Lens testing equipment
By adjusting the position of the mask plate and the camera on the optical test platform, the center point is consistent, and combining the sliding table and the driving module, the problems of low lens detection efficiency and high cost are solved, and fast and economical lens detection is achieved.
Patent Information
- Application Number
- CN202510621619.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-15
- Publication Date
- 2025-08-15
- Estimated Expiration
- 2045-05-15
AI Technical Summary
When the existing optical testing platform conducts the lens magnification and distortion test, the adjustment speed is slow, which affects the detection efficiency. Due to the precision and complexity of the image data, the analysis results require a lot of time and effort, which increases the cost of use.
By adjusting the displacement and angle of the mask plate, and keeping the center points of the lens to be detected, the mask plate and the camera in the same vertical line, combining the Z-axis manual sliding table, the XY-axis manual sliding table and the three-axis drive module, quickly align the optimal focal surface, improve detection efficiency, and reduce usage costs.
It realizes rapid detection of the magnification value and distortion value of the lens, saving time in lens analysis results and reducing the cost of the detection equipment.
Smart Images

Figure CN120121269B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of optical detection equipment, and in particular to a lens detection equipment. Background Art
[0002] Currently, optical test platforms, as essential measurement equipment for precision optical devices (such as lenses), must be designed with full consideration of stability, accuracy, vibration isolation, and ease of use to ensure they meet the measurement requirements of a wide range of precision optical devices. When performing full-frame magnification and distortion testing on optical test pieces, accuracy is a core requirement for existing optical test platforms.
[0003] To achieve high-precision optical measurements, existing optical testing platforms are typically equipped with precision adjustment mechanisms, such as X, Y, and Z axis fine-tuning knobs or motorized adjustment devices, to precisely adjust the displacement and angle of optical test pieces. However, the adjustment speed of optical test pieces, such as lenses, is relatively slow, affecting lens testing efficiency. Furthermore, due to the precision and complexity of image data and the diversity of technical indicators, analyzing lens results requires significant time and effort, increasing the cost of using optical testing platforms. Therefore, a lens testing device is urgently needed to address these issues. Summary of the Invention
[0004] In order to solve the technical problems that the adjustment speed of the lens is relatively slow when the existing optical testing platform is used to test the magnification and distortion of the lens, which affects the detection efficiency of the lens; and due to the precision and complexity of the image data and the diversity of technical indicators, the analysis results of the lens require a lot of time and effort, which increases the use cost of the optical testing platform, the present invention provides a lens detection device, which adjusts the displacement and angle of the mask plate and the displacement of the camera, and finally makes the center points of the lens to be tested, the mask plate and the camera on the same vertical line, thereby improving the detection efficiency of the lens, and then realizing the rapid detection of the magnification value and distortion value of the lens, saving the time of the lens analysis results and reducing the use cost of the detection equipment.
[0005] The present invention provides a lens inspection device, comprising a support platform, a fixing mechanism, and a detection mechanism, wherein the fixing mechanism comprises a support seat and a fixing tool, wherein the support seat is fixedly arranged on the support platform, the fixing tool is detachably arranged on the support seat, and the lens to be inspected is fixed on the fixing tool, and the detection mechanism comprises a mask plate and a camera, wherein the mask plate and the camera are movably arranged on the support platform, the mask plate and the camera are sequentially arranged and located below the lens to be inspected, and the center points of the lens to be inspected, the mask plate, and the camera are on the same vertical line. The lens to be inspected is fixed on the fixing tool, and the fixing tool is further fixed on the support seat, the mask plate is rapidly adjusted in displacement and angle according to the position of the lens to be inspected, the mask plate is aligned with the optimal focal plane of the lens to be inspected, the camera is rapidly adjusted in displacement according to the position of the lens to be inspected, and the camera is aligned with the mask plate, and finally the center points of the lens to be inspected, the mask plate, and the camera are on the same vertical line.
[0006] Furthermore, the detection mechanism also includes a Z-axis manual slide, an XY-axis manual slide, and a three-axis drive module. The Z-axis manual slide is adjustable and set on the support platform. The Z-axis movable plate of the Z-axis manual slide is fixedly provided with a bracket. The XY-axis manual slide is fixedly provided on the bracket. The Y-axis movable plate of the XY-axis manual slide is fixedly provided with a lens plate. The mask plate is adjustably provided on the lens plate. The three-axis drive module is fixedly provided on the support platform. The Z-axis slider of the three-axis drive module is fixedly provided with a mounting plate. The camera is fixedly provided on the mounting plate. The Z-axis manual slide and the XY-axis manual slide are manually adjusted, and the mask plate is finally displaced and adjusted in the three directions of the XYZ axis, and finally the mask plate is aligned with the optimal focal plane of the lens to be detected. The three-axis drive module is started, driving the mounting plate and the camera to displace and adjust in the three directions of the XYZ axis, and finally the camera is aligned with the mask plate.
