Measuring instrument with arc encoder track
By adopting a movable encoder part and an electronic position encoder in the measurement instrument, combined with the signal modulation element of the field generation part and the sensing part, the challenge of arc motion measurement in the prior art is solved, achieving high precision, compactness, low cost and robust measurement effects for pollution.
Patent Information
- Application Number
- CN202411796882.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-12-20
- Filing Date
- 2024-12-09
- Publication Date
- 2025-06-20
AI Technical Summary
Existing measurement instruments have challenges in achieving compact size, high resolution, accuracy, low cost and robustness to pollution, especially in arc motion measurements.
A measuring instrument is designed, using a movable encoder part and an electronic position encoder to achieve high-precision measurement by measuring the absolute relative position between the detector part and the scale part by the arc motion, and using the signal modulation elements of the field generating part and the sensing part.
It provides high resolution and high accuracy arc motion measurements under compact size and low cost conditions, and is robust to pollution and is suitable for a variety of industrial applications.
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Figure CN120176741A_ABST
Abstract
Description
Background Art Technical Field
[0001] The present disclosure relates to metrology and, more particularly, to measuring instruments, such as may include a movable member (e.g., a stylus), which rotates in an arcuate motion about a pivot portion, and the corresponding measurement result of the movable member is determined by an electronic position encoder, and some examples of such measuring instruments include test indicators, lever dial indicators, lever dial gauges, etc.
[0002] Description of Related Art
[0003] Certain measuring instruments include a movable member (e.g., including a stylus), which moves in an arcuate motion when utilized (e.g., to determine the measurement result of a workpiece being inspected). As an example, a test indicator (e.g., sometimes also referred to as a lever indicator, lever dial indicator, lever dial gauge, etc.) described in U.S. Patent Publication No. 2022 / 0341733 (‘733 publication) includes a stylus that rotates about a pivot portion at a corresponding rotation angle (e.g., in an arcuate motion). The rotation of the stylus causes a sector gear to move on the opposite side of the pivot portion, which causes an encoder that detects the rotation angle to rotate correspondingly. As described, such test indicators can be utilized to inspect workpieces (e.g., with the contact point of the stylus pressed against the surface of the workpiece) in order to measure minute displacements, such as circumferential deflection, total deflection, flatness, and parallelism, and in order to perform precise comparative inspections, such as for determining machining errors of machined workpieces, etc.
[0004] In certain implementations, it may be desirable for such measuring instruments to include an encoder (e.g., for measuring such arcuate motion) that provides a desired combination of features, such as a combination of compact size, high resolution, accuracy, low cost, robustness to contamination, etc. A configuration of an encoder that provides an improved combination of such features in such measuring instruments would be desirable. Summary of the Invention
[0005] The present summary is provided to introduce a series of concepts that are further described below in the detailed description in a simplified form. The present summary is not intended to identify key features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
[0006] According to one aspect, a measuring instrument is provided that includes a movable part and an electronic position encoder. The movable part is configured to rotate in an arcuate motion about a pivot portion and includes a movable encoder part MEP, wherein the maximum movement range of the arcuate motion of the movable encoder part MEP is less than 360 degrees.
[0007] The electronic position encoder is configured to measure the absolute relative position between the detector part and the scale part, for example, along the direction of the arc movement. The movable encoder part MEP of the movable part includes one of the detector part or the scale part. The scale part extends along the scale direction and includes: a first scale element part, which includes a first signal-modulated scale element; and a second scale element part, which includes a second signal-modulated scale element. The detector part is configured to be close to the scale part, and a relative movement is generated between the detector part and the scale part due to the arc movement of the movable encoder part MEP. The detector part includes: a field generation part, which is configured to generate a changing magnetic flux in response to a drive signal; and a sensing part. The sensing part includes: a first sensing element part, which includes a first group of first sensing elements and is arranged in a first track part together with the first scale element part; and a second sensing element part, which includes a first group of second sensing elements and is arranged in a second track part together with the second scale element part.
[0008] The first scale element part and the second scale element part of the first track part and the second track part are arc-shaped and parallel to each other, where the second track part is closer to the pivot part than the first track part. The first signal-modulated scale element is arranged along the first scale element part according to a first signal-modulating element angular space step θ WSME1 and the second signal-modulated scale element is arranged along the second scale element part according to a second signal-modulating element angular space step θ WSME1 different from the first signal-modulating element angular space step θ WSME2 of the first signal-modulated scale element.
[0009] According to another aspect, a method for operating a measuring instrument including a movable part and an electronic position encoder is provided. The method includes:
[0010] Providing a drive signal to cause the field generation part to generate a changing magnetic flux; and receiving a detector signal from the detector part, where the detector signal includes: a detector signal from the first group of first sensing elements operating in combination with the first signal-modulated scale element; and a detector signal from the first group of second sensing elements operating in combination with the second signal-modulated scale element. According to the method, the first scale element part and the second scale element part of the first track part and the second track part are arc-shaped and parallel to each other, where the second track part is closer to the pivot part than the first track part; the first signal-modulated scale element is arranged along the first scale element part according to a first signal-modulating element angular space step θ WSME1 and the second signal-modulated scale element is arranged along the second scale element part according to a second signal-modulating element angular space step θ WSME1 different from the first signal-modulating element angular space step θ WSME2and is disposed along the second scale element portion.
[0011] According to yet another aspect, there is provided an electronic position encoder configured to measure the absolute relative position between a detector portion and a scale portion, such as along the arc movement direction, and configured for use in a measuring instrument including a movable portion configured to rotate in an arc movement about a pivot portion. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 is a diagram of a measuring instrument including an electronic position encoder with a transducer, the sensor including a detector portion and a scale portion.
[0013] Figure 2 is a diagram showing additional details of one implementation of a measuring instrument such as Figure 1 the measuring instrument.
[0014] Figure 3 is a diagram of an implementation of a portion of the transducer configured to be used with an arc movement between the detector portion and the scale portion (such as may be used in Figure 2 the measuring instrument).
[0015] Figure 4 is a diagram showing Figure 2 the measuring instrument and Figure 3 certain dimensions and features of the transducer.
[0016] Figure 5 is a diagram of an implementation of a portion of the transducer configured to be used with a linear movement between the detector portion and the scale portion, presented as background information related to the various principles described herein.
[0017] Figure 6 is a diagram showing Figure 5 certain dimensions and features of the transducer.
[0018] Figure 7 is a diagram showing certain signals generated due to operating Figure 5 the transducer with a linear movement between the detector portion and the scale portion.
[0019] Figure 8 is a diagram showing certain less desirable signals generated due to operating Figure 5 the transducer with an arc movement between the detector portion and the scale portion and as may be compared with Figure 7 the more desirable signals.
[0020] Figure 9 is a diagram showing certain signals generated due to operating Figure 3generated by a transducer and indicated to be similar to certain signals of Figure 7 a desired signal.
[0021] Figure 10 is a flowchart showing a method for operating a measuring instrument with an arcuate movement between a detector portion and a scale portion.
