Multi-channel light path mounting mechanism

Abstract

The invention provides a multi-channel light path mounting mechanism, which comprises a measuring device rack, one or two light emitting devices and a plurality of light receiving devices, the light emitting devices and the light receiving devices are arranged on the measuring device rack, and the light receiving devices are arranged in a space range with an inclination angle of more than 0 degree and less than 180 degrees relative to the surface of a wafer. The light emitting device and the light receiving device are respectively provided with an adjusting mechanism, each adjusting mechanism comprises a supporting seat and a floating disc, the supporting seats are fixed on the measuring device rack, the floating discs are connected to the supporting seats in a floating mode, the lens cones are installed on the floating discs, and the floating discs drive the lens cones to move so as to adjust the light emitting angle and the light receiving angle. Driving parts are arranged on the front side and the end side of the adjusting mechanism and comprise the transverse driving part and the vertical driving part, the transverse driving part drives at least one part of the floating disc to move along the end face of the supporting base, and the vertical driving part is used for adjusting the distance and inclination of the floating disc relative to the supporting base. The height of the floating disc in the normal direction of the end face of the supporting base and the swing angle of the floating disc are changed.

Description

Technical Field

[0001] The present invention relates to the field of wafer measurement technology, and in particular to a multi-channel optical path installation mechanism. Background Art

[0002] At present, one of the wafer surface measurement technologies is to use laser scanning on a high-speed rotating wafer, collect the reflected light (specular reflection or diffuse reflection) on the wafer surface through a light collecting device, and perform defect detection or size measurement based on the collected reflected light. When used for wafer surface defect detection, the distribution of scattered light of different types of defects is different. For example, when the surface defect is a particle, the smaller the particle size, the lower the scattering energy. For example, when the defect radius r satisfies 2πr / λ<0.3 (where λ is the wavelength of the incident light), it manifests as Rayleigh scattering, and the scattered light energy tends to be concentrated in the positive and reverse directions of the incident light; when the particle size is large, the scattered light intensity is large. For example, when the defect radius r satisfies 2πr / λ>1, it manifests as Mie scattering, which is usually concentrated in the positive direction of the incident light. The part of the scattered light close to the wafer surface is called wide channel scattered light, and the part close to the normal of the wafer surface is called narrow channel scattered light. Depending on the different incident angles of the incident light, the scattered light of different types of defects is concentrated in the wide channel or narrow channel.

[0003] For the scattered light collection system, it is necessary to collect as much wide channel scattered light and narrow channel scattered light as possible to fully characterize the defect characteristics and accurately identify the defect type. For this purpose, the objective lens is usually required to have a large light collection angle, that is, a large numerical aperture (Na). However, when the numerical aperture is above 0.9, a complex optical component structure is required to achieve a high focusing resolution for wide and narrow channel scattered light in the same focal plane. In addition, the wide and narrow channel scattered light are prone to interfere with each other, and the signal-to-noise ratio is low, which affects the detection accuracy.

[0004] In order to avoid interference between scattered light from wide and narrow channels and improve the signal-to-noise ratio, the use of a multi-channel optical collection system is one of the solutions. Due to the precision errors in processing and assembly, after installation, the optical paths of the light emitting and light receiving devices need to be adjusted to meet the angle requirements of the measured light. However, the multi-channel optical path structure results in a compact installation space for the wafer measurement device, and the light emitting and light receiving devices cannot be adjusted from multiple directions, resulting in poor adjustable degrees of freedom. In addition, the existing adjustment mechanism has a complex structure and occupies a large space, which is not suitable for the narrow installation environment of the wafer measurement device. Therefore, how to design the adjustment mechanism of the light emitting and light receiving devices to meet the needs of multi-degree-of-freedom adjustment in a narrow space is a technical problem that needs to be solved in this field. Summary of the invention

[0005] In order to solve the above technical problems, the present invention proposes a multi-channel optical path installation mechanism, which optimizes the internal structure of the adjustment mechanism and sets the driving part of the adjustment mechanism on an end surface that is easy to operate, so as to achieve multi-degree-of-freedom adjustment of the light emitting and receiving devices in the narrow space of the measuring device rack.

