Detection equipment for leveler of semiconductor grinding unit

Abstract

The invention provides detection equipment for a leveler of a semiconductor grinding unit, and belongs to the technical field of leveler detection of the semiconductor grinding unit, the detection equipment comprises a hollow base, the upper surface of the hollow base is provided with two mounting racks, the inner tops of the two mounting racks are both provided with laser interferometers, and the laser interferometers are arranged on the upper surface of the hollow base. The device comprises a hollow base, a conveying mechanism is arranged in the hollow base, a plurality of clamping and fixing mechanisms are arranged on the conveying mechanism, and each clamping and fixing mechanism comprises a square mounting block; by means of the clamping and fixing mechanism, the leveler can be stably clamped and fixed, then the leveler is smoothly transferred to the laser interferometers to be detected, and before the leveler is transferred to the second laser interferometer, the leveler can be overturned by 180 degrees through the overturning mechanism. Therefore, the second laser interferometer detects the other surface of the leveler, the operation is simple and rapid, and the detection efficiency is high.

Description

Technical Field

[0001] The present invention belongs to the technical field of leveler detection of semiconductor grinding units, and in particular relates to a detection device for a leveler of a semiconductor grinding unit. Background Art

[0002] The detection equipment of the planarizer of the semiconductor grinding unit is mainly based on high-precision optical detection technology. It analyzes the flatness of the wafer surface by emitting light and receiving reflected light. When the light is irradiated to the wafer surface, if the surface is uneven, the light will be scattered or the reflection angle will change. After the equipment captures these changes, it uses advanced optical technology and image processing algorithms to accurately calculate the flatness data of the wafer surface and realize nanometer-level detection.

[0003] However, when the existing inspection equipment inspects the wafer, it is still necessary to manually load and unload the wafer for inspection. Although some of them are loaded mechanically, the wafer cannot be flipped during the inspection process, resulting in the wafer needing to be loaded and unloaded twice before the flatness of the upper and lower surfaces can be inspected. The operation is cumbersome and inefficient.

[0004] Therefore, we propose a detection device for a leveler of a semiconductor grinding unit to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to solve the problem that when existing testing equipment detects wafers, it is still necessary to manually load and unload the wafers for testing. Although some of them are loaded mechanically, the wafers cannot be flipped during the testing process, resulting in the wafers needing to be loaded and unloaded twice before the flatness of the upper and lower surfaces can be tested. The operation is cumbersome and the efficiency is low. A testing device for a flattener of a semiconductor grinding unit is proposed.

[0006] The object of the present invention can be achieved by the following technical scheme: comprising a hollow base, wherein the upper surface of the hollow base is provided with a mounting frame, and two mounting frames are provided, and the inner tops of the two mounting frames are provided with laser interferometers, and the interior of the hollow base is provided with a transmission mechanism, and the transmission mechanism is provided with a clamping and fixing mechanism, and the clamping and fixing mechanism is provided with a plurality of groups, and the clamping and fixing mechanism comprises a square mounting block, and two square mounting blocks are symmetrically provided front and back, and cylindrical rotating blocks are rotatably installed inside the two square mounting blocks, and screws are rotatably installed inside the two cylindrical rotating blocks, and two The circumferential surface of the screw is threadedly connected with a moving block, and a connecting rod is provided on the side where the two moving blocks are close to each other. The other ends of the two groups of connecting rods respectively penetrate the two cylindrical rotating blocks and are fixedly connected with an arc-shaped clamping plate, and the leveler body is clamped and fixed between the two arc-shaped clamping plates. An annular connecting block is provided on the side of the two cylindrical rotating blocks away from the leveler body, and a rotating gear 2 is provided on the circumferential outer surface of the two annular connecting blocks. A rotating gear 1 is provided on the outer side of the two rotating gears 2, and the two rotating gears 1 are respectively provided on the circumferential surfaces of the two screws.

[0007] As a preferred embodiment of the present invention, a moving groove is opened inside the cylindrical rotating block, and the moving block is arranged inside the moving groove.

