Glass substrate cleaning equipment and cleaning process

Abstract

The invention belongs to the field of cleaning, and particularly relates to glass substrate cleaning equipment, in particular to glass substrate cleaning equipment and a glass substrate cleaning process, and the glass substrate cleaning equipment comprises a cleaning table which is provided with a plurality of cleaning stations; the cleaning baskets are arranged in the corresponding cleaning stations, and a plurality of glass substrates to be cleaned are arranged at equal intervals; the cleaning assembly is used for cleaning the glass substrate in the cleaning basket; the cleaning assembly comprises a switching mechanism and a cleaning mechanism, a liquid inlet pipe; and the air inlet pipe is sleeved outside the liquid inlet pipe. The switching mechanism is arranged to switch the communicating state of the cleaning nozzle and the liquid inlet pipe and the communicating state of the cleaning nozzle and the air inlet pipe, when water stains need to be dried, only the air inlet pipe needs to communicate with the cleaning nozzle, and therefore the problem that in the related technology, a large amount of liquid remains in a pipeline during air inlet due to the fact that the pipeline communicates with the cleaning nozzle is solved; therefore, the problem that the ventilation time is too long is solved, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The present invention belongs to the field of cleaning technology, and specifically relates to a cleaning machine for cleaning a glass substrate, and more particularly to a glass substrate cleaning device and a cleaning process. Background Art

[0002] When the glass substrate is processed into a finished product, it is necessary to thin and polish the glass substrate. During polishing, debris will be attached to the surface of the glass substrate, so the glass substrate just polished needs to be cleaned.

[0003] In the related art, the same pipeline is used for gas supply and liquid supply to reduce the amount of cleaning nozzles. After the glass substrate is cleaned, ventilation is required to remove the water stains. However, in actual use, it is found that the ventilation time specified by the cleaning equipment cannot completely remove the liquid. The ventilation time needs to be extended to completely remove the water stains on the surface of the glass substrate.

[0004] Therefore, how to improve the efficiency of removing water stains on the surface of the glass substrate is a technical problem that needs to be solved urgently.

[0005] It should be noted that the above information disclosed in this background technology section is only used to understand the background technology of the present application concept, and therefore, the above description is not considered to constitute information of the prior art. Summary of the invention

[0006] The embodiments of the present disclosure at least provide a glass substrate cleaning device and a cleaning process.

[0007] In a first aspect, an embodiment of the present disclosure provides a glass substrate cleaning device, comprising: A cleaning station, which is provided with a plurality of cleaning stations; A cleaning basket is arranged in a corresponding cleaning station and has a plurality of glass substrates to be cleaned arranged at equal intervals; A cleaning component, used for cleaning the glass substrate in the cleaning basket; The cleaning components include: Switching mechanism; Liquid inlet pipe; An air inlet pipe sleeved on the outside of the liquid inlet pipe; A plurality of cleaning nozzles, which are connected to the liquid inlet pipe and / or the air inlet pipe under the control of the switching mechanism; The control module is configured to control the switching mechanism to connect each cleaning nozzle with the liquid inlet pipe for cleaning in the cleaning condition; and to control each cleaning nozzle to connect with the air inlet pipe in the drying condition to remove the water stains remaining on the glass substrate.

[0008] In an optional embodiment, the air inlet pipe is sleeved on the outside of the liquid inlet pipe; Furthermore, an air cavity for ventilation is formed between the liquid inlet pipe and the air inlet pipe; The cleaning nozzle is in communication with the air cavity when in a blow-drying condition.

[0009] In an optional implementation, the switching mechanism includes: Push rod motor and switch board; A first through hole is provided at a position corresponding to the switching plate and the cleaning nozzle; The cleaning nozzle is arranged on the air intake pipe; A connecting pipe elastically connected to the cleaning nozzle via a return spring is provided on the top of the cleaning nozzle; The switching plate is embedded in the inner wall of the liquid inlet pipe. When the push rod motor pushes the switching plate in a first direction, the top of the connecting pipe is inserted into the first through hole, and each cleaning nozzle is connected with the liquid inlet pipe; when the push rod motor pulls the switching plate in a second direction, the top of the connecting pipe is squeezed by the switching plate and moves downward, so that the air cavity is connected with the air hole on the side wall of the connecting pipe, that is, each cleaning nozzle is connected with the air inlet pipe.

