Sensor device

Abstract

A sensor device (1) for measuring forces and / or torques, comprising a plurality of sensor parts (11), each having a sensor (13), the sensor parts (11) being arranged around a first shaft (3); and a plurality of connecting elements (21), each of which connects two adjacent sensor parts (11) to each other, a connection (33) between the connecting element (21) and a first of the adjacent sensor parts being arranged in a first axial region (23), and the connecting element (21) extending into a second axial region (25) in a gap (17) between the adjacent sensor parts, the second axial region (25) is different from the first axial region (23).

Description

Technical Field

[0001] The invention relates to a sensor device for measuring a force or a torque, and to a method for producing a sensor device. Background Art

[0002] The prior art discloses sensor devices that can measure forces or torques. In particular for applications in medical engineering, such as remote manipulators for minimally invasive surgery, or robotics (e.g. industrial gripping systems), such sensor devices can be used to measure or control forces or torques. For example, the sensor device can be used to provide tactile feedback related to a gripping or manipulating arm or an end effector provided thereon. For many applications, the smallest or cheapest force and torque sensor is advantageous.

[0003] However, known sensor devices have limitations, in particular with regard to the miniaturization of the sensor device. Alternatively or additionally, known sensor devices, in particular as the size of the sensor device is progressively reduced, may have limitations with regard to the measurement accuracy or robustness of the sensor device, or may require a high degree of complexity during production. Summary of the invention

[0004] The object of the present disclosure is to specify a sensor device for measuring force or torque, which is improved compared to the prior art. In particular, a sensor device should be specified which can be constructed to be particularly small, robust or inexpensive or with high measuring accuracy. Furthermore, the object is to specify a method for producing the sensor device.

[0005] This object is achieved by a sensor device for measuring forces or torques according to claim 1 and a method according to the corresponding claims.

[0006] According to one aspect, a sensor device for measuring force or torque, in particular for measuring force and torque, is described. The sensor device comprises a plurality of sensor components, each sensor component having a sensor, the sensor components being arranged around a first axis. The sensor device comprises a plurality of connecting elements, each connecting element connecting two adjacent sensor components to each other, the connection between the connecting element and the first sensor component of the adjacent sensor components being arranged in a first axial region, and the connecting element extending into a second axial region in a gap between the adjacent sensor components, the second axial region being different from the first axial region.

[0007] According to another aspect, a method for producing a sensor device according to embodiments described herein is detailed. The method includes providing a plurality of sensor components connected by means of a connector, the sensor components being arranged in a plane. The method includes coiling the sensor components to arrange the sensor components around a first axis.

[0008] According to typical embodiments, the sensor device comprises a plurality of sensor components, each having a sensor. Each sensor component typically comprises a measuring body for receiving or transmitting a force or a torque. Typically, the sensors of the sensor components are arranged in or on the respective measuring body in such a way that the measurement of the sensors is suitable for determining a force or a torque acting on the sensor device. Typically, the sensors are flat or planar and are in particular arranged flat on the measuring body.

[0009] In a typical embodiment, the sensor of the sensor component is a measuring element, or specifically an expansion measuring element. Each expansion measuring element is typically configured to determine the expansion or mechanical strain of the corresponding sensor component (specifically the measuring body of the sensor component). The expansion measuring element may include, for example, a thin film strain gauge (strain gauge) or a semiconductor strain gauge. Specifically, the semiconductor strain gauge may be a silicon strain gauge (Si strain gauge). For example, the Si strain gauge may have particularly small physical dimensions. The sensor of the sensor component may include at least one expansion measuring element, specifically exactly one or exactly two expansion measuring elements. The sensor is typically firmly connected to the corresponding sensor component (specifically the corresponding measuring body) by, for example, gluing, welding or connection by glass solder.

[0010] Typically, the sensor components are of at least substantially similar form, in particular of at least substantially mechanically similar form. "At least substantially mechanically similar" is to be understood as meaning in particular that the mechanical properties and the shape of the sensor components are at least substantially similar. However, for example, the sensor components may differ in terms of the electrical interconnection of the sensors, for example in terms of the number of conductor tracks passing through the sensor components. A plurality of sensor components may also be referred to herein as a plurality of basic units. A force or torque determined using the sensor device may be determined based on a plurality of measurement values ​​of the sensors of the respective sensor components or basic units.

