Processing chamber with reflector

Abstract

A reflector and a processing chamber having a reflector are described herein. In one example, a reflector is provided that includes a cylindrical body, a cooling channel, and a reflective coating. The cylindrical body has an upper surface and a lower surface. The lower surface has a plurality of concave reflector structures disposed about a centerline of the cylindrical body. A cooling channel is disposed in or on the cylindrical body. A reflective coating is disposed on the plurality of concave reflector structures.

Description

Technical Field

[0001] The embodiments described herein generally relate to semiconductor processing chambers. More specifically, embodiments of the present disclosure relate to semiconductor processing chambers having one or more reflectors. Background Art

[0002] In the fabrication of integrated circuits, deposition processes are used to deposit films of various materials on a semiconductor substrate. These deposition processes can be carried out in a closed processing chamber. Epitaxy is a deposition process that can grow ultra-pure thin layers, typically silicon or germanium, on the surface of a substrate. Precise temperature control is required to form an epitaxial layer having a uniform thickness across the surface of the substrate. The processing temperature is controlled by using radiant heating lamps. Each lamp is typically associated with one or more reflectors that increase the light energy and direct it towards the substrate. The lamps and reflectors are frequently replaced, and thus they are an important part of the operating cost of the processing chamber. Reflectors are also difficult to manufacture.

[0003] Accordingly, there is a need for improved reflectors for processing chambers that utilize lamp heating. Summary of the Invention

[0004] A reflector and a processing chamber having the reflector are described herein. In one example, a reflector is provided that includes a cylindrical body, cooling channels, and a reflective coating. The cylindrical body has an upper surface and a lower surface. The lower surface has a plurality of concave reflector structures disposed around a centerline of the cylindrical body. The cooling channels are disposed in or on the cylindrical body. The reflective coating is disposed on the plurality of concave reflector structures.

[0005] In another example, a processing chamber adapted for use in semiconductor manufacturing includes a chamber body, a plurality of lamps, a substrate support, a support surface, a window, a reflector including a cylindrical body, a plurality of concave reflector structures, cooling channels, and a reflective coating. The chamber body has an internal space. The substrate support is disposed in the internal space. The window is disposed above the substrate support and at least partially defines the internal space. The reflector is positioned to reflect light emitted from the lamps through the window and into the internal space. The cylindrical body has an upper surface and a lower surface. The lower surface has a plurality of concave reflector structures disposed around a centerline of the cylindrical body. The cooling channels are disposed in or on the cylindrical body. The reflective coating is disposed on the plurality of concave reflector structures.

[0006] In another example, a processing chamber adapted for use in semiconductor manufacturing includes a chamber body, a plurality of lamps, a substrate support, a window, a reflector including a cylindrical body, an upper surface, and a lower surface, a plurality of concave reflector structures, a housing, a baffle, a cooling channel, a second cooling channel, a side surface, and a reflective coating. The chamber body has an internal space. The substrate support is disposed in the internal space. The substrate support includes a support surface. The window is disposed above the substrate support and at least partially defines the internal space. The reflector is positioned to reflect light emitted from the lamps through the window and into the internal space. The cylindrical body has an upper surface and a lower surface. The lower surface has a plurality of concave reflector structures disposed around a centerline of the cylindrical body. The cylindrical body is made of a polymer. The housing extends through the cylindrical body and protrudes distally below the lower surface. The housing is made of a second polymer, wherein the first and second polymers are combined with a filler that increases the thermal conductivity of the polymer. The filler includes one or more of boron nitride, aluminum nitride, silicon carbide, carbon-based structures, diamond, or metal powder. The baffle is coupled to the distal end of the housing. The cooling channel is disposed in or on the cylindrical body and has an inlet port and an outlet port disposed through an upper surface or a side surface of the cylindrical body and the housing. The second cooling channel is disposed in or on the housing and has an inlet port and an outlet port disposed through an upper surface or a side surface of the cylindrical body and the housing. The reflective coating is disposed on the plurality of concave reflector structures. The reflective coating is gold or aluminum. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] In order to enable a manner of understanding the above-described features of the present disclosure in detail, a more specific description of the present disclosure briefly summarized above may be obtained by reference to the embodiments, some of which are illustrated in the drawings. However, it should be noted that the drawings only show typical embodiments of the present disclosure and should not be considered as limiting its scope, since the present disclosure may admit other equivalent embodiments.

