Wafer mounting rack

Abstract

A wafer mounting rack disclosed by the present invention comprises a first side wall, a second side wall, a third side wall and a fourth side wall, the first side wall, the second side wall, the third side wall and the fourth side wall are integrally formed into an accommodating cavity in a surrounding manner, the upper end of the first side wall extends outwards to form a first extension part, and the upper end of the second side wall extends outwards to form a second extension part. 8-inch wafer production equipment corresponds to the position between the outer side edge of the first extension part and the outer side edge of the second extension part, a first limiting groove is formed in the inner side of the first side wall, a second limiting groove is formed in the inner side of the second side wall, and the position between the first limiting groove and the second limiting groove corresponds to the size of a 6-inch wafer; manipulator supporting plates are arranged on the side, close to the third side wall, of the first side wall and the side, close to the third side wall, of the second side wall correspondingly. The wafer mounting rack is used on automatic equipment for producing 8-inch wafers, 6-inch wafers can be placed for production, the equipment does not need to be replaced, the matching application degree is high, the added manipulator supporting plate can improve the production accuracy and the convenience of an automatic structure, and the requirement for universal production of the 6-inch wafers in the production process of the 8-inch wafers is met.

Description

Technical Field

[0001] The invention relates to the technical field of wafer production, and in particular to a wafer mounting rack. Background Art

[0002] Among conventional equipment, 8-inch wafer production and processing equipment corresponds to 8-inch wafer mounting racks, and 6-inch wafer production and processing equipment corresponds to 6-inch wafer mounting racks. As a result, 6-inch wafer mounting racks cannot be used on 8-inch wafer production and processing equipment. Different equipment and mounting racks are required for different batches of wafers, which increases the cost of the enterprise and is not conducive to production efficiency and site use. Summary of the invention

[0003] An object of the present invention is to provide a wafer mounting rack to solve the problems existing in the prior art.

[0004] To achieve this object, the present invention adopts the following technical solutions:

[0005] A wafer mounting rack comprises a first side wall, a second side wall, a third side wall and a fourth side wall, wherein the first side wall, the second side wall, the third side wall and the fourth side wall are integrally formed around a receiving cavity, the first side wall is opposite and parallel to the second side wall, a first extension portion is extended outwardly from the upper end of the first side wall, a second extension portion is extended outwardly from the upper end of the second side wall, the distance between the outer edge of the first extension portion and the outer edge of the second extension portion is 230-235 mm, corresponding to 8-inch wafer production equipment, a first limiting groove is provided on the inner side of the first side wall, a second limiting groove is provided on the inner side of the second side wall, a wafer is placed between the first limiting groove and the second limiting groove, the distance between the first limiting groove and the second limiting groove is 150-155 mm, corresponding to the size of a 6-inch wafer, a robot support plate is provided on the side of the first side wall close to the third side wall and on the side of the second side wall close to the third side wall.

[0006] As a preferred technical solution, the first limiting groove is parallel and symmetrical to the second limiting groove, and the number of the first limiting groove and the number of the second limiting groove are both 25.

[0007] As a preferred technical solution, both ends of the first extension portion are provided with pins, and both ends of the second extension portion are provided with sockets.

[0008] As a preferred technical solution, reinforcing ribs are formed on the outer side of the first side wall and the outer side of the second side wall.

[0009] As a preferred technical solution, a third extension portion is formed at the lower end of the first side wall, and a fourth extension portion is formed at the lower end of the second side wall.

[0010] As a preferred technical solution, a limiting notch is provided at the lower end of the third extension portion and the lower end of the fourth extension portion.

[0011] The beneficial effects of the present invention are: providing a wafer mounting rack, which is used on automated equipment for producing 8-inch wafers, and can hold 6-inch wafers for production without changing equipment, with a high degree of pairing applicability, and an added robot support plate can improve production accuracy and the convenience of the automated structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The present invention is further described in detail below based on the accompanying drawings and embodiments.

[0013] Figure 1 A first stereoscopic view of a wafer mounting rack according to an embodiment;

[0014] Figure 2 A second stereoscopic view of a wafer mounting rack according to an embodiment;

[0015] Figure 3 This is a dimensional diagram of a wafer mounting rack described in an embodiment (dimensions are in mm).