[0022] Figure 11 is a plan view schematically showing certain features of a representative prior art electronic position encoder configured to be used with a linear movement between a detector portion and a scale portion, presented as background information relevant to the various principles described herein. Detailed Description
[0023] Figure 1 is a block diagram of exemplary components of a measuring instrument 100 (e.g., a test indicator) including an electronic absolute position encoder 101. In various implementations, the electronic absolute position encoder 101 includes a scale portion 170 and a detector portion 167 that together form a transducer TDR. As will be described in more detail below, the encoder 101 as used herein is an absolute (ABS) position encoder that utilizes two or more encoder tracks to provide absolute positioning (i.e., each position within the absolute range of the encoder 101 has a unique signal combination). Generally, ABS encoding may be more robust than incremental (INC) encoding (e.g., which counts increments as it moves) and is thus more desirable for certain implementations (e.g., can tolerate power cycling without losing position, etc.). The measuring instrument 100 includes suitable user interface features such as a display 138 and / or user-operable control elements 136 (e.g., switches, buttons, etc.). The measuring instrument 100 may additionally include a power supply 165.
[0024] All of these elements of the measuring instrument 100 and / or the encoder 101 are coupled to a signal processing configuration 166 (e.g., including one or more signal processors), which in various implementations may be embodied as signal processing and display electronic circuits in an integrated circuit (IC) chip. The signal processing configuration 166 receives detector signals from the detector portion 167 and processes the detector signals to determine the absolute position of the detector portion 167 along the scale portion 170. It should be understood that the signal processing configuration 166 may include any combination of signal processing and physical circuits. In various implementations, the signal processing configuration 166 and the detector portion 167 may be included as part of an electronic component 160 (e.g., included as arranged on a substrate, etc.).
[0025] Figure 2 is showing a measuring instrument 100 such as Figure 1Diagram of additional details of one implementation of a measuring instrument. As will be described in more detail below, the measuring instrument 100 includes an electronic position encoder 101, and the electronic position encoder includes a transducer TDR. In Figure 2 the example, the measuring instrument 100 is a test indicator (e.g., sometimes also referred to as a lever indicator, lever-type dial indicator, lever-type dial gauge, etc.). In various implementations, certain aspects of the mechanical structure and operation of the measuring instrument 100 may be similar to certain aspects of certain existing test indicators (such as the test indicators described in the previously incorporated '733 publication).
[0026] As Figure 2 shown, the contact portion CPN (e.g., a stylus) is coupled to the pivot portion PPN and rotates around it at a corresponding angle (e.g., in an arc motion). The contact portion CPN includes a contact point CPT at its end, which can be used to contact a workpiece to perform a measurement operation (e.g., for measuring the displacement and / or dimensions of the workpiece, etc.). The measurement result can be displayed on a digital display (e.g., Figure 1 the display 138), which can be mounted on the measuring instrument body MIB or other locations of the measuring instrument 100. Certain control elements (e.g., Figure 1 the control element 136) can also be provided on the measuring instrument 100.
[0027] The movable part MPN of the measuring instrument 100 includes: a contact portion CPN, which is located on the first side of the pivot portion PPN; and a movable encoder part support member MEPSM, which supports a movable encoder part MEP located on the second side of the pivot portion PPN. The movable part MPN is configured such that a workpiece measurement operation (e.g., for measuring a workpiece) that causes the contact portion CPN to rotate relative to the pivot portion PPN (e.g., due to the contact point CPT contacting the surface of the workpiece or otherwise moving along the surface) correspondingly causes the support member MEPSM and the movable encoder part MEP to rotate in an arc motion ARCM (e.g., in the arc motion direction ARCD). In the measuring instrument 100, the maximum angular movement range θ of the arc motion ARCM of the movable encoder part MEP MAX is less than 360 degrees (e.g., in some implementation examples, it can be less than 90 degrees, or 45 degrees, or 15 degrees, etc.). Such a relatively small angular movement range is typical for certain types of measuring instruments, especially for applications that measure workpieces using only a relatively small deflection of the contact portion CPM (e.g., a stylus).
[0028] In various implementations, the movable encoder portion MEP may include one of the detector portion 167 or the scale portion 170 (e.g., as described above with respect to Figure 1 and as will be described in more detail below with respect to Figure 3 ). The other of the detector portion 167 or the scale portion 170 that is not included in the movable encoder portion MEP is included in the fixed encoder portion FEP (not shown, but may be fixed to, for example, the measuring instrument body MIB) at a position close to the movable encoder portion MEP. In one specific illustrative example, the movable encoder portion MEP may be arranged parallel to and facing the fixed encoder portion FEP, and the front of the movable encoder portion MEP facing the fixed encoder portion FEP may be spaced apart from the fixed encoder portion FEP by a gap (e.g., about 0.1 mm to 0.2 mm) along the z-axis direction. Whether the detector portion 167 is included in the movable encoder portion MEP or the fixed encoder portion FEP, the front of the detector portion 167 (e.g., including its constituent conductors) may be covered with an insulating coating.
[0029] In Figure 2 's orientation, the fixed encoder portion FEP may be located directly below the movable encoder portion MEP (and thus not visible in Figure 2 ). The fixed encoder portion FEP and the movable encoder portion MEP (e.g., both are shown to include the detector portion 167 and the scale portion 170) correspondingly form a transducer TDR. As described above, the relative movement between the movable encoder portion MEP and the fixed encoder portion FEP (i.e., which corresponds to the relative movement between the detector portion 167 and the scale portion 170) is caused by the movement of the movable encoder portion MEP in the arc movement direction ARCD, as caused by the movement of the contact portion CPN (e.g., as part of a workpiece measurement operation).
[0030] As Figure 2 shown, the first movement limit indication ML1 and the second movement limit indication ML2 are shown as dashed lines, both indicating the maximum movement range of the arc movement ARCM and corresponding to θ MAX of the maximum angular movement range (e.g., including the maximum movement range of the movable encoder portion MEP). The electronic position encoder 101 is an absolute position encoder that utilizes two or more encoder tracks (e.g., see Figure 3 ) to provide absolute positioning corresponding to the absolute angular measurement range θ ABS (i.e., each of its positions has a unique signal combination), as will be described in more detail below. In Figure 2 's example, the absolute angular measurement range θ ABS is indicated as being approximately equal to the maximum angular movement range θMAX , but it can be understood that in alternative implementations, the absolute angular measurement range θ ABS and the maximum angular movement range θ MAX can be different (e.g., in most such implementations, the absolute angular measurement range θ ABS is greater than the maximum angular movement range θ MAX , and in all cases, the absolute angular measurement range θ ABS is less than 360 degrees). It should be understood that for some implementations, Figure 2 an example of shows the absolute angular measurement range θ ABS and the maximum angular movement range θ MAX for purposes of illustration and may not be to scale.
[0031] The endpoint ENDPT at the end of the movable encoder part support member MEPSM also corresponds to the endpoint of the movable part MPN. The endpoint ENDPT is located at the opposite end of the movable part MPN relative to the contact point CPT (located at the end of the contact part CPN). As referred to herein, the contact part CPN and the contact point CPT are located on the first side of the pivot part PPN, while the support member MEPSM, the movable encoder part MEP, and the endpoint ENDPT are located on the second side of the pivot part PPN.
