Laser scribing equipment and scribing angle deviation rectifying method thereof

Abstract

The invention discloses laser scribing equipment and a scribing angle deviation rectifying method thereof.The laser scribing equipment comprises a mounting substrate, an X-axis conveying mechanism, a fixing jig, a fixing support, a Y-axis conveying mechanism, a scribing mechanism and a visual positioning and control module, the X-axis conveying mechanism drives the jig to move in the X-axis direction, the scribing mechanism is installed on the fixing support, and the Y-axis conveying mechanism drives the jig to move in the Y-axis direction; incident light enters the scribing mechanism, the Y-axis conveying mechanism drives the scribing mechanism to move in the Y-axis direction, the scribing mechanism forms laser point scribing lines through first reflector light, a laser deflection mechanism on the scribing mechanism adjusts the scribing angle, and a visual positioning mechanism positions scribing lines of products to obtain position deviation and communicates with a control module. The control module adjusts a scribe line deflection angle of the laser scribe line based on the positional deviation. According to the invention, the high-precision angle correction function can be realized, and laser scribing and scribing correction can be carried out synchronously. In addition, the laser scribing efficiency can be improved.

Description

Technical Field

[0001] The invention relates to the field of laser cutting and etching, and in particular to a laser scribing device and a scribing angle correction method. Background Art

[0002] The laser scribing process of perovskite cells requires strict control of the dead zone to increase the power generation area of ​​the cell, which requires that the line spacing between the scribing lines P1 / P2 / P3 be as small as possible. If the scribing lines between P1 / P2 / P3 are not parallel, the scribing spacing needs to be increased to avoid crossing of the scribing lines. Since P1 / P2 / P3 are connecting devices, that is, after P1 scribing, the scribing line needs to be repositioned on the P2 device. Similarly, P3 scribing also requires repositioning of P1 or P2 scribing lines. Common angle compensation methods are mainly through mechanical motion interpolation of the servo system axis or position correction of the glass plate under the visual system.

[0003] However, in high-speed and high-acceleration motion scenarios, the common mechanical motion interpolation compensation method of the walking axis cannot meet the high-precision requirements. Secondly, if the mass of the product or fixture is too large, the ordinary servo system cannot meet the requirements of high-speed interpolation. The method of using a visual system to correct the position of high-load fixtures and products on the board under the camera has a slow correction speed, which will affect production efficiency. If the product is fixed The fixture and the product board are rotated for angle correction, the hardware design cost is too high, and the accuracy is difficult to guarantee. Summary of the invention

[0004] The present invention aims to provide a laser scribing device and a scribing angle correction method thereof, which is beneficial to improving the correction accuracy and scribing efficiency, and can simultaneously perform laser scribing and scribing angle correction.

[0005] In order to achieve the above-mentioned object, an embodiment of the present invention provides a laser scribing device, including a mounting substrate, an X-axis conveying mechanism, a fixing fixture, a Y-axis conveying mechanism, a fixing bracket, a scribing mechanism, a visual positioning mechanism and a control module; The X-axis conveying mechanism is fixedly mounted on the mounting substrate, the fixed fixture is fixedly mounted on the output end of the X-axis conveying mechanism, the fixed fixture is used to fix the product, and the X-axis conveying mechanism is used to drive the fixed fixture to move along the X-axis direction; The fixed bracket is fixedly mounted on the mounting base plate, the Y-axis conveying mechanism is fixedly mounted on the fixed bracket, the scribing mechanism is mounted on the output end of the Y-axis conveying mechanism, and the Y-axis conveying mechanism is used to drive the scribing mechanism to move along the Y-axis direction; The scribing mechanism is used to form laser engraved points based on incident light to laser scribing the product, and the scribing mechanism includes a laser deflection mechanism, and the laser deflection mechanism is used to adjust the angle of laser scribing; The visual positioning mechanism is used to visually position the marking line on the product and obtain the position deviation of the positioned marking line relative to the reference zero position; The X-axis conveying mechanism, the Y-axis conveying mechanism, the marking mechanism and the visual positioning mechanism are respectively connected to the control module for communication, and the control module is used to control the laser deflection mechanism to adjust the angle of laser marking based on the position deviation.