[0010] In an optional embodiment, an auxiliary through hole is provided on the second direction side of each of the first through holes; The push rod motor pushes the switching plate to connect the cleaning nozzles with the corresponding auxiliary through holes one by one, and only one cleaning nozzle is connected with the corresponding auxiliary through hole each time, and the cleaning nozzle is connected with the liquid inlet pipe to complete the pressurized cleaning.

[0011] In an optional embodiment, the cleaning component further includes: A visual inspection module, which is used to inspect the cleaning effect of the cleaning flower basket; The control module is also configured to control the switching mechanism to enter a pressurized cleaning mode according to a detection result when detecting working conditions.

[0012] In an optional embodiment, the control module is further configured to control the switching mechanism to enter the pressurized cleaning mode according to the detection result, that is: The received detection result is compared with the preset value, and when it is detected that stains exist on the multiple glass substrates in the cleaning basket, the switching mechanism is controlled to make the cleaning component enter the pressurized cleaning mode.

[0013] In an optional embodiment, the pressurized cleaning mode is: Through the switching mechanism, each cleaning nozzle is controlled to be connected to the liquid inlet pipe at a preset interval; After the current cleaning nozzle is pressurized and cleaned for a preset time, the visual inspection module is controlled to inspect again until all cleaning nozzles are cleaned; According to the detection result after the pressurized cleaning of each cleaning nozzle, the position of the glass substrate where the stain is located is obtained, and the corresponding cleaning nozzle is controlled to enter the pressurized cleaning mode until it is cleaned.

[0014] In an optional embodiment, the pressurized cleaning mode is: Through the switching mechanism, each cleaning nozzle is controlled to be connected with the liquid inlet pipe and the air inlet pipe at the same time at a preset interval; After the current cleaning nozzle is pressurized and cleaned for a preset time, the visual inspection module is controlled to inspect again until all cleaning nozzles are cleaned; According to the detection result after the pressurized cleaning of each cleaning nozzle, the position of the glass substrate where the stain is located is obtained, and the corresponding cleaning nozzle is controlled to enter the pressurized cleaning mode until it is cleaned.

[0015] In a second aspect, the embodiments of the present disclosure further provide a cleaning process applied to the glass substrate cleaning device as described above, the cleaning process comprising: Place the glass substrate to be cleaned into the corresponding cleaning basket; Place the cleaning flower basket into the cleaning station; Each cleaning nozzle is connected to the liquid inlet pipe through the switching mechanism to enter the cleaning state to clean the glass substrate; After cleaning is completed, each cleaning nozzle is connected to the air inlet pipe through a switching mechanism to enter the drying state to remove the water stains remaining on the glass substrate.

[0016] In an optional embodiment, after the cleaning process is completed and before entering the drying process, the cleaning process further includes: Enter the detection condition, that is: Testing the cleaning effect in the cleaning flower basket; The switching mechanism is controlled to enter the pressurized cleaning mode according to the detection result.

[0017] In an optional embodiment, the pressurized cleaning mode is: Through the switching mechanism, each cleaning nozzle is controlled to be connected to the liquid inlet pipe at a preset interval; After the current cleaning nozzle is pressurized and cleaned for a preset time, the visual inspection module is controlled to inspect again until all cleaning nozzles are cleaned; According to the detection result after the pressurized cleaning of each cleaning nozzle, the position of the glass substrate where the stain is located is obtained, and the corresponding cleaning nozzle is controlled to enter the pressurized cleaning mode until it is cleaned.

[0018] The beneficial effect of the present invention is that the glass substrate cleaning equipment and cleaning process switches the conduction state between the cleaning nozzle and the liquid inlet pipe and the air inlet pipe by setting a switching mechanism. When the water stains need to be blown dry, it is only necessary to connect the air inlet pipe with the cleaning nozzle, thereby solving the problem in the related technology that a large amount of liquid remains in the pipe during air intake, resulting in excessive ventilation time, thereby improving the cleaning efficiency.

