Silicon wafer basket transfer equipment and use method thereof

Abstract

The invention discloses silicon wafer flower basket transferring equipment and a using method thereof, and relates to the technical field of transferring equipment, the silicon wafer flower basket transferring equipment is technically characterized by comprising a mounting frame and a movable block arranged on the mounting frame in a liftable mode, a first motor is fixedly mounted on the movable block, and a movable rod is fixedly mounted at the output end of the first motor; a pair of clamping plates is slidably mounted on the movable rod, an adjusting assembly is arranged on the movable rod and enables the two clamping plates to move oppositely or oppositely, the pressing rod set is further included, the two ends of the pressing rod set in the length direction are slidably connected with the two clamping plates respectively, and the pressing rod set is composed of a first pressing rod, a second pressing rod and an insertion pipe. One end of the insertion pipe is fixedly connected with one end of the second pressing rod, and the insertion pipe is slidably connected with the first pressing rod; the piston tube is fixedly mounted on the outer surface of the clamping plate, and a piston rod is slidably mounted in the piston tube, so that the silicon wafer can be prevented from being separated from the basket.

Description

Technical Field

[0001] The present invention relates to the technical field of transfer equipment, and in particular to a silicon wafer basket transfer equipment and a use method thereof. Background Art

[0002] During the silicon wafer preparation and production process, the silicon wafers need to be circulated through the silicon wafer basket. The overall circulation of the silicon wafer basket is used to complete the circulation, cleaning, coating and other tasks of the silicon wafers. However, when the silicon wafers are inserted into the silicon wafer basket, the state of the silicon wafer basket is different from the state during subsequent cleaning and other tasks. At this time, the silicon wafer basket needs to be turned over.

[0003] In order to achieve the purpose of flipping the flower basket carrying silicon wafers, the conventional practice is to transfer the flower basket to the position to be flipped through a conveyor belt, and use a pair of clamps to clamp the flower basket to rotate the flower basket carrying the silicon wafers 90°. Nowadays, in order to improve the production efficiency of silicon wafers, the number of silicon wafers that can be loaded on the flower basket is increasing, and the flower basket is provided with a loading and unloading port for silicon wafers. During the flipping process of the flower basket, the silicon wafers will move with the flower basket. When the silicon wafers are not clamped in the flower basket, it is easy for the silicon wafers to fall out of the flower basket from the loading and unloading port. Therefore, in order to solve the above technical problems, the present invention provides a silicon wafer flower basket transfer device and a method for using the same. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a silicon wafer basket transfer device and a use method thereof, which can prevent silicon wafers from falling off the basket.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a silicon wafer basket transfer device, comprising a mounting frame and a movable block which is escalable and arranged on the mounting frame, a first motor is fixedly mounted on the movable block, a movable rod is fixedly mounted on the output end of the first motor, a pair of clamping plates are slidably mounted on the movable rod, an adjustment component is arranged on the movable rod, and the adjustment component enables the two clamping plates to move relative to each other or move away from each other, and further comprising:

[0006] A pressing rod group, wherein the two ends of the pressing rod group in the length direction are respectively slidably connected to the two clamping plates, and the pressing rod group is composed of a first pressing rod, a second pressing rod and an inserting tube, one end of the inserting tube is fixedly connected to one end of the second pressing rod, and the inserting tube is slidably connected to the first pressing rod;

[0007] A piston tube is fixedly mounted on the outer surface of the clamping plate, a piston rod is slidably mounted in the piston tube, a track plate is fixedly mounted on one end of the piston rod, the pressing rod group is slidably connected to the track plate, a piston plate is fixedly mounted on the other end of the piston rod and located inside the piston tube, the piston plate divides the inside of the piston tube into two independent cavities, a second pressure relief pipe and a first pressure relief pipe are fixedly mounted on the piston tube, the second pressure relief pipe is connected to one of the cavities, the first pressure relief pipe is connected to the other cavity, a second one-way electric control valve is fixedly mounted on the second pressure relief pipe, and a first one-way electric control valve is fixedly mounted on the first pressure relief pipe;

[0008] An air supply component is fixedly mounted on the movable rod, and two air outlet ends are arranged on the air supply component, one of which is connected to a cavity in the piston tube, and the other is connected to another cavity in the piston tube, a second electric-controlled valve is fixedly mounted on one of the air outlet ends, and a first electric-controlled valve is fixedly mounted on the other air outlet end.

