Microminiature robot and driving method thereof

Abstract

The invention provides a micro robot and a driving method thereof, and relates to the technical field of precision machinery. The microrobot includes a robot body, and a first driving mechanism and a second driving mechanism respectively coupled to opposite sides of the robot body. Based on the microminiature robot provided by the invention, the asynchronous advancing state and asynchronous advancing motion of the microminiature robot can be realized by applying zigzag driving voltages with different duty ratios to the first driving mechanism or the second driving mechanism. Moreover, the micro robot is simple in structure, easy to machine and convenient to control, and the driving method of the micro robot is easy to operate, can be suitable for different environments and is wide in application prospect.

Description

Technical Field

[0001] The present invention relates to the field of precision machinery technology, and particularly to a micro-robot and a driving method thereof. Background Art

[0002] Piezoelectric drive technology realizes mechanical deformation and energy conversion through the inverse piezoelectric effect. Its advantages such as high resolution, millisecond-level dynamic response characteristics, and compact structure make it irreplaceable in cutting-edge fields such as precision optical adjustment, nano-positioning, and micro-electromechanical systems.

[0003] In the field of micro-robots, the complexity of existing piezoelectric drive methods and motion range regulation makes it difficult to simultaneously achieve millimeter-level stroke, nanometer-level positioning accuracy, and millinewton-level load output, resulting in significant defects in aspects such as anti-cable disturbance and multi-degree-of-freedom integration of the system.

[0004] Therefore, there is an urgent need to develop a piezoelectric drive robot with a composite drive mode and an adaptive friction regulation mechanism to break through the bottleneck of the mutual restriction of multiple parameters such as accuracy - speed - load in the prior art and meet the stringent requirements of high-end equipment such as minimally invasive medical robots and semiconductor packaging equipment for precision actuators. Summary of the Invention

[0005] To solve the above existing problems, the present invention proposes a micro-robot and a driving method thereof. By applying sawtooth driving voltages with different duty cycles and different voltage amplitudes to the first driving mechanism or the second driving mechanism of the micro-robot, different stepping motions and stepping states of the micro-robot can be achieved.

[0006] Specifically, first, the present invention provides a micro-robot, which includes a robot body, a first driving mechanism, and a second driving mechanism. Among them, the robot body serves as the basic framework of the micro-robot; the first driving mechanism and the second driving mechanism are respectively joined to opposite sides of the robot body. In actual operation, by applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to both the first driving mechanism and the second driving mechanism, the forward movement of the micro-robot is realized; by applying a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to both the first driving mechanism and the second driving mechanism, the backward movement of the micro-robot is realized; by applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first driving mechanism, but not applying voltage to the second driving mechanism, the right rotation of the micro-robot is realized; by not applying voltage to the first driving mechanism, but applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second driving mechanism, the left rotation of the micro-robot is realized; by applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first driving mechanism, and applying a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to the second driving mechanism, the right rotation and turning around of the micro-robot are realized; by applying a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to the first driving mechanism, and applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second driving mechanism, the left rotation and turning around of the micro-robot are realized.

[0007] In some preferred embodiments, the robot body includes a robot head, a robot torso, and a robot tail joined in sequence; with the side where the robot head is located as the positive direction, the first driving mechanism and the second driving mechanism are respectively joined to opposite sides of the robot torso.

[0008] In some preferred embodiments, the first driving mechanism includes a first piezoelectric stack, a first displacement amplification mechanism, and a first actuator. Among them, the first piezoelectric stack is joined to one side of the robot torso and is used to generate a first elastic deformation by receiving voltage; the first displacement amplification mechanism is joined to the first piezoelectric stack and is used to amplify the first elastic deformation generated by the first piezoelectric stack; the first actuator, as the output end of the first driving mechanism, is joined to the first displacement amplification mechanism and is used to receive the amplified first elastic deformation to realize the stepping movement of the first actuator.

[0009] In some preferred embodiments, the second driving mechanism includes a second piezoelectric stack, a second displacement amplification mechanism, and a second actuating mechanism. Among them, the second piezoelectric stack is joined to the other side of the robot torso and is configured to generate a second elastic deformation by receiving a voltage; the second displacement amplification mechanism is joined to the second piezoelectric stack and is configured to amplify the second elastic deformation generated by the second piezoelectric stack; the second actuating mechanism, as the output end of the second driving mechanism, is joined to the second displacement amplification mechanism and is configured to receive the amplified second elastic deformation to achieve the stepping motion of the second actuating mechanism.

[0010] In some preferred embodiments, the first driving mechanism further includes a first flexible mechanism, and the second driving mechanism further includes a second flexible mechanism. The first flexible mechanism and the second flexible mechanism are respectively located on opposite sides of the robot torso, and the first flexible mechanism is joined between the first piezoelectric stack and the first displacement amplification mechanism and between the first displacement amplification mechanism and the first actuating mechanism; the second flexible mechanism is joined between the second piezoelectric stack and the second displacement amplification mechanism and between the second displacement amplification mechanism and the second actuating mechanism.

[0011] In some preferred embodiments, the first actuating mechanism includes a first driving foot and a first fixed foot, and the second actuating mechanism includes a second driving foot and a second fixed foot. Among them, one end of the first driving foot is joined to the first displacement amplification mechanism, and the other end of the first driving foot contacts the contact surface and is configured to achieve the stepping motion of the first actuating mechanism by receiving the amplified first elastic deformation; one end of the second driving foot is joined to the second displacement amplification mechanism, and the other end of the second driving foot contacts the contact surface and is configured to achieve the stepping motion of the second actuating mechanism by receiving the amplified second elastic deformation; the first fixed foot and the second fixed foot are both joined to the robot head and remain stationary.