[0006] Optionally, the laser scribing device further comprises a first reflector, which is fixedly mounted on the fixed bracket, and reflects incident light to the scribing mechanism; The scribing mechanism also includes a second reflector, a third reflector and a focusing mirror, the first reflector reflects the incident light to the second reflector, the second reflector is used to reflect the incident light to the laser deflection mechanism, the laser deflection mechanism reflects the incident light to the third reflector, the third reflector is used to reflect the incident light to the focusing mirror, and the focusing mirror is used to focus the incident light onto the product for laser scribing.

[0007] Optionally, the laser deflection mechanism includes a driving deflection mechanism and a fourth reflector, the fourth reflector is installed at the output end of the driving deflection mechanism, the driving deflection mechanism is communicatively connected to the control module, and the control module controls the driving deflection mechanism to drive the fourth reflector to deflect.

[0008] Optionally, the scribing mechanism further includes a Z-axis focus adjustment mechanism, the focusing mirror is installed at an output end of the Z-axis focus adjustment mechanism, and the Z-axis focus adjustment mechanism is used to adjust the position of the focusing mirror in the Z-axis direction.

[0009] Optionally, the visual positioning mechanism includes a first camera and a second camera, the first camera and the second camera are communicatively connected to the control module, and the first camera and the second camera are used to capture both ends of the line and respectively obtain the position deviations of the two ends of the line and the reference zero position.

[0010] In order to achieve the above object, the present invention further provides a method for correcting the scribing angle, which is implemented based on the laser scribing device as described above, and the method comprises: S1, locating a reference line of the product, calculating a first marking line deflection angle based on the position of the reference line and a reference zero position, calculating a first marking line movement distance based on the position of the reference line and a first line distance, and moving the product to a first position to mark a first marking line according to the first marking line deflection angle and the first marking line movement distance; Wherein, when performing the first group of markings, the reference line is the board edge, and the first line distance is the board edge distance; otherwise, the reference line is the first marking line in any completed group of markings, and the first line distance is the distance between the first marking line in the current group of markings and the first marking line in any completed group of markings; the reference zero position is the position pre-calibrated by the laser marking device; S2, positioning the first marking line, calculating a second marking line deflection angle based on the position of the first marking line and the reference zero position, calculating a second marking line movement distance based on the position of the first marking line and the second line distance, and moving the product to a second position to mark a second marking line according to the second marking line deflection angle and the second marking line movement distance; S3, positioning the second marking line, calculating a third marking line deflection angle based on the position of the second marking line and the reference zero position, calculating a third marking line moving distance based on the position of the second marking line and the first line spacing, and moving the product to a third position to mark a third marking line according to the third marking line deflection angle and the third marking line moving distance; S4, repeat the marking process according to step S3 until the current group of markings is completed.

[0011] Optionally, the method further comprises: S5, replacing the laser scribing device and repeating steps S1 to S4 until all groups of scribing are completed.

[0012] Optionally, before step S1, the method further includes: Taking the marking line of the laser deflection mechanism at the first angle as the reference position, laser marking is performed at multiple marking deflection angles close to the first angle to obtain multiple groups of positioning marking lines; Moving the plurality of positioning lines into the field of view of the visual positioning mechanism to capture each positioning line; The relationship between the marking deflection angle of the laser deflection mechanism and the position deviation of each positioning marking line is calibrated to prepare an interpolation correction table.

[0013] Before step S1, the method further includes: The marking mechanism performs laser marking based on a first angle to obtain a reference line, moves the reference line to a field of view of the visual positioning mechanism, and sets the position of the reference line as the reference zero position.

[0014] Optionally, the first angle is zero degrees.