[0008] Figure 1 is a side cross-sectional view of a processing chamber according to an embodiment of the present disclosure.

[0009] Figure 2A is according to an embodiment of the present disclosure in Figure 1 is a bottom perspective view of a reflector used in the processing chamber.

[0010] Figure 2B is according to an embodiment of the present disclosure Figure 2A is a partial side cross-sectional view of the reflector.

[0011] Figure 3A is a cross-sectional view of a reflector assembly

[0012] Figure 3B is according to an embodiment of the present disclosureFigure 3A Bottom perspective view of a reflector component.

[0013] Figure 4 Cross-sectional view of a reflector component having cooling channels according to one embodiment of the present disclosure

[0014] Figure 5 is according to one embodiment of the present disclosure in Figure 1 Bottom perspective view of a reflector used in a processing chamber of

[0015] Figure 6 is according to another embodiment of the present disclosure in Figure 1 Bottom perspective view of a reflector used in a processing chamber of

[0016] In this disclosure, the terms "top", "bottom", "side", "above", "below", "upper", "lower", "upward", "downward", "horizontal", "vertical", and the like do not refer to absolute directions. Instead, these terms refer to directions relative to a non-specific reference plane. Such a non-specific reference plane can be vertical, horizontal, or otherwise angled.

[0017] For ease of understanding, the same reference numerals have been used, where possible, to indicate identical elements common to the figures. It is contemplated that elements disclosed in one embodiment can be beneficially used in other embodiments without specific recitation. Detailed Description

[0018] The embodiments described herein generally relate to reflectors for use in semiconductor processing chambers, and semiconductor processing chambers having such reflectors. The reflectors are typically made of a polymer and have a reflective coating disposed on a plurality of recessed surfaces formed in one side of the reflector.

[0019] Conventional light reflectors disposed on processing chambers are typically made of metal, such as aluminum. These aluminum reflectors are coated with a reflective coating that directs infrared light emitted by a lamp to a substrate disposed within the processing chamber. However, machining these aluminum reflectors is very time-consuming and costly, and can delay operations if replacement is needed. Disclosed below is a non-metallic reflector body coated with a reflective material that provides significant improvements over aluminum reflectors. The non-metallic-based reflector provides flexibility in construction, including reflector layer selection and non-metallic material selection, which can result in faster reproduction of spare parts and less downtime for the processing chamber. In addition, the non-metallic-based reflector can include integral cooling to improve performance and extend service life. The non-metallic-based reflector can also include an integral light baffle that reduces the amount of components required to operate the chamber, and also simplifies the supply chain and the amount of parts needed to be inventoried for full repair of the processing chamber.

[0020] Now turning to Figure 1 a side cross-sectional view of the processing chamber 100 shown, which can be used to deposit an epitaxial film on the substrate 160. The processing chamber 100 can operate under vacuum, such as at a reduced pressure or near atmospheric pressure. The processing chamber 100 includes a chamber body 101 having one or more sidewalls 102, a bottom 103, and a top 104. The upper dome 122 and the lower dome 120 are coupled to the chamber body 101 and together enclose the internal space 125 of the processing chamber 100.