[0011] In a typical embodiment, the sensor components are arranged around a first axis. The terms "axial", "radial" and "circumferential" herein are generally related to the first axis. Typically, at least three sensor components are arranged around the first axis, specifically at least four or at least 5, or a maximum of 24, specifically a maximum of 20 or a maximum of 16. In a typical embodiment, all the sensor components are arranged around the first axis. For example, 3 sensor components can be arranged around the first axis, specifically in a tripod style. In another example, 6, 8 or 12 sensor components can all be arranged around the first axis. For example, a sensor device with 6 sensor components can be arranged in a hexagonal structure, specifically a hexapod structure. In another embodiment, the sensor components can be arranged around the first axis in a screw or spiral arrangement or a honeycomb structure. Specifically, a sensor device with a honeycomb structure can include a plurality of sensor components, and specifically can also include more than 20 sensor components.

[0012] In a typical embodiment, the sensor device includes a plurality of connectors. Typically, each connector connects two adjacent sensor components of the plurality of sensor components to each other. Typically, each connector is arranged in a gap between two adjacent sensor components. In an embodiment, the connector mechanically connects the sensor components to each other in series. Specifically, each pair of two adjacent sensor components in the series connection is typically connected to each other by means of connectors. In a typical embodiment, the sensor components connected in series include a starting sensor component and an ending sensor component, and the sensor components connected in series are not directly connected to each other by means of connectors. In an embodiment, the sensor components connected by means of connectors are arranged in a coiled manner around a first axis.

[0013] According to typical embodiments, the connecting element has a smaller thickness than the sensor component. Typically, the thickness of each connecting element is at most half the thickness of the sensor component, such as at most one third or at most one fifth the thickness of the sensor component. Typically, the thickness refers to the thickness in the radial direction.

[0014] In a typical embodiment, the sensor device comprises a flexible printed circuit board. The flexible printed circuit board typically comprises a connector area forming a connector of the sensor device. In an embodiment, the flexible printed circuit board comprises a sensor component area, each sensor component of the sensor device comprising one of the sensor component areas of the flexible printed circuit board. Typically, each sensor component area of ​​the flexible printed circuit board is in the form of a part of the sensor component. Typically, each sensor component area is firmly connected to the measuring body of the sensor component. For example, the sensor component area of ​​the flexible printed circuit board can be glued to the measuring body or welded to the sensor firmly connected to the measuring body. Typically, the thickness of the measuring body is greater than the thickness of the flexible printed circuit board, in particular in the radial direction. For example, the thickness of the measuring body can be at least twice, in particular at least three times or at least five times thicker than the flexible printed circuit board. In a typical embodiment, the flexible printed circuit board is a flexible conductor, in particular a foil-based flexible conductor. The flexible printed circuit board can have one or more layers of foil or conductor tracks. For example, the flexible printed circuit board can have two conductor layers. The thickness of the flexible printed circuit board can be less than 0.5 mm, in particular less than 0.3 mm or less than 0.2 mm, for example about 0.1 mm.

[0015] Typically, each sensor component area of ​​the flexible printed circuit board has a wiring area for wiring the sensors of the corresponding sensor component. The wiring area of ​​the sensor component area can have, for example, conductor tracks or contact pads for electrically connecting to the sensors of the sensor component. Typically, each connector has a conductor track for electrically connecting a plurality of sensor components. In a typical embodiment, the sensor component areas and the connectors are formed by exactly one flexible printed circuit board, in particular in such a way that all sensor components of the sensor device are interconnected in exactly one flexible printed circuit board.

[0016] In a typical embodiment, in a first axial region extending in the direction of the first axis, a connection is arranged between a connector and a first sensor component of two adjacent sensor components. For example, the connection between the connector and the first sensor component can be formed by a transition between a sensor component region of a flexible printed circuit board arranged on the measuring body of the first sensor component and a connector arranged in the gap between adjacent sensor components. Typically, the connector extends to a second axial region in the gap between adjacent sensor components, the second axial region being different from the first axial region. Typically, an additional connection between the connector and the second sensor component of the adjacent sensor component is arranged in the first axial region. In other embodiments, an additional connection may be provided in another axial region different from the first axial region. The additional connection between the connector and the second sensor component is typically in a form similar to the connection between the connector and the first sensor component. In a typical embodiment, the extent to which the connector enters the second axial region can advantageously extend the force flow path between adjacent sensor components, which can specifically improve the flexibility of the connector.

[0017] According to a typical embodiment, the axial extent of the second axial region is greater than the axial extent of the first axial region. In an embodiment, the axial extent of the second axial region is greater than the extent of the connector in a direction perpendicular to the first axis. In a typical embodiment, each connector extends axially over at least a quarter, in particular at least a third, of the axial length of the sensor component. In a typical embodiment, each connector in the second axial region extends axially over at least a quarter of the axial length of the sensor component. In an embodiment, the connection between the connector and the adjacent sensor component and the further connection are arranged at an axial end of the sensor component area of ​​the flexible printed circuit board, which axial end is closer to the sensor of the sensor component. In a further embodiment, the connection and the further connection are arranged at an axial end of the sensor component area of ​​the flexible printed circuit board, which axial end is further away from the sensor of the sensor component.