[0008] As a preferred embodiment of the present invention, a flipping mechanism is arranged inside the hollow base, and the flipping mechanism includes a mounting plate, and two mounting plates are symmetrically arranged front and back and are respectively arranged on the inner walls on the front and back sides of the hollow base, and the two mounting plates are arranged in the middle of the two mounting frames, and the upper surfaces of the two mounting plates are provided with a tooth plate 1 and a fixed protrusion plate, and the fixed protrusion plate is closer to the leveler body than the tooth plate 1.

[0009] As a preferred embodiment of the present invention, a lifting plate is connected to the top of each square mounting block through a reset spring, and the lifting plate and the fixed convex plate are in the same horizontal plane, the lower end of the lifting plate is lower than the height of the fixed convex plate and does not contact the upper surface of the mounting plate, the rotating gear 2 and the tooth plate 1 are in the same horizontal plane, and the teeth of the rotating gear 2 match the teeth of the tooth plate 1.

[0010] As a preferred embodiment of the present invention, a plug-in block is provided on the lower surface of the upper end of the lifting plate, and slots are provided at both the upper and lower ends of the cylindrical rotating block. The lower end of the plug-in block passes through the upper end of the square mounting block and is plugged into the interior of the slot at the upper end.

[0011] As a preferred embodiment of the present invention, movable grooves are provided on the front and rear sides inside the hollow base, and a lifting cylinder 1 is provided inside the left side of the two movable grooves. A tooth plate 2 is provided at the upper end of the lifting cylinder 1, and the teeth of the tooth plate 2 match the teeth of the rotating gear 1.

[0012] As a preferred embodiment of the present invention, a discharging mechanism is arranged inside the right side of the hollow base, and the discharging mechanism includes a servo motor 2, and the servo motor 2 is arranged on the rear side of the right end of the hollow base. The power output end of the servo motor 2 is transmission-connected with a rotating shaft 2, and the circumferential surface of the rotating shaft 2 is transmission-connected with a conveyor belt through a transmission roller, and two groups of transmission rollers and conveyor belts are arranged, and the middle parts of the two groups of conveyor belts are hollow, and a placement plate is arranged in the middle of the front end of the two groups of conveyor belts, and the two sides of the placement plate are not in contact with the conveyor belt, and the lower ends of the two placement plates are provided with electric lifting rods, and the electric lifting rods are installed inside the hollow base through a fixing plate.

[0013] As a preferred embodiment of the present invention, a lifting cylinder 2 is arranged on the right side of the upper surface of the hollow base, and there are four lifting cylinders 2, the two lifting cylinders 2 on the left side are arranged above the conveyor belt on the left side, and the two lifting cylinders 2 on the right side are arranged above the conveyor belt on the right side, and a tooth plate 3 is arranged at the lower end of the four lifting cylinders 2, and the teeth of the tooth plate 3 match the teeth of the rotating gear 1.

[0014] As a preferred embodiment of the present invention, a through slot is provided at the right rear end of the hollow base, and two through slots are provided, and the rear ends of the two groups of conveyor belts are respectively arranged inside the two through slots.

[0015] As a preferred embodiment of the present invention, the transmission mechanism includes a servo motor 1, and the servo motor 1 is arranged on the rear side of the left end of the hollow base. The power output end of the servo motor 1 is transmission-connected with a rotating shaft 1, and the circumferential surface of the rotating shaft 1 is transmission-connected with a chain conveyor belt through a sprocket. The middle part of the chain conveyor belt is hollow, and several groups of the clamping and fixing mechanisms are all arranged on the surface of the chain conveyor belt.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] (1) The clamping and fixing mechanism can stably clamp and fix the leveler, and then smoothly transfer the leveler to the laser interferometer for detection. Then, before transferring it to the second laser interferometer, the flipping mechanism can flip the leveler 180 degrees, and then the second laser interferometer can detect the other side of the leveler. The operation is simple and fast, and the detection efficiency is high.