[0021] The processing chamber 100 further includes a substrate support 110 disposed in the internal space 125 of the chamber body 101 to support the substrate 160 during processing. The substrate 160 disposed on the substrate support 110 is heated by a lamp 150. The lamp 150 is disposed above and / or below the substrate support 110. The lamp 150 can be, for example, a tungsten filament lamp or a high-power LED. The lamp 150 below the substrate support 110 can direct radiation, such as infrared radiation, through the lower dome 120 disposed below the substrate support 110 to heat the substrate 160 and / or the substrate support 110. The lower dome 120 is made of a transparent material, such as quartz. In some embodiments, a substrate support 110 having an annular shape can be used. The annular substrate support can be used to support the substrate 160 around the edge of the substrate 160 such that the bottom of the substrate 160 is directly exposed to the heat from the lamp 150. In other embodiments, the substrate support 110 is a heating pedestal to increase the temperature uniformity of the substrate 160 during processing. The lamp 150 below the substrate support 110 can be mounted within or near the lower reflector 130 and within or near the lower housing assembly 132. The lower reflector 130 can surround the lower housing assembly 132. Generally, the lower reflector 130 and the lower housing assembly 132 can be formed of a polymer coated with a reflective material, such as, for example, gold, aluminum, or other suitable materials. A lower temperature sensor 191, such as a pyrometer, can be mounted in the lower housing assembly 132 to detect the temperature of the substrate support 110 or the back side of the substrate 160. Alternatively, one or both of the lower reflector 130 and the lower housing assembly 132 can be fabricated as described later with reference to the upper housing assembly 190 and the upper reflector 140.

[0022] The lamp 150 above the substrate support 110 can direct radiation, such as infrared radiation, through the upper dome 122 disposed above the substrate support 110. The upper dome 122 is made of a transparent material (such as quartz). The lamp 150 above the substrate support 110 can be mounted adjacent to the upper housing assembly 190 and within or near the upper reflector 140. The upper reflector 140 can surround the perimeter of the upper housing assembly 190. Generally, the upper reflector 140 and the upper housing assembly 190 can be formed of a polymer coated with a reflective material, such as (for example) gold, aluminum, or other suitable materials. The upper temperature sensor 192 (such as a pyrometer) can be mounted in or near the upper housing assembly 190 to detect the temperature of the substrate 160 during processing. Although Figure 1 lamps 150 of the same size are shown mounted above and below the upper dome 122 and the lower dome 120 respectively, lamps of different types, intensities, wavelengths, and / or sizes can be mounted within or near one or more of the reflectors 130, 140. Additionally, the lamp 150 can be disposed in additional and / or alternative locations.

[0023] The upper reflector 140, the lower reflector 130, the upper housing assembly 190, and the lower housing assembly 132 can be manufactured by processes such as (but not limited to) casting, injection molding, compression molding (such as powder pressing), and 3D printing (additive manufacturing). One, some, or all of the upper reflector 140, the lower reflector 130, the upper housing assembly 190, and the lower housing assembly 132 have a reflective coating adapted to direct light towards the substrate 160 or away from locations where light is not desired. The reflective coating can be (but not limited to) a reflective material, such as gold and aluminum, etc. The reflective coating can include a transparent protective layer disposed on the reflective material, such as a protective magnesium fluoride layer. The reflective coating can optionally include an underlying adhesive layer, such as nickel. In one example, the reflective coating is a gold layer having a thickness of about 50 nm to about 300 nm and having a high reflectivity for infrared wavelengths (about 700 nm to 1 mm). The gold reflective coating can have a reflectivity of 90% or higher. In another example, the reflective coating is an aluminum layer having a thickness of about 50 nm to about 300 nm. When present, the magnesium fluoride layer protective layer can be about 20 nm to about 1 μm thick. The resulting reflective coating can have a reflectivity of 90% or higher. In all embodiments, the thickness of the coating is selected such that the reflectivity of the cylindrical body is 90% or higher.

[0024] The upper reflector 140, the lower reflector 130, the upper housing assembly 190, and the lower housing assembly 132 may be made of a polymeric material such as, but not limited to, polyetheretherketone (PEEK), polyimide, or other suitable high-temperature polymers. All or some of the upper reflector 140, the lower reflector 130, the upper housing assembly 190, and the lower housing assembly 132 may be made of the same material, or they may not be made of the same material. Similarly, all or some of the upper reflector 140, the lower reflector 130, the upper housing assembly 190, and the lower housing assembly 132 may have the same coating, or they may not have the same coating.

