Microwave chip screening and testing device and method

Abstract

The invention discloses a microwave chip screening and testing device and method, relates to the technical field of chip screening, and aims to solve the technical problem that existing microwave chip screening accuracy is not high enough. A chip detection mechanism, a pitch changing mechanism, a dust particle raising and sucking mechanism and a vacuum suction cup are arranged on the Z-axis moving mechanism, and a plurality of double-state channel assemblies are made to synchronously form a wind-benefiting particle raising state or a concentrated back-sucking state through a switching assembly, a connecting rod assembly and a linkage assembly of the dust particle raising and sucking mechanism. Tiny dust stubborn on the surface of the chip can be thoroughly blown and scattered in a wind particle raising state, so that the dust is ensured to be separated from the surface of the chip; according to the chip cleaning device, the chip cleaning device can be used for cleaning the chip in a centralized back-suction state during air suction and rapidly collecting raised dust in a centralized manner, so that secondary pollution is avoided, the cleanliness of the chip is guaranteed, good basic conditions are provided for subsequent processing, packaging and other procedures of the chip, and the overall product quality is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of chip screening, and more specifically, to a microwave chip screening test device and method. Background Art

[0002] In today's era of rapid development of electronic technology, microwave chips are core components in many high-end fields such as microwave communications, radar detection, and electronic countermeasures, and their quality control is extremely important.

[0003] As the microwave chip manufacturing process becomes more and more sophisticated, the requirements for its screening process are becoming more and more stringent. Existing chip screening devices have exposed many difficult problems when facing the task of microwave chip screening. On the one hand, microwave chips are inevitably exposed to air during transportation. Since it is difficult to achieve absolute dust-free production environment, dust particles are very easy to adhere to the surface of the chip. The widely used sorting test heads currently use capacitive contact to accurately test chip performance. This high-precision testing method has extremely high requirements for the cleanliness of the chip surface. Once dust particles are attached, they will interfere with the electric field distribution of the capacitor test, causing deviations in the test screening results, which will lead to errors in the actual screening, seriously affecting the yield rate, and greatly increasing production costs and quality risks of subsequent products.

[0004] On the other hand, microwave chips have significantly different material properties from traditional silicon chips. Microwave chips often use materials such as gallium arsenide and gallium nitride. These materials give the chip excellent high-frequency performance, but also make it more brittle. In the process of traditional fixture handling, if the mechanical external force applied by the fixture is not properly controlled, it is very easy to cause chip damage. This chip damage caused by improper handling not only causes direct chip loss, but also further pollutes the screening environment due to problems such as residual debris, aggravating the risk of dust pollution, forming a vicious circle, and bringing many obstacles to the efficient and accurate screening of microwave chips. In view of this, we propose a microwave chip screening test device and method. Summary of the invention

[0005] The object of the present invention is to provide a microwave chip screening test device and method to solve the technical problem that the existing microwave chip screening accuracy is not high enough.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions: a microwave chip screening and testing device, comprising a screening platform, a dustproof shell is provided on the top of the screening platform, an X-axis moving mechanism is provided on the screening platform, a Y-axis moving mechanism is provided on the X-axis moving mechanism, a Z-axis moving mechanism is provided on the Y-axis moving mechanism, a chip loading and unloading mechanism is also provided on the screening platform, a chip detection mechanism is provided at the output end of the Z-axis moving mechanism, a pitch-changing mechanism is also provided at the output end of the Z-axis moving mechanism, a dust particle lifting and suction mechanism is provided on the pitch-changing mechanism, and a vacuum suction cup is also provided on the pitch-changing mechanism;

[0007] The dust particle lifting and suction mechanism includes a closed tube shell, a two-state channel component, a switching component, a connecting rod component, a linkage component and a blowing and suction pump group. The closed tube shell is linearly connected to the bottom end of the variable pitch mechanism at equal intervals. The two-state channel component is arranged inside the closed tube shell. The switching component is arranged at a position of the closed tube shell close to the two-state channel component. The connecting rod component is rotatably connected to the several closed tube shells. The linkage component is arranged on the connecting rod component. The blowing and suction pump group is arranged at the output end of the Z-axis moving mechanism and connected to the variable pitch mechanism.

[0008] Through the switching assembly, the connecting rod assembly and the linkage assembly, a plurality of the dual-state channel assemblies are caused to synchronously form a wind-assisted particle-raising state or a concentrated back-absorption state.

[0009] Preferably, the variable distance mechanism includes a bearing assembly, a fixed assembly, a sliding assembly and a telescopic connecting rod, the bearing assembly is arranged at the output end of the Z-axis moving mechanism, the fixed assembly is arranged on the bearing assembly, the sliding assembly is slidably arranged on the fixed assembly, the telescopic connecting rod is arranged on the sliding assembly, the closed tube shell and the vacuum suction cup are connected to the bottom end of the sliding assembly, and the blowing and suction pump group is arranged on the bearing assembly.

[0010] Preferably, the fixing assembly comprises a sliding rod, a fixing block and a cylinder, the sliding rod is symmetrically arranged on the bearing assembly, the fixing block is hoisted on the bearing assembly, the cylinder is arranged on the fixing block, and a plurality of sliding assemblies are slidingly sleeved on the sliding rod.

