Large-view-field integrated microscopic imaging device based on single double-sided metamaterial lens
By adopting the double-sided phase coordinated modulation and polarization control of a single-piece double-sided superlens in the microscope in the microscope, the problem of field reduction in traditional microscopes at high magnification is solved, and large field of view and high resolution microscope imaging is realized, and the structure of the optical system is simplified.
Patent Information
- Application Number
- CN202510358613.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-25
- Publication Date
- 2025-06-13
AI Technical Summary
When traditional optical microscopes use high-magnification objectives, the field of view will inevitably be reduced, making it impossible to achieve high-resolution and large-field imaging at the same time. At the same time, the complex optical system makes the microscope complex, bulky and expensive, limiting its promotion and application.
A large field of view integrated microscope imaging device based on a single-piece double-sided superstructure lens is adopted to realize high-resolution microscope imaging within a large field of view through the double-sided phase coordinated modulation and polarization control of a single-piece double-sided superstructure lens.
High-resolution microscopy imaging in a large field of view without mechanical movement or complex algorithm processing is achieved, and the effective imaging area is expanded to several times the single lens, maintaining resolution, and simplifying the optical system structure.
Smart Images
Figure CN120143432A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of microscopic imaging technology, and particularly to a large-field integrated microscopic imaging device based on a single-chip double-sided metasurface lens. Background Art
[0002] In the field of optical microscopic imaging, simultaneously obtaining a large field of view and high resolution is one of the important goals of optical microscopic imaging. However, due to the limitation of the spatial bandwidth product of its imaging principle, the field of view of a traditional optical microscope necessarily decreases when using a high-magnification objective lens, and it is impossible to achieve both high resolution and a large field of view imaging. On the other hand, the complex optical system also makes the microscope become more and more complex, bulky and expensive, greatly limiting the popularization and application of the microscope. In order to break through the bottleneck of the coupling between the magnification and the field of view range caused by the single optical axis of lens imaging, lensless microscopic imaging and bionic compound eye structure lens arrays have been proposed to achieve large-field and high-resolution imaging. However, the lensless imaging process is not directly visualizable, and the final image quality depends on the image processing algorithm. In recent years, people have improved the effect of the reconstructed image by proposing various improved algorithms, but still rely on the post-processing of the image; the artificial compound eye device either requires a curved photodetector, or has serious image distortion, or lacks self-adjusting ability. Therefore, it is urgent to improve these problems. Summary of the Invention
[0003] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a large-field integrated microscopic imaging device based on a single-chip double-sided metasurface lens. Through the double-sided phase collaborative modulation and polarization control of the single-chip double-sided metasurface lens, high-resolution microscopic imaging within a large field of view is achieved without mechanical movement or complex algorithm processing. At the same time, the integration design simplifies the structure of the optical system and breaks through the spatial bandwidth product limitation of traditional microscopes.
[0004] To achieve the above purpose, the present invention provides a large-field integrated microscopic imaging device based on a single-chip double-sided metasurface lens, including: a light source, a single-chip double-sided metasurface lens, a left-handed circular polarizer, a right-handed circular polarizer, and an image sensor; wherein, the left-handed circular polarizer is arranged behind the light source, the single-chip double-sided metasurface lens is arranged behind the left-handed circular polarizer, the right-handed circular polarizer is arranged behind the single-chip double-sided metasurface lens, and the image sensor is located behind the right-handed circular polarizer; the object to be imaged is located between the light source and the left-handed circular polarizer.
