Gas transmission system

Abstract

The invention provides a gas transmission system, and relates to the technical field of gas supply. The gas transmission system comprises a pressure relief assembly, a connecting pipeline and a plurality of branches, the connecting pipeline is used for being connected with a gas transmission gas source, and the branches are connected with the connecting pipeline and connected in parallel; the pressure relief assembly is detachably connected with the connecting pipeline or the branch, and the pressure relief assembly comprises a pressure relief hole, so that gas in the connecting pipeline or the branch connected with the pressure relief assembly can flow out through the pressure relief hole. During debugging, the pressure relief assembly with the pressure relief hole with the diameter is replaced, the pressure of gas flowing out of each branch can be adjusted, and the adjusting process is simplified. Meanwhile, a pressure reducing valve and a throttling valve do not need to be arranged on the branch, and the space occupied by the gas transmission system is reduced. When the pressure of the gas flowing out of one branch changes, the pressure of the gas in the connecting pipeline and the pressure of the gas in the other branches can change accordingly, and the pressure change condition of the whole gas transmission system can be obtained only by detecting the connecting pipeline or one branch.

Description

Technical Field

[0001] This application relates to the technical field of gas supply, and particularly to a gas transmission system. Background Art

[0002] When supplying gas from one gas source to multiple components of a device (or when supplying gas from one gas source to multiple devices), a gas transmission system needs to be set up. The gas transmission system generally includes a connecting pipeline and multiple branches. The connecting pipeline is connected to the gas source. Each branch is connected to the connecting pipeline and is connected to the corresponding component (or device). A pressure reducing valve and a throttle valve are provided on each branch. Before gas transmission, debugging is required, that is, adjusting the valves on each branch to make the pressure of the branch reach the required value.

[0003] However, with a pressure reducing valve and a throttle valve provided on each branch, the gas transmission system requires a large number of components, and the space occupied by the gas transmission system is large. During the debugging process, a large number of valves need to be adjusted, and the adjustment time is long. At the same time, since a pressure reducing valve and a throttle valve are provided on each branch, if the overall situation of the gas transmission system is to be monitored during gas transmission, the pressure of each branch needs to be monitored, and the situation of the gas transmission system can be determined only by comprehensively considering the pressure conditions of multiple branches. It is difficult to monitor the overall situation of the gas transmission system. Summary of the Invention

[0004] In view of this, this application provides a gas transmission system to solve, to a certain extent, the deficiencies existing in the existing gas transmission system.

[0005] This application provides a gas transmission system, which includes a pressure relief component, a connecting pipeline, and multiple branches. The connecting pipeline is used to connect to a gas transmission gas source. The multiple branches are all connected to the connecting pipeline, and the multiple branches are in parallel;

[0006] The pressure relief component is detachably connected to the connecting pipeline or the branch, and the pressure relief component includes a pressure relief hole.

[0007] Preferably, a plurality of connection positions are provided on the connecting pipeline, and the plurality of connection positions correspond to the plurality of branches one by one. The branch is connected to the corresponding connection position;

[0008] For each part of the connecting pipeline between any two adjacent connection positions, a pressure relief component is correspondingly provided. For any pressure relief component, when the pressure relief component is connected to the connecting pipeline, the pressure relief hole is communicated with the connecting pipeline.

[0009] Preferably, at least one of the plurality of branches is provided with the pressure relief component;

[0010] When the pressure relief component is connected to the branch, the pressure relief hole communicates with the branch.

[0011] Preferably, the pressure relief component includes a first connector, a second connector and a pressure relief gasket. The first connector is connected to the connecting pipeline or the branch. The first connector is detachably connected to the second connector. The pressure relief gasket is located between the first connector and the second connector, and the pressure relief hole is formed in the pressure relief gasket.

[0012] Preferably, the diameter of the pressure relief hole is 0.1 mm - 0.5 mm.