[0025] The processing chamber 100 is coupled to one or more processing gas sources 170 that supply the processing gases used in the epitaxial deposition. The processing chamber 100 is further coupled to an exhaust device 180, such as a vacuum pump. In some embodiments, the processing gases may be supplied on one side of the processing chamber 100 (e.g., Figure 1 the left side), and the gases may be exhausted from the processing chamber on the opposite side (e.g., Figure 1 the right side) to create a cross-flow of the processing gases above the substrate 160. The processing chamber 100 may also be coupled to a purge gas source 172.

[0026] Figures 2A to 2B is according to one embodiment of the present disclosure Figure 1 Bottom view and partial side cross-sectional view of the upper reflector 140 of. The upper reflector 140 includes an annular body 201 (also referred to as a "cylindrical body") having an outer edge 202, an inner edge 203, a top side 214, and a bottom side 204. The upper reflector 140 further includes an outer edge 205 disposed above and outside the bottom side 204 of the annular body 201. In one embodiment, the cylindrical body may be an annular body having a central opening, as Figure 2A shown. In some embodiments, the outer edge 205 may be used to align the upper housing assembly 190 with the processing chamber. The bottom side 204 includes a plurality of concave reflector structures that include a first reflective surface 210. The bottom side 204 also includes a plurality of second reflective surfaces 220, which may be flat or concave. The first reflective surface 210 and the second reflective surfaces 220 include a reflective coating 280 made of a highly reflective material such as gold, aluminum, or other materials suitable for reflecting radiation from the lamp 150 in the processing chamber 100. The second reflective surfaces 220 have surface shading to further distinguish the second reflective surfaces 220 from the first reflective surface 210. Each first reflective surface 210 and each second reflective surface 220 are positioned at different angular positions relative to the centerline of the annular body 201. In some embodiments, the upper housing assembly 190 includes from about 16 to about 24 first reflective surfaces 210, such as about 20 first reflective surfaces 210. Figure 2A is shown as having 20 first reflective surfaces 210 (see 21020 )。In some embodiments, the upper housing assembly 190 includes from about 8 to 16 second reflective surfaces 220, such as about 12 second reflective surfaces 220. Figure 2A Shown as having 12 second reflective surfaces 220 (see 220 12 )。

[0027] Figure 2B A partial side cross-sectional view of shows the reflective surface 220 relative to the lamp 150 1 , 210 1 and 220 2 。The lamp 150 is disposed between the first reflective surface 210 and the upper dome 122 of the processing chamber 100 (i.e., between the first reflective surface 210 and the substrate support 110). In some embodiments, the lamp 150 is not placed between the second reflective surface 220 and the substrate support 110. For example, if the lamp 150 is only placed below the first reflective surface 210, 20 lamps 150 will be placed below the upper reflector 140 including 20 first reflective surfaces 210.

[0028] A plurality of concave reflector structures (e.g., the first reflective surface 21) are arranged in a circular array around the annular body 201 relative to the center line of the cylindrical body. At least one of the first reflective surfaces 210 is disposed between each of the second reflective surfaces 220 in the circular array. The circular array may include one or more cases where two or more of the first reflective surfaces are continuously arranged. For example, the circular array of the upper reflector 140 includes eight cases of two continuously spaced first reflective surfaces 210. In addition, the circular array includes four cases where one of the second reflective surfaces 220 is disposed at a position before one of the first reflective surfaces 210 and at a position after one of the first reflective surfaces 210.