[0019] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0020] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, this article specifically cites preferred embodiments and provides detailed descriptions as follows in conjunction with the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 A schematic diagram of the structure of a glass substrate cleaning device provided in an embodiment of the present disclosure; Figure 2 A cross-sectional view of a cleaning assembly provided in an embodiment of the present disclosure; Figure 3 The electrical control principle diagram of the cleaning assembly provided in the embodiment of the present disclosure; Figure 4 A schematic diagram of the state of the cleaning component and the cleaning basket provided in the embodiment of the present disclosure when they are in coordination; Figure 5 for Figure 4 The enlarged view of point A in the middle; Figure 6 A schematic diagram of the structure of a cleaning nozzle provided in an embodiment of the present disclosure when the cleaning nozzle is connected to an air inlet pipe and a liquid inlet pipe at the same time; Figure 7 A flow chart of a cleaning process of a glass substrate cleaning device provided in an embodiment of the present disclosure.

[0023] In the figure: 100, cleaning table; 110, cleaning station; 111, cover plate; 200, cleaning basket; 210, glass substrate; 300, cleaning assembly; 310, liquid inlet pipe; 320, air inlet pipe; 330, air cavity; 340, cleaning nozzle; 341, connecting pipe; 342, return spring; 343, air hole; 344-air inlet; 350, switching mechanism; 351, push rod motor; 352, switching plate; 3521, first through hole; 3522, auxiliary through hole. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] In this article, when it is mentioned that the first component is located on the second component, this may mean that the first component may be directly formed on the second component, or the third component may be interposed between the first component and the second component. In addition, in the drawings, in order to effectively describe the technical content, the thickness of the components may be exaggerated or reduced.

[0026] After research, it was found that in order to reduce the number of cleaning nozzles in the related technology, the cleaning nozzles are set on a pipe, and then connected to the air source and water source respectively. When cleaning is needed, the water source is turned on to supply water to the pipe. After the liquid enters the pipe, it is sprayed out from the cleaning nozzle to complete the cleaning. When drying is required, the water source is turned off, and then the air source is turned on to ventilate the pipe. After the gas enters the pipe, it is sprayed out from the cleaning nozzle to dry the glass substrate. However, due to the large amount of liquid remaining in the pipe, the gas will be blown onto the glass substrate with a large amount of liquid when drying, which will cause an increase in water stains on the surface of the glass substrate in the first half of the drying time. The ventilation time needs to be extended to dry the glass substrate.

[0027] Based on the above research, the embodiments of the present disclosure provide a glass substrate cleaning device and a cleaning process, by sleeve-arranging an air inlet pipe and a liquid inlet pipe, sharing the same group of cleaning nozzles, and setting a corresponding switching mechanism to switch the conduction state of the cleaning nozzles, thereby reducing the amount of cleaning liquid brought out by the cleaning nozzles during ventilation without increasing the number of cleaning nozzles, so as to solve the problem of long drying time and long overall cleaning process time in related technologies.

[0028] The defects existing in the above solutions are the results obtained by the inventor after practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed by the present invention in this article for the above problems should be the contributions made by the inventor to the present invention during the disclosure process.

[0029] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0030] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0031] See also Figure 1 and Figure 2 At least one embodiment discloses a glass substrate cleaning device, comprising the following structure: The cleaning station 100 is provided with a plurality of cleaning stations 110. A cover plate 111 is provided on each cleaning station 110 to prevent splashing of the cleaning liquid.

[0032] The cleaning basket 200 is arranged in the corresponding cleaning station 110, and a plurality of glass substrates 210 to be cleaned are arranged at equal intervals. It should be noted that the cleaning basket 200 is made of a transparent material to facilitate subsequent visual inspection.

[0033] The cleaning assembly 300 is used to clean the glass substrate 210 in the cleaning basket 200 .

[0034] See also Figure 2 and Figure 3 Specifically, the cleaning component 300 includes the following structure: The switching mechanism 350 is used to switch the communication state between the cleaning nozzle 340 and the liquid inlet pipe 310 and the air inlet pipe 320 .

[0035] One end of the liquid inlet pipe 310 is connected to the external water pump, and the other end is in a blocked state.

[0036] The air inlet pipe 320 is sleeved on the outside of the liquid inlet pipe 310. Specifically, an air cavity 330 for ventilation is formed between the liquid inlet pipe 310 and the air inlet pipe 320.

[0037] A plurality of cleaning nozzles 340 are connected to the liquid inlet pipe 310 and / or the air inlet pipe 320 under the control of the switching mechanism 350 .

