Absorption tower for preparing and processing electronic grade sulfuric acid

By designing the absorption tower of waste heat recovery module in the electronic-grade sulfuric acid preparation process, the problem of heat energy waste in the reaction hot gas is solved, and the recycling and efficiency of thermal energy are improved.

CN120136042APending Publication Date: 2025-06-13FUJIAN TIANFU ELECTRONIC MATERIAL CO LTD
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Patent Information

Application Number
CN202510633234.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-16
Publication Date
2025-06-13

AI Technical Summary

Technical Problem

In the electronic-grade sulfuric acid preparation process, the heat gas generated by the reaction contains a large amount of heat energy, but direct emission leads to waste of heat energy and cannot be reused.

Method used

An absorption tower for the preparation and processing of electronic grade sulfuric acid is designed, using waste heat recovery components, including an oil storage tank, a return pipe, an oil transfer pipe, a heat exchanger box and a heat absorption head. The heat of the reaction hot gas is absorbed through the heat absorption head, and it is transmitted to the oil storage tank, and heat recovery is carried out through the circulation pump and the heat exchanger box.

Benefits of technology

Effectively capture the heat that would have been directly lost, convert it into secondary energy, realize the recycling of energy, optimize the energy use process, and significantly improve the utilization efficiency of heat energy.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses an absorption tower for preparing and processing electronic-grade sulfuric acid, relates to the field of preparation of electronic-grade sulfuric acid, and aims to solve the problem that hot gas generated by reaction cannot be recycled. The absorption tower comprises an absorption tower body, a circulating pump machine is arranged on the outer side of the absorption tower body, and a merging pipe is fixedly connected to the side, close to the absorption tower body, of the circulating pump machine; a suction pipe is fixedly connected to the front end of the merging pipe and located between the inner sides of the absorption tower bodies, a spraying pipe is fixedly connected to the top end of the circulating pump machine, the outer side of the spraying pipe is fixedly connected with the inner sides of the absorption tower bodies, a spraying head is fixedly connected to the lower portion of the top end of the spraying pipe, and a shell is fixedly connected to the inner sides of the absorption tower bodies; a sufficient reaction assembly is arranged on the inner side of the shell, and a waste heat recovery assembly is arranged below the shell. According to the absorption tower for preparing and processing the electronic-grade sulfuric acid, lost heat is recovered through the waste heat recovery assembly, so that energy is reutilized, and the overall energy utilization efficiency is improved.
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Description

Technical Field

[0001] The present invention relates to the technical field of electronic-grade sulfuric acid preparation, and particularly to an absorption tower for the preparation and processing of electronic-grade sulfuric acid. Background Art

[0002] In the process of preparing electronic-grade sulfuric acid, liquid sulfur trioxide enters the intermediate layer for buffering and storage. Then, the sulfuric acid is evaporated into a gas phase through an evaporator, and then enters a demister to remove substances such as impurities and water vapor. Then, it is introduced into an absorption tower for treatment. The absorption tower is a device for performing absorption operations, mainly using the difference in the solubility of gas mixtures in liquid absorbents to dissolve the easily soluble components in the absorbent, thereby realizing the separation process.

[0003] In the chemical reaction process of the absorption tower, concentrated sulfuric acid reacts violently with sulfur trioxide, generating hot gas containing huge energy, but these hot gases are directly discharged into the external environment, which is a great waste of energy. Summary of the Invention

[0004] The present invention discloses an absorption tower for the preparation and processing of electronic-grade sulfuric acid, aiming to solve the technical problem that the hot gas generated by the reaction contains a large amount of heat energy, and direct discharge means that this heat energy is wasted and cannot be reused.

