Compressible seal with reduced compression demand

Abstract

The present disclosure relates to a compressible metal seal having a cross-sectional shape including a rounded outer profile and a non-rounded inner profile. For the same amount of compression, this seal may require a lower compression force than the annular cross-sectional shape, and at the same amount of compression force, this seal may also exhibit a longer seal path length than the annular cross-sectional shape.

Description

Related Applications

[0001] The PCT application form is filed simultaneously with this specification as part of this application. Each application identified in the PCT application form filed simultaneously that this application claims the benefit or priority of is incorporated herein by reference in its entirety and for all purposes. Background Art

[0002] Devices that need to maintain one or more regions at a higher or lower pressure compared to adjacent regions may sometimes require the use of one or more seals in the interface between two separate components, which can form part of the boundary of the higher or lower pressure regions. There are various types of seals available, including O-rings, C-seals, W-seals, crushable metal seals, etc.

[0003] In devices where very strict requirements are placed on the potential leakage rate (e.g., semiconductor processing chambers that must maintain a very low vacuum environment and / or operate at elevated temperatures), certain types of seals may be required to provide a more resilient seal. A compressible metal O-ring is an example of such a seal and typically takes the form of a circular conduit loop that is shaped to follow the desired sealing path. When such a compressible metal seal is then compressed between two surfaces to seal the interface between these surfaces, the compression on the seal causes the circular conduit forming the seal to deform, e.g., by about 20%, and thereby generates high contact stresses between the top and bottom surfaces of the seal and the surfaces against which it is pressed. Summary of the Invention

[0004] Details of one or more implementations of the subject matter described in this specification are set forth in the accompanying drawings and the description below. Other features, aspects, and advantages will become apparent from the specification, the drawings, and the claims.

[0005] In some implementations, a device can be provided that includes a section of compressible material. The section of compressible material can have a consistent cross-sectional shape along a first path, the cross-sectional shape can have an outer profile and an inner profile, the outer profile can have a nominal circular shape with a radius of R, the inner profile can have a non-circular shape, the non-circular shape has a maximum dimension along a first reference axis that intersects the inner profile at two positions, the inner profile can have a transverse dimension along a second reference axis that is perpendicular to the first axis and is located midway between the two positions where the first reference axis intersects the inner profile, and the maximum dimension can be greater than the transverse dimension.

[0006] In some implementations, the maximum size can be greater than or equal to 1.6·R and less than or equal to 1.8·R, and the lateral size can be greater than or equal to 1.4·R and less than or equal to 1.6·R.

[0007] In some implementations, the maximum size can be about 1.8·R, and the lateral size can be about 1.4·R.

[0008] In some implementations, the maximum size can be about 1.8·R, and the lateral size can be about 1.5·R.

[0009] In some implementations, the maximum size can be about 1.8·R, and the lateral size can be about 1.6·R.

[0010] In some implementations, the maximum size can be about 1.7·R, and the lateral size can be about 1.4·R.

[0011] In some implementations, the maximum size can be about 1.7·R, and the lateral size can be about 1.5·R.

[0012] In some implementations, the maximum size can be about 1.7·R, and the lateral size can be about 1.6·R.

[0013] In some implementations, the maximum size can be about 1.6·R, and the lateral size can be about 1.4·R.

[0014] In some implementations, the maximum size can be about 1.6·R, and the lateral size can be about 1.5·R.

[0015] In some implementations, the internal profile can be symmetric about both the first reference axis and the second reference axis.

[0016] In some implementations, the internal profile can be divided into four quadrants by the first reference axis and the second reference axis, and the portions of the internal profile located in each quadrant can have a maximum tilt angle change of 90° or less.

[0017] In some implementations, the cross-sectional shape can have a first thickness and a second thickness. The first thickness is defined by the distance between the internal profile and the external profile along the first reference axis, and the second thickness is defined by the distance between the internal profile and the external profile along the second reference axis. And the second thickness can each be at least 25% greater than the first thickness.

[0018] In some such implementations, the second thickness can each be greater than the first thickness but not exceed 200%.