[0018] (2) Through the discharging mechanism, lifting cylinder 2 and tooth plate 3, the leveler after inspection can be stably removed, and then the leveler can be smoothly transported backward without affecting the overall inspection work, so that the inspection tooling can be carried out continuously and stably. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0020] Figure 1 It is a schematic diagram of a first three-dimensional structure of the present invention;

[0021] Figure 2 It is a schematic diagram of a second three-dimensional structure of the present invention;

[0022] Figure 3 It is a front cutaway perspective view of the present invention;

[0023] Figure 4 It is a right cutaway perspective view of the present invention;

[0024] Figure 5 It is a schematic diagram of the three-dimensional structure of the clamping and fixing mechanism of the present invention;

[0025] Figure 6 It is a partial left-section stereoscopic view of the turning mechanism of the present invention;

[0026] Figure 7 It is a schematic diagram of the three-dimensional structure of the discharging mechanism of the present invention.

[0027] In the figure: 1. Hollow base; 2. Transmission mechanism; 201. Servo motor 1; 202. Rotating shaft 1; 203. Sprocket; 204. Chain conveyor belt; 3. Clamping and fixing mechanism; 301. Square mounting block; 302. Cylindrical rotating block; 303. Screw; 304. Moving block; 305. Connecting rod; 306. Arc clamping plate; 307. Rotating gear 1; 308. Annular connecting block; 309. Rotating gear 2; 4. Leveler body; 5. Turning mechanism; 501. Mounting plate; 50 2. Lifting plate; 503. Tooth plate one; 504. Fixed convex plate; 505. Reset spring; 506. Plug-in block; 6. Discharging mechanism; 601. Servo motor two; 602. Rotating shaft two; 603. Transmission roller; 604. Conveyor belt; 605. Placement plate; 606. Electric lifting rod; 7. Mounting frame; 8. Laser interferometer; 9. Movable slot; 10. Lifting cylinder one; 11. Tooth plate two; 12. Slot; 13. Moving slot; 14. Through slot; 15. Lifting cylinder two; 16. Tooth plate three. DETAILED DESCRIPTION

[0028] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] Embodiment 1:

[0030] See also Figure 1 - Figure 7 As shown, a detection device for a flattener of a semiconductor grinding unit includes a hollow base 1, a mounting frame 7 is arranged on the upper surface of the hollow base 1, and two mounting frames 7 are arranged, and the inner tops of the two mounting frames 7 are both provided with laser interferometers 8, and the laser interferometers 8 are prior art, so they are not described in detail, a conveying mechanism 2 is arranged inside the hollow base 1, and a clamping and fixing mechanism 3 is arranged on the conveying mechanism 2, and the clamping and fixing mechanism 3 is provided with a plurality of groups, and the conveying mechanism 2 includes a servo motor 201, and the servo motor 201 is driven by a motor The seat is arranged at the rear side of the left end of the hollow base 1, the power output end of the servo motor 201 is connected to the rotating shaft 202 through a coupling transmission, the circumferential surface of the rotating shaft 202 is connected to the chain plate conveyor belt 204 through a sprocket 203 transmission, the middle part of the chain plate conveyor belt 204 is hollow, and the hollow setting mode of the middle part of the chain plate conveyor belt 204 provides a flipping space when the subsequent detection object needs to be flipped, so that the upper and lower surfaces of the object to be detected can be detected, and a plurality of groups of clamping and fixing mechanisms 3 are arranged on the surface of the chain plate conveyor belt 204;

[0031] The clamping and fixing mechanism 3 includes a square mounting block 301, and two square mounting blocks 301 are symmetrically arranged front and back, cylindrical rotating blocks 302 are rotatably installed inside the two square mounting blocks 301, screws 303 are rotatably installed inside the two cylindrical rotating blocks 302, and moving blocks 304 are threadedly connected to the circumferential surfaces of the two screws 303, and a moving groove 13 is opened inside the cylindrical rotating block 302, and the moving block 304 is arranged inside the moving groove 13. The setting of the moving groove 13 provides space for the moving block 304 to move forward and backward, so that the moving blocks 304 on the front and rear sides can approach or move away from each other, and the two A connecting rod 305 is provided on the side where the moving blocks 304 are close to each other, and the other ends of the two groups of connecting rods 305 respectively penetrate the two cylindrical rotating blocks 302 and are fixedly connected with arc-shaped clamping plates 306, and the leveler body 4 is clamped and fixed between the two arc-shaped clamping plates 306, and an annular connecting block 308 is provided on the side away from the leveler body 4 of the two cylindrical rotating blocks 302, and a rotating gear 2 309 is provided on the circumferential outer surface of the two annular connecting blocks 308, and a rotating gear 1 307 is provided on the outer side of the two rotating gears 2 309, and the two rotating gears 1 307 are respectively arranged on the circumferential surface of the two screw rods 303;