[0007] Furthermore, the detection mechanism also includes a fixed plate, a first adjustment plate, and a second adjustment plate. The fixed plate is fixedly mounted on the support platform, the first adjustment plate is adjustably mounted on the fixed plate, the second adjustment plate is adjustably mounted on the first adjustment plate, and the Z-axis manual slide is fixedly mounted on the second adjustment plate. The first and second adjustment plates enable the mask plate to be adjusted in both the X and Y axes.
[0008] Further, a first through hole is provided on the first adjusting plate, the first bolt passes through the first through hole and is screwed on the fixing plate, a first top screw is threadedly provided on the first adjusting plate, the first top screw passes through the first adjusting plate and the bottom of the first top screw abuts on the fixing plate, and there are two first bolts and first top screws; a second through hole is provided on the second adjusting plate, the second bolt passes through the second through hole and is screwed on the first adjusting plate, a second top screw is threadedly provided on the second adjusting plate, the second top screw passes through the second adjusting plate and the bottom of the second top screw abuts on the first adjusting plate, and there are two second bolts and second top screws.
[0009] Furthermore, the lens plate is provided with a first groove and a first opening that communicate with each other, with the first opening being located below the first groove. A lens holder is adjustably provided in the first groove. The lens holder is provided with a second groove and a second opening that communicate with each other, with the second opening being located below the second groove. The mask is placed in the second groove, with the mask corresponding to the first opening and the second opening. A pressure plate is screwed onto the lens holder, positioned above the mask and pressing it into the second groove. The mask is manually placed in the second groove of the lens holder, and the pressure plate is then fixed to the lens holder, positioned above the mask and pressing it into the second groove. The pressure plate ensures that the mask remains stationary during the inspection process.
[0010] Furthermore, a strip hole is provided on the lens frame and the strip hole has an arc, a third bolt is threaded through the strip hole and is screwed on the first groove, two third top screws are threaded on the lens plate and the two third top screws are arranged opposite to each other, both of the third top screws pass through the lens plate and the bottoms of the two third top screws are against the lens frame.
[0011] Furthermore, the support seat includes a side plate, a first support plate, a second support plate and a top plate, the side plates are fixedly set on the support platform, the first support plate and the second support plate are fixedly set on the side plates, the top plate is adjustably set on the first support plate and the second support plate, an arc-shaped notch is set on the top plate, the fixing tool is screwed on the top plate and is located above the arc-shaped notch, and the lens to be tested passes through the arc-shaped notch.
[0012] Furthermore, the top plate is screwed onto the first support plate and the second support plate, and the top plate is provided with a slot and a plurality of micrometer heads located on the side of the slot, and there is a gap between the slot and the upper surface of the first support plate and the second support plate, and the plurality of micrometer heads are located on both sides of the arc-shaped notch, and the tops of the plurality of micrometer heads are located above the top plate, and the bottoms of the plurality of micrometer heads are respectively abutted against the first support plate and the second support plate.
[0013] Furthermore, the fixed tooling includes a tooling tube and a side plate fixedly arranged on the tooling tube, the side plate is screwed onto the top plate, and the lens to be inspected is fixedly arranged on the tooling tube and the side plate.
[0014] Furthermore, the detection equipment also includes a standing frame and multiple shock-absorbing air cushions. The top of the standing frame is screwed with multiple first adjustment bolts, and the multiple first adjustment bolts are in contact with the support platform; the bottom side of the standing frame is screwed with multiple second adjustment bolts, and the multiple second adjustment bolts are fixed with support feet. The multiple support feet are in contact with a portion of the shock-absorbing air cushions respectively, and the other side of the bottom of the standing frame is in contact with the remaining shock-absorbing air cushions. The height of the first adjustment bolt is adjustable, and the height of the second adjustment bolt is adjustable. When the working surface is uneven, the support platform, that is, the detection equipment as a whole, can be kept level by adjusting the positions of the first adjustment bolts and the second adjustment bolts.
