Preparation method of single-layer disc 3D structure based on nanometer needle tip support

CN120136023AActive Publication Date: 2025-06-13HANGZHOU DIANZI UNIV +2
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Patent Information

Application Number
CN202510629464.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-16
Publication Date
2025-06-13
Estimated Expiration
2045-05-16

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Abstract

The invention belongs to the field of micro-nano structures, and relates to a preparation method of a single-layer disc 3D structure based on nano needle tip support. According to the method, the single-layer disc 3D structure supported by the nanometer needle tip is obtained through an electron beam thermal evaporation system, a self-assembly technology and reactive ion etching, the preparation process is simple, cost is low, repeatability is good, structural stability is good, and tolerance is high. Compared with a metasurface supported by a silicon substrate, the metasurface provided by the invention has the advantages that the transient signal oscillation modulation capability of the metasurface is greatly improved by the needle point support, the opto-mechanical conversion efficiency and the oscillation quality are remarkably improved, and the quality factor is improved by several orders of magnitude compared with that of a common silicon substrate.
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Citation Information

Patent Citations

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