Locking and pulling-assisting device for semiconductor load plate

Abstract

The invention discloses a semiconductor load plate locking and pulling assisting device, and belongs to the technical field of semiconductor equipment application. Comprising a mounting substrate and a semiconductor load plate which can be plugged on the mounting substrate along a first direction; the installation substrate is provided with a reference positioning pin which can be arranged on the semiconductor load plate in a penetrating mode in the first direction. The mounting substrate is slidably connected with a locking frame, the locking frame is provided with a locking slide way, two ends of the locking slide way are arranged in a high-low staggered manner along a first direction, and the semiconductor load plate is provided with a sliding seat which can be slidably embedded into the locking slide way from an opening at one end of the locking slide way; a self-locking pulling-assisting mechanism capable of driving the locking frame to move in the second direction is arranged on the mounting base plate, and the first direction is perpendicular to the second direction; the invention aims to provide the locking and pulling-assisting device for the semiconductor load plate, which solves the problems that the semiconductor load plate is difficult to install and position, the fastening is easy to loosen, the disassembly is difficult and the equipment is easy to damage in the prior art.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor equipment applications, and particularly relates to a semiconductor load board locking and extraction assisting device. Background Art

[0002] In the semiconductor manufacturing process, as a carrier platform for key components, the accuracy, stability of installation and disassembly, and the convenience of operation of the semiconductor load board are crucial.

[0003] In the fixing method of the semiconductor load board, bolts or buckles are usually used to fix the semiconductor load board. When using bolts to fasten the semiconductor load board, the installation process is cumbersome, and a large amount of time is required for positioning and tightening operations. At the same time, due to vibrations, temperature changes, etc. generated during the operation of the equipment, the bolts are likely to become loose, resulting in displacement of the load board, thereby affecting the electrical connection and performance stability of the semiconductor chip, and further reducing product quality and production efficiency; when using buckles to connect the semiconductor load board, although the operation is relatively simple, the fastening force of the buckles is limited, it is difficult to effectively lock the position of the semiconductor load board, and the problem of load board loosening is also likely to occur.

[0004] Regarding the above-mentioned fixing methods of the semiconductor load board, for the disassembly means of the semiconductor load board, the existing technical means are even more scarce. Due to the lack of professional extraction tools, operators often can only use simple crowbars and other tools to forcibly pry the load board, which not only has a large operation difficulty, but also is extremely easy to cause damage such as scratches and deformation to the load board, and may even damage the precision semiconductor chips on the load board, resulting in high economic losses.

[0005] Therefore, there is an urgent need for a semiconductor load board locking and extraction assisting device that can achieve efficient locking and safe extraction of the semiconductor load board. Summary of the Invention

[0006] The purpose of the present invention is to overcome the deficiencies in the prior art, and provide a semiconductor load board locking and extraction assisting device, which solves the problems of difficult installation and positioning, easy loosening of fastening, difficult disassembly, and easy damage to equipment in the prior art for semiconductor load boards.

[0007] To achieve the above object, the technical solution adopted by the present invention is: a semiconductor load board locking and extraction assisting device, including an installation substrate and a semiconductor load board that can be inserted and removed along a first direction on the installation substrate; A reference positioning pin that can penetrate the semiconductor load board along the first direction is provided on the installation substrate; A locking frame is slidably connected to the installation substrate. A locking slideway is arranged on the locking frame. The two ends of the locking slideway are arranged at different heights along a first direction, and a sliding seat capable of sliding and embedding into the locking slideway from an opening at one end of the locking slideway is arranged on the semiconductor load board. Wherein, a self-locking and assisting extraction mechanism capable of driving the locking frame to move along a second direction is arranged on the installation substrate, and the first direction is perpendicular to the second direction.

[0008] Optionally, the self-locking and assisting extraction mechanism includes an assisting extraction handle rotatably connected to the installation substrate and a hook limiting seat arranged on the locking frame. Wherein, an assisting extraction ball capable of slidably connecting to the locking frame is arranged on the assisting extraction handle. The assisting extraction ball can slide on the locking frame along a third direction perpendicular to the second direction, and a hook member capable of being buckled with the hook limiting seat is arranged on the assisting extraction handle.

[0009] Optionally, a return spring capable of elastically supporting the hook member is arranged on the assisting extraction handle. When the return spring acts on the hook member, a first hook portion on the hook member can be flipped to be buckled with a second hook portion on the hook limiting seat, and a pressing portion on the hook member can protrude out of the assisting extraction handle.

