Door and window opening and closing device and wafer transmission system

Abstract

The invention discloses a door and window opening and closing device and a wafer transmission system, and the door and window opening and closing device comprises a frame and a door and window which can be movably fixed at a gap of the frame. The fixing assembly is located on the frame and comprises a sliding groove and a positioning hole; the moving assembly is located on the door and window and comprises a positioning pin, a sliding pin and a driving piece, the driving piece can drive the positioning pin to stretch out of or retract into the moving assembly, and when the door and window is located at the notch of the frame, the positioning pin is located in the positioning hole; when the door and window is far away from the notch of the frame, the positioning pin retracts into the moving assembly, the sliding pin is located in the sliding groove, and when the sliding pin slides along the sliding groove, the door and window is driven to be far away from the notch of the frame. According to the door and window opening and closing device and the wafer transmission system provided by the invention, a convenient and stable door and window opening and closing structure is provided, the maintenance efficiency of the wafer transmission system can be improved, and the maintenance cost can be reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of transmission system maintenance, and in particular to a door and window opening and closing device and a wafer transmission system. Background Art

[0002] Regarding the opening and closing of equipment doors and windows, the existing technologies are mainly carried out in the following ways:

[0003] a. Side opening or top opening mainly using hinges, such as household doors.

[0004] b. Top opening in the form of a scroll and side opening or top opening in the form of a curtain, such as curtains.

[0005] c. Side opening or top opening in a push-pull manner embedded in the two sides or above the wall, such as the push-pull doors on both sides of a store.

[0006] d. Directly lock the door and window through physical locking and open it by means of tool disassembly. There is no movable connection between the door, window and the main body, such as directly locking it around with bolts.

[0007] The above a method requires a large opening space for the door and window, the b method is used for flexible doors and windows and has low airtightness, the c method requires a large embedding space for the door and window, and the d method is cumbersome and time-consuming for batch maintenance or opening in an emergency.

[0008] As Figure 1 shown, the wafer transmission system includes an atmospheric transmission platform A and a vacuum transmission platform. The vacuum platform is also connected to parts B and C through a docking interface. For the maintenance of the existing docking interface of the vacuum transmission platform, that is, between B and C, since the right side of the platform is docked with the backend process machine, part C cannot be moved. The current technical solution is to move the atmospheric transmission platform A, leave a space, and then move the B end of the vacuum platform, so as to separate B and C and maintain the two ends of the interface, such as replacing gaskets. However, moving device A requires a hoisting device, and device A has high positioning accuracy requirements. After moving, device A and related devices need to be repositioned and installed, with a large investment. Summary of the Invention

[0009] The present invention aims to solve at least one of the problems in the related technologies to some extent. For this purpose, the object of the present invention is to provide a door and window opening and closing device and a wafer transmission system, which provide a convenient and stable door and window opening and closing structure, can improve the maintenance efficiency of the wafer transmission system, and reduce the maintenance cost.

[0010] To achieve the above object, the present application adopts the following technical solution: A door and window opening and closing device includes a frame and a door and window movably fixed at the notch of the frame; it further includes:

[0011] A fixed component located on the frame, including a chute and a positioning hole;

[0012] The movable assembly located on the door and window includes a positioning pin, a sliding pin and a driving member. The driving member can drive the positioning pin to extend or retract the movable assembly. When the door and window are located at the frame gap, the positioning pin is located in the positioning hole; when the door and window are away from the frame gap, the positioning pin is retracted into the movable assembly, and the sliding pin is located in the slide groove. When the sliding pin slides along the slide groove, it drives the door and window away from the frame gap.

[0013] Furthermore, there are two fixed components, which are symmetrically located on both sides of the frame; there are two movable components, which are symmetrically located on both sides of the door and window.

[0014] Furthermore, the slide groove extends in the vertical direction, and an upper deep hole groove and a lower deep hole groove are respectively provided on the same side of the top and bottom of the slide groove, and a first positioning hole and a second positioning hole are respectively provided at the ends of the upper deep hole groove and the lower deep hole groove away from the slide groove, and the depth of the second positioning hole is greater than the depth of the lower deep hole groove.