[0012] In some preferred embodiments, the first actuator further includes a first ferromagnetic structure and a first lever amplification mechanism, and the second actuator further includes a second ferromagnetic structure and a second lever amplification mechanism. Among them, the first ferromagnetic structure is located between the first driving foot and the contact surface and between the first fixed foot and the contact surface, and the first ferromagnetic structure is respectively joined to the first driving foot and the first fixed foot; when the material of the contact surface is a ferromagnetic material, it can enable the first driving foot to perform the stepping motion of the first actuator on the contact surface; the first lever amplification mechanism is joined between the first displacement amplification mechanism and the first driving foot, and is used for secondarily amplifying the amplified first elastic deformation and transmitting the secondarily amplified first elastic deformation to the first driving foot to achieve the stepping motion of the first actuator. The second ferromagnetic structure is located between the second driving foot and the contact surface and between the first fixed foot and the contact surface, and the second ferromagnetic structure is respectively joined to the second driving foot and the second fixed foot; when the material of the contact surface is a ferromagnetic material, it can enable the second driving foot to perform the stepping motion of the second actuator on the contact surface; the second lever amplification mechanism is joined between the second displacement amplification mechanism and the second driving foot, and is used for secondarily amplifying the amplified second elastic deformation and transmitting the secondarily amplified second elastic deformation to the second driving foot to achieve the stepping motion of the second actuator.

[0013] In some preferred embodiments, the first driving mechanism further includes a first pre-tightening mechanism, and the joint of the first piezoelectric stack and the first displacement amplification mechanism is pre-tightened by the first pre-tightening mechanism; the second driving mechanism further includes a second pre-tightening mechanism, and the joint of the second piezoelectric stack and the second displacement amplification mechanism is pre-tightened by the second pre-tightening mechanism.

[0014] In some preferred embodiments, both the first pre-tightening mechanism and the second pre-tightening mechanism are screws.

[0015] In addition to the micro-robot provided by the present invention as described above, the present invention also provides a driving method for the micro-robot. Based on the implementation of the above micro-robot, this driving method can achieve the forward movement, backward movement, left rotation, right rotation, left rotation and turning around, and right rotation and turning around of the micro-robot. Specifically, to achieve forward movement, a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] is applied to both the first driving mechanism and the second driving mechanism; to achieve backward movement, a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] is applied to both the first driving mechanism and the second driving mechanism; to achieve right rotation, a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] is applied to the first driving mechanism, but no voltage is applied to the second driving mechanism; to achieve left rotation, no voltage is applied to the first driving mechanism, but a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] needs to be applied to the second driving mechanism; to achieve right rotation and turning around, a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] is applied to the first driving mechanism, and a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] is applied to the second driving mechanism; to achieve left rotation and turning around, a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] is applied to the first driving mechanism, and a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] is applied to the second driving mechanism.

[0016] According to the specific embodiments provided by the present invention, the following technical effects are disclosed by the present invention:

[0017] The present invention provides a micro-robot and its driving method. The micro-robot includes a robot body, a first driving mechanism and a second driving mechanism, and the first driving mechanism and the second driving mechanism are respectively located on opposite sides of the robot body. Different voltages can be applied to the first driving mechanism or the second driving mechanism to prompt the micro-robot to complete different step motions.

[0018] Specifically, the forward movement of the micro-robot can be achieved by applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to both the first driving mechanism and the second driving mechanism; the backward movement of the micro-robot can be achieved by applying a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to both the first driving mechanism and the second driving mechanism; the right rotation of the micro-robot can be achieved by applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first driving mechanism but not applying voltage to the second driving mechanism; the left rotation of the micro-robot can be achieved by not applying voltage to the first driving mechanism but applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second driving mechanism; the right rotation and turning around of the micro-robot can be achieved by applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first driving mechanism and applying a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to the second driving mechanism; the left rotation and turning around of the micro-robot can be achieved by applying a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to the first driving mechanism and applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second driving mechanism.

[0019] Therefore, the micro-robot in the present invention has a simple structure, is easy to process, and is convenient to control. By applying sawtooth driving voltages with different duty cycles to the first driving mechanism or the second driving mechanism, different stepping states and stepping movements of the micro-robot can be achieved based on the principle of inertial impact. Furthermore, the micro-robot can be applied to a variety of operating environments, and can achieve 90° vertical and 180° flipping walking in a specific environment, which can enhance its applicability in the fields of precision machinery and instruments, micro-nano operations, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0021] Figure 1 It is a schematic three-dimensional structure diagram of the micro-robot in Embodiment 1 of the present invention;

[0022] Figure 2Top view schematic diagram of the micro-robot in Embodiment 1 of the present invention;

[0023] Figure 3 Rear view schematic diagram of the micro-robot in Embodiment 1 of the present invention;

[0024] Figure 4 Right view schematic diagram of the micro-robot in Embodiment 1 of the present invention;

[0025] Figure 5 Left view schematic diagram of the micro-robot in Embodiment 1 of the present invention;

[0026] Figure 6 Schematic diagram of the driving method of the micro-robot in Embodiment 2 of the present invention;

[0027] Figure 7 Schematic diagram of the driving piezoelectric timing with a duty cycle greater than 50% in Embodiment 2 of the present invention.

[0028] Figure 8 Schematic diagram of the driving piezoelectric timing with a duty cycle less than 50% in Embodiment 2 of the present invention;

[0029] Figure 9 Schematic diagram of the driving piezoelectric timing with a duty cycle of 0% in Embodiment 2 of the present invention;

[0030] Figure 10 Schematic diagram of the driving piezoelectric timing with a duty cycle of 100% in Embodiment 2 of the present invention.

[0031] Symbol description:

[0032] 1. Robot main body; 1-1. Robot head; 1-2. Robot torso; 1-3. Robot tail; 2. First driving mechanism; 2-1. First piezoelectric stack; 2-2. First displacement amplification mechanism; 2-3. First execution mechanism; 2-3-1. First driving foot; 2-3-2. First fixed foot; 2-3-3. First ferromagnetic structure; 2-3-4. First lever amplification mechanism; 2-4. First flexible mechanism; 2-5. First pre-tightening mechanism; 3. Second driving mechanism; 3-1. Second piezoelectric stack; 3-2. Second displacement amplification mechanism; 3-3. Second execution mechanism; 3-3-1. Second driving foot; 3-3-2. Second fixed foot; 3-3-3. Second ferromagnetic structure; 3-3-4. Second lever amplification mechanism; 3-4. Second flexible mechanism; 3-5. Second pre-tightening mechanism. Detailed implementation manners

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts shall fall within the protection scope of the present invention.