[0032] It should be understood that Figure 1 and Figure 2 the measuring instruments are one of the various applications that typically implement an electronic position encoder, which has evolved over the years to provide a relatively optimized combination of compact size, low-power operation (e.g., for long battery life), high-resolution and high-accuracy measurement, low cost, robustness to contamination, etc. In any of these applications, even a small improvement in any of these factors is highly desirable but difficult to achieve, especially considering the design constraints imposed for commercial success in various applications. The principles disclosed herein provide improvements in some of these factors for various applications.
[0033] Figure 11 is a plan view schematically showing certain features of a representative prior art inductive electronic position encoder shown in U.S. Patent No. 6,011,389 ('389 patent), which is hereby incorporated by reference in its entirety and presented as background information relevant to the various principles disclosed elsewhere herein. Figure 11It also includes reference numeral annotations to indicate like reference numerals or symbols used to designate like elements in other figures included herein. In the following abbreviated description based on the disclosure of the '389 patent, some of the like reference numerals or symbols in other figures of the present disclosure are shown in parentheses close to the original reference numerals of the '389 patent. The complete description related to the prior art Figure 11 can be found in the '389 patent. Therefore, only an abbreviated description is included here (e.g., including certain teachings related to the present disclosure in the '389 patent).
[0034] As disclosed in the '389 patent, a transducer such as Figure 11 the transducer shown includes at least two substantially coplanar conductive paths or windings. The transmitter winding 102 (PRTFGE”') forms a large planar loop. In this example, the transmitter winding 102 forms the entire field generating portion PRTFGE”'. The receiver winding 104 (PRTSEN”', SETSEN”') that is substantially in the same plane as the transmitter winding 102 is arranged in a zigzag or sinusoidal pattern in one direction indicated by the arrow and then in the opposite direction indicated by the arrow such that the windings cross themselves to form alternating loops 106 (SEN+”') and 108 (SEN-”') interposed between each other, as shown. Thus, each of the alternating loops 106 (SEN+”') and 108 (SEN-”') of the receiver winding 104 (PRTSEN”', SETSEN”') has a different winding direction compared to adjacent loops. By applying an alternating (varying) current to the transmitter winding 102 (PRTFGE”'), the transmitter winding generates a time-varying magnetic field (varying magnetic flux) that extends through the loops 106 (SEN+”') and 108 (SEN-”') of the receiver winding 104 (PRTSEN”', SETSEN”'). In various implementations, the loops 106 (SEN+”') and 108 (SEN-”') can be designated as a set of sensing elements (SETSEN”') of the sensing portion (PRTSEN”').
[0035] If the scale portion (170”') or the scale pattern 112 (180”') (the segmented profile of which is traced by the edges indicated by Figure 11 alternating long and short dashed lines) (which includes conductive objects (e.g., signal modulation elements such as the conductive plate 114 (SME”'), the profiles of several of which are shown in Figure 11When a dashed line is used to depict the movement of the conductive object (e.g., conductive plate 114 (SME'')) closer to (near) the detector section (167''), the changing magnetic field generated by the transmitter winding 102 (PRTFGE'') will induce eddy currents in the conductive object, which in turn establish a magnetic field that cancels the changing transmitter magnetic field (changing magnetic flux) from the object. Therefore, the magnetic flux received by the receiver winding 104 (PRTSEN'') changes or is interrupted, resulting in the receiver winding outputting a non-zero EMF signal (voltage) at the output terminals V+ and V- of the receiver winding 104. The non-zero EMF signal changes polarity as the conductive object moves between the '+' and '-' loops 106 (SEN+'') and 108 (SEN-'').
[0036] The distance between the positions of two loops of the same polarity (e.g., between the position of loop 106 (SEN+'') and the position of the next loop 106 (SEN+'')) is defined as the linear spatial step (e.g., which can also be referred to as pitch or wavelength) 110 (WSEN'') of the set of sensing elements (SETSEN''), and in some implementations, it can be equal to the linear spatial step (e.g., which can also be referred to as pitch or wavelength) 110 (WSME'') of the scale pattern (180'') of the scale section (170'') arranged along the scale direction SCD'' and / or the measurement axis direction MA''. It can be seen that each loop 106 (SEN+'') and / or 108 (SEN-'') thus has a length or maximum dimension of 0.5*(WSEN'') along the measurement axis direction (MA''), which can also be referred to as the scale direction SCD''. If the conductive object described above (e.g., conductive plate 114 (SME'')) approaches the receiver winding 104 (PRTSEN'') and its position continuously changes along the measurement axis 300 (MA''), then due to the periodic change of the loops 106 (SEN+'') and 108 (SEN-'') and the local interruption of the transmitted magnetic field caused by the conductive object (e.g., conductive plate 114 (SME'')), the AC amplitude of the signal output from the receiver winding (PRTSEN'') will continuously and periodically change with the linear spatial step (e.g., which can also be referred to as pitch or wavelength) 110 (WSME''). Therefore, the signal output from the receiver winding (PRTSEN'') can be utilized (e.g., processed) to indicate the relative position between the detector section (167'') and the scale section (170''). It should be understood that Figure 11 The transmitter winding 102 (PRTFGE'') and the receiver winding 104 (PRTSEN'') shown and described above are an example of a prior art implementation of the elements designated as the detector section (167'').
[0037] Figure 3 A diagram of an implementation of a portion of transducer TDR that is configured to be used with an arc motion ARCM between a detector portion 167 and a scale portion 170, such as can be used in Figure 1 and Figure 2 the electronic position encoder 101 of the measuring instrument 100. The transducer TDR utilizes two track portions TR1 and TR2, as Figure 3 shown.
[0038] It should be understood that, as described herein, certain aspects of the field generating and sensing elements of the detector portion (e.g., detector portion 167, etc.) can operate and be understood at least in part based on the principles described above with respect to Figure 11 described. In Figure 3 the implementation, the scale portion 170, the detector portion 167, and the signal processing configuration 166 (e.g., Figure 1 and Figure 2 of) work together to provide an electronic position encoder 101 that can be used to measure the relative position between two elements (e.g., between the detector portion 167 and the scale portion 170 and / or an element attached thereto), such as along the arc motion direction. In various implementations, the detector portion 167 is formed on a detector substrate, while the scale portion 170 including the periodic scale pattern 180 is formed on a scale substrate, and the measurement operation of the scale portion includes relative movement between the two substrates (e.g., which can be relatively flat and parallel to each other). In various implementations, the detector portion 167 and the scale portion 170 can generally be located in respective planes extending along the x-axis direction and the y-axis direction, where the z-axis direction is orthogonal to the planes.
[0039] In various implementations, the scale portion 170 extends along a scale direction SCD and includes: a first scale element portion PRTSC1 that includes a first signal modulation element SME1; and a second scale element portion PRTSC2 that includes a second signal modulation element SME2. The first signal modulation element SME1 is arranged along the scale direction SCD according to a first signal modulation element pattern PATSME1 and thereby forms the first signal modulation element pattern. The second signal modulation element SME2 is arranged along the scale direction SCD according to a second signal modulation element pattern PATSME2 and thereby forms the second signal modulation element pattern. The first signal modulation element pattern PATSME1 and the second signal modulation element pattern PATSME2 are respective portions of a periodic scale pattern 180 of the scale portion 170. In various implementations, the periodic scale pattern 180 may alternatively be referred to as a signal modulation pattern 180. In various implementations, the first signal modulation element SME1 and / or the second signal modulation element SME2 (i.e., as included in the first scale element portion PRTSC1 and the second scale element portion PRTSC2) may be fabricated (e.g., using known printed circuit manufacturing methods) on a scale substrate.