[0011] Preferably, the sliding assembly includes a moving block, a sliding hole, an air cavity and a joint, the sliding hole is symmetrically opened on the moving block, the moving block is slidably sleeved on the sliding rod through the sliding hole, the air cavity is symmetrically opened on the moving block, the joint is symmetrically arranged at the end of the moving block, the joint is connected to the air cavity, the vacuum suction cup is connected to one of the air cavities, and the closed tube shell is connected to the other air cavity.

[0012] Preferably, the closed tube shell includes a blowing and suction tube and a closed shell, the blowing and suction tube is connected to one of the ends of the air cavity, the closed shell is connected to the bottom end of the blowing and suction tube, and the two-state channel assembly, the switching assembly and the connecting rod assembly are all arranged on the closed shell.

[0013] Preferably, the dual-state channel assembly comprises a fixed disk, a long hole, a rotating block, a limiting rod, a slider, a rotating disk and a slide slot, the fixed disk is fixedly arranged on the closed shell, the long holes are arranged on the fixed disk in a circular shape with equal intervals, the rotating disk is rotatably arranged on the inner top wall of the closed shell near the bottom end of the fixed disk, the slide slot is arranged on the top end of the rotating disk, the limiting rod is arranged on the top end of the rotating block, the slider is arranged on the bottom end of the rotating block, the limiting rod is movably inserted into the long hole at one end away from the rotating block, and the slider is movably inserted into the slide slot at one end away from the rotating block;

[0014] The rotating block is provided with a plurality of gas-benefiting segmentation holes.

[0015] Preferably, the switching assembly includes a servo motor, a rotating rod and an external tooth groove. The servo motor is arranged on the closed shell at a position close to the top side of the fixed disk. The rotating rod is rotatably inserted on the closed shell. One end of the rotating rod is connected to the output end of the servo motor. The external tooth groove is opened at the end of the rotating rod away from the servo motor, and the external tooth groove is meshingly connected to the outer wall of the rotating disk.

[0016] Preferably, the connecting rod assembly comprises a connecting rod and a rotating shaft, the two connecting rods are hingedly connected to each other, one end of the connecting rod away from the hinge point is rotatably connected to the closed shell, and the rotating shaft is rotatably arranged at both ends of the connecting rod;

[0017] The linkage assembly comprises a sprocket and a chain. The sprockets are sleeved on the rotating shaft, and the chain is meshingly sleeved on the two sprockets.

[0018] Preferably, the blowing and suction pump group includes an air pump, a soft air tube and a telescopic hose. The air pump is symmetrically arranged at the output end of the Z-axis moving mechanism. The soft air tubes are all connected to the air pump. The telescopic hoses are connected to several of the joints. Several of the soft air tubes are connected to one end of the telescopic hose away from the joint at one end away from the air pump.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The present invention improves the structure of the existing chip screening device by arranging a three-axis moving mechanism on the screening table, and arranging a chip detection mechanism, a variable pitch mechanism, a dust particle lifting and suction mechanism and a vacuum suction cup on the Z-axis moving mechanism. Through the switching component, the connecting rod component and the linkage component of the dust particle lifting and suction mechanism, several of the dual-state channel components are caused to synchronously form a favorable wind lifting state or a concentrated back suction state. According to the characteristics of the microwave chip, when blowing, the favorable wind lifting state can completely blow up and scatter the dust stubbornly attached to the chip surface to ensure that the dust is separated from the chip surface; the concentrated back suction state during suction can quickly collect the raised dust to avoid secondary pollution, which not only ensures the cleanliness of the chip, but also provides good basic conditions for subsequent processing, packaging and other processes of the chip, thereby improving the overall product quality.

[0021] 2. In the present invention, the cylinder of the fixed component pushes the first moving block, so that the moving block slides on the sliding rod through the sliding hole. Since the several moving blocks are hingedly connected by the telescopic connecting rod, when the cylinder strokes, the several moving blocks are linearly separated at equal intervals on the sliding rod. When the cylinder returns, the several moving blocks are linearly merged at equal intervals to achieve the effect of variable pitch. Compared with traditional variable pitch components, the variable pitch mechanism in the present invention has a more compact longitudinal space. When used in the chip screening device, it greatly saves the area occupied by the chip screening device in the vertical direction and improves the overall space utilization of the equipment.

[0022] 3. In the present invention, the servo motor is driven to drive the rotating rod to rotate, and the rotating rod drives the external tooth groove to rotate. The external tooth groove is meshed and connected to the tooth groove opened on the outer wall of the rotating disk, driving the rotating disk to rotate, and the rotating disk drives the slide groove opened thereon to rotate. The rotation of the slide groove causes the slider movably inserted thereon to slide, and the slider drives the rotating block and the limit rod to move. The limit rod slides in the long hole, and the rotating block arranged at equal intervals in an annular shape realizes two states of rotation opening or closing. When closed, the blowing and suction pump group is driven to blow air, and the gas passes through a number of gas-benefiting segmentation holes opened on the rotating block to divide the gas into relatively small individuals. Since the gas follows the Bernoulli equation during the flow process, that is, the conservation of total mechanical energy. When the airflow passes through the flow channel that contracts and expands through the gas-benefiting segmentation hole, the flow channel cross-section becomes smaller, the flow rate increases, and the pressure decreases; at the outlet of the small hole, the gas is balanced energy, and a relatively uniform, small and stable flow rate airflow pattern will be formed; this stable and small airflow can not only accurately act on the tiny area of ​​the chip to prevent damage to the precise structure of the chip, but also enhance the disturbance of the dust particles and improve the cleaning efficiency.