[0013] Preferably, the gas transmission system further includes a pressure detector, and the pressure detector is arranged on the connecting pipeline or the branch.

[0014] Preferably, the gas transmission system further includes a transfer pipeline and a pressure regulating valve. The connecting pipeline is connected to the gas transmission gas source through the transfer pipeline, and the pressure regulating valve is arranged on the transfer pipeline.

[0015] Preferably, the gas transmission system further includes a pneumatic diaphragm valve. The pneumatic diaphragm valve is arranged on the transfer pipeline, the pneumatic diaphragm valve is located on the upstream side of the pressure regulating valve, and the pneumatic diaphragm valve is connected to a compressed gas source.

[0016] Preferably, the gas transmission system further includes an adapter pipeline and a solenoid valve. The pneumatic diaphragm valve is connected to the compressed gas source through the adapter pipeline, and the solenoid valve is arranged on the adapter pipeline.

[0017] Preferably, the gas transmission system further includes a control module, and both the solenoid valve and the pressure detector are communicatively connected to the control module.

[0018] In the gas transmission system of the present application, the pressure relief component includes a pressure relief hole, which allows the gas in the connecting pipeline or branch connected to the pressure relief component to flow out through the pressure relief hole. The pressure relief component is detachably connected to the connecting pipeline or branch. During commissioning, the pressure relief component can be disassembled and replaced with a pressure relief component with a different diameter of the pressure relief hole to adjust the amount of gas flowing out through the pressure relief hole, thereby adjusting the pressure of the gas flowing out of each branch. In this way, there is no need to set pressure reducing valves and throttle valves on each branch, and the space occupied by the gas transmission system is reduced. At the same time, only by adjusting the diameter of the pressure relief hole can the pressure of the gas flowing out of each branch be adjusted, which simplifies the adjustment process and shortens the adjustment time. In addition, there is no pressure reducing valve installed in the connecting pipeline and each branch. When the pressure of the gas flowing out of one branch changes, the pressure of the gas in the connecting pipeline and the pressure of the gas in other branches will change accordingly. In this way, by only detecting the connecting pipeline or one branch, the pressure change situation of the entire gas transmission system can be obtained, and the difficulty of monitoring the overall situation of the gas transmission system is reduced. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0020] Figure 1 Showing the structural schematic diagram of the gas transmission system;

[0021] Figure 2 Showing the structural schematic diagram of the pressure relief gasket.

[0022] Reference Signs: 100 - connecting pipeline; 110 - connecting section; 200 - branch; 300 - pressure relief component; 310 - pressure relief gasket; 311 - pressure relief hole; 400 - connection position; 500 - pressure detector; 610 - transfer pipeline; 620 - connection pipeline; 630 - installation pipeline; 710 - pressure regulating valve; 720 - control module; 810 - pneumatic diaphragm valve; 820 - solenoid valve; 910 - gas transmission gas source; 920 - compressed gas source. Detailed Embodiments

[0023] The following specific embodiments are provided to assist the reader in obtaining a comprehensive understanding of the methods, devices, and / or systems described herein. However, after understanding the disclosure of this application, various changes, modifications, and equivalents of the methods, devices, and / or systems described herein will be apparent. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein, but rather changes that will be apparent after understanding the disclosure of this application may be made, except for operations that must occur in a specific order. Additionally, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.

[0024] The features described herein may be implemented in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein are provided only to illustrate some of the many possible ways of implementing the methods, devices, and / or systems described herein that will be apparent after understanding the disclosure of this application.

[0025] Throughout the specification, when an element (such as, a layer, region, or substrate) is described as "on" another element, "connected to" another element, "coupled to" another element, "above" another element, or "covering" another element, it may be directly "on", "connected to", "coupled to", "above", or "covering" the other element, or there may be one or more other elements intervening therebetween. In contrast, when an element is described as "directly on", "directly connected to", "directly coupled to", "directly above", or "directly covering" another element, there may be no other elements intervening therebetween.

