Furnace cover of vertical furnace and vertical furnace

Abstract

The invention discloses a furnace cover of a vertical furnace and the vertical furnace, the vertical furnace comprises a furnace body and the furnace cover, the furnace body is provided with a furnace opening, and the disclosed furnace cover comprises a furnace cover body, a boat bearing part and a first driving mechanism; the furnace cover body is used for being connected with a furnace opening in a sealed mode to form a process space, the boat bearing part is rotationally arranged on the furnace cover body, and the boat bearing part is used for bearing a bearing boat contained in the process space and driving the bearing boat to rotate; the furnace cover body is provided with a first avoiding hole, the first driving mechanism comprises a power source and a first transmission mechanism connected with the power source, the power source is arranged on the outer side of the furnace cover, the first transmission mechanism is in sealing fit with the first avoiding hole, and the power input end, located on the outer side of the furnace cover, of the first transmission mechanism is connected with the power source. According to the scheme, the problem of poor process uniformity caused by difficulty in uniformly contacting the silicon wafer with the process gas in a vertical furnace related to the related technology can be solved.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor process equipment design, and specifically relates to a furnace cover and a vertical furnace. Background Art

[0002] When a silicon wafer is processed in a vertical furnace, a process gas needs to be introduced into a process space formed by the sealed connection between the furnace body and the furnace cover of the vertical furnace, so that the silicon wafers carried by the carrier boat in the process space can contact with the process gas for processing. In the process, the process gas is usually introduced into the process space from one side of the vertical furnace, which makes the process gas diffuse from one side of the carrier boat, making it difficult for the process gas to diffuse more evenly in the process space, and further making it difficult for the silicon wafers on the carrier boat to contact the process gas more evenly, which easily affects the uniformity of the process. Summary of the invention

[0003] The invention discloses a furnace cover of a vertical furnace and a vertical furnace, so as to solve the problem in the vertical furnace involved in the related art that silicon wafers are difficult to uniformly contact process gas, resulting in poor process uniformity.

[0004] In order to solve the above technical problems, the present invention provides the following technical solutions: In a first aspect, the present application discloses a furnace cover of a vertical furnace, the vertical furnace comprising a furnace body and the furnace cover, the furnace body having a furnace opening, the disclosed furnace cover comprising a furnace cover body, a boat bearing portion and a first driving mechanism; The furnace cover body is used to be sealed and connected with the furnace opening to form a process space, the boat bearing part is rotatably arranged on the furnace cover body, and the boat bearing part is used to bear a bearing boat accommodated in the process space and drive the bearing boat to rotate; The furnace cover body is provided with a first avoidance hole, the first driving mechanism includes a power source and a first transmission mechanism connected to the power source, the power source is arranged on the outside of the furnace cover, the first transmission mechanism is sealed and matched with the first avoidance hole, the power input end of the first transmission mechanism located on the outside of the furnace cover is connected to the power source, the power output end of the first transmission mechanism is connected to the boat bearing part through the first avoidance hole, and the power source is used to drive the boat bearing part to rotate through the first transmission mechanism.

[0005] In a second aspect, the present application discloses a vertical furnace, which includes a second driving mechanism and the furnace cover described above, wherein the second driving mechanism is drivingly connected to the furnace cover body and is used to drive the furnace cover to move to open or close the furnace opening.

[0006] The technical solution adopted by the present invention can achieve the following technical effects: The furnace cover disclosed in the embodiment of the present application is realized by rotatably connecting the boat bearing part to the furnace cover body, and by arranging a first driving mechanism, so that the power input end of the first transmission mechanism of the first driving mechanism is connected to the power source of the first driving mechanism, and the power output end of the first transmission mechanism is connected to the boat bearing part, so that the power source can drive the boat bearing part to rotate through the first transmission mechanism, so that the bearing boat carried on the boat bearing part can rotate along with the boat bearing part in the process space formed by the sealed connection between the furnace cover body and the furnace mouth, so that the silicon wafers on the bearing boat can contact the process gas distributed in different parts of the process space, and then the silicon wafers on the bearing boat can contact the process gas more evenly, which is beneficial to improving the uniformity of the process. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 It is a structural schematic diagram of a vertical furnace disclosed in an embodiment of the present application; Figure 2 It is a structural schematic diagram of a furnace cover disclosed in an embodiment of the present application; Figure 3 It is a partial structural schematic diagram of the furnace cover disclosed in the embodiment of the present application; Figure 4 is a schematic diagram of the structure of the support frame disclosed in the embodiment of the present application; Figure 5 is another partial structural schematic diagram of the furnace cover disclosed in the embodiment of the present application; Figure 6 yes Figure 5 A partial enlarged schematic diagram; Figure 7 is a structural schematic diagram of the first transmission mechanism disclosed in the embodiment of the present application; Figure 8 is a schematic structural diagram of the first transmission mechanism disclosed in an embodiment of the present application from another perspective; Fig. 9 is a partial cross-sectional view of the first transmission mechanism disclosed in the embodiment of the present application; Fig.10 yes Fig. 9 A partial enlarged schematic diagram.

[0008] Description of reference numerals: 100-furnace body, 110-furnace mouth, 210-furnace cover body, 211-first avoidance hole, 212-temperature measuring hole, 213-first sealing groove, 214-first heat dissipation channel, 215-protective fluid inlet, 216-temperature measuring joint, 220-boat bearing part, 230-first sealing member, 231-second sealing ring, 232-sealing plug, 240-first sealing ring, 250-protective member, 251-second avoidance hole, 260-support frame, 261-third avoidance hole, 270-connecting plate, 280-protective cover, 281-cover frame, 282-cover, 283-heat dissipation port, 300-first driving mechanism, 310-power source, 320-first transmission mechanism, 321-housing, 322-transmission shaft, 330-first connecting frame, 340-second transmission mechanism, 341-first transmission wheel, 342-second transmission wheel, 343-transmission belt, 350-second connecting frame, 360-adjusting member, 370-fastener, 301-second heat dissipation channel entrance, 302-second heat dissipation channel exit, 400-process space, 510-first detector, 511-first detection slot, 520-detection matching piece, 521-first matching part, 522-second matching part, 530-second detector, 531-second detection slot, 600-carrying boat, A-Protective space. DETAILED DESCRIPTION

[0009] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0010] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0011] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0012] Please refer to Figures 1 to 10 The embodiment of the present application discloses a furnace cover of a vertical furnace. The vertical furnace includes a furnace body 100 and a furnace cover. The furnace body 100 has a furnace mouth 110. The disclosed furnace cover includes a furnace cover body 210, a boat bearing portion 220 and a first driving mechanism 300.

