Modular integrated base for semiconductor production

Abstract

The invention provides a modularized integrated base for semiconductor production, which comprises a base body, the base body comprises a single body I, a single body II and a single body III, an interface board D and an interface board E are mounted on the single body I, an interface board A, an interface board B and an interface board F are mounted on the single body II, and an interface board C is mounted on the single body III. According to the invention, pipeline installation is modularly designed, various installation accessories are intensively designed on the interface board, the interface board is installed on the anti-micro-vibration base, the anti-micro-vibration base and pipeline installation are integrally designed, the pipelines are directly connected through accessory interfaces on the interface board during installation, the installation is rapid and convenient, and the construction period is shortened; all accessories are connected in a bolting mode, the universality is high, and disassembly and maintenance are convenient; meanwhile, the supporting legs are in bolted connection with the square steel tube supporting legs through the aluminum profile supporting legs, adjusting bolts are installed at the bottoms of the aluminum profile supporting legs, height adjustment of the supporting legs can be achieved, and meanwhile the micro-vibration prevention capacity of the base can be guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit process devices, and specifically to a modular integrated base for semiconductor production. Background Art

[0002] At present, the semiconductor industry is developing rapidly, and the upgrading of semiconductor manufacturing precision production equipment is also getting faster and faster. Correspondingly, there are more and more installations and renovations of semiconductor precision production equipment. For semiconductor factories, especially the construction of semiconductor factories in the chip manufacturing industry, the construction period is a very crucial factor, which often determines whether the product can succeed in the market. At present, vacuum pumps, pipelines, circuits, etc. in semiconductor factories are all constructed on site, and the progress plan is difficult to control. The installation and deployment period is long, and the on-site construction occupies a large proportion of the entire project time, and there are many potential safety and quality hazards; when it is necessary to modify the equipment layout, the demolition is also time-consuming and laborious.

[0003] In addition, semiconductor manufacturing precision production equipment has higher and higher requirements for precision, and the equipment is also more and more sensitive to environments such as micro-vibrations. A little micro-vibration will reduce the production yield of the equipment, or even make the equipment unable to work normally. Therefore, the isolation of micro-vibrations has become more and more important. Traditional anti-microvibration bases include concrete bases and steel structure bases, and it is often necessary to open holes at the top of the base for on-site installation of upper equipment pipelines. How to modularize the pipeline installation and integrate it on the anti-microvibration base, which can not only achieve the anti-microvibration function but also simplify the pipeline installation and shorten the construction period is an urgent problem to be solved. In addition, the traditional base design structure is fixed and cannot be adjusted for lifting. Even if some bases can be lifted, they usually adopt the form of foot cups, which reduces the anti-microvibration performance of the base and is usually applicable to equipment with lower anti-microvibration requirements and cannot meet the anti-microvibration requirements of the base. Summary of the Invention

[0004] The purpose of the present invention is to provide a modular integrated base for semiconductor production to solve the problems in the above background art.

[0005] The technical solution of the present invention is realized as follows: A modular integrated base for semiconductor production includes a base body, and the base body includes a monomer one, a monomer two, and a monomer three. An interface board D and an interface board E are installed on the monomer one, an interface board A, an interface board B, and an interface board F are installed on the monomer two, and an interface board C is installed on the monomer three.

