Perovskite laser scribing machine based on glass surface scribing

Abstract

The utility model provides a perovskite laser scribing machine based on glass surface scribing. In order to solve the problem of low scribing efficiency of a large-size perovskite cell substrate, the device comprises a laser generation module which specifically comprises a laser and a reflector path system, and a laser splitting module which specifically comprises a laser splitting box, a multi-beam focusing scribing module and a cell substrate supporting and moving module, the device specifically comprises at least one focusing ruling head assembly and a ruling head movement module, and a dust extraction system can be configured for synchronous dust removal. Through multi-beam synchronous scribing, simultaneous processing of at most 48 beams of laser is realized, the scribing efficiency of the perovskite cell is remarkably improved, and the high-efficiency production requirement of a large-scale production line is met.

Description

Technical Field

[0001] This utility model relates to a perovskite laser scribing machine based on glass surface engraving, belonging to the field of laser processing optics and automatic control technology. Background Technology

[0002] Perovskite solar cells, as a typical representative of third-generation high-efficiency thin-film batteries, require three key scribing processes (P1-P3) using laser scribing equipment during their manufacturing. These processes demand extremely high straightness and parallelism at the micrometer level, and the scribing accuracy and stability directly affect the cell's photoelectric conversion efficiency. As perovskite photovoltaic cell production lines expand to GW-scale, the size of their glass substrates has significantly increased; for example, panels currently used are 2.4 meters long and 1.2 meters wide, requiring over 200 scribing lines to be processed in a single operation. However, traditional laser scribing equipment is limited by the number of laser beams that can be used in a single scribing operation, resulting in low production efficiency and making it difficult to meet the high-efficiency processing requirements of large-scale production lines. Utility Model Content

[0003] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a perovskite laser scribing machine based on glass surface scribing.

[0004] According to the embodiments of this utility model, the first embodiment is provided as follows: a perovskite laser scribing machine based on glass surface scribing, comprising: a laser generating module, a laser beam splitting module, a multi-beam focusing scribing module, and a battery substrate support and movement module;

[0005] The laser generating module includes a laser and an external optical path system. The external optical path system is connected to the output end of the laser and expands the initial laser beam output by the laser.

[0006] The laser beam splitting module includes a laser beam splitting box, which is connected to the output end of the external optical path system and splits the expanded laser beam into 6-24 split laser beams.

[0007] The multi-beam focusing scribing module includes at least one set of focusing scribing head assemblies and a scribing head motion module. Each set of focusing scribing head assemblies is connected to the output end of the laser beam splitter. The focusing scribing head assembly focuses the split laser beam and outputs it upward to the perovskite solar cell substrate with the glass surface facing upward. The scribing head motion module is connected to each set of focusing scribing head assemblies and controls the focusing scribing head assembly to reciprocate along the scribing direction.

[0008] The battery substrate support and movement module includes a support member and a linear motor platform module. The support member can support the perovskite battery, and the linear motor platform module can clamp the side of the perovskite battery and drive it to move along the vertical scribing direction.

[0009] Furthermore, it also includes a dust extraction system.

[0010] Furthermore, the dust extraction system includes a dust extraction port corresponding to each of the focusing scribing head assembly, and a dust extraction moving assembly that drives the dust extraction port to move synchronously with the focusing scribing head assembly.

[0011] Furthermore, the dust extraction moving component is mounted above the linear motor platform module via a shock absorption module.

[0012] Furthermore, the focusing scribing head assembly includes an air-bearing linear motor platform module or a servo motor lead screw module.

[0013] Furthermore, the support member includes support rollers or an air flotation mechanism.

[0014] Furthermore, the laser is a femtosecond fiber laser, a picosecond laser, or a nanosecond laser; the laser wavelength of the laser is ultraviolet, green, or infrared.

[0015] Furthermore, the dust extraction system is equipped with 1-2 sets of dust extraction ports, each set of dust extraction ports corresponding to a set of focusing scribing head components.

[0016] Furthermore, the focusing scribing head focuses the split laser beam onto the thin film coating of the glass-faced perovskite solar cell substrate.