[0015] Compared with the prior art, the present invention has the following beneficial effects:
[0016] In the inspection process of the inspection equipment of this embodiment, the lens to be inspected is fixed on a fixed tooling, which is then fixed on a support base. The mask plate is quickly adjusted in displacement and angle according to the position of the lens to be inspected, and the mask plate is aligned with the optimal focal plane of the lens to be inspected. The camera is quickly adjusted in displacement according to the position of the lens to be inspected, and the camera is aligned with the mask plate. Finally, the center points of the lens to be inspected, the mask plate, and the camera are on the same vertical line. The camera quickly captures the fitted image on the mask plate, and then the magnification value and distortion value of the lens to be inspected can be quickly detected by calculating the information of the fitted image, thereby saving the time of lens analysis results and reducing the use cost of the inspection equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is a structural schematic diagram of a lens detection device of the present invention;
[0018] Figure 2 This invention Figure 1 A schematic diagram of the structure of the middle part;
[0019] Figure 3 It is a structural schematic diagram of the support base of the present invention;
[0020] Figure 4 It is a structural schematic diagram of the tooling barrel of the present invention;
[0021] Figure 5 It is a structural schematic diagram of the Z-axis manual slide of the present invention;
[0022] Figure 6 It is a structural schematic diagram of the fixing plate of the present invention;
[0023] Figure 7 is a schematic structural diagram of the first adjustment plate of the present invention;
[0024] Figure 8 A schematic structural diagram of the second adjustment plate of the present invention;
[0025] Figure 9 A schematic diagram of the exploded structure of the lens plate and lens frame of the present invention;
[0026] Figure 10 It is a schematic structural diagram of the shockproof air cushion of the present invention;
[0027] The reference numerals in the accompanying drawings are:
[0028] 1. Support platform; 2. Support seat; 21. Side plate; 22. First support plate; 23. Second support plate; 24. Top plate; 25. Slot; 26. Micrometer head; 27. Positioning block; 3. Fixing tool; 31. Tool cylinder; 32. Side plate; 4. Mask plate; 5. Camera; 6. Z-axis manual slide; 61. Bracket; 62. Fixing plate; 621. First slot; 63. First adjustment plate; 631. First bolt; 632. First jackscrew; 633. First block; 634. Second slot; 64. Second adjustment plate; 641. Second bolt; 642. Second jackscrew; 643. Second block; 7. XY-axis manual slide; 71. Lens plate; 711. Third bolt; 712. Third jackscrew; 713. Limit block; 72. Lens holder; 73. Press plate; 8. Three-axis drive module; 81. Mounting plate; 9. Stand; 91. Shockproof air cushion; 92. First adjustment bolt; 93. Second adjustment bolt; 94. Support foot. DETAILED DESCRIPTION
[0029] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.
[0030] like Figures 1 to 10 As shown, a lens inspection device includes a supporting platform 1, a fixing mechanism and a detection mechanism. The supporting platform 1 can be made of high-strength, low-deformation materials, such as high-quality marble, to ensure the overall rigidity of the supporting platform 1 and the stability of long-term use. The fixing mechanism includes a supporting seat 2 and a fixing tool 3. The supporting seat 2 is fixedly set on the supporting platform 1. The fixing tool 3 is detachably set on the supporting seat 2 and the lens to be inspected is fixed on the fixing tool 3. The detection mechanism includes a mask plate 4 and a camera 5. The camera 5 is a CCD camera. The mask plate 4 and the camera 5 are movably set on the supporting platform 1. The mask plate 4 and the camera 5 are arranged in sequence and are located below the lens to be inspected. The center points of the lens to be inspected, the mask plate 4 and the camera 5 are on the same vertical line.
[0031] During the inspection process of the inspection device of this embodiment, the lens to be inspected is fixed on the fixed fixture 3, which is then fixed on the support base 2. The mask plate 4 is rapidly adjusted in displacement and angle according to the position of the lens to be inspected. The mask plate 4 is aligned with the optimal focal plane of the lens to be inspected. The camera 5 is rapidly adjusted in displacement according to the position of the lens to be inspected. The camera 5 is aligned with the mask plate 4. Finally, the center points of the lens to be inspected, the mask plate 4, and the camera 5 are on the same vertical line. The camera 5 quickly captures the image fitted on the mask plate 4. The camera 5 has a fast shooting speed and high shooting efficiency. Afterwards, the magnification value and distortion value of the lens to be inspected can be quickly detected by calculating the fitted image information, thereby saving time in lens analysis results and reducing the cost of the inspection device. The inspection device of this embodiment is also suitable for inspecting lenses of various sizes and models.