[0038] The control module is configured to control the switching mechanism 350 to connect each cleaning nozzle 340 with the liquid inlet pipe 310 for cleaning during the cleaning operation; and to control each cleaning nozzle 340 to connect with the air inlet pipe 320 during the drying operation to remove the residual water stains on the glass substrate 210.

[0039] It should be noted that the cleaning nozzle 340 is connected to the liquid inlet pipe 310 in the cleaning condition, and is connected to the air cavity 330 of the air inlet pipe 320 in the drying condition.

[0040] By setting a switching mechanism 350 to switch the conduction state between the cleaning nozzle 340 and the liquid inlet pipe 310 and the air inlet pipe 320, when the water stains need to be blown dry, it is only necessary to connect the air inlet pipe 320 with the cleaning nozzle 340, thereby solving the problem in the related technology that a large amount of liquid remains in the pipe during air intake due to the use of one pipe connected to the cleaning nozzle 340, resulting in excessive ventilation time, thereby improving the cleaning efficiency.

[0041] Please continue reading Figure 2 and Figure 4 The switching mechanism 350 includes a push rod motor 351 and a switching plate 352. The push rod motor 351 is controlled by a control module to work, thereby pushing the switching plate 352 to move.

[0042] One end of the switching plate 352 is embedded in the side wall of the liquid inlet pipe 310 , and the other end is connected to the push rod of the external push rod motor 351 .

[0043] The switching plate 352 is provided with a first through hole 3521 at a position corresponding to the cleaning nozzle 340 ; the cleaning nozzle 340 is arranged on the air intake pipe 320 ; and a connecting pipe 341 elastically connected to the cleaning nozzle 340 through a return spring 342 is arranged on the top of the cleaning nozzle 340 .

[0044] The top of the connecting pipe 341 is provided with an outer chamfer, so as to reduce the collision between the switching plate 352 and the top of the connecting pipe 341 when moving.

[0045] When the push rod motor 351 pushes the switching plate 352 in the first direction, the top of the connecting tube 341 is inserted into the first through hole 3521, and each cleaning nozzle 340 is connected to the liquid inlet pipe 310; when the push rod motor 351 pulls the switching plate 352 in the second direction, the top of the connecting tube 341 is squeezed by the switching plate 352 and moves downward, so that the air cavity 330 is connected to the air hole 343 on the side wall of the connecting tube 341, that is, each cleaning nozzle 340 is connected to the air inlet pipe 320. Figure 4 As shown in F1, the second direction is Figure 4 As shown in F2.

[0046] There is one air hole 343 , which is opened from the side wall of the connecting pipe 341 and tilted toward the outlet of the cleaning nozzle 340 , so as to guide the gas entering the cleaning nozzle 340 and increase the pressure inside the cleaning nozzle 340 .

[0047] It should be noted that an air inlet 344 is also provided at the fitting position of the cleaning nozzle 340 and the air hole 343, which is squeezed by the switching plate 352 at the top of the connecting tube 341 and moves downward, so that the air cavity 330 is connected with the air hole 343 on the side wall of the connecting tube 341. At this time, the air inlet 344 of the cleaning nozzle 340 is connected with the air hole 343 of the connecting tube 341, so that the air cavity 330 is connected with the cleaning head 340, that is, the cleaning nozzle 340 is connected with the air inlet pipe 320.

[0048] A simple mechanical structure is set up to complete the switching of the gas source and the water source, reducing the length of the pipeline shared by the gas source and the water source, thereby reducing the liquid content brought out by the gas during drying to the greatest extent.

[0049] It should be noted that even if the sealing between the cleaning nozzle 340 and the air cavity 330 is poor, it will not affect the cleaning effect of the cleaning nozzle 340. The gas leaked from the cleaning nozzle 340 can also increase the pressure of the liquid, thereby improving the cleaning effect.

[0050] See also Figure 2 , Figure 4 and Figure 5 In order to enable each cleaning nozzle 340 to clean the glass substrate in the cleaning basket 200 separately, an auxiliary through hole 3522 is provided on the second direction side of each first through hole 3521; the push rod motor 351 pushes the switching plate 352 to connect the cleaning nozzle 340 with the corresponding auxiliary through hole 3522 one by one, and only one cleaning nozzle 340 is connected with the corresponding auxiliary through hole 3522 at a time, and the cleaning nozzle 340 is connected with the liquid inlet pipe 310 to complete the pressurized cleaning.

