Heating structure

Abstract

The invention discloses a heating structure which comprises a heat source body and a heated part, the heat source body is arranged in the heated part, the contact face of the heat source body and the heated part is inclined, and by means of the heating structure, high heat efficiency can be kept, and disassembly and assembly can be convenient.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and particularly to a heating structure. Background Art

[0002] In the heating system of semiconductor devices, the cavity and some key structures need to reach a certain temperature to promote chemical reactions or perform other precision operations. To achieve this goal, a cylindrical resistive heat source is usually adopted as a centralized heating solution. This form of heat source has the advantages of simple structure, easy control, and high stability.

[0003] The cylindrical resistive heat source is usually connected to the heated component such as a heating block by means of a hole - shaft fit. This fit method can effectively transfer heat to the heated component, but there are two conflicting challenges in the design. To achieve higher heating efficiency, there needs to be closer contact between the cylindrical resistive heat source and the heated device. Close contact can reduce the heat transfer loss between the contact surfaces, thereby improving the overall heat conduction efficiency. However, close contact also brings the problem of difficult disassembly and assembly, especially when regular maintenance, replacement, or adjustment is required. To ensure that the heating rod can be easily disassembled and replaced when needed, a certain gap must be left between the cylindrical heat source and the mating hole. This small gap can ensure that the heating rod can be smoothly installed and removed, avoiding the situation where it cannot be taken out or installed due to an overly tight fit. However, leaving a gap will result in insufficiently close thermal contact between the heat source and the heated component, thereby reducing the heating efficiency and causing heat loss.

[0004] In summary, if the fit between the cylindrical heat source and the heated component is very tight, the heating rod and the mating hole may get stuck due to excessive friction or thermal expansion during disassembly and assembly, affecting the disassembly operation and even possibly damaging the components. If a certain gap is maintained between the heat source and the heated component for easy disassembly and assembly, this will lead to a reduction in the heat transfer efficiency. The gap between the heat source and the heated component will cause heat loss, reducing the overall heating effect and affecting the performance of the device.

[0005] Therefore, it is necessary to design a new structure that can achieve both high thermal efficiency and convenient disassembly and assembly. Summary of the Invention

[0006] The purpose of the present invention is to overcome the defects of the prior art and provide a heating structure.

[0007] To solve the above - mentioned technical problems, the purpose of the present invention is achieved through the following technical solutions: providing a heating structure, including: a heat source body and a heated part, the heat source body is placed inside the heated part, and the contact surface between the heat source body and the heated part is inclined.

[0008] A further technical solution thereof is that the contact surface between the heat source body and the heated member is inclined in a direction approaching the bottom of the heated member.

[0009] A further technical solution thereof is that an installation hole is provided in the heated member, and the heat source body is placed in the installation hole.

[0010] A further technical solution thereof is that the inner side wall of the installation hole is inclined.

[0011] A further technical solution thereof is that the heat source body contacts the inner side wall of the installation hole to form the contact surface.

[0012] A further technical solution thereof is that the outer wall of the heat source body is inclined, and the outer wall of the heat source body contacts the inner side wall of the installation hole.

[0013] A further technical solution thereof is that the heat source body is in an inverted conical shape.

[0014] A further technical solution thereof is that the installation hole is in an inverted conical shape.

[0015] A further technical solution thereof is that the cone angle of the installation hole is equal to the cone angle of the heat source body.

[0016] A further technical solution thereof is that the cone angle of the installation hole is smaller than the cone angle of the heat source body.

[0017] The beneficial effect of the present invention compared with the prior art is that by placing the heat source body in the heated member and designing the contact surface to be inclined, the contact area between the heat source body and the heated member can be enhanced, thereby improving the thermal efficiency. The design of the inclined surface not only optimizes heat conduction but also ensures stable contact during the heating process, avoiding heat loss. At the same time, the inclined contact surface makes it easier for the heat source body to be separated from the heated member, facilitating disassembly and maintenance. Overall, this design achieves a balance between efficient heating and convenient disassembly and assembly.

[0018] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] Figure 1 Structural schematic of a heating structure provided by an embodiment of the present invention Figure 1 ;

[0021] Figure 2 Structural schematic of a heating structure provided by an embodiment of the present invention Figure 2 ;

[0022] Description of markings in the figure:

[0023] 10. Heat source body; 20. Heated part; 21. Mounting hole, 30. Contact surface. Detailed implementation manners

[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0025] It should be understood that when used in this specification and the appended claims, the terms "comprises" and "comprising" indicate the presence of the described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or their combinations.

[0026] It should also be understood that the terms used in this specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. As used in this specification of the present invention and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include the plural forms.