[0005] The single-chip double-sided metasurface lens includes a substrate, and a first-side metasurface lens and a second-side metasurface lens respectively located on both sides of the substrate. The phases of the first-side metasurface lens and the second-side metasurface lens of the single-chip double-sided metasurface lens satisfy the following polynomial distribution:
[0006]
[0007] Among them, on the two-dimensional plane of the first metasurface lens, at a distance r from the center of the first metasurface lens 1 the phase distribution is φ 1 (r 1 ); R 1 is the radius of the first metasurface lens; is the general term of the first polynomial; a i is the coefficient of the first polynomial; N is the order of the first polynomial, and N≥10; i is the power number of the first polynomial; on the two-dimensional plane of the second metasurface lens, at a distance r from the center of the second metasurface lens 2 the phase distribution is φ 2 (r 2 ); R 2 is the radius of the second metasurface lens; is the general term of the second polynomial; b j is the coefficient of the second polynomial; M is the order of the first polynomial, and M≥10; j is the power number of the second polynomial.
[0008] Beneficial effects: In the present invention, the single-chip double-sided metasurface lens realizes precise phase control by synergistically optimizing the phase distribution polynomial coefficients, corrects the aberration of the off-axis field of view, significantly improves the problem of image quality degradation at the edge of the field of view, expands the effective imaging area to several times or even dozens of times that of a single lens, while maintaining the resolution, breaking through the limitation of the spatial bandwidth product of a single lens. The single-chip integrated design eliminates the need for multi-layer lens alignment and assembly, simplifies the manufacturing process, reduces the risk of assembly errors compared with traditional lens groups. The combination of the left-handed circular polarizer and the right-handed circular polarizer enables the present invention to polarization-selectively isolate stray light, improve the imaging contrast, form a unidirectional optical path control, avoid the interference of inter-surface reflected light on the sensor, and improve the imaging signal-to-noise ratio.
[0009] Further, the left-handed circular polarizer is located on the outgoing light path of the light source, the single-chip double-sided metasurface lens is located on the outgoing light path of the left-handed circular polarizer, and the right-handed circular polarizer is located on the outgoing light path of the single-chip double-sided metasurface lens.
[0010] Further, the periodic arrangement pattern of the metasurface lenses in the single-chip double-sided metasurface lens is a square lattice arrangement or a hexagonal lattice arrangement.
[0011] Beneficial effects: The lattice arrangement pattern can affect and adjust the equivalent refractive index distribution. The hexagonal lattice can improve the filling density of nanostructures and enhance the light field control efficiency, while the square lattice simplifies the processing technology and reduces the manufacturing cost.
[0012] Further, the geometric shape of the metasurface lenses in the single-chip double-sided metasurface lens is rectangular, square, circular, elliptical or polygonal.
[0013] Beneficial effects: Various symmetric and asymmetric geometric shapes can compensate for anisotropic aberrations, and the polygonal design increases the structural freedom, optimizes the phase distribution in specific application scenarios, and can adapt to the requirements of different wavelengths and numerical apertures. For example, the square unit structure is beneficial for broadband operation, while the circular structure can improve the correction ability of symmetric aberrations.
[0014] Further, the arrangement period of the nanocolumns in the first surface metasurface lens of the single-chip double-sided metasurface lens is the same as the arrangement period of the nanocolumns in the second surface metasurface lens of the single-chip double-sided metasurface lens.
[0015] Further, the arrangement period of the nanocolumns in the first surface metasurface lens of the single-chip double-sided metasurface lens is different from the arrangement period of the nanocolumns in the second surface metasurface lens of the single-chip double-sided metasurface lens.
[0016] Further, the thickness of the single-chip double-sided metasurface lens is 1.4 mm to 1.8 mm.
[0017] Beneficial effects: The substrate thickness of 1.4 mm to 1.8 mm balances the structural strength and the optical path requirements, avoids introducing additional aberrations due to excessive thickness, is compatible with microelectronic processes, is suitable for large-scale production, and can be directly integrated with image sensors.
[0018] Further, the working wavelength between the light source and the image sensor is 460 nm to 480 nm.
[0019] Beneficial effects: The working wavelength of 460 nm to 480 nm is suitable for the fluorescence imaging band of biological samples.
[0020] Further, the image sensor is integrated with the single-chip double-sided metasurface lens by means of external gluing, clamping fixation, or wafer-level packaging.