[0017] Compared with existing technologies, the unique advantages of the technical solution provided in this application are as follows: This utility model, by setting up a laser generation module, a laser beam splitting module, a multi-beam focusing and scribing module, and a battery substrate support and movement module, inputs the initial laser beam into a laser beam splitter after beam expansion via an external optical path, splitting it into 6 to 24 beams. Then, multiple sets of focusing and scribing head assemblies focus the beams and output them upwards to the perovskite battery substrate with the glass surface facing upwards. In conjunction with the scribing head motion module driving the focusing and scribing head assemblies to reciprocate along the scribing direction, and the linear motor platform module driving the battery substrate to move along the perpendicular scribing direction, multi-beam synchronous scribing processing is achieved. This structure significantly increases the number of beams in a single scribing operation, enabling the simultaneous processing of up to 48 focused laser beams, effectively improving the scribing efficiency of perovskite photovoltaic cells and meeting the high-efficiency production requirements of large-scale production lines. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] in:

[0020] Figure 1 This is a schematic diagram of the overall structure of a perovskite laser scribing machine based on glass surface scribing in one embodiment;

[0021] Figure 2 This is a schematic diagram illustrating the focused scribing head assembly of a perovskite laser scribing machine based on glass surface scribing in one embodiment.

[0022] Figure label:

[0023] 10-Laser; 12-External optical path system; 20-Laser beam splitter; 31-Focusing scribing head assembly; 40-Dust extraction moving assembly; 41-Shock absorption module; 42-Dust extraction port; 50-Marble base; 51-Feeding conveyor line; 52-Discharge conveyor line; 71-Supporting rollers; 80-Linear motor platform module; 81-Clamping mechanism; 90-Air-float linear motor platform. Detailed Implementation

[0024] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] Example 1

[0026] The technical problem solved by this embodiment is that traditional laser scribing equipment is limited by the number of laser beams in a single scribing, resulting in low production efficiency and making it difficult to meet the high-efficiency processing requirements of large-scale production lines.

[0027] This embodiment provides a perovskite laser scribing machine based on glass surface scribing, such as... Figure 1 , Figure 2 As shown, the P1-P3 scribing process is applicable to perovskite photovoltaic cell glass substrates with a size of 2.4m×1.2m. This device includes a laser generation module, a laser beam splitting module, a multi-beam focusing scribing module, and a cell substrate support and movement module.

[0028] The laser generating module includes a laser 10 and an external optical path system 12. The external optical path system 12 is connected to the output end of the laser 10 and expands the initial laser beam output by the laser 10. The laser 10 is a high-power ultraviolet femtosecond fiber laser with a wavelength of 355nm, an output power of 100W, a pulse width of 50fs, a repetition frequency of 1MHz, and an initial output beam diameter of 3mm. The external optical path system 12 consists of a beam expander and a reflector, and is connected to the output end of the laser 10.

[0029] The laser beam splitting module includes a laser beam splitter box 20, which is connected to the output end of the external optical path system 12 and splits the expanded laser beam into 6-24 beams. The laser beam splitter box 20 adopts a diffractive optical element beam splitting scheme. Its input end is connected to the output end of the external optical path system 12. After the expanded laser beam is incident on the diffractive optical element, it is split into 12 beams. Each beam is output in parallel to the multi-beam focusing scribing module.

[0030] The multi-beam focusing scribing module includes at least one set of focusing scribing head assemblies and scribing head motion modules. Each set of focusing scribing head assemblies 31 is connected to the output end of the laser beam splitter 20. The focusing scribing head assemblies 31 focus the split laser beam and output it upward to the perovskite solar cell substrate with the glass surface facing upward. The scribing head motion module is connected to each set of focusing scribing head assemblies 31 and controls the focusing scribing head assemblies 31 to reciprocate along the scribing direction.

[0031] The focusing scribing head assembly 31 is provided in at least one set, which can be expanded to two sets. Each set contains 12 focusing lens units. The focusing lens units are coated with an ultraviolet anti-reflection film and have a focusing distance of 100mm. Each focusing lens unit corresponds one-to-one with the 12 split laser beams of the laser beam splitter box 20. Each focusing lens unit focuses the split laser beam into a spot with a diameter of about 10μm and outputs it upwards to the perovskite solar cell glass substrate with the glass surface facing upwards.

[0032] The scribing head motion module adopts an air-bearing linear motor platform 90. The maximum stroke of the air-bearing linear motor platform 90 is 2000mm, the maximum speed is 5m / s, and the positioning accuracy is ±1μm. The air-bearing linear motor platform 90 is fixedly connected to the focusing scribing head assembly 31. The air-bearing linear motor platform 90 is driven by a servo controller to control the focusing scribing head assembly 31 to make high-speed reciprocating motion along the scribing direction. A single stroke covers a substrate width of 1.2m, and the maximum frequency is 2Hz.