[0018] In an embodiment, each connector has an axially extending first longitudinal component and an axially extending second longitudinal component. Typically, the first longitudinal component and the second longitudinal component are arranged in the same axial region, specifically in the second axial region. Typically, the first longitudinal component and the second longitudinal component of the connector have a first end and a second end, respectively. In an embodiment, each first end is connected to one of the adjacent sensor components. For example, the first end of the first longitudinal component can be connected to the first sensor component of the adjacent sensor component, and the first end of the second longitudinal component can be connected to the second sensor component of the adjacent sensor component. Typically, the second ends of the first longitudinal component and the second longitudinal component are connected to each other by means of a steering component of the connector. The steering component can provide a steering of at least 90°, specifically at least 120° or at least 150°. In a typical embodiment, the steering component provides a steering of at least substantially 180°. Specifically, the connector can be substantially U-shaped, with the first longitudinal component and the second longitudinal component forming the legs of the U. In an embodiment, the steering component can, for example, be in the form of an arcuate portion of the connector, specifically in the form of an arcuate portion between the second ends of the first and second longitudinal components. Specifically, the steering component can be in the form of a 180° arc, such as a U-shaped connector. In other embodiments, the connector may have a different shape, for example a V-shape with the first and second longitudinal members as legs, the turning member providing a turn of less than 180°.

[0019] According to a typical embodiment, the connector connects each pair of two adjacent sensor components in an articulated manner. Typically, the connector is flexible. Typically, each connector is in the form of a solid joint, whose joint axis is parallel to the first axis. The solid joint can be formed as a flexible hinge.

[0020] In a typical embodiment, the first longitudinal member and the second longitudinal member are twisted. Specifically, the surface orientation of the twisted longitudinal member changes from the first end of the longitudinal member to the second end of the longitudinal member. The first longitudinal member and the second longitudinal member can be twisted in a radially opposite manner (specifically along the axial direction). The first longitudinal member and the second longitudinal member may also be referred to as the first and second torsion zones of the connector in this article. In an embodiment, the flexibility of the connector over the length of the longitudinal member can be advantageously adjusted. In addition, the connector described herein can provide "elasticity" or flexibility in the radial direction, which is particularly helpful for the assembly of the sensor device.

[0021] Typically, the sensor component is much more rigid than the connector. The arrangement of the sensor component arrangement around the first axis, for example due to the sensor component and the connector according to the embodiments described herein being coiled, causes adjacent sensor components to be generally arranged at an angle to each other. The connector generally provides a connection portion by means of an angle between adjacent sensor components. Compared with the connector extending only in the circumferential direction, the connector according to the embodiments described herein can provide a higher degree of flexibility. Specifically, the connection portion by means of an angle between adjacent sensor components can be provided substantially by torsion of the first and second longitudinal components. For example, the first torsion zone and the second torsion zone can provide an angular change of approximately half the angle between adjacent sensor components, respectively. The connection portion of the connector to the sensor component or the steering component is generally subjected to low bending loads only around the joint axis of the connector in the form of a solid joint. Typically, the steering component of the connector is substantially not twisted.

[0022] Embodiments described herein may have the advantage of providing increased flexibility of the connection between adjacent sensor components. Specifically, the sensor components may be arranged around the first axis with a smaller radius of curvature. For example, the outer diameter of the sensor device measured perpendicular to the first axis may be reduced. Additionally or alternatively, the increased flexibility may provide greater mobility of the sensor components or lower mechanical impact on the sensor during assembly of the sensor device around the first axis.

[0023] In a typical embodiment, the sensor device includes a power supply line. The power supply line generally includes a conductor track for operating the sensor of the sensor device, specifically for power supply or for exchanging data with the sensor. The power supply line generally extends partially outside the axial area of ​​the sensor component. In an embodiment, the power supply line is arranged circumferentially between two adjacent sensor components. According to a typical embodiment, the power supply line is arranged at one of the connectors, typically exactly at one of the connectors. Specifically, the power supply line can be directly electrically connected to the conductor track, which extends in the connector where the power supply line is arranged. For example, in an embodiment in which the connector and the power supply line are in the form of an area of ​​a flexible printed circuit board, the conductor track of the flexible printed circuit board extends continuously from the power supply line to the connector, specifically to the sensor component area. Typically, the power supply line extends substantially axially, specifically in the axial area of ​​the sensor component. In a typical embodiment, the power supply line is in the form of a part of the flexible printed circuit board of the sensor device, specifically in the form of a part of the flexible printed circuit board forming the connector and the sensor component area.