[0009] Preferably, the air supply assembly includes an air pump, a sleeve, an inner tube and an air supply pipe; the air pump is fixedly mounted on the movable rod, one end of the sleeve is fixedly connected to the air outlet end of the air pump, the inner tube is slidably connected to the sleeve, the air supply pipe is fixedly connected to one end of the inner tube, one end of the air supply pipe is connected to a cavity in the piston tube, and the other end of the air supply pipe is connected to another cavity in the piston tube.

[0010] Preferably, arc-shaped rails are fixedly mounted on the two clamping plates, and rollers are rotatably mounted at both ends of the pressing rod group in the length direction, and the rollers are slidably connected to the arc-shaped rails.

[0011] Preferably, track blocks are fixedly mounted at both ends of the pressing rod group in the length direction, and the track plate is provided with track grooves for the track blocks to slide.

[0012] Preferably, the second pressure rod and the cannula are both provided with a plurality of vertical air holes and inclined air holes, the second pressure rod is provided with a third connecting cavity, the first pressure rod is provided with a first connecting cavity and a second connecting cavity, the diameter of the second connecting cavity is larger than the outer diameter of the cannula, a sealing ring is fixedly provided at one end of the first pressure rod close to the second pressure rod, and the diameter of the sealing ring is adapted to the outer diameter of the cannula; a connecting tube group is provided between the air supply assembly and the pressing rod group.

[0013] Preferably, the connecting tube group includes a first connecting tube and a second connecting tube, one end of the first connecting tube is fixedly connected to the air supply assembly, the second connecting tube is fixedly connected to the end of the pressing rod group, the other end of the first connecting tube is fixedly connected to the second connecting tube, and a third electric control valve is fixedly installed on the first connecting tube.

[0014] Preferably, the adjusting assembly includes a second motor and a threaded rod; the second motor is fixedly mounted on one end of the movable rod, the threaded rod is rotatably mounted inside the movable rod, a threaded block is fixedly mounted on the clamping plate, a limiting groove for sliding the threaded block is provided on the movable rod, one end of the threaded rod passes through the interior of the threaded block and is threadedly connected to the threaded block, and the output end of the second motor is fixedly connected to one end of the threaded rod.

[0015] A method for using a silicon wafer basket transfer device, including the above-mentioned silicon wafer basket transfer device, comprises the following steps:

[0016] S1: After the flower basket reaches the flipping position, the adjustment assembly causes the two clamps to move relative to each other to clamp the two ends of the flower basket;

[0017] S2: Open the second electric control valve and close the first electric control valve, the air supply assembly delivers air to the cavity above the piston plate, the piston plate moves toward the bottom end of the piston tube, and the roller slides toward the bottom end of the arc rail at the same time, the pressing rod group fits on the multiple silicon wafers, and the loading and unloading port of the flower basket is closed;

[0018] S3: The first motor drives the movable rod to rotate 90°.

[0019] Compared with the prior art, the present invention provides a silicon wafer basket transfer device and a method for using the same, which has the following beneficial effects:

[0020] A pressing rod group is slidably arranged on two clamping plates, and the pressing rod group consists of a first pressing rod, a second pressing rod and an insert tube. A piston tube is fixedly installed on the outer surface of the clamping plate, and a piston rod is slidably installed in the piston tube. A track plate is fixedly installed on one end of the piston rod. The pressing rod group is slidably connected to the track plate, and a piston plate is fixedly installed on the other end of the piston rod. The piston plate divides the interior of the piston tube into two independent cavities. An air supply component is fixedly installed on the movable rod, and two air outlet ends are arranged on the air supply component, one of which is connected to a cavity in the piston tube, and the other air outlet end is connected to another cavity in the piston tube. The air supply component can control the piston plate to slide in the piston tube, thereby controlling the movement of the pressing rod group, so that the pressing rod group can fit with multiple silicon wafers in the flower basket, which plays a role of limiting the silicon wafers. During the process of flipping the flower basket 90°, even if the silicon wafer is in a loose state in the flower basket, the silicon wafer will not fall out of the flower basket, resulting in damage to the silicon wafer.

[0021] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. The specific implementation of the present invention is given in detail by the following embodiments and their accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0023] Figure 1 It is a structural schematic diagram of the present invention;

[0024] Figure 2 It is a structural schematic diagram of the movable rod, the clamping plate, the first motor and the pressing rod group in the present invention;

[0025] Figure 3 It is a structural schematic diagram of the movable rod, the clamping plate and the pressing rod group in the present invention;

[0026] Figure 4 It is a structural schematic diagram of the air supply assembly, the clamping plate and the pressing rod group in the present invention;

[0027] Figure 5 It is a structural schematic diagram of the piston tube, the first connecting tube, the first pressure rod and the track plate in the present invention;

[0028] Figure 6 It is a schematic diagram of the cross-sectional structure of the piston tube in the present invention;

[0029] Figure 7 It is a schematic diagram of the split structure of the first pressure rod and the second pressure rod in the present invention;

[0030] Figure 8 is a schematic diagram of the cross-sectional structure of the pressing rod group in the present invention;

[0031] Fig. 9 It is a structural schematic diagram of the pressing rod group in the present invention.

[0032] In the figure: 10, mounting plate; 11, bottom plate; 12, movable block; 13, hydraulic telescopic rod; 14, sliding rod;

[0033] 20. movable rod; 201. limiting slide groove; 202. connecting plate; 21. first motor; 22. second motor; 23. threaded rod; 24. threaded block;

[0034] 30. Clamp; 31. Curved rail; 311. Connecting rod;

[0035] 40, first pressure rod; 401, first connecting cavity; 402, second connecting cavity; 403, vertical air hole; 404, inclined air hole; 405, sealing ring; 41, second pressure rod; 411, third connecting cavity; 42, insert tube; 43, track block; 44, roller;

[0036] 50, air delivery pump; 51, air delivery main pipe; 52, casing; 53, inner pipe; 54, air delivery pipe; 541, first electric control valve; 542, second electric control valve;

[0037] 60, piston tube; 601, limit ring; 602, fixed block; 61, connecting channel; 62, piston rod; 621, piston plate; 63, first pressure relief pipe; 631, first one-way electric control valve; 64, track plate; 641, track groove; 65, second pressure relief pipe; 651, second one-way electric control valve;

[0038] 70. First connecting pipe; 701. Third electrically controlled valve; 71. Second connecting pipe. DETAILED DESCRIPTION

[0039] The following is combined with Figures 1 to 9 The principles and features of the present invention are described, and the examples given are only used to explain the present invention and are not used to limit the scope of the present invention. In the following paragraphs, the present invention is described in more detail by way of example with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and are not in precise proportions, and are only used to facilitate and clearly assist in explaining the purpose of the embodiments of the present invention.

[0040] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0042] Embodiment 1:

[0043] Please combine Figures 1 to 9As shown, the present invention provides a silicon wafer basket transfer device, which includes a mounting frame composed of a mounting plate 10 and a bottom plate 11, wherein the bottom end of the mounting plate 10 is fixedly connected to the bottom plate 11, a slide bar 14 is fixedly installed between the inner top surface of the mounting plate 10 and the bottom plate 11, a movable block 12 is slidably installed on the slide bar 14, a hydraulic telescopic rod 13 is fixedly installed on the top end of the mounting plate 10, the movable end of the hydraulic telescopic rod 13 is fixedly connected to the movable block 12, and the movable block 12 is driven to rise and fall by the hydraulic telescopic rod 13;