[0005] To achieve the above object, the present invention adopts the following technical solutions: An absorption tower for the preparation and processing of electronic-grade sulfuric acid includes an absorption tower body. A circulation pump is arranged outside the absorption tower body. One side of the circulation pump close to the absorption tower body is fixedly connected with a merging pipe. The front end of the merging pipe is fixedly connected with a suction pipe. The suction pipe is located between the inner sides of the absorption tower body. And the top of the circulation pump is fixedly connected with a spray pipe. The outer side of the spray pipe is fixedly connected with the inner side of the absorption tower body. Below the top of the spray pipe is fixedly connected with a spray head. Inside the absorption tower body is fixedly connected with a housing. Inside the housing is provided with a full reaction assembly. Below the housing is provided with a waste heat recovery assembly; The waste heat recovery assembly further includes an oil storage tank. One side of the oil storage tank is fixedly connected with a return pipe. And the bottom end of the oil storage tank is fixedly connected with an oil delivery pipe. The bottom ends of the oil delivery pipe and the return pipe are both fixedly connected with a heat exchange tank; The full reaction assembly includes a plurality of spoiler plates, and the spoiler plates are all located inside the housing.

[0006] In a preferred embodiment, the waste heat recovery component further includes a heat absorption head located inside the absorption tower body. One side of the heat absorption head is fixedly connected to a heat transfer pipe. There is a perforation on the absorption tower body, and the inside of the perforation is fixedly connected to the outside of the heat transfer pipe. The bottom end of the heat transfer pipe is fixedly connected to the top end of the fuel tank. There are two circular holes on the absorption tower body, and the outside of the return pipe and the fuel pipe are fixedly connected between the circular holes. One side of the fuel tank close to the absorption tower body is fixedly connected to a fixing ring member, and the inside of the fixing ring member is fixedly connected to the outside of the absorption tower body. Both sides inside the fuel tank are fixedly connected to card slot plates, and heat equalizing plates are fixedly connected to the opposite sides of the card slot plates. The bottom end of the fuel tank is fixedly connected to a fixing frame. Inside the fixing frame is fixedly connected a circulation pump, and the output end of the circulation pump is fixedly connected to the return pipe and the fuel pipe. Also, a plurality of heat dissipation fins are fixedly connected to both outer sides of the heat exchange box.

[0007] In a preferred embodiment, circular grooves are provided on both the absorption tower body and the housing. Inside the circular grooves are fixedly connected filler inlets, and the outside of the filler inlets is fixedly connected to the inside of the housing. The top end of the absorption tower body is fixedly connected to an air inlet and outlet. There is a circular hole groove on the absorption tower body, and inside the circular hole groove is fixedly connected a flue gas inlet, which is located between the return pipe and the fuel pipe. Also, a mesh plate is fixedly connected to the inside of the absorption tower body, which is located below the housing, and a spray head is located above the housing. An air-liquid separator is fixedly connected to the inside of the absorption tower body, and the air-liquid separator is located above the spray pipe. There are a plurality of round holes on the absorption tower body, and the inside of the round holes is fixedly connected to the outside of the suction pipe. There is a hole on the absorption tower body, and the inside of the hole is fixedly connected to the outside of the spray pipe.

[0008] In a preferred embodiment, the full reaction component further includes an annular plate, whose outside is fixedly connected to the inside of the housing. The bottom end of the annular plate is fixedly connected to symmetric retaining plates. The bottom ends of the retaining plates are movably connected to an annular sliding plate. Both outer ends of the annular sliding plate are movably connected to annular groove plates, whose outside is fixedly connected to the inside of the housing. The bottom end of the annular sliding plate is fixedly connected to a gear ring. There is an annular sliding groove on the housing, and the gear ring is movably connected between the inside of the circular sliding groove. The outside of the gear ring is movably connected to a rotating gear, and the rotating gear is meshed with the gear ring through a tooth groove. The inside of the rotating gear is connected to a driving motor through a coupling. The top end of the annular sliding plate is fixedly connected to a plurality of fixing columns, and the outside of the fixing columns are all movably connected to connecting pieces. One end of each connecting piece is fixedly connected to the outside of a spoiler. The inside of each spoiler is movably connected to a round rod, whose top end is fixedly connected to the bottom end of the annular plate, and whose bottom end is fixedly connected to the top end of the annular sliding plate.