[0006] The first monomer includes a first roof beam, which is welded by four square steel bars into a rectangular frame structure. Inside the first roof beam, three parallel first longitudinal beams are welded. Among them, a first cross beam is perpendicularly welded between the leftmost first longitudinal beam and the first roof beam. An interface plate D is installed inside the first roof beam on the right side of the first monomer. An interface plate E is installed between the first roof beam and the first cross beam. The interface plate D includes a connecting plate A. Two union joints are installed on the connecting plate A in a way of passing through the plate. A connecting nut is installed on the top of the union joint. An installation plate is perpendicularly installed in the middle of one side of the connecting plate A. The upper part of the installation plate is bolted and fixed to the first roof beam through bolt D. The interface plate E includes a connecting plate B. A left installation plate and a right installation plate are respectively perpendicularly installed in the middle of both sides of the connecting plate B. A first straight-through joint, a second straight-through joint, a third straight-through joint, a fourth straight-through joint and a fifth straight-through joint are installed in a row on the connecting plate B in a way of passing through the plate at one time. A sleeve coupling joint C is installed on the connecting plate B near the right side in a way of passing through the plate. A connecting device A and a connecting device B are respectively installed in a way of passing through the plate on both sides of the connecting plate B, on the left and right sides of the sleeve coupling joint C. The connecting device A and the connecting device B have the same structure and both include a check valve. A connecting pipe is connected to the top of the check valve. A sleeve coupling joint D is connected to the top of the connecting pipe. The sleeve coupling joint D is installed in the connecting plate B in a way of passing through the plate. A sixth straight-through joint is also installed at the bottom of the fourth straight-through joint. A side plate is perpendicularly installed on one side of the connecting plate B. Valves are respectively installed on the upper and lower parts of the side plate. The upper parts of the left installation plate and the right installation plate are bolted and fixed to the first cross beam and the first roof beam respectively through bolt E.

[0007] The second monomer includes a second roof beam, which is welded by four square steel bars into a rectangular frame structure. Two second longitudinal beams are welded inside the second roof beam. Among them, a second cross beam is perpendicularly welded between the left second longitudinal beam and the second roof beam. An interface plate C is installed on the right second longitudinal beam. The interface plate C includes an annular support plate. A reducer is installed at the bottom of the annular support plate. A floating ring is connected to the bottom of the reducer. A support plate A is perpendicularly installed on one side of the annular support plate. The support plate A is bolted and fixed to the second longitudinal beam through bolt C.

[0008] The single unit three includes a top beam three, which is welded into a rectangular frame structure by four square steel bars. Inside the top beam three, a longitudinal beam three is welded. Between the longitudinal beam three and the left top beam three, two left cross beams are welded. Between the longitudinal beam three and the right top beam three, a right cross beam is welded. An interface plate A is installed on the right cross beam. Inside the left top beam three of the single unit three, an interface plate B is installed. Inside the right top beam three of the single unit three, an interface plate F is installed. The interface plate A includes an L-shaped support plate A. At one corner of the bottom plate of the L-shaped support plate A, a card sleeve joint A is installed. Near the middle position of the bottom of the L-shaped support plate, a card sleeve joint B is installed. At the other corner of the bottom plate of the L-shaped support plate A, a face seal pipe joint A is installed. A notch is opened on the bottom plate of the L-shaped support plate A. The vertical plate of the L-shaped support plate A is bolted and fixed to the right cross beam through bolt A. The interface plate B includes an L-shaped support plate B. A circular opening is opened on the bottom plate of the L-shaped support plate B. A connecting pipe A is installed at the bottom of the opening. The vertical plate of the L-shaped support plate B is bolted and fixed to the top beam three through bolt B. The interface plate F includes a T-shaped support plate. At both ends on the left side of the T-shaped support plate, a left support plate one and a right support plate one are vertically connected respectively. At one end on the right side of the T-shaped support plate, a right support plate is vertically connected. A face seal pipe joint B is installed through the plate on the left support plate one. The bottom of the face seal pipe joint B is connected with a check valve B. A hose is installed at the bottom of the vertical plate of the T-shaped support plate. One end of the hose is connected with a connecting pipe B. The other end of the connecting pipe B is connected with a joint. Two concentric speed reducers are installed through the plate on the left support plate two. The bottom of the concentric speed reducer is connected with a hose joint. The top of the concentric speed reducer is connected with a card sleeve joint E. The bottom of the right support plate is bolted and installed with a card sleeve support device through bolt F. The upper part of the T-shaped support plate is bolted and fixed to the top beam three through bolt G.