[0051] By pushing the switching plate 352, one of the multiple cleaning nozzles 340 is turned on and the rest are turned off, thereby increasing the water pressure during cleaning and further improving the cleaning effect.

[0052] Please continue reading Figure 3 The cleaning component 300 further includes: a visual detection module, which is used to detect the cleaning effect of the cleaning basket 200; the control module is also configured to control the switching mechanism 350 to enter the pressurized cleaning mode according to the detection result when the working condition is detected.

[0053] Specifically, the control module is also configured to control the switching mechanism 350 to enter the pressurized cleaning mode based on the detection results, that is, compare the received detection results with the preset values, and when it is detected that there are stains on the multiple glass substrates 210 in the cleaning basket 200, control the switching mechanism 350 to make the cleaning component 300 enter the pressurized cleaning mode.

[0054] The default value is obtained as follows: Using a high-resolution camera to obtain image information of a plurality of cleaned glass substrates during cleaning; Convert the acquired graphic information into a grayscale image and perform denoising to complete the image preprocessing; The highest grayscale value in the grayscale image of each image is selected as the representation value of the cleaning effect of the image; Calculate the average value of the cleaning effect characterization value of all images, and use the average value as the preset value for subsequent detection and comparison.

[0055] The cleaning effect of the glass substrate is detected to improve the cleaning effect. When the detection result shows that there are stains on the glass substrate, each cleaning nozzle 340 is controlled in turn to perform pressurized cleaning to determine the location of the stains, so as to facilitate subsequent targeted cleaning.

[0056] Specifically, the pressurized cleaning mode is: Through the switching mechanism 350, each cleaning nozzle 340 is controlled to be connected to the liquid inlet pipe 310 at preset intervals; after the current cleaning nozzle 340 is pressurized for cleaning for a preset time, the visual inspection module is controlled to perform inspection again until all cleaning nozzles 340 are cleaned; based on the inspection result after pressurized cleaning of each cleaning nozzle 340, the position of the glass substrate 210 where the stain is located is obtained, and the corresponding cleaning nozzle 340 is controlled to enter the pressurized cleaning mode until it is cleaned.

[0057] Specifically, by pushing the switching plate 352, the corresponding cleaning nozzle 340 is connected to the liquid inlet pipe 310 or the air inlet pipe 320, thereby realizing the pressurized cleaning mode. Since the air hole 343 and the air inlet 344 are both inclined, the gas entering the cleaning nozzle 340 is guided, so that most of the gas flows along the outlet of the cleaning nozzle 340, thereby increasing the liquid.

[0058] like Figure 6As shown, in other embodiments, the pressurized cleaning mode, that is: through the switching mechanism 350, each cleaning nozzle 340 is controlled to be connected to the liquid inlet pipe 310 and the air inlet pipe 320 at a preset interval; after the current cleaning nozzle 340 is pressurized for a preset time, the visual inspection module is controlled to perform inspection again until all cleaning nozzles 340 are cleaned; based on the inspection result after the pressurized cleaning of each cleaning nozzle 340, the position of the glass substrate 210 where the stain is located is obtained, and the corresponding cleaning nozzle 340 is controlled to enter the pressurized cleaning mode until it is cleaned.

[0059] The gas and liquid are simultaneously introduced into the cleaning nozzle 340, thereby pressurizing the liquid, improving the flushing ability, and cleaning stubborn stains in a targeted manner. In a specific implementation, the connecting pipe part at the top of the cleaning nozzle 340 can be connected to the auxiliary through hole 3522, and the air cavity 330 is also in a connected state with the air hole 343 of the connecting pipe 341.

[0060] See also Figure 7 At least one embodiment further provides a cleaning process applied to the glass substrate cleaning device as described above, the cleaning process comprising: S110: placing the glass substrate 210 to be cleaned into the corresponding cleaning basket 200; S120: placing the cleaning flower basket 200 into the cleaning station 110; S130: connecting each cleaning nozzle 340 with the liquid inlet pipe 310 through the switching mechanism 350, entering the cleaning state, and cleaning the glass substrate 210; S140: After the cleaning is completed, each cleaning nozzle 340 is connected to the air inlet pipe 320 through the switching mechanism 350, and the drying state is entered to remove the water stains remaining on the glass substrate 210.