[0013] The furnace cover body 210 is the basic component of the furnace cover. The furnace cover body 210 is used to be sealed and connected with the furnace mouth 110 to form a process space 400, so that the process space 400 can be a sealed space to facilitate the process. The process space 400 can be set in a vertical furnace.

[0014] In one embodiment, the furnace cover may further include a first sealing ring 240, the furnace cover body 210 may be provided with a first sealing groove 213, the first sealing ring 240 may be provided in the first sealing groove 213, the furnace cover body 210 is used to be sealed and connected to the furnace opening 110 through the first sealing ring 240, and this structure is relatively simple and easy to implement. Among them, the material of the first sealing ring 240 may be nitrile rubber or silicone rubber, which is not limited in the embodiments of the present application.

[0015] In order to improve the reliability of the sealed connection between the furnace cover body 210 and the furnace opening 110, the furnace cover body 210 may have a first heat dissipation channel 214, and the first heat dissipation channel 214 and the first sealing groove 213 may be arranged relative to each other, so that the heat of the first sealing ring 240 can be efficiently dissipated through the first heat dissipation fluid in the first heat dissipation channel 214, so as to alleviate the problem that the first sealing ring 240 is easily invalidated in a high temperature environment, thereby making the sealed connection between the furnace cover body 210 and the furnace opening 110 more reliable. Specifically, the first sealing groove 213 may be a rectangular groove, a dovetail groove or a semi-dovetail groove, and the first heat dissipation fluid may be water or mineral oil. The embodiment of the present application does not limit the specific structure of the first sealing groove 213 and the specific type of the first heat dissipation fluid.

[0016] The furnace cover body 210 is also used to provide a mounting base for other components of the furnace cover. In the present application, the furnace cover body 210 is used to provide a mounting base for the boat bearing portion 220. The boat bearing portion 220 is rotatably disposed on the furnace cover body 210. The boat bearing portion 220 is used to carry the carrying boat 600 contained in the process space 400 and drive the carrying boat 600 to rotate, thereby driving the silicon wafers carried by the carrying boat 600 to rotate. Of course, the furnace cover body 210 can also form some functional spaces or structures, such as the first avoidance hole 211 described later.

[0017] The first driving mechanism 300 is used to drive the boat bearing part 220 to rotate. The first driving mechanism 300 includes a power source 310 and a first transmission mechanism 320 connected to the power source 310. The power source 310 is arranged on the outside of the furnace cover to avoid occupying the process space 400 and also avoid being affected by the high temperature and high pressure environment in the process space 400. The first transmission mechanism 320 is sealed with the first avoidance hole 211 to prevent air and the like from entering the process space 400 from between the first transmission mechanism 320 and the first avoidance hole 211, thereby preventing the atmospheric environment from affecting the process environment in the process space 400.

[0018] The power input end of the first transmission mechanism 320 located on the outer side of the furnace cover is connected to the power source 310, and the power output end of the first transmission mechanism 320 is connected to the boat bearing part 220 through the first avoidance hole 211. The power source 310 is used to provide power, wherein the power source 310 is used to drive the boat bearing part 220 to rotate through the first transmission mechanism 320. Specifically, the power source 310 can be an electric motor or a hydraulic motor, and the embodiment of the present application does not limit the specific structure of the power source 310.

[0019] In order to further reduce the occupancy of the process space 400, the power output end of the first transmission mechanism 320 can be located in the first avoidance hole 211 to avoid extending into the process space 400 through the first avoidance hole 211 and occupying the process space 400. In this case, part of the structure of the boat carrying part 220 can extend into the first avoidance hole 211 to be connected to the power output end of the first transmission mechanism 320.

[0020] Of course, in other embodiments, the power output end of the first transmission mechanism 320 may also be located outside the first avoidance hole 211, and may be located on the side of the furnace cover body 210 away from the furnace mouth 110, so that the first transmission mechanism 320 will not enter the process space 400 to avoid occupying the process space 400. In this case, part of the structure of the boat-carrying part 220 may pass through the first avoidance hole 211 and be connected to the power output end of the first transmission mechanism 320.

[0021] The furnace cover disclosed in the embodiment of the present application improves the structure of the furnace cover involved in the related art, by making the boat bearing part 220 rotatably connected to the furnace cover body 210, and by setting the first driving mechanism 300, so that the power input end of the first transmission mechanism 320 of the first driving mechanism 300 is connected to the power source 310 of the first driving mechanism 300, and the power output end of the first transmission mechanism 320 is connected to the boat bearing part 220, so that the power source 310 can drive the boat bearing part 220 to rotate through the first transmission mechanism 320, so that the carrying boat 600 carried on the boat bearing part 220 can rotate with the boat bearing part 220 in the process space 400 formed by the sealed connection between the furnace cover body 210 and the furnace mouth 110, so that the silicon wafers on the carrying boat 600 can contact the process gas distributed in different parts of the process space 400, and then the silicon wafers on the carrying boat 600 can contact the process gas more evenly, which is beneficial to improve the uniformity of the process.

[0022] In addition, there may be differences in temperature at the same level in the process space 400. This structure drives the carrying boat 600 to rotate through the boat carrying portion 220, which can change the positions of silicon wafers at the same level on the carrying boat 600 in the process space 400 at the same level, so that the silicon wafers at the same level on the carrying boat 600 can be heated at different locations in the process space 400 at the same level, thereby making the heating of the silicon wafers more uniform, which is beneficial to further improve the process effect.

[0023] In a further technical solution, the furnace cover may further include a support frame 260 and a connection plate 270, the connection plate 270 may be provided on the support frame 260, and the furnace cover body 210 may be connected to the support frame 260 through the connection plate 270, that is, the connection plate 270 may be located between the furnace cover body 210 and the support frame 260, so that the support frame 260 can support the furnace cover body 210 through the connection plate 270. Specifically, the furnace cover body 210 and the connection plate 270 and the connection plate 270 and the support frame 260 may be connected by threaded connection or clamping, respectively, and the embodiment of the present application does not limit this.