[0009] As can be seen from the above, the absorption tower for the preparation and processing of electronic-grade sulfuric acid provided by the present invention has a waste heat recovery component, which can effectively capture the heat that would otherwise be directly dissipated and convert it into energy that can be reused, realizing the recycling of energy, optimizing the energy usage process, significantly improving the utilization efficiency of thermal energy, and achieving the efficient utilization of resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a schematic diagram of the overall structure of an absorption tower for the preparation and processing of electronic-grade sulfuric acid proposed by the present invention.

[0011] Figure 2 It is a partial structural schematic diagram of the housing of an absorption tower for the preparation and processing of electronic-grade sulfuric acid proposed by the present invention.

[0012] Figure 3 It is a sectional view of the inside of the absorption tower body of an absorption tower for the preparation and processing of electronic-grade sulfuric acid proposed by the present invention.

[0013] Figure 4 It is a partial structural schematic diagram of the absorption tower body of an absorption tower for the preparation and processing of electronic-grade sulfuric acid proposed by the present invention.

[0014] Figure 5 It is a structural schematic diagram of the waste heat recovery component of an absorption tower for the preparation and processing of electronic-grade sulfuric acid proposed by the present invention.

[0015] Figure 6 It is a partial structural schematic diagram of the waste heat recovery component of an absorption tower for the preparation and processing of electronic-grade sulfuric acid proposed by the present invention.

[0016] Figure 7 It is a structural schematic diagram of the full reaction component of an absorption tower for the preparation and processing of electronic-grade sulfuric acid proposed by the present invention.

[0017] Figure 8 It is a partial structural schematic diagram of the full reaction component of an absorption tower for the preparation and processing of electronic-grade sulfuric acid proposed by the present invention.

[0018] In the figure: 1. Absorption tower body; 2. Packing inlet; 3. Spray pipe; 4. Circulation pump; 5. Air inlet and outlet; 6. Waste heat recovery component; 601. Fixed ring; 602. Heat absorption head; 603. Heat transfer pipe; 604. Card slot plate; 605. Heat spreader; 606. Oil storage tank; 607. Fixed bracket; 608. Circulation pump; 609. Oil delivery pipe; 610. Return pipe; 611. Heat exchange box; 612. Heat sink; 7. Flue gas inlet; 8. Gas-liquid separator; 9. Mesh plate; 10. Shell; 11. Spray head; 12. Full reaction component; 1201. Ring plate; 1202. Retaining plate; 1203. Ring sliding plate; 1204. Gear ring; 1205. Ring groove plate; 1206. Fixed column; 1207. Connecting piece; 1208. Turbulence plate; 1209. Round rod; 1210. Driving motor; 1211. Rotating gear; 13. Suction pipe; 14. Merging pipe. Detailed implementation manners

[0019] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0020] An absorption tower for the preparation and processing of electronic-grade sulfuric acid disclosed by the present invention is mainly applied to the scenario where the hot gas generated by the reaction contains a large amount of heat energy. Direct discharge means that these heat energies are wasted and cannot be reused.

[0021] Referring to Figures 1-8 , an absorption tower for the preparation and processing of electronic-grade sulfuric acid includes an absorption tower body 1. A circulation pump 4 is arranged on the outer side of the absorption tower body 1. One side of the circulation pump 4 close to the absorption tower body 1 is fixedly connected with a merging pipe 14. The front end of the merging pipe 14 is fixedly connected with a suction pipe 13. The suction pipe 13 is located between the inner sides of the absorption tower body 1. And the top end of the circulation pump 4 is fixedly connected with a spray pipe 3. The outer side of the spray pipe 3 is fixedly connected with the inner side of the absorption tower body 1. Below the top end of the spray pipe 3 is fixedly connected with a spray head 11. Inside the absorption tower body 1 is fixedly connected with a shell 10. Inside the shell 10 is arranged a full reaction component 12. Below the shell 10 is arranged a waste heat recovery component 6; The waste heat recovery component 6 further includes an oil storage tank 606. One side of the oil storage tank 606 is fixedly connected with a return pipe 610. And the bottom end of the oil storage tank 606 is fixedly connected with an oil delivery pipe 609. The bottom ends of the oil delivery pipe 609 and the return pipe 610 are both fixedly connected with a heat exchange box 611; The full reaction component 12 includes a plurality of turbulence plates 1208, and the turbulence plates 1208 are all located inside the shell 10.