[0010] Optionally, an arc-shaped limiting groove is arranged on the assisting extraction handle. The center of the arc of the arc-shaped limiting groove coincides with the rotation axis of the assisting extraction handle, and a limiting pin capable of being movably embedded into the arc-shaped limiting groove is arranged on the installation substrate.

[0011] Optionally, the locking slideway includes a loading section near its opening and a voltage stabilizing section arranged at different heights from the loading section along the first direction. The loading section and the voltage stabilizing section are smoothly transitioned through a slope section, and the loading section and the voltage stabilizing section are horizontally arranged along the second direction.

[0012] Optionally, a protective protrusion is arranged on the outer side near the opening of the locking slideway.

[0013] Optionally, a plurality of the sliding seats are arranged on the semiconductor load board. The plurality of sliding seats are symmetrically distributed along the semiconductor load board, and the locking slideways on the locking frame correspond to the sliding seats one by one.

[0014] Optionally, the sliding seat includes a shaft body arranged on the semiconductor load board and a roller sleeved on the shaft body.

[0015] Optionally, the locking frame is slidably connected to the installation substrate through a plurality of groups of linear guide rails.

[0016] Advantages achieved by the present invention compared with the prior art: (1) When it is necessary to lock the semiconductor load board, only need to make the reference positioning pin penetrate through the semiconductor load board in the first direction, and make the rollers on the semiconductor load board fall into the loading section on the locking slideway, then the preliminary positioning of the semiconductor load board can be realized. Subsequently, drive the locking frame to move in the second direction through the self-locking and assisting extraction mechanism. Since the two ends of the locking slideway are arranged at different heights along the first direction, as the locking frame moves, the sliding seat can slide in the locking slideway. And in this process, the component force generated by the inclination angle of the locking slideway can be utilized to make the semiconductor load board only move in the first direction, so that the semiconductor load board can be accurately docked with the mounting substrate, and the efficient locking of the semiconductor load board can be realized without additional complex operations. At the same time, when disassembling the semiconductor load board on the mounting substrate, the cooperation between the sliding seat and the locking slideway can play a buffering and guiding role, avoiding damage to the semiconductor load board caused by sudden force, and realizing safe assisting extraction; (2) By rotating the assisting extraction handle and utilizing the characteristic that the assisting extraction ball slides along the third direction on the locking frame, the locking frame can be easily driven to move in the second direction, thereby realizing the locking and assisting extraction of the semiconductor load board on the mounting substrate. The operation method is simple and direct, greatly improving the operation efficiency and reducing the cumbersome operation steps; (3) The snap-fit design of the hook member and the hook limit seat can effectively prevent the accidental movement of the locking frame after the semiconductor load board is locked, ensuring that the load board remains firmly fixed during the operation of the equipment. Description of the Drawings

[0017] The present invention will be further described below with reference to the drawings and embodiments.

[0018] Figure 1 is a schematic structural diagram of the semiconductor load board locking and assisting extraction device locking the semiconductor load board in the preferred embodiment of the present invention; Figure 2 is a schematic structural diagram of the semiconductor load board locking and assisting extraction device unlocking the locking of the semiconductor load board in the preferred embodiment of the present invention; Figure 3 is a schematic structural diagram of the assisting extraction handle, the hook member and the hook limit seat in the preferred embodiment of the present invention; Figure 4 is a top view structural diagram of the locking frame in the preferred embodiment of the present invention; Figure 5 is a side view structural diagram of the locking frame in the preferred embodiment of the present invention; Figure 6 is a schematic structural diagram of the semiconductor load board in the preferred embodiment of the present invention; Among them, 1. Installation substrate; 2. Semiconductor load board; 201. Slide; 3. Reference positioning pin; 4. Locking frame; 401. Locking slideway; 4011. Loading section; 4012. Ramp section; 4013. Voltage stabilizing section; 5. Unplugging assist handle; 501. Unplugging assist ball; 502. Arc-shaped limiting groove; 6. Hook limiting seat; 601. Second hook portion; 7. Hook member; 701. First hook portion; 702. Pressing portion; 8. Return spring; 9. Limiting pin; 10. Protective protrusion. Detailed implementation manners

[0019] Now, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. These drawings are all simplified schematic diagrams, only illustrating the basic structure of the present invention in a schematic manner, so they only show the components related to the present invention.

