Connecting rod type cover opening and closing device and method

Abstract

The present invention relates to a device and a method for opening and closing a cover by means of a link, wherein the device opens and closes a cover covering a chamber and includes a plurality of links connected between the chamber and the cover. According to the present invention, when a cover covering a chamber of a chemical vapor deposition apparatus is opened, the cover can be rotated using a link structure, reducing a rotation radius and a rotation angle, thereby preventing the cover from interfering with an upper structure and preventing parts inside the cover from being damaged.

Description

Technical Field

[0001] The present invention relates to a lid opening and closing device and method using a link mechanism. More specifically, when opening the lid covering the chamber of a chemical vapor deposition apparatus, a link structure is used to rotate the lid, reducing the rotation radius and rotation angle, thereby preventing the lid from interfering with the upper structure and preventing damage to the components inside the lid. The lid opening and closing device and method using a link mechanism are provided. Background Art

[0002] Generally, in the process of manufacturing semiconductor devices, semiconductor wafers undergo a prescribed deposition process, which is performed using a chemical vapor deposition apparatus. Refer to Figure 1 , according to the prior art, a chemical vapor deposition apparatus includes: a chamber C2 for accommodating a wafer and performing a prescribed processing process; and a lid C1 for opening and closing the chamber C2. That is, before and after the wafer deposition process, the lid C1 is opened or closed to perform a prescribed operation.

[0003] In order to open and close the lid C1, conventionally, a structure is used in which a hinge H is provided between the lid C1 and the chamber C2 to open and close one side of the lid C1. However, this prior art has the following problems.

[0004] First, in the prior art, when opening the lid C1, it rotates around the hinge H, resulting in a large rotation radius and a problem of interference with the upper structure of the lid C1.

[0005] Second, in the prior art, when opening the lid C1, the opening angle is large, resulting in a problem of damage to the components provided inside the lid C1.

[0006] Third, in the prior art, when opening and closing the lid, there is a problem that cables are inserted around the hinge H and damaged.

[0007] The prior art is the technical information owned by the inventor for deriving the present invention or obtained during the process of deriving the present invention, and is not necessarily publicly known technology that was publicly available to the general public before the application of the present invention.

[0008] Prior Art Documents

[0009] Patent Documents

[0010] (Patent Document 1) Korean Patent No. 10-2439228 (authorized on August 29, 2022)

[0011] (Patent Document 2) Korean Patent No. 10-1269858 (authorized on May 27, 2013) Summary of the Invention

[0012] Technical Problem

[0013] In the process of solving the above problems, an object of the present invention is to provide a link-type lid opening / closing device and method that utilize a link structure to reduce the rotation radius when opening the lid, thereby preventing the lid from interfering with the upper structure.

[0014] Moreover, an object of the present invention is to provide a link-type lid opening / closing device and method that utilize a link structure to reduce the opening angle when opening the lid and reduce damage to components provided inside the lid.

[0015] Furthermore, an object of the present invention is to provide a link-type lid opening / closing device and method that utilize a link structure to open the lid and prevent the insertion of cables, etc., from being damaged.

[0016] The problems to be solved by the present invention are not limited to the above-mentioned problems. Those of ordinary skill in the technical field to which the present invention pertains can clearly understand other problems to be solved that are not mentioned from the following description.

[0017] Solution to the problem

[0018] The lid opening / closing device according to an embodiment of the present invention opens and closes a lid covering a chamber, and the opening / closing device includes a plurality of links connected between the chamber and the lid.

[0019] In this case, the link may include a first link and a second link provided between the chamber and the lid. One side of the first link is rotatably coupled to the chamber, and the other side of the first link is rotatably coupled to the lid. The second link is disposed at a predetermined distance from the first link. One side of the second link is rotatably coupled to the chamber, and the other side of the second link is rotatably coupled to the lid. The second link uses a cylinder with a variable length, and the length of the first link is shorter than the minimum length of the second link.

[0020] Moreover, the ratio of a fourth length, which is the distance between the first link and the second link mounted on the lid, a third length, which is the distance between the first link and the second link mounted on the chamber, a second length, which is the length of the second link, and a first length, which is the length of the first link, may be 3.3:2.73:2 to 3:1.5.