[0024] This structure allows the weight of the furnace cover body 210 to be dispersed on the connection plate 270, which is conducive to alleviating the problem of stress concentration and can more conveniently support the furnace cover body 210, thereby facilitating stable support of the furnace cover body 210. In addition, in this structure, the heat conducted from the furnace cover body 210 to the support frame 260 can be reduced through the connection plate 270, thereby minimizing the impact on the support frame 260.

[0025] At the same time, the support frame 260 can have a third avoidance hole 261, the connecting plate 270 can have a fourth avoidance hole, the third avoidance hole 261 can be arranged opposite to the fourth avoidance hole, and the first drive mechanism 300 can be at least partially located in the fourth avoidance hole and the third avoidance hole 261, so as to avoid affecting the normal installation of the first drive mechanism 300.

[0026] Optionally, the connection plate 270 can be a triangular plate, so as to provide a good support base for the furnace cover body 210, and at the same time help save materials and reduce costs. Of course, the connection plate 270 can also be a circular plate or a rectangular plate, and the embodiment of the present application does not limit the specific structure of the connection plate 270.

[0027] In a feasible technical solution, the furnace cover may further include a protective cover 280, which may be connected to the side of the support frame 260 away from the connecting plate 270, and the protective cover 280 may cover the first driving mechanism 300, and the first driving mechanism 300 is at least partially located in the third avoidance hole 261, so that the protective cover 280 may also cover the third avoidance hole 261.

[0028] This structure can protect the first drive mechanism 300 through the protective cover 280 to prevent the operator from accidentally touching the moving parts of the first drive mechanism 300 (such as the power source 310, the first transmission mechanism 320 and the second transmission mechanism 340 described later, etc.) and interfering with the first drive mechanism 300, thereby enabling the first drive mechanism 300 to stably drive the boat carrying part 220 to rotate.

[0029] Furthermore, the protective cover 280 may include a cover frame 281 and a cover 282, and the cover frame 281 may be arranged on the support frame 260, wherein the cover frame 281 may be located on the side of the support frame 260 away from the connecting plate 270, and the cover frame 281 may be fixedly connected to the support frame 260. Specifically, the cover frame 281 may be fixedly connected to the support frame 260 by threaded connection or welding. The embodiment of the present application does not limit the specific connection method between the cover frame 281 and the support frame 260.

[0030] The cover frame 281 may be disposed around the first driving mechanism 300, and the first driving mechanism 300 is at least partially located in the third avoidance hole 261, so that the cover frame 281 may also be disposed around the third avoidance hole 261. The cover cap 282 may be disposed on a side of the cover frame 281 away from the support frame 260, and a first end of the cover cap 282 may be rotatably connected to the cover frame 281, and a second end of the cover cap 282 is used for locking connection with the cover frame 281.

[0031] In a specific working process, when the first driving mechanism 300 is in a working state, the second end of the cover 282 can be locked and connected to the cover frame 281, so that the cover 282 can be fixed on the side of the cover frame 281 away from the support frame 260, and can cover the cover frame 281, so that the cover 282 and the cover frame 281 can jointly cover the first driving mechanism 300.

[0032] In order to extend the service life of the first driving mechanism 300, it is necessary to perform regular maintenance on the first driving mechanism 300. When the first driving mechanism 300 is in the maintenance state, the second end of the cover 282 and the cover frame 281 can be unlocked to put the cover 282 in the unlocked state. In this case, the second end of the cover 282 is separated from the cover frame 281, so that the cover 282 can be opened by rotating the cover 282, thereby maintaining the first driving mechanism 300. This structure can avoid disassembling the cover 282 and the cover frame 281, which is conducive to simplifying the process and can facilitate the maintenance of the first driving mechanism 300.

[0033] Of course, after the maintenance is finished, the second end of the cover 282 and the cover frame 281 can be locked and connected again, so that the cover 282 is in a locked state. In this case, the second end of the cover 282 is connected to the cover frame 281, so that the cover 282 can cover the cover frame 281, so that the protective cover 280 can continue to protect the first driving mechanism 300. Specifically, the second end of the cover 282 can be connected to the cover frame 281 by threaded connection or clamping, and the embodiment of the present application is not limited to this.

[0034] Optionally, the protective cover 280 may have a heat dissipation port 283, which may be provided on the cover 282 and opposite to the first drive mechanism 300, so as to conveniently and timely dissipate the heat of the first drive mechanism 300 so that the first drive mechanism 300 can operate efficiently.

[0035] Of course, there can be multiple heat dissipation ports 283, and the multiple heat dissipation ports 283 can be arranged on the cover 282. The multiple heat dissipation ports 283 can be respectively opposite to the power source 310 and the first transmission mechanism 320, so as to dissipate heat in time for the power source 310 and the first transmission mechanism 320. Among them, the heat dissipation ports 283 can be strip heat dissipation ports or circular heat dissipation ports, and the specific structure of the heat dissipation ports 283 is not limited in the embodiment of the present application.

[0036] In the embodiment of the present application, a first gap may be provided between the furnace cover body 210 and the boat bearing portion 220, the furnace cover body 210 may have a protective fluid channel, and a protective fluid inlet 215 of the protective fluid channel may be distributed on a side of the furnace cover body 210 away from the process space 400, so as to facilitate input of protective fluid into the protective fluid channel through the protective fluid inlet 215. Specifically, the protective fluid may be input into the protective fluid channel through a pipeline connected to the protective fluid inlet 215.

[0037] The protection fluid outlet of the protection fluid channel can be communicated with the first avoidance hole 211, and the first avoidance hole 211 can be communicated with the first gap. The protection fluid channel is used to transport the protection fluid to the first avoidance hole 211, so that the protection fluid flows to the first gap through the first avoidance hole 211. The protection fluid can enter the first avoidance hole 211 through the protection fluid outlet, and the first avoidance hole 211 is communicated with the first avoidance hole 211, so that the protection fluid can flow to the first gap through the first avoidance hole 211.