[0024] In an embodiment, the power cord is arranged at a turning part of one of the connectors, for example at an arcuate portion of the connector. Specifically, the power cord and the turning part can be arranged in a substantially Y-shaped manner, the power cord corresponding to the lower branch of the Y, and the two upper branches of the Y corresponding to the turning parts, for example corresponding to a 180° arc-shaped turning part. In an embodiment, the arrangement at the turning part can have the advantage that the flexibility of the connector arranged with the power cord is not impaired by the power cord. Specifically, in a typical embodiment, the turning part is not bent or twisted, so the flexibility caused by the twisting of the first and second longitudinal parts remains unaffected.

[0025] In a typical sensor device, according to the embodiments described herein, the connector mechanically connects the sensor components in series. Typically, the power line is arranged at the connector arranged centrally in the series, specifically arranged centrally between the starting sensor component and the ending sensor component in the series, and the starting sensor component and the ending sensor component are not directly connected by the connector. When the number of sensor components is an even number, the centrally arranged connector is understood as the central connector in the series. When the number of sensor components is not an even number, the power line can be arranged at one of the two connectors arranged centrally in the series. The central arrangement of the power line can specifically reduce the number of conductor tracks in each connector. For example, the conductor track to the sensor component located on the side of the starting sensor component can be routed via the first longitudinal component of the centrally arranged connector, and the conductor track to the sensor component located on the side of the ending sensor component can be routed via the second longitudinal component of the centrally arranged connector. For example, the number of conductor tracks passing through each connector can be halved. Reducing the number of conductor tracks in the connector makes the connector more flexible. In addition, when the number of conductor tracks is reduced, the connector can be made narrower, which can specifically increase the flexibility of the connector.

[0026] In other embodiments, the power line can be arranged at another connector in the connector. In still other embodiments, the power line can be arranged at the start sensor component or the end sensor component. Specifically, the power line can have a power line connector for connecting the power line to the start sensor component or the end sensor component. The power line connector can have a steering component and one or two longitudinal components, like the connector described herein. For example, the power line connector can be substantially U-shaped. The power line connector can be arranged in the gap between the start sensor component or the end sensor component. The power line connector can provide a higher degree of flexibility of the power line, for example, in order to reduce mechanical impact on the start sensor component or the end sensor component.

[0027] In a typical embodiment, the sensor device comprises two covers, in particular a first cover and a second cover, wherein each sensor component is at least partially arranged axially between the first cover and the second cover. For example, the cover can be in the form of a disk, in particular in the form of a disk arranged coaxially with the first axis. For example, the disk can be substantially circular. In a typical embodiment, the cover or the measuring body of the sensor component can be made of metal, for example.

[0028] Typically, one of the covers has a power supply line recess, specifically for routing the power supply line in the axial direction. Typically, the power supply line recess is radially arranged in the outer surface of the cover, for example as a narrow slit or groove. In other embodiments, the power supply line recess can be in the form of an axial opening or a through opening in the cover. In a typical embodiment, the power supply line recess is arranged in the cover circumferentially between two adjacent sensor components. The power supply line is usually arranged in the power supply line recess, specifically arranged axially through the power supply line recess. The advantage of arranging the power supply line and the power supply line recess circumferentially between adjacent sensor components can be that the cover will not be weakened by the power supply line recess in the area of ​​the sensor component, especially in the embodiment where the cover has an additional opening or recess for receiving the plug of the sensor component. Specifically, the robustness of the sensor device can be increased. Alternatively, compared with a version without a power supply line recess, bending of the power supply line can be avoided. In addition, the embodiment can have the advantage that the power supply line and the power supply line recess are arranged away from the weld between the plug and the cover, which is particularly convenient for the assembly of the sensor device.

[0029] In an exemplary embodiment, six sensor components can be arranged hexagonally between the two covers around the first axis, specifically to form a hexapod. For example, the sensor device can be used to measure three different force components or three different torque components independently of each other, specifically three different force components and three different torque components.

[0030] According to typical embodiments, each sensor component comprises a measuring body. For example, the measuring body may be a substantially cuboid. Specifically, the structure of the coiled sensor component may correspond substantially to a polygon. Typically, the measuring body has a maximum range in the axial direction. Typically, the measuring body comprises a weakened region. Typically, the measuring body is conical in the weakened region (specifically in the region of the sensor of the sensor component). The weakened region may have at least one weakened recess, specifically two weakened recesses. For example, the weakened recess may be in the form of an opening, a hole or a cutout in the measuring body, for example in the form of a circular hole or in the form of an L-shaped or C-shaped cutout. Typically, the measuring body comprises a first side facing the first axis. In typical embodiments, at least one weakened recess is arranged at least substantially vertically through the first side.