[0040] A relative movement between the detector portion 167 and the scale portion 170 (e.g., in an arcuate movement direction) may indicate a relative position and / or a measurement result (e.g., with respect to the relative position between the detector portion 167 and the scale portion 170). As described above with respect to Figure 1 and Figure 2 the measured relative position or dimension may be displayed on a display 138 (e.g., a digital display). In various implementations, control elements 136 such as on / off switches and other optional control buttons may be included.
[0041] As Figure 3As shown, the detector portion 167 may include a field generation portion PRTFGE and a sensing portion PRTSEN arranged along a scale direction SCD. In various implementations, relative to the sensing portion PRTSEN, the scale direction SCD may equally or alternatively be referred to as a sensing portion direction SPD. The field generation portion PRTFGE includes a first field generation element portion PRTFGE1 and a second field generation element portion PRTFGE2. The sensing portion PRTSEN includes a first sensing element portion PRTSEN1 and a second sensing element portion PRTSEN2. As will be described in more detail below, the first sensing element portion PRTSEN1 is configured to operate in conjunction with the first field generation element portion PRTFGE1 and a first scale element portion PRTSC1 as part of a first track portion TR1, and the second sensing element portion PRTSEN2 is configured to operate in conjunction with the second field generation element portion PRTFGE2 and a second scale element portion PRTSC2 as part of a second track portion TR2.
[0042] In various implementations, the field generation portion PRTFGE may include a plurality of elongated portions ELP and end portions EDP. The elongated portions may generally extend along the scale direction SCD and thus be parallel to the scale direction, while the end portions may generally be transverse to (e.g., perpendicular to) the scale direction SCD. The elongated portions ELP and the end portions EDP may combinatorially form a region (e.g., where a changing magnetic flux may be generated by a current flow through the elongated portions and the end portions caused by a drive signal), and the region thereof may include some of the sensing elements in the sensing elements.
[0043] In various implementations, the field generation portion PRTFGE can include a first field generation element portion PRTFGE1 and a second field generation element portion PRTFGE2. The first field generation element portion PRTFGE1 is configured to operate in conjunction with the first sensing element portion PRTSEN1 and the first signal modulation element SME1 of the first scaling element portion PRTSC1. The first field generation element portion PRTFGE1 includes elongated portions ELP1A, ELP1B, ELP1C, ELP1D and end portions EDP1A, EDP1B, EDP1C, EDP1D (e.g., the elongated portions and the end portions can be considered in some implementations to form two field generation element loops, such as in an 8-shaped configuration, and / or alternatively considered as a single field generation element loop that forms two loops in such a configuration so as to form two internal regions). More specifically, the elongated portions ELP1A and ELP1B and the end portions EDP1A and EDP1D can be considered to form a first half-loop FGE1FHL of the first field generation element having an internal region FGE1FHIA. The first half-internal region FGE1FHIA of the first field generation element is configured to be aligned with the first half-pattern portion FHPP1 of the first scaling element portion PRTSC1. The elongated portions ELP1C and ELP1D and the end portions EDP1C and EDP1B can be considered to form a second half-loop FGE1SHL of the first field generation element having an internal region FGE1SHIA. The second half-internal region FGE1SHIA of the first field generation element is configured to be aligned with the second half-pattern portion SHPP1 of the first scaling element portion PRTSC1.
[0044] In various implementations, the end portion EDP (e.g., or other portions of the first field generation element portion PRTFGE1) can include ports or other connection configurations. For example, the end portion EDP1B can be divided into two portions, such as to provide two contact points simultaneously. The contact points can be used to receive a drive signal and can be provided at locations where signal lines / circuit traces from the processing portion 166 can be connected, etc. In various implementations, such ports can represent general connection configurations, such as being coupled to field generation drive electronics. Such field generation drive electronics can include electronic components such as capacitors, transistors, etc. in various implementations and can be at least partially or entirely included in or coupled to the processing portion 166 to provide a drive signal to cause the first field generation element portion PRTFGE1 to generate a varying magnetic flux.
[0045] During operation, an alternating current can be provided, but for simplicity of the following description, only one direction of current is described (e.g., to illustrate one direction and / or as may occur in a configuration providing a diode or other component / configuration to limit current flow in one direction). As an example, a current (e.g., as provided by a drive signal) can flow through the following sequence of parts (e.g., in the following order for current in one direction), including: end part EDP1D; elongated part ELP1A; end part EDP1A; elongated part ELP1B; and end part EDP1B; elongated part ELP1C; end EDP1C; and elongated part ELP1D. From this example of current flow, it can be understood that the current flow is in the same direction through the elongated parts (i.e., elongated parts ELP1A and ELP1C) at the outer boundary of the configuration (e.g., from left to right in the illustration of Figure 3 ), and is in the same direction through the elongated parts (i.e., elongated parts ELP1B and ELP1D) in the middle of the configuration (i.e., from right to left in the illustration of Figure 3 ). This also corresponds to the current flow around the first half loop FGE1FHL of the first field generating element in the counterclockwise direction, and the current flow around the first half loop FGE1SHL of the first field generating element in the clockwise direction (i.e., the direction of current flow through the respective loops is indicated as opposite, while the resulting magnetic fluxes from each respective loop have corresponding opposite polarities).
[0046] Such directions / orientations / polarities of current flow and corresponding magnetic fluxes may be advantageous for certain configurations, such as generating a generated signal in the first sensing element SEN1 (e.g., such as being at least partially aligned with the inner regions FGE1FHIA and FGE1SHIA of the first field generating element part PRTFGE1). As an aspect, it should be noted that with respect to the current flow in opposite directions and the corresponding magnetic fluxes with opposite polarities generated by the respective loops FGE1FHL and FGE1SHL, the spatially offset first half pattern part FHPP1 and second half pattern part SHPP1 will generate a detector signal (i.e., from the first sensing element part PRTSEN1), and the detector signal indicates the position of the first sensing element part PRTSEN1 relative to the first scale element part PRTSC1.
[0047] The second field generating element portion PRTFGE2 is configured to operate in conjunction with the second sensing element portion PRTSEN2 and the second signal modulation element SME2 of the second scaling element portion PRTSC2. The second field generating element portion PRTFGE2 includes elongate portions ELP2A, ELP2B, ELP2C, ELP2D and end portions EDP2A, EDP2B, EDP2C, EDP2D (e.g., the elongate portions and the end portions may be considered in some implementations to form two field generating element loops, such as in an 8-shaped configuration, and / or alternatively be considered a single field generating element loop that forms two loops in such a configuration so as to form two internal regions). More specifically, elongate portions ELP2A and ELP2B and end portions EDP2A and EDP2D may be considered to form a first half loop FGE2FHL of the second field generating element having an internal region FGE2FHIA. The first half internal region FGE2FHIA of the second field generating element is configured to be aligned with a first half pattern portion FHPP2 of the second scaling element portion PRTSC2. Elongate portions ELP2C and ELP2D and end portions EDP2C and EDP2B may be considered to form a second half loop FGE2SHL of the second field generating element having an internal region FGE2SHIA. The second half internal region FGE2SHIA of the second field generating element is configured to be aligned with a second half pattern portion SHPP2 of the second scaling element portion PRTSC2.