[0044] A first motor 21 is fixedly mounted on the movable block 12, a connecting plate 202 is fixedly mounted on the output end of the first motor 21, one end of the connecting plate 202 is fixedly connected to the movable rod 20, both ends of the movable rod 20 in the length direction are provided with clamping plates 30, a threaded block 24 is fixedly mounted on the clamping plate 30, a limiting slide groove 201 for the threaded block 24 to slide is provided on the movable rod 20, a threaded rod 23 is rotatably mounted in the movable rod 20, one end of the threaded rod 23 passes through the interior of the two threaded blocks 24 and is threadedly connected with the two threaded blocks 24, two different-direction threaded areas are arranged in the length direction of the threaded rod 23, and the two threaded blocks 24 are respectively arranged in the two different-direction threaded areas, a second motor 22 is fixedly mounted on one end of the movable rod 20, the output end of the second motor 22 is fixedly connected to one end of the threaded rod 23, when the second motor 22 drives the threaded rod 23 to rotate, the two clamping plates 30 can move relative to or away from each other; the transfer device also includes:

[0045] A pressing rod group, at both ends of the pressing rod group in the length direction, rollers 44 are rotatably installed, and arc rails 31 are fixedly installed on the two clamping plates 30 through multiple connecting rods 311. The rollers 44 are slidably connected with the arc rails 31. The distance between the top of the arc rail 31 and the movable rod 20 is greater than the height of the flower basket, ensuring that the flower basket can smoothly enter between the two clamping plates 30 from one side of the clamping plate 30;

[0046] The pressing rod assembly is composed of a first pressing rod 40, a second pressing rod 41 and an inserting tube 42. One end of the inserting tube 42 is fixedly connected to one end of the second pressing rod 41. The inserting tube 42 is slidably connected to the first pressing rod 40. When the two clamping plates 30 move away from each other, a part of the inserting tube 42 is always located inside the first pressing rod 40, so that the first pressing rod 40 and the second pressing rod 41 are always connected.

[0047] The piston tube 60 is fixedly mounted on the outer surface of the clamping plate 30 through a plurality of fixing blocks 602. A piston rod 62 is slidably mounted in the piston tube 60. A track plate 64 is fixedly mounted on one end of the piston rod 62. Track blocks 43 are fixedly mounted on the first pressure rod 40 and the second pressure rod 41. A track groove 641 for the track block 43 to slide is provided on the track plate 64. A piston plate 621 is fixedly mounted on the other end of the piston rod 62 and located inside the piston tube 60. The piston plate 621 fixes the inner part of the piston tube 60. The piston tube 60 is divided into two independent cavities. A limit ring 601 is fixedly installed inside the piston tube 60. The limit ring 601 is used to limit the moving position of the piston plate 621. The piston tube 60 is fixedly installed with a second pressure relief pipe 65 and a first pressure relief pipe 63. The second pressure relief pipe 65 is connected to one of the cavities, and the first pressure relief pipe 63 is connected to the other cavity. A second one-way electric control valve 651 is fixedly installed on the second pressure relief pipe 65, and a first one-way electric control valve 631 is fixedly installed on the first pressure relief pipe 63.

[0048] An air supply component is fixedly mounted on the movable rod 20, and two air outlet ends are arranged on the air supply component, one of which is connected to a cavity in the piston tube 60, and the other is connected to another cavity in the piston tube 60, and a second electric control valve 542 is fixedly mounted on one of the air outlet ends, and a first electric control valve 541 is fixedly mounted on the other air outlet end;