[0016] Figure 1 to Figure 2 middle:

[0017] 1. First side wall; 2. Second side wall; 3. Third side wall; 4. Fourth side wall; 5. First extension part; 6. Second extension part; 7. Third extension part; 8. Fourth extension part; 9. First limiting groove; 10. Second limiting groove; 11. Robot support plate; 12. Latch; 13. Socket; 14. Reinforcing rib plate; 15. Limiting notch. DETAILED DESCRIPTION

[0018] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0019] like Figures 1 to 3As shown, in this embodiment, a wafer mounting rack includes a first side wall 1, a second side wall 2, a third side wall 3 and a fourth side wall 4. The first side wall 1, the second side wall 2, the third side wall 3 and the fourth side wall 4 are integrally formed into a receiving cavity. The first side wall 1 is opposite and parallel to the second side wall 2. The upper end of the first side wall 1 extends outwardly with a first extension portion 5, and the upper end of the second side wall 2 extends outwardly with a second extension portion 6. The outer side edge of the first extension portion 5 and the outer side edge of the second extension portion 6 are 2 30-235mm, corresponding to 8-inch wafer production equipment, a first limiting groove 9 is arranged on the inner side of the first side wall 1, a second limiting groove 10 is arranged on the inner side of the second side wall 2, the wafer is placed between the first limiting groove 9 and the second limiting groove 10, and the distance between the first limiting groove 9 and the second limiting groove 10 is 150-155mm, corresponding to the size of a 6-inch wafer, a robot support plate 11 is arranged on the side of the first side wall 1 close to the third side wall 3 and on the side of the second side wall 2 close to the third side wall 3.

[0020] In a more specific structure, the first limiting groove 9 is parallel and symmetrical to the second limiting groove 10, the number of the first limiting grooves 9 and the number of the second limiting grooves 10 are both 25, both ends of the first extension portion 5 are provided with pins 12, both ends of the second extension portion 6 are provided with insertion holes 13, the outer side of the first side wall 1 and the outer side of the second side wall 2 are formed with reinforcing ribs 14, the lower end of the first side wall 1 is formed with a third extension portion 7, the lower end of the second side wall 2 is formed with a fourth extension portion 8, and the lower ends of the third extension portion 7 and the fourth extension portion 8 are both provided with limiting notches 15.

[0021] The 6-inch wafer is lowered from above between the first side wall 1 and the second side wall 2, and the outer periphery of the 6-inch wafer enters the accommodating cavity along the first limiting groove 9 and the second limiting groove 10. The entire structure is suitable for 8-inch production equipment. There is no need to replace the equipment, and 6-inch wafers can also be processed to meet the size requirements of the production batch.

[0022] It should be stated that the above-mentioned specific implementation methods are only preferred embodiments of the present invention and the technical principles used. Within the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by technicians familiar with this technical field should be included in the protection scope of the present invention.

Claims

1. A wafer mounting rack, characterized in that: The invention comprises a first side wall, a second side wall, a third side wall and a fourth side wall, wherein the first side wall, the second side wall, the third side wall and the fourth side wall are integrally formed to form a accommodating cavity, the first side wall is opposite and parallel to the second side wall, a first extension portion is extended outward from the upper end of the first side wall, a second extension portion is extended outward from the upper end of the second side wall, the distance between the outer edge of the first extension portion and the outer edge of the second extension portion is 230-235mm, corresponding to 8-inch wafer production equipment, a first limiting groove is provided on the inner side of the first side wall, a second limiting groove is provided on the inner side of the second side wall, the wafer is placed between the first limiting groove and the second limiting groove, the distance between the first limiting groove and the second limiting groove is 150-155mm, corresponding to the size of a 6-inch wafer, a robot support plate is provided on the side of the first side wall close to the third side wall and on the side of the second side wall close to the third side wall.

2. A wafer mounting rack according to claim 1, characterized in that: The first limiting groove is parallel and symmetrical to the second limiting groove, and the number of the first limiting groove and the number of the second limiting groove are both 25.

3. The wafer mounting rack according to claim 1, characterized in that: Both ends of the first extension portion are provided with latches, and both ends of the second extension portion are provided with insertion holes.

4. The wafer mounting rack according to claim 1, characterized in that: The outer side of the first side wall and the outer side of the second side wall are both formed with reinforcing ribs.

5. The wafer mounting rack according to claim 1, characterized in that: A third extension portion is formed at the lower end of the first side wall, and a fourth extension portion is formed at the lower end of the second side wall.

6. The wafer mounting rack according to claim 5, characterized in that: A limiting notch is disposed at the lower end of the third extension portion and the lower end of the fourth extension portion.

Images