[0032] Compared with the existing optical testing platform, the detection equipment of this embodiment adjusts the displacement and angle of the mask plate 4 and the displacement of the camera 5, so that the center points of the lens to be tested, the mask plate 4 and the camera 5 are ultimately on the same vertical line, thereby improving the detection efficiency of the lens, and then realizing the rapid detection of the magnification value and distortion value of the lens, saving the time of lens analysis results and reducing the cost of using the detection equipment.
[0033] As an implementable embodiment, the detection mechanism also includes a Z-axis manual slide 6, an XY-axis manual slide 7, and a three-axis drive module 8. The Z-axis manual slide 6 is adjustably set on the support platform 1, and a bracket 61 is fixedly set on the Z-axis movable plate of the Z-axis manual slide 6. The XY-axis manual slide 7 is fixedly set on the bracket 61. A lens plate 71 is fixedly set on the Y-axis movable plate of the XY-axis manual slide 7. The mask plate 4 is adjustably set on the lens plate 71; the three-axis drive module 8 is fixedly set on the support platform 1, and a mounting plate 81 is fixedly set on the Z-axis slider of the three-axis drive module 8. The camera 5 is fixedly set on the mounting plate 81. The structures of the Z-axis manual slide 6, the XY-axis manual slide 7, and the three-axis drive module 8 are prior art and will not be described in detail in this embodiment. In this embodiment, the Z-axis manual slide 6 may be of model LZ60, the XY-axis manual slide 7 may be of model LBY60, and the three-axis drive module 8 may be of model TPA-LMPS-1X1Y1Z-01-0052. The three-axis drive module 8 includes an X-axis servo module, a Y-axis servo module, and a Z-axis servo module. The X-axis servo module is fixedly mounted on the support platform 1, the Y-axis servo module is fixedly mounted on the X-axis slider of the X-axis servo module, and the Z-axis servo module is fixedly mounted on the Y-axis slider of the Y-axis servo module. A mounting plate 81 is fixedly mounted on the Z-axis slider of the Z-axis servo module.
[0034] The Z-axis manual slide 6 drives the XY-axis manual slide 7 and the mask 4 to adjust their displacement in the Z-axis direction, while the XY-axis manual slide 7 drives the mask 4 to adjust its displacement in both the X and Y axes. Manual adjustment of the Z-axis manual slide 6 and the XY-axis manual slide 7 ultimately achieves displacement adjustment of the mask 4 in all three directions, ultimately aligning the mask 4 with the optimal focal plane of the lens to be inspected.
[0035] The three-axis driving module 8 is started, driving the mounting plate 81 and the camera 5 to perform displacement adjustment in the three directions of the X, Y, and Z axes, and finally aligning the camera 5 with the mask plate 4 .
[0036] As an embodiment, the detection mechanism further includes a fixed plate 62, a first adjustment plate 63, and a second adjustment plate 64. The fixed plate 62 is fixedly mounted on the support platform 1, the first adjustment plate 63 is adjustably mounted on the fixed plate 62, the second adjustment plate 64 is adjustably mounted on the first adjustment plate 63, and the Z-axis manual slide 6 is fixedly mounted on the second adjustment plate 64. Through the first adjustment plate 63 and the second adjustment plate 64, the mask plate 4 of this embodiment can be adjusted in both the X and Y axis directions.
[0037] As an embodiment, a first through hole is provided on the first adjusting plate 63, and a first bolt 631 is threadedly provided on the fixing plate 62 through the first through hole, and a first top screw 632 is threadedly provided on the first adjusting plate 63, and the first top screw 632 passes through the first adjusting plate 63 and the bottom of the first top screw 632 abuts on the fixing plate 62, and there are two first bolts 631 and first top screws 632; a second through hole is provided on the second adjusting plate 64, and a second bolt 641 is threadedly provided on the first adjusting plate 63 through the second through hole, and a second top screw 642 is threadedly provided on the second adjusting plate 64, and the second top screw 642 passes through the second adjusting plate 64 and the bottom of the second top screw 642 abuts on the first adjusting plate 63, and there are two second bolts 641 and second top screws 642.
[0038] In this embodiment, the two first bolts 631 and the first push screw 632 work together to adjust the horizontality of the first adjustment plate 63. The horizontality of the first adjustment plate 63 is adjusted based on the extension length of the first push screw 632. Specifically, the first push screw 632 drives the first adjustment plate 63 to adjust its angle along the Y-axis. By rotating the first push screw 632, the first push screw 632 extends or retracts. The bottom of the first push screw 632 abuts against the fixed plate 62. The first bolt 631 then passes through the first through hole and is threaded onto the fixed plate 62 (the first adjustment plate 63 is fixed to the fixed plate 62). At this point, the horizontality of the first adjustment plate 63 is determined (shortening the first push screw 632 results in the first adjustment plate 63 being closer to horizontal; extending the first push screw 632 results in a greater inclination angle of the first adjustment plate 63).