[0020] It should be noted that if there are directional indications (such as up, down, bottom, top, etc.) involved in this embodiment, then such directional indications are only used to explain the relative positional relationship and movement conditions between components in a certain specific posture. If this specific posture changes, then such directional indications will also change accordingly. The terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. Unless otherwise clearly specified and defined, the terms "set", "connected", and "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal communication of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Embodiment 1

[0021] As Figures 1 - 6 shown, a locking and unplugging assist device for a semiconductor load board includes an installation substrate 1 and a semiconductor load board 2 that can be plugged and unplugged along a first direction on the installation substrate 1. Specifically, a probe disk is provided on the semiconductor load board 2, and a slot capable of docking with the probe disk is provided on the installation substrate 1. The probe disk is inserted into the slot, and the electrical connection between the semiconductor load board 2 and the device can be realized.

[0022] To quickly locate the installation position of the semiconductor load board 2 and the installation substrate 1 and simplify the installation process, in this technical solution, a reference positioning pin 3 that can penetrate the semiconductor load board 2 along the first direction is provided on the installation substrate 1. And in this technical solution, the number of the reference positioning pins 3 is not less than two to increase the positioning accuracy of the semiconductor load board 2.

[0023] Further, to facilitate the insertion and extraction of the semiconductor load board 2 on the mounting substrate 1, a locking frame 4 is slidably connected to the mounting substrate 1. The locking frame 4 is slidably connected to the mounting substrate 1 through a plurality of sets of linear guide rails to ensure the linear motion accuracy of the locking frame 4. At the same time, a locking slideway 401 is provided on the locking frame 4. The two ends of the locking slideway 401 are arranged at different heights along the first direction, and a sliding seat 201 is provided on the semiconductor load board 2 that can slide and be embedded into the locking slideway 401 from the opening at one end of the locking slideway 401. And a self-locking assisting extraction mechanism capable of driving the locking frame 4 to move in the second direction is provided on the mounting substrate 1. That is, when manually operating the semiconductor load board 2 to be sleeved on the reference positioning pin 3 and the sliding seat 201 is embedded into the opening at one end of the locking slideway 401, since the reference positioning pin 3 restricts the movement range of the semiconductor load board 2 in the first direction, when the self-locking assisting extraction mechanism drives the locking frame 4 to move in the second direction, along with the relative sliding between the locking slideway 401 and the sliding seat 201, the locking frame 4 can press down the semiconductor load board 2 to be inserted into the mounting substrate 1 along the first direction. Similarly, when the self-locking assisting extraction mechanism drives the locking frame 4 to move in the reverse direction, the locking frame 4 can push up the semiconductor load board 2 to be pulled out from the mounting substrate 1 along the first direction.

[0024] And since the first direction and the second direction in the above are perpendicular to each other, it is difficult for external forces to affect the position state of the semiconductor load board 2 on the mounting substrate 1 within a certain range. Therefore, in the normal state, the semiconductor load board locking and assisting extraction device in the present technical solution can effectively eliminate the adverse effects of factors such as vibration and temperature change generated during equipment operation on the position state of the semiconductor load board 2.

[0025] At the same time, as Figure 1 , Figure 5 shown, to further reduce the influence of equipment vibration and temperature change on the position of the semiconductor load board 2, the locking slideway 401 includes a loading section 4011 near its opening and a voltage stabilizing section 4013 arranged at different heights from the loading section 4011 along the first direction. The loading section 4011 and the voltage stabilizing section 4013 are smoothly transitioned through a ramp section 4012, and the loading section 4011 and the voltage stabilizing section 4013 are horizontally arranged along the second direction. Specifically, the vertical distance between the loading section 4011 and the mounting substrate 1 is greater than the vertical distance between the voltage stabilizing section 4013 and the mounting substrate 1, and when the sliding seat 201 slides into the voltage stabilizing section 4013, the semiconductor load board 2 can be firmly inserted into the mounting substrate 1.

[0026] As described above, to make the movement of the sliding seat 201 in the locking slideway 401 relatively smooth, the sliding seat 201 includes a shaft body provided on the semiconductor load board 2 and a roller sleeved on the shaft body.

[0027] As described above, a protective protrusion 10 is provided on the outer side of the locking slideway 401 near its opening. The protective protrusion 10 is used to prevent the sliding seat 201 from jumping out of the locking slideway 401.