[0019] In some implementations, the inner contour can be entirely located within the region defined by the outer perimeter and the inner perimeter; the outer perimeter can be radially offset outward by 0.05·R from the reference inner contour; the inner perimeter can be radially offset inward by 0.05·R from the reference inner contour; and the first reference axis and the second reference axis can intersect at the intersection point. In some such implementations, the reference inner contour can be a closed spline passing through a set of eight points, the set of eight points including: two points located on both sides of the intersection point and positioned along the first reference axis, each point being located at a distance X from the intersection point; two points located on both sides of the intersection point and positioned along the second reference axis, each point being located at a distance Y from the intersection point; two points located on both sides of the intersection point and positioned along a third reference axis, each point being located at the distance Y from the intersection point, where the third reference axis is at an angle of 60° relative to the first reference axis; and two points located on both sides of the intersection point and positioned along a fourth reference axis, each point being located at the distance Y from the intersection point, where the fourth reference axis is a mirror image of the third reference axis relative to the second reference axis. Additionally, in such implementations, X is equal to 0.85·R, and Y is equal to 0.75·R.

[0020] In some implementations, the section can be a closed loop.

[0021] In some implementations, the section can follow a path that defines the closed loop, the path can define a reference plane, and the second reference axis can be nominally perpendicular to the reference plane.

[0022] In some such implementations, the path can be circular.

[0023] In some such implementations, the path can be obround.

[0024] In some implementations, the path can be rectangular and can have rounded corners.

[0025] In some implementations, there can be no solid material within the inner contour.

[0026] In some implementations, both the inner contour and the outer contour can be closed contours.

[0027] In some implementations, the compressible material can be a metal.

[0028] In some implementations, the compressible material can be Inconel-718, Hastelloy C22, SS-316L stainless steel, oxygen-free electronic (OFE) copper, or other similar metallic materials.

[0029] In some implementations, R can be a value greater than or equal to 1 mm and less than or equal to 25 mm.

[0030] In some implementations, the device can further include a first component of a semiconductor processing tool and a second component of the semiconductor processing tool, and a section of the compressible material can be compressed between the first component and the second component to form a sealing interface between the first component and the second component. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The following discussion refers to the following drawings; the drawings are not intended to limit the scope, but are provided merely for the convenience of the following discussion.

[0032] Figure 1 An exemplary circular metal O-ring seal is depicted.

[0033] Figure 2 An exemplary oval metal O-ring seal is depicted.

[0034] Figure 3 An exemplary rectangular metal O-ring seal is depicted.

[0035] Figure 4 A representative cross-sectional shape is depicted.

[0036] Figure 5 Depicts similar to Figure 4 but indicates the quadrants.

[0037] Figure 6 An example of the cross-sectional shape of the seal discussed herein is depicted, where the thickness between the inner profile and the outer profile is indicated.

[0038] Figure 7 An example of a region is depicted where the inner profile of the cross-sectional shape of the seal as disclosed herein can be defined.

[0039] Figure 8 Depicts eight examples of cross-sectional shapes having an inner profile that falls entirely within a region such as Figure 7 depicted.

[0040] Figure 9 A diagram of a semiconductor processing chamber for implementing the metal O-ring seal discussed herein is depicted.

[0041] The above drawings are presented for the purpose of facilitating understanding of the concepts discussed in the present disclosure and for depicting some implementations that fall within the scope of the present disclosure, but are not intended to be restrictive - implementations that are consistent with the present disclosure and not depicted in the drawings are still considered to fall within the scope of the present disclosure. DETAILED DESCRIPTION

[0042] As previously mentioned, one type of seal commonly used in semiconductor processing equipment is a compressible metal seal, such as a metal O-ring seal. The metal O-ring seal provides good performance against potential leakage at very low pressures (e.g., ultra-high vacuum below 10-10 mbar) and high temperatures (e.g., temperatures up to or exceeding 400 °C). Such a seal can be used to seal between two components of a semiconductor processing tool, such as between a chamber and a chamber lid, between a chamber and a valve body, between a chamber and a flange fitting, etc. However, metal O-ring seals can be difficult to install because the force required to permanently crush the metal O-ring seal to make it seal can actually be quite large. This poses a potential problem for installers because it can be difficult or time-consuming to properly compress such seals in the field during installation.