[0048] In various implementations, the end portion EDP (e.g., or other portions of the second field generating element portion PRTFGE2) may include ports or other connection configurations. For example, the end portion EDP2B may be divided into two portions, such as to provide two contact points simultaneously. The contact points may be used to receive a drive signal and may be provided at locations where signal lines / circuit traces from the processing portion 266 may be connected, etc. In various implementations, such ports may represent a general connection configuration, such as being coupled to field generation drive electronics. Such field generation drive electronics may include electronic components such as capacitors, transistors, etc. in various implementations and may be at least partially or fully included in or coupled to the processing portion 266 to provide a drive signal to cause the second field generating element portion PRTFGE2 to generate a varying magnetic flux.
[0049] During operation, an alternating current can be provided, but for the sake of simplicity in the following description, only one current direction is described (e.g., to illustrate one direction and / or as may occur in a configuration that provides a diode or other component / configuration to limit current flow in one direction). As an example, a current (e.g., as provided by a drive signal) can flow through the following sequence of parts (e.g., in the following order for current in one direction), including: end portion EDP2D; elongated portion ELP2A; end portion EDP2A; elongated portion ELP2B; and end portion EDP2B; elongated portion ELP2C; end EDP2C; and elongated portion ELP2D. From this example of current flow, it can be understood that the current flow is in the same direction through the elongated portions (i.e., elongated portions ELP2A and ELP2C) at the outer boundary of the configuration (e.g., from left to right in the illustration of Figure 3 ), and is in the same direction through the elongated portions (i.e., elongated portions ELP2B and ELP2D) in the middle of the configuration (i.e., from right to left in the illustration of Figure 3 ). This also corresponds to the current flow around the first half loop FGE2FHL of the second field generating element in the counterclockwise direction, and the current flow around the first half loop FGE2SHL of the second field generating element in the clockwise direction (i.e., the direction of current flow through the respective loops is indicated as opposite, while the resulting magnetic fluxes from each respective loop have corresponding opposite polarities).
[0050] Such directions / orientations / polarities of current flow and corresponding magnetic fluxes may be advantageous for certain configurations, such as generating a generated signal in the second sensing element SEN2 (e.g., such as being at least partially aligned with the internal regions FGE2FHIA and FGE2SHIA of the second field generating element part PRTFGE2). As an aspect, it should be noted that with respect to the current flow in opposite directions and the corresponding magnetic fluxes of opposite polarities generated by the respective loops FGE2FHL and FGE2SHL, the spatially offset first half pattern portion FHPP2 and second half pattern portion SHPP2 will generate a detector signal (i.e., from the second sensing element part PRTSEN2), which indicates the position of the second sensing element part PRTSEN2 relative to the second scale element part PRTSC2.
[0051] As noted above, the sensing portion PRTSEN includes a first sensing element portion PRTSEN1 and a second sensing element portion PRTSEN2 (e.g., each including respective sensing elements SEN1 and SEN2). In the illustrated implementation, the sensing elements SEN1 and SEN2 include sensing loop elements (alternatively referred to as sensing coil elements or sensing winding elements), which are connected in series and are generally transverse (e.g., nominally perpendicular) to the expression direction SCD. The first sensing element portion PRTSEN1 includes a first set of first sensing elements SET1SEN1 and a second set of first sensing elements SET2SEN1. The second sensing element portion PRTSEN2 includes a first set of second sensing elements SET1SEN2 and a second set of second sensing elements SET2SEN2. In the illustrated implementation, adjacent loop elements (e.g., conductive loops) in each respective set of sensing elements are connected by conductor configurations on various layers of the PCB according to known methods (e.g., by feedthrough connections, which may include conductors through microvias in some implementations, and the microvias may also be referred to as blind vias or buried vias). For example, adjacent sensing elements SEN1 in each set of the first sensing element portion PRTSEN1 and adjacent sensing elements SEN2 in each set of the second sensing element portion PRTSEN2 may have opposite winding polarities (e.g., the sensing elements in each respective set alternate between SEN+ and SEN-, such as described above with respect to Figure 11 ). That is, if the first loop corresponding to a sensing element responds to a changing magnetic field with a positive-polarity detector signal contribution, the adjacent loop corresponding to an adjacent sensing element responds with a negative-polarity detector signal contribution. A loop with a positive-polarity detector signal contribution may be designated herein as a SEN+ sensing element, while a loop with a negative-polarity detector signal contribution may be designated as a SEN- sensing element in various contexts herein. In various implementations, the sensing elements in each respective set are connected in series such that their detector signals or signal contributions are summed by group, and the "summed" detector signals are output to (e.g., Figure 1 ) the signal processing configuration 166 at the detector signal output connection points (e.g., at the connection points of each of signals SIG1A and SIG1B and SIG2A and SIG2B).
[0052] In the illustrated implementation, the first set of first sensing elements SET1SEN1 includes twelve first sensing elements SEN1 (i.e., including first sensing elements SEN1-A1 to SEN1-A12), and the second set of first sensing elements SET2SEN1 includes twelve first sensing elements SEN1 (i.e., including first sensing elements SEN1-B1 to SEN1-B12). For simplicity of illustration, only the first two (i.e., A1 to A2 and B1 to B2) and the last two (i.e., A11 to A12 and B11 to B12) sensing elements in each set are labeled, but the sensing elements (i.e., A3 to A10 and B3 to B10) are similarly understood to correspond to the remaining sensing elements shown. In the illustrated implementation, the first set of second sensing elements SET1SEN2 includes six second sensing elements SEN2 (i.e., including second sensing elements SEN2-A1 to SEN2-A6), and the second set of second sensing elements SET2SEN2 includes six second sensing elements SEN2 (i.e., including second sensing elements SEN2-B1 to SEN2-B6). For simplicity of illustration, only the first two (i.e., A1 to A2 and B1 to B2) and the last two (i.e., A5 to A6 and B5 to B6) sensing elements in each set are labeled, but the sensing elements (i.e., A3 to A4 and B3 to B4) are similarly understood to correspond to the remaining sensing elements shown.
[0053] It should be understood that in various implementations, it is advantageous (e.g., in each of the first sensing element portion PRTSEN1 and the second sensing element portion PRTSEN2) to configure the detector to provide two or more sets of sensing elements at different spatial phase positions (e.g., to provide or otherwise correspond to orthogonal signals, etc.), as would be understood by one of ordinary skill in the art. Thus, for example, the first set of first sensing elements SET1SEN1 and the second set of first sensing elements SET2SEN1 are at different spatial phase positions. Similarly, the first set of second sensing elements SET1SEN2 and the second set of second sensing elements SET2SEN2 are at different spatial phase positions. However, it should be understood that, as described herein, the configuration of the sensing elements is intended to be merely exemplary and not restrictive. As an example, in some implementations, each sensing element loop can output respective signals to a corresponding signal processing configuration, such as that disclosed in U.S. Patent No. 9,958,294, which is hereby incorporated by reference in its entirety. More generally, various known sensing element configurations can be used in combination with the principles described herein for use in combination with various scale patterns and signal processing schemes, etc.