[0006] In order to achieve the above-mentioned purpose, the multi-channel optical path installation mechanism of the present invention includes a measuring device frame, one or two light emitting devices and a plurality of light receiving devices, wherein the light emitting device and the light receiving device are installed on the measuring device frame; the light emitting device is installed in the normal direction of the wafer surface and or in the inclined direction close to the wafer surface; the plurality of light receiving devices are arranged in a spatial range with an inclination angle greater than 0° and less than 180° to the wafer surface, covering the wide and narrow channel scattered light paths commonly understood in the art.

[0007] Due to the multi-channel design of the measuring device, the installation space is small. In order to facilitate the adjustment of the spatial angle of the light emitting device and the light receiving device, an adjustment mechanism is provided on the light emitting device and the light receiving device respectively. The adjustment mechanism includes a support seat and a floating plate, wherein the support seat is fixed on the frame of the measuring device, the floating plate is floatingly connected to the support seat, the lens barrel is installed on the floating plate, and the floating plate drives the lens barrel to move to adjust the light emitting and light receiving angles. An operating space is reserved on the front side (the front side in the present invention refers to the side that is not interfered by other components and is convenient for operation) and the end side of the adjustment mechanism, and the driving part is arranged on the front side and the end side of the adjustment mechanism. The driving part includes a transverse driving part and a vertical driving part, wherein the transverse driving part drives at least a part of the floating plate to move along the end face of the support seat, and the vertical driving part is used to adjust the spacing and inclination of the floating plate relative to the support seat to change the height of the floating plate in the normal direction of the end face of the support seat and the swing angle of the floating plate.

[0008] As one of the preferred modes of the adjustment mechanism, the transverse driving part is arranged on the front side of the support seat, and the vertical driving part is arranged on the end side of the floating disk. A containing cavity is arranged in the middle of the support seat, and the floating disk includes a top plate and an abutment sleeve located on the end surface of the top plate, wherein the abutment sleeve is inserted into the containing cavity, and a vertical driving part is arranged between the top plate and the end surface of the support seat. The transverse driving part includes two transverse driving members, and the two transverse driving members are spaced apart along the circumference of the support seat, and the transverse driving member abuts against the abutment sleeve to drive the abutment sleeve; an elastic supporting member is arranged at a position in the containing cavity that is balanced with the force applied by the transverse driving member, and the elastic supporting member abuts against the abutment sleeve to provide elastic support for the abutment sleeve, so as to ensure that when the transverse driving member drives the abutment sleeve, the abutment sleeve can move in the containing cavity and can remain stable. The vertical driving part includes a vertical driving member, and the vertical driving member drives the top plate to move along the normal direction of the end surface of the support seat, or adjusts the swing angle of the top plate relative to the above-mentioned normal.

[0009] As another preferred mode of the adjustment mechanism, the transverse driving part is arranged at the front side of the floating disk, and the vertical driving part is arranged at the front side of the support seat and the end side of the floating disk. The floating disk includes a floating body and a lens barrel carrier, a receiving cavity is arranged in the middle of the floating body, at least part of the lens barrel carrier is located in the receiving cavity, and the lens barrel is installed on the lens barrel carrier. The transverse driving part includes two transverse driving members located at the front side of the floating body, the two transverse driving members are spaced along the circumference of the floating body, the transverse driving members abut against the lens barrel carrier, and are used to drive the lens barrel carrier; an elastic support member is arranged at a position in the receiving cavity that is balanced with the force applied by the transverse driving member, the elastic support member abuts against the lens barrel carrier, and provides elastic support for the lens barrel carrier, so as to ensure that when the transverse driving member drives the lens barrel carrier, the lens barrel carrier can move in the receiving cavity and remain stable.

[0010] The vertical drive unit includes two front vertical drive units located on the front side of the support seat and one end vertical drive unit located on the end side of the floating body, or one front vertical drive unit located on the front side of the support seat and two end vertical drive units located on the end sides of the floating body. The front vertical drive unit includes a front vertical drive unit and a steering unit located inside the support seat. The front vertical drive unit drives the steering unit, and the steering unit abuts against the end face of the floating body. The steering unit converts the movement of the front vertical drive unit into an abutting movement against the floating body. The end vertical drive unit is installed on the end side of the floating body, passes through the floating body and abuts against the end face of the support seat. The above-mentioned front vertical drive unit and the end vertical drive unit are spaced apart along the circumference of the adjustment mechanism.