[0034] The present invention provides a micro-robot and a driving method for the micro-robot. Different step motions of the micro-robot can be achieved by applying sawtooth driving voltages with different duty cycles to the first driving mechanism or the second driving mechanism of the micro-robot. The micro-robot and its driving method are applicable to various environments, have multiple uses, and have a wide application prospect.

[0035] To make the above objects, features, and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] Embodiment 1:

[0037] The present invention provides a micro - miniaturized robot, which includes a robot main body, a first driving mechanism and a second driving mechanism. Among them, the robot main body serves as the basic framework of the micro - miniaturized robot; the first driving mechanism and the second driving mechanism are respectively joined to opposite sides of the robot main body. In actual operation, by applying a saw - tooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to both the first driving mechanism and the second driving mechanism, the forward movement of the micro - miniaturized robot can be achieved; by applying a saw - tooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to both the first driving mechanism and the second driving mechanism, the backward movement of the micro - miniaturized robot can be achieved; by applying a saw - tooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first driving mechanism but not applying voltage to the second driving mechanism, the right - hand rotation of the micro - miniaturized robot can be achieved; by not applying voltage to the first driving mechanism but applying a saw - tooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second driving mechanism, the left - hand rotation of the micro - miniaturized robot can be achieved; by applying a saw - tooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first driving mechanism and applying a saw - tooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to the second driving mechanism, the right - hand rotation and turning around of the micro - miniaturized robot can be achieved; by applying a saw - tooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to the first driving mechanism and applying a saw - tooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second driving mechanism, the left - hand rotation and turning around of the micro - miniaturized robot can be achieved.

[0038] The robot main body includes a robot head, a robot torso and a robot tail which are joined in sequence; with the side where the robot head is located as the positive direction, the first driving mechanism and the second driving mechanism are respectively joined to opposite sides of the robot torso.

[0039] In addition, the first driving mechanism includes a first piezoelectric stack, a first displacement amplification mechanism and a first actuator. The first piezoelectric stack is joined to one side of the robot torso and is used to generate a first elastic deformation by receiving voltage; the first displacement amplification mechanism is joined to the first piezoelectric stack and is used to amplify the first elastic deformation generated by the first piezoelectric stack; the first actuator, as the output end of the first driving mechanism, is joined to the first displacement amplification mechanism and is used to receive the amplified first elastic deformation to achieve the stepping movement of the first actuator.

[0040] The second driving mechanism includes a second piezoelectric stack, a second displacement amplification mechanism, and a second actuator. The second piezoelectric stack is engaged with the other side of the robot torso and is configured to generate a second elastic deformation by receiving a voltage. The second displacement amplification mechanism is engaged with the second piezoelectric stack and is configured to amplify the second elastic deformation generated by the second piezoelectric stack. The second actuator, as the output end of the second driving mechanism, is engaged with the second displacement amplification mechanism and is configured to receive the amplified second elastic deformation to achieve the stepping motion of the second actuator.

[0041] The first driving mechanism further includes a first flexible mechanism, and the second driving mechanism further includes a second flexible mechanism. The first flexible mechanism and the second flexible mechanism are respectively located on opposite sides of the robot torso. Moreover, the first flexible mechanism is engaged between the first piezoelectric stack and the first displacement amplification mechanism, and between the first displacement amplification mechanism and the first actuator; the second flexible mechanism is engaged between the second piezoelectric stack and the second displacement amplification mechanism, and between the second displacement amplification mechanism and the second actuator.

[0042] The first actuator includes a first driving foot and a first fixed foot, and the second actuator includes a second driving foot and a second fixed foot. One end of the first driving foot is engaged with the first displacement amplification mechanism, and the other end of the first driving foot is in contact with the contact surface and is configured to achieve the stepping motion of the first actuator by receiving the amplified first elastic deformation; one end of the second driving foot is engaged with the second displacement amplification mechanism, and the other end of the second driving foot is in contact with the contact surface and is configured to achieve the stepping motion of the second actuator by receiving the amplified second elastic deformation; both the first fixed foot and the second fixed foot are engaged with the robot head and remain stationary.

[0043] The first actuator further includes a first ferromagnetic structure and a first lever amplification mechanism, and the second actuator further includes a second ferromagnetic structure and a second lever amplification mechanism. The first ferromagnetic structure is located between the first driving foot and the contact surface and between the first fixed foot and the contact surface, and the first ferromagnetic structure is respectively joined to the first driving foot and the first fixed foot; when the material of the contact surface is a ferromagnetic material, it can enable the first driving foot to perform the stepping motion of the first actuator on the contact surface; the first lever amplification mechanism is joined between the first displacement amplification mechanism and the first driving foot, and is used for secondarily amplifying the amplified first elastic deformation and transmitting the secondarily amplified first elastic deformation to the first driving foot to achieve the stepping motion of the first actuator. The second ferromagnetic structure is located between the second driving foot and the contact surface and between the first fixed foot and the contact surface, and the second ferromagnetic structure is respectively joined to the second driving foot and the second fixed foot; when the material of the contact surface is a ferromagnetic material, it can enable the second driving foot to perform the stepping motion of the second actuator on the contact surface; the second lever amplification mechanism is joined between the second displacement amplification mechanism and the second driving foot, and is used for secondarily amplifying the amplified second elastic deformation and transmitting the secondarily amplified second elastic deformation to the second driving foot to achieve the stepping motion of the second actuator.

[0044] The first driving mechanism further includes a first pre-tightening mechanism, and the joint of the first piezoelectric stack and the first displacement amplification mechanism is pre-tightened by the first pre-tightening mechanism; the second driving mechanism further includes a second pre-tightening mechanism, and the joint of the second piezoelectric stack and the second displacement amplification mechanism is pre-tightened by the second pre-tightening mechanism.

[0045] Both the first pre-tightening mechanism and the second pre-tightening mechanism are screws.

[0046] Next, the structure of the above-mentioned micro-robot and the connection relationships of its various components will be specifically described with reference to the accompanying drawings.