[0032] It should be noted that the two square mounting blocks 301 in each set of clamping and fixing mechanisms 3 are respectively arranged on the front and rear sides of the surface of the chain conveyor belt 204, so that the two square mounting blocks 301 can clamp and fix the leveler body 4 in the middle, so that the leveler body 4 is located above the hollow part of the chain conveyor belt 204, which facilitates the subsequent flipping of the leveler body 4.

[0033] The interior of the hollow base 1 is provided with a flip mechanism 5, which includes a mounting plate 501. Two mounting plates 501 are symmetrically arranged front and back and are respectively arranged on the inner walls of the front and rear sides of the hollow base 1, and the two mounting plates 501 are arranged in the middle of the two mounting frames 7. The upper surfaces of the two mounting plates 501 are provided with a tooth plate 503 and a fixed convex plate 504. The fixed convex plate 504 is closer to the leveler body 4 than the tooth plate 503. The top of each square mounting block 301 is connected to a lifting plate 502 through a reset spring 505. The lower surface of the upper end of the lifting plate 502 is provided with a plug-in block 506. The cylindrical Slots 12 are provided at both the upper and lower ends of the rotating block 302. The lower end of the plug-in block 506 passes through the upper end of the square mounting block 301 and is plugged into the upper end of the slot 12. The reset spring 505 can exert a downward pulling force on the lifting plate 502, so that the lifting plate 502 can drive the plug-in block 506 to move downward and be plugged into the slot 12, limiting and fixing the cylindrical rotating block 302, and the lifting plate 502 and the fixed convex plate 504 are in the same horizontal plane, so that when the upper clamping and fixing mechanism 3 moves horizontally to the right, the lower end of the lifting plate 502 will contact the upper end of the fixed convex plate 504, thereby lifting the lifting plate 502 is pushed upward smoothly, wherein the left and right sides of the fixed convex plate 504 are provided with slopes, so that the lifting plate 502 will slowly move upward through the slope during the movement from left to right, and then the bottom of the lifting plate 502 will contact the highest point of the fixed convex plate 504 for a period of time, and then reset downward through the slope on the right, so that the plug-in block 506 loses the limiting fixing effect on the cylindrical rotating block 302 for a short time, and the lower end of the lifting plate 502 is lower than the height of the fixed convex plate 504 and does not contact the upper surface of the mounting plate 501, and the rotating gear 2 309 and the tooth plate 1 503 are in the same horizontal plane, and The gear teeth of the rotating gear 2 309 match the gear teeth of the toothed plate 1 503, wherein the entire length of the toothed plate 1 503 can only drive the rotating gear 2 309 to rotate 180 degrees, so that the leveler body 4 rotates 180 degrees, and then the flatness detection work can be performed on its upper and lower surfaces, and the entire length of the toothed plate 1 503 is located in the middle of the fixed convex plate 504, and its left and right ends are at a certain distance from the slope of the fixed convex plate 504, so that the lifting plate 502 can stably move the plug-in block 506 out of the slot 12 before the rotating gear 2 309 and the toothed plate 1 503 are meshed and rotated to avoid jamming;