[0015] In an embodiment of the present invention, the laser scribing device includes an X-axis conveying mechanism, a fixed fixture for fixing the product, a Y-axis conveying mechanism, a fixed bracket, a scribing mechanism, a visual positioning mechanism and a control module, the fixed fixture is installed at the output end of the X-axis conveying mechanism, the Y-axis conveying mechanism is installed on the fixed bracket, the scribing mechanism is installed at the output end of the Y-axis conveying mechanism, the scribing mechanism includes a laser deflection mechanism that can adjust the scribing deflection angle to adjust the angle of laser scribing, the scribing mechanism forms laser engraving points based on incident light, and the visual positioning mechanism can visually locate the scribing of the product and calculate the position deviation of the scribing relative to the reference zero position. The present invention can locate the existing markings on the product through the visual positioning mechanism before marking, calculate the deviation position and feed it back to the control module, the control module adjusts the marking deflection angle of the laser deflection mechanism to adjust the laser marking angle, and conveys the product through the X-axis conveying mechanism, cooperates with the Y-axis conveying mechanism to move the laser marking point along the Y-axis direction, so that marking can be performed on the product, ensuring that the next marking is parallel to the currently positioned marking, which is beneficial to improving the correction accuracy and marking efficiency, and the control module can receive feedback from the visual positioning mechanism in real time and adjust the marking of the marking mechanism, so that laser marking and marking correction can be performed simultaneously. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the three-dimensional structure of the laser scribing device in an embodiment of the present invention.

[0017] Figure 2 It is a schematic diagram of the three-dimensional structure of the first reflector and part of the scribing mechanism in an embodiment of the present invention.

[0018] Figure 3 Schematic diagram of the three-dimensional structure of the first reflector and part of the scribing mechanism in the embodiment of the present invention from another viewing angle.

[0019] Figure 4 It is a top view of the visual positioning mechanism and the marking mechanism in the embodiment of the present invention positioning and marking on the product.

[0020] Figure 5 The figure is a flow chart of a marking deviation correction method in an embodiment of the present invention.

[0021] Figure 6 The figure is a flow chart of a marking deviation correction method in another embodiment of the present invention. DETAILED DESCRIPTION

[0022] In order to explain the technical content, structural features and achieved effects of the present invention in detail, the following is a detailed description in conjunction with the implementation methods and the accompanying drawings.

[0023] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0024] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. In contrast, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0025] See also Figures 1 to 4 The embodiment of the present invention discloses a laser scribing device, including a mounting substrate 10, an X-axis conveying mechanism 20, a fixed fixture 30, a Y-axis conveying mechanism 40, a fixed bracket 50, a scribing mechanism 60, a visual positioning mechanism 70 and a control module (not shown). The X-axis conveying mechanism 20 is fixedly mounted on the mounting substrate 10, the fixed fixture 30 is fixedly mounted on the output end of the X-axis conveying mechanism 20, the fixed fixture 30 is used to fix the product 100, and the X-axis conveying mechanism 20 is used to drive the fixed fixture 30 to move along the X-axis direction. The fixed bracket 50 is fixedly mounted on the mounting substrate 10, the Y-axis conveying mechanism 40 is fixedly mounted on the fixed bracket 50, the scribing mechanism 60 is mounted on the output end of the Y-axis conveying mechanism 40, and the Y-axis conveying mechanism 40 is used to drive the scribing mechanism 60 to move along the Y-axis direction. The scribing mechanism 60 is used to form laser engraving points based on the incident light to laser scribing the product 100, and the scribing mechanism 60 includes a laser deflection mechanism 80, and the laser deflection mechanism 80 is used to adjust the angle of laser scribing. The visual positioning mechanism 70 is used to visually position the markings on the product 100 and obtain the position deviation of the positioned markings relative to the reference zero position. The X-axis conveying mechanism 20, the Y-axis conveying mechanism 40, the marking mechanism 60 and the visual positioning mechanism 70 are respectively connected to the control module for communication, and the control module is used to control the laser deflection mechanism 80 to adjust the angle of the laser marking based on the position deviation.