[0023] 4. In the present invention, when the servo motor is driven to drive the rotating rod to rotate in the opposite direction, the rotating rod drives the outer tooth groove to rotate, and the outer tooth groove is meshed and connected with the tooth groove opened on the outer wall of the rotating disk, driving the rotating disk to rotate, and the rotating disk drives the slide groove opened thereon to rotate, and the rotation of the slide groove causes the slider movably inserted thereon to slide, and the slider drives the rotating block and the limit rod to move, and the limit rod slides in the long hole, and the rotating blocks arranged in annular shapes with equal spacing are rotated to open the state, and the dust particles raised by the air are filled in the closed shell. At this time, the blowing and suction pump group is driven to suck out the dust particles, thereby avoiding the dust from spreading to the surrounding environment, and the subsequent suction operation quickly and concentratedly sucks the dust through the blowing and suction pipe, effectively preventing the dust from settling on the chip or other parts of the device again, and eliminating the risk of secondary pollution.

[0024] 5. In the present invention, two adjacent closed shells are hingedly connected to each other through two connecting rods. When the closed shells are separated and the pitch is changed, the two connecting rods are bent or straightened due to the hinged connection between the two connecting rods. When the servo motor is driven, the output end of the servo motor simultaneously drives the sprocket to rotate, and the chain pulls the two sprockets to rotate. Since the connecting rods are provided with sprockets and chains, multiple sprockets synchronously drive multiple rotating shafts to rotate synchronously, realizing the function of synchronous regulation. There is no need to use multiple motors to achieve control, which not only saves energy consumption, but also simplifies the complexity of the control system, further improving the quality and efficiency of chip screening. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 It is a schematic diagram of the internal structure of the present invention;

[0027] Figure 3 It is a schematic diagram of the structure of the screening table, X-axis moving mechanism, Y-axis moving mechanism, Z-axis moving mechanism, chip loading and unloading mechanism, chip detection mechanism, variable pitch mechanism and dust particle lifting and suction mechanism of the present invention;

[0028] Figure 4 It is a schematic diagram of the chip detection mechanism, the distance changing mechanism and the dust particle suction mechanism of the present invention;

[0029] Figure 5 It is a schematic diagram of the structure of the variable distance mechanism and the dust particle lifting and suction mechanism of the present invention;

[0030] Figure 6 It is a schematic diagram of the structure of the variable distance mechanism, the dust particle lifting and suction mechanism and the vacuum suction cup of the present invention;

[0031] Figure 7 It is a structural schematic diagram of the fixed assembly, the sliding assembly and the telescopic connecting rod of the present invention from one perspective;

[0032] Figure 8It is a structural schematic diagram of the fixed assembly, the sliding assembly and the telescopic connecting rod of the present invention from another perspective;

[0033] Fig. 9 It is a schematic diagram of the variable distance mechanism, dust particle lifting and suction mechanism and the bottom surface structure of the vacuum suction cup of the present invention;

[0034] Fig.10 It is a cross-section of the sliding assembly and a schematic diagram of the structure of the dust particle suction mechanism of the present invention;

[0035] Fig.11 It is a schematic diagram of the top surface structure of the dust particle lifting and suction mechanism of the present invention;

[0036] Fig.12 It is a schematic diagram of the structure of the closed shell section, the dual-state channel assembly, the switching assembly, the connecting rod assembly and the linkage assembly of the present invention;

[0037] Fig.13 It is a schematic diagram of the split structure of the dual-state channel component of the present invention;

[0038] Fig.14 It is a schematic diagram of the bottom surface structure of the rotating block of the present invention;

[0039] Fig.15 For the present invention Fig.11 A magnified view of the structure in Figure 2.

[0040] Description of the numbers in the figure:

[0041] 1. Screening table; 2. Dust-proof shell; 3. X-axis moving mechanism; 4. Y-axis moving mechanism; 5. Z-axis moving mechanism; 6. Chip loading and unloading mechanism; 7. Chip detection mechanism; 8. Pitch-changing mechanism; 9. Dust particle suction mechanism; 10. Vacuum suction cup;

[0042] 801, bearing assembly; 802, fixing assembly; 803, sliding assembly; 804, telescopic connecting rod;

[0043] 901, closed tube shell; 902, dual-state channel assembly; 903, switching assembly; 904, connecting rod assembly; 905, linkage assembly; 906, blowing and suction pump assembly;

[0044] 8021, slide bar; 8022, fixed block; 8023, cylinder;

[0045] 8031, moving block; 8032, sliding hole; 8033, air cavity; 8034, joint;

[0046] 9011, blowing and suction tube; 9012, closed shell;

[0047] 9021, fixed plate; 9022, long hole; 9023, rotating block; 9024, limit rod; 9025, slider; 9026, rotating plate; 9027, slide groove; 9028, gas separation hole;

[0048] 9031, servo motor; 9032, rotating rod; 9033, external tooth groove;