[0027] It should be further understood that the term " / and / " used in this specification of the present invention and the appended claims refers to any combination and all possible combinations of one or more of the related listed items, and includes these combinations.

[0028] In the heating system of semiconductor devices, cylindrical resistive heat sources are commonly used to provide concentrated heating. Their close contact with the heated components can improve the heat conduction efficiency. However, a tight fit will cause difficulties in disassembly and assembly. Especially when regular maintenance or replacement is required, it may affect disassembly due to excessive friction or thermal expansion, etc., and even damage the components. To ensure convenient disassembly, a gap must be left, but this will result in insufficiently close thermal contact between the heat source and the component, reducing the heating efficiency. Therefore, it is necessary to balance the contradiction between heating efficiency and disassembly / assembly convenience during design.

[0029] For this reason, the embodiment of the present invention provides a heating structure that can achieve both high thermal efficiency and convenient disassembly and assembly.

[0030] The heating structure is designed such that both the heat source body 10 and the mounting hole 21 are in an inverted conical shape, making the contact surface 30 between the heat source body 10 and the heated part 20 inclined. This enables a tight contact between the heat source body 10 and the heated part 20, thereby improving the heat conduction efficiency. In addition, the inverted conical design allows the heat source body 10 to be stably placed within the mounting hole 21, and heat can be effectively transferred through the contact surface 30. Meanwhile, the conical structure facilitates disassembly and assembly. The contact surface 30 between the mounting hole 21 and the heat source body 10 ensures stable installation, making maintenance and replacement easier, extending the service life of the heat source body 10 and reducing energy loss.

[0031] To better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings of the specification and specific embodiments.

[0032] Please refer to Figure 1 and Figure 2 , a heating structure, comprising: a heat source body 10 and a heated part 20, the heat source body 10 is placed inside the heated part 20, and the contact surface 30 between the heat source body 10 and the heated part 20 is inclined.

[0033] In this embodiment, the heat source body 10 is completely placed in the hole inside the heated part 20. The contact surface 30 between the two is inclined, that is, the contact surfaces 30 of both are small-angle inclined planes. Due to the inclined plane design, a gapless contact can be achieved between the heat source body 10 and the heated part 20, maximizing the actual contact surface area 30 and improving the heat conduction efficiency. Through this tightly fitting method, heat can be more effectively transferred from the heat source body 10 to the heated part 20, reducing energy loss and improving the overall heating efficiency.

[0034] In one embodiment, please refer to Figure 1 and Figure 2 , the contact surface 30 between the above-mentioned heat source body 10 and the heated part 20 is inclined along the direction close to the bottom of the heated part 20.

[0035] In this embodiment, when looking from the top to the bottom of the heated part 20, the contact line between the heat source body 10 and the heated part 20 gradually slopes downward.

[0036] This design not only increases the actual contact surface area 30 between the two, but also enables heat to be more evenly distributed over the entire heated part 20, thereby improving the overall heating efficiency.

[0037] From an installation perspective, the contact surface 30 of the heat source body 10 gradually slopes as it approaches the bottom of the heated part 20. When viewed from the top, the contact edge of the heat source body 10 is not parallel to the open end of the heated part 20, but forms a progressive ramp effect. Such a layout increases the effective contact area 30 between the heat source body 10 and the heated part 20, thereby enhancing the heat transfer efficiency.

[0038] Due to the special inclined design of the contact surface 30, heat energy can be transferred more directly and efficiently from the heat source body 10 to the heated part 20, reducing energy loss. The inclined contact surface 30 helps to evenly distribute heat, avoid local overheating, extend the service life of the equipment, and improve work efficiency.

[0039] By specially inclining the contact surface 30 between the heat source body 10 and the heated part 20, not only is the heat conduction efficiency enhanced, but also the stability and heating uniformity of the system are improved.

[0040] In one embodiment, please refer to Figure 1 and Figure 2 , an installation hole 21 is provided in the above-mentioned heated part 20, and the heat source body 10 is placed in the installation hole 21.

[0041] In one embodiment, please refer to Figure 1 and Figure 2 , the inner side wall of the above-mentioned installation hole 21 is inclined.

[0042] The inner side wall of the installation hole 21 is inclined. This inclined design not only helps to guide the heat source body 10 to smoothly enter the installation hole 21, but also can increase the effective contact area 30 between the heat source body 10 and the heated part 20, thereby enhancing the heat transfer efficiency.

[0043] In one embodiment, please refer to Figure 1 and Figure 2 , the above-mentioned heat source body 10 contacts the inner side wall of the installation hole 21 to form a contact surface 30.