[0015] Furthermore, the moving assembly includes a first positioning pin, a second positioning pin and a sliding pin, wherein the second positioning pin and the sliding pin are located in the same horizontal plane; the dimension of the sliding pin protruding from the door and window is greater than the dimensions of the first positioning pin and the second positioning pin;

[0016] When the door or window is located at the frame notch, the first positioning pin is located in the first positioning hole, the second positioning pin is located in the slide groove, and the sliding pin is located in the second positioning hole.

[0017] Furthermore, the driving member is located inside the moving assembly and includes a locking rod, and the locking rod is provided with a first sliding block and a second sliding block;

[0018] One end of the first positioning pin protrudes from the moving assembly, and the other end is fixedly connected to the first slider; one end of the second positioning pin and the sliding pin protrudes from the moving assembly, and the other end is fixedly connected to the second slider;

[0019] When the locking rod moves along the vertical direction, the locking rod drives the first slider and the second slider to move synchronously, so that the first positioning pin and the second positioning pin are retracted into the moving assembly, and the sliding pin is partially retracted into the moving assembly.

[0020] Furthermore, the driving member further comprises a handle, a paddle and a connecting rod; the handle is located outside the moving assembly, the paddle is located inside the moving assembly, and the center of the paddle is rotatably connected to the inner wall of the moving assembly, one end of the paddle abuts against the handle, and the other end is connected to the locking rod through the connecting rod;

[0021] When the handle moves inward, the handle drives the paddle to rotate around its center, driving the connecting rod and the locking rod to move in the vertical direction; so that the first positioning pin and the second positioning pin retract into the moving component, and at the same time, the sliding pin partially retracts into the moving component. At this time, the sliding pin can slide along the lower deep hole groove to the sliding groove.

[0022] Further, a rotor is provided at one end of the sliding pin away from the moving component; when the sliding pin slides along the sliding groove, the door and window can rotate around the sliding pin as the center.

[0023] Further, a magnetic attraction component is provided at the top of the moving component.

[0024] Further, the first positioning pin is fixed to the inner side wall of the moving component by a first spring, and the other ends of the second positioning pin and the sliding pin are fixed to the inner side wall of the moving component by a second spring;

[0025] The bottom end of the locking rod is connected to the paddle through a connecting rod. A locking nut is provided at the top end of the locking rod, and the locking rod penetrates through the fixing plate. A locking rod return spring is provided between the fixing plate and the locking nut.

[0026] A wafer transfer system provided by the present application includes an atmospheric transfer platform and a vacuum platform, and the above-mentioned door and window opening and closing device is provided between the atmospheric transfer platform and the vacuum platform.

[0027] The above technical solutions provided by the embodiments of the present application have the following advantages compared with the prior art: The door and window opening and closing device provided by the present application includes a frame and a door and window that can be movably fixed at the notch of the frame; it also includes a fixing component located on the frame and a moving component located on the door and window. Among them, the fixing component includes a sliding groove and a positioning hole; the moving component includes a positioning pin, a sliding pin and a driving member. The driving member can drive the positioning pin to extend or retract from the moving component. When the door and window is located at the notch of the frame, the positioning pin is located in the positioning hole; when the door and window is away from the notch of the frame, the positioning pin retracts into the moving component, and the sliding pin is located inside the sliding groove. When the sliding pin slides along the sliding groove, it drives the door and window away from the notch of the frame. When the door and window is closed in the present application, that is, when the door and window is located at the notch of the frame, the positioning pin extends and is located inside the positioning hole, so that the door and window is fixed in the frame; when the door and window needs to be opened, that is, when the door and window needs to leave the notch of the frame, the driving member drives the positioning pin to retract into the moving component. At this time, the sliding pin is located outside the moving component, and the sliding pin can move along the sliding groove. An external force drives the sliding pin in the door and window to move along the sliding groove until the door and window is away from the notch of the frame; the door and window opening and closing device of the present application is different from the opening and closing structures in the prior art, with a simple structure and convenient opening and closing.

[0028] A wafer transfer system provided by the present application includes an atmospheric transfer platform and a vacuum platform. An above-mentioned door and window opening / closing device is arranged between the atmospheric transfer platform and the vacuum platform. Among them, the vacuum platform includes a detachable first platform and a second platform. The first platform is connected to the atmospheric transfer platform through the door and window opening / closing device. When the interface between the first platform and the second platform needs to be maintained; open the door and window, disassemble the first platform and the second platform, move the first platform into the atmospheric transfer platform, and reserve the space between the first platform and the second platform for interface maintenance. After the maintenance is completed, reset the first platform and close the door and window. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The drawings here are incorporated into the specification and form a part of this specification, showing embodiments consistent with the present invention and used together with the specification to explain the principles of the present invention.