[0039] In this embodiment, the two second bolts 641 and the second top screw 642 work together to adjust the horizontality of the second adjustment plate 64. The horizontality of the second adjustment plate 64 is adjusted based on the extended length of the second top screw 642, that is, the second top screw 642 drives the second adjustment plate 64 to adjust the angle in the X-axis direction. By rotating the second top screw 642, the second top screw 642 extends or retracts, and the bottom of the second top screw 642 abuts against the fixed plate 62. The second bolt 641 then passes through the second through hole and is threaded onto the first adjustment plate 63 (the second adjustment plate 64 is fixed to the first adjustment plate 63). At this point, the horizontality of the second adjustment plate 64 is determined (the second top screw 642 shortens, the second adjustment plate 64 is closer to horizontal; the second top screw 642 extends, the second adjustment plate 64 has a greater inclination angle).
[0040] Through the fixing plate 62 , the first adjustment plate 63 , the second adjustment plate 64 , and the first top screw 632 and the second top screw 642 , the mask plate 4 of this embodiment can be adjusted in angle in both the X and Y axis directions.
[0041] Preferably, a first card slot 621 and a first threaded hole communicating with the first card slot 621 are provided on the fixing plate 62, and a first block 633 is provided on the first adjusting plate 63, and the first block 633 is inserted into the first card slot 621; the first bolt 631 passes through the first through hole and is threadedly arranged on the first threaded hole of the fixing plate 62, and the first top screw 632 passes through the first adjusting plate 63 and the bottom of the first top screw 632 abuts against the first card slot 621 of the fixing plate 62.
[0042] Preferably, a second slot 634 and a second threaded hole communicating with the second slot 634 are provided on the first adjusting plate 63, and a second block 643 is provided on the second adjusting plate 64, and the second block 643 is snapped into the second slot 634; the second bolt 641 passes through the second through hole and is threadedly provided on the second threaded hole of the first adjusting plate 63, and the bottom of the second top screw 642 abuts against the second slot 634 of the first adjusting plate 63.
[0043] As an implementable embodiment, the lens plate 71 is provided with a first groove and a first opening that are in communication, and the first opening is located below the first groove; a lens frame 72 is adjustably provided in the first groove; a second groove and a second opening that are in communication are provided on the lens frame 72, and the second opening is located below the second groove; the mask plate 4 is placed in the second groove, and the mask plate 4 corresponds to the first opening and the second opening; a pressure plate 73 is screwed onto the lens frame 72, and the pressure plate 73 is located above the mask plate 4 and presses it into the second groove; in this embodiment, two pressure plates 73 are provided, and the two pressure plates 73 are pressed on both sides of the mask plate 4.
[0044] The mask 4 is manually placed in the second groove. The pressure plate 73 is then fixed to the lens holder 72. The pressure plate 73 is located above the mask and presses it into the second groove. The pressure plate 73 ensures that the mask 4 remains stationary during the inspection process. The first and second openings ensure that the camera 5 can quickly capture the image of the mask 4.
[0045] The position of the lens holder 72 on the lens plate 71 is manually adjusted, and finally the angle of the mask plate 4 is adjusted in the Z-axis direction.
[0046] Preferably, a plurality of limiting blocks 713 are evenly arranged in the second groove, and the plurality of limiting blocks 713 limit the position of the mask plate 4 in the second groove.
[0047] In one embodiment, the lens frame 72 is provided with a curved strip-shaped hole, and the third bolt 711 passes through the strip-shaped hole and is screwed into the first groove. Two third top screws 712 are threadedly provided on the lens plate 71, and the two third top screws 712 are arranged opposite each other. The two third top screws 712 both pass through the lens plate 71, and the bottoms of the two third top screws 712 abut against the lens frame 72. Specifically, the lens plate 71 is provided with a third threaded hole, and the third bolt 711 passes through the strip-shaped hole and is screwed into the third threaded hole of the lens plate 71. The lens frame 72 is also provided with a third through hole, and the third bolt 711 can also pass through the third through hole and be screwed into the first groove.