[0049] 9041, connecting rod; 9042, rotating shaft;

[0050] 9051, sprocket; 9052, chain;

[0051] 9061. Air pump; 9062. Soft air tube; 9063. Telescopic hose. DETAILED DESCRIPTION

[0052] like Figures 1 to 15 As shown, the present invention relates to a microwave chip screening and testing device, comprising a screening platform 1, a dustproof shell 2 is provided on the top of the screening platform 1, an X-axis moving mechanism 3 is provided on the screening platform 1, a Y-axis moving mechanism 4 is provided on the X-axis moving mechanism 3, a Z-axis moving mechanism 5 is provided on the Y-axis moving mechanism 4, a chip loading and unloading mechanism 6 is also provided on the screening platform 1, a chip detection mechanism 7 is provided at the output end of the Z-axis moving mechanism 5, a pitch-changing mechanism 8 is also provided at the output end of the Z-axis moving mechanism 5, a dust particle lifting and suction mechanism 9 is provided on the pitch-changing mechanism 8, and a vacuum suction cup 10 is also provided on the pitch-changing mechanism 8;

[0053] The dust particle lifting and suction mechanism 9 includes a closed tube shell 901, a two-state channel component 902, a switching component 903, a connecting rod component 904, a linkage component 905 and a blowing and suction pump group 906. The closed tube shell 901 is linearly connected to the bottom end of the pitch-changing mechanism 8 at equal intervals. The two-state channel component 902 is arranged inside the closed tube shell 901. The switching component 903 is arranged at a position of the closed tube shell 901 close to the two-state channel component 902. The connecting rod component 904 is rotatably connected to a plurality of closed tube shells 901. The linkage component 905 is arranged on the connecting rod component 904. The blowing and suction pump group 906 is arranged at the output end of the Z-axis moving mechanism 5 and connected to the pitch-changing mechanism 8.

[0054] Through the switching component 903, the connecting rod component 904 and the linkage component 905, a plurality of dual-state channel components 902 are caused to synchronously form a wind-assisted particle-raising state or a concentrated back-absorption state.

[0055] The present invention improves the structure of the existing chip screening device by arranging a three-axis moving mechanism on the screening table 1, and arranging a chip detection mechanism 7, a variable pitch mechanism 8, a dust particle lifting and suction mechanism 9 and a vacuum suction cup 10 on the Z-axis moving mechanism 5. Through the switching component 903, the connecting rod component 904 and the linkage component 905 of the dust particle lifting and suction mechanism 9, a plurality of dual-state channel components 902 are caused to synchronously form a favorable wind lifting state or a concentrated back suction state. According to the characteristics of the microwave chip, when blowing, the favorable wind lifting state can completely blow up and scatter the dust stubbornly attached to the chip surface to ensure that the dust is separated from the chip surface; the concentrated back suction state during suction can quickly collect the raised dust to avoid secondary pollution, which not only ensures the cleanliness of the chip, but also provides good basic conditions for subsequent processing, packaging and other processes of the chip, thereby improving the overall product quality.

[0056] In an embodiment of the present invention, the variable pitch mechanism 8 includes a bearing assembly 801, a fixed assembly 802, a sliding assembly 803 and a telescopic link 804, the bearing assembly 801 is arranged at the output end of the Z-axis moving mechanism 5, the fixed assembly 802 is arranged on the bearing assembly 801, the sliding assembly 803 is slidably arranged on the fixed assembly 802, the telescopic link 804 is arranged on the sliding assembly 803, the closed tube shell 901 and the vacuum suction cup 10 are connected to the bottom end of the sliding assembly 803, and the blowing and suction pump group 906 is arranged on the bearing assembly 801.

[0057] In an embodiment of the present invention, the fixing component 802 includes a sliding rod 8021, a fixing block 8022 and a cylinder 8023. The sliding rod 8021 is symmetrically arranged on the supporting component 801, the fixing block 8022 is hoisted on the supporting component 801, the cylinder 8023 is arranged on the fixing block 8022, and a plurality of sliding components 803 are slidably sleeved on the sliding rod 8021.

[0058] In an embodiment of the present invention, the sliding assembly 803 includes a moving block 8031, a sliding hole 8032, an air cavity 8033 and a joint 8034. The sliding hole 8032 is symmetrically opened on the moving block 8031. The moving block 8031 ​​is slidably sleeved on the sliding rod 8021 through the sliding hole 8032. The air cavity 8033 is symmetrically opened on the moving block 8031. The joint 8034 is symmetrically arranged at the end of the moving block 8031. The joint 8034 is connected to the air cavity 8033. The vacuum suction cup 10 is connected to one of the air cavities 8033, and the closed tube shell 901 is connected to the other air cavity 8033.

[0059] like Figures 6 to 9As shown, in the present invention, the cylinder 8023 of the fixed component 802 pushes the first moving block 8031, so that the moving block 8031 ​​slides on the sliding rod 8021 through the sliding hole 8032. Since the plurality of moving blocks 8031 ​​are hingedly connected by the telescopic connecting rod 804, when the cylinder 8023 strokes, the plurality of moving blocks 8031 ​​are linearly separated at equal intervals on the sliding rod 8021. When the cylinder 8023 returns, the plurality of moving blocks 8031 ​​are linearly merged at equal intervals to achieve a variable pitch effect. Compared with traditional variable pitch components, the variable pitch mechanism 8 in the present invention has a more compact longitudinal space. When used in a chip screening device, it greatly saves the area occupied by the chip screening device in the vertical direction, thereby improving the overall space utilization of the equipment.