[0031] Typically, the measuring body has a bridge in the weakened region, which connects the parts of the measuring body between the first axial end and the second axial end of the weakened region to each other. Specifically, the bridge can extend between two weakened recesses. The weakened recesses can be arranged so that the bridge extending between the weakened recesses forms an angle with the axial direction, for example an angle of at least 30°, specifically at least 35° or at least 40°, or at most 60°, specifically at most 55°.

[0032] In an embodiment, the measuring bodies or bridges of the sensor components can be arranged in a tilted manner relative to each other. For example, in a sensor device with 6 sensor components, the bridges of the measuring bodies can be arranged hexagonally around the first axis. The bridges can be arranged in a tilted manner, in particular between two covers in a tilted manner relative to each other, in particular to form a hexapod.

[0033] Typically, the sensor of the sensor component is arranged in a weakened area of ​​the sensor component, specifically on a bridge of the weakened area. In the weakened area, specifically, the expansion of the measuring body can be accurately measured by the sensor. In an embodiment, the measuring body typically includes a substantially rigid receiving area for receiving the sensor component area of ​​the flexible printed circuit board. The receiving area can be arranged in a manner axially offset from the weakened area. Typically, the wiring area of ​​the sensor component area of ​​the flexible printed circuit board is arranged on the receiving area of ​​the measuring body. Typically, the connector extends at least substantially in the same axial area as the receiving area of ​​the measuring body.

[0034] In a typical embodiment, the sensor component includes a sensor power supply line, in particular a sensor power supply line for electrical connection between the sensor and the sensor component area of ​​the flexible printed circuit board. In an embodiment, the sensor power supply line can be provided by a bonding wiring between the sensor and the sensor component area. For example, the bonding wiring can be electrically connected to the contact pads of the sensor component area. In a further embodiment, the sensor power supply line can be in the form of a sensor power supply line area of ​​the flexible printed circuit board. For example, the sensor power supply line area can be connected to the sensor by means of one or more solder joints. The sensor power supply line area can be in the form of a sensor power supply line connector having multiple arcs or can be wavy, in particular to provide a high degree of flexibility or low mechanical action between the sensor component area of ​​the flexible printed circuit board and the sensor.

[0035] In a typical embodiment, each sensor component, in particular the measuring body of the sensor component, comprises at least one plug at an axial end of the corresponding sensor component. Typically, each sensor component comprises two plugs, one plug at each of the two axial ends of the specific sensor component. Typically, the plug is configured to engage in a first cover or a second cover of the sensor device. The first cover or the second cover may have a corresponding opening or recess to receive the plug of the sensor component. For example, a firm connection of the plug and the cover may be provided by a plug connection between the plug and the cover or by welding between the plug and the cover, in particular by a plug connection and welding.

[0036] In a typical embodiment, the diameter of the sensor device perpendicular to the first axis is not greater than 15 mm, specifically not greater than 10 mm or not greater than 8 mm. For example, the sensor device may have a diameter of about 8 mm or about 6 mm. The diameter refers to the outer diameter. In other embodiments, the diameter of the sensor device perpendicular to the first axis is not greater than 21 mm or 32 mm. For example, the embodiments described herein provide increased flexibility of the connector or increased robustness of the connection between the cover and the sensor component, specifically for miniaturizing the sensor device described herein for force or torque measurement. In a typical embodiment, the axial length of the sensor device is less than 20 mm, specifically less than 15 mm, specifically without considering the axial range of the power cord.

[0037] According to a typical embodiment, a method for producing a sensor device is described in detail, specifically a sensor device according to an embodiment described herein. The method includes providing a plurality of sensor components connected by means of a connector. Typically, the sensor components are arranged in a plane, specifically in a plane parallel to a first axis. Typically, providing the sensor components and the connector includes providing a measuring body according to an embodiment described herein, specifically having sensors arranged on or in the measuring body, respectively. According to the embodiment described herein, a flexible printed circuit board can be provided, which has sensor component areas and connectors arranged between the sensor component areas. The flexible printed circuit board can be arranged in a plane. The measuring body can be securely connected to the corresponding sensor component areas of the flexible printed circuit board. The sensor can be electrically connected to the corresponding sensor component areas. For example, the parallel arrangement of the sensor components on a plane allows these production steps to be performed inexpensively.

[0038] Typically, the method includes coiling the sensor components to arrange the sensor components around a first axis. When coiling the sensor components, the sensor components can be arranged at an angle to each other, and the specific connector acts as a solid joint between adjacent sensor components. Typically, the connector is not twisted before coiling. Typically, the connector, specifically the first longitudinal member and the second longitudinal member of each connector, are twisted while being coiled.