[0048] The parallelism of the lens frame 72 is adjusted based on the extended length of the two third push screws 712. Specifically, the two third push screws 712 drive the lens frame 72 to adjust its angle along the Z-axis. By rotating the two third push screws 712, one third push screw 712 extends or retracts, while the other third push screw 712 retracts or extends. The bottoms of the two third push screws 712 abut against the lens frame 72. The third bolt 711 then passes through the strip hole and is screwed onto the lens plate 71 (fixing the lens frame 72 to the lens plate 71). At this point, the parallelism of the lens frame 72 is determined (the lens frame 72 is closer to horizontal or the tilt angle of the lens frame 72 is greater). The strip hole ensures that the third bolt 711 can consistently secure the lens frame 72 to the lens plate 71 regardless of the tilt angle of the lens frame 72.
[0049] Through the lens plate 71 , the lens frame 72 and the two third top screws 712 , the mask plate 4 of this embodiment can achieve angle adjustment in the Z-axis direction.
[0050] The mask plate 4 of this embodiment ultimately achieves six-dimensional adjustment compensation, that is, people manually adjust the Z-axis manual slide 6 and the XY-axis manual slide 7, and the mask plate 4 achieves displacement adjustment in the three directions of the XYZ axis; through the fixed plate 62, the first adjustment plate 63 and the second adjustment plate 64 and the first top screw 632 and the second top screw 642, the mask plate 4 achieves angle adjustment in the two directions of the XY axis, and through the lens plate 71, the lens frame 72 and the two third top screws 712, the mask plate 4 achieves angle adjustment in the Z-axis direction. The mask plate 4 quickly adjusts the displacement and angle according to the position of the lens to be tested, and finally the mask plate 4 is aligned with the optimal focal plane of the lens to be tested. Among them, the Z-axis range of the mask plate 4 is ±6.5mm, and the XY-axis range of the mask plate 4 is ±6.5mm, which can meet the adjustment requirements of different lenses for the mask plate 4.
[0051] As an embodiment, the support seat 2 includes a side plate 21, a first support plate 22, a second support plate 23 and a top plate 24. The side plate 21 is fixedly set on the support platform 1, the first support plate 22 and the second support plate 23 are fixedly set on the side plate 21, and the top plate 24 is adjustably set on the first support plate 22 and the second support plate 23. The top plate 24 is provided with an arc-shaped notch, and the arc-shaped notch avoids the lens to be detected. The fixing fixture 3 is screwed on the top plate 24 and is located above the arc-shaped notch, and the lens to be detected passes through the arc-shaped notch. The lengths of the first support plate 22 and the second support plate 23 are different, ensuring that the fixing fixture 3 and the lens to be detected can be fixed between the first support plate 22 and the second support plate 23.
[0052] Preferably, a reinforcement plate is fixedly provided between the first support plate 22 and the second support plate 23 , and the reinforcement plate increases the overall strength of the support base 2 .
[0053] Preferably, a plurality of positioning blocks 27 are evenly fixed on the top plate 24, and the plurality of positioning blocks 27 are located around the arc-shaped notch. The plurality of positioning blocks 27 are in contact with the fixing tool 3. The setting of the positioning blocks 27 ensures that the position of the fixing tool 3 screwed on the top plate 24 does not change and is always aligned with the arc-shaped notch.
[0054] In one embodiment, the top plate 24 is screwed onto the first support plate 22 and the second support plate 23. The top plate 24 is provided with a slot 25 and a plurality of micrometer heads 26 located on either side of the slot 25. A gap exists between the slot 25 and the upper surfaces of the first support plate 22 and the second support plate 23. The plurality of micrometer heads 26 are located on either side of the arc-shaped gap. The tops of the plurality of micrometer heads 26 are all located above the top plate 24, and the bottoms of the plurality of micrometer heads 26 abut against the first support plate 22 and the second support plate 23, respectively. The structure of the micrometer heads 26 is conventional and will not be further described in this embodiment. The micrometer heads 26 of this embodiment may be of the model FAS106A. Three micrometer heads 26 are provided in this embodiment, with the bottom of one micrometer head 26 abutting against the first support plate 22, and the bottoms of two micrometer heads 26 abutting against the second support plate 23.
[0055] Typically, the micrometer head 26 includes a screw and a screw seat. The screw seat is fixedly mounted on the top plate 24, and the screw extends through the screw seat, with a nut mounted on top of the screw. The tops of the micrometer heads 26 are all located above the top plate 24, meaning the nuts are located above the top plate 24. The bottoms of the micrometer heads 26 abut against the first support plate 22 and the second support plate 23, respectively, meaning the bottoms of the screws abut against the first support plate 22 and the second support plate 23, respectively. When the nut is turned, the screw rotates relative to the screw seat, ultimately moving up and down relative to the screw seat, causing the screw to lengthen or shorten.