[0028] As described above, in order to make the force distribution of the semiconductor load board 2 uniform, the semiconductor load board 2 is provided with a plurality of sliding seats 201. The plurality of sliding seats 201 are symmetrically distributed along the semiconductor load board 2, and the locking slideways 401 on the locking frame 4 correspond to the sliding seats 201 one by one. Embodiment 2

[0029] As Figures 1 - 6 shown, on the basis of Embodiment 1, in order to improve the stability of the semiconductor load board locking and assisting extraction device, the self-locking assisting extraction mechanism has good self-locking property and functionality. Specifically, the self-locking assisting extraction mechanism includes an assisting extraction handle 5 rotatably connected to the mounting substrate 1 and a hook limiting seat 6 provided on the locking frame 4; wherein, an assisting extraction ball 501 capable of slidingly connecting to the locking frame 4 is provided on the assisting extraction handle 5. The assisting extraction ball 501 can slide on the locking frame 4 along a third direction perpendicular to the second direction, and a hook member 7 capable of being buckled with the hook limiting seat 6 is provided on the assisting extraction handle 5. That is, when the assisting extraction handle 5 is rotated, the locking frame 4 can be dragged to move along the second direction through the assisting extraction ball 501, so as to realize the plugging and unplugging actions of the semiconductor load board 2 and the mounting substrate 1 through the locking frame 4.

[0030] Furthermore, as Figure 1 、 Figure 3 shown, when the semiconductor load board 2 and the mounting substrate 1 are completely plugged in, the hook member 7 on the assisting extraction handle 5 can be buckled with the buckle limiting seat to prevent the vibration and temperature change during the high-intensity operation state of the device from having an adverse effect on the position between the semiconductor load board 2 and the mounting substrate 1. And since a return spring 8 capable of elastically supporting the hook member 7 is provided on the assisting extraction handle 5, the return spring 8 can act on the hook member 7, so that the first hook portion 701 on the hook member 7 can be flipped to be buckled with the second hook portion 601 on the hook limiting seat 6, and the pressing portion 702 on the hook member 7 can protrude out of the assisting extraction handle 5. That is, as Figure 3 shown, when the pressing portion 702 on the hook member 7 is pressed into the assisting extraction handle 5 at this time, the first hook portion 701 on the hook member 7 can be moved away from the second hook portion 601, which is convenient for the operator to drive the locking frame 4 to move by rotating the assisting extraction handle 5 (that is, to pull out the semiconductor load board 2 from the mounting substrate 1).

[0031] As described above, as Figure 1As shown, an arc-shaped limit groove 502 is provided on the handle 5 for assisting in pulling out. The center of the arc of the arc-shaped limit groove 502 coincides with the rotation axis of the handle 5 for assisting in pulling out, and a limit pin 9 that can be movably embedded in the arc-shaped limit groove 502 is provided on the mounting substrate 1. The cooperation between the arc-shaped limit groove 502 and the limit pin 9 can limit the maximum rotation angle of the handle 5 for assisting in pulling out, and at the same time, the position state between the semiconductor load board 2 and the mounting substrate 1 can be understood by observing the position of the limit pin 9 relative to the arc-shaped limit groove 502.

[0032] In this technical solution, the first direction, the second direction, and the third direction correspond to the X-axis direction, the Y-axis direction, and the Z-axis direction in the space rectangular coordinate system, and are perpendicular to each other in pairs.

[0033] Working principle: When it is necessary to lock the semiconductor load board 2, the semiconductor load board 2 can be first inserted into the mounting substrate 1 along the first direction, so that the reference positioning pin 3 penetrates through the semiconductor load board 2, and the rollers on the semiconductor load board 2 fall into the loading section 4011 on the locking slideway 401 to achieve preliminary positioning. Subsequently, rotate the handle 5 for assisting in pulling out to drive the locking frame 4 to move. At this time, since the two ends of the locking slideway 401 are arranged at different heights along the first direction, along with the movement of the locking frame 4, the rollers can slide and roll relative to each other in the locking slideway 401. And in this process, by using the component force generated by the inclination angle of the locking slideway 401, the semiconductor load board 2 can be gradually pressed down on the mounting substrate 1 in the first direction, so as to achieve the precise docking of the semiconductor load board 2 and the mounting substrate 1. Similarly, when the handle 5 for assisting in pulling out is rotated in the reverse direction, it can drive the locking frame 4 to move in the reverse direction. Under the guiding action of the locking slideway 401, it can drive the semiconductor load board 2 to be pulled out from the mounting substrate 1 along the first direction, ensuring the stability and controllability of the process of assisting in pulling out, and effectively avoiding the damage of the semiconductor load board 2 due to uncontrollable factors.