[0026] As used herein, the term "and / or" includes any one of the listed related items and any combination of any two or more of them.

[0027] Although terms such as "first", "second", and "third" may be used herein to describe various components, elements, regions, layers, or parts, these components, elements, regions, layers, or parts are not limited by these terms. Rather, these terms are only used to distinguish one component, element, region, layer, or part from another. Thus, the first component, element, region, layer, or part referred to in the examples described herein may also be referred to as the second component, element, region, layer, or part without departing from the teachings of the examples.

[0028] For ease of description, spatial relationship terms such as "above", "upper", "below", and "lower" may be used herein to describe the relationship of one element to another as shown in the accompanying drawings. Such spatial relationship terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is flipped, an element described as "above" or "upper" relative to another element will then be "below" or "lower" relative to the other element. Thus, the term "above" includes both the orientation of "above" and "below" depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relationship terms used herein will be interpreted accordingly.

[0029] The terms used herein are for the purpose of describing various examples only and are not intended to limit the present disclosure. Unless the context clearly dictates otherwise, the singular forms are also intended to include the plural forms. The terms "comprises", "comprising", and "having" list the stated features, quantities, operations, components, elements, and / or combinations thereof that exist, but do not preclude the existence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0030] Due to manufacturing techniques and / or tolerances, variations in the shapes shown in the accompanying drawings may occur. Accordingly, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that occur during manufacturing.

[0031] The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have a variety of configurations, other configurations will be apparent after understanding the disclosure of the present application.

[0032] This application provides a gas transmission system, as Figure 1 and Figure 2 shown, the gas transmission system includes a pressure relief assembly 300, a connecting pipeline 100, and a plurality of branch pipelines 200. The connecting pipeline 100 is used to connect with a gas transmission gas source 910. The plurality of branch pipelines 200 are all connected to the connecting pipeline 100, and the plurality of branch pipelines 200 are connected in parallel. The pressure relief assembly 300 is detachably connected to the connecting pipeline 100 or the branch pipeline 200, and the pressure relief assembly 300 includes a pressure relief hole 311.

[0033] In the gas transmission system of the present application, the pressure relief component 300 includes a pressure relief hole 311, which enables the gas in the connection pipeline 100 or the branch 200 connected to the pressure relief component 300 to flow out through the pressure relief hole 311. The pressure relief component 300 is detachably connected to the connection pipeline 100 or the branch 200. During debugging, the pressure relief component 300 can be disassembled, and the pressure relief component 300 with a different diameter of the pressure relief hole 311 can be replaced to adjust the amount of gas flowing out through the pressure relief hole 311, thereby adjusting the pressure of the gas flowing out of each branch 200. In this way, it is not necessary to set pressure reducing valves and throttle valves on each branch 200, and the space occupied by the gas transmission system is reduced. At the same time, only by disassembling the pressure relief component 300 to adjust the diameter of the pressure relief hole 311 can the pressure of the gas flowing out of each branch 200 be adjusted, which simplifies the adjustment process and shortens the adjustment time. In addition, multiple branches 200 are connected in parallel, and pressure reducing valves are not provided on both the branch 200 and the connection pipeline 100. When the pressure of the gas flowing out of one of the branches 200 changes, the pressure of the gas in the connection pipeline 100 and the pressure of the gas in other branches 200 will change accordingly. In this way, by only detecting the connection pipeline 100 or one branch 200, the pressure change situation of the entire gas transmission system can be obtained, and the difficulty of monitoring the overall situation of the gas transmission system is reduced.

[0034] Optionally, the number of branches 200 can be two, three, four, five or more.

[0035] As Figure 1 shown, the gas transmission system further includes a transfer pipeline 610. The connection pipeline 100 is connected to the gas transmission source 910 through the transfer pipeline 610, so that the gas transmission source 910 can transport gas to the connection pipeline 100 through the transfer pipeline 610, and then transport gas to each branch 200. Each branch 200 can be respectively connected to different devices in the semiconductor device, so as to supply gas to different devices in the semiconductor device.