[0056] Adjust the level of the top plate 24 to adjust the level of the fixed tooling 3 and the lens to be tested. Specifically, the level of the top plate 24 is adjusted according to the length of the micrometer head 26. The screw is rotated according to the needs, and the screw is extended or shortened. Then the top plate 24 is screwed to the first support plate 22 and the second support plate 23. At this time, the level of the top plate 24 is determined (when the screw is shortened, the top plate 24 is closer to the horizontal; when the screw is extended, the inclination angle of the top plate 24 is larger). The purpose of the slot 25 is to avoid positional interference between the top plate 24 and the first support plate 22 and the second support plate 23 when adjusting the level of the top plate 24. The top plate 24 of this embodiment realizes the angle adjustment of the lens to be tested, and further facilitates the mask plate 4 to quickly align with the optimal focal plane of the lens to be tested.
[0057] In one embodiment, the fixture 3 includes a fixture barrel 31 and a side plate 32 fixed to the fixture barrel 31. The side plate 32 is screwed to the top plate 24. The lens to be inspected is fixedly mounted through the fixture barrel 31 and the side plate 32. Specifically, the lens to be inspected comprises an infinity lens and a lens tube, which is screwed to the top plate 24 via the lens tube. A flange is provided on the lens tube, and the flange is screwed to the top plate 24.
[0058] As an implementable embodiment, the detection equipment also includes a standing frame 9 and multiple shock-proof air cushions 91, the top of the standing frame 9 is screwed with multiple first adjustment bolts 92, the top of the standing frame 9 is provided with a first adjustment threaded hole, the first adjustment bolt 92 is screwed through the first adjustment threaded hole, the first adjustment bolt 92 is screwed with a first locking nut and the first locking nut is in contact with the standing frame 9, and multiple first adjustment bolts 92 are in contact with the support platform 1; the bottom side of the standing frame 9 is screwed with multiple second adjustment bolts 93, the bottom of the standing frame 9 is provided with a second adjustment threaded hole, the second adjustment bolt 93 is rotated through the second adjustment threaded hole, the second adjustment bolt 93 is screwed with a second locking nut and the second locking nut is in contact with the standing frame 9, and multiple second adjustment bolts 93 are fixed with support feet 94, and the multiple support feet 94 are respectively in contact with a part of the shock-proof air cushion 91, and the other side of the bottom of the standing frame 9 is in contact with the remaining part of the shock-proof air cushion 91. The first adjustment bolt 92 is adjustable in height and then tightened with the first locking nut. The second adjustment bolt 93 is adjustable in height and then tightened with the second locking nut. If the work surface is uneven, the positions of the first and second adjustment bolts 92, 93 can be adjusted to maintain the support platform 1, and thus the entire testing equipment, level. The support feet 94 contact the shock-absorbing air cushions 91, increasing the contact area and further ensuring that the support platform 1, and thus the entire testing equipment, remains level.
[0059] Vibration isolation is also crucial for testing equipment. To effectively isolate the impact of ground vibrations on testing, the testing equipment is equipped with multiple shock-absorbing air cushions 91. These cushions effectively absorb and disperse vibration energy, ensuring that the support platform 1, and therefore the entire testing equipment, remains stable when subjected to external vibrations.
[0060] The embodiments described above are only preferred embodiments of the present invention and are only used to explain the present invention, not to limit the scope of implementation of the present invention. For those skilled in the art, it is of course possible to easily make other implementation methods by replacing or changing the technical content disclosed in this specification. Therefore, all changes and improvements made to the principles and process conditions of the present invention should be included in the scope of the patent application of the present invention.
Claims
1. A lens detection device, comprising a support platform (1), a fixing mechanism and a detection mechanism, characterized in that: The fixing mechanism comprises a support seat (2) and a fixing tool (3), the support seat (2) is fixedly arranged on the support platform (1), the fixing tool (3) is detachably arranged on the support seat (2) and the lens to be detected is fixed on the fixing tool (3), the detection mechanism comprises a mask plate (4) and a camera (5), the mask plate (4) and the camera (5) are movably arranged on the support platform (1), the mask plate (4) and the camera (5) are arranged in sequence and located below the lens to be detected, and the center points of the lens to be detected, the mask plate (4) and the camera (5) are on the same vertical line; The detection mechanism further includes a fixed plate (62), a first adjustment plate (63) and a second adjustment plate (64), a Z-axis manual slide (6), an XY-axis manual slide (7) and a three-axis drive module (8), wherein the fixed plate (62) is fixedly arranged on the support platform (1), the first adjustment plate (63) is adjustably arranged on the fixed plate (62), the second adjustment plate (64) is adjustably arranged on the first adjustment plate (63), the Z-axis manual slide (6) is fixedly arranged on the second adjustment plate (64), and the Z-axis manual A bracket (61) is fixedly provided on the Z-axis movable plate of the slide (6), the XY-axis manual slide (7) is fixedly provided on the bracket (61), a lens plate (71) is fixedly provided on the Y-axis movable plate of the XY-axis manual slide (7), and the mask plate (4) is adjustably provided on the lens plate (71); the three-axis drive module (8) is fixedly provided on the support platform (1), a mounting plate (81) is fixedly provided on the Z-axis slider of the three-axis drive module (8), and the camera (5) is fixedly provided on the mounting plate (81).