[0029] Each first reflective surface 210 has a curved surface with a radius of curvature 212 ranging from about 1.50 inches to about 2.20 inches, such as from about 2.02 inches to about 2.10 inches. On the other hand, each second reflective surface 220 is substantially flat. In some embodiments, each first reflective surface 210 has a partially cylindrical shape extending in a radial direction from the outer edge 202 to the inner edge 203 of the upper reflector 140. In other embodiments, each first reflective surface has a frustoconical shape extending in the direction from the outer edge 202 to the inner edge 203 of the upper reflector 140. In embodiments having a frustoconical shape, the radius of curvature decreases from the outer edge 202 to the inner edge 203 of the reflector 140 in the radial direction.

[0030] Figure 3AA cross-sectional view of the reflector assembly 300 is shown. Although embodiments of the upper reflector assembly will be discussed hereinafter, it should be understood that the same construction may be applied to the lower reflector 130 introduced above. The reflector assembly 300 includes an upper housing assembly 190, an upper reflector 140, and a baffle structure 350. The upper housing assembly 190 includes a housing body 301 and a housing flange 305. The housing body 301 has a cylindrical shape, having an inner diameter surface 302 and an outer diameter surface 304, a proximal end 316, and a distal end 303. The housing flange 305 has an upper surface 318, a lower surface 307, an inner diameter edge 306, and an outer diameter edge 322, and the outer diameter edge 322 extends radially outward from the inner diameter surface 302 of the housing body 301. The housing flange 305 is connected to the proximal end 316 of the housing body 301 at the inner diameter edge 306 as a one-piece integral structure. The upper housing body assembly 190 may have an optional lower baffle 311 located at the distal end 303 of the housing body 301. The lower baffle 311 may be disc-shaped, having a top surface 325 and a bottom surface 326, with an inner edge 327 and an outer edge 328 respectively. The lower baffle 311 may be a separate component connected to the housing body 301, or may be connected to the distal end 303 of the housing body 301 to form a one-piece integral structure.

[0031] The baffle structure 350 includes an intermediate baffle 352, a top baffle 354, and a cylindrical sensor tube 356. The intermediate baffle 352 and the top baffle 354 have a disc shape and are disposed about a common centerline of the cylindrical sensor tube 356. The baffle structure 350 may be made of the same material as the upper reflector 140 or other suitable materials such as aluminum.

[0032] The lower baffle 311 may be connected to the inner diameter surface 302 of the housing body 301. The top surface 325 of the lower baffle 311 may be connected to the inner diameter surface 302 by a connector 313 in such a way as to form an annular gap 312 between the inner diameter surface 302 and the outer edge 328. The connector 313 may be a bracket or structure suitable for connecting the lower baffle 311 to the housing body 301. In another embodiment, the connector 313 is a web of material that extends between the outer edge 328 of the lower baffle 311 and the inner diameter surface 302 at the distal end 303 of the housing body 301 when the housing body 301 and the lower baffle 311 are made as an integral structure. In addition, it is contemplated that the upper housing assembly 190 including the optional lower baffle 311 and the baffle structure 350 is formed as an integral structure. The lower baffle 311 is made of the same material as the upper reflector 140 and is similarly coated. In addition, the lower baffle 311 may have a cutout 314 that enables a second temperature sensor (such as a pyrometer not shown) to have a line of sight down to the edge of the substrate 160. The cylindrical sensor tube 356 is generally used for a first temperature sensor (such as Figure 1The upper temperature sensor 192 shown provides a line of sight downward to the center of the substrate 160.

[0033] The housing assembly 190 including the lower baffle 311 may be made of the same material as the upper reflector 140 and similarly coated. The housing assembly 190 is configured to be inserted adjacent to the inner edge 203 of the upper reflector 140. The outer diameter of the housing flange 305 is greater than the inner diameter of the inner edge 203 of the upper reflector 140, such that the lower surface 307 of the housing flange 305 at least partially contacts the top side 214 of the upper reflector 140 when inserted into the cylindrical body of the upper reflector 140.