[0038] This structure can prevent the process gas in the process space 400 from entering the first gap by allowing the protective fluid to flow into the first gap, thereby preventing the process gas from entering the first avoidance hole 211 through the first gap to affect the first transmission mechanism 320, so as to isolate the first transmission mechanism 320 from the process gas in the process space 400, thereby enabling the first transmission mechanism 320 to work stably. The protective fluid can be nitrogen or helium, and the protective fluid flowing into the first gap can achieve a gas sealing effect, thereby isolating the first transmission mechanism 320 from the process space 400, preventing the process gas from entering the first avoidance hole 211 through the first gap to affect the first transmission mechanism 320, and since nitrogen or helium are both inert gases, it can prevent the protective gas entering the process space 400 through the first gap from affecting the process.

[0039] Specifically, the first transmission mechanism 320 and the furnace cover body 210 may enclose a protection space A, and the protection fluid outlet and the first gap may be in communication with the protection space A, so that the protection fluid can flow into the protection space A through the protection fluid outlet. The protection space A is sealed and isolated from the external environment of the vertical furnace, and is in communication with the process space 400 through the first gap.

[0040] The first transmission mechanism 320 includes the second seal described later. When the second seal is a magnetic fluid, the first transmission mechanism 320 and the first avoidance hole 211 can be sealed with the magnetic fluid, and the magnetic fluid can be located in the protective space A, so that the protective fluid output from the protective fluid outlet can flow to the first gap, isolating the protective space A from the process space 400 to isolate the magnetic fluid from the process gas, and the protective fluid can enter the protective space A to protect the magnetic fluid, thereby avoiding the process gas from corroding the magnetic fluid and causing the magnetic fluid to fail, which affects the sealing effect between the first transmission mechanism 320 and the first avoidance hole 211, thereby helping to improve the reliability of the sealing cooperation between the first transmission mechanism 320 and the first avoidance hole 211.

[0041] In one embodiment, the furnace cover may further include a first sealing member 230, the furnace cover body 210 may have a temperature measuring hole 212, the temperature measuring hole 212 is used to communicate with the process space 400, so as to detect the temperature of the process space 400 through the temperature measuring hole 212, and the first sealing member 230 is used to detachably and hermetically seal the temperature measuring hole 212. Specifically, the first sealing member 230 may be connected to the temperature measuring hole 212 by threaded connection or snap connection, and the embodiment of the present application does not limit the specific connection method between the first sealing member 230 and the temperature measuring hole 212.

[0042] In a specific working process, before the process starts, the first sealing member 230 can be removed, so as to detect the actual temperature in the process space 400 through the temperature measuring hole 212. After the detection is completed, the first sealing member 230 is installed to the temperature measuring hole 212, so that the first sealing member 230 seals the temperature measuring hole 212, so that the vertical furnace can carry out the process normally. This structure facilitates the detection of the actual temperature in the process space 400, thereby ensuring that the actual temperature in the process space 400 can reach the preset temperature, which is conducive to improving the reliability of the process.

[0043] Optionally, the furnace cover body 210 may include a temperature measuring joint 216, the temperature measuring hole 212 may be provided at the temperature measuring joint 216, and the temperature measuring joint 216 may be distributed on a side away from the process space 400 to facilitate connection of a temperature measuring device.

[0044] Further, the first seal 230 may include a second sealing ring 231 and a sealing plug 232, and the sealing plug 232 is used to detachably and hermetically block the temperature measuring hole 212. When detecting the actual temperature in the process space 400, the sealing plug 232 is removed, so that the actual temperature in the process space 400 can be detected through the temperature measuring hole 212. After the detection is completed, the sealing plug 232 is installed to the temperature measuring hole 212, at which time, the sealing plug 232 seals the temperature measuring hole 212, and the second sealing ring 231 is pressed between the sealing plug 232 and the temperature measuring joint 216 to ensure the sealing effect between the sealing plug 232 and the temperature measuring joint 216. This structure is relatively simple and easy to implement. Specifically, the material of the second sealing ring 231 can be nitrile rubber or silicone rubber, which is not limited in the embodiment of the present application.

[0045] In order to extend the service life of the furnace cover, the furnace cover may further include a protective member 250, which may be disposed on the side of the furnace cover body 210 facing the process space 400, thereby protecting the furnace cover body 210 and preventing the process gas from corroding the furnace cover body 210, thereby facilitating extending the service life of the furnace cover. Specifically, the protective member 250 may be a quartz plate or a silicon carbide plate, which is not limited in the present embodiment of the application.

[0046] At the same time, the boat carrying part 220 can be rotatably disposed on the protective part 250, and the protective part 250 can have a second avoidance hole 251 to avoid the power output end of the first transmission mechanism 320. The second avoidance hole 251 and the first avoidance hole 211 can be arranged opposite to each other, and the power output end of the first transmission mechanism 320 can be connected to the boat carrying part 220 through the first avoidance hole 211 and the second avoidance hole 251.

[0047] In this case, the protective member 250 is located between the furnace cover body 210 and the boat bearing part 220, so that at least part of the protective member 250 can be located in the first gap, and a second gap can be provided between the protective member 250 and the boat bearing part 220. The second gap can be connected to the second avoidance hole 251, and the second avoidance hole 251 can be connected to the first avoidance hole 211, so that the protective fluid can flow into the second gap through the first avoidance hole 211 and the second avoidance hole 251 to prevent the process gas in the process space 400 from entering the second gap, thereby preventing the process gas from entering the second avoidance hole 251 through the second gap, and then entering the first avoidance hole 211 through the second avoidance hole 251, thereby preventing the process gas from affecting the first transmission mechanism 320.

[0048] In the embodiments of the present application, Figure 7As shown, the first transmission mechanism 320 may include a housing 321 and a transmission shaft 322, and the housing 321 may be fixedly connected to the furnace cover body 210, so that the first transmission mechanism 320 can be fixed to the furnace cover body 210 through the housing 321. Specifically, the housing 321 may be fixedly connected to the furnace cover body 210 by threaded connection or clamping, and the embodiment of the present application does not limit the specific connection method between the housing 321 and the furnace cover body 210.

[0049] The housing 321 can be sealed with the furnace cover body 210, and the transmission shaft 322 can be rotatably disposed on the housing 321 and can be sealed with the housing 321, so that the transmission shaft 322 can be indirectly sealed with the first avoidance hole 211 through the housing 321, thereby enabling the first transmission mechanism 320 to be sealed with the first avoidance hole 211. The housing 321, the furnace cover body 210 and the transmission shaft 322 can enclose a protective space A together.