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0031] Figure 1 It is a schematic structural diagram of a wafer transfer system in the prior art.

[0032] Figure 2 It is a schematic structural diagram after the moving component and the fixed component are assembled;

[0033] Figure 3 It is a schematic external structural diagram of the moving component;

[0034] Figure 4 It is a schematic structural diagram of the fixed component;

[0035] Figure 5 It is a schematic internal sectional view of the moving component;

[0036] Figure 6 It is a schematic structural diagram after the door and window are opened;

[0037] Figure 7 It is a schematic structural diagram of the wafer transfer system after the door and window are opened;

[0038] Reference numerals: 1, doors and windows; 11, frame; 2, fixing component; 21, chute; 22, upper deep hole groove; 23, lower deep hole groove; 3, moving component; 31, first positioning pin; 32, second positioning pin; 33, sliding pin; 34, magnetic attraction component; 35, handle; 37, paddle; 38, connecting rod; 39, locking rod; 40, first slider; 41, first spring; 42, locking nut; 43, locking rod return spring; 51, atmospheric transmission platform; 52, first platform; 53, second platform. Detailed implementation manners

[0039] In order to have a clearer understanding of the technical features, objectives and effects of the present invention, the specific implementation manners of the present invention will now be described in detail with reference to the accompanying drawings. In the following description, it should be understood that the orientation or positional relationships indicated by "front", "rear", "upper", "lower", "left", "right", "longitudinal", "transverse", "vertical", "horizontal", "top", "bottom", "inner", "outer", "head", "tail", etc. are based on the orientation or positional relationships shown in the accompanying drawings, and are constructed and operated in a specific orientation, and are only for the convenience of describing the present technical solution, rather than indicating that the indicated mechanism or element must have a specific orientation, and thus should not be construed as a limitation of the present invention.

[0040] It should also be noted that, unless otherwise clearly defined and limited, terms such as "installation", "connection", "connection", "fixation", "setting", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. When an element is referred to as being "on" or "under" another element, the element can be "directly" or "indirectly" located above the other element, or there may also be one or more intermediate elements. The terms "first", "second", "third", etc. are only for the convenience of describing the present technical solution, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", "third", etc. can explicitly or implicitly include one or more of such features. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In the following description, specific details such as specific system structures and technologies are proposed for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present invention. However, those skilled in the art should clearly understand that the present invention can also be implemented in other embodiments without these specific details. In other cases, the detailed descriptions of well-known systems, mechanisms, circuits and methods are omitted to avoid unnecessary details from interfering with the description of the present invention.

[0042] Example 1

[0043] Please refer to Figures 2 - 6 , a door and window opening and closing device provided by the present application includes a frame 11 and a door and window 1 movably fixed at the notch of the frame; it also includes a fixing component 2 located on the frame 11 and a moving component 3 located on the door and window 1.

[0044] Among them, the fixing component 2 includes a chute 21 and a positioning hole; the moving component 3 includes a positioning pin, a sliding pin 33 and a driving member, and the driving member can drive the positioning pin to extend or retract from the moving component 3. When the door and window 1 is located at the notch of the frame, the positioning pin is located in the positioning hole; when the door and window 1 is away from the notch of the frame, the positioning pin retracts into the interior of the moving component 3, and the sliding pin 33 is located inside the chute 21. When the sliding pin 33 slides along the chute 21, it drives the door and window 1 away from the notch of the frame.

[0045] When the door and window 1 of the present application is closed, that is, when the door and window 1 is located at the notch of the frame, the positioning pin extends and is located inside the positioning hole, so that the door and window 1 is fixed in the frame 11; when the door and window 1 needs to be opened, that is, when the door and window 1 needs to leave the notch of the frame, the driving member drives the positioning pin to retract into the interior of the moving component 3. At this time, the sliding pin 33 is located outside the moving component 3, and the sliding pin 33 can move along the chute 21. An external force drives the sliding pin 33 in the door and window 1 to move along the chute 21 until the door and window 1 is away from the notch of the frame; the door and window opening and closing device of the present application is different from the opening and closing structures in the prior art, with a simple structure and convenient opening and closing.