[0011] The above-mentioned driving parts can be electric driving parts, such as electric telescopic rods, manual driving parts, such as tightening screws, and hydraulic driving parts, such as hydraulic telescopic rods. As long as they can be placed in the space on the front and end sides of the adjustment mechanism, they are all within the technical concept of the present invention.

[0012] The technical effects of the present invention are as follows: The adjustment mechanism of the multi-channel optical path installation mechanism of the present invention arranges the driving part on the front side and the end side, so that the lens barrel can be adjusted with multiple degrees of freedom from both sides, which solves the disadvantage of the prior art that adjustment from multiple sides is required. In addition, the driving part has a simple structure, which reduces the volume of the adjustment module and is convenient for installation in the narrow space of the measuring device rack. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is an overall structural diagram of the multi-channel optical path installation mechanism of the first embodiment.

[0014] Figure 2 It is a structural diagram of the adjustment mechanism of the light output device in the first embodiment.

[0015] Figure 3 yes Figure 2 Section view along the center cutting line AA.

[0016] Figure 4 It is a structural diagram of the adjustment mechanism of the light collecting device in the first embodiment.

[0017] Figure 5 This is another view of the adjustment mechanism of the light receiving device in the first embodiment.

[0018] Figure 6 It is a structural diagram of the support base 2 in the first embodiment.

[0019] Figure 7 It is a structural diagram of the floating plate 2 in the first embodiment.

[0020] Figure 8 It is a structural diagram of the adjustment mechanism of the light emitting device in the second embodiment. DETAILED DESCRIPTION

[0021] The specific implementation of the present invention is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the present invention, and is not used to limit the present invention.

[0022] Example 1 See Figure 1-Figure 7 A multi-channel optical path installation mechanism includes a measuring device frame 3, a light emitting device 14 and a light receiving device 15, wherein the light emitting device 14 is located in the normal direction of the wafer surface, and four light receiving devices 15 are arranged on both sides of the light emitting device 14, wherein the two light receiving devices 15 close to the normal of the wafer surface are used to collect narrow channel scattered light, and the two light receiving devices 15 close to the wafer surface are used to collect wide channel scattered light. The light emitting device 14 and the light receiving device 15 are provided with an adjustment mechanism for adjusting the angle of the measuring light.

[0023] The adjustment mechanism of the light emitting device 14 includes a support seat 1 and a floating plate 2, wherein the support seat 1 is fixed on the measuring device frame 3, and a light emitting lens barrel 8 is connected to the floating plate 2. A lateral driving part is provided on the front side of the support seat 1, and a vertical driving part is provided on the end side of the support seat 1. A receiving cavity 4 is provided in the middle of the support seat 1, and the floating plate 2 includes a top plate 5 and an abutment sleeve 6 located on the end surface of the top plate 5, wherein the abutment sleeve 6 is inserted into the receiving cavity 4, and an incident hole 7 penetrating the top plate 5 and the abutment sleeve 6 is provided in the middle of the floating plate 2.

[0024] In the first embodiment, the driving members of the transverse driving part and the vertical driving part are selected to be tightening screws. The transverse driving part includes two transverse tightening screws 9 screwed on the front side of the support seat 1. The transverse tightening screws 9 extend into the accommodating chamber 4 and abut against the abutting sleeve 6. The transverse tightening screws 9 move axially to drive the abutting sleeve 6 to move. An elastic support member 10 is provided at a position on the rear side of the support seat 1 in the accommodating chamber 4. The elastic support member 10 abuts on the other side of the abutting sleeve 6. The two transverse tightening screws 9 cooperate with each other and approach the abutting sleeve 6 at the same time, or one approaches the abutting sleeve 6 and the other moves away from the abutting sleeve 6 or is stationary. Correspondingly, the elastic support member 10 is compressed or stretched to cooperate with the transverse tightening screws 9 to change the position of the floating plate 2 on the end surface of the support seat 1, thereby driving the light-emitting lens barrel 8 to move.