[0043] The inventors of the present case envision a novel metal O-ring seal that, due to its internal profile, requires only significantly less compressive force to install compared to an equivalent metal O-ring with a circular internal profile, while providing a higher radial seal path length, thus achieving a more effective seal. An additional benefit of this is a reduced likelihood that the metal O-ring seal (or a similar metal seal) may damage the components being sealed. For example, the compressive force required to install a conventional metal O-ring seal may be high enough that components made of a softer material (e.g., aluminum or copper) may actually be locally deformed by the compressive stress that may be necessary to deform the metal O-ring seal into its sealing configuration. For example, two components with two flat mating surfaces can be sealed together by a metal O-ring seal, where the metal O-ring seal is disposed in a corresponding groove in one of these flat surfaces. The dimensions of the groove can be designed such that its depth is slightly less than the thickness of the metal O-ring seal, so that when the two flat surfaces are clamped together and in contact, the metal O-ring seal is compressed to the desired amount, resulting in the permanent deformation of the metal O-ring seal required to achieve an effective seal.

[0044] However, if the grooved component is made of a softer material (e.g., aluminum), the local compressive force generated between the metal O-ring seal and the bottom of the groove may be sufficient to cause plastic deformation of the bottom of the groove, such as forming an indentation on the floor of the groove, which will actually deepen the depth of the groove. When the metal O-ring seal is removed, the indentation may still remain. Each new metal O-ring seal then placed in the same sealing interface and compressed will a) further permanently deform the floor of the groove, thereby increasing the depth of the groove, and / or b) be compressed to a lesser extent than the previously installed metal O-ring seal closest in time because of the increased depth of the groove. Eventually, the amount of compression that can be applied to the newly installed metal O-ring seal before the two flat surfaces are clamped together (thereby preventing further compression of the metal O-ring seal) may not be sufficient to achieve the desired compression amount required to provide an effective seal in the metal O-ring seal. Once this occurs, the grooved component needs to be replaced or repaired. Of course, similar problems can also affect components without grooves.

[0045] The reduction in clamping force required to form an effective seal in a metal O-ring seal discussed herein can reduce the risk of such damage / permanent deformation in softer materials, thereby for example allowing the metal O-ring seal to be used with parts made of aluminum or copper, where the risk of requiring repair or replacement of such parts when the seal is replaced is reduced.

[0046] Several examples of such seals are referred to Figures 1 to 3 and discussed below, and Figure 4 the specific characteristics and properties of such seals are then discussed.

[0047] Figure 1 A circular metal O-ring seal according to the present disclosure is depicted. As can be seen from Figure 1 part (a), the seal 102 follows a circular path 108. Figure 1 Part (b) depicts an isometric view of the seal 102, where a section 104a of the seal is cut and removed from the larger section 104b of the seal, thereby allowing the cross-sectional shape 106 of the seal 102 to be seen. Figure 1 Part (c) is a detailed view of the section 104a and the section 104b enclosed by the dashed line in part (b) of Figure 1 Part (b).

[0048] Figure 2 An obround metal O-ring seal according to the present disclosure is depicted. As can be seen from Figure 2 part (a), the seal 202 follows an obround path 208. Figure 2Part (b) depicts an isometric view of the seal 202, where a section 204a of the seal is cut and removed from a larger section 204b of the seal, thereby allowing the cross-sectional shape 206 of the seal 202 to be seen. Figure 2 Part (c) is a detailed view of the sections 204a and 204b enclosed by the dashed line in part (b). Figure 2 Part (b) depicts an isometric view of the seal 302, where a section 304a of the seal is cut and removed from a larger section 304b of the seal, thereby allowing the cross-sectional shape 306 of the seal 302 to be seen.