[0039] In a typical embodiment, the method includes connecting the sensor component to at least one cover, specifically to a first cover and a second cover. Specifically, the sensor component and the at least one cover can be firmly connected to each other. According to the embodiments described herein, at least one cover can be provided. In an embodiment, the sensor component, specifically the coiled sensor component, is axially arranged between the first cover and the second cover. The sensor component may have a plug at each axial end of the sensor component. The plug can be engaged with an opening or a recess in the first cover and the second cover. Additionally or alternatively, the sensor component and the at least one cover can be materially bonded, specifically glued or welded to each other. The power cord can be arranged in a power supply line recess in the first cover or the second cover.

[0040] Compared to the prior art, a typical sensor device can provide the advantage that a sensor device with a smaller outer diameter can be produced. Specifically, an increased flexibility of the connector can be provided, which, for example, results in the use of a small radius of curvature between the sensor components in the circumferential direction. The mechanical influence of the typical sensor arrangement on the strain gauge sensor system (specifically due to the twisting of the torsion area of ​​the connector) is low. Internal stresses in the flexible printed circuit board can be reduced, which have an adverse effect on the measurement accuracy of the sensor device. Specifically, additionally, additional interference forces can be avoided, which will be coupled to the sensor component equipped with the sensor if the connector is not flexible enough. An embodiment can have an improved drift behavior, specifically avoiding or reducing nonlinear or non-reproducible temperature response. In addition, an embodiment can provide the advantage of a large mobility of the sensor component during assembly. Typical embodiments can also additionally have improved signal removal. Specifically, the power supply line according to the embodiment may not be detrimental to the robustness of the connection between the sensor component and the cover. In addition, the power supply line can have a favorable effect on the flexibility of the connector. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Further advantages and features of preferred embodiments of the present invention will be explained below based on the accompanying drawings, in which:

[0042] Figure 1 A diagram showing a sensor arrangement according to an exemplary embodiment;

[0043] Figure 2 Shows the Figure 1 A schematic diagram of a plurality of sensor components connected to each other by connecting members according to an embodiment of the present invention;

[0044] Figure 3 The diagram shows an axial view from the first cover toward the second cover. Figure 1 A perspective view of a detail of a flexible printed circuit board of a sensor arrangement;

[0045] Figures 4 to 6Schematic diagrams of multiple sensor components and connectors according to other typical embodiments are shown respectively;

[0046] Figure 7 A flow chart of a method for producing a sensor device according to an exemplary embodiment is shown. DETAILED DESCRIPTION

[0047] Exemplary embodiments will be described below based on the drawings, wherein the present invention is not limited to the exemplary embodiments; rather, the scope of the present invention is determined by the claims.

[0048] In the description of the drawings, the same reference numerals are used for the same or similar components. In some cases, for the sake of clarity, features that have been described in conjunction with other drawings are not described again.

[0049] Figure 1 A schematic diagram of a sensor device 1 according to an exemplary embodiment is shown. The sensor device 1 is in particular in the form of a hexapod with six sensor components 11. The sensor components 11 are mechanically connected in series with one another via a connection 21. The sensor components 11 are arranged around a first axis 3, in particular are coiled. Figure 1 , adjacent sensor components 11 in the series are arranged at an angle of 60° to each other. The connector 21 arranged in the gap 17 between the sensor components 11 serves as a solid joint between the sensor components 11. The sensor components 11 are partially axially arranged between the first cover 5 and the second cover 7 and are firmly connected to the first cover 5 and the second cover 7. Specifically, the plug 65 provided at each axial end of the sensor component 11 engages in the corresponding openings in the first cover 5 and the second cover 7. The thickness of the connector 21 in the direction perpendicular to the axis 3, specifically in the radial direction 4, is less than one third of the thickness of the sensor component 11.

[0050] Figure 2 Shows the Figure 1 The sensor components 11 and the connecting piece 21 are in an unfolded state, in particular without the first cover 5 and the second cover 7. Each sensor component 11 comprises a measuring body 55, a sensor 13 and a sensor component area 53 of the flexible printed circuit board 51, which is firmly connected to the measuring body 55. The measuring body 55 has two plugs 65. The measuring body 55 of the sensor component 11 comprises a weakened area 59, in which a weakened recess 61 is arranged around a bridge 62 of the measuring body 55, in which Figure 1 In the embodiment, the weakened recess 61 is two holes passing through the measuring body 55. The sensor 13, in Figure 1 , Figure 2 and Figure 4The measuring body 55 is a silicon strain gauge, which is permanently arranged on the bridge 62. In addition, the measuring body 55 includes a relatively rigid receiving area 57, which is axially adjacent to the weakened area 59 and is firmly connected to the sensor component area 53 of the flexible printed circuit board 51. The sensor 13 and the sensor component area 53 are connected via a sensor power line 63 (at Figure 1 The two devices are electrically connected to each other by means of bonding wires.