[0025] The vertical driving part includes three vertical tightening screws 11, which are arranged at intervals along the circumference of the support seat 1, wherein the vertical tightening screws 11 are screwed on the top plate 5, and the bottom ends of the vertical tightening screws 11 abut against the end surface of the support seat. The three vertical tightening screws 11 cooperate with each other and simultaneously approach or move away from the support seat 1 to change the height of the floating plate 2 in the normal direction of the end surface of the support seat; or partially approach the support seat 1, partially move away from the support seat 1 or remain stationary to change the swing angle of the floating plate 2 relative to the normal of the end surface of the support seat. Correspondingly, the elastic support member 10 is compressed or stretched to match the change in the inclination angle of the floating plate 2. As one of the alternatives, the three vertical tightening screws 11 are screwed on the end side of the support seat, and the vertical tightening screws 11 are rotatably connected to the top plate 5, driving the top plate 5 to move and changing the swing angle of the top plate 5.

[0026] In order to increase the stability of the movement of the floating plate 2, preferably, an elastic connector is provided between the top plate 5 and the support seat 1, and the elastic connector includes two rods 121 and an elastic body 122 located between the rods 121, wherein the rods 121 are located in the grooves 13 opposite to the top plate 5 and the support seat 1, and the elastic body 122 is located in the through holes of the top plate 5 and the support seat 1. The elastic connector applies a pulling force to the floating plate 2 toward the support seat 1, so as to facilitate the stable operation of the floating plate 2 under the drive of the lateral drive part and the vertical drive part.

[0027] The adjustment mechanism of the light collecting device 15 includes a second support seat 16 and a second floating plate, wherein the second support seat 16 is fixed on the measuring device frame 3, and the second floating plate is floatingly connected to the second support seat 16. The second floating plate includes a floating body 17 and a lens barrel bearing 18, and the lens barrel bearing 18 is movably mounted on the floating body 17. A penetrating light collecting hole 19 is provided in the second support seat 16, the floating body 17 and the lens barrel bearing 18. The light collecting lens barrel 20 is mounted on the lens barrel bearing 18, and the lens barrel bearing 18 drives the light collecting lens barrel 20 to move to adjust the light collecting angle.

[0028] The vertical driving part is arranged on the front side of the second support seat 16 and the end side of the floating body 17, including two front vertical driving parts located on the front side of the second support seat 16 and one end vertical driving part located on the end side of the floating body 17, and the driving part of the vertical driving part is selected as a tightening screw. The two front vertical tightening screws 21 are spaced along the circumference of the second support seat 16, and are respectively screwed on the second support seat 16. The end of the front vertical tightening screw 21 abuts on the steering part located inside the second support seat 16. The steering part is selected as a steering ball 22. The steering ball 22 is driven by the front vertical tightening screw 21 to abut on the end face of the floating body 17. The movement direction of the steering ball 22 is 90° with the movement direction of the front vertical tightening screw 21. The end of the front vertical tightening screw 21 squeezes the steering ball 22, and the steering ball 22 is squeezed to move toward the end face of the floating body 17 to drive the floating plate.

[0029] An end vertical tightening screw 23 is installed on the end side of the floating body 17, forming a triangular arrangement with the two front vertical tightening screws 21. The end vertical tightening screw 23 is screwed on the floating body 17, and the end of the end vertical tightening screw 23 passes through the floating body 17 and abuts on the end surface of the support seat 16 to drive the floating plate. The front vertical tightening screw 21 and the end vertical tightening screw 23 cooperate to change the height of the floating plate in the normal direction of the end surface of the support seat 16, or change the swing angle of the floating plate. As one of the alternatives, the end vertical tightening screw 23 is screwed on the end side of the support seat 16, and the end vertical tightening screw 23 is rotationally connected to the floating body 17, driving the floating body 17 to move and changing the swing angle of the floating body 17.

[0030] The transverse driving part is arranged at the front side of the floating body 17, and includes two transverse driving members located at the front side of the floating body 17. The transverse driving members are selected as tightening screws. The two transverse tightening screws 24 are spaced along the circumference of the floating body 17 and are respectively screwed on the floating body 17. An accommodating chamber 25 is arranged in the middle of the floating body 17. One end of the lens barrel carrier 18 is located in the accommodating chamber 25. The end of one transverse tightening screw 24 abuts against the lens barrel carrier 18, and the other transverse tightening screw 24 abuts against the transverse steering member located inside the floating body 17. The transverse steering member is selected as a transverse steering ball 26. The transverse steering ball 26 is driven by the transverse tightening screw 24 to abut against the lens barrel carrier 18. The movement direction of the transverse steering ball 26 is 90° to the movement direction of the transverse tightening screw 24. An elastic support member 27 is provided at a position in the accommodating cavity 25 that is balanced with the force applied by the second transverse tightening screw 24. The elastic support member 27 abuts against the lens barrel carrier 18 to provide elastic support for the lens barrel carrier 18, thereby ensuring that the lens barrel carrier 18 can move stably in the accommodating cavity 25 when the second transverse tightening screw 24 drives the lens barrel carrier 18.