[0026] In an embodiment of the present invention, the laser scribing device includes an X-axis conveying mechanism 20, a fixing fixture 30 for fixing a product 100, a Y-axis conveying mechanism 40, a fixing bracket 50, a scribing mechanism 60, a visual positioning mechanism 70 and a control module. The fixing fixture 30 is installed at the output end of the X-axis conveying mechanism 20, the Y-axis conveying mechanism 40 is installed on the fixing bracket 50, the scribing mechanism 60 is installed at the output end of the Y-axis conveying mechanism 40, the scribing mechanism 60 includes a laser deflection mechanism 80 that can adjust the angle of laser scribing, the scribing mechanism 60 forms laser engraving points based on incident light, and the visual positioning mechanism 70 can visually locate the scribing of the product 100 and calculate the position deviation of the scribing relative to the reference zero position. Before marking, the present invention can locate the existing markings on the product 100 through the visual positioning mechanism 70 and calculate the deviation position and feed it back to the control module. The control module adjusts the marking deflection angle of the laser deflection mechanism 80 to adjust the angle of the laser marking. The product 100 is transported by the X-axis conveying mechanism 20, and the laser marking point is moved along the Y-axis direction in cooperation with the Y-axis conveying mechanism 40. Marking can be performed on the product 100 to ensure that the next marking is parallel to the currently positioned marking, which is beneficial to improving the correction accuracy and marking efficiency. The control module can receive feedback from the visual positioning mechanism 70 in real time and adjust the marking of the marking mechanism 60, so that laser marking and marking correction can be performed simultaneously.

[0027] In a specific example, the X-axis conveying mechanism and the Y-axis conveying mechanism may be linear modules, and the control module may control the operation of the X-axis conveying mechanism and the Y-axis conveying mechanism by controlling the operation of the servo motors thereon. Of course, the present invention is not limited to this.

[0028] See also Figures 1 to 3 In some embodiments, the first reflector 90 is fixedly mounted on the fixed bracket 50 , and the first reflector 90 reflects the incident light to the scribing mechanism 60 .

[0029] The marking mechanism 60 includes a second reflector 61, a third reflector 62 and a focusing mirror 63. The first reflector 90 reflects the incident light to the second reflector 61. The second reflector 61 is used to reflect the incident light to the laser deflection mechanism 80. The laser deflection mechanism 80 reflects the incident light to the third reflector 62. The third reflector 62 is used to reflect the incident light to the focusing mirror 63. The focusing mirror 63 is used to focus the incident light onto the product 100 for laser marking.

[0030] Specifically, the laser deflection mechanism 80 includes a driving deflection mechanism 81 and a fourth reflector 82. The fourth reflector 82 is installed at the output end of the driving deflection mechanism 81. The driving deflection mechanism 81 is communicatively connected to the control module. The control module controls the driving deflection mechanism 81 to drive the fourth reflector 82 to deflect.

[0031] Specifically, the driving deflection mechanism 81 includes a fixed mirror seat 83 and a driving deflection shaft 84, the driving deflection shaft 84 is mounted on the fixed mirror seat 83, and the fourth reflector 82 is connected to the driving deflection shaft 84. The control module can control the driving deflection shaft 84 to rotate to drive the fourth reflector 82 to deflect.

[0032] like Figure 3 As shown, A is the laser light when the deflection angle of the driving deflection shaft 84 is 0 degrees, A1 is the laser light when the deflection angle of the driving deflection shaft 84 is A1, and A2 is the laser light when the deflection angle of the driving deflection shaft 84 is A2. By adjusting the deflection angle of the driving deflection shaft 84, the deflection angle of the laser light and the landing point of the laser projection can be adjusted.

[0033] Furthermore, a first through hole 85 is formed on the fixed mirror seat 83 , and the incident light of the second reflector 61 passes through the first through hole 85 and irradiates the fourth reflector 82 , and is reflected by the fourth reflector 82 to the focusing mirror 63 .

[0034] In some embodiments, the scribing mechanism 60 further includes a Z-axis focus adjustment mechanism 64, and the focusing mirror 63 is installed at the output end of the Z-axis focus adjustment mechanism 64, and the Z-axis focus adjustment mechanism 64 is used to adjust the position of the focusing mirror 63 in the Z-axis direction. By adjusting the position of the focusing mirror 63 in the Z-axis direction through the Z-axis focus adjustment mechanism 64, the focus position of the laser in the Z-axis direction can be adjusted.

[0035] See also Figure 4 In some embodiments, the visual positioning mechanism 70 includes a first camera 71 and a second camera 72, which are communicatively connected to a control module. The first camera 71 and the second camera 72 are used to capture both ends of the line and respectively calculate the position deviations of the two ends of the line from the reference zero position.