[0049] Figure 3 depicts a rectangular metal O-ring seal according to the present disclosure. As can be seen from Figure 3 part (a), the seal 302 follows a rectangular path 308 with rounded corners. Figure 3 Part (b) depicts an isometric view of the seal 302, where a section 304a of the seal is cut and removed from a larger section 304b of the seal, thereby allowing the cross-sectional shape 306 of the seal 302 to be seen. Figure 3 Part (c) is a detailed view of the sections 304a and 304b enclosed by the dashed line in part (b). Figure 3 Part (c) is a detailed view of the sections 304a and 304b enclosed by the dashed line in part (b).

[0050] It should be understood that Figures 1 to 3 all of the exemplary seals in have the same cross-sectional shape, and the cross-sectional shape is characterized by a circular outer contour and a coupled non-circular inner contour. Sections of a compressible material (e.g., metal) having such a cross-sectional shape (or a similar shape thereto) can be shaped to follow any desired two-dimensional path (assuming the path does not contain overly small corners), thereby fabricating a seal. Thus, in addition to Figures 1 to 3 the circular, oval, and rectangular shapes shown, there can be seal shapes that fall within the scope of the present disclosure. Such seals can generally have a consistent cross-sectional shape along their length (or at least along a portion of their length).

[0051] Figure 4 depicts a cross-sectional shape 406, which is representative of the cross-sectional shapes 106 to 306. As can be seen, the cross-sectional shape 406 has a circular outer contour 410 and has a radius "R". The cross-sectional shape 406 also has a non-circular inner contour 412. The inner contour 412 has a maximum dimension 414, and the maximum dimension 414 effectively defines a first reference axis 418. For example, there will be two positions 426a on the inner contour 412 that are the two points furthest apart along the inner contour 412. The first reference axis 418 is the axis passing through the two positions 426a, and the maximum dimension 414 is the distance between the two positions 426a.

[0052] The inner profile 412 may also have a lateral dimension 416 for measuring the distance between two positions 426b, where the two positions 426b mark the positions where the second reference axis 416 intersects the inner profile 412, where the second reference axis 420 is perpendicular to the first reference axis 418 and is located midway between these positions 426a.

[0053] Generally, the maximum dimension may be greater than the lateral dimension. For example, the maximum dimension may be greater than or equal to 1.6·R and less than or equal to 1.8·R, while the lateral dimension may be greater than or equal to 1.4·R and less than or equal to 1.6·R, but also less than the maximum dimension.

[0054] In some implementations, the maximum dimension may be approximately 1.8·R, and the lateral dimension may be approximately 1.4·R. In other implementations, the maximum dimension may be approximately 1.8·R, and the lateral dimension may be approximately 1.5·R. In yet other implementations, the maximum dimension may be approximately 1.8·R, and the lateral dimension may be approximately 1.6·R. In still further implementations, the maximum dimension may be approximately 1.7·R, and the lateral dimension may be approximately 1.4·R. In still other implementations, the maximum dimension may be approximately 1.7·R, and the lateral dimension may be approximately 1.5·R. In still other additional implementations, the maximum dimension may be approximately 1.7·R, and the lateral dimension may be approximately 1.6·R. In still further additional implementations, the maximum dimension may be approximately 1.6·R, and the lateral dimension may be approximately 1.4·R. In further implementations, the maximum dimension may be approximately 1.6·R, and the lateral dimension may be approximately 1.5·R.

[0055] In at least some implementations, the inner profile may be symmetric about the first reference axis and the second reference axis. The first reference axis 418 and the second reference axis 420 may also divide the inner profile 412 into four quadrants. For example, Figure 5 depicts a similar to Figure 4the cross-sectional shape, but the cross-sectional shapes of quadrants 544a to 544d are indicated. The first reference axis 518 and the second reference axis 520 define the boundaries between each of the quadrants 544a to 544d. It can be seen that the internal contour 512 is divided into four different parts, where each part is located in a different one of the quadrants 544a to 544d. The part of the internal contour 512 that lies within quadrant 544a is shown as a thick solid line, while the remaining part of the cross-sectional shape is shown as a dashed line. The part of the internal contour 512 that lies within quadrant 544a has also been enhanced to show several (five) rays that emanate from it tangentially. The first ray is tangent to the internal contour 512 at its intersection with the first reference axis 518 (and is thus perpendicular to the first reference axis 518), while the last ray is tangent to the internal contour 512 at its intersection with the second reference axis 520 (and is thus at a right angle with respect to the second reference axis 520). It will be observed that, in some implementations, the maximum change in the inclination angle of the part of the internal contour 512 that lies within quadrant 544a is 90°. It should be noted that the maximum change in the inclination angle for a curve segment refers to the difference between the maximum and minimum inclination angles experienced by the curve when the endpoints of the rays tangent to the curve move along the curve from one end of the curve to the other while remaining tangent to the curve. For example, the maximum change in the inclination angle along the segment of the internal contour 512 in quadrant 544a from point A to point B is 90°, while the maximum change in the inclination angle along the segment of the internal contour 512 in quadrants 544a and 544d from point A to point C is 180°.

