Monitoring method of up-down conveying device and equipment comprising up-down conveying device

Abstract

The invention relates to the technical field of semiconductors, in particular to a monitoring method of an up-and-down conveying device and equipment comprising the up-and-down conveying device, and the up-and-down movement process of the up-and-down conveying device can be accurately controlled. The up-down conveying device comprises a driver, a conveying assembly, a first detection assembly and a second detection assembly. According to the monitoring method of the up-down conveying device, a first detection assembly and a second detection assembly of the up-down conveying device are used for obtaining first position data and second position data in the running process of a conveying assembly of the up-down conveying device, and the difference value of the first position data and the second position data is calculated; and on the basis of a comparison result of the difference value and the first preset value, next operation indication is performed on the conveying assembly of the up-down conveying device, so that accurate control on the up-down moving process of the up-down conveying device can be realized.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and particularly to a monitoring method for an up-and-down conveying device and a device including the up-and-down conveying device. Background Art

[0002] Currently, when processing semiconductor materials, an up-and-down conveying device is usually used to achieve automatic conveying of the materials. When using the up-and-down conveying device to convey the materials in the vertical direction, it is necessary to accurately control the up-and-down movement of the up-and-down conveying device, including different parameters such as the distance, time, and position of the up-and-down movement of the up-and-down conveying device.

[0003] Therefore, a monitoring method for an up-and-down conveying device is needed, through which the accurate control of the up-and-down movement process of the up-and-down conveying device can be achieved. Summary of the Invention

[0004] In view of this, embodiments of the present disclosure provide a monitoring method for an up-and-down conveying device and a device including the up-and-down conveying device, which can achieve accurate control of the up-and-down movement process of the up-and-down conveying device.

[0005] In a first aspect, an embodiment of the present disclosure provides a monitoring method for an up-and-down conveying device, which is applied to the up-and-down conveying device. The up-and-down conveying device includes a driver, a conveying component, a first detection component, and a second detection component. The driver is communicatively connected to the conveying component and is configured to drive the conveying component to operate or stop operating in the vertical direction, and can monitor the operating state of the conveying component and issue a fault alarm message. The conveying component is configured to convey materials in the vertical direction. The first detection component is configured to collect first position data of the materials, and the second detection component is configured to collect second position data of the materials. Wherein, the monitoring method for the up-and-down conveying device includes: obtaining the first position data and the second position data; calculating the difference between the first position data and the second position data; comparing the difference with a first preset value to determine whether the difference is greater than or equal to the first preset value; if the difference is greater than or equal to the first preset value, sending an alarm signal and instructing the driver to drive the conveying component to stop operating.

[0006] In some embodiments, the conveying assembly includes a driving source assembly and a transmission assembly. The driving source assembly is connected to the transmission assembly and is configured to drive the transmission assembly to move in the vertical direction. The transmission assembly is configured to drive the material to move in the vertical direction. Wherein, the driving source assembly is provided with an output shaft and an encoder connected to the output shaft, and the encoder forms the first detection assembly; the second detection assembly is connected to the transmission assembly, wherein the second detection assembly includes a grating ruler; wherein, obtaining the first position data and the second position data includes: obtaining the first position data sent by the encoder and the second position data sent by the grating ruler; wherein, if the difference is greater than or equal to the first preset value, sending an alarm signal and instructing the driver to drive the conveying assembly to stop operating includes: if the difference is greater than or equal to the first preset value, sending an alarm signal indicating that the position of the material is abnormal, and instructing the driver to drive the driving source assembly to stop operating.

[0007] In some embodiments, the conveying assembly further includes a coupling, and the coupling is configured to connect the driving source assembly and the transmission assembly; after sending the alarm signal indicating that the position of the material is abnormal and instructing the driver to drive the driving source assembly to stop operating, it further includes: an operator detecting whether the coupling is abnormal; if the coupling is abnormal, the operator performs maintenance on the coupling; if the coupling is normal, the operator detects whether the transmission assembly is abnormal; if the transmission assembly is abnormal, the operator performs maintenance on the transmission assembly.

[0008] In some embodiments, after comparing the difference with the first preset value to determine whether the difference is greater than or equal to the first preset value, it further includes: if the difference is less than the first preset value, comparing the difference with a second preset value to determine whether the difference is greater than or equal to the second preset value, wherein the second preset value is less than the first preset value; if the difference is greater than or equal to the second preset value, determining that the transmission assembly is worn and performing a count; counting the number of times that the difference is greater than or equal to the second preset value and less than the first preset value within a preset time period; comparing the number of times that the difference is greater than or equal to the second preset value and less than the first preset value with a first preset number of times to determine whether the number of times that the difference is greater than or equal to the second preset value and less than the first preset value is greater than or equal to the first preset number of times; if the number of times that the difference is greater than or equal to the second preset value and less than the first preset value is greater than or equal to the first preset number of times, sending a life warning signal and instructing the driver to drive the driving source assembly to stop operating.