[0036] See also Figures 4 to 6 The embodiment of the present invention further discloses a method for correcting the scribing angle of a laser scribing device, which is implemented based on the laser scribing device as described above, and the method includes: S1, locate the reference line of the product, calculate the first marking line deflection angle based on the position of the reference line and the reference zero position, calculate the first marking line movement distance based on the position of the reference line and the first line distance, and move the product to the first position to mark the first marking line according to the first marking line deflection angle and the first marking line movement distance.

[0037] When the first set of markings is being performed, the reference line is the board edge and the first line distance is the board edge distance. Otherwise, the reference line is the first marking line in the previous set of markings and the first line distance is the distance between the first marking line in the current set of markings (not marked yet) and the first marking line in the previous set of markings. The reference zero position is the position pre-calibrated by the laser marking equipment.

[0038] S2, locate the first marking line, calculate the second marking line deflection angle based on the position of the first marking line and the reference zero position, calculate the second marking line movement distance based on the position of the first marking line and the second line distance, move the product to the second position to mark the second marking line according to the second marking line deflection angle and the second marking line movement distance.

[0039] S3, locate the second marking line, calculate the third marking line deflection angle based on the position of the second marking line and the reference zero position, calculate the third marking line movement distance based on the position of the second marking line and the second line distance, move the product to the third position to mark the third marking line according to the third marking line deflection angle and the third marking line movement distance.

[0040] It should be understood that before the positioning operation, the control module controls the X-axis conveying mechanism 20 to move the line to be positioned to the field of view of the first camera 71 and the second camera 72. Before laser marking, the first line distance and the second line distance of the laser marking need to be set. The control module controls the operation of the X-axis conveying mechanism 20 based on the line distance and the distance from the laser marking point to the center of the first camera 71 and the center of the second camera 72 to convey the initial position of the line to be marked to the bottom of the laser marking point.

[0041] S4, repeat the marking process according to step S3 until the current group of markings is completed.

[0042] Among them, the reference zero position is the pre-calibrated position of the laser marking equipment, the first marking deflection angle is used to adjust the angle of the laser marking so that the first marking line is parallel to the reference line, the second marking deflection angle is used to adjust the angle of the laser marking so that the second marking line is parallel to the first marking line, and the third marking deflection angle is used to adjust the angle of the laser marking so that the third marking line is parallel to the second marking line.

[0043] It is understandable that even after correction, there may still be slight errors in each laser marking. Therefore, before each marking, the laser deflection mechanism 80 is fine-tuned in real time by repositioning the previous marking to obtain the position deviation from the reference zero position, which is beneficial to ensure the parallel accuracy of the laser marking.

[0044] S5, replace the laser scribing device and repeat steps S1 to S4 until all groups of scribing are completed.

[0045] It should be understood that each product 100 needs to be subjected to at least one set of scribing, and different sets of scribing are performed by different laser scribing devices, and multiple sets of scribing are interspersed with each other. In addition, each laser scribing device can obtain multiple lines through one scribing, so the first scribing, the second scribing, and the third scribing can be one scribing, or more than one scribing.

[0046] In the specific implementation process, if the groups of lines that need to be engraved on the product 100 are P1, P2 and P3, P1 is the first group of lines, P2 is the second group of lines, and P3 is the third group of lines. The first line of P3 can refer to the first line of P1, or can refer to the first line of P2. The present application does not limit the selection of reference lines.

[0047] In some embodiments, before step S1, the method further comprises: (1) Taking the scribing line of the laser deflection mechanism 80 at the first angle as the reference position, laser scribing is performed at multiple scribing deflection angles close to the first angle to obtain multiple groups of positioning scribing lines.

[0048] (2) Move the plurality of positioning lines into the field of view of the visual positioning mechanism 70 and capture each positioning line.

[0049] (3) Calibrate the relationship between the marking deflection angle of the laser deflection mechanism 80 and the position deviation of each positioning marking line, and create an interpolation correction table.

