least two target RF power energies to at least two target loads among the multiple loads accordingly; Wherein, the power distribution device comprises: An input terminal, used for inputting the initial radio frequency electric energy; A plurality of power distribution branches, each of which is connected between the input end and a corresponding load, and the input end can be selectively connected to the at least two target loads through at least two target power distribution branches; A control unit is used to conduct the at least two target power distribution branches between the input end and the at least two target loads, and disconnect the non-target power distribution branches between the input end and each non-target load, and determine the target impedance value of each corresponding target power distribution branch at least according to the target power value required by each target load, and adjust the impedance value of each target power distribution branch to the corresponding target impedance value, so as to distribute the initial RF power input from the input end into the at least two target RF power energies through the at least two target power distribution branches, and transmit the at least two target RF power energies to the at least two target loads accordingly.
9. A radio frequency power supply device, characterized in that: Comprising the power distribution device as claimed in claim 8.
10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program runs on a computer or a processor, the power allocation method according to any one of claims 1 to 7 is implemented.