[0047] As Figure 1 shown, it is a three-dimensional structure schematic diagram of the micro-robot in the xyz space rectangular coordinate system in this embodiment. As Figure 2 shown, the upper half part is the robot head 1-1, as Figure 2 shown, the lower half part is the robot tail 1-3, the robot torso 1-2 is located between the robot head 1-1 and the robot tail 1-3, and is respectively joined to the robot head 1-1 and the robot tail 1-3. As Figure 1 shown, the robot head 1-1, the robot torso 1-2 and the robot tail 1-3 are of an integral structure. Additionally, as Figure 1As shown, the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 are respectively located on both sides of the robot torso 1-2. Both the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 are in a strip-shaped structure, and one end of the long side of the strip-shaped first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 are respectively joined to both sides of the robot torso 1-2. As Figure 1 and Figure 2 shown, both the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 are in an annular shape and wrap the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 between the annular structures. And the other end of the long side of the strip-shaped first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 are respectively joined to the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2.

[0048] In addition, as Figure 1 and Figure 2 shown, in this embodiment, the annular structure is formed by arranging multiple displacement amplification mechanisms and multiple segments of flexible mechanisms (including multiple segments of the first flexible mechanism 2-4 and multiple segments of the second flexible mechanism 3-4) at intervals. Each segment of the flexible mechanism is located between two adjacent displacement amplification mechanisms. And after the flexible mechanism is joined to the adjacent displacement amplification mechanism, it is respectively joined to the robot head 1-1 and the robot tail 1-3 in the x direction.

[0049] Furthermore, the first pre-tightening mechanism 2-5 and the second pre-tightening mechanism 3-5 are respectively located on both sides of the robot torso 1-2, that is, there is a pre-tightening mechanism on the side where the first driving mechanism 2 and the second driving mechanism 3 are located. As Figure 1 shown, the first pre-tightening mechanism 2-5 pre-tightens the first displacement amplification mechanism 2-2 on the first piezoelectric stack 2-1 along the positive y direction, and the second pre-tightening mechanism 3-5 pre-tightens the second displacement amplification mechanism 3-2 on the second piezoelectric stack 3-1 along the negative y direction.

[0050] As Figures 1-4 shown, the specific positions and specific connection relationships of the first actuator 2-3 and the second actuator 3-3 of the micro-robot on the micro-robot can be known. Specifically, as Figure 1 shown, the first driving foot 2-3-1 in the first driving mechanism 2 is located below the robot tail 1-3 along the negative z direction and is joined to the robot tail 1-3. The first fixed foot 2-3-2 in the first driving mechanism 2 is located below the robot head 1-1 along the negative z direction and is joined to the robot head 1-1. And, as Figure 1As shown, the first driving foot 2-3-1, the first fixed foot 2-3-2, the second driving foot 3-3-1, and the second fixed foot 3-3-2 are all irregular in shape. This shape is only the specific configuration of this embodiment and does not mean that the driving feet and fixed feet of all micro-robots need to be of this shape. That is, driving feet and fixed feet of any shape are within the protection scope of the present invention.

[0051] In addition, as Figure 1 , Figure 3 , Figure 4 and Figure 5 shown, ferromagnetic structures (including the first ferromagnetic structure 2-3-3 and the second ferromagnetic structure 3-3-3) are located between the actuator and the contact surface. Specifically, as Figures 1-5 shown, the ferromagnetic structure is a cuboid structure. One side of the plane where the long side of the cuboid structure is located is joined to the driving foot or fixed foot in the driving mechanism, and the other side of the plane where the long side of the cuboid structure is located is in contact with the contact surface. It should be noted that, first, the ferromagnetic structure is not limited to the shape presented in this embodiment and the drawings, and it can also be of different shapes. That is, ferromagnetic structures of different shapes are within the protection scope of the present invention. Second, the driving mechanism does not necessarily have to include a ferromagnetic structure. When the material of the contact surface is a magnetic material or a magnetic-like material, the ferromagnetic structure can be joined to one end of the driving foot or fixed foot, and the magnetic field interaction between the ferromagnetic structure and the contact surface is used to achieve the stagnation and stepping of the micro-robot on the contact surface. When the contact surface is a non-magnetic material, the driving foot or fixed foot can be directly in contact with the contact surface to achieve the stagnation and stepping of the micro-robot on this contact surface. Therefore, micro-robots with or without a ferromagnetic structure are within the protection scope of the present invention.

[0052] In addition, as Figure 1 and Figure 2As shown, in this specific embodiment, the first flexible mechanism 2-4 located between two adjacent first displacement amplification mechanisms 2-2 is connected to one end of the first lever amplification mechanism 2-3-4. The other end of the first lever amplification mechanism 2-3-4 is connected to the first driving foot 2-3-1, and the first lever amplification mechanism 2-3-4 is used to further amplify the deformation. And preferably, a lever mechanism is provided at the connection between the other end of the first lever amplification mechanism 2-3-4 and the first driving foot 2-3-1, and the first driving foot 2-3-1 can perform corresponding movements by means of this lever mechanism. Similarly, in this specific embodiment, the second flexible mechanism 3-4 located between two adjacent second displacement amplification mechanisms 3-2 is connected to one end of the second lever amplification mechanism 3-3-4. The other end of the second lever amplification mechanism 3-3-4 is connected to the second driving foot 3-3-1, and the second lever amplification mechanism 3-3-4 is also used to further amplify the deformation. And similarly preferably, a lever mechanism is provided at the connection between the other end of the second lever amplification mechanism 3-3-4 and the second driving foot 3-3-1, and the second driving foot 3-3-1 can perform corresponding movements by means of this lever mechanism.