[0051] The flexible printed circuit board 51 further comprises connectors 21 and power supply lines 41 for operating the sensor device 1, in particular the sensor 13. Each connector 21 is connected to two adjacent sensor components 11. The sensor components 11 connected in series mechanically comprise a starting sensor component 15 and an ending sensor component 16, which are not directly connected to each other via the connector 21. Each connector 21 has a connection 33 to a first sensor component of the two adjacent sensor components, and another connection 35 to a second sensor component of the adjacent sensor component. In an embodiment with the flexible printed circuit board 51, the connection 33 and the further connection 35 are respectively formed by the transition of the flexible printed circuit board 51 from the sensor component area 53 to the connector 21, in particular at the axial end of the sensor component area 52 closer to the sensor 13. The connection 33 and in particular the further connection 35 are arranged in the first axial area 23. Each connector 21 extends beyond the first axial area 23 into a second axial area 25 in the gap 17 between the two adjacent sensor components 11, the second axial area 25 being different from the first axial area 23. The axial extent 37 of the connecting element 21 is greater than one third of the axial extent of the sensor component 11 .

[0052] Each connecting element 21 comprises a first longitudinal section 27 and a second longitudinal section 29 which extend in the same axial region, in particular in the second axial region 25. Figure 2 In the unfolded state, the first and second longitudinal members are arranged flat and oriented in the axial direction. The first longitudinal member 27 of the connecting member 21 and the second longitudinal member 29 of the connecting member 21 are connected to each other by a turning member 31 of the connecting member 21, in particular a 180° arc-shaped turning member 31. In general, the connecting member 21 is substantially U-shaped.

[0053] Figure 3 Shows Figure 1 A perspective view of details of the flexible printed circuit board 51, particularly from the first cover 5 toward the second cover 7. Specifically, Figure 3Two sensor component areas 53 of the flexible printed circuit board 51 are shown, which are arranged at an angle 71 of 60°. The two sensor component areas 53 are connected to each other via a connecting element 21, the first longitudinal part 27 and the second longitudinal part 29 of the connecting element 21 being twisted. The deflection part 31 remains essentially untwisted and unbent. Figure 3 As shown, at the transition of the turning part 31, a line 77 along the surface of the longitudinal part forms an angle 75 with an extension line 73 of the sensor part area 53, each angle 75 being about 30°. Specifically, the 60° angle 71 between the two sensor parts is provided by the 30° relative twist of the diameters of the first longitudinal part 27 and the second longitudinal part 29. The connecting member 21 has a high degree of flexibility, low bending loads and low impact on the sensor system.

[0054] like Figure 1 and Figure 2 As shown, the flexible printed circuit board 51 includes a power supply line 41, which is arranged at the connection piece 21 arranged in the center of the sensor components 11 in series, in particular in a Y shape, at the turning part 31 of the connection piece 21. Compared with the power supply line located at the end, the central arrangement allows to reduce the number of conductor tracks per connection piece. The reduction in the number of conductor tracks also makes the connection piece more flexible. Figure 1 , the first cover 5 also has a power supply line recess 9 for axially routing the power supply line 41 to the connection piece 21. The power supply line 41 and the power supply line recess 9 are arranged between the two sensor components in the circumferential direction 6. Specifically, the power supply line recess is arranged in the circumferential direction 6 in a manner deviating from the recess of the plug 65 for the sensor component 11 in the first cover 5, as a result of which the robustness of the first cover 5 is particularly increased.

[0055] Figure 4 FIG. 2 shows a plurality of sensor components 11 and a connecting member 21 of a sensor device according to another embodiment in an unfolded state. Figure 4 In the embodiment, the connection 33 and the further connection 35 between the connection piece 21 and the sensor component 11 are respectively arranged at the axial end of the sensor component area 53 which is further away from the sensor 13. In addition, the power line 41 is arranged at the end, in particular at the end sensor component 16. The power line 41 comprises a U-shaped power supply line connection similar to the connection piece 21. In addition, Figure 4 It is shown that on each sensor component area 53, for example two contact pads 64 are configured to be connected by means of bonding wires (sensor supply wires 63) to the sensor 13. In other embodiments, for example three, four or five contact pads may also be present.

[0056] Figure 5 A sensor device according to yet another embodiment is shown with a plurality of sensor components 11 and a connecting member 21 in an unfolded state. Figure 5 The sensor power supply line 63 in the flexible printed circuit board 51 is in the form of a part. Specifically, each sensor component 11 includes a sensor power supply line 63, which is in the form of a sensor component area 53 of the sensor component 11 and a sensor (in Figure 5 and Figure 6 The sensor power supply line 63 is shielded by the sensor power supply line 63 in the middle. For example, Figure 5 and Figure 6 The sensor in the embodiment is a thin film strain gauge. The electrical connection between the sensor supply line 63 and the sensor is provided in the form of a solder joint 67. Figure 4 Similarly, a power supply line 41 is arranged at the end.