[0050] Meanwhile, the first end of the transmission shaft 322 can be connected to the power source 310, and the second end of the transmission shaft 322 can be connected to the boat carrying part 220 through the first avoidance hole 211. The first end of the transmission shaft 322 can be the power input end of the first transmission mechanism 320 to receive the power output by the power source 310, and the second end of the transmission shaft 322 can be the power output end of the first transmission mechanism 320 to drive the boat carrying part 220 to rotate, so that the power source 310 can drive the boat carrying part 220 to rotate through the transmission shaft 322 of the first transmission mechanism 320. In this structure, the structure of the first transmission mechanism 320 is relatively simple and easy to implement, so it is easy to manufacture.

[0051] In an optional technical solution, the shell 321 can be sealed with the furnace cover body 210 through a sealing ring or a sealant. The first transmission mechanism 320 can also include a second seal, which can be arranged between the transmission shaft 322 and the shell 321 to achieve a sealed fit between the transmission shaft 322 and the shell 321, wherein the second seal can be a magnetic fluid, and the magnetic fluid can be located in the protective space A surrounded by the shell 321, the furnace cover body 210 and the transmission shaft 322. In this structure, the sealing fit between the transmission shaft 322 and the shell 321 is achieved by the magnetic fluid, so that the magnetic fluid can be prevented from wearing the transmission shaft 322 or the shell 321, and the process space 400 can be avoided. Of course, the second seal can also be a carbon ring or a floating ring, which is not limited in the embodiment of the present application.

[0052] In order to enable the first transmission mechanism 320 to work stably, the shell 321 can have a second heat dissipation channel, a second heat dissipation channel inlet 301 and a second heat dissipation channel outlet 302. The second heat dissipation channel inlet 301 and the second heat dissipation channel outlet 302 can both be connected to the second heat dissipation channel, and the second heat dissipation channel inlet 301 and the second heat dissipation channel outlet 302 can be distributed on opposite sides of the shell 321, so that the heat of the transmission shaft 322 can be efficiently dissipated by passing the second heat dissipation fluid into the second heat dissipation channel, and the heat inside the shell 321 can be efficiently dissipated, so that the transmission shaft 322 can rotate stably, which is beneficial to ensure the stability of the operation of the first transmission mechanism 320.

[0053] Specifically, the second heat dissipation fluid may be water or mineral oil, and the embodiment of the present application does not limit the specific type of the second heat dissipation fluid.

[0054] In a further technical solution, the first driving mechanism 300 may further include a first connecting frame 330, the first connecting frame 330 may be fixedly connected to the housing 321, the power source 310 may be disposed on the first connecting frame 330, so that the power source 310 may be connected to the housing 321 through the first connecting frame 330, and thus the power source 310 may be connected to the furnace cover body 210 through the first connecting frame 330 and the housing 321. Specifically, the first connecting frame 330 may be fixedly connected to the housing 321 by means of threaded connection or clamping, and the embodiment of the present application does not limit the specific connection method between the first connecting frame 330 and the housing 321.

[0055] This structure can avoid opening a connection hole on the furnace cover body 210 to connect the power source 310 to the furnace cover body 210, thereby achieving fixation of the power source 310, thereby minimizing the impact on the overall strength of the furnace cover body 210.

[0056] In a feasible technical solution, the furnace cover may further include a first detector 510 and a detection matching piece 520. The first detector 510 may be fixedly connected to the first connecting frame 330, and the detection matching piece 520 may be fixedly connected to the transmission shaft 322, that is, the first detector 510 is fixedly arranged, and the detection matching piece 520 rotates around the central axis of the transmission shaft 322 as the transmission shaft 322 rotates. Specifically, the first detector 510 may be a first sensor.

[0057] Meanwhile, the first detector 510 may be provided with a first detection slot 511, and the detection fitting 520 may have a first matching portion 521. The first detection slot 511 is used to match with the first matching portion 521, so as to detect the number of revolutions of the transmission shaft 322 and / or correct the position of the transmission shaft 322 through the matching of the two.

[0058] Based on this, in one embodiment, the first detection slot 511 is used to cooperate with the first matching portion 521, so as to detect the number of revolutions of the transmission shaft 322 through the cooperation of the two. In the specific working process, the power source 310 drives the rotation of the transmission shaft 322, and the number of revolutions of the transmission shaft 322 can be detected through the cooperation of the first detection slot 511 and the first matching portion 521. By detecting the number of revolutions of the transmission shaft 322, the rotation speed of the transmission shaft 322 can be determined. The transmission shaft 322 can drive the boat bearing part 220 to rotate through the furnace cover body 210. Each rotation of the transmission shaft 322 can drive the boat bearing part 220 to rotate one circle, that is, the furnace cover body 210 and the boat bearing part 220 can rotate synchronously, so that the number of revolutions of the boat bearing part 220 can be detected by detecting the number of revolutions of the transmission shaft 322, so that the rotation speed of the boat bearing part 220 can be determined by determining the rotation speed of the transmission shaft 322.

[0059] The power source 310 can adjust the output speed according to the detected number of revolutions of the transmission shaft 322 to adjust the speed of the transmission shaft 322, thereby adjusting the speed of the boat carrier 220, so that the number of revolutions of the transmission shaft 322 is controllable, and further the speed of the boat carrier 220 is controllable.

[0060] The carrying boat 600 is arranged on the boat carrying part 220, and the carrying boat 600 and the boat carrying part 220 can rotate synchronously, so that the rotation speed of the carrying boat 600 can change with the change of the boat carrying part 220, so that the rotation speed of the carrying boat 600 can be adjusted by adjusting the rotation speed of the boat carrying part 220. That is to say, during the process, the output rotation speed of the power source 310 can be adjusted according to the actual process requirements, so that the rotation speed of the carrying boat 600 is controllable, ensuring that the silicon wafers on the carrying boat 600 can contact the process gas more evenly.

[0061] In another embodiment, the first detection slot 511 is used to cooperate with the first matching portion 521, so as to correct the position of the transmission shaft 322 through the cooperation of the two. Since the transmission shaft 322, the boat bearing portion 220 and the carrying boat 600 can all rotate synchronously, the position of the carrying boat 600 and the boat bearing portion 220 can be corrected by correcting the position of the transmission shaft 322. Before the process starts, the power source 310 drives the rotation of the transmission shaft 322, and the position of the transmission shaft 322 can be corrected through the cooperation of the first detection slot 511 and the first matching portion 521, so as to achieve the reset of the transmission shaft 322, thereby achieving the reset of the boat bearing portion 220 and the carrying boat 600, so as to accurately drive the transmission shaft 322 to rotate, and then accurately drive the boat bearing portion 220 and the carrying boat 600 to rotate, thereby reducing the error.