[0033] The battery substrate support and movement module includes a support member and a linear motor platform module 80. The support member supports the perovskite battery, and the linear motor platform module 80 clamps the side of the perovskite battery and drives it to move along the vertical scribing direction. The support frame uses 50mm diameter rubber support rollers 71, spaced 200mm apart, evenly distributed above the marble base 50. The rubber support rollers 71 support the non-scrubbing area of ​​the glass substrate of the perovskite battery, preventing damage to the film surface. The linear motor platform module 80 uses a double-sided synchronous linear motor with a stroke of 3000mm, a maximum speed of 2m / s, and a positioning accuracy of ±2μm. The clamping mechanism 81 is a vacuum adsorption clamp with a maximum adsorption force of 50N. The vacuum adsorption clamp clamps the non-functional area of ​​the substrate side. The linear motor platform module 80, in conjunction with the support rollers 71, drives the perovskite battery substrate along the vertical scribing direction to complete the switching of scribing passes.

[0034] Furthermore, the feeding conveyor line 51 is located on one side of the marble base 50 of the laser scribing machine, including a roller conveyor unit, a centering and positioning mechanism, and an expandable height compensation device. The roller conveyor unit includes 10 sets of polyurethane-coated rollers arranged along the glass substrate conveying direction. The coated rollers are driven by a synchronous belt and the conveying speed is adjustable. A pneumatic pusher plate is set at the end of the feeding conveyor line 51, symmetrically distributed on both sides of the conveyor line, for centering the substrate along the scribing direction. The height of the rollers in the feeding conveyor line 51 is consistent with the height of the support rollers 71 in the processing area, which is achieved by adjusting the adjustable anchor bolts on the marble base.

[0035] It also includes a discharge conveyor line 52, located on the other side of the marble base 50, which includes a roller conveyor unit, a buffer deceleration zone and a discharge robotic arm.

[0036] The feeding and discharging conveyor lines 52 work in conjunction with the support rollers 71 and linear motor platform module 80 in the processing area to automate the entire process of substrate loading, centering, processing, and unloading, reducing manual intervention. The centering and positioning mechanism of the feeding line ensures that the substrate is aligned with the X-axis reference of the scribing processing area, avoiding scribing position errors caused by substrate offset. The buffer deceleration zone and robotic arm unloading design of the discharging line avoid impact damage during substrate transfer, while supporting continuous processing by the scribing equipment.

[0037] This invention utilizes a laser generation module, a laser beam splitting module, a multi-beam focusing and scribing module, and a battery substrate support and movement module. The initial laser beam is expanded via an external optical path and input into a laser beam splitter 20, splitting into 6-24 beams. Multiple sets of focusing and scribing head assemblies then focus these beams and output them upwards to the perovskite battery substrate with the glass surface facing upwards. A scribing head motion module drives the focusing and scribing head assemblies to reciprocate along the scribing direction, while a linear motor platform module 80 drives the battery substrate to move perpendicular to the scribing direction, achieving multi-beam synchronous scribing processing. This structure significantly increases the number of beams in a single scribing operation, enabling the simultaneous processing of up to 48 focused laser beams, effectively improving the scribing efficiency of perovskite photovoltaic cells and meeting the high-efficiency production requirements of large-scale production lines.

[0038] Example 2

[0039] The perovskite laser scribing machine based on glass surface engraving also includes a dust extraction system, which includes a dust extraction port 42, a dust extraction moving component 40, and a shock absorption module 41. The dust extraction system needs to work in coordination with the multi-beam focusing scribing module and the battery substrate support and moving module of the laser scribing machine.

[0040] Specifically, the number of dust extraction ports 42 corresponds to the number of focusing scribing head assemblies, including 12 dust extraction branch pipes. Each dust extraction branch pipe corresponds one-to-one with the 12 focusing lens units of the focusing scribing head assembly. Each dust extraction branch pipe has an inner diameter of 10mm and an opening direction that is vertically downward and consistent with the direction of the laser spot.