[0031] Since the driving member adopts a tightening screw, in order to increase the stability of the movement of the second floating plate, especially in the first embodiment, the second floating plate is located at the lower side of the second support seat 16, and an elastic connecting member 2 is provided between the floating body 17 and the second support seat 16. The elastic connecting member 2 includes two rod bodies 281 and an elastic body 282 located between the rod bodies 281, wherein the rod body 281 is located in the groove 29 opposite to the floating body 17 and the second support seat 16, and the elastic body 282 is located in the through hole of the floating body 17 and the second support seat 16. The elastic connecting member 2 gives the second floating plate a pulling force toward the second support seat 16, which is conducive to the stable operation of the second floating plate under the drive of the tightening screw.

[0032] A sealing plate 29 is provided on the end surface of the floating body 17 , and the sealing plate 29 seals the end of the lens barrel carrier 18 in the accommodating cavity 25 to prevent the end of the lens barrel carrier 18 from escaping from the accommodating cavity 25 .

[0033] Example 2 See Figure 8 , which is different from the first embodiment in that the floating plate 2 further includes an adjustment tube 30, which is screwed into the incident hole 7, and the light-emitting lens barrel 8 is connected to the adjustment tube 30. In this way, the adjustment tube 30 moves up and down in the incident hole 7, thereby driving the light-emitting lens barrel 8 to move up and down, thereby increasing the stroke of the light-emitting lens barrel 8.

[0034] The above describes in detail the basic principles, main features and advantages of the present invention in the field under investigation, and describes in detail some examples of use. Finally, it should be noted that the examples cited above are only used to explain the present invention and are not used to limit the present invention. Although we have described the present invention in detail with reference to the examples, technicians in this field can still modify the examples and schemes described, or replace the relevant technical parts. Therefore, any modifications and equivalent substitutions made within the spirit and principles of the present invention are within the scope of protection of the claims of the present invention.

Claims

1. A multi-channel optical path installation mechanism, characterized in that: It comprises a measuring device frame, one or two light emitting devices and a plurality of light receiving devices, wherein the light emitting device and the light receiving device are mounted on the measuring device frame; the light emitting device is mounted in the normal direction of the wafer surface and / or in the inclined direction close to the wafer surface; the plurality of light receiving devices are arranged in a space with an inclination angle with the wafer surface being greater than 0° and less than 180°; the light emitting device and the light receiving device are respectively provided with adjustment mechanisms, the adjustment mechanisms comprising a support seat and a floating plate, the support seat is fixed on the measuring device frame, the floating plate is floatingly connected to the support seat, and the lens barrel is mounted on the floating plate; a driving part is provided on the front side and the end side of the adjustment mechanism; the driving part comprises a transverse driving part and a vertical driving part, the transverse driving part drives at least a part of the floating plate to move along the end face of the support seat; the vertical driving part is used for adjusting the spacing and inclination of the floating plate relative to the support seat.

2. A multi-channel optical path installation mechanism as claimed in claim 1, characterized in that: The transverse driving part is arranged on the front side of the support seat, and the vertical driving part is arranged on the end side of the floating disk; a accommodating cavity is arranged in the middle of the support seat, and the floating disk includes a top plate and an abutment sleeve located on the end surface of the top plate, the abutment sleeve is inserted into the accommodating cavity, and a vertical driving part is arranged between the top plate and the end surface of the support seat; the transverse driving part includes two transverse driving members, the two transverse driving members are spaced apart along the circumference of the support seat, and the transverse driving member abuts against the abutment sleeve; an elastic supporting member is arranged at a position in the accommodating cavity that is balanced with the force applied by the transverse driving member, and the elastic supporting member abuts against the abutment sleeve; the vertical driving part includes a vertical driving member, and the vertical driving member drives the top plate to move along the normal direction of the end surface of the support seat, or adjusts the swing angle of the top plate relative to the normal.