[0022] Referring to Figure 1 , Figure 2 , Figure 3 ,Figure 4 , Figure 5 and Figure 6 , in a preferred embodiment, the waste heat recovery component 6 further includes a heat absorption head 602. The heat absorption head 602 is located inside the absorption tower body 1, and a heat transfer pipe 603 is fixedly connected to one side of the heat absorption head 602. A perforation is formed on the absorption tower body 1, and a fixed connection is provided between the inside of the perforation and the outside of the heat transfer pipe 603. The bottom end of the heat transfer pipe 603 is fixedly connected to the top end of the fuel tank 606. Two circular holes are formed on the absorption tower body 1, and the outside of the return pipe 610 and the fuel delivery pipe 609 are fixedly connected between the circular holes. A fixed ring member 601 is fixedly connected to one side of the fuel tank 606 close to the absorption tower body 1, and a fixed connection is provided between the inner side of the fixed ring member 601 and the outside of the absorption tower body 1. Moreover, clamping groove plates 604 are fixedly connected to both sides inside the fuel tank 606, and heat equalizing plates 605 are fixedly connected to the opposite sides of the clamping groove plates 604. A fixed frame 607 is fixedly connected to the bottom end of the fuel tank 606, and a circulation pump 608 is fixedly connected to the inside of the fixed frame 607. The output end of the circulation pump 608 is fixedly connected to the return pipe 610 and the fuel delivery pipe 609, and a plurality of heat dissipation fins 612 are fixedly connected to both outer sides of the heat exchange tank 611.

[0023] Specifically, when hot gas is generated by the reaction, the heat absorption head 602 located inside the absorption tower body 1 directly contacts the hot gas generated after the full reaction of concentrated sulfuric acid and sulfur trioxide. The heat absorption head 602 conducts the absorbed heat to the fuel tank 606 through the heat transfer pipe 603. After the heat is transferred to the fuel tank 606, the clamping groove plates 604 inside the fuel tank 606 and the heat equalizing plates 605 fixed thereon play a role. The heat equalizing plates 605 can evenly distribute the heat, avoiding local overheating or heat accumulation, and ensuring uniform heat distribution inside the fuel tank 606. The circulation pump 608 inside the fixed frame 607 at the bottom end of the fuel tank 606 is started. It conveys a part of the heated hot liquid in the fuel tank 606 through the fuel delivery pipe 609, and the other part returns through the return pipe 610. The hot liquid circulates in the fuel delivery pipe 609 and the return pipe 610, and the heat exchange tank 611 connected to the bottom ends of the fuel delivery pipe 609 and the return pipe 610 starts to work. After the hot liquid flows into the heat exchange tank 611, the heat dissipation fins 612 on both outer sides of the heat exchange tank 611 increase the heat dissipation area, dissipating the heat carried by the hot liquid to the surrounding environment, realizing the recovery and utilization of heat. During the whole process, the hot liquid circulates continuously, continuously absorbing the heat of the reaction hot gas in the absorption tower body 1 and recovering it. During the process, through the waste heat recovery component, the heat that would have been directly dissipated is effectively captured, converted into reusable energy, realizing the recycling of energy, optimizing the energy use process, significantly improving the utilization efficiency of thermal energy, and realizing the efficient utilization of resources.