[0053] Embodiment 2:

[0054] As Figures 6-8 shown, in a preferred embodiment during the actual operation process, a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30v, 150v] is applied to both the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1, corresponding to Figure 7 . Specifically, in the time period from t 1 to t 2 (this time period is the voltage rise time T ris ), the voltages applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 rise slowly, so that the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 elongate slowly. The first displacement amplification mechanism 2-2 engaged with the first piezoelectric stack 2-1 and the second displacement amplification mechanism 3-2 engaged with the second piezoelectric stack 3-1 both undergo elastic deformation, thereby driving the first driving foot 2-3-1 and the second driving foot 3-3-1 to extend a certain distance in the positive x direction and contact and stagnate with the contact surface; in the time period from t 2 to t 3 (this time period is the voltage fall time T des) The voltage applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 drops rapidly, causing the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 to retract rapidly. As a result, the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 both quickly return to their initial states, causing the micro-robot to move a certain distance in the positive x-direction driven by the first driving foot 2-3-1 and the second driving foot 3-3-1 that are already in contact with the contact surface. By repeating the above process, continuous stepping motion of the micro-robot in the positive x-direction can be achieved.

[0055] Correspondingly, in this preferred embodiment, a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] is applied to both the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1. Correspondingly Figure 8 continuous stepping motion of the micro-robot in the negative x-direction can be achieved. Specifically, in the time period from t 1 - t 2 the voltage applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 rises slowly, causing the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 to elongate slowly. The first displacement amplification mechanism 2-2 engaged with the first piezoelectric stack 2-1 and the second displacement amplification mechanism 3-2 engaged with the second piezoelectric stack 3-1 both undergo elastic deformation, driving the first driving foot 2-3-1 and the second driving foot 3-3-1 to extend a certain distance in the negative x-direction and come to a standstill in contact with the contact surface. In the time period from t 2 - t 3 the voltage applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 drops rapidly, causing the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 to retract rapidly. As a result, the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 both quickly return to their initial states, causing the micro-robot to move a certain distance in the negative x-direction driven by the first driving foot 2-3-1 and the second driving foot 3-3-1 that are already in contact with the contact surface. By repeating the above process, continuous stepping motion of the micro-robot in the negative x-direction can be achieved.

[0056] On the basis of the above operations, the present invention can also achieve motion in different directions by applying voltages with different duty cycles to the first driving mechanism 2 and the second driving mechanism 3. The following details the specific operation process.

[0057] In the first case, the right rotation of the micro-robot: A sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] is applied to the first piezoelectric stack 2-1, but no voltage is applied to the second piezoelectric stack 3-1. In this case, in the time period from t 1 - t 2During this period, the voltage applied to the first piezoelectric stack 2-1 rises slowly, causing the first piezoelectric stack 2-1 to elongate slowly. The first displacement amplification mechanism 2-2 engaged with the first piezoelectric stack 2-1 undergoes elastic deformation, driving the first driving foot 2-3-1 to extend a certain distance in the positive x direction and come to a stop in contact with the contact surface; at t 2 -t 3 During this period, the voltage applied to the first piezoelectric stack 2-1 drops rapidly, causing the first piezoelectric stack 2-1 to retract rapidly. As a result, the first displacement amplification mechanism 2-2 quickly returns to its initial state, causing the micro-robot to rotate in the positive x direction and the negative y direction under the drive of the first driving foot 2-3-1 that is already in contact with the contact surface, that is, the right rotation of the micro-robot is achieved.

[0058] The second case, the left rotation of the micro-robot: Similar to the above process, a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30v, 150v] is applied to the second piezoelectric stack 3-1, but no voltage is applied to the first piezoelectric stack 2-1. In this case, at t 1 -t 2 During this period, the voltage applied to the second piezoelectric stack 3-1 rises slowly, causing the second piezoelectric stack 3-1 to elongate slowly. The second displacement amplification mechanism 3-2 engaged with the second piezoelectric stack 3-1 undergoes elastic deformation, driving the second driving foot 3-3-1 to extend a certain distance in the positive x direction and come to a stop in contact with the contact surface; at t 2 -t 3 During this period, the voltage applied to the second piezoelectric stack 3-1 drops rapidly, causing the second piezoelectric stack 3-1 to retract rapidly. As a result, the second displacement amplification mechanism 3-2 quickly returns to its initial state, causing the micro-robot to rotate in the positive x direction and the positive y direction under the drive of the second driving foot 3-3-1 that is already in contact with the contact surface, that is, the left rotation of the micro-robot is achieved.

[0059] The third case, the right rotation and in-situ turning around of the micro-robot: A sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30v, 150v] is applied to the first piezoelectric stack 2-1, and a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30v, 150v] is applied to the second piezoelectric stack 3-1. In this case, at t 1 -t 2During this period, the voltages applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 rise slowly, so that the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 elongate slowly. The first displacement amplification mechanism 2-2 engaged with the first piezoelectric stack 2-1 undergoes elastic deformation, driving the first driving foot 2-3-1 to extend a certain distance in the positive x direction and come into contact with the contact surface and stop. The second displacement amplification mechanism 3-2 engaged with the second piezoelectric stack 3-1 undergoes elastic deformation, driving the second driving foot 3-3-1 to extend a certain distance in the negative x direction and come into contact with the contact surface and stop. At t 2 -t 3 During this period, the voltages applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 drop rapidly, so that the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 retract rapidly. Furthermore, the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 quickly return to the initial state, causing the entire micro-robot to rotate to the right and turn around in the positive x direction driven by the first driving foot 2-3-1 and the second driving foot 3-3-1 that have already come into contact with the contact surface.

[0060] In the fourth case, the micro-robot rotates to the left and turns around in place: First, apply a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to the first piezoelectric stack 2-1, and apply a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second piezoelectric stack 3-1. In this case, at t 1 -t 2 During this period, the voltages applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 rise slowly, so that the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 elongate slowly. The first displacement amplification mechanism 2-2 engaged with the first piezoelectric stack 2-1 undergoes elastic deformation, driving the first driving foot 2-3-1 to extend a certain distance in the negative x direction and come into contact with the contact surface and stop. The second displacement amplification mechanism 3-2 engaged with the second piezoelectric stack 3-1 undergoes elastic deformation, driving the second driving foot 3-3-1 to extend a certain distance in the positive x direction and come into contact with the contact surface and stop. At t 2 -t 3 During this period, the voltages applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 drop rapidly, so that the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 retract rapidly. Furthermore, the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 quickly return to the initial state, causing the entire micro-robot to rotate to the left and turn around in the positive x direction driven by the first driving foot 2-3-1 and the second driving foot 3-3-1 that have already come into contact with the contact surface.