[0021] Furthermore, the driving angle of the second link may be 54° to 120° measured clockwise with respect to the horizontal plane of the chamber.

[0022] Moreover, the length of the second link described above can be increased according to the driving angle. When the driving angle is 54°, it is 200 mm, and when the driving angle is 120°, it is 300 mm.

[0023] The lid opening and closing method according to an embodiment of the present invention utilizes the lid opening and closing device according to the above embodiment, which includes the plurality of links connected between the chamber and the lid, and the lid is opened and closed by the rotation of the links.

[0024] Moreover, the second link of the link can utilize a cylinder with a variable length. The length of the first link is shorter than the shortest length of the second link. While rotating the second link by the driving part, the length is changed so that the lid moves along a parabolic trajectory.

[0025] Moreover, the ratio of the fourth length, which is the distance between the first link and the second link installed on the lid, the third length, which is the distance between the first link and the second link installed on the chamber, the second length, which is the length of the second link, and the first length, which is the length of the first link described above, can be 3.3:2.73:2 to 3:1.5. When the lid is opened, the driving angle of the second link is measured clockwise with respect to the horizontal plane of the chamber, starting from 54° and ending at 120°. The length of the second link increases according to the driving angle. When the driving angle is 54°, it is 200 mm, and when the driving angle is 120°, it is 300 mm.

[0026] Effects of the Invention

[0027] As described above, according to the present invention, there is an effect that the phenomenon of the lid interfering with the upper structure can be reduced.

[0028] Moreover, according to the present invention, there is also an effect that damage to components provided inside the lid can be reduced.

[0029] Moreover, according to the present invention, there is also an effect that the phenomenon of being damaged by the insertion of cables, etc. can be prevented.

[0030] The effects of the present invention are not limited to the above-mentioned effects, and those skilled in the art to which the present invention pertains can clearly understand other effects not mentioned from the following description. Brief Description of the Drawings

[0031] Figure 1 It is a schematic diagram showing a lid opening and closing device according to the prior art.

[0032] Figure 2 And Figure 3 It is a schematic diagram showing a lid opening and closing device according to an embodiment of the present invention.

[0033] Figure 4It is a schematic diagram showing the lid opening and closing device according to an embodiment of the present invention in a geometric form.

[0034] Figure 5 It is a schematic diagram showing the lid being opened in sequence using the lid opening and closing device according to an embodiment of the present invention.

[0035] Figure 6 It is a schematic diagram comparing the difference in the rising amplitude of the lid using the lid opening and closing devices according to the prior art and the present invention.

[0036] Figure 7 It is a schematic diagram comparing the difference in the rotation angle of the lid using the lid opening and closing devices according to the prior art and the present invention.

[0037] (Description of reference numerals)

[0038] 110: First link

[0039] 120: Second link Detailed description of the invention

[0040] In the present invention, the drawings may be represented in an exaggerated manner for the purpose of differentiating from the prior art, clarity, and understanding of the technology. Also, the terms described below are defined in consideration of the functions in the present invention and may vary according to the intention of the user, operator, or convention. Therefore, these terms should be defined based on the technical content throughout the present specification. On the other hand, the embodiments are only exemplary matters of the structural elements proposed within the scope of the rights of the present invention and do not limit the scope of the rights of the present invention. The scope of the rights should be interpreted based on the technical idea throughout the specification of the present invention.

[0041] Throughout the specification, when a structure "includes" another structure, unless there is a particularly contrary description, it means that other structures may also be included and the remaining other structures are not excluded.

[0042] Also, when a structure is "connected to", "linked to", or "combined with" another structure, this means that there may be a case of "directly connected to", "directly linked to", or "directly combined with", and there may also be a case of "connected in a state where other structures are interposed therebetween", "linked in a state where other structures are interposed therebetween", or "combined in a state where other structures are interposed therebetween". On the contrary, when a structure is "directly connected to", "directly linked to", or "directly combined with" another structure, it should be understood that there are no other structures in between.

[0043] Also, when directional terms such as "front", "rear", "upper", "lower", "left", "right", "one end", "the other end", "both ends" are used, they are exemplarily used in relation to the direction of the disclosed figures and thus cannot be restrictively interpreted. When terms such as "first", "second" are used, they are terms for distinguishing each structure and cannot be restrictively interpreted.