[0050] Specifically, two independent interpolation correction tables are prepared according to the position deviation relationship between the first camera 71 and the second camera 72 and each positioning marking line. When calculating the marking line deflection angle in steps S1 to S5, it is necessary to combine the interpolation correction table to obtain the required marking line deflection angle based on the position deviation from the reference zero position.

[0051] In some embodiments, before step S1, the method further comprises: The marking mechanism 60 performs laser marking based on the first angle to obtain a reference line, moves the reference line to the field of view of the visual positioning mechanism 70, and sets the position of the reference line as a reference zero position.

[0052] Specifically, the first angle is zero degree. Of course, the present invention is not limited to this.

[0053] The laser scribing method of the present invention locates the reference line through the first camera 71 and the second camera 72, and the control module controls the laser deflection mechanism 80 to adjust the scribing deflection angle to the first scribing deflection angle based on the position deviation relationship between the position of the first scribing line and the reference zero position, and calculates the first scribing movement distance based on the position of the reference line and the first line distance, controls the X-axis conveying mechanism to move the first scribing movement distance, and carves the first scribing line on the product 100, then locates the first scribing line, and controls the laser deflection mechanism 80 to adjust the scribing deflection angle to the second scribing deflection angle based on the position deviation relationship between the position of the first scribing line and the reference zero position. The deflection angle of the scribing is calculated based on the position of the first scribing and the second line distance to obtain the second scribing moving distance, the X-axis conveying mechanism is controlled to move the second scribing moving distance, the second scribing is engraved on the product 100, and then the second scribing is positioned. Based on the position of the second scribing and the position deviation relationship of the reference zero position, the laser deflection mechanism 80 is controlled to adjust the scribing deflection angle to the third scribing deflection angle, the third scribing moving distance is calculated based on the position of the second scribing and the second line distance, the X-axis conveying mechanism is controlled to move the third scribing moving distance, and the second scribing is engraved on the product 100, and the cycle is completed until a group of scribing is completed. After each group of scribing is completed, the next laser scribing device is replaced and the first scribing of the previous group of scribing is positioned and the scribing is cycled until all groups of scribing are completed. By adjusting the angle adjustment of the laser deflection mechanism 80 through the positioning of the first camera 71 and the second camera 72, the scribing of the product 100 can be parallel to the board edge and each scribing can be parallel. According to the translation of the laser engraving point in the Y-axis direction and the movement of the product 100 in the X-axis direction, interpolation scribing is performed, and the angle correction function of the scribing can be realized. In addition, the deflection angle of the next line is adjusted by positioning the previous line before each marking, and the first line of the current group is marked by positioning the first line of the previous group of lines, which is conducive to improving the parallel accuracy between the lines.

[0054] The above disclosure is only a preferred embodiment of the present invention, which is intended to facilitate the understanding and implementation of the present invention by those skilled in the art. It certainly cannot be used to limit the scope of rights of the present invention. Therefore, equivalent changes made within the scope of the invention patent of the present invention still fall within the scope covered by the present invention.

Claims

1. A laser scribing device, characterized in that: It includes a mounting base plate, an X-axis conveying mechanism, a fixing fixture, a Y-axis conveying mechanism, a fixing bracket, a marking mechanism, a visual positioning mechanism and a control module; The X-axis conveying mechanism is fixedly mounted on the mounting substrate, the fixed fixture is fixedly mounted on the output end of the X-axis conveying mechanism, the fixed fixture is used to fix the product, and the X-axis conveying mechanism is used to drive the fixed fixture to move along the X-axis direction; The fixed bracket is fixedly mounted on the mounting base plate, the Y-axis conveying mechanism is fixedly mounted on the fixed bracket, the scribing mechanism is mounted on the output end of the Y-axis conveying mechanism, and the Y-axis conveying mechanism is used to drive the scribing mechanism to move along the Y-axis direction; The scribing mechanism is used to form laser engraved points based on incident light to laser scribing the product, and the scribing mechanism includes a laser deflection mechanism, and the laser deflection mechanism is used to adjust the angle of laser scribing; The visual positioning mechanism is used to visually position the marking line on the product and obtain the position deviation of the positioned marking line relative to the reference zero position; The X-axis conveying mechanism, the Y-axis conveying mechanism, the marking mechanism and the visual positioning mechanism are respectively connected to the control module for communication, and the control module is used to control the laser deflection mechanism to adjust the angle of laser marking based on the position deviation.