[0061] Such as Figure 6As shown in Figures a, b, c, and d, they respectively show the movement modes of the micro-robot under different operating conditions.

[0062] As Figure 6 shown in Figures a, b, c, and d, a sawtooth driving voltage U with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] is applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1. At t 1 -t 2 period, the voltage U 1 of the first piezoelectric stack 2-1 and the voltage U 2 (in this case, the voltages U 1 and U 2 are both sawtooth driving voltages U with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V]) rise slowly. The first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 elongate slowly, and then respectively apply a resultant force F to the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2. The first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 both undergo elastic deformation under the action of the resultant force, and then respectively drive the first driving foot 2-3-1 and the second driving foot 3-3-1 to move a displacement along the positive x-direction. And at t 1 -t 2 period, the voltage U 1 of the first piezoelectric stack 2-1 and the voltage U 2 rapidly decrease. The first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 rapidly retract, so that the resultant force F received by the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 also disappears, and then the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 both quickly return to the initial state. At this time, the inertial forces between the first driving foot 2-3-1 and the first ferromagnetic structure 2-3-3 and between the second driving foot 3-3-1 and the second ferromagnetic structure 3-3-3 can overcome the maximum static frictions between the first ferromagnetic structure 2-3-3 and the second ferromagnetic structure 3-3-3 and the contact surfaces respectively, and then the micro-robot in the present invention can move a displacement along the positive x-direction. Repeating the above process can realize the continuous step motion of the micro-robot in the present invention along the positive x-direction. Similarly, by applying voltages with different duty cycles to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1, the micro-robot can complete different step motions. Specifically, the voltage U 1 applied to the first piezoelectric stack 2-1 and the voltage U 2Adjusted to a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V], the micro-robot can complete reverse movement along the positive x-direction. The voltage U applied to the first piezoelectric stack 2-1 1 Adjusted to a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V], and without applying voltage to the second piezoelectric stack 3-1, the micro-robot will rotate clockwise. The voltage U applied to the second piezoelectric stack 3-1 2 Adjusted to a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V], and without applying voltage to the first piezoelectric stack 2-1, the micro-robot will rotate counterclockwise. Additionally, the voltage U applied to the first piezoelectric stack 2-1 1 Adjusted to a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V], and the voltage U applied to the second piezoelectric stack 3-1 2 Adjusted to a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V], the micro-robot can rotate clockwise and turn around in place. The voltage U applied to the first piezoelectric stack 2-1 1 Adjusted to a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V], and the voltage U applied to the second piezoelectric stack 3-1 2 Adjusted to a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V], the micro-robot will rotate counterclockwise and turn around in place.

[0063] Specifically, when sawtooth driving voltages with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] are applied to both the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1, the micro-robot moves backward.

[0064] When the duty cycle is 0%, as Figure 9As shown, the voltage rises rapidly and then falls slowly, and the voltage rise time is less than the voltage fall time. The inertial displacement of the micro-robot moving forward is less than that of moving backward. The micro-robot moves backward as a whole and the inertial displacement of moving backward is the largest at this time. When the voltage amplitude is 30V, the elastic deformation of the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 is the smallest. When the voltage amplitude is 150V, the elastic deformation is the largest. The larger the voltage amplitude, the larger the elastic deformation. When the voltage amplitude is 50V and 100V, the elastic deformation is between the minimum elastic deformation and the maximum elastic deformation, and the elastic deformation corresponding to 50V is less than that corresponding to 100V. The micro-robot moves backward with the maximum inertial displacement and the elastic deformation corresponding to the voltage amplitude. The voltage amplitude gradually increases from 30V to 150V, which will gradually increase the elastic deformation of the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1, that is, the step distance of the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 per unit time gradually increases, so that the moving speed of the micro-robot per unit time gradually increases.

[0065] When the duty ratios of 25%, 40% and 49% are applied to both the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1, the voltage rise gradually slows down and the voltage fall gradually speeds up. The voltage rise time is still less than the voltage fall time, but the difference between the voltage rise time and the voltage fall time gradually decreases. The inertial displacement of the micro-robot moving forward gradually increases and the inertial displacement of moving backward gradually decreases. The micro-robot still moves backward as a whole but the inertial displacement of moving backward gradually decreases. The inertial displacement of the micro-robot moving backward corresponding to the duty ratio of 49% is the smallest. The voltage amplitude of the sawtooth driving voltage is [30V, 150V]. The larger the voltage amplitude, the larger the elastic deformation, which is the same as the variation law when the duty ratio is 0%. The micro-robot moves backward with the inertial displacement corresponding to the duty ratio and the elastic deformation corresponding to the voltage amplitude.

[0066] When the sawtooth driving voltage with a duty ratio of (50%, 100%] and a voltage amplitude of [30V, 150V] is applied to both the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1, the micro-robot moves forward. Specifically, the voltage rises slowly and falls rapidly, and the voltage rise time is greater than the voltage fall time. The inertial displacement of the micro-robot moving forward is greater than that of moving backward. The micro-robot moves forward as a whole. The inertial displacement of the micro-robot moving forward increases with the increase of the duty ratio, that is, the inertial displacements of the micro-robot moving forward corresponding to the duty ratios of 51%, 75% and 100% increase in turn. The inertial displacement of moving forward corresponding to the duty ratio of 51% is the shortest, and the inertial displacement of moving forward corresponding to the duty ratio of 100% is the longest. As Figure 10As shown, the voltage amplitude of the sawtooth driving voltage is [30V, 150V]. As the voltage amplitude increases, the elastic deformation amount becomes larger, which is the same as the variation law when the duty cycle is 0%. The micro-robot moves forward with the inertial displacement amount corresponding to the duty cycle and the elastic deformation amount corresponding to the voltage amplitude.

[0067] A duty cycle of 50% is the critical value. When the duty cycle gradually increases from 0% to 49%, the micro-robot moves backward, and the inertial displacement amount of the micro-robot moving backward gradually decreases. When the duty cycle gradually increases from 51% to 100%, the micro-robot moves forward, and the inertial displacement amount of the micro-robot moving forward gradually increases.