[0021] In summary, compared with the prior art, based on the double-layer phase collaborative regulation of the single-chip double-sided metasurface lens, the present invention eliminates off-axis aberrations, realizes large-field-of-view imaging without mechanical scanning, and does not require complex algorithm post-processing while maintaining sub-micron resolution and working distance; its single-chip integrated design has a thickness of no more than 2 mm, eliminating the lens group alignment step, having both microelectronic process compatibility and the advantage of direct integration with sensors, and can flexibly adapt to different field-of-view and resolution requirements by adjusting phase parameters, being suitable for mass production and multi-scenario applications. Description of the Drawings
[0022] Figure 1 It is a schematic structural diagram of a large-field-of-view integrated microscopic imaging device based on the single-chip double-sided metasurface lens of the present invention;
[0023] Figure 2 It is a schematic diagram of the working ray tracing of the single-chip double-sided metasurface lens;
[0024] Figure 3 Schematic diagram of the phase distribution of the first-side metasurface lens and the second-side metasurface lens of Example 1;
[0025] Figure 4 Comparison diagram of the focusing simulation results of the single-chip double-sided metasurface lens of Example 1 when incident in each field of view and the focusing simulation results of a single lens when incident in each field of view;
[0026] Figure 5 Optical micrographs of the first-side metasurface lens and the second-side metasurface lens of Example 1;
[0027] Figure 6 Schematic diagram of the large-field imaging obtained by the large-field integrated microscopy device based on the single-chip double-sided metasurface lens of the present invention;
[0028] Figure 7 Comparison diagram of the optical micrograph of a biological sample and the large-field micrograph obtained by the large-field integrated microscopy device based on the single-chip double-sided metasurface lens of the present invention;
[0029] Reference numeral description: 1, light source; 2, left-handed circular polarizer; 3, single-chip double-sided metasurface lens; 4, right-handed circular polarizer; 5, image sensor. Detailed implementation manners
[0030] The present invention will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention, and cannot be used to limit the protection scope of the present invention.
[0031] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more.
[0032] In the description of the invention, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.
[0033] To make the above objects, features, and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0034] Figure 1 The structural schematic diagram of the large-field integrated microscopic imaging device based on a single-chip double-sided metasurface lens of the present invention is as follows. As Figure 1 shown, the large-field integrated microscopic imaging device based on a single-chip double-sided metasurface lens of the present invention includes: a light source 1, a left-handed circular polarizer 2, a single-chip double-sided metasurface lens 3, a substrate 3-1, a right-handed circular polarizer 4, and an image sensor 5.
[0035] Among them, the left-handed circular polarizer 2 is disposed behind the light source 1, and the left-handed circular polarizer 2 is located on the light exit path of the light source 1; the single-chip double-sided metasurface lens 3 is disposed behind the left-handed circular polarizer 2, and the single-chip double-sided metasurface lens 3 is located on the light exit path of the left-handed circular polarizer 2; the object to be imaged 6 is located between the left-handed circular polarizer 2 and the single-chip double-sided metasurface lens 3; the right-handed circular polarizer 4 is located behind the single-chip double-sided metasurface lens 3, and the right-handed circular polarizer 4 is located on the light exit path of the single-chip double-sided metasurface lens 3; the image sensor 5 is located behind the right-handed circular polarizer 4. The single-chip double-sided metasurface lens 3, the right-handed circular polarizer 4, and the image sensor 5 are directly integrated together to form a large-field microscopic imaging system, and can be integrated by means such as external glue mounting, clamping fixation, and wafer-level packaging. The single-chip double-sided metasurface lens 3 is a cascaded multi-layer metasurface lens, which jointly modulates the light field through the first-side metasurface lens and the second-side metasurface lens prepared on both sides of the substrate, optimizes the off-axis aberration, breaks the imaging space-bandwidth product limit, expands the imaging field of view without sacrificing resolution and without increasing the working distance, realizes large-field and high-resolution imaging without mechanical movement, and the single-chip integrated design eliminates the need for multi-layer lens alignment and assembly, simplifies the manufacturing process, reduces the risk of assembly errors compared with traditional lens groups, and the combination of the left-handed circular polarizer and the right-handed circular polarizer enables the present invention to selectively isolate stray light in polarization, improve the imaging contrast, form a unidirectional optical path control, and avoid reverse light interference with the sensor.