[0049] When the conveying device conveys the flower basket loaded with silicon wafers to the flipping position, the second motor 22 drives the threaded rod 23 to rotate, so that the two clamping plates 30 move relative to each other to clamp the two ends of the flower basket. Subsequently, the second electrically controlled valve 542 and the first one-way electrically controlled valve 631 are opened, and the first electrically controlled valve 541 and the second one-way electrically controlled valve 651 are closed, and the air supply component conveys air to the cavity above the piston plate 621, and the gas in the cavity below the piston plate 621 is discharged through the first pressure relief pipe 63, and the piston plate 621 moves toward the bottom end of the piston tube 60, and the pressing rod group slides to the bottom end of the arc rail 31, fits with the multiple silicon wafers in the flower basket, and limits the silicon wafers. At this time, when the flower basket is flipped 90°, even if the silicon wafers are in a loose state in the flower basket, the silicon wafers will not fall out of the flower basket, resulting in damage to the silicon wafers.

[0050] Based on the first embodiment, the solution in the first embodiment is further detailed in combination with the following specific working method, as described below for details.

[0051] Embodiment 2:

[0052] As for the air supply component, the air supply component includes an air supply pump 50, a sleeve 52, an inner tube 53 and an air supply pipe 54; the air supply pump 50 is fixedly installed on the movable rod 20, and an air supply main pipe 51 is fixedly installed on the air outlet end of the air supply pump 50, one end of the sleeve 52 is fixedly connected to the air supply main pipe 51, the inner tube 53 is slidably connected to the sleeve 52, the air supply pipe 54 is fixedly connected to one end of the inner tube 53, the second electric control valve 542 is fixedly installed on one end of the air supply pipe 54, and the first electric control valve 541 is fixedly installed on the other end of the air supply pipe 54, one end of the air supply pipe 54 is connected to a cavity in the piston tube 60, and the other end of the air supply pipe 54 is connected to another cavity in the piston tube 60;

[0053] By controlling the opening and closing of the first electrically controlled valve 541 and the second electrically controlled valve 542 , air can be delivered to two different cavities in the piston tube 60 to control the movement of the piston plate 621 .

[0054] Embodiment three:

[0055] Silicon wafers need to be processed through multiple processes, and some processes need to be in contact with liquid, such as cleaning. After cleaning, the silicon wafers are often drained for a period of time before being sent to the next process. If the draining time is long, it will affect the processing efficiency of the silicon wafers. When the draining time is short, some water will often remain on the silicon wafers. When the silicon wafers with water are processed in the next process, it is not conducive to improving the quality of the silicon wafers. Therefore, in order to solve this problem, a plurality of vertical air holes 403 and inclined air holes 404 are evenly spaced on the second pressure rod 41 and the insertion tube 42, and a third connecting hole 404 is opened in the second pressure rod 41. The through cavity 411, the first pressure rod 40 is provided with a first connecting cavity 401 and a second connecting cavity 402, the diameter of the second connecting cavity 402 is larger than the outer diameter of the insert tube 42, and a sealing ring 405 is fixedly provided at one end of the first pressure rod 40 close to the second pressure rod 41, and the diameter of the sealing ring 405 is adapted to the outer diameter of the insert tube 42; the first connecting tube 70 is fixedly installed on the inner tube 53, the second connecting tube 71 is fixedly installed on one end of the first connecting tube 70, the end of the second connecting tube 71 is fixedly connected to the end of the pressing rod group, and the third electric control valve 701 is fixedly installed on the first connecting tube 70;

[0056] When it is necessary to remove the water remaining on the silicon wafer, the third electrically controlled valve 701 can be opened, and air is sent to the first connecting cavity 401, the second connecting cavity 402 and the third connecting cavity 411, and finally discharged through the plurality of vertical air holes 403 and the inclined air holes 404. The delivered air can accelerate the flow of water on the silicon wafer, so that the water can be separated from the silicon wafer more quickly, which can reduce the time for draining the silicon wafer, improve the processing efficiency of the silicon wafer, and help improve the production quality of the silicon wafer;