2. The laser scribing device according to claim 1, characterized in that: The laser scribing device further comprises a first reflector, which is fixedly mounted on the fixed bracket and reflects incident light to the scribing mechanism; The scribing mechanism also includes a second reflector, a third reflector and a focusing mirror, the first reflector reflects the incident light to the second reflector, the second reflector is used to reflect the incident light to the laser deflection mechanism, the laser deflection mechanism reflects the incident light to the third reflector, the third reflector is used to reflect the incident light to the focusing mirror, and the focusing mirror is used to focus the incident light onto the product for laser scribing.

3. The laser scribing device according to claim 1, characterized in that: The laser deflection mechanism includes a driving deflection mechanism and a fourth reflector, wherein the fourth reflector is installed at the output end of the driving deflection mechanism, the driving deflection mechanism is communicatively connected with the control module, and the control module controls the driving deflection mechanism to drive the fourth reflector to deflect.

4. The laser scribing device according to claim 3, characterized in that: The marking mechanism further comprises a Z-axis focus adjustment mechanism, the focusing mirror is mounted at the output end of the Z-axis focus adjustment mechanism, and the Z-axis focus adjustment mechanism is used to adjust the position of the focusing mirror in the Z-axis direction.

5. The laser scribing device according to claim 1, characterized in that: The visual positioning mechanism includes a first camera and a second camera, the first camera and the second camera are communicatively connected to the control module, and the first camera and the second camera are used to capture the two ends of the marking line and respectively obtain the position deviations of the two ends of the marking line and the reference zero position.

6. A method for correcting the scribing angle of a laser scribing device, characterized in that: Based on the laser scribing device according to any one of claims 1 to 5, the method comprises: S1, locating a reference line of the product, calculating a first marking line deflection angle based on the position of the reference line and a reference zero position, calculating a first marking line movement distance based on the position of the reference line and a first line distance, and moving the product to a first position to mark a first marking line according to the first marking line deflection angle and the first marking line movement distance; Wherein, when performing the first group of markings, the reference line is the board edge, and the first line distance is the board edge distance; otherwise, the reference line is the first marking line in any completed group of markings, and the first line distance is the distance between the first marking line in the current group of markings and the first marking line in any completed group of markings; the reference zero position is the position pre-calibrated by the laser marking device; S2, positioning the first marking line, calculating a second marking line deflection angle based on the position of the first marking line and the reference zero position, calculating a second marking line movement distance based on the position of the first marking line and the second line distance, and moving the product to a second position to mark a second marking line according to the second marking line deflection angle and the second marking line movement distance; S3, positioning the second marking line, calculating a third marking line deflection angle based on the position of the second marking line and the reference zero position, calculating a third marking line movement distance based on the position of the second marking line and the second line distance, and moving the product to a third position to mark a third marking line according to the third marking line deflection angle and the third marking line movement distance; S4, repeat the marking process according to step S3 until the current group of markings is completed.

7. The method for correcting the scribing angle according to claim 6, characterized in that: The method further includes: S5, replacing the laser scribing device and repeating steps S1 to S4 until all groups of scribing are completed.

8. The method for correcting the scribing angle according to claim 6, wherein: Before step S1, the method further includes: Taking the marking line of the laser deflection mechanism at the first angle as the reference position, laser marking is performed at multiple marking deflection angles close to the first angle to obtain multiple groups of positioning marking lines; Moving the plurality of positioning lines into the field of view of the visual positioning mechanism to capture each positioning line; The relationship between the marking deflection angle of the laser deflection mechanism and the position deviation of each positioning marking line is calibrated to prepare an interpolation correction table.

9. The method for correcting the scribing angle according to claim 6, wherein: Before step S1, the method further includes: The marking mechanism performs laser marking based on a first angle to obtain a reference line, moves the reference line to a field of view of the visual positioning mechanism, and sets the position of the reference line as the reference zero position.

10. The scribing angle correction method according to claim 8 or 9, characterized in that: The first angle is zero degree.

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