[0036] Specifically, the single-chip double-sided metasurface lens 3 includes a first-side metasurface lens and a second-side metasurface lens respectively located on both sides of the substrate 3-1 of the single-chip double-sided metasurface lens 3. Since the metasurface lens is a two-dimensional structure, it cannot exist independently and needs to rely on the substrate 3-1. The substrate can be a quartz wafer. Here, double-sided means that there is a layer of metasurface lens on each of the two surfaces of the quartz wafer. The material of the metasurface lens can be silicon nitride. The phases of the single-chip double-sided metasurface lens 3 in the first-side metasurface lens and the second-side metasurface lens satisfy the following polynomial distribution:
[0037]
[0038] Among them, on the two-dimensional plane of the first-side metasurface lens, the phase distribution at a distance r 1 from the center of the first-side metasurface lens is φ 1 (r 1 );R 1 is the radius of the first-side metasurface lens; is the general term of the first polynomial; a i is the coefficient of the first polynomial; N is the order of the first polynomial, and N≥10; i is the power number of the first polynomial; on the two-dimensional plane of the second-side metasurface lens, the phase distribution at a distance r 2 from the center of the second-side metasurface lens is φ 2 (r 2 );R 2 is the radius of the second-side metasurface lens; is the general term of the second polynomial; b j is the coefficient of the second polynomial; M is the order of the first polynomial, and M≥10; j is the power number of the second polynomial.
[0039] The present invention realizes complementary aberration correction through the double-sided independent high-order polynomials of the single-chip double-sided metasurface lens, significantly improves off-axis aberration, solves the problem of deterioration of image quality at the edge of the large field of view, expands the effective imaging field of view, realizes precise control of off-axis light rays by optimizing the coefficients, makes the focusing performance of the entire field of view better than that of a single lens, the high-order polynomial (at least 10th order) provides complex phase compensation ability, breaks through the spatial bandwidth product limit, improves the imaging resolution, and at the same time expands the field of view, showing that the field of view can be expanded to several times that of a traditional single lens.
[0040] Preferably, in the single-chip double-sided metasurface lens 3 of the present invention, the geometric shape of the metasurface lens can be rectangular, square, circular, elliptical or polygonal. The periodic arrangement pattern of the metasurface lens in the single-chip double-sided metasurface lens 3 can be a square lattice arrangement or a hexagonal lattice arrangement. Moreover, the nanocolumn arrangement period in the first-side metasurface lens of the single-chip double-sided metasurface lens 3 and the nanocolumn arrangement period in the second-side metasurface lens of the single-chip double-sided metasurface lens 3 can be the same or different. The working ray tracing schematic diagram of the single-chip double-sided metasurface lens is as Figure 2As shown, the light rays emitted from the object points in each field of view are modulated by the first metasurface lens and the second metasurface lens, and are focused on the corresponding positions on the image plane. The first metasurface lens and the second metasurface lens greatly alleviate the off-axis aberration, and achieve high-quality focusing and imaging within a large field of view.
[0041] The first metasurface lens and the second metasurface lens of the present invention are fabricated on both sides of a single substrate. Based on the double-layer phase collaborative regulation of the single-chip double-sided metasurface lens, the off-axis aberration is improved, and the information of the entire field of view can be obtained without mechanical movement. Large-field and high-resolution microscopic imaging is achieved without sacrificing resolution and without increasing the working distance. Secondly, the present invention has scalability, and the field of view and resolution to be achieved can be freely controlled according to different actual needs to be applicable to different scenarios. Moreover, the present invention only relates to a single-chip double-sided metasurface lens, and there is no need to align and assemble multiple layers of lenses after the metasurface lens is processed. Furthermore, the single-chip double-sided metasurface lens used in the present invention belongs to a flat lens, which is ultrathin in volume, compatible with microelectronic manufacturing processes, suitable for large-scale production, and the flat ultrathin structure is convenient for integration with an image sensor.