[0068] Therefore, the combination of the duty cycle and the voltage amplitude will affect the moving speed of the micro-robot. Based on the above variation laws of the duty cycle and the inertial displacement amount and the variation laws of the voltage amplitude and the elastic deformation amount, by applying sawtooth driving voltages with different duty cycles and different voltage amplitudes to the first piezoelectric stack 2-1 or the second piezoelectric stack 3-1, different forms of forward or backward movement of the micro-robot can be achieved.

[0069] According to the above variation laws, sawtooth driving voltages are respectively applied to the first piezoelectric stack 2-1 or the second piezoelectric stack 3-1 to enable the micro-robot to achieve other movement modes including right rotation, left rotation, right rotation and turning around, and left rotation and turning around.

[0070] In addition, the movement speed of the micro-robot can also be regulated by changing the application frequency of the sawtooth driving voltage. Specifically, when the duty cycle and the voltage amplitude of the applied sawtooth driving voltage remain unchanged, by increasing the application frequency of the sawtooth driving voltage, the number of deformations of the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 per unit time can be increased, and then the number of steps of the micro-robot per unit time can be increased, thereby increasing the movement speed of the micro-robot per unit time. On the contrary, when the duty cycle and the voltage amplitude of the applied sawtooth driving voltage remain unchanged, by decreasing the application frequency of the sawtooth driving voltage, the movement speed of the micro-robot per unit time can be decreased.

[0071] Therefore, in the present invention, by adjusting any one, two or three of the duty cycle, the voltage amplitude and the application frequency of the sawtooth driving voltage, the adjustment of the stepping mode of the micro-robot can be achieved.

[0072] The micro-robot provided in the present invention can also move on a 90° vertical ferromagnetic surface and on a 180° inverted ferromagnetic surface. Specifically, when the first driving foot 2-3-1 and the second driving foot 3-3-1 are respectively connected with a first ferromagnetic structure 2-3-3 and a second ferromagnetic structure 3-3-3, sufficient adsorption force is ensured while effectively reducing the movement resistance. A sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] is applied to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1 at a high frequency. By utilizing the inverse piezoelectric effect of the piezoelectric material to generate high-frequency micro-amplitude vibrations and shortening the inertial impact interval to overcome gravity, the movement on a 90° vertical ferromagnetic surface and a 180° inverted ferromagnetic surface can be achieved.

[0073] Ferromagnetic surface The micro-robot in the present invention can move in an environment of water or oil with a ferromagnetic surface. When the first driving foot 2-3-1 and the second driving foot 3-3-1 are respectively connected with a first ferromagnetic structure 2-3-3 and a second ferromagnetic structure 3-3-3, the magnetic material can prevent adsorption failure caused by fluid disturbance.

[0074] By increasing the voltage amplitude and prolonging the voltage rise time T ris , the first displacement amplification mechanism 2-2 and the second displacement amplification mechanism 3-2 can be fully deformed to overcome the high viscous resistance of the fluid, avoiding the mechanism response lag caused by fluid damping. And by alternately applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first piezoelectric stack 2-1 and the second piezoelectric stack 3-1, the viscous resistance of the fluid can be effectively overcome to reduce the local fluid resistance and improve the movement efficiency, enabling the micro-robot to move in an environment of water or oil with a ferromagnetic surface.

[0075] It should be noted that when the micro-robot provided in the present invention is used for different purposes, the stepping state and stepping mode of the micro-robot can be reasonably selected according to factors such as the on-site situation and actual operating conditions, so that it can adapt to the current conditions as much as possible and complete the task as well as possible.

[0076] Specific examples are used in this article to elaborate on the principle and implementation mode of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, based on the idea of the present invention, there will be changes in the specific implementation mode and application scope. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A miniature robot, characterized in that: include: A robot body (1), serving as the basic framework of the micro robot; A first driving mechanism (2) and a second driving mechanism (3) are respectively connected to opposite sides of the robot body (1); By applying a sawtooth drive voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to both the first drive mechanism (2) and the second drive mechanism (3), the forward movement of the micro robot is achieved; The backward movement of the micro robot is achieved by applying a sawtooth drive voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to both the first drive mechanism (2) and the second drive mechanism (3); By applying a sawtooth drive voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first drive mechanism (2), but not applying a voltage to the second drive mechanism (3), the micro robot is caused to rotate rightward; By not applying voltage to the first driving mechanism (2), but applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second driving mechanism (3), the left rotation of the micro robot is achieved; By applying a sawtooth drive voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first drive mechanism (2), and applying a sawtooth drive voltage with a duty cycle of [0%, 50%] and a voltage amplitude of [30V, 150V] to the second drive mechanism (3), the micro robot can rotate right and turn around; By applying a sawtooth drive voltage with a duty cycle of [0%, 50%] and a voltage amplitude of [30V, 150V] to the first drive mechanism (2), and applying a sawtooth drive voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second drive mechanism (3), the micro robot can rotate left and turn around.

2. The micro robot according to claim 1, characterized in that: The robot body (1) comprises: a robot head (1-1), a robot trunk (1-2) and a robot tail (1-3) which are connected in sequence; the first drive mechanism (2) and the second drive mechanism (3) are respectively connected on opposite sides of the robot trunk (1-2).

3. The micro robot according to claim 2, characterized in that: The first driving mechanism (2) comprises: A first piezoelectric stack (2-1) is coupled to one side of the robot trunk (1-2) and is used to generate a first elastic deformation by receiving a voltage; A first displacement amplifying mechanism (2-2) is coupled to the first piezoelectric stack (2-1) and is used to amplify a first elastic deformation generated by the first piezoelectric stack (2-1); The first actuator (2-3), serving as the output end of the first driving mechanism (2), is coupled to the first displacement amplifying mechanism (2-2) and is used to receive the amplified first elastic deformation to realize the stepping motion of the first actuator (2-3).