[0009] The card sleeve joint A is installed and fixed to the L-shaped support plate A through a plate-through fixator A. The card sleeve joint B is installed and fixed to the L-shaped support plate A through a plate-through fixator B. The face seal pipe joint A is installed and fixed to the L-shaped support plate A through a plate-through fixator C.

[0010] The single unit one and the single unit two have the same length. The long sides of the single unit one and the single unit two are bolted and fixed. The length of the single unit three is the same as the sum of the widths of the single unit one and the single unit two. The long side of the single unit three is bolted and fixed to the short sides of the single unit one and the single unit two.

[0011] The union joint is installed and fixed to the connecting plate A through a plastic cushion plate.

[0012] The card sleeve joint C, the connecting device A and the connecting device B are all installed and fixed to the connecting plate B through a plate-through fixator D.

[0013] A plurality of upper mounting holes are equidistantly formed in the annular support plate, and a plurality of lower mounting holes are equidistantly formed in the floating ring.

[0014] The specifications of the first straight-through joint, the second straight-through joint, the third straight-through joint, the fourth straight-through joint, and the fifth straight-through joint are all 3 / 4".

[0015] The specification of the sixth straight-through joint is 1 / 2".

[0016] A plurality of legs are bolted to the bottom of the base body 0, and the outer sides of the peripheral legs are bolted and fixed through four connecting rods. The legs include aluminum profile legs, and a square steel pipe leg is bolted to the bottom of the aluminum profile leg. An adjustment bolt is installed in the middle of the bottom of the aluminum profile leg, and the height of the leg is adjusted through the adjustment bolt.

[0017] The beneficial effects of the present invention are as follows: In the present invention, through the modular design of pipeline installation, various installation fittings are centrally designed on the interface plate, and the interface plate is installed on the anti-vibration base, realizing the integrated design of the anti-vibration base and pipeline installation. When installing the pipeline, it is directly connected through the fitting interfaces on the interface plate, with rapid and convenient installation, shortening the construction period; moreover, the legs, the interface plate, and each fitting are all connected by bolt connection, with strong versatility and convenient disassembly and maintenance; at the same time, the legs adopt the bolt connection of aluminum profile legs and square steel pipe legs, and an adjustment bolt is installed at the bottom of the aluminum profile legs, so that the height of the legs can be adjusted, and at the same time, the anti-vibration ability of the base can be ensured. Description of the Drawings

[0018] Figure 1 It is a schematic structural diagram of the present invention.

[0019] Figure 2 It is a schematic structural diagram of interface plate A of the present invention.

[0020] Figure 3 It is a schematic structural diagram of interface plate B of the present invention.

[0021] Figure 4 It is a schematic structural diagram of interface plate C of the present invention.

[0022] Figure 5 It is a schematic structural diagram of interface plate D of the present invention.

[0023] Figure 6 It is a schematic structural diagram of interface plate E of the present invention.

[0024] Figure 7 It is a schematic structural diagram of interface plate F of the present invention.

[0025] Figure 8 It is a schematic structural diagram of connecting device B of the present invention.

[0026] Figure 9This is a schematic structural diagram of the outrigger of the present invention.