[0056] In some implementations, the internal contour can be defined such that the wall thickness between the internal contour and the external contour exhibits specific characteristics at the positions where the first reference axis and the second reference axis intersect the cross-sectional shape.

[0057] Figure 6 depicts an example of the cross-sectional shape of the seal discussed herein, where the thickness between the internal contour and the external contour is indicated. From Figure 6 it can be seen that the cross-sectional shape 606 has an external contour 610 and an internal contour 612. The external contour 610 is circular and has a radius R, while the internal contour 612 is non-circular. Similar to the cross-sectional shape 406, the cross-sectional shape 606 can have a first reference axis 618, where the first reference axis 618 passes through two positions 626a that are separated by the maximum distance along the internal contour 612. A second reference axis 620 that is perpendicular to the first reference axis 618 and is located at the midpoint between these positions 626a can intersect the internal contour 612 at position 626b and intersect the first reference axis 618 at the intersection point 636.

[0058] It can be seen that at position 626a, there is a first thickness 628 between the inner contour 612 and the outer contour 610, and at position 626b, there is a second thickness 630 between the inner contour 612 and the outer contour 610. The first thickness 628 and the second thickness 630 are aligned with the first reference axis 618 and the second reference axis 620, respectively. In some implementations, these second thicknesses 630 can each be at least 25% greater than any one of these first thicknesses 628. In some additional such implementations, these second thicknesses 630 can each be greater than these first thicknesses 628 but not more than 200%.

[0059] In some implementations, the inner contour can fall within a region defined relative to a reference contour. Figure 7 An example of a region is depicted, within which the inner contour of the cross-sectional shape of a seal as disclosed herein can be confined. As Figure 7 can be seen, a cross-sectional shape 706 is depicted, which has a circular outer contour 710 and a radius R. The depicted cross-sectional shape 706 does not have the depicted inner contour, but has a depicted reference inner contour 738. The reference contour 738 is defined by a closed spline passing through eight points 742a to 742d (two of each point are depicted), which can be drawn, for example, in a computer-aided design program such as PTC Creo or SolidWorks. Both the outer perimeter 734 and the inner perimeter 736 can be offset radially outward or radially inward from the reference inner contour 738 by a common distance, such as 0.05·R, and can define a region 732 (which is shown as two differently shaded regions that enclose the reference inner contour 738 between them).

[0060] The closed spline of the reference internal profile 738 can have bilateral symmetry about the first reference axis 718 and about a second reference axis 720 perpendicular to the first reference axis. Two additional reference axes, namely a third reference axis 722 and a fourth reference axis 724, both pass through the intersection point 735 between the first reference axis 718 and the second reference axis 720, and both are at an angle of 30° with respect to the second reference axis 720 (or at an angle of 60° with respect to the first reference axis 718). Each pair of points 742a to 742d can be positioned along a corresponding one of the four reference axes 718 to 724, with the intersection point 736 located in the middle between them. For example, two points 742a can be positioned along the first reference axis 718 such that they are both at a distance X from the intersection point 736. At the same time, these points 742b can be positioned along the second reference axis 720 at a position at a distance Y from the intersection point 736. These points 742c and 742d can be similarly positioned along the third reference axis 722 and the fourth reference axis 724 respectively, with each point at a distance Y from the intersection point 736. In some implementations, the internal profile of such a cross-sectional shape of the seal according to the present disclosure can be any profile that completely falls within the region 732 when X is equal to 0.85·R and Y is equal to 0.75·R. Figure 8 Eight examples of cross-sectional shapes with internal profiles that completely fall within a region such as region 732 are depicted. It can be seen that there is some degree of freedom regarding the exact shape of the internal profile, but the advantages of reduced compression force required to set the seal and a longer seal path length can still be manifested in the various implementations depicted (although to a greater extent in some implementations compared to others).