[0034] At the same time, the position of the handle 5 for assisting in pulling out can be further fixed by the buckling of the hook member 7 and the hook limit seat 6, which can effectively form the position locking of the semiconductor load board 2 and solve the problem that the semiconductor load board 2 is prone to looseness.

[0035] Based on the ideal embodiments of the present invention as inspiration, through the above description, relevant personnel can completely make various changes and modifications without departing from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and the technical scope must be determined according to the scope of the claims.

Claims

1. A semiconductor load board locking and pulling-out device, characterized in that: It comprises a mounting substrate (1) and a semiconductor load board (2) capable of being plugged into and out of the mounting substrate (1) along a first direction; The mounting substrate (1) is provided with a reference positioning pin (3) capable of penetrating the semiconductor load board (2) along a first direction; The mounting base plate (1) is slidably connected to a locking frame (4), the locking frame (4) is provided with a locking slideway (401), the two ends of the locking slideway (401) are arranged in a staggered manner along a first direction, and the semiconductor load board (2) is provided with a slide seat (201) capable of sliding from an opening at one end of the locking slideway (401) and being embedded in the locking slideway (401); Wherein, a self-locking and pulling-out assisting mechanism capable of driving the locking frame (4) to move along a second direction is provided on the mounting base plate (1), and the first direction and the second direction are perpendicular to each other.

2. The semiconductor load board locking and pulling-out device according to claim 1, characterized in that: The self-locking auxiliary extraction mechanism comprises an auxiliary extraction handle (5) rotatably connected to the mounting base plate (1) and a hook limit seat (6) arranged on the locking frame (4); The auxiliary extraction handle (5) is provided with an auxiliary extraction ball (501) which can be slidably connected to the locking frame (4); the auxiliary extraction ball (501) can slide on the locking frame (4) along a third direction perpendicular to the second direction; and the auxiliary extraction handle (5) is provided with a hook member (7) which can be buckled with the hook limit seat (6).

3. The semiconductor load board locking and pulling-out device according to claim 2, characterized in that: The auxiliary extraction handle (5) is provided with a return spring (8) capable of elastically supporting the hook member (7), and when the return spring (8) acts on the hook member (7), the first hook portion (701) on the hook member (7) can be turned over to be engaged with the second hook portion (601) on the hook limit seat (6), and the pressing portion (702) on the hook member (7) can protrude outward from the auxiliary extraction handle (5).

4. The semiconductor load board locking and pulling-out device according to claim 3, characterized in that: The auxiliary extraction handle (5) is provided with an arc-shaped limiting groove (502), the arc center of the arc-shaped limiting groove (502) coincides with the rotation axis of the auxiliary extraction handle (5), and the mounting base plate (1) is provided with a limiting pin (9) that can be movably embedded in the arc-shaped limiting groove (502).

5. The semiconductor load board locking and pulling-out device according to claim 1, characterized in that: The locking slideway (401) comprises a loading section (4011) near its opening and a voltage stabilizing section (4013) arranged in a height-staggered manner relative to the loading section (4011) along a first direction, a ramp section (4012) smoothly transitions between the loading section (4011) and the voltage stabilizing section (4013), and the loading section (4011) and the voltage stabilizing section (4013) are arranged horizontally along a second direction.

6. The semiconductor load board locking and pulling-out device according to claim 1, characterized in that: A protective protrusion (10) is provided on the outer side of the locking slideway (401) near its opening.

7. The semiconductor load board locking and pulling-out device according to claim 1, characterized in that: The semiconductor load board (2) is provided with a plurality of slide seats (201), the plurality of slide seats (201) are symmetrically distributed along the semiconductor load board (2), and the locking slideways (401) on the locking frame (4) correspond to the slide seats (201) one by one.

8. The semiconductor load board locking and pulling-out device according to claim 1, characterized in that: The slide seat (201) comprises a shaft body arranged on the semiconductor load plate (2) and a roller sleeved on the shaft body.

9. The semiconductor load board locking and pulling-out device according to claim 1, characterized in that: The locking frame (4) is slidably connected to the mounting base plate (1) via a plurality of groups of linear guide rails.

Images