4. The micro robot according to claim 3, characterized in that: The second driving mechanism (3) comprises: A second piezoelectric stack (3-1) is coupled to the other side of the robot trunk (1-2) and is used to generate a second elastic deformation by receiving a voltage; A second displacement amplifying mechanism (3-2) is coupled to the second piezoelectric stack (3-1) and is used to amplify a second elastic deformation generated by the second piezoelectric stack (3-1); The second actuator (3-3), serving as the output end of the second driving mechanism (3), is coupled to the second displacement amplifying mechanism (3-2) and is used to receive the amplified second elastic deformation to realize the stepping motion of the second actuator (3-3).

5. The micro robot according to claim 4, characterized in that: The first driving mechanism (2) also includes a first flexible mechanism (2-4), and the second driving mechanism (3) also includes a second flexible mechanism (3-4); the first flexible mechanism (2-4) and the second flexible mechanism (3-4) are respectively located on opposite sides of the robot trunk (1-2), and the first flexible mechanism (2-4) is connected between the first piezoelectric stack (2-1) and the first displacement amplification mechanism (2-2) and between the first displacement amplification mechanism (2-2) and the first actuator (2-3); the second flexible mechanism (3-4) is connected between the second piezoelectric stack (3-1) and the second displacement amplification mechanism (3-2) and between the second displacement amplification mechanism (3-2) and the second actuator (3-3).

6. The micro robot according to claim 5, characterized in that: The first actuator (2-3) comprises a first driving foot (2-3-1) and a first fixed foot (2-3-2), and the second actuator (3-3) comprises a second driving foot (3-3-1) and a second fixed foot (3-3-2); One end of the first driving foot (2-3-1) is engaged with the first displacement amplifying mechanism (2-2), and the other end of the first driving foot (2-3-1) is in contact with a contact surface, so as to realize the stepping motion of the first actuator (2-3) by receiving the amplified first elastic deformation; one end of the second driving foot (3-3-1) is engaged with the second displacement amplifying mechanism (3-2), and the other end of the second driving foot (3-3-1) is in contact with a contact surface, so as to realize the stepping motion of the second actuator (3-3) by receiving the amplified second elastic deformation; the first fixed foot (2-3-2) and the second fixed foot (3-3-2) are both engaged with the robot head (1-1) and remain fixed.

7. The micro robot according to claim 6, characterized in that: The first actuator (2-3) further comprises a first ferromagnetic structure (2-3-3) and a first lever amplification mechanism (2-3-4), and the second actuator (3-3) further comprises a second ferromagnetic structure (3-3-3) and a second lever amplification mechanism (3-3-4); The first ferromagnetic structure (2-3-3) is located between the first driving foot (2-3-1) and the contact surface and between the first fixed foot (2-3-2) and the contact surface, and the first ferromagnetic structure (2-3-3) is respectively connected to the first driving foot (2-3-1) and the first fixed foot (2-3-2); when the material of the contact surface is a ferromagnetic material, the first driving foot (2-3-1) can perform the stepping motion of the first actuator (2-3) on the contact surface; the first lever amplification mechanism (2-3-4) is connected between the first displacement amplification mechanism (2-2) and the first driving foot (2-3-1) and is used to perform a second amplification on the amplified first elastic deformation and transmit the second amplified first elastic deformation to the first driving foot (2-3-1) to realize the stepping motion of the first actuator (2-3); The second ferromagnetic structure (3-3-3) is located between the second driving foot (3-3-1) and the contact surface and between the first fixed foot (3-3-2) and the contact surface, and the second ferromagnetic structure (3-3-3) is respectively connected to the second driving foot (3-3-1) and the second fixed foot (3-3-2); when the material of the contact surface is ferromagnetic material, the second driving foot (3-3-1) can perform the stepping motion of the second actuator (3-3) on the contact surface; the second lever amplification mechanism (3-3-4) is connected between the second displacement amplification mechanism (3-2) and the second driving foot (3-3-1) and is used to perform a second amplification on the amplified second elastic deformation and transmit the second amplified second elastic deformation to the second driving foot (3-3-1) to realize the stepping motion of the second actuator (3-3).

8. The micro robot according to claim 7, characterized in that: The first driving mechanism (2) further comprises a first pre-tightening mechanism (2-5), and the joint between the first piezoelectric stack (2-1) and the first displacement amplifying mechanism (2-2) is pre-tightened by the first pre-tightening mechanism (2-5); the second driving mechanism (3) further comprises a second pre-tightening mechanism (3-5), and the joint between the second piezoelectric stack (3-1) and the second displacement amplifying mechanism (3-2) is pre-tightened by the second pre-tightening mechanism (3-5).

9. The micro robot according to claim 8, characterized in that: The first pre-tightening mechanism (2-5) and the second pre-tightening mechanism (3-5) are both screws.

10. A driving method for a micro robot, implemented based on the micro robot according to claim 1, characterized in that: The driving method includes driving the micro robot to complete forward movement, backward movement, left rotation, right rotation, left rotation and U-turn, and right rotation and U-turn; The process of completing the forward movement comprises: applying a sawtooth drive voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to both the first drive mechanism (2) and the second drive mechanism (3), so that the micro robot moves forward; The process of completing the backward movement includes: applying a sawtooth drive voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to both the first drive mechanism (2) and the second drive mechanism (3), so that the micro robot moves backward; The process of completing the right-hand rotation comprises: applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first driving mechanism (2), but not applying a voltage to the second driving mechanism (3), so that the micro robot rotates right; The process of completing the left rotation includes: not applying voltage to the first driving mechanism (2), but applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second driving mechanism (3), so that the micro robot rotates left; The process of completing the right rotation and U-turn comprises: applying a sawtooth driving voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the first driving mechanism (2), and applying a sawtooth driving voltage with a duty cycle of [0%, 50%) and a voltage amplitude of [30V, 150V] to the second driving mechanism (3), so that the micro robot rotates right and turns around; The process of completing the left rotation and U-turn comprises: applying a sawtooth drive voltage with a duty cycle of [0%, 50%] and a voltage amplitude of [30V, 150V] to the first drive mechanism (2), and applying a sawtooth drive voltage with a duty cycle of (50%, 100%] and a voltage amplitude of [30V, 150V] to the second drive mechanism (3), so that the micro robot rotates left and turns.

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