[0062] In other embodiments, the first detection slot 511 is used to cooperate with the first matching portion 521, so as to detect the number of revolutions of the transmission shaft 322 through the cooperation of the two, and correct the position of the transmission shaft 322, so that the output speed of the power source 310 can be adjusted according to the actual process requirements during the process, so that the speed of the carrier boat 600 can be controlled, and it is ensured that the silicon wafers on the carrier boat 600 can contact the process gas more evenly. At the same time, this structure can correct the position of the transmission shaft 322, realize the reset of the transmission shaft 322, and thus realize the reset of the boat bearing part 220 and the carrier boat 600, so that the transmission shaft 322 can be accurately driven to rotate, and then the boat bearing part 220 and the carrier boat 600 can be accurately driven to rotate, reducing errors.

[0063] In a more preferred technical solution, the furnace cover may further include a second detector 530, the second detector 530 may be fixedly connected to the first connecting frame 330, the second detector 530 may be provided with a second detection slot 531, the detection fitting 520 may have a second matching portion 522, the second detection slot 531 is used to match with the second matching portion 522, so as to detect the number of revolutions of the transmission shaft 322 through the matching of the second detection slot 531 and the second matching portion 522. Of course, the position of the transmission shaft 322 may also be corrected through the matching of the second detection slot 531 and the second matching portion 522. This structure can work normally when the first detector 510 fails, so that the number of revolutions of the transmission shaft 322 can be detected normally or the position of the transmission shaft 322 can be corrected, which is conducive to improving the reliability of the furnace cover. In addition, the second detector 530 may be a second sensor.

[0064] Optionally, the first matching portion 521 can be a first protrusion, the second matching portion 522 can be a second protrusion, the first protrusion can protrude toward the axial direction of the transmission shaft 322, the second protrusion can protrude in a direction perpendicular to the axial direction of the transmission shaft 322, the notch direction of the first detection groove 511 can be opposite to the protruding direction of the first protrusion, and the notch direction of the second detection groove 531 can be opposite to the protruding direction of the second protrusion.

[0065] In the specific working process, when the number of rotations of the transmission shaft 322 is detected by cooperating with the first detection groove 511 and the first matching part 521, the first protrusion can rotate around the central axis of the transmission shaft 322 as the transmission shaft 322 rotates, so that it can pass through the first detection groove 511. Each time the transmission shaft 322 rotates one circle, the first protrusion drives the first detection groove 511 to pass through the first detection groove 511 once, so that the number of rotations of the transmission shaft 322 can be determined by detecting the number of times the first protrusion passes through the first detection groove 511.

[0066] When the position of the transmission shaft 322 is corrected by cooperating with the first detection groove 511 and the first matching part 521, the power source 310 can drive the transmission shaft 322 to rotate so that the first protrusion can be located in the first detection groove 511, thereby completing the correction of the position of the transmission shaft 322 to achieve the resetting of the transmission shaft 322.

[0067] When the number of rotations of the transmission shaft 322 is detected through the cooperation between the second detection slot 531 and the second matching portion 522, the second protrusion can rotate around the central axis of the transmission shaft 322 as the transmission shaft 322 rotates, so that it can pass through the second detection slot 531. Each time the transmission shaft 322 rotates one circle, the second protrusion drives the second protrusion to pass through the second detection slot 531 once, so that the number of rotations of the transmission shaft 322 can be determined by detecting the number of times the second protrusion passes through the second detection slot 531.

[0068] When the number of revolutions of the transmission shaft 322 is detected through the cooperation between the second detection slot 531 and the second matching portion 522, the power source 310 can drive the transmission shaft 322 to rotate so that the second protrusion can be located in the second detection slot 531, thereby completing the correction of the position of the transmission shaft 322 to achieve the resetting of the transmission shaft 322.

[0069] In this structure, the orientation of the first protrusion is different from that of the second protrusion, and the orientation of the notch of the first detection slot 511 is different from that of the notch of the second detection slot 531, thereby preventing the first protrusion from entering the second detection slot 531 and the second protrusion from entering the first detection slot 511, thereby preventing the first protrusion and the second detection slot 531 from interfering with each other and preventing the second protrusion and the first detection slot 511 from interfering with each other, which is beneficial to ensure accurate detection of the first detector 510 and the second detector 530.

[0070] In the embodiment of the present application, the first driving mechanism 300 may further include a second transmission mechanism 340, and the second transmission mechanism 340 may include a first transmission wheel 341, a second transmission wheel 342 and a transmission belt 343. The first transmission wheel 341 may be connected to the power source 310, the second transmission wheel 342 may be connected to the first end of the transmission shaft 322, and the transmission belt 343 may be respectively connected to the first transmission wheel 341 and the second transmission wheel 342 for transmission, so that the first end of the transmission shaft 322 can be connected to the power source 310 through the second transmission wheel 342, the transmission belt 343 and the first transmission wheel 341.

[0071] In a specific working process, the power source 310 can drive the first transmission wheel 341 to rotate, and the first transmission wheel 341 can drive the second transmission wheel 342 to rotate through the transmission belt 343, so that the second transmission wheel 342 can drive the transmission shaft 322 to rotate. This structure is relatively simple, easy to implement, and conducive to reducing costs.

[0072] Of course, the second transmission mechanism 340 may also be a chain transmission mechanism or a gear transmission mechanism, and the embodiment of the present application does not limit the specific structure of the second transmission mechanism 340.

[0073] Furthermore, the first driving mechanism 300 may also include a second connecting frame 350 and an adjusting member 360. The second connecting frame 350 may be movably connected to the first connecting frame 330 and may be fixedly connected to the power source 310. The first connecting frame 330 and the second connecting frame 350 may both be connected to the adjusting member 360. The adjusting member 360 is used to drive the power source 310 to move relative to the first connecting frame 330 through the second connecting frame 350.