[0024] Referring to Figure 1 , Figure 2 , Figure 3 andFigure 4 In a preferred embodiment, circular grooves are formed in both the absorption tower body 1 and the housing 10. Packing inlets 2 are fixedly connected inside the circular grooves. The outer sides of the packing inlets 2 are fixedly connected to the inner side of the housing 10. An air inlet and outlet 5 is fixedly connected to the top of the absorption tower body 1. A circular hole groove is formed in the absorption tower body 1. A flue gas inlet 7 is fixedly connected inside the circular hole groove. The flue gas inlet 7 is located between the reflux pipe 610 and the oil pipeline 609. A mesh plate 9 is fixedly connected to the inner side of the absorption tower body 1. The mesh plate 9 is located below the housing 10. A spray head 11 is located above the housing 10. A gas-liquid separator 8 is fixedly connected to the inner side of the absorption tower body 1. The gas-liquid separator 8 is located above the spray pipe 3. A plurality of round holes are formed in the absorption tower body 1. The inside of the round holes is fixedly connected to the outer side of the suction pipe 13. A hole is formed in the absorption tower body 1. The inside of the hole is fixedly connected to the outer side of the spray pipe 3.

[0025] Refer to Figure 3 、 Figure 4 、 Figure 7 and Figure 8 In a preferred embodiment, the full reaction component 12 further includes an annular plate 1201. The outer side of the annular plate 1201 is fixedly connected to the inner side of the housing 10. Symmetrical retaining plates 1202 are fixedly connected to the bottom end of the annular plate 1201. An annular sliding plate 1203 is movably connected to the bottom end of the retaining plate 1202. Both ends of the outer side of the annular sliding plate 1203 are movably connected to an annular groove plate 1205. The outer side of the annular groove plate 1205 is fixedly connected to the inner side of the housing 10. A gear ring 1204 is fixedly connected to the bottom end of the annular sliding plate 1203. An annular sliding groove is formed in the housing 10. The gear ring 1204 is movably connected between the inner sides of the circular sliding grooves. A rotating gear 1211 is movably connected to the outer side of the gear ring 1204. The rotating gear 1211 and the gear ring 1204 are meshed through tooth grooves. The inner side of the rotating gear 1211 is connected to a driving motor 1210 through a coupling. A plurality of fixing columns 1206 are fixedly connected to the top end of the annular sliding plate 1203. Connecting members 1207 are movably connected to the outer sides of the fixing columns 1206. One ends of the connecting members 1207 are fixedly connected to the outer sides of the flow disturbing plates 1208. The inner sides of the flow disturbing plates 1208 are movably connected to round rods 1209. The top end of the round rod 1209 is fixedly connected to the bottom end of the annular plate 1201. The bottom end of the round rod 1209 is fixedly connected to the top end of the annular sliding plate 1203.

[0026] Specifically, during the reaction process, the driving motor 1210 starts to drive the rotating gear 1211 to rotate back and forth. The rotating gear 1211 meshes with the gear ring 1204 through the tooth grooves. The rotation of the rotating gear 1211 drives the gear ring 1204 to rotate. The gear ring 1204 is fixedly connected to the annular sliding plate 1203. When the gear ring 1204 rotates, it drives the annular sliding plate 1203 to move within the annular groove plate 1205 (the annular groove plate 1205 restricts the moving direction of the annular sliding plate 1203, enabling it to only perform circular motion). The fixed column 1206 at the top of the annular sliding plate 1203 moves along with the annular sliding plate 1203. The connecting member 1207 movably connected to the outside of the fixed column 1206 will change its angle due to the movement of the fixed column 1206, thereby driving the spoiler 1208 to swing back and forth around the round rod 1209. During the swinging process of the spoiler 1208, the flow paths of the concentrated sulfuric acid and sulfur trioxide in the absorption tower body 1 are disrupted, increasing the contact area and mixing degree between the two, and promoting sufficient reaction. During this process, through the swinging of the spoiler 1208, the flow trajectories of the concentrated sulfuric acid and sulfur trioxide are disrupted, allowing the two substances to penetrate and mix more fully with each other, avoiding the situation of uneven local concentration, and greatly improving the sufficiency of the reaction.