[0046] Example 2

[0047] Please refer to Figures 2 - 6 , a door and window opening and closing device provided by the present application includes a frame 11 and a door and window 1 movably fixed at the notch of the frame; it also includes a fixing component 2 located on the frame 11 and a moving component 3 located on the door and window 1.

[0048] Among them, the fixing component 2 includes a chute 21 and a positioning hole; the moving component 3 includes a positioning pin, a sliding pin 33 and a driving member, and the driving member can drive the positioning pin to extend or retract from the moving component 3. When the door and window 1 is located at the notch of the frame, the positioning pin is located in the positioning hole; when the door and window 1 is away from the notch of the frame, the positioning pin retracts into the interior of the moving component 3, and the sliding pin 33 is located inside the chute 21. When the sliding pin 33 slides along the chute 21, it drives the door and window 1 away from the notch of the frame.

[0049] There are two fixing components 2, and the two fixing components 2 are symmetrically located on both sides of the frame 11; there are two moving components 3, and the two moving components 3 are symmetrically located on both sides of the door and window 1.

[0050] Further, the sliding groove 21 extends along the vertical direction. On the same side of the top and bottom of the sliding groove 21, an upper deep hole groove 22 and a lower deep hole groove 23 are respectively arranged. At the ends of the upper deep hole groove 22 and the lower deep hole groove 23 away from the sliding groove 21, a first positioning hole and a second positioning hole are respectively arranged. The depth of the second positioning hole is greater than the depth of the lower deep hole groove 23. The moving component 3 includes a first positioning pin 31, a second positioning pin 32 and a sliding pin 33. The second positioning pin 32 and the sliding pin 33 are located in the same horizontal plane. The size of the sliding pin 33 protruding from the door and window 1 is greater than the sizes of the first positioning pin 31 and the second positioning pin 32.

[0051] In this application, the extending direction of the sliding groove 21 is defined as the vertical direction. In actual operation, the extending direction of the sliding groove 21 can be any direction. As Figure 4 shown, in the vertical direction, the first positioning hole and the second positioning hole are arranged in a staggered manner, that is, the connecting line direction of the first positioning hole and the second positioning hole is not parallel to the extending direction of the sliding groove 21.

[0052] When the door and window 1 is located at the frame notch, the first positioning pin 31 is located in the first positioning hole, the second positioning pin 32 is located in the sliding groove 21, and the sliding pin 33 is located in the second positioning hole. In this application, the size of the sliding pin 33 protruding from the door and window 1 is greater than the sizes of the first positioning pin 31 and the second positioning pin 32. That is to say, the lengths of the first positioning pin 31 and the second positioning pin 32 are equal, and the length of the sliding pin 33 is greater than the length of the second positioning pin 32. And the sliding pin 33 needs to be adaptively installed with the second positioning hole. Therefore, the depth of the second positioning hole is greater than the depth of the sliding groove 21 and also greater than the depth of the lower deep hole groove 23.

[0053] When the door and window 1 is closed, the first positioning pin 31 is located in the first positioning hole, the second positioning pin 32 is located inside the sliding groove 21, and the sliding pin 33 is located in the second positioning hole. At this time, the first positioning pin 31, the second positioning pin 32 and the sliding pin 33 form a triangular structure for fixing the door and window 1 in the fixing component 2.

[0054] When the door and window 1 needs to be opened, the driving member can drive the first positioning pin 31, the second positioning pin 32 and the sliding pin 33 to retract into the moving component 3 at the same time. Since the length of the sliding pin 33 is greater than the lengths of the first positioning pin 31 and the second positioning pin 32, when the first positioning pin 31 and the second positioning pin 32 retract into the moving component 3, the sliding pin 33 partially retracts into the moving component 3 and partially is located outside the moving component 3. Since the length of the sliding pin 33 becomes shorter, at this time the sliding pin 33 can disengage from the second positioning hole and slide in the lower deep hole groove 23. Since the lower deep hole groove 23 is communicated with the sliding groove 21, the sliding pin 33 can slide along the lower deep hole groove 23 into the sliding groove 21.