[0054] In the illustrated implementation of the scale portion 170 and the scale pattern 180, the first signal modulation element pattern PATSME1 in the first scale element portion PRTSC1 of the first track portion TR1 includes a first half pattern portion FHPP1 and a second half pattern portion SHPP2, where each half pattern portion includes a row of first signal modulation elements SME1. Similarly, the second signal modulation element pattern PATSME2 in the second scale element portion PRTSC2 of the second track portion TR2 includes a first half pattern portion FHPP2 and a second half pattern portion SHPP2, where each half pattern portion includes a row of second signal modulation elements SME2.
[0055] In various implementations, the signal modulation element SME1 and / or SME2 can include a conductive plate (e.g., formed as an area fabricated on a printed circuit board, or formed as a raised area extending from a conductive substrate, or fabricated on a glass substrate, or according to other manufacturing methods, etc.). The scale pattern 180 is typically implemented on the scale portion 170. It should be understood that during operation, there is relative movement (e.g., along an arc motion direction) between the scale pattern 180 and the detector portion 167. The scale pattern 180 has spatial characteristics that vary according to position in order to provide position-dependent detector signals that appear in the sensing elements SEN1 and SEN2 of the sensing portion PRTSEN in the detector portion 167. In various implementations, the field generation portion PRTFGE and the sensing portion PRTSEN of the detector portion 167 can be formed according to a variety of alternative configurations for use in combination with a variety of corresponding signal processing schemes, as will be understood by those skilled in the art.
[0056] In one specific illustrative example, the detector portion 167 can be arranged parallel to and facing the scale portion 170, and the front face of the detector portion 167 facing the scale portion 170 can be spaced from the scale portion 170 (and / or the scale pattern 180) by a gap distance (e.g., approximately 0.1 mm to 0.2 mm) along the z-axis direction. The front face of the detector portion 167 (e.g., including its constituent conductors) can be covered with an insulating coating.
[0057] It should be understood that various elements can reside on different manufacturing layers located at different planes along the z-axis direction as needed to provide various operating gaps and / or insulating layers, which will be apparent to those of ordinary skill in the art based on the described implementations and the incorporated references. In the drawings throughout this disclosure, it should be understood that the shown x-axis, y-axis, and / or z-axis dimensions of one or more elements may be exaggerated for clarity, but it should be understood that they are not intended to be inconsistent with the various design principles and relationships described herein.
[0058] The transducer TDR includes a first transducer portion PRTTDR1 and a second transducer portion PRTTDR2. The first transducer portion PRTTDR1 includes a first sensing element portion PRTSEN1, a first field generating element portion PRTFGE1, and a first scaling element portion PRTSC1. The second transducer portion PRTTDR2 includes a second sensing element portion PRTSEN2, a second field generating element portion PRTFGE2, and a second scaling element portion PRTSC2. A first scaling track portion TR1 and a second scaling track portion TR2 respectively include the first transducer portion PRTTDR1 and the second transducer portion PRTTDR2. As described herein, the operation of the first transducer portion PRTTDR1 of the first track portion TR1 generates detector signals SIG1A and SIG1B, while the operation of the second transducer portion PRTTDR2 of the second track portion TR2 generates detector signals SIG2A and SIG2B. The processing of the signals (e.g., by signal processing configuration 166) enables the determination of the absolute relative position between the detector portion 167 and the scaling portion 170.
[0059] The first transducer portion PRTTDR1 of the first track portion TR1 and the second transducer portion PRTTDR2 of the second track portion TR2 can be operated according to a first drive operation and a second drive operation, respectively, and the first drive operation and the second drive operation can be performed simultaneously or at different timings in various implementations. As part of the first drive operation, the first field generating element portion PRTFGE1 generates a changing magnetic flux in response to a coil drive signal (e.g., as provided from signal processing configuration 166). The first sensing element SEN1 of the first sensing element portion PRTSEN1 is configured to provide detector signals (e.g., SIG1A, SIG1B) in response to the local effect on the changing magnetic flux provided by the first signal modulation element SME1 of the first scaling element portion PRTSC1 (e.g., including the first signal modulation element SME1 that is relatively adjacent or otherwise aligned with the sensing element SEN1 along the z-axis direction). As part of the second drive operation, the second field generating element portion PRTFGE2 generates a changing magnetic flux in response to a coil drive signal (e.g., as provided from signal processing configuration 166). The second sensing element SEN2 of the second sensing element portion PRTSEN2 is configured to provide detector signals (e.g., SIG2A and SIG2B) in response to the local effect on the changing magnetic flux provided by the second signal modulation element SME2 of the second scaling element portion PRTSC2 (e.g., including the second signal modulation element SME2 that is relatively adjacent or otherwise aligned with the sensing element SEN2 along the z-axis direction).
[0060] The signal processing configuration (e.g., Figure 1The signal processing configuration 166, etc.) can be configured to determine the position of the sensing portion PRTSEN of the detector portion 167 (e.g., including the first sensing element portion PRTSEN1 and the second sensing element portion PRTSEN2) relative to the scale portion 170 based on the detector signal input from the detector portion 167. For example, the first sensing element portion PRTSEN1 can provide detector signals SIG1A and SIG1B, while the second sensing element portion PRTSEN2 can provide detector signals SIG2A and SIG2B. In various implementations, the detector signal can equally or alternatively be referred to as a sensing signal. The signal from the detector portion 167 can be input to the signal processing configuration 166 and used to determine the measurement result / position of the detector portion 167 relative to the scale portion 170. Generally, the sensing element portion and the field generating element portion can operate at least in part according to known principles (e.g., for inductive encoders), such as the principles described above with respect to Figure 11 the principles described, and such as the principles described at least in part in U.S. Patent Nos. 5,841,274, 5,886,519, 5,894,678, 6,124,708, 10,520,335, 10,612,943, and 10,775,199, each of which is hereby incorporated by reference in its entirety.
[0061] Figure 4 FIG. is a diagram showing certain dimensions and aspects of a measuring instrument 100 including a transducer TDR. In Figure 4 , certain elements (e.g., the first scale element portion PRTSC1, the second scale element portion PRTSC2, the movable encoder portion support member MEPSM, etc.) are each represented as a line (e.g., whose position can correspond to the center line or the position of other representations of the corresponding component). A representation of a pivot portion PPN including a pivot point PPT as part of a movable portion MPN is shown (e.g., the contact portion CPN is not shown in Figure 4 but will be understood to be located below the pivot portion PPN, such as Figure 2 shown).
[0062] The movable encoder portion support member MEPSM is shown rotating in an arc around the pivot portion PPN in the direction of arc movement. The support member MEPSM can move between a first movement limit indication ML1 and a second movement limit indication ML2 as part of moving within a maximum angular movement range θ MAX . In certain implementations, the maximum angular movement range θ MAX can correspond to an absolute angular measurement range θ ABS . In various alternative implementations, the absolute angular measurement range θ ABSand the maximum angular movement range θ MAX may be different. As described above regarding Figure 2 The endpoint ENDPT corresponds to the end of the movable encoder part support member MEPSM and also corresponds to the end of the movable part MPN, and correspondingly moves in an arc along the arc movement direction.