3. A multi-channel optical path installation mechanism as claimed in claim 1, characterized in that: The transverse driving part is arranged at the front side of the floating plate, and the vertical driving part is arranged at the front side of the support seat and the end side of the floating plate; the floating plate includes a floating body and a lens barrel carrier, a receiving cavity is arranged in the middle of the floating body, at least part of the lens barrel carrier is located in the receiving cavity, and the lens barrel is installed on the lens barrel carrier; the transverse driving part includes two transverse driving members located at the front side of the floating body, the two transverse driving members are spaced apart along the circumference of the floating body, and the transverse driving members are in contact with the lens barrel carrier; an elastic supporting member is arranged at a position in the receiving cavity that is balanced with the force applied by the transverse driving member, and the elastic supporting member is in contact with the lens barrel carrier; The vertical drive part includes two front vertical drive parts located on the front side of the support seat and one end vertical drive part located on the end side of the floating body, or one front vertical drive part located on the front side of the support seat and two end vertical drive parts located on the end sides of the floating body; the front vertical drive part includes a front vertical drive part and a steering part located inside the support seat, the front vertical drive part drives the steering part, the steering part abuts on the end face of the floating body, and the steering part converts the movement of the front vertical drive part into abutment movement against the floating body; the end vertical drive part is installed on the end side of the floating body, passes through the floating body and abuts on the end face of the support seat; the front vertical drive part and the end vertical drive part are arranged circumferentially spaced apart from each other along the adjustment mechanism.

4. A multi-channel optical path installation mechanism as claimed in claim 2, characterized in that: The end of one of the transverse driving members abuts against the abutment sleeve, and the other transverse driving member drives a transverse steering member located inside the support seat, the transverse steering member abuts against the abutment sleeve, and the transverse steering member converts the movement of the transverse driving member into abutment movement against the abutment sleeve.

5. A multi-channel optical path installation mechanism as claimed in claim 3, characterized in that: The end of one of the transverse driving members abuts against the lens barrel carrier, and the other transverse driving member drives a transverse steering member located inside the floating body, which abuts against the lens barrel carrier and converts the movement of the transverse driving member into abutment movement against the lens barrel carrier.

6. A multi-channel optical path installation mechanism as claimed in claim 2 or 4, characterized in that: The floating plate also includes an adjustment tube. A penetrating entrance hole is provided in the top plate and the abutment sleeve. The adjustment tube is screwed in the entrance hole, and the lens barrel is connected to the adjustment tube.

7. A multi-channel optical path installation mechanism as claimed in claim 2 or 4, characterized in that: The horizontal driving member and the vertical driving member select tightening screws, the tightening screw located on the front side of the support seat is screwed on the front side of the support seat; the tightening screw located on the end side of the floating plate is screwed on the support seat or the top plate, when the tightening screw is screwed on the end side of the support seat, the tightening screw and the top plate are rotationally connected; when the tightening screw is screwed on the top plate, the tightening screw passes through the top plate and abuts against the end surface of the support seat.

8. A multi-channel optical path installation mechanism as claimed in claim 7, characterized in that: An elastic connector is provided between the top plate and the support seat, and the elastic connector includes two rod bodies and an elastic body located between the rod bodies. The rod bodies are respectively located in grooves on opposite sides of the top plate and the support seat, and the elastic body is located in through holes of the top plate and the support seat.

9. A multi-channel optical path installation mechanism as claimed in claim 3 or 5, characterized in that: The lateral drive member, the front vertical drive member and the end vertical drive member select tightening screws, the tightening screw located on the front side of the support seat is screwed on the front side of the support seat; the tightening screw located on the front side of the floating body is screwed on the front side of the floating body; the tightening screw located on the end side of the floating body is screwed on the support seat or the floating body, when the tightening screw is screwed on the end side of the support seat, the tightening screw and the floating body are rotationally connected; when the tightening screw is screwed on the floating body, the tightening screw passes through the floating body and abuts against the end surface of the support seat.

10. A multi-channel optical path installation mechanism as claimed in claim 9, characterized in that: An elastic connector is provided between the floating body and the support seat, and the elastic connector includes two rods and an elastic body located between the rods. The rods are respectively located in grooves on opposite sides of the floating body and the support seat, and the elastic body is located in through holes of the floating body and the support seat.

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