[0034] Figure 3B FIG. is an exemplary bottom perspective view of an embodiment of a reflector assembly 300 including an upper housing assembly 190, an upper reflector 140, and a baffle structure 350. The reflector assembly 300 can be used to replace the upper reflector 140 in the processing chamber 100 or other suitable processing chambers described above. The cylindrical body 360 is configured to be similar to the upper reflector 140 described above, except that the cylindrical body 360 is at least interfaced with the housing body 301 to reduce unwanted reflections from interfering measurements (such as the upper temperature sensor 192 through the cylindrical sensor tube 356).

[0035] As previously mentioned, non-metals can be used to fabricate the reflector assembly 300. Non-metal or polymer bodies with reflective coatings can be used for other components disposed on or within the chamber body that receive light or heat from the lamp 150. These non-metal or polymer bodies are Figure 1 exposed to high temperatures during operation of the processing chamber 100. The temperature of the non-metal or polymer is selected to withstand up to 450 degrees Celsius. Some non-metal or polymer bodies can withstand up to 500 degrees Celsius. To manage the temperature of the reflector assembly and prevent overheating, the non-metal material can include fillers selected to increase the thermal conductivity. Some fillers that can be used to increase the thermal conductivity include, but are not limited to, boron nitride, aluminum nitride, silicon carbide, carbon, diamond, and metal powders (including aluminum, iron), carbon nanotubes, or similar carbon-based structures (such as carbon fiber or graphene). In one example, the non-metal or polymer body can include up to about 7 weight percent of the filler.

[0036] Figure 4 FIG. shows a cross-sectional view of a reflector assembly 400 with cooling channels added within the components of the reflector assembly 400. It is contemplated that the cooling channels shown can be similarly constructed in Figures 2A to 6In the design, the reflector assembly 400 includes an upper reflector 440 and a housing assembly 490, each having a cooling channel around the center line 461. The diameter of a cylindrical, annular, tubular, or toroidal member uses the center line 461 as the origin. The upper reflector 440 and the housing assembly 490 are envisioned to be constructed by various methods similar to those suitable for plastic molding and coating of the reflector assembly 300. For example (but not limited to), injection molding used to form the upper reflector 440 creates a cavity 430 within the annular body 410. The cavity 430 can be used to allow a cooling medium (such as air, water, a fluorinated heat transfer fluid, or some combination thereof) to flow to maintain the temperature of the reflector assembly 400 below the destruction temperatures of the Figure 2B , Figure 4 and Figure 1 reflective coating 280, the annular body 410, or the lamp 150, respectively. In one embodiment, the cavity 430 is formed near the top side 414 of the annular body 410 and is recessed from a plurality of concave structures 420. In another embodiment, the cavity 430 is formed near a plurality of concave structures 420 and is recessed from the top side 414 of the annular body 410. In another embodiment, the cavity 430 substantially encompasses the height of the annular body 410 formed near a plurality of concave structures 420 and near the top side 414. The cavity 430 can be a single annular housing that follows the disk shape of the annular body 410. In another embodiment, the cavity 430 can be a separate annular housing containing multiple flow paths that follow the disk shape of the annular body 410. In one embodiment, the top side 414 has a reflector inlet port 431 and a reflector outlet port 432. In another embodiment, the ports 431, 432 may be side inlet and outlet ports. In yet another embodiment, the cavity 430 can be disposed on top of the top side 414 so as to enable cooling from the surface. The ports 431, 432 are used to allow inflow and outflow from the cavity 430. Figure 4 shows the reflector inlet port 431 and the reflector outlet port 432 positioned 180 degrees from each other. It is expected that the spacing between the reflector inlet port 431 and the reflector outlet port 432 can be substantially adjacent to each other or there can be some distance between them.