[0063] In some implementations, the first scale element portion PRTSC1 and the second scale element portion PRTSC2 of the scale portion 170 may be attached to the movable encoder part support member MEPSM (e.g., in an implementation where the movable encoder part MEP includes the scale portion 170). In this case, the first scale element portion PRTSC1 and the second scale element portion PRTSC2 will move relative to the detector portion 167 along the arc movement direction ARCD according to the arc movement ARCM. Alternatively, if the movable encoder part MEP includes the detector portion 167, the detector portion 167 may be attached to the movable encoder part support member MEPSM and will correspondingly move relative to the first scale element portion PRTSC1 and the second scale element portion PRTSC2 of the scale portion 170 in the arc movement direction ARCD according to the arc movement ARCM.
[0064] As Figure 3 and Figure 4 shown, the first scale element portion PRTSC1 and / or the first sensing element portion PRTSEN1 has a first central reference point REF1 (e.g., located at the center x and / or y-axis position of the first scale element portion PRTSC1 and / or the first sensing element portion PRTSEN1, such as at the center line), and the first central reference point is located at a first radius RD1 from the pivot portion PPN (e.g., from the pivot point PPT of the pivot portion PPN). The second scale element portion PRTSC2 and / or the second sensing element portion PRTSEN2 has a second central reference point REF2 (e.g., located at the center x and / or y-axis position of the second scale element portion PRTSC2 and / or the second sensing element portion PRTSEN2, such as at the center line), and the second central reference point is located at a second radius RD2 from the pivot portion PPN (e.g., from the pivot point PPT of the pivot portion PPN). Additionally, a central reference point REF0 is indicated (e.g., such as may be located at the midpoint between the central reference points REF1 and REF2 and / or between the first scale element portion PRTSC1 and the second scale element portion PRTSC2, etc.), and its central reference point REF0 is located at a radius RD0 from the pivot portion PPN (e.g., from the pivot point PPT of the pivot portion PPN).
[0065] As Figure 3 and Figure 4As shown, the first scale element portions PRTSC1 and PRTSC2 of the first track portion TR1 and the second track portion TR2 are arc-shaped and parallel to each other (e.g., forming concentric arcs). The second track portion TR2 is closer to the pivot portion PPN than the first track portion TR1 (e.g., such that the radius RD2 of the second center reference point REF2 of the second track portion TR2 is less than the radius RD1 of the first center reference point REF1 of the first track portion TR1). As Figure 3 shown, the first signal modulation scale element SME1 is disposed along the first scale element portion PRTSC1 according to the first signal modulation element angular space step θ WSME1 and the second signal modulation scale element SME2 is disposed along the second scale element portion PRTSC2 according to a second signal modulation element angular space step θ WSME1 different from the first signal modulation element angular space step θ WSME2 . As will be described in more detail below, in some implementations, the first signal modulation element angular space step θ WSME1 or the second signal modulation element angular space step θ WSME2 is not evenly divisible into 360 degrees.
[0066] As Figure 4 shown, the first scale element portion PRTSC1 has a first angular range θ RG1 and a corresponding arc length ARC1, and the second scale element portion PRTSC2 has a second angular range θ RG2 and a corresponding arc length ARC2. The angular ranges θ RG1 and θ RG2 are indicated as nominally equal and, in the examples of Figure 3 and Figure 4 are indicated as nominally equal to the absolute angular measurement range θ ABS and equal to the maximum angular movement range θ MAX . As will be described in more detail below, the first signal modulation element angular space step θ WSME1 and the second signal modulation element angular space step θ WSME2 can be related to the absolute angular measurement range θ ABS . The arrangement in which the first scale element portion PRTSC1 has a first angular range θ RG1 and an arc length ARC1 and the second scale element portion PRTSC2 has a second angular range θ RG2 and an arc length ARC2 enables the operation of achieving the absolute angular measurement range θ ABS in combination.
[0067] indicates the scale direction SCD (e.g., which is in Figure 3 and Figure 4In the implementation, it is in the arc direction) (for example, the signal modulation element SME of the first scale element part PRTSC1 and the second scale element part PRTSC2 can be arranged along the scale direction, such as according to the corresponding angular space step θ WSME1 and θ WSME2 , such as Figure 3 shown). In various implementations, the first scale element part PRTSC1 (for example, which is arc-shaped) is arranged at a first radius RD1 from the pivot part PPN, and the second scale element part PRTSC2 (for example, which is arc-shaped) is arranged at a second radius RD2 from the pivot part PPN, where the first radius RD1 is greater than the second radius RD2. In various implementations, the first scale element part PRTSC1 and the second scale element part PRTSC2 define corresponding absolute angular measurement ranges θ ABS (for example, where within the absolute angular measurement range θ ABS , each relative position between the detector part 167 and the scale part 170 generates a unique combination of detector signals from the detector part 167).
[0068] In various implementations, the ratio of the angular space steps of the signal modulation elements θ WSME2 / θ WS ME1 can be expressed according to at least one of the following equations 1 to 4, where in each of the equations, n and m are positive integers. In some implementations, m is a positive integer of at least 2 (for example, where in some implementations, m can be 2, 3, 4, or 5, etc.). It should be noted that for configurations where m is 2 or greater, such relationships correspond to a relatively large difference between the angular space steps θ WSME1 and θ WSME2 (for example, where the angular space step θ WSME2 is close to an integer multiple of the angular space step θ WSME1 (for example, m = 2 or greater)). In implementations where m = 1, the equation is noted to simplify to a simpler form (for example, where the nm factor simplifies to n). Regarding these equations, it should be noted that one technique for encoding the absolute angular measurement range θ ABS into an encoder using arc motion is to use two scale element parts with signal modulation element angular space steps that satisfy certain relationships. For example, the following equations show certain relationships that the angular space steps θ WSME1 and θ WSME2 of the scale element parts PRTSC1 and PRTSC2 of the track parts TR1 and TR2 can satisfy.
[0069] θ WSME2 / θ WSME1=(nm / (n - 1)) (Equation 1)
[0070] θ WSME2 / θ WSME1 =(nm / (n + 1)) (Equation 2)
[0071] θ WSME2 / θ WSME1 =((nm + 1) / n) (Equation 3)
[0072] θ WSME2 / θ wSME1 =((nm - 1) / n) (Equation 4)
[0073] In various implementations, the absolute angle measurement range θ ABS is equal to nθ WSME1 or nθ WSME2 For example, in some implementations, the configuration corresponding to Equation 1 or 2 can satisfy the additional condition of the absolute angle measurement range θ ABS = nθ WSME1 while the configuration corresponding to Equation 3 or 4 can satisfy the additional condition of the absolute angle measurement range θ ABS = nθ WSME2 In various implementations, the configuration corresponding to Equation 1 can satisfy the additional condition of the absolute angle measurement range θ ABS = ((n - 1) / m)θ WSME2 while the configuration corresponding to Equation 2 can satisfy the additional condition of the absolute angle measurement range θ ABS = ((n + 1) / m)θ WSME2 while the configuration corresponding to Equation 3 can satisfy the additional condition of the absolute angle measurement range θ ABS = (nm + 1)θ WSME1 and the configuration corresponding to Equation 4 can satisfy the additional condition of the absolute angle measurement range θ ABS = (nm - 1)θ WSME1 Based on such relationships, it should be understood that the method for selecting the angular space step of two signal modulation elements is to set an integer number n of angular space steps (e.g., for θ WSME1 or θ WSME2 ) to be included within the absolute angle measurement range θ ABS and wherein the angular space step of the other signal modulation element (e.g., θ WSME2 or θ WSME1 ) can be determined according to relationships such as those indicated above.