[0074] During the specific working process, the second connecting frame 350 can be driven to move relative to the first connecting frame 330 through the adjustment member 360, and the power source 310 is fixedly connected to the second connecting frame 350, so that the power source 310 moves with the movement of the second connecting frame 350, so that the second connecting frame 350 can drive the power source 310 to move relative to the first connecting frame 330, so as to realize the movement of the power source 310 relative to the first connecting frame 330.

[0075] At the same time, the first transmission wheel 341 is connected to the power source 310, and the first transmission wheel 341 moves with the movement of the power source 310, so that the first transmission wheel 341 can be moved relative to the first connecting frame 330, wherein the second transmission wheel 342 is connected to the transmission shaft 322, and the transmission shaft 322 is connected to the first connecting frame 330 through the shell 321, so that the second transmission wheel 342 can be indirectly connected to the first connecting frame 330, which makes it possible to adjust the distance between the second transmission wheel 342 and the first transmission wheel 341 by moving the first transmission wheel 341 relative to the first connecting frame 330, so that the tension of the transmission belt 343 can be adjusted, so that the second transmission mechanism 340 can operate stably, which is beneficial to improve the stability of the first driving mechanism 300.

[0076] In one embodiment, the adjustment member 360 may be a threaded adjustment member, in which case the threaded adjustment member may be rotatably connected to the second connection frame 350 and may be threadedly connected to the first connection frame 330, so that when the threaded adjustment member is rotated, the threaded engagement between the threaded adjustment member and the first connection frame 330 may be used to adjust the screwing depth of the threaded adjustment member in the first connection frame 330, thereby driving the second connection frame 350 to move relative to the first connection frame 330 through the threaded adjustment member, and further driving the power source 310 to move relative to the first connection frame 330 through the second connection frame 350. Specifically, the threaded adjustment member may be a bolt or a screw, which is not limited in the present embodiment of the application.

[0077] This structure facilitates more precise adjustment, so that the tension of the transmission belt 343 can be adjusted more accurately, which is beneficial to improving the stability of the second transmission mechanism 340.

[0078] In other embodiments, the adjustment member 360 may be a telescopic rod, and the two ends of the telescopic rod may be fixedly connected to the first connecting frame 330 and the second connecting frame 350 respectively, so that the second connecting frame 350 is driven to move relative to the first connecting frame 330 by the extension and retraction of the telescopic rod, and then the power source 310 is driven to move relative to the first connecting frame 330 by the second connecting frame 350. This structure can be adjusted relatively quickly by the extension and retraction of the telescopic rod, which is conducive to achieving rapid adjustment.

[0079] Optionally, the first driving mechanism 300 may further include a fastener 370, which may be connected to the adjusting member 360 and used to fix the adjusting member 360. Specifically, the fastener 370 may be switched between a locked state and a loosened state. When adjusting the tension of the transmission belt 343, the fastener 370 may be switched to a loosened state so that the adjusting member 360 can move, so as to adjust the tension of the transmission belt 343. After the tension of the transmission belt 343 is adjusted, the fastener 370 may be switched to a locked state to fix the adjusting member 360, so as to prevent the movement of the adjusting member 360 from causing the movement of the second connecting frame 350 and affecting the tension of the transmission belt 343, thereby facilitating further improving the stability of the first driving mechanism 300.

[0080] In addition, when the adjustment member 360 is a threaded adjustment member, the fastener 370 can be a nut. When adjusting the tension of the transmission belt 343, the nut can be loosened to switch the nut to a loosened state. After completing the adjustment of the tension of the transmission belt 343, the nut can be tightened again to switch the nut to a locked state.

[0081] In the case where the adjustment member 360 is a telescopic rod, the fastener 370 may be a top screw, which can be loosened when adjusting the tension of the transmission belt 343 to switch the top screw to a loose state, and can be tightened again after the adjustment of the tension of the transmission belt 343 is completed to switch the top screw to a locked state. Of course, the fastener 370 may also be a spring latch, which can be moved outside the corresponding positioning hole on the telescopic rod when adjusting the tension of the transmission belt 343 to switch the spring latch to a loose state, and can be moved into the corresponding positioning hole on the telescopic rod after the adjustment of the tension of the transmission belt 343 is completed to switch the spring latch to a locked state.

[0082] Based on the furnace cover disclosed in the embodiment of the present application, the present application further discloses a vertical furnace, the disclosed vertical furnace includes a second driving mechanism and the furnace cover described in any one of the above embodiments, the second driving mechanism is drivingly connected to the furnace cover body 210, and is used to drive the furnace cover to move, so as to open or close the furnace opening 110. Specifically, the second driving mechanism can be a motor driving mechanism, a hydraulic driving mechanism, or a pneumatic driving mechanism, etc., and the embodiment of the present application does not limit the specific type of the second driving mechanism.

[0083] The above embodiments of the present invention focus on the differences between the various embodiments. As long as the different optimization features of the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0084] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation modes, which are merely illustrative rather than restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the present invention and the claims, all of which are within the protection of the present invention.

Claims

1. A furnace cover of a vertical furnace, the vertical furnace comprising a furnace body (100) and the furnace cover, the furnace body (100) having a furnace opening (110), characterized in that: The furnace cover comprises a furnace cover body (210), a boat bearing portion (220) and a first driving mechanism (300); The furnace cover body (210) is used to be sealed and connected to the furnace opening (110) to form a process space (400); the boat bearing portion (220) is rotatably disposed on the furnace cover body (210); the boat bearing portion (220) is used to bear a bearing boat (600) contained in the process space (400) and drive the bearing boat (600) to rotate; The furnace cover body (210) is provided with a first avoidance hole (211), the first driving mechanism (300) comprises a power source (310) and a first transmission mechanism (320) connected to the power source (310), the power source (310) is arranged on the outer side of the furnace cover, the first transmission mechanism (320) is sealed with the first avoidance hole (211), the power input end of the first transmission mechanism (320) located on the outer side of the furnace cover is connected to the power source (310), the power output end of the first transmission mechanism (320) is connected to the boat bearing part (220) through the first avoidance hole (211), and the power source (310) is used to drive the boat bearing part (220) to rotate through the first transmission mechanism (320).

2. The furnace cover according to claim 1, characterized in that: The furnace cover further comprises a support frame (260) and a connecting plate (270), wherein the connecting plate (270) is arranged on the support frame (260), and the furnace cover body (210) is connected to the support frame (260) via the connecting plate (270), the support frame (260) has a third avoidance hole (261), and the connecting plate (270) has a fourth avoidance hole, the third avoidance hole (261) is arranged opposite to the fourth avoidance hole, and the first driving mechanism (300) is at least partially located in the fourth avoidance hole and the third avoidance hole (261).