[0044] To more clearly illustrate the features of the embodiments of the present invention, detailed descriptions of matters well-known to those of ordinary skill in the art to which the following embodiments pertain are omitted. Also, detailed descriptions of parts in the figures that are not relevant to the description of the embodiments are omitted.

[0045] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0046] Figure 2 and Figure 3 is a schematic diagram showing a lid opening and closing device according to an embodiment of the present invention, Figure 4 is a schematic diagram geometrically showing a lid opening and closing device according to an embodiment of the present invention. From Figure 4 (a) to Figure 4 (d) show the process of opening the lid, Figure 5 is a schematic diagram showing the sequential opening of the lid using a lid opening and closing device according to an embodiment of the present invention, Figure 6 is a schematic diagram comparing the difference in the rising amplitude of the lid using lid opening and closing devices according to the prior art and the present invention, Figure 7 is a schematic diagram comparing the difference in the rotation angle of the lid using lid opening and closing devices according to the prior art and the present invention.

[0047] Referring to Figures 2 to 5 , a lid opening and closing device 100 according to an embodiment of the present invention is used to open and close a lid C1 covering a chamber C2, and includes a plurality of linkages L connected between the chamber C2 and the lid C1. That is, the lid C1 can be opened and closed using the plurality of linkages L, rather than using a hinge as in the past.

[0048] In the past, as described above, a hinge was used and rotated around the hinge, resulting in a large rotation radius and a problem of interference with the upper structure of the lid. Also, in the prior art, when the lid is opened, the opening angle is large, resulting in a problem of damage to the components provided inside the lid. Also, in the prior art, when the lid is opened and closed, there is a problem that cables or the like are inserted around the hinge and damaged.

[0049] The present invention is used to solve such problems. The lid can be opened and closed using a linkage structure instead of a hinge to reduce the rotation radius and rotation angle, prevent interference with the upper structure and damage to internal components, and prevent the phenomenon of cables or the like being inserted and damaged.

[0050] As shown in the figure, the above-mentioned connecting rod L may include a first connecting rod 110 and a second connecting rod 120 disposed between the above-mentioned chamber C2 and the above-mentioned lid C1. At this time, one side of the above-mentioned first connecting rod 110 can be rotatably combined with the above-mentioned chamber C2, and the other side of the above-mentioned first connecting rod 110 is rotatably combined with the above-mentioned lid C1. Also, the above-mentioned second connecting rod 120 may be disposed at a predetermined distance from the above-mentioned first connecting rod 110. One side of the above-mentioned second connecting rod 120 is rotatably combined with the above-mentioned chamber C2, and the other side of the above-mentioned second connecting rod 120 is rotatably combined with the above-mentioned lid C1. Such above-mentioned first connecting rod 110 and above-mentioned second connecting rod 120 can be pin-connected to the above-mentioned lid C1 and above-mentioned chamber C2 and be rotatably arranged.

[0051] That is, the above-mentioned first connecting rod 110 and the above-mentioned second connecting rod 120 separated by a predetermined distance are respectively disposed between the above-mentioned lid C1 and the above-mentioned chamber C2. With this structure, the above-mentioned lid C1 and the above-mentioned chamber C2 function as connecting rods, and a four-bar linkage structure can be completed as a whole.

[0052] At this time, the above-mentioned second connecting rod 120 can utilize a cylinder with variable length, and the length of the above-mentioned first connecting rod 110 is shorter than the minimum length of the above-mentioned second connecting rod 110. That is, when the above-mentioned second connecting rod 120 changes its length and rotates at the same time, the length of the above-mentioned first connecting rod 110 is shorter. Thus, the above-mentioned lid C1 rises and rotates with the above-mentioned first connecting rod 110 as the center, and a parabolic trajectory is formed thereby. This will be described later.