[0027] Working principle: During use, the packing enters the interior of the housing 10 from the packing inlet 2 and falls onto the mesh plate 9. The flue gas containing sulfur trioxide enters the absorption tower body 1 from the flue gas inlet 7. The circulating pump 4 starts, extracts the concentrated sulfuric acid in the tower through the suction pipe 13 and the merging pipe 14, and then sprays it out from the spray heads 11 through the spray pipe 3. The sprayed liquid and the sulfur trioxide gas entering the tower are mixed and contacted in the absorption tower body 1 to start the preliminary reaction. The gas-liquid mixture rises and passes through the gas-liquid separator 8 to separate the gas and the liquid. The separated gas is discharged from the gas outlet 5. Inside the housing 10, the driving motor 1210 drives the rotating gear 1211 to rotate back and forth, meshes with the gear ring 1204, enables the annular sliding plate 1203 to move circularly within the annular groove plate 1205. The fixed column 1206 moves along with the annular sliding plate 1203, drives the spoiler 1208 to swing back and forth around the round rod 1209 through the connecting member 1207, disrupts the flow of the concentrated sulfuric acid and sulfur trioxide, and promotes their full mixing and reaction to generate electronic-grade sulfuric acid. The heat of the hot gas generated by the reaction is absorbed by the heat absorption head 602 located in the absorption tower body 1, conducted through the heat transfer pipe 603 to the fuel tank 606. The heat is evenly distributed by the clamping groove plate 604 and the heat equalizing plate 605 in the fuel tank 606. The circulating pump 608 enables the hot liquid in the fuel tank 606 to circulate through the oil pipe 609 and the return pipe 610 to the heat exchange box 611, and the heat is recovered through the heat dissipation fins 612.

[0028] The above are only the preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, making equivalent replacements or changes, shall be covered by the protection scope of the present invention.

Claims

1. An absorption tower for preparing and processing electronic grade sulfuric acid, comprising an absorption tower body (1), characterized in that: A circulating pump (4) is arranged on the outside of the absorption tower body (1), a merging pipe (14) is fixedly connected to the side of the circulating pump (4) close to the absorption tower body (1), a suction pipe (13) is fixedly connected to the front end of the merging pipe (14), the suction pipe (13) is located between the inner sides of the absorption tower body (1), and a spray pipe (3) is fixedly connected to the top of the circulating pump (4), the outer side of the spray pipe (3) is fixedly connected to the inner side of the absorption tower body (1), a spray head (11) is fixedly connected below the top of the spray pipe (3), a shell (10) is fixedly connected to the inner side of the absorption tower body (1), a full reaction component (12) is arranged on the inner side of the shell (10), and a waste heat recovery component (6) is arranged below the shell (10); The waste heat recovery assembly (6) further comprises an oil storage tank (606), one side of the oil storage tank (606) being fixedly connected to a return pipe (610), and the bottom end of the oil storage tank (606) being fixedly connected to an oil delivery pipe (609), and the bottom ends of the oil delivery pipe (609) and the return pipe (610) being fixedly connected to a heat exchange box (611); The fully reactive component (12) comprises a plurality of spoilers (1208), and the spoilers (1208) are all located on the inner side of the shell (10).

2. The absorption tower for preparing and processing electronic grade sulfuric acid according to claim 1, characterized in that: The waste heat recovery component (6) further comprises a heat absorbing head (602), the heat absorbing head (602) being located inside the absorption tower body (1), and a heat transfer pipe (603) being fixedly connected to one side of the heat absorbing head (602), a through hole being provided on the absorption tower body (1), the inside of the through hole being fixedly connected to the outside of the heat transfer pipe (603), the bottom end of the heat transfer pipe (603) being fixedly connected to the top end of the oil storage tank (606), two circular holes being provided on the absorption tower body (1), and the outsides of the return pipe (610) and the oil transfer pipe (609) being located between the circular holes and fixedly connected.