3. The furnace cover according to claim 2, characterized in that: The furnace cover further comprises a protective cover (280), the protective cover (280) being connected to a side of the support frame (260) facing away from the connection plate (270), and the protective cover (280) covering the first driving mechanism (300).

4. The furnace cover according to claim 3, characterized in that: The protective cover (280) comprises a cover frame (281) and a cover cap (282); the cover frame (281) is arranged on the support frame (260) and is arranged around the first driving mechanism (300); the cover cap (282) is arranged on a side of the cover frame (281) away from the support frame (260); a first end of the cover cap (282) is rotatably connected to the cover frame (281); and a second end of the cover cap (282) is used for being locked and connected to the cover frame (281).

5. The furnace cover according to claim 3, characterized in that: The protective cover (280) has a heat dissipation port (283), and the heat dissipation port (283) is opposite to the first driving mechanism (300).

6. The furnace cover according to claim 1, characterized in that: A first gap is provided between the furnace cover body (210) and the boat bearing portion (220), the furnace cover body (210) having a protective fluid channel, a protective fluid inlet (215) of the protective fluid channel being distributed on a side of the furnace cover body (210) facing away from the process space (400), a protective fluid outlet of the protective fluid channel being connected to the first avoidance hole (211), the first avoidance hole (211) being connected to the first gap, and the protective fluid channel being used to transport the protective fluid to the first avoidance hole (211) so that the protective fluid flows to the first gap through the first avoidance hole (211).

7. The furnace cover according to claim 1, characterized in that: The furnace cover also includes a first sealing member (230); the furnace cover body (210) has a temperature measuring hole (212); the temperature measuring hole (212) is used to communicate with the process space (400) so as to detect the temperature of the process space (400) through the temperature measuring hole (212); the first sealing member (230) is used to detachably and hermetically seal the temperature measuring hole (212).

8. The furnace cover according to claim 1, characterized in that: The furnace cover also includes a protective member (250), the protective member (250) having a second avoidance hole (251), the protective member (250) being arranged on a side of the furnace cover body (210) facing the process space (400), the second avoidance hole (251) being arranged opposite to the first avoidance hole (211), the boat bearing part (220) being rotatably arranged on the protective member (250), and the power output end of the first transmission mechanism (320) being connected to the boat bearing part (220) via the first avoidance hole (211) and the second avoidance hole (251).

9. The furnace cover according to claim 1, characterized in that: The first transmission mechanism (320) comprises a shell (321) and a transmission shaft (322); the shell (321) is fixedly connected to the furnace cover body (210) and is sealed with the furnace cover body (210); the transmission shaft (322) is rotatably disposed on the shell (321) and is sealed with the shell (321); a first end of the transmission shaft (322) is connected to the power source (310); a second end of the transmission shaft (322) is connected to the boat bearing portion (220) via the first avoidance hole (211); the first end of the transmission shaft (322) is a power input end of the first transmission mechanism (320); and the second end of the transmission shaft (322) is a power output end of the first transmission mechanism (320).

10. The furnace cover according to claim 9, characterized in that: The first driving mechanism (300) further comprises a first connecting frame (330), the first connecting frame (330) being fixedly connected to the housing (321), and the power source (310) being arranged on the first connecting frame (330).

11. The furnace cover according to claim 10, characterized in that: The furnace cover further comprises a first detector (510) and a detection matching piece (520); the first detector (510) is fixedly connected to the first connecting frame (330); the detection matching piece (520) is fixedly connected to the transmission shaft (322); the first detector (510) is provided with a first detection slot (511); the detection matching piece (520) has a first matching portion (521); the first detection slot (511) is used to match with the first matching portion (521) so as to detect the number of revolutions of the transmission shaft (322) and / or correct the position of the transmission shaft (322) through the matching of the two.

12. The furnace cover according to claim 11, characterized in that: The furnace cover further comprises a second detector (530), the second detector (530) being provided with a second detection slot (531), the detection fitting (520) having a second matching portion (522), the second detection slot (531) being used to match with the second matching portion (522), so as to detect the number of revolutions of the transmission shaft (322) through the matching of the second detection slot (531) and the second matching portion (522).

13. The furnace cover according to claim 12, characterized in that: The first matching portion (521) is a first protrusion, and the second matching portion (522) is a second protrusion. The first protrusion protrudes in an axial direction toward the transmission shaft (322), and the second protrusion protrudes in a direction perpendicular to the axial direction of the transmission shaft (322). The notch of the first detection groove (511) is oriented opposite to the protruding direction of the first protrusion, and the notch of the second detection groove (531) is oriented opposite to the protruding direction of the second protrusion.

14. The furnace cover according to claim 9, characterized in that: The first transmission mechanism (320) further comprises a second sealing member, the second sealing member being arranged between the transmission shaft (322) and the housing (321) to achieve sealing cooperation between the transmission shaft (322) and the housing (321), and the second sealing member being a magnetic fluid.

15. The furnace cover according to claim 10, characterized in that: The first driving mechanism (300) further comprises a second transmission mechanism (340), the second transmission mechanism (340) comprising a first transmission wheel (341), a second transmission wheel (342) and a transmission belt (343), the first transmission wheel (341) being connected to the power source (310), the second transmission wheel (342) being connected to the first end of the transmission shaft (322), and the transmission belt (343) being transmission-connected to the first transmission wheel (341) and the second transmission wheel (342), respectively.

16. The furnace cover according to claim 15, characterized in that The first driving mechanism (300) further comprises a second connecting frame (350) and an adjusting member (360); the second connecting frame (350) is movably connected to the first connecting frame (330) and fixedly connected to the power source (310); the first connecting frame (330) and the second connecting frame (350) are both connected to the adjusting member (360); the adjusting member (360) is used to drive the power source (310) to move relative to the first connecting frame (330) via the second connecting frame (350).

17. A vertical furnace, characterized in that: It comprises a second driving mechanism and a furnace cover according to any one of claims 1 to 16, wherein the second driving mechanism is drivingly connected to the furnace cover body (210) and is used to drive the furnace cover to move so as to open the furnace opening (110) or close the furnace opening (110).

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