2. The lens inspection device according to claim 1, wherein: The first adjusting plate (63) is provided with a first through hole, the first bolt (631) is threadedly provided on the fixing plate (62) through the first through hole, the first top screw (632) is threadedly provided on the first adjusting plate (63), the first top screw (632) passes through the first adjusting plate (63) and the bottom of the first top screw (632) abuts against the fixing plate (62), and there are two first bolts (631) and first top screws (632); the second adjusting plate (64) is provided with a second through hole, the second bolt (641) is threadedly provided on the first adjusting plate (63), the second top screw (642) passes through the second adjusting plate (64) and the bottom of the second top screw (642) abuts against the first adjusting plate (63), and there are two second bolts (641) and second top screws (642).
3. The lens inspection device according to claim 1, wherein: The lens plate (71) is provided with a first groove and a first opening that are in communication with each other, and the first opening is located below the first groove; a lens frame (72) is adjustably provided in the first groove; a second groove and a second opening that are in communication with each other are provided on the lens frame (72), and the second opening is located below the second groove; the mask plate (4) is placed in the second groove, and the mask plate (4) corresponds to the first opening and the second opening; a pressing plate (73) is screwed onto the lens frame (72); the pressing plate (73) is located above the mask plate (4) and presses it into the second groove.
4. The lens inspection device according to claim 3, wherein: The lens frame (72) is provided with a strip hole having an arc, the third bolt (711) passes through the strip hole and is screwed to the first groove, the lens plate (71) is threaded with two third top screws (712), and the two third top screws (712) are arranged opposite to each other, the two third top screws (712) both pass through the lens plate (71), and the bottoms of the two third top screws (712) abut against the lens frame (72).
5. The lens inspection device according to claim 1, wherein: The support base (2) comprises a side plate (21), a first support plate (22), a second support plate (23) and a top plate (24); the side plate (21) is fixedly arranged on the support platform (1); the first support plate (22) and the second support plate (23) are fixedly arranged on the side plate (21); the top plate (24) is adjustably arranged on the first support plate (22) and the second support plate (23); an arc-shaped notch is arranged on the top plate (24); the fixing fixture (3) is screwed on the top plate (24) and is located above the arc-shaped notch; the lens to be detected passes through the arc-shaped notch.
6. The lens inspection device according to claim 5, wherein: The top plate (24) is screwed onto the first support plate (22) and the second support plate (23); a slot (25) and a plurality of micrometer heads (26) located on the side of the slot (25) are provided on the top plate (24); a gap is provided between the slot (25) and the upper surfaces of the first support plate (22) and the second support plate (23); the plurality of micrometer heads (26) are located on both sides of the arc-shaped gap; the tops of the plurality of micrometer heads (26) are located above the top plate (24); and the bottoms of the plurality of micrometer heads (26) are respectively abutted against the first support plate (22) and the second support plate (23).
7. The lens inspection device according to claim 5, wherein: The fixed tool (3) comprises a tool barrel (31) and a side plate (32) fixedly arranged on the tool barrel (31); the side plate (32) is screwed onto the top plate (24); and the lens to be inspected is fixedly arranged on the tool barrel (31) and the side plate (32).
8. The lens inspection device according to claim 1, wherein: The detection equipment also includes a standing frame (9) and a plurality of shockproof air cushions (91), wherein a plurality of first adjustment bolts (92) are screwed on the top of the standing frame (9), and the plurality of first adjustment bolts (92) are all in contact with the support platform (1); a plurality of second adjustment bolts (93) are screwed on one side of the bottom of the standing frame (9), and a support foot (94) is fixed on each of the plurality of second adjustment bolts (93), and the plurality of support feet (94) are respectively in contact with a portion of the shockproof air cushions (91), and the other side of the bottom of the standing frame (9) is in contact with the remaining portion of the shockproof air cushions (91).
Citation Information
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Method for measuring line width in photomask pattern
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