[0036] Furthermore, a plurality of connection positions 400 are provided on the connection pipeline 100. The plurality of connection positions 400 correspond to the plurality of branches 200 one by one, and the branch 200 is connected to the connection position 400 corresponding to the branch 200, so that the plurality of branches 200 are connected to the connection pipeline 100.

[0037] Optionally, the branch line 200 can be connected to the connecting pipeline 100 through a joint. The connecting pipeline 100 can include a plurality of connecting segments 110. The adjacent connecting segments 110 and between the connecting segment 110 and the branch line 200 can be connected through pipe connectors, and the position where the pipe connector is located is the connection position 400. Taking the number of branch lines 200 as four as an example, the connecting pipeline 100 includes three disconnected connecting segments 110. The first connecting segment 110 can be connected to the first branch line 200 and the transfer pipeline 610 respectively through a tee joint. The first connecting segment 110, the second connecting segment 110 and the second branch line 200 can be connected through a tee joint. The second connecting segment 110, the third connecting segment 110 and the third branch line 200 can be connected through a tee joint. The third connecting segment 110 and the fourth branch line 200 can be connected through a straight (or bent) connection. The positions of the straight (or bent) connection and the tee joint are the connection positions 400.

[0038] Optionally, the gas transmission system includes a plurality of pressure relief components 300, and the pressure relief components 300 can be arranged on the connecting pipeline 100 or the branch line 200.

[0039] In one embodiment, as Figure 1 shown, all the pressure relief components 300 are arranged on the connecting pipeline 100, and the difference between the number of branch lines 200 and the number of pressure relief components 300 can be 1. For example, when the gas transmission system includes three branch lines 200, the number of pressure relief components 300 is 2; for another example, when the gas transmission system includes four branch lines 200, the number of pressure relief components 300 is 3. A pressure relief component 300 is correspondingly arranged on each part of the connecting pipeline 100 between any two adjacent connection positions 400. That is to say, a pressure relief component 300 can be correspondingly arranged on each connecting segment 110, and the pressure relief component 300 is detachably connected to the connecting segment 110, so as to replace the pressure relief component 300 with a pressure relief hole 311 of different diameters based on the pressure requirement of the branch line 200. For any pressure relief component 300, when the pressure relief component 300 is connected to the connecting pipeline 100, the pressure relief hole 311 is communicated with the connecting pipeline 100. When supplying gas through the gas transmission source 910, the gas can flow out through each pressure relief hole 311. By adjusting the diameters of the pressure relief holes 311 in different pressure relief components 300, the gas flowing out of different branch lines 200 can have different pressures. The diameters of the pressure relief holes 311 in different pressure relief components 300 can be the same or different.

[0040] In another embodiment, the pressure relief component 300 is provided on the branch line 200, and at least one branch line 200 is provided with the pressure relief component 300. When supplying gas through the gas supply source 910, the gas can flow out through the pressure relief hole 311 in the pressure relief component 300 provided on the branch line 200. Optionally, only one branch line 200 may not be provided with the pressure relief component 300, and the other branch lines 200 are all provided with the pressure relief component 300, or each branch line 200 may be provided with the pressure relief component 300. In this way, by adjusting the diameter of the pressure relief hole 311 in different pressure relief components 300, the gas pressures flowing out of different branch lines 200 can be made different, and the diameters of the pressure relief holes 311 in different pressure relief components 300 may be the same or different.

[0041] In the embodiment of the present application, the pressure relief component 300 may include a first connector, a second connector, and a pressure relief gasket 310. The first connector is connected to the connecting pipeline 100 or the branch line 200. The first connector is detachably connected to the second connector. The pressure relief gasket 310 is located between the first connector and the second connector, and the pressure relief gasket 310 is provided with a pressure relief hole 311. In this way, only by replacing the pressure relief gasket 310 can the diameter of the pressure relief hole 311 be adjusted, thereby adjusting the pressure of the gas flowing out through the branch line 200.