[0034] It should be noted that when the clamping and fixing mechanism 3 clamps the leveler body 4 and is located below the laser interferometer 8 on the lower left side, the flatness detection work can be performed on the upper surface of the leveler body 4. After the detection is completed, when the clamping and fixing mechanism 3 moves the leveler body 4 to the right to the bottom of the laser interferometer 8 on the lower right side, because the clamping and fixing mechanism 3 will pass through the mounting plate 501, the lifting plate 502 will contact the fixed convex plate 504, and the lifting plate 502 will be pushed upward, so that the plug-in block 506 moves out of the slot 12. At this time, the cylindrical rotating block 302 loses its fixing effect and can rotate inside the square mounting block 301. Then, when it continues to move to the right, the rotating gear 2 309 engages with the tooth plate 1 503 and rotates, so that the rotating gear 2 309 passes The annular connecting block 308 drives the cylindrical rotating block 302 to rotate, and then the cylindrical rotating block 302 can drive the arc clamping plate 306 and the leveler body 4 to rotate. When the rotating gear 2 309 disengages from the tooth plate 1 503, the rotating gear 2 309 can drive the cylindrical rotating block 302 to rotate one hundred and eighty degrees, so that the leveler body 4 rotates one hundred and eighty degrees. Then, after the lifting plate 502 disengages from the fixed convex plate 504, it is reset downward under the action of the reset spring 505, so that the plug-in block 506 is inserted into the slot 12 again, and the cylindrical rotating block 302 is fixed inside the square mounting block 301 to prevent the rotation of the cylindrical rotating block 302 from affecting its use. At this time, the laser interferometer 8 on the right can perform flatness detection on the original lower surface of the leveler body 4.

[0035] The hollow base 1 is provided with movable grooves 9 on both the front and rear sides. The left sides of the two movable grooves 9 are provided with lifting cylinders 10. The upper end of the lifting cylinder 10 is provided with a tooth plate 2 11. The gear teeth of the tooth plate 2 11 match the gear teeth of the rotating gear 1 307. The setting of the movable grooves 9 provides installation space for the lifting cylinder 10 and the tooth plate 2 11, and also provides rotation space for the rotating gear 1 307, the rotating gear 2 309 and the lifting plate 502 protruding from the outer end of the square mounting block 301, so as to avoid Driven by the chain conveyor belt 204, the rotating gear 307, the rotating gear 2 309 and the lifting plate 502 collide and are damaged with the inner wall of the hollow base 1, wherein the bottom of the lifting cylinder 10 is located above the lower square mounting block 301, so that the square mounting block 301 will not collide with the lifting cylinder 10 when rotating, and the upper end of the tooth plate 2 11 is initially located below the rotating gear 307, so that the rotating gear 307 will not collide with the rotating gear 307 when moving.

[0036] Embodiment 2:

[0037] Please refer to Figure 3 - Figure 4As shown, a discharging mechanism 6 is arranged inside the right side of the hollow base 1, and the discharging mechanism 6 includes a servo motor 601. The servo motor 601 is arranged on the rear side of the right end of the hollow base 1 through a motor seat. The power output end of the servo motor 601 is connected to the rotating shaft 602 through a coupling transmission. The circumferential surface of the rotating shaft 602 is connected to the conveyor belt 604 through a transmission roller 603. There are two groups of transmission rollers 603 and conveyor belt 604. The middle parts of the two groups of conveyor belts 604 are hollow. A placement plate 605 is arranged in the middle of the front end of the two groups of conveyor belts 604, and the two sides of the placement plate 605 do not contact the conveyor belt 604, so that the placement plate 605 can be placed in a vertical direction. The two placing plates 605 are moved upward to the bottom of the leveler, and then the leveler can be received, and then the leveler is transported to the conveyor belt 604. The lower ends of the two placing plates 605 are provided with electric lifting rods 606, and the electric lifting rods 606 are installed inside the hollow base 1 through the fixing plate. A through slot 14 is provided at the right rear end of the hollow base 1, and there are two through slots 14. The rear ends of the two groups of conveyor belts 604 are respectively arranged in the two through slots 14. The arrangement of the through slots 14 provides installation space for the rear end of the conveyor belt 604, so that the rear end of the conveyor belt 604 can extend to the rear side of the hollow base 1, so as to facilitate the backward transportation of the leveler body 4 that has been inspected.

[0038] It should be noted that rubber pads are provided on the upper surface of the placement plate 605 and the clamping surface of the arc-shaped clamping plate 306, so that when the placement plate 605 or the arc-shaped clamping plate 306 contacts the leveler body 4, scratches will not occur on the contact surfaces of the two, thereby improving the safety of the leveler body 4 during clamping or transportation, avoiding scratches, and reducing the defective rate. Among them, the left conveyor belt 604 is used to transport good levelers, and the right conveyor belt 604 is used to transport defective levelers.