[0053] On the other hand, the ratio of the fourth length L4, which is the distance between the above-mentioned first connecting rod 110 and the above-mentioned second connecting rod 120 installed on the above-mentioned lid C1, the third length L3, which is the distance between the above-mentioned first connecting rod 110 and the above-mentioned second connecting rod 120 installed on the above-mentioned chamber C2, the second length L2, which is the length of the above-mentioned second connecting rod 120, and the first length L1, which is the length of the above-mentioned first connecting rod 110, is preferably 3.3:2.73:2 to 3:1.5. For example, when the above-mentioned fourth length L4 is 330 mm, the above-mentioned third length L3 is 270 mm, the above-mentioned second length L2 is 200 mm to 300 mm, and the above-mentioned first length L1 is 150 mm. At this time, the above-mentioned second length L2 has a stroke of 100 mm because the above-mentioned second connecting rod 120 utilizes a variable cylinder, and the above-mentioned second length is in the range of 200 mm to 300 mm.

[0054] According to this invention, the above-mentioned lid C1 moves along a parabolic trajectory, and stable opening and closing can be achieved. This will be described separately.

[0055] On the other hand, the driving angle θ of the second link 120 is preferably 54° to 120° measured clockwise with respect to the horizontal plane of the chamber C2. At this time, the length of the second link 120 can be increased according to the driving angle θ, which is 200 mm when the driving angle is 54°, and 300 mm when the driving angle is 120°.

[0056] That is, when opening and closing the lid C1, the rotation radius of the lid C1, that is, the rising amplitude, needs to be adjusted to prevent interference with the upper structure. Also, the rotation angle of the lid C1 should not be excessive to reduce damage to the components provided inside the lid C1. To this end, the lengths and driving angles of the respective links 110 and 120 as described above are adjusted.

[0057] According to this invention, the lid C1 moves along a parabolic trajectory, which can suppress excessive rising and prevent rotation at an excessive angle.

[0058] Refer to Figures 2 to 5 A lid opening and closing method of the lid opening and closing device 100 using the above-mentioned invention will be described.

[0059] First, as described above, the opening and closing device 100 of the present invention may include the plurality of links L connected between the chamber C2 and the lid C1. The lid C1 is opened and closed by the rotation of the link L. At this time, the second link 120 of the link L uses a cylinder with a variable length, and the length of the first link 110 is shorter than the shortest length of the second link 120. With this structure, the lid C1 on the second link 120 side can be opened and closed while rising.

[0060] To this end, the driving unit P can be used to rotate the second link 120 while changing its length so that the lid C1 moves along a parabolic trajectory. The driving unit P can use an electric motor or a gearbox for rotating the second link 120. Also, the driving unit P can be a pump that provides hydraulic or pneumatic pressure to change the length of the second link 120. The structure of the driving unit P itself is well-known, so detailed description and illustration related thereto are omitted.

[0061] On the other hand, the ratio of the fourth length L4, which is the distance between the first link 110 and the second link 120 mounted on the lid C1, the third length L3, which is the distance between the first link 110 and the second link 120 mounted on the chamber C2, the second length L2, which is the length of the second link 120, and the first length L1, which is the length of the first link 110, is 3.3:2.73:2 - 3:1.5. And when the lid C1 is opened, the driving angle θ of the second link 120 is measured clockwise with respect to the horizontal plane of the chamber C2, starting from 54° and ending at 120°. At this time, the length of the second link 120 increases according to the driving angle θ, being 200 mm when the driving angle is 54° and 300 mm when the driving angle is 120°.

[0062] According to this invention of the present invention, the lid C1 moves along a parabolic trajectory, which can suppress excessive rising, reduce interference with upper components, and prevent damage to components inside the lid C1.

[0063] Regarding this, refer to Figure 4 and Figure 5 to explain again. As shown in Figure 4 (a) part and Figure 5 (a) part, the driving part is used to rotate the second link 120 to increase the driving angle θ. Thereby, the lid C1 starts to rise. At this time, Figure 4 the length of the second link 120 shown in (b) part also increases. With this structure, the lid C1 can rise an appropriate distance. At this time, as shown in Figure 5 (b) part, the inclination angle of the lid C1 does not become too large, but rises a specific distance. After that, as shown in Figure 4 (c) part and Figure 4 (d) part, when the second link 120 is continuously rotated and its length is increased, as shown in Figure 5 (c) part, the lid C1 can finish rising and then descend at a specific inclination angle.

[0064] That is, as shown in the figure, the lid C1 can rotate appropriately without excessive rising and perform a part of horizontal movement to open the chamber C2.