[0037] Similarly, the housing assembly 490 includes a housing flange and a housing body 401, and the housing body 401 contains a molded cavity 445 between the inner wall 402, outer wall 404, distal end 403, and proximal end 416 of the housing body 401. The cavity 445 is formed between the inner wall and the outer wall, and the cavity 445 can provide a cooling medium to thermally condition the housing body 401 and prevent overheating. The cavity 445 has a housing inlet port 441 and a housing outlet port 442. The ports 441, 442 allow the cooling medium to flow into and out of the cavity 445. Figure 4The housing inlet port 441 and the housing outlet port 442 are shown positioned 180 degrees from each other. However, it is envisioned that the spacing between the housing inlet port 441 and the housing outlet port 442 can be substantially adjacent to each other or have some distance therebetween. Additionally, in another embodiment, the housing inlet port 441 and the housing outlet port 442 can be side inlet or outlet ports of the housing assembly 490.

[0038] Figure 5 An embodiment of a reflector assembly 500 is shown that includes a central aperture 503 and a plurality of concave structures 520 configured to receive a portion of an elongate lamp. The concave structures 520 are shown in a circumferential tangential orientation on the lower surface 515 of the reflector assembly 500 in the processing chamber 100 that can be used for Figure 1 The angle of the elongate axis of each of the plurality of concave structures 520 is oriented at approximately 90 degrees relative to the radius of the reflector assembly 500. Thus, the concave structures 520 have a tangential orientation. However, the angles of the plurality of concave structures 520 can be arranged at other non-zero angles relative to the radius of the reflector assembly 500. In one embodiment, the plurality of concave structures 520 are arranged in a polar array with a common diameter outside the centerline 561 of the cylindrical body. The reflector assembly 500 can be made of a polymeric material such as (but not limited to) polyetheretherketone (“PEEK”), polyimide, or other suitable high-temperature polymers, using suitable polymer molding methods such as casting, injection molding, compression molding (e.g., powder pressing), and 3D printing (additive manufacturing), and coated with a reflective material (such as gold and aluminum, etc.). The central aperture 503 and the cutout 514 can be used to enable the upper temperature sensor 192 and / or other sensors to monitor Figure 1 the substrate 160 shown in

[0039] Figure 6 An embodiment of a reflector assembly 600 is shown that includes a bottom surface 615 of a cylindrical body, having a plurality of concave structures 620 and a lamp socket 691, the concave structures being shown as ear-shaped structures arranged in a polar array along a common diameter 657, 659, and the lamp socket 691 being within the ear-shaped structures. The ear-shaped structures can each receive at least one lamp socket 691 per ear portion. The lamp socket 691 is a typical lamp connector for powering Figure 1 the lamp (not shown in Figure 6 used in the processing chamber in Figure 6As shown, they are aligned in a polar array along the common diameters 657, 659. In another embodiment, the elephant ear-shaped structures are nested and aligned. The nested arrangement can be described as the outside of each elephant ear-shaped structure being spanned by a second elephant ear-shaped structure aligned radially outside the inner elephant ear-shaped structure. Thus, each elephant ear-shaped structure can be spanned by two separate elephant ear-shaped structures. In another embodiment, the reflector assembly 600 can have cutouts to enable the upper temperature sensor 192 and / or other sensors to monitor the substrate 160 as Figure 1 shown. The reflector assembly 600 can be made of a polymeric material such as (but not limited to) polyetheretherketone (“PEEK”), polyimide, or other suitable high-temperature polymers, using suitable polymer molding methods such as casting, injection molding, compression molding (e.g., powder pressing), and 3D printing (additive manufacturing), and coated with a reflective material (such as gold and aluminum, etc.).

[0040] Although the foregoing relates to embodiments of the present disclosure, other and further embodiments of the present disclosure can be designed without departing from the basic scope of the present disclosure, and its scope is determined by the appended claims.

Claims

1. A light reflector for use in a semiconductor processing chamber, the reflector comprising: a cylindrical body having an upper surface and a lower surface, the lower surface having a plurality of concave reflector structures disposed around a centerline of the cylindrical body; a cooling channel disposed in or on the cylindrical body; and a reflective coating disposed on the plurality of concave reflector structures.