[0042] To better understand the solution of the present invention, the following will be further described in conjunction with specific embodiments.
[0043] Embodiment 1
[0044] Figure 3 It is a schematic diagram of the phase distribution of the first metasurface lens and the second metasurface lens of the single-chip double-sided metasurface lens in Embodiment 1. As Figure 3 shown, Figure 3 the left figure in [Figure] is a schematic diagram of the phase distribution of the first metasurface lens. The phase gradient of the first metasurface lens is relatively large, playing a major focusing function. Figure 3 the right figure in [Figure] is a schematic diagram of the phase distribution of the second metasurface lens. The phase gradient of the second metasurface lens is relatively gentle, playing a phase optimization function. In this embodiment, the metasurface lens adopts a square geometric shape, and its designed wavelength is λ = 470 nm. Then the phase distribution of each metasurface lens under two polarizations is specifically:
[0045]
[0046] where R 1 = 0.85 mm is the radius of the first metasurface lens, and R 2 = 0.26 mm is the radius of the second metasurface lens. The optimization coefficients are shown in the following table.
[0047] <![CDATA[R 1 / μm]]> <![CDATA[a 1 > <![CDATA[a 2 > <![CDATA[a 3 > <![CDATA[a 4 > <![CDATA[a 5 > 850 -5394.6405 263.4396 621.1472 -5067.2906 17560.1499 a6 a7 a8 a9 a10 -30411.9228 19064.6337 13024.0453 -9674.6432 -31677.0254
[0048] <![CDATA[R 2 / μm]]> <![CDATA[b 1 > <![CDATA[b 2 > <![CDATA[b 3 > <![CDATA[b 4 > <![CDATA[b 5 > 260 -124.8026 -38.4245 322.0229 -1222.8887 2695.5611 <![CDATA[b 6 > <![CDATA[b 7 > <![CDATA[b 8 > <![CDATA[b 9 > <![CDATA[b 10 > -3557.0712 2821.4973 -1124.7613 -307.1687 490.8243
[0049] To verify the accuracy and feasibility of the design in Example 1, the performance of the designed single-chip double-sided metasurface lens was first evaluated using simulation software. Since the commercial simulation software (Lumerical FDTD Solutions) requires a large amount of computing resources and a long computing time for simulating large-aperture metasurface lenses, the method of using Matlab for diffraction integral numerical calculation was selected for simulation. The simulation results are as Figure 4 shown, Figure 4 (a) shows the focusing results of the designed single-chip double-sided metasurface lens at different object heights, Figure 4 (b) shows the focusing results of a single lens with the same aperture and numerical aperture. By comparison, it can be clearly found that the single-chip double-sided metasurface lens of the present invention has very excellent focusing ability in the entire field of view.
[0050] Example 2
[0051] In this example, a single-chip double-sided metasurface lens was fabricated by electron beam lithography and dry etching. Figure 5 Shown are the optical microscope photos corresponding to the first-side metasurface lens and the second-side metasurface lens. The apertures of the first-side metasurface lens and the second-side metasurface lens are 1.7 mm and 0.52 mm respectively, the designed object-image distances are 0.962 mm and 2.274 mm respectively, the substrate thickness is 1.6 mm, and the working wavelength is 470 nm. The single-chip double-sided metasurface lens was integrated into an image sensor according to the method of the present invention, and the US Air Force target was used as the imaging object for imaging. The full-field imaging diagram and the detail resolution diagram are as Figure 6 (a) and Figure 6 (b) shown. The resolution is comparable to that of a single lens with the same aperture and numerical aperture (≈0.98 μm), while the effective field of view is greatly improved compared to the single lens.