[0041] Specifically, the dust extraction port 42 is fixed to the slider of the dust extraction moving component 40 by a metal bracket, and the opening is 5mm away from the surface of the perovskite solar cell glass substrate. At the same time, the laser scribing path should be avoided to prevent interference.

[0042] The dust extraction moving component 40 adopts a single-axis linear guide module, which includes a servo motor, a ball screw and a slider. The servo motor of the dust extraction moving component 40 and the air-floating linear motor platform 90 of the scribing head motion module are connected through a synchronous controller to ensure that the dust extraction port 42 and the focusing scribing head component move synchronously along the scribing direction and at the same speed.

[0043] The shock absorption module 41 uses four rubber shock absorption pads with a thickness of 20mm. The pads are evenly distributed between the guide rail base of the dust extraction moving component 40 and the top of the linear motor platform module 80. The rubber shock absorption pads are fixed with bolts and can absorb the vibration generated when the linear motor platform module 80 drives the battery glass substrate to move.

[0044] Similarly, when using two sets of focusing scribing head assemblies, a second set of dust extraction ports 42 is added, totaling 24 dust extraction branch pipes, as well as corresponding dust extraction moving components 40. The two dust extraction systems move synchronously with the two sets of focusing scribing head assemblies to achieve full dust coverage collection during the scribing process across the entire width.

[0045] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. The above embodiments only illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this application's patent. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the concept of this application, and these all fall within the protection scope of this application.

[0046] It should be noted that when an element is referred to as being "fixed to" or "set on" another component, it can be directly or indirectly set on the other component; when a component is referred to as being "connected to" another component, it can be directly or indirectly connected to the other component. It should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0047] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" or "several" means two or more, unless otherwise explicitly specified.

[0048] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

Claims

1. A perovskite laser scribing machine based on glass surface engraving, characterized in that, include: Laser generating module, laser beam splitting module, multi-beam focusing and scribing module, and battery substrate support and movement module; The laser generating module includes a laser and an external optical path system. The external optical path system is connected to the output end of the laser and expands the initial laser beam output by the laser. The laser beam splitting module includes a laser beam splitting box, which is connected to the output end of the external optical path system and splits the expanded laser beam into 6-24 split laser beams. The multi-beam focusing scribing module includes at least one set of focusing scribing head assemblies and a scribing head motion module. Each set of focusing scribing head assemblies is connected to the output end of the laser beam splitter. The focusing scribing head assembly focuses the split laser beam and outputs it upward to the perovskite solar cell substrate with the glass surface facing upward. The scribing head motion module is connected to each set of focusing scribing head assemblies and controls the focusing scribing head assembly to reciprocate along the scribing direction. The battery substrate support and movement module includes a support member and a linear motor platform module. The support member can support the perovskite battery, and the linear motor platform module can clamp the side of the perovskite battery and drive it to move along the vertical scribing direction.

2. The perovskite laser scribing machine based on glass surface scribing according to claim 1, characterized in that, It also includes a dust extraction system.

3. The perovskite laser scribing machine based on glass surface scribing according to claim 2, characterized in that, The dust extraction system includes dust extraction ports corresponding to the focusing scribing head assembly, and a dust extraction moving assembly that drives the dust extraction ports to move synchronously with the focusing scribing head assembly.

4. The perovskite laser scribing machine based on glass surface scribing according to claim 3, characterized in that, The dust extraction moving component is mounted on top of the linear motor platform module via a shock absorption module.

5. The perovskite laser scribing machine based on glass surface scribing according to claim 1, characterized in that, The focusing scribing head assembly includes an air-bearing linear motor platform module or a servo motor lead screw module.

6. The perovskite laser scribing machine based on glass surface scribing according to claim 1, characterized in that, The support component includes support rollers or an air flotation mechanism.

7. The perovskite laser scribing machine based on glass surface scribing according to claim 1, characterized in that, The laser is a femtosecond fiber laser, a picosecond laser, or a nanosecond laser; the laser wavelength of the laser is ultraviolet, green, or infrared.

8. The perovskite laser scribing machine based on glass surface scribing according to claim 1, characterized in that, The dust extraction system is equipped with 1-2 dust extraction ports, and each dust extraction port corresponds to a set of focusing scribing head components.

9. The perovskite laser scribing machine based on glass surface scribing according to claim 1, characterized in that, The focusing scribing head focuses the split laser beam onto the thin film coating of the perovskite solar cell substrate with the glass side facing up.

Images