[0060] In the embodiment of the present invention, the closed tube shell 901 includes a blowing and suction pipe 9011 and a closed shell 9012. The blowing and suction pipe 9011 is connected to one end of the air cavity 8033. The closed shell 9012 is connected to the bottom end of the blowing and suction pipe 9011. The two-state channel component 902, the switching component 903 and the connecting rod component 904 are all arranged on the closed shell 9012. Figure 5 and Fig.10 In the present invention, the blowing force or suction force generated by driving the blowing and suction pump group 906 is transmitted to the closed shell 9012 through the blowing and suction pipe 9011, and the blowing and suction function is realized in the closed shell 9012.

[0061] As another embodiment of the present invention, the dual-state channel assembly 902 includes a fixed disk 9021, a long hole 9022, a rotating block 9023, a limit rod 9024, a slider 9025, a rotating disk 9026 and a slide groove 9027. The fixed disk 9021 is fixedly arranged on the closed shell 9012, the long holes 9022 are annularly arranged at equal intervals on the fixed disk 9021, and the rotating disk 9026 is rotatably arranged on the inner top wall of the closed shell 9012 near the fixed disk 9026. 021, a slide groove 9027 is provided at the top of the rotating disk 9026, a limiting rod 9024 is provided at the top of the rotating block 9023, a sliding block 9025 is provided at the bottom of the rotating block 9023, one end of the limiting rod 9024 away from the rotating block 9023 is movably inserted in the long hole 9022, and one end of the sliding block 9025 away from the rotating block 9023 is movably inserted in the slide groove 9027; a plurality of gas separation holes 9028 are provided on the rotating block 9023.

[0062] As another embodiment of the present invention, the switching component 903 includes a servo motor 9031, a rotating rod 9032 and an external tooth groove 9033. The servo motor 9031 is arranged on the closed shell 9012 at a position close to the top side of the fixed disk 9021. The rotating rod 9032 is rotatably inserted on the closed shell 9012. One end of the rotating rod 9032 is connected to the output end of the servo motor 9031. The external tooth groove 9033 is opened at the end of the rotating rod 9032 away from the servo motor 9031. The external tooth groove 9033 is meshed and connected to the outer wall of the rotating disk 9026.

[0063] In the present invention, the servo motor 9031 is driven to drive the rotating rod 9032 to rotate, and the rotating rod 9032 drives the external tooth groove 9033 to rotate. The external tooth groove 9033 is meshed and connected to the tooth groove opened on the outer wall of the rotating disk 9026, driving the rotating disk 9026 to rotate, and the rotating disk 9026 drives the slide groove 9027 opened thereon to rotate. The rotation of the slide groove 9027 causes the slider 9025 movably inserted thereon to slide, and the slider 9025 drives the rotating block 9023 and the limit rod 9024 to move. The limit rod 9024 slides in the long hole 9022, and the rotating block 9023 arranged in an annular manner with equal spacing realizes a rotational closed state, driving the blowing and suction pump group 906 to blow air, and the gas passes through a plurality of gas-benefitting segmentation holes 9028 opened on the rotating block 9023, so as to segment the gas into relatively small individuals. Since the gas follows the Bernoulli equation during the flow process, that is, the conservation of total mechanical energy. When the airflow passes through the contraction and expansion flow channel of the gas separation hole 9028, the flow channel cross-section becomes smaller, the flow rate increases, and the pressure decreases; at the outlet of the small hole, the gas is balanced energy, and a relatively uniform, small and stable flow rate airflow pattern will be formed; this stable and small airflow can not only accurately act on the tiny area of ​​the chip to prevent damage to the precise structure of the chip, but also enhance the disturbance of dust particles and improve cleaning efficiency.

[0064] When the servo motor 9031 is driven to drive the rotating rod 9032 to rotate in the opposite direction, the rotating rod 9032 drives the outer tooth groove 9033 to rotate, and the outer tooth groove 9033 is engaged with the tooth groove provided on the outer wall of the rotating disk 9026, driving the rotating disk 9026 to rotate, and the rotating disk 9026 drives the slide groove 9027 provided thereon to rotate, and the rotation of the slide groove 9027 causes the slider 9025 movably inserted thereon to slide, and the slider 9025 drives the rotating block 9023 and the limit rod 9024 to move, and the limit rod 9024 slides in the long hole 9022, and the rotating blocks 9023 arranged in a circular shape with equal intervals are rotated to open, and the dust particles raised by the air are filled in the closed shell 9012. At this time, the suction pump group 906 is driven to suck out the dust particles to prevent the dust from spreading to the surrounding environment. The subsequent suction operation quickly and concentratedly sucks the dust through the suction pipe 9011, effectively preventing the dust from settling back on the chip or other parts of the device, and eliminating the risk of secondary pollution.