[0061] In a typical metal O-ring seal, the cross-sectional shape of the seal (taken in a plane perpendicular to the path followed by the seal) is a perfect ring, i.e., it has a circular outer profile and a circular inner profile concentric with the outer profile. From the above discussion and examples, it is clear that the seals disclosed herein have non-circular inner profiles and exhibit specific geometric characteristics related to wall thickness, profile shape, and / or maximum dimensions. For the need for a lower compression force and a longer seal path length to set the seal, such seals can exhibit excellent performance. The seal path length refers to the shortest distance spanned when the seal and the surface that compresses it are in full contact, and the seal path length generally represents the shortest distance that a gas must cross in order to leak through the seal. The longer the seal path length, the more difficult it is for the gas to leak through the seal.

[0062] For example, for a seal having the same Figure 8The cross-sectional shape of the seal in Example C is simulated with a seal having a similar cross-sectional shape and a similar-sized seal with a circular inner profile (conventional compressible metal seal), where both seals have an outer profile diameter of 13 mm and are made of aluminum alloy with a density of 2700 kg / m³, a Young's modulus of 68 GPa, a Poisson's ratio of 0.33, and a coefficient of friction of 0.3. It is observed that when the seal having the cross-sectional shape of Example C in Figure 8 is subjected to a compressive force of approximately 7300 pounds per inch (compressive force per inch of seal length), the seal forms a seal path length that is almost 50% (48%) longer than the seal path length formed by a seal with a conventional cross-section under a load of approximately 8000 pounds per inch (compressive force per inch of seal length) (1.32 mm vs. 0.89 mm). At the same time, the seal having the cross-sectional shape of Example C in Figure 8 experiences a displacement of 0.02 inches under this load, while in contrast, a conventional seal experiences only a displacement of 0.004 inches. In other words, the seal having the cross-sectional shape of Example C in Figure 8 is capable of being compressed 400% more than a conventional compressible metal seal under a similar compressive load and achieves a seal path length that is approximately 50% longer. To achieve a similar seal path length, an exemplary conventional compressible metal seal would need to withstand a compressive load that is approximately 50% more than the seal having the cross-sectional shape of Example C in Figure 8 .

[0063] The seals discussed herein can be made of a variety of compressible materials (such as metals), which can be selected based on the requirements of a particular environment, such as corrosion-resistant, high-heat-tolerant materials, etc. For example, such seals can be made of materials such as Inconel-718, Hastelloy C22, SS-316L stainless steel, oxygen-free electronic (OFE) copper, etc. In some implementations, the interior of such a seal can be hollow, i.e., there can be no solid material within the inner profile.

[0064] The outer diameter of the cross-sectional shape of the seals discussed herein can be selected to allow any one of a variety of diameters, for example, between 3 mm and 25 mm, for example, for the outer profile of the cross-sectional shape of the seal.

[0065] As described above, for example, the seals discussed herein can be used to seal the interface between components used in semiconductor processing equipment. Figure 9FIG. depicting a semiconductor processing chamber for implementing the metal O-ring seals discussed herein. For example, semiconductor processing chamber 903 may include a body 903a (e.g., a first component of a semiconductor processing tool) and a lid 903b (e.g., a second component of a semiconductor processing tool), where the lid 903b may be fastened to the body 903a using a plurality of fasteners, such as screws (not shown). A metal O-ring seal 902, such as having the cross-section described above, may be installed in the interface between the body 903a and the lid 903b. A pedestal 905 may be located within the sealed environment of the processing chamber 903 and may be used to support a semiconductor wafer 901 within the processing chamber 903 during a wafer processing operation. Of course, it should be understood that such metal O-ring seals may be used at any sealable interface of such a semiconductor processing tool, including, for example, between a valve and a housing, between a valve and a manifold, a conduit and a housing, between a pump and a housing or a conduit, etc.