[0044] In one embodiment, please refer to Figure 1 and Figure 2 , the outer wall of the above-mentioned heat source body 10 is inclined, and the outer wall of the heat source body 10 contacts the inner side wall of the installation hole 21.

[0045] Figure 1 It shows that the gap between the heat source body 10 and the installation hole 21 is greater than zero; Figure 2 It shows that the gap between the heat source body 10 and the installation hole 21 is equal to zero. During installation, the heat source body 10 is installed from the direction close to the bottom of the heated part 20.

[0046] The outer wall of the above-mentioned heat source body 10 is also inclined correspondingly so as to closely fit with the inner wall of the mounting hole 21. Such a design enables the heat source body 10 to naturally adapt to the shape of the mounting hole 21 during installation, reducing the assembly difficulty and ensuring tight contact between the two.

[0047] The heat source body 10 is placed inside the mounting hole 21, and its outer wall contacts the inner wall of the mounting hole 21 to form a contact surface 30. This contact surface 30 is a key part for the entire system to achieve efficient heat conduction.

[0048] Through the precisely designed inclined contact surface 30, the heat source body 10 can evenly spread heat in multiple directions, avoiding local overheating and improving the stability and reliability of the system.

[0049] In one embodiment, please refer to Figure 1 and Figure 2 , the above-mentioned heat source body 10 is in an inverted conical shape.

[0050] In one embodiment, please refer to Figure 1 and Figure 2 , the above-mentioned mounting hole 21 is in an inverted conical shape.

[0051] In this embodiment, the design of the inverted conical heat source body 10 helps to achieve tight contact with the heated part 20 and is also convenient for precise alignment and installation. Due to its gradually shrinking shape, it can self-align when inserted into the mounting hole 21, ensuring the accuracy of the position.

[0052] Correspondingly, the mounting hole 21 also adopts an inverted conical design, which can ensure that the heat source body 10 is firmly fixed inside it after installation, and maximize the contact surface area 30 through the shape matching of the two, thereby improving the heat conduction efficiency.

[0053] In one embodiment, please refer to Figure 1 and Figure 2 , the cone angle of the above-mentioned mounting hole 21 is equal to the cone angle of the heat source body 10.

[0054] In this embodiment, when the cone angles of the mounting hole 21 and the heat source body 10 are the same, it can ensure the perfect fit between the heat source body 10 and the mounting hole 21 to the greatest extent, forming a uniformly distributed contact surface 30. This is not only beneficial to the effective transfer of heat but also can reduce the local overheating phenomenon caused by poor contact.

[0055] Using the design with the same cone angle can simplify the precision control requirements in the production and assembly processes, reduce the manufacturing cost and improve the production efficiency.

[0056] In one embodiment, please refer to Figure 1and Figure 2 The conical angle of the above-mentioned mounting hole 21 is smaller than the conical angle of the heat source body 10.

[0057] In some cases, in order to achieve a specific mechanical locking effect or adjust the contact pressure, a slight difference in the conical angles of the heat source body 10 and the mounting hole 21 can be considered. For example, the conical angle of the heat source body 10 is slightly smaller than the conical angle of the mounting hole 21 to increase the frictional force between the two and improve the reliability of fixation.

[0058] In the above heating structure, the hole of the heated part 20 is designed as a small-angle tapered hole. This design can ensure that the contact area 30 with the heat source body 10 gradually increases during the heating process, thus forming a structure that gets tighter with more pressure. During the heating process, the close contact between the heat source body 10 and the hole wall can effectively reduce the gap, enhance the contact stability, and improve the heat conduction efficiency.

[0059] The heat source body 10 is designed to be conical to ensure that its shape matches the tapered hole in the heated part 20. Through this shape design, the contact between the conical heat source and the conical hole is closer, reducing the gap between the heat source body 10 and the hole wall, thus forming a zero-gap contact during the working process to ensure the effective conduction of heat.

[0060] It is very crucial that the conical angles of the conical hole and the conical heat source are equal. By ensuring the matching of these two angles, the contact surface between the heat source body 10 and the heated part 20 can distribute heat more smoothly and evenly, thus avoiding local overheating or heat waste and ensuring the high efficiency of heat conduction.

[0061] The conical heat source and the conical hole are in zero-gap stable contact, and heating and heat transfer are achieved through heat conduction. Due to the close contact, heat can be efficiently transferred from the heat source body 10 to the heated part 20, improving the heating efficiency and reducing energy loss.

[0062] Since the contact area 30 between the heat source body 10 and the heated part 20 increases, the effective area of heat conduction is enlarged, enabling the heat source to operate at a lower power consumption under the same temperature control requirements. This not only improves the utilization efficiency of the heat source but also reduces energy consumption and extends the service life of the heat source.