[0027] In the figure: 0 - base body, 01 - monomer one, 011 - top beam one, 012 - longitudinal beam one, 013 - cross beam one, 02 - monomer two, 021 - top beam two, 022 - longitudinal beam two, 023 - cross beam two, 03 - monomer three, 031 - top beam three, 032 - longitudinal beam three, 033 - left cross beam, 034 - right cross beam, 04 - connecting rod, 05 - outrigger, 051 - aluminum profile outrigger, 052 - square steel pipe outrigger, 053 - adjustment bolt, 1 - interface plate A, 101 - L-shaped support plate A, 102 - ferrule connector A, 103 - ferrule connector B, 104 - face seal pipe joint A, 105 - notch, 106 - through-plate fixator A, 107 - through-plate fixator B, 108 - metal through-plate fixator C, 109 - bolt A, 2 - interface plate B, 201 - L-shaped support plate B, 202 - opening, 203 - connecting pipe A, 204 - bolt B, 3 - interface plate C, 301 - annular support plate, 302 - reducer, 303 - floating ring, 304 - support plate A, 305 - upper mounting hole, 306 - lower mounting hole, 307 - bolt C, 4 - interface plate D, 401 - connecting plate A, 402 - union joint, 403 - connecting nut, 404 - mounting plate, 405 - plastic cushion plate, 406 - bolt D, 5 - interface plate E, 501 - connecting plate B, 502 - left mounting plate, 503 - right mounting plate, 504 - straight-through joint one, 505 - straight-through joint two, 506 - straight-through joint three, 507 - straight-through joint four, 508 - straight-through joint five, 509 - ferrule connector C, 510 - connecting device A, 511 - connecting device B, 5111 - check valve A, 5112 - connecting pipe, 5113 - ferrule connector D, 512 - straight-through joint six, 513 - side plate, 514 - valve, 515 - through-plate fixator D, 516 - bolt E, 6 - interface plate F, 601 - T-shaped support plate, 602 - left support plate one, 603 - left support plate two, 604 - right support plate, 605 - face seal pipe joint B, 606 - check valve B, 607 - hose, 608 - connecting pipe B, 609 - joint, 610 - concentric reducer, 611 - hose joint, 612 - ferrule connector E, 613 - ferrule support device, 614 - bolt F, 615 - bolt G. Detailed implementation manners

[0028] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0029] As Figures 1-9As shown in the figure, a modular integrated base for semiconductor production includes a base body 0, and the base body 0 includes a monomer one 01, a monomer two 02, and a monomer three 03. An interface board D4 and an interface board E5 are installed on the monomer one 01, an interface board A1, an interface board B2, and an interface board F6 are installed on the monomer two 02, and an interface board C3 is installed on the monomer three 03.

[0030] The monomer one 01 includes a top beam one 011, and the top beam one 011 is welded into a rectangular frame structure by four square steel bars. Three parallel longitudinal beams one 012 are welded inside the top beam one 011. A cross beam one 013 is perpendicularly welded between the leftmost longitudinal beam one 012 and the top beam one 011. The interface board D4 is installed inside the top beam one 011 on the right side of the monomer one 01, and the interface board E5 is installed between the top beam one 011 and the cross beam one 013. The interface board D includes a connecting plate A401, and two union joints 402 are installed on the connecting plate A401 in a way of passing through the plate. A connecting nut 403 is installed on the top of the union joint 402. An installation plate 404 is perpendicularly installed in the middle of one side of the connecting plate A401, and the upper part of the installation plate 404 is bolted and fixed to the top beam one 011 by a bolt D406. The interface board E5 includes a connecting plate B501, a left installation plate 502 and a right installation plate 503 are perpendicularly installed in the middle of both sides of the connecting plate B501 respectively. A straight-through joint one 504, a straight-through joint two 505, a straight-through joint three 506, a straight-through joint four 507, and a straight-through joint five 508 are installed on the connecting plate B501 in a row by passing through the plate at one time. A ferrule joint C509 is installed on the connecting plate B501 by passing through the plate near the right side. A connecting device A510 and a connecting device B511 are installed on the connecting plate B501 by passing through the plate on the left and right sides of the ferrule joint C509 respectively. The connecting device A510 and the connecting device B511 have the same structure and both include a check valve 5111. A connecting pipe 5112 is connected to the top of the check valve 5111, and a ferrule joint D5113 is connected to the top of the connecting pipe 5112. The ferrule joint D5113 is installed on the connecting plate B501 by passing through the plate. A straight-through joint six 512 is also installed at the bottom of the straight-through joint four 507. A side plate 513 is perpendicularly installed on one side of the connecting plate B501, and valves 514 are installed on the upper and lower parts of the side plate 513 respectively. The upper parts of the left installation plate 502 and the right installation plate 503 are bolted and fixed to the cross beam one 013 and the top beam one 011 by bolts E516 respectively.