[0055] Note: In this application, the sliding groove is defined in the vertical direction, so the upper deep hole groove 22 and the lower deep hole groove 23 are in the horizontal direction. After a part of the sliding groove retracts into the moving component 3, the remaining part slides into the sliding groove 21 along the lower deep hole groove 23. An external force can drive the door and window 1 and the moving component 3 in the door and window 1 to move vertically along the sliding groove 21 through the partially retracted sliding pin 33, so that the door and window 1 moves away from the frame notch, realizing the opening of the door and window 1.

[0056] Further, the driving part of this application is located inside the moving component 3 and includes a lock rod 39. A first slider 40 and a second slider (not shown in the figure) are arranged on the lock rod 39. One end of the first positioning pin 31 protrudes from the moving component 3, and the other end is fixedly connected to the first slider 40. One ends of the second positioning pin 32 and the sliding pin 33 protrude from the moving component 3, and the other ends are simultaneously fixedly connected to the second slider. That is to say, the second positioning pin 32 and the sliding pin 33 are an integral part, and both retract or extend synchronously, and both slide through the second slider.

[0057] When the lock rod 39 moves along the vertical direction, the lock rod 39 drives the first slider 40 and the second slider to move synchronously, so that the first positioning pin 31 and the second positioning pin 32 retract into the moving component 3, and at the same time, the sliding pin 33 partially retracts into the moving component 3.

[0058] In this application, when the lock rod 39 moves upward or downward, the first slider 40 and the second slider will both move upward or downward synchronously. The first positioning pin 31, the second positioning pin 32, and the sliding pin 33 all pass through the through holes in the moving component 3, that is, one ends of the first positioning pin 31, the second positioning pin 32, and the sliding pin 33 are located outside the moving component 3, and the other ends are located inside the moving component 3. When the first slider 40 and the second slider move upward or downward, they will pull the first positioning pin 31, the second positioning pin 32, and the sliding pin 33 to retract into the moving component 3, so that only a part of the sliding pin 33 is exposed outside the moving component 3. At this time, the length of the sliding pin 33 becomes shorter, and the sliding pin 33 can disengage from the second positioning hole and slide in the lower deep hole groove 23. Since the lower deep hole groove 23 is connected to the sliding groove 21, the sliding pin 33 can slide into the sliding groove 21 along the lower deep hole groove 23. At this time, under the action of an external force, the sliding pin 33 and the door and window 1 slide upward along the sliding groove 21 together, realizing the movement of the door and window 1.

[0059] When the first slider 40 and the second slider are reset, they will drive the first positioning pin 31, the second positioning pin 32, and the sliding pin 33 to reset, so that the first positioning pin 31, the second positioning pin 32, and the sliding pin 33 all protrude outside the moving component 3.

[0060] Further, the driving member further includes a handle 35, a paddle 37 and a connecting rod 38; the handle 35 is located outside the moving assembly 3, the paddle 37 is located inside the moving assembly 3, and the center of the paddle 37 is rotatably connected to the inner side wall of the moving assembly 3. One end of the paddle 37 abuts against the handle 35, and the other end is connected to the locking rod 39 through the connecting rod 38; when the handle 35 moves inward, the handle 35 drives the paddle 37 to rotate around its center, driving the connecting rod 38 and the locking rod 39 to move in the vertical direction; so that the first positioning pin 31 and the second positioning pin 32 retract into the moving assembly 3, and at the same time, the sliding pin 33 partially retracts into the moving assembly 3. At this time, the sliding pin 33 can slide along the lower deep hole groove 23 to the sliding groove 21.

[0061] In this application, the handle 35 can be in a push-pull form or a rotating form. It only needs to ensure that when the handle 35 is pushed, pulled or rotated, it can drive the end of the paddle 37 that abuts against the handle 35 to rotate. A connecting through hole is provided at the other end of the paddle 37, and the connecting rod 38 is arranged in the connecting through hole. One end of the connecting rod 38 is rotatably connected to the connecting through hole, and the other end is fixedly connected to the locking rod 39.