[0009] In some embodiments, within the preset time period, if the number of times the difference is greater than or equal to the second preset value and less than the first preset value is M n-1 , then determine that the life percentage of the transmission component is N n-1 , within the preset time period, if the number of times the difference is greater than or equal to the second preset value and less than the first preset value is M n , then determine that the life percentage of the transmission component is N n ; wherein, M n is greater than M n-1 , N n is less than N n-1 , where n is an integer greater than or equal to 1; wherein, within the preset time period, if the number of times M that the difference is greater than or equal to the second preset value and less than the first preset value n is greater than or equal to the first preset number of times, issue the life warning signal and determine that the life of the transmission component has expired.

[0010] In some embodiments, after issuing the alarm signal if the difference is greater than or equal to the first preset value and before instructing the driver to drive the conveying component to stop running, it further includes: determining whether motion compensation needs to be performed on the material; if motion compensation needs to be performed on the material, then issuing an instruction to perform motion compensation on the material; the driver executes the instruction until the material completes the corresponding key processing node; wherein, determining whether motion compensation needs to be performed on the material includes: determining whether the material has moved to a key position; or, determining whether stopping the conveying component at the current position will cause damage to the material; or, determining whether stopping the conveying component at the current position will cause damage to the components in the upper and lower conveying devices; wherein, issuing the instruction to perform motion compensation on the material includes: determining the motion parameters for performing motion compensation on the material based on the difference; generating a compensation instruction for performing motion compensation on the material based on the motion parameters.

[0011] In some embodiments, comparing the difference with a first preset value and determining whether the difference is greater than or equal to the first preset value includes: establishing a mathematical model; inputting the difference and the first preset value into the mathematical model; through the mathematical model, comparing the difference with the first preset value to determine whether the difference is greater than or equal to the first preset value; wherein, comparing the difference with a second preset value and determining whether the difference is greater than or equal to the second preset value includes: inputting the difference and the second preset value into the mathematical model; through the mathematical model, comparing the difference with the second preset value to determine whether the difference is greater than or equal to the second preset value.

[0012] In some embodiments, establishing the mathematical model includes: determining whether the conveying component is in pre-operation, where the pre-operation is used to represent that the conveying component is in the initial usage stage; if the conveying component is in pre-operation, obtaining a plurality of the first position data and a plurality of the second position data; based on the plurality of the first position data and the plurality of the second position data obtained when the conveying component is in pre-operation, calculating and recording a plurality of the differences; determining whether the plurality of differences are discretely distributed; if the plurality of differences are discretely distributed, calculating the first preset value based on the discretely distributed plurality of differences; using a fitting method, based on the plurality of differences between the maximum value and the minimum value among the plurality of differences, establishing the mathematical model.

[0013] In some embodiments, the monitoring method of the up-down conveying device further includes; determining whether a fault alarm message sent by the driver is received; if the fault alarm message sent by the driver is received, instructing the driver to drive the conveying component to stop operating; obtaining the first position data and the second position data; calculating the difference between the first position data and the second position data; comparing the difference with the first preset value to determine whether the difference is greater than or equal to the first preset value; if the difference is greater than or equal to the first preset value, prompting that a fault has occurred in the transmission component; if the difference is less than the first preset value, prompting that a fault has occurred in the drive source component.

[0014] In some embodiments, the range of the first preset value is 0.1 mm - 1 mm; and / or, the range of the percentage of the second preset value to the first preset value is 70% - 85%; and / or, when the percentage of the life of the transmission component is in the range of 60% - 85%, sending a life warning signal to determine that the life of the transmission component has expired.

[0015] In some embodiments, the first preset value includes: 0.2 mm, 0.5 mm, 0.8 mm, or 0.9 mm; and / or, the percentage of the second preset value to the first preset value includes: 70%, 75%, or 80%; and / or, the life percentage includes: 60%, 65%, 70%, 75%, 80%, or 85%.

[0016] In a second aspect, an embodiment of the present disclosure provides a device including an up-and-down conveying device, and the device including the up-and-down conveying device can monitor the up-and-down conveying device based on the monitoring method of the up-and-down conveying device described in the first aspect.

[0017] The monitoring method of the up-and-down conveying device provided by the embodiments of the present disclosure uses a first detection component and a second detection component of the up-and-down conveying device to respectively obtain first position data and second position data during the operation of the conveying component of the up-and-down conveying device. By calculating the difference between the first position data and the second position data, and based on the result of comparing the difference with the first preset value, a next operation instruction is given to the conveying component of the up-and-down conveying device, which can avoid the inaccurate movement of the up-and-down conveying device after long-term operation, and thus can achieve accurate control of the up-and-down movement process of the up-and-down conveying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The figure shows a schematic structural diagram of an up-and-down conveying device and materials provided by an embodiment of the present disclosure.

[0019] Figure 2 The figure shows a flowchart of a monitoring method of an up-and-down conveying device provided by an embodiment of the present disclosure.

[0020] Figure 3 The figure shows a schematic structural diagram of an up-and-down conveying device and materials provided by another embodiment of the present disclosure.

[0021] Figure 4 As shown Figure 2 The figure shows a flowchart of step 201 in the flowchart shown.