[0061] After the cleaning process is completed and before entering the drying process, the cleaning process further includes: Entering the detection working state, that is, detecting the cleaning effect in the cleaning flower basket 200; and controlling the switching mechanism 350 to enter the pressurized cleaning mode according to the detection result.

[0062] Among them, the pressurized cleaning mode is: through the switching mechanism 350, each cleaning nozzle 340 is controlled to be connected with the liquid inlet pipe 310 at intervals of preset time; after the current cleaning nozzle 340 is pressurized for cleaning for a preset time, the visual inspection module is controlled to perform inspection again until all cleaning nozzles 340 are cleaned; based on the inspection results after pressurized cleaning of each cleaning nozzle 340, the position of the glass substrate 210 where the stain is located is obtained, and the corresponding cleaning nozzle 340 is controlled to enter the pressurized cleaning mode until it is cleaned.

[0063] In summary, the present invention provides a glass substrate cleaning device and a cleaning process, wherein the glass substrate cleaning device comprises: a cleaning table 100, which is provided with a plurality of cleaning stations 110; a cleaning basket 200, which is arranged in a corresponding cleaning station 110 and has a plurality of glass substrates 210 to be cleaned arranged at equal intervals; a cleaning assembly 300, which is used to clean the glass substrates 210 in the cleaning basket 200; wherein the cleaning assembly 300 comprises: a switching mechanism 350; an inlet Liquid pipe 310; air inlet pipe 320 sleeved on the outside of liquid inlet pipe 310; multiple cleaning nozzles 340, which are connected to liquid inlet pipe 310 and / or air inlet pipe 320 under the control of switching mechanism 350; control module, which is configured to control the switching mechanism 350 to connect each cleaning nozzle 340 with liquid inlet pipe 310 for cleaning in the cleaning condition; in the drying condition, control each cleaning nozzle 340 to connect with air inlet pipe 320 to remove the water stains remaining on the glass substrate 210. By setting the switching mechanism 350 to switch the connection state between the cleaning nozzle 340 and the liquid inlet pipe 310 and the air inlet pipe 320, when it is necessary to blow dry the water stains, it is only necessary to connect the air inlet pipe 320 with the cleaning nozzle 340, thereby solving the problem in the related art that a large amount of liquid remains in the pipe when the air is connected to the cleaning nozzle 340, resulting in too long ventilation time, thereby improving the cleaning efficiency.

[0064] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A glass substrate cleaning device, characterized in that: include: A cleaning station (100) provided with a plurality of cleaning stations (110); A cleaning basket (200) is arranged in a corresponding cleaning station (110) and has a plurality of glass substrates (210) to be cleaned arranged at equal intervals; A cleaning component (300) used to clean the glass substrate (210) in the cleaning basket (200); Wherein, the cleaning component (300) comprises: Switching mechanism (350); Liquid inlet pipe (310); An air inlet pipe (320) sleeved on the outside of the liquid inlet pipe (310); A plurality of cleaning nozzles (340) which are connected to the liquid inlet pipe (310) and / or the air inlet pipe (320) under the control of the switching mechanism (350); The control module is configured to control the switching mechanism (350) to connect each cleaning nozzle (340) with the liquid inlet pipe (310) to perform cleaning in a cleaning condition; and to control each cleaning nozzle (340) to connect with the air inlet pipe (320) to remove water stains in a drying condition.

2. The glass substrate cleaning device according to claim 1, characterized in that: An air cavity (330) for ventilation is formed between the liquid inlet pipe (310) and the air inlet pipe (320); The cleaning nozzle is in communication with the air cavity (330) when in a blow-drying condition.

3. The glass substrate cleaning device according to claim 2, characterized in that: The switching mechanism (350) comprises: A push rod motor (351) and a switching plate (352); The switching plate (352) is provided with a first through hole (3521) at a position corresponding to the cleaning nozzle (340); The cleaning nozzle (340) is arranged on the air intake pipe (320); A connecting pipe (341) is provided at the top of the cleaning nozzle (340) and is elastically connected to the cleaning nozzle (340) via a return spring (342); When the push rod motor (351) pushes the switching plate (352) in a first direction, the connecting tube (341) is inserted into the first through hole (3521), connecting the cleaning nozzle (340) with the liquid inlet tube (310); when the push rod motor (351) pulls the switching plate (352) in a second direction, the connecting tube (341) is pressed downward by the switching plate (352), connecting the air cavity (330) with the air hole (343) of the connecting tube (341).