3. An absorption tower for preparing and processing electronic grade sulfuric acid according to claim 2, characterized in that: A fixing ring (601) is fixedly connected to one side of the oil storage tank (606) close to the absorption tower body (1); the inner side of the fixing ring (601) is fixedly connected to the outer side of the absorption tower body (1); and both sides of the interior of the oil storage tank (606) are fixedly connected to a retaining groove plate (604); a heat spreader (605) is fixedly connected to the opposite side of the retaining groove plate (604); and a fixing frame (607) is fixedly connected to the bottom end of the oil storage tank (606).

4. The absorption tower for preparing and processing electronic grade sulfuric acid according to claim 3, characterized in that: A circulating pump (608) is fixedly connected to the inner side of the fixing frame (607), the output end of the circulating pump (608) is fixedly connected to the return pipe (610) and the oil delivery pipe (609), and a plurality of heat sinks (612) are fixedly connected to both sides of the exterior of the heat exchange box (611).

5. The absorption tower for preparing and processing electronic grade sulfuric acid according to claim 1, characterized in that: The absorption tower body (1) and the shell (10) are both provided with circular grooves, the interior of the circular grooves is fixedly connected to a packing inlet (2), the outer side of the packing inlet (2) is fixedly connected to the inner side of the shell (10), and the top of the absorption tower body (1) is fixedly connected to an air inlet outlet (5).

6. The absorption tower for preparing and processing electronic grade sulfuric acid according to claim 4, characterized in that: The absorption tower body (1) is provided with a circular hole groove, the inside of which is fixedly connected to a flue gas inlet (7), the flue gas inlet (7) being located between the return pipe (610) and the oil delivery pipe (609), and a mesh plate (9) being fixedly connected to the inside of the absorption tower body (1), the mesh plate (9) being located below the shell (10), and the spray head (11) being located above the shell (10).

7. The absorption tower for preparing and processing electronic grade sulfuric acid according to claim 1, characterized in that: A gas-liquid separator (8) is fixedly connected to the inner side of the absorption tower body (1), and the gas-liquid separator (8) is located above the spray pipe (3). A plurality of circular holes are provided on the absorption tower body (1), and the inside of the circular holes is fixedly connected to the outer side of the suction pipe (13). A hole is provided on the absorption tower body (1), and the inside of the hole is fixedly connected to the outer side of the spray pipe (3).

8. The absorption tower for preparing and processing electronic grade sulfuric acid according to claim 1, characterized in that: The full reaction component (12) further comprises an annular plate (1201), the outer side of the annular plate (1201) is fixedly connected to the inner side of the shell (10), the bottom end of the annular plate (1201) is fixedly connected to a symmetrical retaining plate (1202), the bottom end of the retaining plate (1202) is movably connected to an annular slide plate (1203), both ends of the outer side of the annular slide plate (1203) are movably connected to annular groove plates (1205), and the outer side of the annular groove plate (1205) is fixedly connected to the inner side of the shell (10).

9. The absorption tower for preparing and processing electronic grade sulfuric acid according to claim 8, characterized in that: The bottom end of the annular slide plate (1203) is fixedly connected to a gear ring (1204), an annular slide groove is provided on the housing (10), the gear ring (1204) is movably connected to the inner side of the circular slide groove, the outer side of the gear ring (1204) is movably connected to a rotating gear (1211), the rotating gear (1211) and the gear ring (1204) are meshed via tooth grooves, and the inner side of the rotating gear (1211) is connected to a driving motor (1210) via a coupling.

10. An absorption tower for preparing and processing electronic grade sulfuric acid according to claim 9, characterized in that: The top of the annular slide plate (1203) is fixedly connected to a plurality of fixing columns (1206), the outer sides of the fixing columns (1206) are movably connected to connecting pieces (1207), one end of the connecting pieces (1207) is fixedly connected to the outer sides of the spoiler (1208), the inner sides of the spoiler (1208) are movably connected to round rods (1209), the top of the round rods (1209) is fixedly connected to the bottom end of the annular plate (1201), and the bottom end of the round rods (1209) is fixedly connected to the top of the annular slide plate (1203).

Citation Information

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