[0022] Figure 5 As shown Figure 2 The figure shows a flowchart of step 204 in the flowchart shown.

[0023] Figure 6 The figure shows a flowchart of a monitoring method of an up-and-down conveying device provided by another embodiment of the present disclosure.

[0024] Figure 7 The figure shows a flowchart of a monitoring method of an up-and-down conveying device provided by another embodiment of the present disclosure.

[0025] Figure 8The figure shows a flowchart of a monitoring method for an up-down conveying device provided in another embodiment of the present disclosure.

[0026] Figure 9 As shown Figure 8 The figure shows a flowchart of step 211 in the flowchart shown.

[0027] Figure 10 As shown Figure 8 The figure shows a flowchart of step 212 in the flowchart shown.

[0028] Figure 11 As shown Figure 7 The figure shows a flowchart of step 203 in the flowchart shown.

[0029] Figure 12 As shown Figure 7 The figure shows a flowchart of step 205 in the flowchart shown.

[0030] Figure 13 As shown Figure 11 The figure shows a flowchart of step 2031 in the flowchart shown.

[0031] Figure 14 The figure shows a flowchart of a monitoring method for an up-down conveying device provided in another embodiment of the present disclosure.

[0032] Figure 15 The figure shows a schematic structural diagram of a device including an up-down conveying device provided in an embodiment of the present disclosure.

[0033] Reference numerals:

[0034] 1. Device including an up-down conveying device; 10. Up-down conveying device; 100. Driver; 200. Conveying assembly; 210. Driving source assembly; 2110. Output shaft; 2120. Encoder; 220. Transmission assembly; 230. Coupling; 300. First detection assembly; 400. Second detection assembly; 410. Grating scale; 4110. Benchmark scale; 4120. Reading head; 2. Material. Detailed implementation manners

[0035] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present disclosure without creative efforts shall fall within the protection scope of the present disclosure.

[0036] Figure 1 The figure shows a schematic structural diagram of an up-down conveying device and a material provided in an embodiment of the present disclosure. Figure 2The following is a flowchart of a monitoring method for an up-and-down conveying device provided by an embodiment of the present disclosure. As Figure 1 and Figure 2 shown, the monitoring method for the up-and-down conveying device is applied to the up-and-down conveying device 10, and the up-and-down conveying device 10 includes a driver 100, a conveying component 200, a first detection component 300, and a second detection component 400. The driver 100 is communicatively connected to the conveying component 200 and is configured to drive the conveying component 200 to operate or stop operating in the vertical direction, and can monitor the operating state of the conveying component 200 and issue a fault alarm message. The conveying component 200 is configured to convey the material 2 in the vertical direction, the first detection component 300 is configured to collect first position data of the material 2, and the second detection component 400 is configured to collect second position data of the material 2.

[0037] The material 2 in this embodiment may be a wafer, a silicon wafer, etc.

[0038] The first detection component 300 can actively collect the output parameters of the conveying component 200 to obtain the first position data of the material 2 moving in the vertical direction. When the material 2 moves in the vertical direction, the second detection component 400 can record the real-time position of the material 2 moving in the vertical direction, which is the second position data of the material 2. Based on these two position data in this embodiment, it can be determined whether the material 2 moves accurately in the vertical direction.

[0039] The monitoring method for the up-and-down conveying device includes the following steps.

[0040] Step 201: Obtain the first position data and the second position data.

[0041] Exemplarily, the execution subject of the monitoring method for the up-and-down conveying device can be a server, a processor, a computer, a tablet, a PLC controller, etc.

[0042] Step 202: Calculate the difference between the first position data and the second position data.

[0043] Step 203: Compare the difference with a first preset value, and determine whether the difference is greater than or equal to the first preset value.

[0044] The first preset value can be determined according to actual needs.

[0045] Step 204: If the difference is greater than or equal to the first preset value, send an alarm signal and instruct the driver 100 to drive the conveying component 200 to stop operating.

[0046] If the difference is less than the first preset value, continue to execute steps 201 to 203.

[0047] The above alarm signal generally indicates that the position of the material 2 is abnormal and relatively serious when moving in the vertical direction. At this time, the alarm prompts the operator to check and maintain the conveying component 200.

[0048] The monitoring method of the up-and-down conveying device uses the first detection component 300 and the second detection component 400 of the up-and-down conveying device 10 to obtain the first position data and the second position data respectively during the operation of the conveying component 200 of the up-and-down conveying device 10. By calculating the difference between the first position data and the second position data, and based on the result of comparing the difference with the first preset value, the next operation instruction for the conveying component 200 of the up-and-down conveying device 10 is given, which can avoid the inaccurate movement of the up-and-down conveying device after long-term operation, and thus can realize the accurate control of the up-and-down movement process of the up-and-down conveying device 10.