[0039] A lifting cylinder 2 15 is arranged on the right side of the upper surface of the hollow base 1, and there are four lifting cylinders 2 15. The two lifting cylinders 2 15 on the left are arranged above the left conveyor belt 604, and the two lifting cylinders 2 15 on the right are arranged above the right conveyor belt 604. The lower ends of the four lifting cylinders 2 15 are all provided with tooth plates 3 16, and the gear teeth of the tooth plate 3 16 match the gear teeth of the rotating gear 1 307. The arrangement of the lifting cylinder 2 15 and the tooth plate 3 16 here can drive the rotating gear 1 307 to rotate in the opposite direction after the lifting cylinder 2 15 drives the tooth plate 3 16 to move downward, so that the arc-shaped clamping plate 306 loses its clamping and fixing effect on the leveler body 4, and then the leveler body 4 can stably fall on the placement plate 605 to complete the unloading work.

[0040] When the present invention is used, firstly, the leveler to be tested is placed between the two arc-shaped clamping plates 306 at the upper left end by a loading device such as a mechanical claw, and then the two lifting cylinders 10 are started, and the lifting cylinder 10 drives the tooth plate 2 11 to move upward, so that the tooth plate 2 11 drives the rotating gear 1 307 to rotate, and the rotating gear 1 307 rotates to drive the screw 303 to rotate, so that the moving block 304, the connecting rod 305 and the arc-shaped clamping plate 306 move toward the leveler, and then the two arc-shaped clamping plates 306 can clamp and fix the leveler body 4, and then the servo motor 201 is started first. , so that the servo motor 1 201 drives the chain plate conveyor belt 204 to rotate through the rotating shaft 1 202 and the sprocket 203, so that the chain plate conveyor belt 204 drives the upper arc-shaped clamping plate 306 and the leveler body 4 to move horizontally to the right. When the rotating gear 1 307 moves horizontally to the right until it is separated from the tooth plate 2 11, the lifting cylinder 10 is started again to drive the tooth plate 2 11 to reset downward, so as to prevent the tooth plate 2 11 from moving downward and driving the rotating gear 1 307 to rotate in the opposite direction when it is not separated from the rotating gear 1 307, causing the arc-shaped clamping plates 306 to move away from each other and lose the clamping and fixing effect on the leveler body 4;

[0041] The chain conveyor belt 204 drives the leveler body 4 to move rightward to the bottom of the laser interferometer 8 on the left and after passing through the laser interferometer 8, the laser interferometer 8 on the left will detect the flatness of the upper surface of the leveler body 4, and then continue to move to the right, the lifting plate 502 and the rotating gear 2 309 on the square mounting block 301 will pass through the mounting plate 501, so that when the lifting plate 502 contacts the fixed convex plate 504, the lifting plate 502 is pushed upward, so that the plug-in block 506 moves out of the slot 12, and at this time the cylindrical rotating block 302 loses its fixing effect and can rotate inside the square mounting block 301, and then continues to move to the right, the rotating gear 2 309 meshes with the tooth plate 1 503 and rotates, so that the rotating gear 2 309 drives the cylindrical rotating block 302 to rotate through the annular connecting block 308, and then The cylindrical rotating block 302 can drive the arc-shaped clamping plate 306 and the leveler body 4 to rotate. When the rotating gear 2 309 is disengaged from the tooth plate 1 503, the rotating gear 2 309 can drive the cylindrical rotating block 302 to rotate 180 degrees, so that the leveler body 4 rotates 180 degrees. Then, after the lifting plate 502 is disengaged from the fixed convex plate 504, it is reset downward under the action of the reset spring 505, so that the plug-in block 506 is inserted into the slot 12 again, and the cylindrical rotating block 302 is fixed inside the square mounting block 301 to prevent the cylindrical rotating block 302 from rotating and affecting the use. Then, the chain plate conveyor belt 204 continues to move the flipped leveler body 4 to the right to the right laser interferometer 8. After passing through the right laser interferometer 8, the flatness of the original lower surface of the leveler body 4 can be detected.