[0066] Any ordinal numbers (if any) used in this disclosure and the claims, such as (a), (b), (c) … or (1), (2), (3) … or the like, should be understood not to express any particular order or sequence unless a specific order or sequence is clearly indicated. For example, if there are three steps labeled (i), (ii), and (iii), it should be understood that the steps may be performed in any order (or even simultaneously, if there are no other restrictions) unless otherwise specified. For example, if step (ii) involves the operation of an element produced in step (i), step (ii) may be considered to occur at some point after step (i). Similarly, if step (i) involves the operation of an element produced in step (ii), the opposite should be understood. It should also be understood that the use of the ordinal number “first” (e.g., “first article”) herein should not be construed as implicitly or inherently suggesting the existence of a “second” case (e.g., “second article”).

[0067] It should be understood that phrases such as “for each of one or more <items>,” “each of one or more <items>,” etc., if used herein, include both single-item groups and multi-item groups, i.e., the use of the phrase “for each of …” is meant to refer to each item in any group of items being referenced, as it is used in programming languages. For example, if the group of items being referenced is a single item, “each” will refer only to that single item (although the dictionary definition of “each” often defines the term as referring to “each of two or more things”), and does not imply that there must be at least two of these items. Similarly, the terms “set” or “subset” by themselves should not be considered to necessarily encompass multiple items—it should be understood that a set or subset may cover only one member or multiple members (unless the context otherwise indicates).

[0068] Unless otherwise specified, when the term "between" as used herein is used in connection with a numerical range, it is to be understood to include the starting and ending values of the range. For example, between 1 and 5 is to be understood to include the numbers 1, 2, 3, 4, and 5, and not just the numbers 2, 3, and 4.

[0069] The term "operatively connected" is to be understood to refer to the state in which two components and / or systems are connected directly or indirectly such that, for example, at least one component or system can control the other. For example, a controller may be described as being operatively connected to a resistive heating unit, which includes a controller connected to a sub-controller of the resistive heating unit, the sub-controller being electrically connected to a relay configured to controllably connect or disconnect the resistive heating unit from a power source capable of providing electrical power that can power the resistive heating unit to produce a desired degree of heating. Since current is involved, the controller itself may not be able to directly provide such power to the resistive heating unit, but it should be understood that the controller is still operatively connected to the resistive heating unit.

[0070] It should be understood that the examples and embodiments described herein are for illustrative purposes only, and those skilled in the art will envision various modifications or variations based thereon. Although various details have been omitted for clarity, various design alternatives can be implemented. Thus, the current examples are considered illustrative rather than restrictive, and the present disclosure is not limited to the details presented herein, but can be modified within the scope of the present disclosure.

[0071] It should be understood that although the above disclosure focuses on one or more specific exemplary implementations, it is not limited to the examples discussed, but also applies to similar variations and mechanisms, and such similar variations and mechanisms are also considered to fall within the scope of the present disclosure.

Claims

1. A device, wherein: Comprising: A section of compressible material, wherein: The section of compressible material has a consistent cross-sectional shape along a first path, The cross-sectional shape has an outer contour and an inner contour, The outer contour has a nominal circular shape with a radius of R, The inner contour has a non-circular shape that has a maximum dimension along a first reference axis, and the first reference axis intersects the inner contour at two positions, The inner contour has a transverse dimension along a second reference axis that is perpendicular to the first axis and is located midway between the two positions where the first reference axis intersects the inner contour, and The maximum dimension is greater than the transverse dimension.

2. The device according to claim 1, Wherein: The maximum dimension is greater than or equal to 1.6·R and less than or equal to 1.8·R, and The transverse dimension is greater than or equal to 1.4·R and less than or equal to 1.6·R.

3. The device according to claim 1, Wherein, The maximum dimension is approximately 1.8·R and the transverse dimension is approximately 1.4·R.

4. The device according to claim 1, Wherein, The maximum dimension is approximately 1.8·R and the transverse dimension is approximately 1.5·R.