[0042] Preferably, the diameter d of the pressure relief hole 311 is 0.1 mm - 0.5 mm to avoid noise problems caused by too large a diameter of the pressure relief hole 311.

[0043] Optionally, the pressure relief component 300 may be a VCR metal gasket face seal joint. At this time, the first connector is an integral body composed of a nipple of the VCR metal gasket face seal joint and an internal thread nut sleeved on the nipple. The second connector is an external thread nut of the VCR metal gasket face seal joint. The pressure relief gasket 310 may be a metal gasket of the VCR metal gasket face seal joint. The metal gasket is arranged at the end of the nipple. By threadedly connecting the external thread nut and the internal thread nut, the fixation of the metal gasket can be achieved. When the pressure relief component 300 is connected to the connecting pipeline 100, each connecting section 110 may include two disconnected parts. The two disconnected parts and the installation pipeline 630 for connecting to the nipple can be connected through a tee joint. The installation pipeline 630 is connected to the nipple. The pressure relief gasket 310 is arranged at the end of the nipple. The internal thread nut is sleeved on the nipple, and the internal thread nut is connected to the external thread nut, thereby achieving the fixation of the pressure relief gasket 310. When the pressure relief component 300 is connected to the branch line 200, the branch line 200 may include two disconnected parts. The two disconnected parts and the fixed pipeline for connecting to the nipple can be connected through a tee joint. The fixed pipeline is connected to the nipple. The pressure relief gasket 310 is arranged at the end of the nipple. The internal thread nut is sleeved on the nipple, and the internal thread nut is connected to the external thread nut, thereby achieving the fixation of the pressure relief gasket 310.

[0044] Optionally, the first connecting member and the second connecting member are not limited to the above-mentioned forms, and the first mounting member and the second mounting member may also adopt other pipe connecting members that can fix the pressure relief gasket 310 .

[0045] In the embodiments of the present application, Figure 1 As shown, the gas transmission system also includes a pressure detector 500, which is arranged on the connecting pipeline 100 or the branch 200. The pressure detector 500 can monitor the pressure at the location thereof. After the debugging is completed, the value of the pressure detector 500 is recorded as a preset value. When gas is transmitted through the gas transmission system, if the difference between the value of the pressure detector 500 and the preset value exceeds the preset range (the preset range here can be selected according to the demand), the gas transmission system may be abnormal. At this time, the gas transmission system needs to stop working. When the pressure detector 500 is arranged on the connecting pipeline 100, since no pressure reducing valve is arranged on the connecting pipeline 100 and the branch 200, when the pressure of the gas flowing out of any branch 200 changes, the gas pressure in the connecting pipeline 100 changes accordingly, and the pressure detector 500 can detect the pressure change. When the pressure detector 500 is set on the branch 200, since no pressure reducing valve is set on the connecting pipeline 100 and the branch 200, when the pressure of the gas flowing out of any branch 200 changes, the gas pressure in the connecting pipeline 100, the branch 200 and the other branches 200 will change accordingly, and the pressure detector 500 can also detect the pressure change.

[0046] Preferably, the pressure detector 500 is a differential pressure sensor, and the pressure detector 500 is disposed on the first connecting section 110 of the connecting pipeline 100 .

[0047] In an embodiment of the present application, the gas transmission system further includes a pressure regulating valve 710 , which is disposed on the transfer pipe 610 . The pressure of the gas flowing to the connecting pipe 100 through the transfer pipe 610 can be adjusted by the pressure regulating valve 710 .

[0048] like Figure 1 As shown, the gas transmission system further includes a pneumatic diaphragm valve 810, which is disposed on the transfer pipe 610, is located on the upstream side of the pressure regulating valve 710, and is connected to the compressed gas source 920. In this way, by controlling whether the compressed gas source 920 supplies gas to the pneumatic diaphragm pump, it is possible to control whether the pneumatic diaphragm valve 810 is working, thereby controlling whether the entire gas transmission system is operating.