[0031] The monomer two 02 includes a top beam two 021, which is welded by four square steels into a rectangular frame structure. Two longitudinal beams two 022 are welded inside the top beam two 021. A cross beam two 023 is perpendicularly welded between the left longitudinal beam two 022 and the top beam two 021. An interface plate C3 is installed on the right longitudinal beam two 022. The interface plate C includes an annular support plate 301. A speed reducer 302 is installed at the bottom of the annular support plate 301. A floating ring 303 is connected to the bottom of the speed reducer 302. A support plate A304 is perpendicularly installed on one side of the annular support plate 301. The support plate A304 is bolted and fixed to the longitudinal beam two 022 through a bolt C307.

[0032] The monomer three 03 includes a top beam three 031 which is welded into a rectangular frame structure by four square steels. Inside the top beam three 031, a longitudinal beam three 032 is welded. Between the longitudinal beam three 032 and the left top beam three 031, two left cross beams 033 are welded. Between the longitudinal beam three 032 and the right top beam three 031, a right cross beam 034 is welded. An interface plate A1 is installed on the right cross beam 034. Inside the left top beam three 031 of the monomer three 03, an interface plate B2 is installed. Inside the right top beam three 031 of the monomer three 03, an interface plate F6 is installed. The interface plate A1 includes an L-shaped support plate A101. At one corner of the bottom plate of the L-shaped support plate A101, a ferrule connector A102 is installed. Near the middle position at the bottom of the L-shaped support plate 101, a ferrule connector B103 is installed. At the other corner of the bottom plate of the L-shaped support plate A101, a face seal pipe joint A104 is installed. A notch 105 is opened on the bottom plate of the L-shaped support plate A101. The vertical plate of the L-shaped support plate A101 is bolted and fixed to the right cross beam 034 by bolt A109. The interface plate B2 includes an L-shaped support plate B201. A circular opening 202 is opened on the bottom plate of the L-shaped support plate B201. A connecting pipe A203 is installed at the bottom of the opening 202. The vertical plate of the L-shaped support plate B201 is bolted and fixed to the top beam three 031 by bolt B204. The interface plate F6 includes a T-shaped support plate 604. At both ends on the left side of the T-shaped support plate 601, a left support plate one 602 and a right support plate one 603 are vertically connected respectively. At one end on the right side of the T-shaped support plate 601, a right support plate 604 is vertically connected. A face seal pipe joint B605 is installed through the plate on the left support plate one 601. A check valve B606 is connected to the bottom of the face seal pipe joint B605. A hose 607 is installed at the bottom of the vertical plate of the T-shaped support plate 601. One end of the hose 607 is connected to a connecting pipe B608. The other end of the connecting pipe B608 is connected to a joint 609. Two concentric reducers 610 are installed through the plate on the left support plate two 603. A hose joint 611 is connected to the bottom of the concentric reducer 610. A ferrule connector E612 is connected to the top of the concentric reducer 610. At the bottom of the right support plate 604, a ferrule support device 613 is bolted and installed by bolt F614. The upper part of the T-shaped support plate 601 is bolted and fixed to the top beam three 031 by bolt G615.

[0033] The ferrule connector A102 is installed and fixed to the L-shaped support plate A101 through a plate-through fixator A106. The ferrule connector B103 is installed and fixed to the L-shaped support plate A101 through a plate-through fixator B107. The face seal pipe joint A104 is installed and fixed to the L-shaped support plate A101 through a plate-through fixator C107.

[0034] The length of the first monomer 01 is the same as that of the second monomer 02. The long sides of the first monomer 01 and the second monomer 02 are fixed by bolting. The length of the third monomer 03 is the same as the sum of the widths of the first monomer 01 and the second monomer 02. The long side of the third monomer 03 is bolted and fixed to the short sides of the first monomer 01 and the second monomer 02.

[0035] The union joint 402 is installed and fixed to the connecting plate A401 through the plastic backing plate 405.