[0063] The mating area of the conical hole is larger than the area of the cylindrical heat source, further increasing the effective area of heat conduction and improving the heat transfer efficiency. The increased contact area 30 enables the heat source body 10 to contact the heated part 20 more fully, further enhancing the heat conduction effect.

[0064] Generally speaking, this heating structure adopts a small-angle conical hole design, combined with the conical heat source body 10, so that the angle of the conical mounting hole 21 is exactly matched with that of the conical heat source body 10. When the conical heat source body 10 is installed on the heated part 20, a structure that gets tighter under pressure is formed, ensuring a more stable contact between the conical heat source body 10 and the heated part 20, thus achieving efficient heating. Through this structure, zero-gap contact can be achieved between the conical heat source body 10 and the conical mounting hole 21, and heat is efficiently transferred through heat conduction.

[0065] This design not only improves the utilization efficiency of the heat source, but also can reduce the output power consumption of the heat source under the premise of meeting the same temperature control requirements, thereby prolonging the service life of the heat source and reducing energy loss. At the same time, since the contact area of the conical mounting hole 21 is larger than the area of the cylindrical heat source, this matching design increases the effective area of heat conduction and further improves the heat transfer efficiency.

[0066] This heating structure reduces energy loss by optimizing the shape design of the heat source body 10 and the heated part 20, and while improving the thermal efficiency, ensures the stability and long-term use of the heat source body 10.

[0067] In addition, in other embodiments, a special coating, such as a ceramic coating or a heat-conducting coating, is applied to the contact surface 30 between the heat source body 10 and the mounting hole 21. These coatings can enhance the heat conduction performance of the contact surface 30 and have a certain degree of slipperiness, making the disassembly and assembly smoother. The coating can also effectively reduce wear and improve the durability of the components.

[0068] In other embodiments, in some application scenarios, a segmented inclined design can be considered. That is, the interior of the mounting hole 21 and the outer wall of the heat source body 10 are not inclined at a single angle, but are divided into several regions with different angles. This can adjust the contact pressure of different regions according to actual needs to achieve a better heat conduction effect.

[0069] In other embodiments, the heat source body 10 is designed as a detachable segmented structure. For example, it is designed into multiple modular heat source bodies 10, and each module is connected to the mounting hole 21 through a simple docking method. Each module can be disassembled separately, and only the corresponding module needs to be removed when needed, without removing the entire heat source body 10. This design can not only maintain a high thermal efficiency, but also facilitate the maintenance and replacement of some components.

[0070] In other embodiments, an adjustable, snap-fit or magnetic connection structure can be adopted between the heat source body and the heated part 20, so that the heating structure can be firmly connected and easily disassembled and assembled. That is, the connection between the heat source body 10 and the heated part 20 is both firm and convenient.

[0071] The above-mentioned heating structure places the heat source body 10 inside the heated part 20 and designs the contact surface 30 to be inclined. This can not only enhance the contact area 30 between the heat source body 10 and the heated part 20, thereby improving the thermal efficiency, but also optimize the heat conduction and ensure stable contact during heating to avoid heat loss. At the same time, the inclined contact surface 30 enables the heat source body 10 to be more easily separated from the heated part 20, facilitating disassembly and maintenance. Overall, this design achieves a balance between efficient heating and convenient disassembly and assembly.

[0072] As described above, the specific embodiments of the present invention are only described, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A heating structure, characterized in that: include: A heat source body and a heated component, wherein the heat source body is placed in the heated component, and the contact surface between the heat source body and the heated component is inclined.

2. A heating structure according to claim 1, characterized in that: The contact surface between the heat source and the heated member is inclined in a direction approaching the bottom of the heated member.

3. A heating structure according to claim 1, characterized in that: The heated component is provided with a mounting hole, and the heat source is placed in the mounting hole.

4. A heating structure according to claim 3, characterized in that: The inner side wall of the mounting hole is inclined.

5. A heating structure according to claim 4, characterized in that: The heat source body contacts the inner wall of the mounting hole to form the contact surface.

6. A heating structure according to claim 5, characterized in that: The outer wall of the heat source body is inclined, and the outer wall of the heat source body contacts the inner wall of the mounting hole.

7. A heating structure according to claim 3, characterized in that: The heat source body is in an inverted cone shape.

8. A heating structure according to claim 7, characterized in that: The mounting hole is in an inverted cone shape.

9. A heating structure according to claim 8, characterized in that: The cone angle of the mounting hole is equal to the cone angle of the heat source body.

10. A heating structure according to claim 8, characterized in that: The cone angle of the mounting hole is smaller than the cone angle of the heat source body.

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