[0062] Further, the first positioning pin 31 is fixed to the inner side wall of the moving assembly 3 by a first spring 41, and the middle position of the first positioning pin 31 is fixedly connected to the first slider 40. The other ends of the second positioning pin 32 and the sliding pin 33 are fixed to the inner side wall of the moving assembly 3 by a second spring. The second positioning pin 32 and the sliding pin 33 can be connected together by a connecting plate, so that the two form an integral body that extends or retracts synchronously. The connecting plate is fixed to the inner side wall of the moving assembly 3 by a second spring, and the middle position of the connecting plate is fixedly connected to the second slider.

[0063] The bottom end of the locking rod 39 is connected to the paddle 37 through the connecting rod 38. A locking nut 42 is provided at the top end of the locking rod 39, and the locking rod 39 penetrates through the fixing plate. A locking rod return spring 43 is provided between the fixing plate and the locking nut 42. Rotating the locking nut 42 can adjust the position of the locking rod 39, which is convenient for adjusting the position of the locking rod 39. The locking rod return spring 43 helps to quickly drive the locking rod 39 to reset when the handle 35 is released, that is, when the paddle 37 is reset.

[0064] Further, a rotor is provided at one end of the sliding pin 33 away from the moving component 3; when the sliding pin 33 slides along the sliding groove 21, the door and window 1 can rotate around the sliding pin 33. That is to say, when the sliding pin 33 slides along the sliding groove 21, it can also rotate around the rotor at the front end of the sliding pin 33. This can cause the door and window 1 that can only slide vertically upward to rotate during the upward sliding process, so that the door and window 1 extending in the vertical direction rotates into the door and window 1 extending in the horizontal direction. In this way, when the space available in the vertical direction is insufficient, the horizontal storage of the door and window 1 can be realized.

[0065] A magnetic attraction component 34 is provided at the top of the moving component 3 in this application. In this application, the sliding pin 33 is located at the bottom of the moving component 3, that is, the sliding pin 33 is located at the bottom of the door and window 1. When an external force drives the sliding pin 33 in the door and window 1 to slide upward along the sliding groove 21, an external force can be applied to rotate the top of the door and window 1 to a direction parallel to the bottom of the door and window 1, so as to realize the horizontal storage of the door and window 1. Specifically, as Figure 6 and 7 shown, during the process of the sliding pin 33 sliding upward along the sliding groove 21, the sliding pin 33 is always located inside the sliding groove 21, that is, the bottom of the moving component 3 is always located close to the sliding groove 21, and the top of the moving component 3 can be rotated to the horizontal direction, and the rotation direction can be adjusted arbitrarily. Preferably, a magnetic attraction component 34 is provided at the top of the moving component 3 in this application. When the sliding pin 33 slides to the top of the sliding groove 21, the magnetic attraction component 34 can be adsorbed at the corresponding adsorption point to fix the door and window 1 in the open state.

[0066] The opening and closing method of the door and window opening and closing device in this application is as follows:

[0067] In the initial state, the door and window 1 is in the closed state. At this time, the door and window 1 is located at the frame notch, the first positioning pin 31 is located in the first positioning hole, the second positioning pin 32 is located in the sliding groove 21, and the sliding pin 33 is located in the second positioning hole. The first positioning pin 31, the second positioning pin 32 and the sliding pin 33 form a triangular structure to fix the door and window 1 in the fixing component 2.

[0068] When the door and window 1 needs to be opened, move the handle 35. The handle 35 drives the end of the paddle 37 that abuts against the handle 35 to rotate. The other end of the paddle 37 is provided with a connecting through hole, and a connecting rod 38 is arranged in the connecting through hole. One end of the connecting rod 38 is rotatably connected to the connecting through hole, and the other end is fixedly connected to the lock rod 39. The rotation of the paddle 37 drives the connecting rod 38 to move downward. The downward movement of the connecting rod 38 drives the lock rod 39 to move downward. The downward movement of the lock rod 39 drives the first slider 40 and the second slider to move downward synchronously. When the first slider 40 and the second slider move downward, they will pull the first positioning pin 31, the second positioning pin 32, and the sliding pin 33 to retract into the moving assembly 3, so that only part of the sliding pin 33 is exposed outside the moving assembly 3. At this time, the length of the sliding pin 33 becomes shorter, and the sliding pin 33 can disengage from the second positioning hole and slide in the lower deep hole groove 23. Since the lower deep hole groove 23 communicates with the chute 21, the sliding pin 33 can slide along the lower deep hole groove 23 into the chute 21.