[0042] The results detected by the two laser interferometers 8 are used for subsequent reactions. When the leveler body 4 is a good product, after the chain plate conveyor belt 204 drives the leveler body 4 to move to the right to the top of the left conveyor belt 604, it pauses for a while. At this time, the electric lifting rod 606 is started, and the electric lifting rod 606 drives the placement plate 605 to move upward until it contacts the lower surface of the leveler body 4 and then stops. Then the lifting cylinder 2 15 is started, and the lifting cylinder 2 15 drives the tooth plate 3 16 to move downward, so that the tooth plate 3 16 drives the rotating gear 1 307 to rotate, so that the moving block 304 drives the passage The arc-shaped clamping plates 306 are driven away from each other by the connecting rod 305, and the clamping and fixing effect on the leveler body 4 is lost. Then the electric lifting rod 606 drives the placing plate 605 and the leveler body 4 to move downward to the initial position, so that the leveler body 4 falls on the conveyor belt 604, and the servo motor 2 601 is started, so that the conveyor belt 604 moves the leveler body 4 backward. Similarly, when the leveler body 4 is defective, it is necessary to pause after the chain plate conveyor belt 204 drives the leveler body 4 to move rightward to above the right conveyor belt 604, and then perform the above-mentioned unloading and conveying work;

[0043] Then after unloading, it is necessary to first use the chain conveyor belt 204 to drive the square mounting block 301 to move to the right, so that the rotating gear 1 307 loses engagement with the tooth plate 3 16, and then the lifting cylinder 2 15 drives the tooth plate 3 16 to reset upward to avoid the tooth plate 3 16 from engaging with the rotating gear 1 307 when moving upward, making the space between the two arc-shaped clamping plates 306 smaller, affecting the subsequent clamping and feeding work.

[0044] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A detection device for a leveler of a semiconductor grinding unit, comprising a hollow base (1), the upper surface of the hollow base (1) is provided with a mounting frame (7), and two mounting frames (7) are provided, and the inner tops of the two mounting frames (7) are both provided with a laser interferometer (8), characterized in that: The hollow base (1) is provided with a conveying mechanism (2) inside, and a clamping and fixing mechanism (3) is provided on the conveying mechanism (2), and the clamping and fixing mechanism (3) is provided with a plurality of groups, the clamping and fixing mechanism (3) comprises a square mounting block (301), and two square mounting blocks (301) are symmetrically provided front and rear, a cylindrical rotating block (302) is rotatably installed inside the two square mounting blocks (301), a screw rod (303) is rotatably installed inside the two cylindrical rotating blocks (302), the circumferential surfaces of the two screw rods (303) are threadedly connected with a moving block (304), and a connecting rod (304) is provided on the side close to each other of the two moving blocks (304). 305), the other ends of the two groups of connecting rods (305) respectively penetrate the two cylindrical rotating blocks (302) and are fixedly connected with an arc-shaped clamping plate (306), the leveler body (4) is clamped and fixed between the two arc-shaped clamping plates (306), the two cylindrical rotating blocks (302) are each provided with an annular connecting block (308) on one side away from the leveler body (4), the circumferential outer surfaces of the two annular connecting blocks (308) are each provided with a rotating gear 2 (309), the outer sides of the two rotating gears 2 (309) are each provided with a rotating gear 1 (307), and the two rotating gears 1 (307) are respectively provided on the circumferential surfaces of the two screw rods (303).

2. The detection device for a leveler of a semiconductor polishing unit according to claim 1, characterized in that: A moving groove (13) is provided inside the cylindrical rotating block (302), and the moving block (304) is arranged inside the moving groove (13).

3. The detection device for a leveler of a semiconductor polishing unit according to claim 1, characterized in that: A flip mechanism (5) is arranged inside the hollow base (1), and the flip mechanism (5) comprises a mounting plate (501). Two mounting plates (501) are symmetrically arranged in front and back and are respectively arranged on the inner walls of the front and back sides of the hollow base (1), and the two mounting plates (501) are arranged in the middle of the two mounting frames (7). The upper surfaces of the two mounting plates (501) are provided with a tooth plate 1 (503) and a fixed protrusion (504), and the fixed protrusion (504) is closer to the leveler body (4) than the tooth plate 1 (503).