[0049] In some embodiments, as Figures 3 to 5 shown, the conveying component 200 includes a driving source component 210 and a transmission component 220. The driving source component 210 is located above the transmission component 220 and is connected to the transmission component 220, and is configured to drive the transmission component 220 to move in the vertical direction. The transmission component 220 is configured to drive the material 2 to move in the vertical direction. The driving source component 210 is provided with an output shaft 2110 and an encoder 2120 connected to the output shaft 2110, and the encoder 2120 forms the first detection component 300. The second detection component 400 is connected to the transmission component 220, and the second detection component 400 includes a grating ruler 410.

[0050] Exemplarily, the grating ruler 410 includes a reference grating ruler 4110 and a reading head 4120. The reference grating ruler 4110 is fixedly arranged relative to the transmission component 220, extends in the vertical direction, and has magnetism. The reading head 4120 is arranged on the reference grating ruler 4110 and moves in the vertical direction following the transmission component 220. The reading head 4120 cooperates with the reference grating ruler 4110 to collect the second position data.

[0051] Obtaining the first position data and the second position data includes the following steps.

[0052] Step 2011: Obtain the first position data sent by the encoder 2120 and the second position data sent by the grating ruler 410.

[0053] Step 2011 can be specifically executed as follows: The encoder 2120 collects the parameter information of the drive source assembly 210. The parameter information includes at least the rotation information of the output shaft 2110. The rotation information collected by the encoder 2120 can be converted into the first position data of the material 2. Since the encoder 2120 directly collects the parameter information of the drive source assembly 210, therefore, this first position data should theoretically be the actual position data of the material 2 moving in the vertical direction. The grating ruler 410 collects and sends the second position data to obtain the second position data. Since the reading head 4120 on the grating ruler 410 moves along with the material 2 when the material 2 moves in the vertical direction, thereby reading the real moving position of the material 2 in the vertical direction, therefore, when the two position data are seriously different, there must be a fault in the conveying assembly 200, and this embodiment can make a judgment based on this.

[0054] If the difference is greater than or equal to the first preset value, an alarm signal is sent, and the driver 100 is instructed to drive the conveying assembly 200 to stop operating, including the following steps.

[0055] Step 2041: If the difference is greater than or equal to the first preset value, an alarm signal indicating the abnormal position of the material 2 is sent, and the driver 100 is instructed to drive the drive source assembly 210 to stop operating.

[0056] Exemplarily, the alarm signal can be a sound alarm signal or a light alarm signal, etc.

[0057] When the difference is greater than or equal to the first preset value, an alarm signal indicating the abnormal position of the material 2 is sent, and the driver 100 is instructed to drive the drive source assembly 210 to stop operating. Subsequently, the operator checks and maintains the hardware structure of the up and down conveying device 10, which can prevent the material 2 from being conveyed inaccurately.

[0058] In some embodiments, as Figure 3 and Figure 6 shown, the conveying assembly 200 further includes a coupling 230, and the coupling 230 is configured to connect the drive source assembly 210 and the transmission assembly 220.

[0059] Exemplarily, the coupling 230 connects the output shaft 2110 of the drive source assembly 210 and the transmission assembly 220.

[0060] After an alarm signal indicating the abnormal position of the material 2 is sent and the driver 100 is instructed to drive the drive source assembly 210 to stop operating when the difference is greater than or equal to the first preset value, the monitoring method of the up and down conveying device further includes the following steps.

[0061] Step 222: The operator detects whether the coupling 230 is abnormal.

[0062] Step 223: If the coupling 230 is abnormal, the operator performs maintenance on the coupling 230.

[0063] Step 224: If the coupling 230 is normal, the operator checks whether the transmission component 220 is abnormal.

[0064] Step 225: If the transmission component 220 is abnormal, the operator performs maintenance on the transmission component 220.

[0065] If the transmission component 220 is normal, continue to restart and execute Step 2011.

[0066] Through the above steps, it is possible to issue an alarm signal indicating that the position of the material 2 is abnormal when the difference is greater than or equal to the first preset value, and after instructing the driver 100 to drive the driving source component 210 to stop running, the operator checks and maintains the coupling 230 or the transmission component 220, which can prevent the upper and lower conveying device 10 from being unable to accurately convey the material 2 due to abnormalities in the hardware structures such as the coupling 230 or the transmission component 220.

[0067] In some embodiments, as Figure 7 shown, after comparing the difference with the first preset value to determine whether the difference is greater than or equal to the first preset value, the monitoring method of the upper and lower conveying device further includes the following steps.

[0068] Step 205: If the difference is less than the first preset value, compare the difference with the second preset value to determine whether the difference is greater than or equal to the second preset value.

[0069] Specifically, the second preset value is less than the first preset value. The second preset value can be determined according to actual needs.

[0070] Step 206: If the difference is greater than or equal to the second preset value, it is determined that the transmission component 220 is worn, and a count is performed once.

[0071] If the difference is less than the second preset value, continue to restart and execute Step 2011.

[0072] Step 207: Count the number of times the difference is greater than or equal to the second preset value and less than the first preset value within the preset time period.

[0073] The preset time period can be determined according to actual needs.

[0074] Step 208: Compare the number of times the difference is greater than or equal to the second preset value and less than the first preset value with the first preset number of times to determine whether the number of times the difference is greater than or equal to the second preset value and less than the first preset value is greater than or equal to the first preset number of times.