2. The reflector of claim 1, wherein the cylindrical body is made of a polymer.

3. The reflector of claim 1, wherein the plurality of concave structures are radially aligned outside the centerline of the cylindrical body.

4. The reflector of claim 1, wherein the plurality of concave structures are arranged in a polar array with a common diameter.

5. The reflector of claim 1, wherein the cooling channel is embedded in the body, and the body has an inlet port and an outlet port disposed through the upper surface or a side surface of the cylindrical body.

6. The reflector of claim 1, the reflector further comprising: a housing extending through the cylindrical body and protruding to a distal end below the lower surface.

7. The reflector of claim 6, wherein the housing and the cylindrical body are formed from a single piece of material.

8. The reflector of claim 6, wherein the housing further includes a cooling channel.

9. The reflector of claim 1, the reflector further comprising: a housing extending through the cylindrical body and extending from below the lower surface to a distal end; and a baffle coupled to the distal end of the housing.

10. The reflector of claim 9, wherein the housing and the baffle are formed from a single piece of material.

11. The reflector of claim 9, wherein a gap is defined between the distal end of the housing and the baffle.

12. The reflector of claim 1, wherein the reflective coating includes a coating thickness selected to provide a reflectivity of 90% or higher.

13. The reflector of claim 1, wherein the reflective coating is gold or aluminum.

14. The reflector of claim 13, the reflector further including a protective magnesium fluoride layer disposed on top of the aluminum reflective coating.

15. The reflector of claim 2, wherein the selected polymer is PEEK or polyimide.

16. The reflector of claim 1, wherein the polymer is combined with a filler that increases the thermal conductivity of the polymer, and the filler includes one or more of boron nitride, aluminum nitride, silicon carbide, carbon-based structures, diamond, or metal powder.

17. A processing chamber adapted for use in semiconductor manufacturing, the processing chamber comprising: a chamber body having an internal space; a plurality of lamps; a substrate support disposed in the internal space, the substrate support including a support surface; A window, the window being disposed above the substrate support and at least partially defining the interior space; A reflector, the reflector being positioned to reflect light emitted from the lamp through the window and into the interior space, the reflector comprising: A cylindrical body having an upper surface and a lower surface, the lower surface having a plurality of concave reflector structures disposed around a centerline of the cylindrical body; A cooling channel disposed in or on the cylindrical body; and A reflective coating disposed on the plurality of concave reflector structures.

18. The processing chamber according to claim 17, wherein the reflector is made of a polymer.

19. The processing chamber according to claim 17, wherein the reflective coating is aluminum coated with gold or magnesium fluoride.

20. The processing chamber according to claim 17, the processing chamber further comprising a cooling channel disposed within the cylindrical body.

21. A processing chamber adapted for use in semiconductor manufacturing, the processing chamber comprising: A chamber body having an interior space; A plurality of lamps; A substrate support disposed in the interior space, the substrate support including a support surface; A window, the window being disposed above the substrate support and at least partially defining the interior space; A reflector, the reflector being positioned to reflect light emitted from the lamp through the window and into the interior space, the reflector comprising: A cylindrical body having an upper surface and a lower surface, the lower surface having a plurality of concave reflector structures disposed around a centerline of the cylindrical body, the cylindrical body being made of a polymer; A housing extending through the cylindrical body and protruding distally below the lower surface, the housing being made of a second polymer; Wherein the first polymer and the second polymer are combined with a filler that increases the thermal conductivity of the polymer, the filler comprising one or more of boron nitride, aluminum nitride, silicon carbide, carbon-based structures, diamond, or metal powder; and A baffle coupled to the distal end of the housing; A cooling channel disposed in or on the cylindrical body, a second cooling channel disposed in or on the housing, each cooling channel having an inlet port and an outlet port disposed through the upper surface or side surface of the cylindrical body and the housing; and A reflective coating disposed on the plurality of concave reflector structures, the reflective coating being gold or aluminum.

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