[0065] As another embodiment of the present invention, the connecting rod assembly 904 includes a connecting rod 9041 and a rotating shaft 9042. The two connecting rods 9041 are hingedly connected to each other. One end of the connecting rod 9041 away from the hinge point is rotatably connected to the sealing shell 9012. The rotating shaft 9042 is rotatably disposed at both ends of the connecting rod 9041.

[0066] The linkage assembly 905 includes a sprocket 9051 and a chain 9052 . The sprockets 9051 are sleeved on the rotating shaft 9042 , and the chain 9052 is meshedly sleeved on the two sprockets 9051 .

[0067] In the present invention, two adjacent closed shells 9012 are hingedly connected to each other through two connecting rods 9041. When the closed shells 9012 are separated and changed in pitch, the two connecting rods 9041 are bent or straightened due to the mutual hinge connection of the two connecting rods 9041; when the servo motor 9031 is driven, the output end of the servo motor 9031 simultaneously drives the sprocket 9051 to rotate, and the chain 9052 pulls the two sprockets 9051 to rotate. Since the connecting rods 9041 are provided with sprockets 9051 and chains 9052, multiple sprockets 9051 synchronously drive multiple rotating shafts 9042 to rotate synchronously, thereby realizing the function of synchronous regulation. There is no need to use multiple motors to achieve control, which not only saves energy consumption, but also simplifies the complexity of the control system, further improving the quality and efficiency of chip screening.

[0068] As another embodiment of the present invention, the blowing and suction pump group 906 includes an air pump 9061, a soft air tube 9062 and a telescopic hose 9063. The air pump 9061 is symmetrically arranged at the output end of the Z-axis moving mechanism 5. The soft air tubes 9062 are all connected to the air pump 9061. The telescopic hoses 9063 are connected to a number of connectors 8034. The ends of the soft air tubes 9062 away from the air pump 9061 are connected to the ends of the telescopic hoses 9063 away from the connectors 8034. When the blowing and suction pump group 906 of the present invention is blowing, the air blown by the air pump 9061 is transmitted to the telescopic hose 9063 through the soft air tube 9062, and the gas is transmitted to the joint 8034 through the telescopic hose 9063, and is transmitted to the air cavity 8033 through the joint 8034, and is transmitted to the blowing and suction pipe 9011 and the closed shell 9012 through the air cavity 8033, or is transmitted to the vacuum suction cup 10 through the air cavity 8033 to achieve the effect of adsorbing the chip. The air pump 9061 of the present invention can be externally connected to a collection mechanism or a dust storage bin.

[0069] Working principle: This embodiment provides a method for using a microwave chip screening test device, comprising the following steps:

[0070] S1, chip transportation operation;

[0071] First, the chip to be tested is loaded through the chip loading and unloading mechanism 6, and the vacuum suction cup 10 is driven to move by the X-axis moving mechanism 3, the Y-axis moving mechanism 4, the Z-axis moving mechanism 5 and the variable pitch mechanism 8, and the air pump 9061 sucks air, and the chip is moved to the screening and testing area through the vacuum suction cup 10;

[0072] S2, chip preprocessing operation;

[0073] S2.1, the sealing shell 9012 is covered and engaged on the chip through the X-axis moving mechanism 3, the Y-axis moving mechanism 4, the Z-axis moving mechanism 5 and the pitch changing mechanism 8, the servo motor 9031 is driven to drive the rotating rod 9032 to rotate, the rotating rod 9032 drives the outer tooth groove 9033 to rotate, the outer tooth groove 9033 is meshed and connected to the tooth groove provided on the outer wall of the rotating disk 9026, drives the rotating disk 9026 to rotate, the rotating disk 9026 drives the slide groove 9027 provided thereon to rotate, the slide groove 9027 rotates to make the movable The slider 9025 inserted thereon slides, and the slider 9025 drives the rotating block 9023 and the limiting rod 9024 to move, and the limiting rod 9024 slides in the long hole 9022, and the rotating block 9023 arranged in an annular manner with equal spacing realizes a rotational closed state, and drives the blowing and suction pump group 906 to blow air, and the gas passes through a plurality of gas-benefitting dividing holes 9028 opened on the rotating block 9023, and the gas is divided into relatively small individuals, and the gas blows up the dust particles attached to the chip, so that the dust particles are filled in the closed shell 9012;

[0074] S2.2, drive the servo motor 9031 to drive the rotating rod 9032 to rotate in the opposite direction, the rotating rod 9032 drives the outer tooth groove 9033 to rotate, the outer tooth groove 9033 is meshed and connected to the tooth groove provided on the outer wall of the rotating disk 9026, drives the rotating disk 9026 to rotate, the rotating disk 9026 drives the slide groove 9027 provided thereon to rotate, the slide groove 9027 rotates to make the slider 9025 movably inserted thereon slide, the slider 9025 drives the rotating block 9023 and the limit rod 9024 to move, the limit rod 9024 slides in the long hole 9022, and the rotating block 9023 arranged in an annular manner with equal spacing realizes the state of rotation and opening, at this time, drives the blowing and suction pump group 906 to suck out the dust particles;

[0075] S3, chip screening operation;

[0076] Secondly, the chip detection mechanism 7 is driven by the X-axis moving mechanism 3, the Y-axis moving mechanism 4, the Z-axis moving mechanism 5 and the variable pitch mechanism 8 to detect the microwave chip;

[0077] S4, good and bad partition operation;

[0078] Finally, the vacuum suction cup 10 is driven to move by the X-axis moving mechanism 3, the Y-axis moving mechanism 4, the Z-axis moving mechanism 5 and the variable pitch mechanism 8, and the air pump 9061 sucks air, and the chip is partitioned according to the test results through the vacuum suction cup 10.