5. The device according to claim 1, Wherein, The maximum dimension is approximately 1.8·R and the transverse dimension is approximately 1.6·R.

6. The device according to claim 1, Wherein, The maximum dimension is approximately 1.7·R and the transverse dimension is approximately 1.4·R.

7. The device according to claim 1, Wherein, The maximum dimension is approximately 1.7·R and the transverse dimension is approximately 1.5·R.

8. The device according to claim 1, Wherein, The maximum dimension is approximately 1.7·R and the transverse dimension is approximately 1.6·R.

9. The device according to claim 1, Wherein, The maximum dimension is approximately 1.6·R and the transverse dimension is approximately 1.4·R.

10. The device according to claim 1, Wherein, The maximum dimension is approximately 1.6·R and the transverse dimension is approximately 1.5·R.

11. The device according to any one of the preceding claims, Wherein, The inner contour is symmetric about both the first reference axis and the second reference axis.

12. The device according to any one of the preceding claims, Wherein: The inner contour is divided into four quadrants by the first reference axis and the second reference axis, and The portions of the inner contour located in each quadrant have a maximum tilt angle change of 90° or less.

13. The device according to any one of the preceding claims, Wherein: The cross-sectional shape has a first thickness and a second thickness, the first thickness is defined by the distance between the inner contour and the outer contour along the first reference axis, and the second thickness is defined by the distance between the inner contour and the outer contour along the second reference axis, and Each of the second thicknesses is at least 25% greater than the first thickness.

14. The device according to claim 13, Wherein, The respective second thicknesses are each greater than the first thickness but not more than 200%.

15. The apparatus according to any one of the preceding claims, wherein: The internal profile is entirely located within the region defined by the outer peripheral edge and the inner peripheral edge; The outer peripheral edge is radially offset outward by 0.05·R from the reference internal profile; The inner peripheral edge is radially offset inward by 0.05·R from the reference internal profile; The first reference axis and the second reference axis intersect at an intersection point; The reference internal profile is a closed spline passing through a set of eight points, the set of eight points comprising: Two points located on opposite sides of the intersection point and positioned along the first reference axis, each point being located at a distance X from the intersection point, Two points located on opposite sides of the intersection point and positioned along the second reference axis, each point being located at a distance Y from the intersection point, Two points located on opposite sides of the intersection point and positioned along a third reference axis, each point being located at the distance Y from the intersection point, wherein the third reference axis is at an angle of 60° with respect to the first reference axis, and Two points located on opposite sides of the intersection point and positioned along a fourth reference axis, each point being located at the distance Y from the intersection point, wherein the fourth reference axis is a mirror image of the third reference axis with respect to the second reference axis; and X is equal to 0.85·R and Y is equal to 0.75·R.

16. The apparatus according to claim 15, wherein, The section is a closed loop.

17. The apparatus according to claim 16, wherein: The section follows a path defining the closed loop, The path defines a reference plane, and The second reference axis is nominally perpendicular to the reference plane.

18. The apparatus according to claim 17, wherein, The path is circular.

19. The apparatus according to claim 17, wherein, The path is oval.

20. The apparatus according to claim 17, wherein, The path is rectangular with rounded corners.

21. The apparatus according to any one of claims 16 to 20, further comprising: A first component of a semiconductor processing tool; and A second component of the semiconductor processing tool, wherein the section of the compressible material is compressed between the first component and the second component, thereby forming a sealing interface between the first component and the second component.

22. The apparatus according to any one of the preceding claims, wherein, There is no solid material within the internal profile.

23. The apparatus according to any one of the preceding claims, wherein, Both the internal profile and the external profile are closed profiles.

24. The apparatus according to any one of the preceding claims, wherein, The compressible material is a metal.

25. The apparatus according to any one of the preceding claims, wherein, The compressible material is Inconel-718, Hastelloy C22, SS-316L stainless steel, oxygen-free electronic (OFE) copper, or other similar metallic materials.

26. The apparatus according to any one of the preceding claims, wherein, R is a value greater than or equal to 1 mm and less than or equal to 25 mm.

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