4. The glass substrate cleaning device according to claim 3, characterized in that: An auxiliary through hole (3522) is provided on the second direction side of each of the first through holes (3521); The push rod motor (351) pushes the switching plate (352) to connect the cleaning nozzles (340) with the corresponding auxiliary through holes (3522) one by one, and only one cleaning nozzle (340) is connected with the corresponding auxiliary through hole (3522) each time, thereby completing pressurized cleaning.

5. The glass substrate cleaning device according to claim 1, wherein: The cleaning assembly (300) further comprises: A visual inspection module, used to inspect the cleaning effect of the cleaning flower basket (200); The control module is also configured to control the switching mechanism (350) to enter a pressurized cleaning mode according to the detection result when detecting the working condition.

6. The glass substrate cleaning device according to claim 5, characterized in that: The control module is further configured to control the switching mechanism (350) to enter a pressurized cleaning mode according to the detection result, that is: The received detection result is compared with a preset value, and when stains are detected on the plurality of glass substrates (210) in the cleaning basket (200), the switching mechanism (350) is controlled to cause the cleaning component (300) to enter a pressurized cleaning mode.

7. The glass substrate cleaning device according to claim 6, wherein: The pressurized cleaning mode, namely: Through the switching mechanism (350), each cleaning nozzle (340) is controlled to communicate with the liquid inlet pipe (310) at preset intervals; After the current cleaning nozzle (340) is pressurized and cleaned for a preset time, the visual inspection module is controlled to perform inspection again until all cleaning nozzles (340) are cleaned; According to the detection result after the pressurized cleaning of each cleaning nozzle (340), the position of the glass substrate (210) where the stain is located is obtained, and the corresponding cleaning nozzle (340) is controlled to enter the pressurized cleaning mode until it is cleaned.

8. The glass substrate cleaning device according to claim 6, wherein: The pressurized cleaning mode, namely: Through the switching mechanism (350), each cleaning nozzle (340) is controlled to be simultaneously connected with the liquid inlet pipe (310) and the air inlet pipe (320) at preset intervals; After the current cleaning nozzle (340) is pressurized and cleaned for a preset time, the visual inspection module is controlled to perform inspection again until all cleaning nozzles (340) are cleaned; According to the detection result after the pressurized cleaning of each cleaning nozzle (340), the position of the glass substrate (210) where the stain is located is obtained, and the corresponding cleaning nozzle (340) is controlled to enter the pressurized cleaning mode until it is cleaned.

9. A cleaning process applied to the glass substrate cleaning device as claimed in claim 1, characterized in that: The cleaning process comprises: Placing the glass substrate (210) to be cleaned into the corresponding cleaning basket (200); Place the cleaning flower basket (200) into the cleaning station (110); Each cleaning nozzle (340) is connected to the liquid inlet pipe (310) through a switching mechanism (350), entering a cleaning state, and cleaning the glass substrate (210); After cleaning is completed, each cleaning nozzle (340) is connected to the air inlet pipe (320) through the switching mechanism (350), entering the blow-drying state, and removing the residual water stains on the glass substrate (210).

10. The cleaning process of the glass substrate cleaning equipment according to claim 9, characterized in that: After the cleaning process is completed and before entering the drying process, the cleaning process further includes: Enter the detection condition, that is: Testing the cleaning effect of the cleaning flower basket (200); The switching mechanism (350) is controlled to enter a pressurized cleaning mode according to the detection result.

11. The cleaning process of the glass substrate cleaning equipment according to claim 10, characterized in that: The pressurized cleaning mode is: Through the switching mechanism (350), each cleaning nozzle (340) is controlled to communicate with the liquid inlet pipe (310) at preset intervals; After the current cleaning nozzle (340) is pressurized and cleaned for a preset time, the visual inspection module is controlled to perform inspection again until all cleaning nozzles (340) are cleaned; According to the detection result after the pressurized cleaning of each cleaning nozzle (340), the position of the glass substrate (210) where the stain is located is obtained, and the corresponding cleaning nozzle (340) is controlled to enter the pressurized cleaning mode until it is cleaned.

Images