[0079] The embodiments of the present invention disclose preferred embodiments, but are not limited thereto. A person skilled in the art can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. However, as long as they do not deviate from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims

1. A microwave chip screening and testing device, characterized in that: The screening platform (1) comprises a screening platform (1), wherein a dustproof housing (2) is provided at the top of the screening platform (1), an X-axis moving mechanism (3) is provided on the screening platform (1), a Y-axis moving mechanism (4) is provided on the X-axis moving mechanism (3), a Z-axis moving mechanism (5) is provided on the Y-axis moving mechanism (4), a chip loading and unloading mechanism (6) is also provided on the screening platform (1), a chip detection mechanism (7) is provided at the output end of the Z-axis moving mechanism (5), a variable pitch mechanism (8) is also provided at the output end of the Z-axis moving mechanism (5), a dust particle lifting and suction mechanism (9) is provided on the variable pitch mechanism (8), and a vacuum suction cup (10) is also provided on the variable pitch mechanism (8); The dust particle lifting and suction mechanism (9) comprises a closed tube shell (901), a two-state channel component (902), a switching component (903), a connecting rod component (904), a linkage component (905) and a blowing and suction pump group (906); the closed tube shell (901) is linearly connected to the bottom end of the pitch-changing mechanism (8) at equal intervals; the two-state channel component (902) is arranged inside the closed tube shell (901); the switching component (903) is arranged at a position of the closed tube shell (901) close to the two-state channel component (902); the connecting rod component (904) is rotatably connected to the plurality of closed tube shells (901); the linkage component (905) is arranged on the connecting rod component (904); and the blowing and suction pump group (906) is arranged at the output end of the Z-axis moving mechanism (5) and connected to the pitch-changing mechanism (8); The switching component (903), the connecting rod component (904) and the linkage component (905) cause the plurality of dual-state channel components (902) to synchronously form a wind-assisted particle-raising state or a concentrated back-absorption state.

2. A microwave chip screening and testing device according to claim 1, characterized in that: The variable pitch mechanism (8) comprises a bearing assembly (801), a fixed assembly (802), a sliding assembly (803) and a telescopic connecting rod (804); the bearing assembly (801) is arranged at the output end of the Z-axis moving mechanism (5); the fixed assembly (802) is arranged on the bearing assembly (801); the sliding assembly (803) is slidably arranged on the fixed assembly (802); the telescopic connecting rod (804) is arranged on the sliding assembly (803); the closed tube shell (901) and the vacuum suction cup (10) are connected to the bottom end of the sliding assembly (803); and the blowing and suction pump group (906) is arranged on the bearing assembly (801).

3. A microwave chip screening and testing device according to claim 2, characterized in that: The fixing assembly (802) comprises a sliding rod (8021), a fixing block (8022) and a cylinder (8023); the sliding rod (8021) is symmetrically arranged on the bearing assembly (801); the fixing block (8022) is hoisted on the bearing assembly (801); the cylinder (8023) is arranged on the fixing block (8022); and a plurality of the sliding assemblies (803) are slidably sleeved on the sliding rod (8021).

4. A microwave chip screening and testing device according to claim 3, characterized in that: The sliding assembly (803) comprises a moving block (8031), a sliding hole (8032), an air cavity (8033) and a joint (8034); the sliding hole (8032) is symmetrically arranged on the moving block (8031); the moving block (8031) is slidably sleeved on the sliding rod (8021) through the sliding hole (8032); the air cavity (8033) is symmetrically arranged on the moving block (8031); the joint (8034) is symmetrically arranged at the end of the moving block (8031); the joint (8034) is communicated with the air cavity (8033); the vacuum suction cup (10) is communicated with one of the air cavities (8033); and the closed tube shell (901) is communicated with the other air cavity (8033).

5. A microwave chip screening and testing device according to claim 4, characterized in that: The closed tube shell (901) includes a blowing and suction tube (9011) and a closed shell (9012), wherein the blowing and suction tube (9011) is connected to one of the ends of the air cavity (8033), and the closed shell (9012) is connected to the bottom end of the blowing and suction tube (9011), and the two-state channel component (902), the switching component (903) and the connecting rod component (904) are all arranged on the closed shell (9012).

6. A microwave chip screening and testing device according to claim 5, characterized in that: The dual-state channel assembly (902) comprises a fixed disk (9021), a long hole (9022), a rotating block (9023), a limiting rod (9024), a slider (9025), a rotating disk (9026) and a slide groove (9027), wherein the fixed disk (9021) is fixedly arranged on the closed shell (9012), the long holes (9022) are arranged on the fixed disk (9021) in a circular shape with equal intervals, and the rotating disk (9026) is rotatably arranged on the inner top wall of the closed shell (9012) near the fixed disk. The bottom end of the disk (9021) is located at the top of the rotating disk (9026), the slide groove (9027) is opened at the top of the rotating disk (9026), the limit rod (9024) is arranged at the top of the rotating block (9023), the slider (9025) is arranged at the bottom end of the rotating block (9023), the limit rod (9024) is movably inserted in the long hole (9022) at one end away from the rotating block (9023), and the slider (9025) is movably inserted in the slide groove (9027) at one end away from the rotating block (9023); The rotating block (9023) is provided with a plurality of gas separation holes (9028).