[0065] Compared with the prior art, this invention of the present invention, as shown in Figure 6 (a) part, the conventional rotation radius of 750 mm, that is, the rising distance, is reduced to 720 mm as shown in Figure 6 (b) part in the present invention, which can reduce the concern of interference with upper components.

[0066] And, as shown in Figure 7(As shown in part (a), conventionally, the opening angle reaches 62 degrees, and the components inside the lid are likely to be damaged. However, in the present invention, as Figure 7 (shown in part (b), it is reduced to 19 degrees, which can prevent the components inside the lid from being damaged.

[0067] As described above, according to the present invention, it is possible to reduce the rotation radius of the lid, that is, the rising distance, to reduce the possibility of the lid interfering with the upper structure.

[0068] Moreover, according to the present invention, it is possible to minimize the opening angle of the lid and reduce the possibility of damage to the components provided inside the lid.

[0069] Furthermore, according to the present invention, since structures such as conventional hinges are not used, it is possible to prevent the phenomenon of cables and the like being damaged when inserted.

[0070] As described above, the present invention is described with reference to the embodiments shown in the drawings. However, it should be understood that this is only exemplary, and various modifications and equivalent other embodiments can be made based on the common knowledge in the technical field to which this technology belongs. Therefore, the true technical protection scope of the present invention is based on the appended claims and should be determined based on the specific content of the above invention.

[0071] Industrial Applicability

[0072] The present invention relates to a manufacturing method and can be applied to the semiconductor-related industrial field.

Claims

1. A lid opening and closing device of a linkage type, for opening and closing a lid covering a chamber, characterized in that: The link-type lid opening and closing device includes a plurality of links connected between the chamber and the lid.

2. The lid opening and closing device of the linkage type according to claim 1, characterized in that: The connecting rod comprises a first connecting rod and a second connecting rod which are arranged between the chamber and the cover. One side of the first connecting rod is rotatably connected to the chamber, and the other side of the first connecting rod is rotatably connected to the cover. The second link is arranged at a predetermined distance from the first link, one side of the second link is rotatably coupled to the chamber, and the other side of the second link is rotatably coupled to the cover. The second connecting rod uses a cylinder with variable length. The length of the first connecting rod is shorter than the minimum length of the second connecting rod.

3. The linkage type lid opening and closing device according to claim 2, characterized in that: The ratio of the fourth length of the distance between the first connecting rod and the second connecting rod installed on the above-mentioned cover, the third length of the distance between the first connecting rod and the second connecting rod installed in the above-mentioned chamber, the second length of the length of the second connecting rod and the first length of the length of the first connecting rod is 3.3:2.73:2~3:1.

5.

4. The linkage type lid opening and closing device according to claim 3, characterized in that: The driving angle of the second connecting rod is 54° to 120° measured in a clockwise direction with respect to the horizontal plane of the chamber.

5. The linkage type lid opening and closing device according to claim 4, characterized in that: The length of the second connecting rod increases according to the driving angle, and is 200 mm when the driving angle is 54°, and is 300 mm when the driving angle is 120°.

6. A lid opening and closing method using a linkage, using the lid opening and closing device according to any one of claims 1 to 5, characterized in that: The invention comprises the plurality of connecting rods connected between the chamber and the cover, and the cover is opened and closed by the rotation of the connecting rods.

7. The lid opening and closing method of claim 6, wherein: The second connecting rod of the connecting rod utilizes a cylinder with a variable length, and the length of the first connecting rod is shorter than the shortest length of the second connecting rod. The second link is rotated by a driving unit and its length is changed at the same time, so that the cover moves along a parabolic trajectory.

8. The lid opening and closing method of claim 7, wherein: The ratio of the fourth length as the distance between the first connecting rod installed on the cover and the second connecting rod, the third length as the distance between the first connecting rod installed on the chamber and the second connecting rod, the second length as the length of the second connecting rod, and the first length as the length of the first connecting rod is 3.3:2.73:2 to 3:1.5, When the lid is opened, the driving angle of the second connecting rod is measured in a clockwise direction based on the horizontal plane of the chamber, starting from 54° and ending at 120°. The length of the second connecting rod increases according to the driving angle, and is 200 mm when the driving angle is 54°, and is 300 mm when the driving angle is 120°.

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