[0075] The first preset number can be determined according to actual needs.

[0076] Step 209: If the number of times the difference is greater than or equal to the second preset value and less than the first preset value is greater than or equal to the first preset number, send a life warning signal, and instruct the driver 100 to drive the drive source assembly 210 to stop running.

[0077] If the number of times the difference is greater than or equal to the second preset value and less than the first preset value is less than the first preset number, continue to restart and execute step 2011.

[0078] When the difference is greater than or equal to the second preset value and less than the first preset value, the conveying assembly 200 may or may not have a fault. However, if this situation occurs frequently, frequent shutdowns for maintenance will reduce the working efficiency of the upper and lower conveying devices 10. Therefore, a certain tolerance rate is required. In this embodiment, relevant settings are made for the number of tolerated faults, so that the upper and lower conveying devices 10 can reduce unnecessary shutdowns to improve the working efficiency of the upper and lower conveying devices 10.

[0079] The setting of the tolerance rate is also the basis for judging the life of relevant hardware. It can be understood that when the number of faults is more frequent within a certain period of time, it means that the possibility of shutdown for maintenance caused by the occurrence of faults is higher. On the contrary, when the number of faults is less within a certain period of time, it means that the possibility of shutdown for maintenance caused by the occurrence of faults is lower. Based on this, the life of relevant hardware can be judged.

[0080] The monitoring method of the upper and lower conveying devices can detect the wear condition of the transmission assembly 220 through the above steps, and can determine whether the life of the transmission assembly 220 has expired based on the comparison result between the number of times the difference is greater than or equal to the second preset value and less than the first preset value and the first preset number within the preset time period. Within the preset time period, when the number of times the difference is greater than or equal to the second preset value and less than the first preset value is greater than or equal to the first preset number, send a life warning signal, determine that the life of the transmission assembly 220 has expired, and instruct the driver 100 to drive the drive source assembly 210 to stop running. Subsequently, the operator checks and maintains the hardware structure of the transmission assembly 220, which can prevent the upper and lower conveying devices 10 from being unable to accurately convey the material 2 due to severe wear of the transmission assembly 220.

[0081] In some embodiments, within the preset time period, if the number of times the difference is greater than or equal to the second preset value and less than the first preset value is M n-1 , then determine that the life percentage of the transmission assembly 220 is N n-1 . In some embodiments, within the preset time period, if the number of times the difference is greater than or equal to the second preset value and less than the first preset value is M n , then determine that the life percentage of the transmission assembly 220 is Nn 。M n Greater than M n-1 ,N n Less than N n-1 ,where n is an integer greater than or equal to 1. Within a preset time duration, if the number of times M that the difference is greater than or equal to a second preset value and less than a first preset value n is greater than or equal to a first preset number of times, a life warning signal is issued to determine that the life of the transmission component 220 has expired.

[0082] In some embodiments, as Figure 8 shown, after a warning signal is issued if the difference is greater than or equal to a first preset value, and before instructing the driver 100 to drive the conveying component 200 to stop running, the monitoring method of the up-and-down conveying device further includes the following steps.

[0083] Step 211: Determine whether motion compensation for the material 2 is required.

[0084] Step 212: If motion compensation for the material 2 is required, an instruction for motion compensation for the material 2 is issued.

[0085] Step 213: The driver 100 executes the instruction until the material 2 completes the corresponding critical processing node.

[0086] The critical processing node can be determined according to actual needs.

[0087] Through the above steps, the monitoring method of the up-and-down conveying device can achieve that when motion compensation for the material 2 is required, the driver 100 is instructed to execute the motion compensation instruction until the material 2 completes the corresponding critical processing node, avoiding directly instructing the driver 100 to drive the conveying component 200 to stop running after a warning signal is issued when the difference is greater than or equal to a first preset value, which may affect the critical processing of the material 2 at the critical processing node and cause damage to the material 2.

[0088] In some embodiments, as Figure 9 shown, determining whether motion compensation for the material 2 is required includes the following steps.

[0089] Step 2111: Determine whether the material 2 has moved to a critical position.

[0090] Or,

[0091] Step 2112: Determine whether stopping the conveying component 200 at the current position will cause damage to the material 2.

[0092] Or,

[0093] Step 2113: Determine whether the components in the upper and lower conveying device 10 will be damaged if the conveying assembly 200 stops running at the current position.

[0094] In some embodiments, as Figure 10 shown, issuing an instruction for motion compensation for the material 2 includes the following steps.

[0095] Step 2121: Determine the motion parameters for which the material 2 needs to be motion-compensated based on the difference.

[0096] Step 2122: Generate a compensation instruction for motion compensation for the material 2 based on the motion parameters.

[0097] If the upper and lower conveying device 10 stops directly, it will definitely cause the material 2 to stop moving. However, in the semiconductor field, if it enters a critical process stage, if the upper and lower conveying device 10 stops directly, it will cause serious consequences, including damage or even destruction of the wafer. At this time, it should be avoided that the upper and lower conveying device 10 stops directly. Therefore, a certain compensation for the motion of the material 2 can be performed so that the upper and lower conveying device 10 stops after the relevant motion of the material 2 is completed. The timing of motion compensation for the material 2 is not limited to the several cases listed above and can be adjusted according to the actual situation.