[0069] During the opening process of the door and window 1, it is necessary to continuously keep the position of the handle 35 fixed, ensure that the first positioning pin 3131 and the second positioning pin 3232 retract into the moving assembly 3, and will not interfere with the movement of the moving assembly 3. Ensure that part of the sliding pin 33 retracts into the moving assembly 3, and the part remaining outside the moving assembly 3 can slide along the chute 21. Under the action of an external force, the sliding pin 33 first slides along the lower deep hole groove 23 to the chute 21, and then slides upward along the chute 21. That is, the sliding pin 33 needs to first slide horizontally backward to the position of the chute 21, and then slide upward along the chute 21.

[0070] During the movement of the door and window 1 along the chute 21, a rotor is provided at the front end of the sliding pin 33. That is, when the sliding pin 33 slides along the chute 21, it can also rotate around the rotor at the front end of the sliding pin 33. This can make the door and window 1 that can only slide vertically upward rotate during the upward sliding process, so that the door and window 1 extending in the vertical direction rotates into the door and window 1 extending in the horizontal direction. This can realize the horizontal storage of the door and window 1 when the space available in the vertical direction is insufficient. A magnetic attraction assembly 34 is provided at the top of the moving assembly 3. When the sliding pin 33 slides to the top of the chute 21, the magnetic attraction assembly 34 can be adsorbed at the corresponding adsorption point to fix the door and window 1 in the open state.

[0071] When the sliding pin 33 slides to the top of the chute 21, release the handle 35 at this time. The first positioning pin 31, the second positioning pin 32 and the sliding pin 33 reset, but it will not affect the moving component 3. After the handle 35 is released, the end of the handle 35 that drives the dial 37 to abut against the handle 35 rotates, causing the dial 37 to reset. Under the action of the lock rod return spring 43, the connecting rod 38 and the lock rod 39 also quickly reset. The first positioning pin 31 quickly resets under the action of the first spring 41 and extends to the outside of the moving component 3; the second positioning pin 32 and the sliding pin 33 quickly reset under the action of the second spring and extend to the outside of the moving component 3. At this time, the door and window 1 has moved away from the frame notch, and the first positioning pin 31, the second positioning pin 32 and the sliding pin 33 will not interfere with the moving component 3.

[0072] When the door and window 1 needs to be closed, the handle 35 can be moved first so that the sliding pin 33 can move in the chute 21. When the door and window 1 is moved to the position of the frame notch, then release the handle 35. The end of the handle 35 that drives the dial 37 to abut against the handle 35 rotates, causing the dial 37 to reset. Under the action of the lock rod return spring 43, the connecting rod 38 and the lock rod 39 also quickly reset. The first positioning pin 31 quickly resets under the action of the first spring 41 and extends to the outside of the moving component 3; the second positioning pin 32 and the sliding pin 33 quickly reset under the action of the second spring and extend to the outside of the moving component 3. At this time, the first positioning pin 31 is located in the first positioning hole, the second positioning pin 32 is located in the chute 21, and the sliding pin 33 is located in the second positioning hole. The first positioning pin 31, the second positioning pin 32 and the sliding pin 33 form a triangular structure for fixing the door and window 1 in the fixing component 2.

[0073] As Figure 7 shown, the present application also provides a wafer transfer system, including an atmospheric transfer platform 51 and a vacuum platform. An opening and closing device for doors and windows as described above is provided between the atmospheric transfer platform 51 and the vacuum platform.

[0074] The vacuum platform includes a detachable first platform 52 and a second platform 53. The first platform 52 is connected to the atmospheric transfer platform 51 through the door and window opening and closing device. When the interface between the first platform 52 and the second platform 53 needs to be maintained; open the door and window 1, disassemble the first platform 52 and the second platform 53, move the first platform 52 into the atmospheric transfer platform 51, and reserve a maintenance space between the first platform 52 and the second platform 53 for interface maintenance. After the maintenance is completed, reset the first platform 52 and close the door and window 1. An adsorption point corresponding to the magnetic attraction component 34 is provided at the inner top end of the atmospheric transfer platform 51.

[0075] It can be understood that the above embodiments only represent the preferred embodiments of the present invention, and the description thereof is relatively specific and detailed. However, it should not be construed as a limitation to the scope of the patent for the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, the above technical features can be freely combined, and several deformations and improvements can also be made, which all fall within the protection scope of the present invention. Therefore, all equivalent transformations and modifications made to the scope of the claims of the present invention shall fall within the scope covered by the claims of the present invention.