[0036] The ferrule joint C509, the connecting device A510, and the connecting device B511 are all installed and fixed to the connecting plate B501 through the through-plate fixer D515.

[0037] A number of upper mounting holes 305 are equidistantly arranged on the annular support plate 301, and a number of lower mounting holes 306 are equidistantly arranged on the floating ring 302.

[0038] The specifications of the first straight joint 504, the second straight joint 505, the third straight joint 506, the fourth straight joint 507, and the fifth straight joint 508 are all 3 / 4 ‘’.

[0039] The specification of the sixth straight joint 512 is 1 / 2 ‘’.

[0040] A number of legs 05 are bolted to the bottom of the base body 0. The outer sides of the peripheral legs 05 are bolted and fixed through four connecting rods 04. The leg 05 includes an aluminum profile leg 051. A square steel pipe leg 052 is bolted to the bottom of the aluminum profile leg 051. An adjusting bolt 053 is installed in the middle of the bottom of the aluminum profile leg 051. The height of the leg 05 is adjusted through the adjusting bolt 053.

[0041] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A modular integrated base for semiconductor production, comprising a base body, characterized in that: The base body includes monomer one, monomer two and monomer three, the monomer one is installed with interface board D and interface board E, the monomer two is installed with interface board A, interface board B and interface board F, and the monomer three is installed with interface board C.

2. A modular integrated base for semiconductor production according to claim 1, characterized in that: The monomer 1 includes a top beam 1, which is welded from four square steels into a rectangular frame structure, three parallel longitudinal beams 1 are welded on the inner side of the top beam 1, wherein a cross beam 1 is vertically welded between the leftmost longitudinal beam 1 and the top beam 1, an interface plate D is installed on the inner side of the top beam 1 on the right side of the monomer 1, and an interface plate E is installed between the top beam 1 and the cross beam 1; the interface plate D includes a connecting plate A, two flexible joints are installed on the connecting plate A by means of through-plate, a connecting nut is installed on the top of the flexible joint, a mounting plate is vertically installed in the middle of one side of the connecting plate A, and the upper part of the mounting plate is bolted to the top beam 1 by bolts D; the interface plate E includes a connecting plate B, a left mounting plate and a right mounting plate are vertically installed in the middle of both sides of the connecting plate B, and a left mounting plate and a right mounting plate are respectively installed on the connecting plate B. A straight joint 1, a straight joint 2, a straight joint 3, a straight joint 4 and a straight joint 5 are installed in a row at a time. A compression sleeve joint C is installed on the right side of the connecting plate B. A connecting device A and a connecting device B are installed on the upper side of the connecting plate B and on the left and right sides of the compression sleeve joint C. The connecting device A and the connecting device B have the same structure and both include a one-way valve. A connecting pipe is connected to the top of the one-way valve, and a compression sleeve joint D is connected to the top of the connecting pipe. The compression sleeve joint D is installed on the connecting plate B through the plate. A straight joint 6 is also installed at the bottom of the straight joint 4. A side plate is vertically installed on one side of the connecting plate B, and valves are installed on the upper and lower sides of the side plate respectively. The upper parts of the left mounting plate and the right mounting plate are bolted and fixed to the cross beam 1 and the top beam 1 respectively by bolts E.

3. A modular integrated base for semiconductor production according to claim 1, characterized in that: The single body 2 includes a top beam 2, which is welded from four square steels into a rectangular frame structure, and two longitudinal beams 2 are welded on the inner side of the top beam 2, wherein a cross beam 2 is vertically welded between the longitudinal beam 2 on the left and the top beam 2, and an interface plate C is installed on the longitudinal beam 2 on the right, and the interface plate C includes an annular support plate, a reducer is installed at the bottom of the annular support plate, a floating ring is connected to the bottom of the reducer, and a support plate A is vertically installed on one side of the annular support plate, and the support plate A is bolted to the longitudinal beam 2 by bolts C.