[0057] Figure 6 A plurality of sensor components 11 and a connecting member 21 of a sensor device according to another embodiment are shown in an unfolded state. Figure 6 Each sensor component 11 in the embodiment has two weakened recesses 61, which surround the bridge 62 in a C-shape in a generally inclined manner. For example, Figure 5 The axial extent 37 of the middle connection piece 21 is approximately one third of the axial extent of the sensor component 11. Figure 2 Similarly, the power supply line 41 is arranged at the central connecting piece 21 in the sensor components 11 connected in series.

[0058] Figure 7 A flow chart of a method 100 for producing a sensor device 1 according to an embodiment described herein is shown. In box 110, the method 100 includes providing a plurality of sensor components 11 connected by means of a connector 21, the sensor components 11 being arranged in a plane. In box 120, the method 100 includes winding the sensor components 11 to arrange the sensor components 11 around a first axis 3. In box 130, the method 100 includes connecting the sensor components 11 to a first cover 5 and a second cover 7. The high flexibility of the connector means that the production of the sensor device, in particular the winding of the sensor components, can be improved. For example, embodiments can lead to avoiding separation of a flexible printed circuit board from a measuring body of a sensor component, or reducing the influence of the connector on the sensor of the sensor component.

Claims

1. A sensor device (1) for measuring force and / or torque, comprising: a plurality of sensor components (11), each having a sensor (13), the sensor components (11) being arranged around a first axis (3); and A plurality of connecting members (21), each of which connects two adjacent sensor components (11) to each other, a connecting portion (33) between the connecting member (21) and a first sensor component among the adjacent sensor components is arranged in a first axial region (23), and the connecting member (21) extends into a second axial region (25) in a gap (17) between the adjacent sensor components, the second axial region (25) being different from the first axial region (23).

2. The sensor device (1) according to claim 1, wherein: Each of the connecting elements (21) has an axially extending first longitudinal section (27) and an axially extending second longitudinal section (29), and wherein the first longitudinal section (27) and the second longitudinal section (29) are arranged in the same axial region.

3. The sensor device (1) according to claim 2, wherein: The first longitudinal member (27) and the second longitudinal member (29) are twisted.

4. The sensor device (1) according to claim 2 or 3, wherein: The first longitudinal part (27) and the second longitudinal part (29) of the connecting member (21) each have a first end and a second end, each first end being connected to one of the adjacent sensor parts (11), and the second ends being connected to each other by means of a turning part (31) of the connecting member (21).

5. The sensor device (1) according to any one of the preceding claims, wherein: A further connection (35) between the connecting element (21) and a second one of the adjacent sensor components is arranged in the first axial region (23).

6. The sensor device (1) according to any one of the preceding claims, wherein: Each of the connecting elements (21) is in the form of a solid joint having a joint axis parallel to the first axis (3).

7. The sensor device (1) according to any one of the preceding claims, wherein: Each of the connecting members (21) extends in the axial direction over at least one quarter of the axial length of the sensor component (11).

8. The sensor device (1) according to any one of the preceding claims, wherein: The sensor device (2) further comprises a power supply line (41), which is arranged at one of the connecting members (21).

9. The sensor device (1) according to claim 8, wherein: The power line (41) is arranged at a deflection component (31) of one of the connecting members (21).

10. The sensor device (1) according to claim 8 or 9, wherein: The connecting element mechanically connects the sensor components in series, and the power supply line (41) is arranged at the connecting element arranged centrally in the series connection.

11. The sensor device (1) according to any one of the preceding claims, comprising a flexible printed circuit board (51) having a sensor component area (53) and a connector area, wherein: Each of the sensor components (11) comprises one of the sensor component regions (53) of the flexible printed circuit substrate (51), and wherein the connector region of the flexible printed circuit substrate (51) provides the connector (21).

12. The sensor device (1) according to any one of the preceding claims, further comprising a first cover (5) and a second cover (7), wherein: Each of the sensor components (11) is at least partially arranged axially between the first cover (5) and the second cover (7).

13. The sensor device (1) according to any one of the preceding claims, wherein: The plurality of sensor components (11) are all arranged around the first axis (3).

14. The sensor device (1) according to any one of the preceding claims, wherein: The sensor device (1) has a diameter perpendicular to the first axis (3) of no more than 15 mm.

15. A method (100) for producing a sensor device (1) according to one of the preceding claims, comprising Providing a plurality of sensor components (11) connected by means of a connection member (21), the sensor components (11) being arranged in a plane; and The sensor component (11) is coiled to arrange the sensor component (11) around the first axis (3).

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