[0057] In order to improve the effect of removing liquid from the silicon wafer, the piston tube 60 can be set to a U shape, and the piston plate 621 slides on the vertical section of the piston tube 60. The cavity below the piston plate 621 is kept in a connected state through the horizontal and vertical ends of the piston tube 60. A connecting channel 61 is fixedly provided at the top of the piston tube 60. The connecting channel 61 connects the two cavities above the piston plate 621, and then the movement of the two pressing rod groups can be controlled, thereby increasing the number of vertical air holes 403 and inclined air holes 404, improving the contact range between air and silicon wafers, and promoting the effect of removing liquid from silicon wafers; when the two pressing rod groups are both located at the top of the arc rail 31, the distance between the two pressing rod groups is greater than the width of the flower basket, ensuring that the flower basket flipped into a vertical state can smoothly leave the two clamping plates 30.

[0058] A method for using a silicon wafer basket transfer device, comprising the above-mentioned silicon wafer basket transfer device, comprises the following steps:

[0059] S1: After the flower basket is transported to the flipping position, the adjustment assembly causes the two clamping plates 30 to move relative to each other to clamp and fix the two ends of the flower basket;

[0060] S2: The second electrically controlled valve 542 and the first one-way electrically controlled valve 631 are opened, and the first electrically controlled valve 541 and the second one-way electrically controlled valve 651 are closed. The air pump 50 delivers air to the sleeve 52, and finally delivers air to the cavity above the piston plate 621 through the air delivery pipe 54. The pressure of the cavity above the piston plate 621 increases continuously, so that the piston plate 621 moves toward the bottom end of the piston tube 60. At the same time, the roller 44 slides toward the bottom end of the arc track 31, and the pressing rod group is attached to the multiple silicon wafers to close the loading and unloading port of the flower basket.

[0061] S3: Finally, the first motor 21 drives the movable rod 20 to rotate 90°.

[0062] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any ordinary technician in the industry can smoothly implement the present invention as shown in the drawings and described above. However, any equivalent changes, modifications and evolutions made by technicians familiar with the profession without departing from the scope of the technical solution of the present invention using the technical content disclosed above are all equivalent embodiments of the present invention. At the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the technical solution of the present invention.

Claims

1. A silicon wafer basket transfer device, comprising a mounting frame and a movable block (12) which is escalably arranged on the mounting frame, wherein a first motor (21) is fixedly mounted on the movable block (12), a movable rod (20) is fixedly mounted on the output end of the first motor (21), a pair of clamping plates (30) are slidably mounted on the movable rod (20), and an adjustment component is arranged on the movable rod (20), and the adjustment component enables the two clamping plates (30) to move relative to each other or move away from each other, characterized in that: Also includes: A pressing rod group, wherein the two ends of the pressing rod group in the length direction are respectively slidably connected to the two clamping plates (30), and the pressing rod group is composed of a first pressing rod (40), a second pressing rod (41) and an insertion tube (42), one end of the insertion tube (42) is fixedly connected to one end of the second pressing rod (41), and the insertion tube (42) is slidably connected to the first pressing rod (40); The piston tube (60) is fixedly mounted on the outer surface of the clamping plate (30), a piston rod (62) is slidably mounted in the piston tube (60), a track plate (64) is fixedly mounted on one end of the piston rod (62), the pressing rod group is slidably connected to the track plate (64), a piston plate (621) is fixedly mounted on the other end of the piston rod (62) and located inside the piston tube (60), the piston plate (621) divides the inside of the piston tube (60) into two independent cavities, a second pressure relief pipe (65) and a first pressure relief pipe (63) are fixedly mounted on the piston tube (60), the second pressure relief pipe (65) is connected to one of the cavities, the first pressure relief pipe (63) is connected to the other cavity, a second one-way electric control valve (651) is fixedly mounted on the second pressure relief pipe (65), and a first one-way electric control valve (631) is fixedly mounted on the first pressure relief pipe (63); An air supply component is fixedly mounted on the movable rod (20), and two air outlet ends are arranged on the air supply component, one of which is connected to a cavity in the piston tube (60), and the other is connected to another cavity in the piston tube (60), a second electric control valve (542) is fixedly mounted on one of the air outlet ends, and a first electric control valve (541) is fixedly mounted on the other air outlet end.