[0098] In some embodiments, as Figure 11 shown, compare the difference with a first preset value to determine whether the difference is greater than or equal to the first preset value, including the following steps.

[0099] Step 2031: Establish a mathematical model.

[0100] Step 2032: Input the difference and the first preset value into the mathematical model.

[0101] Step 2033: Compare the difference with the first preset value through the mathematical model to determine whether the difference is greater than or equal to the first preset value.

[0102] In some embodiments, as Figure 12 shown, compare the difference with a second preset value to determine whether the difference is greater than or equal to the second preset value, including the following steps.

[0103] Step 2051: Input the difference and the second preset value into the mathematical model.

[0104] Step 2052: Compare the difference with the second preset value through the mathematical model to determine whether the difference is greater than or equal to the second preset value.

[0105] In some embodiments, as Figure 13 shown, establishing a mathematical model includes the following steps.

[0106] Step 2131: Determine whether the conveying component 200 is in the initial operation stage.

[0107] Specifically, the initial operation is used to represent that the conveying component 200 is in the starting use stage. At the starting use stage, the hardware structure of the upper and lower conveying devices 10 has no wear or damage.

[0108] Step 2231: If the conveying component 200 is in the initial operation stage, obtain a plurality of first position data and a plurality of second position data.

[0109] Step 2331: Based on the plurality of first position data and the plurality of second position data obtained when the conveying component 200 is in the initial operation stage, calculate and record a plurality of differences.

[0110] Step 2431: Determine whether the plurality of differences are discretely distributed.

[0111] Step 2531: If the plurality of differences are discretely distributed, calculate a first preset value based on the discretely distributed plurality of differences.

[0112] Step 2731: If the plurality of differences are not discretely distributed, select one of the differences as the first preset value.

[0113] One of the differences can be selected as the first preset value according to actual needs.

[0114] Step 2631: Use the fitting method to establish the mathematical model based on the plurality of differences between the maximum value and the minimum value among the plurality of differences.

[0115] In some embodiments, as Figure 14 shown, the monitoring method of the upper and lower conveying devices further includes the following steps.

[0116] Step 214: Determine whether a fault alarm message sent by the driver 100 is received.

[0117] Exemplarily, the fault alarm message can be a sound alarm message or a light alarm message, etc.

[0118] Step 215: If a fault alarm message sent by the driver 100 is received, instruct the driver 100 to drive the conveying component 200 to stop running.

[0119] If a fault alarm message sent by the driver 100 is not received, continue to execute step 2011 in sequence.

[0120] Step 216: Obtain the first position data and the second position data.

[0121] Step 217: Calculate the difference between the first position data and the second position data.

[0122] Step 218: Compare the difference with a first preset value to determine whether the difference is greater than or equal to the first preset value.

[0123] Step 219: If the difference is greater than or equal to the first preset value, prompt that the transmission component 220 has a fault.

[0124] Step 221: If the difference is less than the first preset value, prompt that the drive source component 210 has a fault.

[0125] The monitoring method of the up and down conveying device can, through the above steps, when a fault alarm message is sent by the driver 100, instruct the driver 100 to drive the conveying component 200 to stop running, and based on the result of comparing the difference with the first preset value, determine the position where the conveying component 200 has a fault. When the difference is greater than or equal to the first preset value, prompt that the transmission component 220 has a fault, and the operator can directly check and maintain the hardware structure of the transmission component 220. When the difference is less than the first preset value, prompt that the drive source component 210 has a fault, and the operator can directly check and maintain the hardware structure of the drive source component 210.

[0126] In some embodiments, the range of the first preset value is 0.1 mm - 1 mm.

[0127] Preferably, the range of the first preset value is 0.4 mm - 0.8 mm.

[0128] In some embodiments, the range of the percentage of the second preset value to the first preset value is 70% - 85%.

[0129] Preferably, the range of the percentage of the second preset value to the first preset value is 70% - 80%.

[0130] In some embodiments, when the range of the life percentage of the transmission component 220 is 60% - 85%, a life warning signal is sent to determine that the life of the transmission component 220 has expired.

[0131] Preferably, when the range of the life percentage of the transmission component 220 is 80% - 85%, a life warning signal is sent to determine that the life of the transmission component 220 has expired.

[0132] In some embodiments, the first preset value includes: 0.2 mm, 0.5 mm, 0.8 mm or 0.9 mm.

[0133] Preferably, the first preset value is 0.5 mm.

[0134] In some embodiments, the percentage of the second preset value to the first preset value includes: 70%, 75% or 80%.

[0135] Preferably, the percentage of the second preset value to the first preset value is 80%.

[0136] In some embodiments, the lifespan percentage includes: 60%, 65%, 70%, 75%, 80% or 85%.