4. A modular integrated base for semiconductor production according to claim 1, characterized in that: The monomer three includes a top beam three, and the top beam three is welded into a rectangular frame structure by four square steels. A longitudinal beam three is welded on the inner side of the top beam three, two left cross beams are welded between the longitudinal beam three and the top beam three on the left side, and a right cross beam is welded between the longitudinal beam three and the top beam three on the right side, and an interface plate A is installed on the right cross beam, an interface plate B is installed on the inner side of the top beam three on the left side of the monomer three, and an interface plate F is installed on the inner side of the top beam three on the right side of the monomer three. The interface plate A includes an L-shaped support plate A, a ferrule pipe joint A is installed at one corner of the bottom plate of the L-shaped support plate A, a ferrule pipe joint B is installed near the middle position of the bottom of the L-shaped support plate, a face sealing pipe joint A is installed at the other corner of the bottom plate of the L-shaped support plate A, a notch is opened on the bottom plate of the L-shaped support plate A, and the vertical plate of the L-shaped support plate A is bolted and fixed to the right cross beam by bolts A; the interface plate B includes an L-shaped support plate B, and a A circular opening is provided, a connecting pipe A is installed at the bottom of the opening, and the vertical plate of the L-shaped support plate B is fixed to the top beam three by bolts B; the interface plate F includes a T-shaped support plate, the left two ends of the T-shaped support plate are respectively vertically connected to the left support plate one and the right support plate one, and the right end of the T-shaped support plate is vertically connected to the right support plate, the left support plate one is installed with a face sealing pipe joint B on the through plate, and a check valve B is connected to the bottom of the face sealing pipe joint B, a hose is installed at the bottom of the vertical plate of the T-shaped support plate, one end of the hose is connected to the connecting pipe B, and the other end of the connecting pipe B is connected to a joint, two concentric reducers are installed on the through plate of the left support plate two, the bottom of the concentric reducer is connected to a hose joint, and the top of the concentric reducer is connected to a sleeve joint E, the bottom of the right support plate is bolted with a sleeve support device by bolts F, and the upper part of the T-shaped support plate is fixed to the top beam three by bolts G.

5. A modular integrated base for semiconductor production according to claim 4, characterized in that: The ferrule pipe joint A is installed and fixed with the L-shaped support plate A through the through-plate fixture A, the ferrule pipe joint B is installed and fixed with the L-shaped support plate A through the through-plate fixture B, and the face sealing pipe joint A is installed and fixed with the L-shaped support plate A through the through-plate fixture C.

6. A modular integrated base for semiconductor production according to claim 1, characterized in that: The length of monomer one is the same as that of monomer two, and the long sides of monomer one and monomer two are fixed by bolting. The length of monomer three is the same as the sum of the widths of monomer one and monomer two, and the long side of monomer three is fixed by bolting to the short sides of monomer one and monomer two.

7. A modular integrated base for semiconductor production according to claim 2, characterized in that: The flexible joint is fixed to the connecting plate A through a plastic pad, and the sleeve joint C, the connecting device A and the connecting device B are all fixed to the connecting plate B through a through-plate fixture D.

8. The modular integrated base for semiconductor production according to claim 3, characterized in that: The annular support plate is provided with a plurality of upper mounting holes at equal distances, and the floating ring is provided with a plurality of lower mounting holes at equal distances.

9. A modular integrated base for semiconductor production according to claim 2, characterized in that: The specifications of the straight connector 1, straight connector 2, straight connector 3, straight connector 4 and straight connector 5 are all 3 / 4'', and the specification of the straight connector 6 is 1 / 2''.

10. The modular integrated base for semiconductor production according to claim 1, characterized in that: A plurality of legs are bolted to the bottom of the base body 0, and the outer sides of the peripheral legs are bolted and fixed by four connecting rods. The legs include aluminum profile legs, and the bottom of the aluminum profile legs are bolted to square steel pipe legs. An adjustment bolt is installed in the middle of the bottom of the aluminum profile legs.

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