[0049] Further, the gas transmission system further includes a connecting pipeline 620 and a solenoid valve 820. The pneumatic diaphragm valve 810 is connected to the compressed air source 920 through the connecting pipeline 620, and the solenoid valve 820 is arranged on the connecting pipeline 620. In this way, by controlling the on-off of the solenoid valve 820, it can be controlled whether the compressed air source 920 supplies gas to the pneumatic diaphragm pump, thereby controlling whether the entire gas transmission system operates.

[0050] Preferably, the gas transmission system further includes a control module 720. Both the solenoid valve 820 and the pressure detector 500 are communicatively connected to the control module 720. In this way, the control module 720 can control the solenoid valve 820 to open or close, and further control whether to supply gas to the pneumatic diaphragm valve 810. At the same time, when the difference between the value detected by the pressure detector 500 and the preset value exceeds the preset range, the control module 720 can control the solenoid valve 820 to disconnect, and at this time the gas transmission system stops operating.

[0051] Optionally, the control module 720 can be an industrial control computer.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A gas transmission system, characterized in that: The gas transmission system comprises a pressure relief component, a connecting pipeline and a plurality of branches, wherein the connecting pipeline is used to be connected to a gas transmission source, the plurality of branches are all connected to the connecting pipeline, and the plurality of branches are connected in parallel; The pressure relief component is detachably connected to the connecting pipeline or the branch, and the pressure relief component includes a pressure relief hole.

2. The gas delivery system according to claim 1, characterized in that: The connecting pipeline is provided with a plurality of connecting positions, the plurality of connecting positions correspond to the plurality of branches one by one, and the branches are connected to the connecting positions corresponding to the branches; The portion of the connecting pipeline located between any two adjacent connection positions is correspondingly provided with the pressure relief component. For any of the pressure relief components, when the pressure relief component is connected to the connecting pipeline, the pressure relief hole is communicated with the connecting pipeline.

3. The gas delivery system according to claim 1, characterized in that: The pressure relief component is disposed on at least one of the multiple branches; When the pressure relief assembly is connected to the branch, the pressure relief hole is in communication with the branch.

4. The gas delivery system according to any one of claims 1 to 3, characterized in that: The pressure relief assembly includes a first connecting piece, a second connecting piece and a pressure relief gasket, the first connecting piece is connected to the connecting pipeline or the branch, the first connecting piece and the second connecting piece are detachably connected, the pressure relief gasket is located between the first connecting piece and the second connecting piece, and the pressure relief gasket is provided with the pressure relief hole.

5. The gas delivery system according to claim 4, characterized in that: The diameter of the pressure relief hole is 0.1mm-0.5mm.

6. The gas delivery system according to claim 4, characterized in that: The gas transmission system further comprises a pressure detector, which is arranged on the connecting pipeline or the branch.

7. The gas delivery system according to claim 6, characterized in that: The gas transmission system further includes a transfer pipe and a pressure regulating valve. The connecting pipeline is connected to the gas transmission source through the transfer pipe, and the pressure regulating valve is arranged on the transfer pipe.

8. The gas delivery system according to claim 7, characterized in that: The gas transmission system further comprises a pneumatic diaphragm valve, which is arranged on the transfer pipe, located at the upstream side of the pressure regulating valve, and connected to a compressed gas source.

9. The gas delivery system according to claim 8, characterized in that: The gas transmission system further comprises a connecting pipeline and a solenoid valve, the pneumatic diaphragm valve is connected to the compressed gas source via the connecting pipeline, and the solenoid valve is arranged on the connecting pipeline.

10. The gas delivery system according to claim 9, characterized in that: The gas delivery system further comprises a control module, and the solenoid valve and the pressure detector are both communicatively connected to the control module.

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