[0137] Preferably, when the lifespan percentage of the transmission component 220 is 80%, a lifespan warning signal is issued to determine that the lifespan of the transmission component 220 has expired.

[0138] Figure 15 The figure shows a schematic structural diagram of a device including an up-down conveying device provided by an embodiment of the present disclosure. The device 1 including the up-down conveying device can monitor the up-down conveying device 10 based on the monitoring method of the up-down conveying device mentioned in the above embodiments.

[0139] Since the device 1 including the up-down conveying device 10 includes the up-down conveying device 10, the device 1 including the up-down conveying device 10 includes all the technical features and technical effects of the up-down conveying device 10, which will not be elaborated here.

[0140] It should be noted that the up-down conveying device 10 of this embodiment can be applied to different fields, such as electroplating equipment in the semiconductor field, etc. Of course, it can also be applied to other different hardware devices, which will not be listed one by one in this embodiment.

[0141] In each embodiment of the present disclosure, if not clearly defined, the connection form can be detachably connected by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, non-detachable connection can be achieved by means of welding, bonding, etc.

[0142] The phrases "an embodiment" and "embodiment" mentioned in the specification indicate that the described embodiment may include specific features, structures or characteristics, but not necessarily every embodiment includes such specific features, structures or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. Moreover, when combining specific features, structures or characteristics with an embodiment, it is within the knowledge scope of those skilled in the art to implement such features, structures or characteristics in combination with other embodiments, whether explicitly or implicitly described.

[0143] It should be understood that the terms "on...", "above...", and "over..." in the present disclosure should be interpreted in the broadest manner, so that "on..." not only means "directly on something", but also includes the meaning of "on something" with intermediate features or layers therebetween, and "above..." or "over..." not only includes the meaning of "above something" or "over something", but also can include the meaning of "above something" or "over something" without intermediate features or layers therebetween (i.e., directly on something).

[0144] In addition, for ease of description, spatial relative terms may be used in this document, such as "below", "beneath", "under", "above", "over", etc., to describe the relationship of one component or feature to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of a component in use or operation in addition to the orientation shown in the drawings. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatial relative descriptors used in this document may be interpreted accordingly.

[0145] It should be noted that in this document, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising a..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0146] The above are only the preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent replacements, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.

Claims

1. A monitoring method for an up and down conveying device, characterized in that: Applied to an up-and-down conveying device, the up-and-down conveying device comprises a driver, a conveying component, a first detection component and a second detection component, the driver is in communication connection with the conveying component, and is configured to drive the conveying component to run or stop running in a vertical direction, and is capable of monitoring the running state of the conveying component, and issuing fault alarm information, the conveying component is configured to convey materials in a vertical direction, the first detection component is configured to collect first position data of the materials, and the second detection component is configured to collect second position data of the materials; Wherein, the monitoring method of the upper and lower conveying device includes: Acquire the first position data and the second position data; Calculating a difference between the first position data and the second position data; Compare the difference with a first preset value to determine whether the difference is greater than or equal to the first preset value; If the difference is greater than or equal to the first preset value, an alarm signal is issued and the driver is instructed to drive the conveying component to stop running.

2. The monitoring method of the upper and lower conveying device according to claim 1, characterized in that: The conveying assembly includes a driving source assembly and a transmission assembly, wherein the driving source assembly is connected to the transmission assembly and is configured to drive the transmission assembly to move in a vertical direction, and the transmission assembly is configured to drive the material to move in a vertical direction, wherein the driving source assembly is provided with an output shaft and an encoder connected to the output shaft, and the encoder forms the first detection assembly; the second detection assembly is connected to the transmission assembly, wherein the second detection assembly includes a scale; Wherein, the acquiring the first position data and the second position data includes: Acquire the first position data sent by the encoder and the second position data sent by the scale; If the difference is greater than or equal to the first preset value, an alarm signal is issued, and the driver is instructed to drive the conveying component to stop running, including: If the difference is greater than or equal to the first preset value, an alarm signal indicating that the position of the material is abnormal is issued, and the driver is instructed to drive the driving source component to stop running.

3. The monitoring method of the upper and lower conveying device according to claim 2, characterized in that: The conveying assembly further includes a coupling, wherein the coupling is configured to connect the driving source assembly with the transmission assembly; After the difference is greater than or equal to the first preset value, an alarm signal indicating that the position of the material is abnormal is issued, and the driver is instructed to drive the driving source component to stop running, the method further includes: An operator detects whether the coupling is abnormal; If the coupling is abnormal, the operator performs maintenance on the coupling; If the coupling is normal, the operator checks whether the transmission assembly is abnormal; If the transmission component is abnormal, the operator will perform maintenance on the transmission component.