4. The detection device for a leveler of a semiconductor polishing unit according to claim 3, characterized in that: A lifting plate (502) is connected to the top of each square mounting block (301) via a return spring (505), and the lifting plate (502) and the fixed convex plate (504) are in the same horizontal plane, the lower end of the lifting plate (502) is lower than the height of the fixed convex plate (504) and does not contact the upper surface of the mounting plate (501), the rotating gear 2 (309) and the toothed plate 1 (503) are in the same horizontal plane, and the gear teeth of the rotating gear 2 (309) match the gear teeth of the toothed plate 1 (503).

5. The detection device for a leveler of a semiconductor polishing unit according to claim 4, characterized in that: A plug-in block (506) is provided on the lower surface of the upper end of the lifting plate (502), and slots (12) are provided at both the upper and lower ends of the cylindrical rotating block (302). The lower end of the plug-in block (506) passes through the upper end of the square mounting block (301) and is plugged into the interior of the slot (12) at the upper end.

6. The detection device for a leveler of a semiconductor polishing unit according to claim 1, characterized in that: The hollow base (1) is provided with movable grooves (9) on both the front and rear sides thereof, and a lifting cylinder (10) is provided inside the left sides of the two movable grooves (9). A tooth plate (11) is provided at the upper end of the lifting cylinder (10), and the gear teeth of the tooth plate (11) match the gear teeth of the rotating gear (307).

7. The detection device for a leveler of a semiconductor polishing unit according to claim 1, characterized in that: A discharge mechanism (6) is arranged inside the right side of the hollow base (1), and the discharge mechanism (6) comprises a second servo motor (601). The second servo motor (601) is arranged at the rear side of the right end of the hollow base (1). The power output end of the second servo motor (601) is transmission-connected to a second rotating shaft (602). The circumferential surface of the second rotating shaft (602) is transmission-connected to a conveyor belt (604) via a transmission roller (603). Two groups of transmission rollers (603) and conveyor belts (604) are arranged. The middle parts of the two groups of conveyor belts (604) are hollow. A placement plate (605) is arranged in the middle of the front end of the two groups of conveyor belts (604), and the two sides of the placement plate (605) do not contact the conveyor belt (604). The lower ends of the two placement plates (605) are arranged with electric lifting rods (606), and the electric lifting rods (606) are installed inside the hollow base (1) via a fixing plate.

8. The detection device for a leveler of a semiconductor polishing unit according to claim 7, characterized in that: A lifting cylinder 2 (15) is arranged on the right side of the upper surface of the hollow base (1), and there are four lifting cylinders 2 (15), the two lifting cylinders 2 (15) on the left side are arranged above the conveyor belt (604) on the left side, and the two lifting cylinders 2 (15) on the right side are arranged above the conveyor belt (604) on the right side, and tooth plates 3 (16) are arranged at the lower ends of the four lifting cylinders 2 (15), and the gear teeth of the tooth plates 3 (16) match the gear teeth of the rotating gear 1 (307).

9. The detection device for a leveler of a semiconductor polishing unit according to claim 7, characterized in that: A through slot (14) is provided at the right rear end of the hollow base (1), and two through slots (14) are provided. The rear ends of the two groups of conveyor belts (604) are respectively arranged inside the two through slots (14).

10. The detection device for a leveler of a semiconductor polishing unit according to claim 1, characterized in that: The transmission mechanism (2) comprises a servo motor (201), and the servo motor (201) is arranged at the rear side of the left end of the hollow base (1); the power output end of the servo motor (201) is drivingly connected to a rotating shaft (202); the circumferential surface of the rotating shaft (202) is drivingly connected to a chain conveyor belt (204) via a sprocket (203); the middle part of the chain conveyor belt (204) is hollow, and a plurality of groups of the clamping and fixing mechanisms (3) are all arranged on the surface of the chain conveyor belt (204).

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