2. The silicon wafer basket transfer device according to claim 1, characterized in that: The air supply assembly comprises an air supply pump (50), a sleeve (52), an inner tube (53) and an air supply pipe (54); The air pump (50) is fixedly mounted on the movable rod (20), one end of the sleeve (52) is fixedly connected to the air outlet end of the air pump (50), the inner tube (53) is slidably connected to the sleeve (52), the air supply pipe (54) is fixedly connected to one end of the inner tube (53), one end of the air supply pipe (54) is connected to a cavity in the piston tube (60), and the other end of the air supply pipe 5 (4) is connected to another cavity in the piston tube (60).

3. The silicon wafer basket transfer device according to claim 1, characterized in that: The two clamping plates (30) are both fixedly mounted with arc-shaped rails (31), and rollers (44) are rotatably mounted at both ends of the pressing rod group in the length direction, and the rollers (44) are slidably connected to the arc-shaped rails (31).

4. The silicon wafer basket transfer device according to claim 1, characterized in that: Track blocks (43) are fixedly mounted at both ends of the pressing rod group in the length direction, and a track groove (641) for the track block (43) to slide is provided on the track plate (64).

5. The silicon wafer basket transfer device according to claim 1, characterized in that: The second pressure rod (41) and the insertion tube (42) are both provided with a plurality of vertical air holes (403) and inclined air holes (404); the second pressure rod (41) is provided with a third connecting cavity (411); the first pressure rod (40) is provided with a first connecting cavity (401) and a second connecting cavity (402); the diameter of the second connecting cavity (402) is larger than the outer diameter of the insertion tube (42); a sealing ring (405) is fixedly provided at one end of the first pressure rod (40) close to the second pressure rod (41); the diameter of the sealing ring (405) is adapted to the outer diameter of the insertion tube (42); A connecting pipe group is arranged between the air supply assembly and the pressing rod group.

6. The silicon wafer basket transfer device according to claim 5, characterized in that: The connecting pipe group comprises a first connecting pipe (70) and a second connecting pipe (71), one end of the first connecting pipe (70) is fixedly connected to the air supply assembly, the second connecting pipe (71) is fixedly connected to the end of the pressing rod group, the other end of the first connecting pipe (70) is fixedly connected to the second connecting pipe (71), and a third electric control valve (701) is fixedly installed on the first connecting pipe (70).

7. The silicon wafer basket transfer device according to claim 1, characterized in that: The adjustment assembly comprises a second motor (22) and a threaded rod (23); The second motor (22) is fixedly mounted on one end of the movable rod 2 (0), the threaded rod (23) is rotatably mounted inside the movable rod 2 (0), a threaded block (24) is fixedly mounted on the clamping plate (30), a limiting sliding groove (201) for the threaded block (24) to slide is provided on the movable rod (20), one end of the threaded rod (23) passes through the interior of the threaded block (24) and is threadedly connected to the threaded block (24), and the output end of the second motor (22) is fixedly connected to one end of the threaded rod (23).

8. A method for using a silicon wafer basket transfer device, comprising the silicon wafer basket transfer device according to claims 1 to 9, characterized in that: The following steps are involved: S1: After the flower basket reaches the flipping position, the adjustment assembly causes the two clamping plates (30) to move relative to each other to clamp and fix the two ends of the flower basket; S2: The second electrically controlled valve (542) is opened and the first electrically controlled valve (541) is closed, and the air supply assembly delivers air to the cavity above the piston plate (621), the piston plate (621) moves toward the bottom end of the piston tube (60), and the roller (44) slides toward the bottom end of the arc track (31) at the same time, and the pressing rod assembly is attached to the plurality of silicon wafers, closing the loading and unloading port of the flower basket; S3: The first motor (21) drives the movable rod (20) to rotate 90°.

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