Claims

1. A door and window opening and closing device, comprising a frame and a door and window movably fixed at the notch of the frame; Characterized in that, It further comprises: A fixed component located on the frame, including a chute and a positioning hole; A moving component located on the door and window, including a positioning pin, a sliding pin and a driving member, the driving member can drive the positioning pin to extend or retract from the moving component. When the door and window is located at the notch of the frame, the positioning pin is located in the positioning hole; when the door and window is away from the notch of the frame, the positioning pin retracts into the interior of the moving component, and the sliding pin is located inside the chute. When the sliding pin slides along the chute, it drives the door and window away from the notch of the frame.

2. A door and window opening and closing device according to claim 1, Characterized in that, There are two fixed components, and the two fixed components are symmetrically located on both sides of the frame; there are two moving components, and the two moving components are symmetrically located on both sides of the door and window.

3. A door and window opening and closing device according to claim 1, Characterized in that, The chute extends along the vertical direction, and an upper deep hole groove and a lower deep hole groove are respectively arranged on the same side of the top and bottom of the chute. First positioning holes and second positioning holes are respectively arranged at the ends of the upper deep hole groove and the lower deep hole groove away from the chute. The depth of the second positioning hole is greater than the depth of the lower deep hole groove.

4. A door and window opening and closing device according to claim 3, Characterized in that, The moving component includes a first positioning pin, a second positioning pin and a sliding pin. The second positioning pin and the sliding pin are located in the same horizontal plane; the size of the sliding pin protruding from the door and window is greater than the sizes of the first positioning pin and the second positioning pin; When the door and window is located at the notch of the frame, the first positioning pin is located in the first positioning hole, the second positioning pin is located in the chute, and the sliding pin is located in the second positioning hole.

5. A door and window opening and closing device according to claim 4, Characterized in that, The driving member is located inside the moving component and includes a lock rod, and a first slider and a second slider are arranged on the lock rod; One end of the first positioning pin protrudes from the moving component, and the other end is fixedly connected to the first slider; one ends of the second positioning pin and the sliding pin protrude from the moving component, and the other ends are simultaneously fixedly connected to the second slider; When the lock rod moves along the vertical direction, the lock rod drives the first slider and the second slider to move synchronously, so that the first positioning pin and the second positioning pin retract into the interior of the moving component, and at the same time the sliding pin partially retracts into the interior of the moving component.

6. A door and window opening and closing device according to claim 5, Characterized in that, The driving member further includes a handle, a dial and a connecting rod; the handle is located outside the moving component, the dial is located inside the moving component, and the center of the dial is rotatably connected to the inner side wall of the moving component. One end of the dial abuts against the handle, and the other end is connected to the lock rod through a connecting rod; When the handle moves inward, the handle drives the dial to rotate around its center, driving the connecting rod and the lock rod to move along the vertical direction; so that the first positioning pin and the second positioning pin retract into the interior of the moving component, and at the same time the sliding pin partially retracts into the interior of the moving component. At this time, the sliding pin can slide along the lower deep hole groove to the chute.

7. A door and window opening and closing device according to claim 6, It is characterized in that a rotor is arranged at one end of the sliding pin away from the moving component; when the sliding pin slides along the chute, the door and window can rotate around the sliding pin.

8. A door and window opening and closing device according to claim 7 It is characterized in that a magnetic attraction component is arranged at the top of the moving component.

9. A door and window opening and closing device according to claim 6 It is characterized in that the first positioning pin is fixed on the inner side wall of the moving component through a first spring, and the other ends of the second positioning pin and the sliding pin are fixed on the inner side wall of the moving component through a second spring; the bottom end of the lock rod is connected to a dial through a connecting rod, a locking nut is arranged at the top end of the lock rod, and the lock rod penetrates through the fixing plate, and a lock rod return spring is arranged between the fixing plate and the locking nut.

10. A wafer transfer system It is characterized in that it includes an atmospheric transfer platform and a vacuum platform, and a door and window opening and closing device as described in any one of claims 1-9 is arranged between the atmospheric transfer platform and the vacuum platform.

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