[0052] The large-field integrated microscopic imaging technology based on the single-chip double-sided metasurface lens of the present invention was used to image some biological samples, such as Figure 7 shown. Figure 7 (a) shows the imaging results of the transverse section sample of pine stem cells under the microscopic imaging technology shown in the present invention ( Figure 7 the left figure in (a)) and the optical microscope photo corresponding to the resolution ( Figure 7 the right figure in (a)). It can be seen that the microscopic images obtained by the large-field integrated microscopic imaging technology based on the single-chip double-sided metasurface lens shown in the present invention have good contrast, clear details, and a larger field of view. The white dotted circle is the designed effective field of view. In addition, other biological samples photographed using the integrated microscopic imaging technology of the present invention, such as Figure 7 (b), Figure 7 (c), and Figure 7 (d) shown, are samples of bee wings (Figure 7 (Part (b)), Ascaris sliced specimen Figure 7 (Part (c)), and cockroach mouthpart sliced specimen Figure 7 (Part (d)).
[0053] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device.
[0054] The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be regarded as the protection scope of the present invention.
Claims
1. A large-field integrated microscopic imaging device based on a single-chip double-sided meta-lens, characterized in that: include: light source; A left-handed circular polarizer is arranged behind the light source, and the left-handed circular polarizer is located on the outgoing light path of the light source, and the object to be imaged is located between the light source and the left-handed circular polarizer; A single double-sided meta-lens is disposed behind the left-handed circular polarizer, and the single double-sided meta-lens is located on the outgoing light path of the left-handed circular polarizer; A right-handed circular polarizer is disposed behind the single-chip double-sided meta-lens, and the right-handed circular polarizer is located on the outgoing light path of the single-chip double-sided meta-lens; An image sensor is located behind the right-handed circular polarizer; The monolithic double-sided metalens comprises a substrate, and a first-side metalens and a second-side metalens respectively located on both sides of the substrate. The phases of the first-side metalens and the second-side metalens of the monolithic double-sided metalens satisfy the following polynomial distribution: Among them, on the two-dimensional plane of the first metalens, the phase distribution at a distance r1 from the center of the first metalens is φ1(r1); R1 is the radius of the first metalens; is the general term of the first polynomial; a i is the coefficient of the first polynomial; N is the order of the first polynomial, and N≥10; i is the power of the first polynomial; on the two-dimensional plane of the second metalens, the phase distribution at a distance of r2 from the center of the second metalens is φ2(r2); R2 is the radius of the second metalens; is the general term of the second polynomial; b j is the coefficient of the second polynomial; M is the order of the first polynomial, and M≥10; j is the power of the second polynomial.
2. The large-field integrated microscopic imaging device according to claim 1, characterized in that: The periodic arrangement of the metalenses in the single-chip double-sided metalens is a tetragonal lattice arrangement or a hexagonal lattice arrangement.
3. The large-field integrated microscopic imaging device according to claim 1, characterized in that: The geometric shape of the metalens in the single-chip double-sided metalens is any one or more of a rectangular, square, circular, elliptical or polygonal shape.
4. The large-field integrated microscopic imaging device according to claim 1, characterized in that: The nano-column arrangement period of the monolithic double-sided meta-lens in the first-sided meta-lens is the same as the nano-column arrangement period of the monolithic double-sided meta-lens in the second-sided meta-lens.
5. The large-field integrated microscopic imaging device according to claim 1, characterized in that: The nano-column arrangement period of the monolithic double-sided meta-lens in the first-sided meta-lens is different from the nano-column arrangement period of the monolithic double-sided meta-lens in the second-sided meta-lens.
6. The large-field integrated microscopic imaging device according to claim 1, characterized in that: The thickness of the single-piece double-sided meta-lens is 1.4 mm to 1.8 mm.
7. The large-field integrated microscopic imaging device according to claim 1, characterized in that: The operating wavelength between the light source and the image sensor is 460nm to 480nm.
8. The large-field integrated microscopic imaging device according to claim 1, characterized in that: The image sensor is integrated with the monolithic double-sided meta-lens by external gluing, clamping or wafer packaging.