7. A microwave chip screening and testing device according to claim 6, characterized in that: The switching assembly (903) comprises a servo motor (9031), a rotating rod (9032) and an external tooth groove (9033); the servo motor (9031) is arranged on the closed shell (9012) at a position close to the top side of the fixed disk (9021); the rotating rod (9032) is rotatably inserted on the closed shell (9012); one end of the rotating rod (9032) is connected to the output end of the servo motor (9031); the external tooth groove (9033) is opened at the end of the rotating rod (9032) away from the servo motor (9031); and the external tooth groove (9033) is meshedly connected to the outer wall of the rotating disk (9026).

8. A microwave chip screening and testing device according to claim 7, characterized in that: The connecting rod assembly (904) comprises a connecting rod (9041) and a rotating shaft (9042), the two connecting rods (9041) are hingedly connected to each other, one end of the connecting rod (9041) away from the hinge point is rotatably connected to the closed shell (9012), and the rotating shaft (9042) is rotatably arranged at both ends of the connecting rod (9041); The linkage assembly (905) comprises a sprocket (9051) and a chain (9052), wherein the sprockets (9051) are sleeved on the rotating shaft (9042), and the chain (9052) is meshedly sleeved on the two sprockets (9051).

9. A microwave chip screening and testing device according to claim 8, characterized in that: The blowing and suction pump group (906) includes an air pump (9061), a soft air tube (9062) and a telescopic hose (9063). The air pump (9061) is symmetrically arranged at the output end of the Z-axis moving mechanism (5). The soft air tubes (9062) are all connected to the air pump (9061). The telescopic hoses (9063) are connected to a plurality of the joints (8034). The ends of the soft air tubes (9062) away from the air pump (9061) are connected to the ends of the telescopic hoses (9063) away from the joints (8034).

10. A method for using the microwave chip screening test device according to claim 9, characterized in that: The following steps are involved: S1, chip transportation operation; First, the chip to be tested is loaded through the chip loading and unloading mechanism (6), and the vacuum suction cup (10) is driven to move by the X-axis moving mechanism (3), the Y-axis moving mechanism (4), the Z-axis moving mechanism (5) and the variable pitch mechanism (8), and the air pump (9061) sucks air, and the chip is moved to the screening and testing area through the vacuum suction cup (10); S2, chip preprocessing operation; S2.1, the sealing shell (9012) is covered and engaged on the chip through the X-axis moving mechanism (3), the Y-axis moving mechanism (4), the Z-axis moving mechanism (5) and the pitch changing mechanism (8), the servo motor (9031) is driven to drive the rotating rod (9032) to rotate, the rotating rod (9032) drives the external tooth groove (9033) to rotate, the external tooth groove (9033) is meshed and connected to the tooth groove provided on the outer wall of the rotating disk (9026), drives the rotating disk (9026) to rotate, the rotating disk (9026) drives the slide groove (9027) provided thereon to rotate, the slide groove (9027) rotates The movement causes the slider (9025) movably inserted thereon to slide, and the slider (9025) drives the rotating block (9023) and the limiting rod (9024) to move, and the limiting rod (9024) slides in the long hole (9022), and the rotating block (9023) arranged in an annular manner with equal spacing realizes a rotational closed state, and drives the blowing and suction pump group (906) to blow air, and the gas passes through a plurality of gas-benefitting dividing holes (9028) opened on the rotating block (9023), and the gas is divided into relatively small individuals, and the gas blows up the dust particles attached to the chip, so that the dust particles are filled in the closed shell (9012); S2.2, driving the servo motor (9031) to drive the rotating rod (9032) to rotate in the opposite direction, the rotating rod (9032) drives the external tooth groove (9033) to rotate, the external tooth groove (9033) is meshed and connected to the tooth groove provided on the outer wall of the rotating disk (9026), driving the rotating disk (9026) to rotate, the rotating disk (9026) drives the slide groove (9027) provided thereon to rotate, the slide groove (9027) rotates to make the slider (9025) movably inserted thereon slide, the slider (9025) drives the rotating block (9023) and the limit rod (9024) to move, the limit rod (9024) slides in the long hole (9022), and the rotating block (9023) arranged at equal intervals in an annular manner realizes a rotation-open state, at which time the blowing and suction pump group (906) is driven to suck air to suck out the dust particles; S3, chip screening operation; Secondly, the chip detection mechanism (7) is driven by the X-axis moving mechanism (3), the Y-axis moving mechanism (4), the Z-axis moving mechanism (5) and the pitch changing mechanism (8) to detect the microwave chip; S4, good and bad partition operation; Finally, the vacuum suction cup (10) is driven to move by the X-axis moving mechanism (3), the Y-axis moving mechanism (4), the Z-axis moving mechanism (5) and the pitch changing mechanism (8), and the air pump (9061) sucks air, and the chip is partitioned according to the test results through the vacuum suction cup (10).

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