4. The monitoring method of the upper and lower conveying device according to claim 2, characterized in that: After comparing the difference with the first preset value to determine whether the difference is greater than or equal to the first preset value, the method further includes: If the difference is less than the first preset value, compare the difference with a second preset value to determine whether the difference is greater than or equal to the second preset value, wherein the second preset value is less than the first preset value; If the difference is greater than or equal to the second preset value, it is determined that the transmission component is worn, and a count is performed; Counting the number of times that the difference is greater than or equal to the second preset value and less than the first preset value within a preset time length; Compare the number of times that the difference is greater than or equal to the second preset value and less than the first preset value with the first preset number of times, and determine whether the number of times that the difference is greater than or equal to the second preset value and less than the first preset value is greater than or equal to the first preset number of times; If the difference is greater than or equal to the second preset value and the number of times the difference is less than the first preset value is greater than or equal to the first preset number, a life warning signal is issued and the driver is instructed to drive the driving source component to stop running.

5. The monitoring method of the upper and lower conveying device according to claim 4, characterized in that: Within the preset time, if the difference is greater than or equal to the second preset value and less than the first preset value, the number of times is M n-1 , then determine the life percentage of the transmission component as N n-1 , within the preset time length, if the difference is greater than or equal to the second preset value and less than the first preset value, the number of times is M n , then determine the life percentage of the transmission component as N n ; Among them, M n Greater than M n-1 , N n Less than N n-1 , where n is an integer greater than or equal to 1; Wherein, within the preset time length, if the difference is greater than or equal to the second preset value and less than the first preset value, the number of times M n If the number of times is greater than or equal to the first preset number, the life warning signal is issued to determine that the life of the transmission component has expired.

6. The monitoring method of the upper and lower conveying device according to claim 1 or 2, characterized in that: After the alarm signal is issued if the difference is greater than or equal to the first preset value, and before the driver is instructed to drive the conveying component to stop running, the method further includes: Determining whether motion compensation is required for the material; If motion compensation is required for the material, an instruction to perform motion compensation for the material is issued; The driver executes the instruction until the material completes the corresponding critical processing node; Wherein, the determining whether it is necessary to perform motion compensation on the material includes: Determining whether the material has moved to a critical position; or, Determine whether stopping the conveying component at the current position will cause damage to the material; or, Determine whether stopping the operation of the conveying assembly at the current position will cause damage to components in the upper and lower conveying devices; Wherein, the issuing of the instruction to perform motion compensation on the material includes: Determining motion parameters required for motion compensation of the material based on the difference; A compensation instruction for performing motion compensation on the material is generated based on the motion parameters.

7. The monitoring method of the upper and lower conveying device according to claim 4, characterized in that: The comparing the difference with a first preset value to determine whether the difference is greater than or equal to the first preset value includes: Build mathematical models; Inputting the difference and the first preset value into the mathematical model; By using the mathematical model, the difference is compared with a first preset value to determine whether the difference is greater than or equal to the first preset value; The step of comparing the difference with a second preset value to determine whether the difference is greater than or equal to the second preset value includes: Inputting the difference and the second preset value into the mathematical model; The difference is compared with the second preset value through the mathematical model to determine whether the difference is greater than or equal to the second preset value.

8. The monitoring method of the upper and lower conveying device according to claim 7, characterized in that: The mathematical model establishment comprises: Determine whether the conveying component is in the early stage of operation, wherein the early stage of operation is used to indicate that the conveying component is in the initial use stage; If the conveying component is in the early stage of operation, a plurality of the first position data and a plurality of the second position data are acquired; Calculate and record a plurality of the difference values ​​based on a plurality of the first position data and a plurality of the second position data acquired during the previous operation of the conveying component; Determining whether the plurality of differences are discretely distributed; If the plurality of difference values ​​are discretely distributed, the first preset value is calculated based on the plurality of difference values ​​of the discrete distribution; The mathematical model is established based on a plurality of the difference values ​​between a maximum value and a minimum value among the plurality of the difference values ​​by using a fitting method.

9. The monitoring method of the upper and lower conveying device according to claim 2, characterized in that: Also includes; Determining whether a fault alarm message sent by the driver is received; If the fault alarm information sent by the driver is received, the driver is instructed to drive the conveying component to stop running; Acquire the first position data and the second position data; Calculating a difference between the first position data and the second position data; Compare the difference with the first preset value to determine whether the difference is greater than or equal to the first preset value; If the difference is greater than or equal to the first preset value, it is indicated that the transmission component fails; If the difference is smaller than the first preset value, it indicates that the driving source component fails.

10. The monitoring method of the upper and lower conveying device according to claim 5, characterized in that: The first preset value ranges from 0.1 mm to 1 mm; And / or, the percentage of the second preset value to the first preset value ranges from 70% to 85%; And / or, when the life percentage of the transmission component is in the range of 60%-85%, a life warning signal is issued to determine that the life of the transmission component has expired.

11. The method for monitoring the upper and lower conveying device according to claim 10, characterized in that: The first preset value includes: 0.2mm, 0.5mm, 0.8mm or 0.9mm; And / or, the percentage of the second preset value to the first preset value includes: 70%, 75% or 80%; And / or, the lifetime percentage includes: 60%, 65%, 70%, 75%, 80% or 85%.

12. An apparatus comprising an upper and lower conveying device, characterized in that: The equipment including the upper and lower conveying device can monitor the upper and lower conveying device based on the monitoring method of the upper and lower conveying device according to any one of claims 1 to 11.

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