[0074] In various implementations, the first scale element portion PRTSC1 has an arc length ARC1 and is disposed at a first radius RD1 from the pivot portion PPN, and the second scale element portion PRTSC2 has an arc length ARC2 and is disposed at a second radius RD2 from the pivot portion PPN (e.g., as Figure 4 indicated), where ARC2 / ARC1 = RD2 / RD1. In various implementations, the second signal modulation element angular space step θ WSME2 is greater than the first signal modulation element angular space step θ WSME1 (e.g., in a configuration where m is 2 or greater, the angular space step θ WSME2 can be close to an integer multiple of the angular space step θ WSME1 ).
[0075] As noted above, the first signal modulation element pattern PATSME1 in the first scale element portion PRTSC1 in the first track portion TR1 includes a first half pattern portion FHPP1 and a second half pattern portion SHPP1, where each half pattern portion includes a row of first signal modulation elements SME1. In each scale row, the first signal modulation elements SME1 are set (e.g., spaced apart / spatially positioned) according to the first signal modulation element angular space step θ WSME1 . For two adjacent scale rows in the half pattern portion, the spatial phase of the scale row in the second half pattern portion is offset by 1 / 2 of the first signal modulation element angular space step θ WSME1 relative to the spatial phase of the adjacent scale row in the first half pattern portion. Thus, in this example, the signal modulation element spatial phase offset is 1 / 2 of the first signal modulation element angular space step θ WSME1 (e.g., which can correspond to a 180-degree spatial phase shift / difference between adjacent scale rows).
[0076] As noted above, the second signal modulation element pattern PATSME2 in the second scale element portion PRTSC2 in the second track portion TR2 includes a first half pattern portion FHPP2 and a second half pattern portion SHPP2, where each half pattern portion includes a row of second signal modulation elements SME2. In each scale row, the second signal modulation elements SME2 are set (e.g., spaced apart / spatially positioned) according to the second signal modulation element angular space step θ WSME2 . For two adjacent scale rows in the half pattern portion, the spatial phase of the scale row in the second half pattern portion is offset by 1 / 2 of the second signal modulation element angular space step θ WSME2 relative to the spatial phase of the adjacent scale row in the first half pattern portion. Thus, in this example, the signal modulation element spatial phase offset is the second signal modulation element angular space step θ WSME21 / 2 (e.g., it may correspond to a 180-degree spatial phase shift / difference between adjacent scale lines).
[0077] In various implementations, in the first sensing element portion PRTSEN1, the first set of first sensing elements SET1SEN1 and the second set of first sensing elements SET2SEN1 are at different angular spatial phase positions, separated by a first sensing element angular spatial phase offset. In various implementations, the first sensing element angular spatial step θ of the first sensing element portion PRTSEN1 (e.g., of each of the sets of first sensing elements SET1SEN1 and SET2SEN1) WSEN1 may correspond to (e.g., be equal to) the first signal modulation element angular spatial step θ of the first scale element portion PRTSC1 WSME1 . In various implementations, the first sensing element angular spatial phase offset may be equal to the first sensing element angular spatial step θ WSEN1 by approximately 1 / 4 (e.g., according to an orthogonal configuration, as would be understood by those skilled in the art).
[0078] Similarly, in various implementations, in the second sensing element portion PRTSEN2, the first set of second sensing elements SET1SEN2 and the second set of second sensing elements SET2SEN2 are at different angular spatial phase positions, separated by a second sensing element angular spatial phase offset. In various implementations, the second sensing element angular spatial step θ of the second sensing element portion PRTSEN2 (e.g., of each of the sets of second sensing elements SET1SEN2 and SET2SEN2) WSEN2 may correspond to (e.g., be equal to) the second signal modulation element angular spatial step θ of the second scale element portion PRTSC2 WSME2 . In various implementations, the second sensing element angular spatial phase offset may be equal to the second sensing element angular spatial step θ WSEN2 by approximately 1 / 4 (e.g., according to an orthogonal configuration, as would be understood by those skilled in the art).
[0079] Figure 5 A diagram of an implementation where it is part of the transducer TDR', the part being configured to be used with a linear motion LINM' between the detector portion 167' and the scale portion 170', presented as background information related to the various principles described herein. Figure 6 is a diagram showing Figure 5 certain dimensions and characteristics of the transducer. In various implementations, Figure 5 and Figure 6 the transducer TDR' (e.g., which is configured to be used in a measuring instrument with linear motion) can be associated with Figure 3 and Figure 4The transducer TDR (e.g., which is configured to be used in a measuring instrument having an arcuate motion) has similarities such that in some implementations, a certain type of transformation can be performed to change the design of one transducer to that of another, as will be described in more detail below.
[0080] Thus, each of the components in the transducer TDR will be understood to have a corresponding component in the transducer TDR'. Generally, the corresponding components have mostly the same reference numerals or symbols, except for the primed designations in the transducer TDR' (e.g., 167', 170', etc.). Each of the corresponding components will be understood to have a similar design and / or similar functionality, except in the case where the overall functionality of the transducer TDR' (e.g., as configured to be used in a measuring instrument having a linear motion) is compared to the overall functionality of the transducer TDR (e.g., as configured to be used in a measuring instrument having an arcuate motion). Thus, the components of the transducer TDR' will be understood by those skilled in the art based on the corresponding components of the transducer TDR as described above and based on the description of other transducers configured to be used with linear motion in the incorporated references. Accordingly, a complete description of the components of the transducer TDR' will not be provided herein, but a brief description will be provided below for reference.
[0081] Briefly, Figure 5 and Figure 6 the transducer TDR' includes a detector portion 167' and a scale portion 170'. The scale portion 170' extends along a scale direction SCD', and the scale portion 170' includes: a first scale element portion PRTSC1' that includes a first signal modulating scale element SME1'; and a second scale element portion PRTSC2' that includes a second signal modulating scale element SME2'. The periodic scale pattern 180' includes a first signal modulating element pattern PATSME1' and a second signal modulating element pattern PATSME2'. The detector portion 167' is configured to be close to the scale portion 170', wherein due to the linear motion (e.g., of the measuring instrument that includes the transducer TDR'), a relative movement is generated between the detector portion 167' and the scale portion 170'.
[0082] The detector section 167' includes a field generation section PRTFGE' and a sensing section PRTSEN'. The field generation section PRTFGE' is configured to generate a changing magnetic flux in response to a drive signal. The field generation section PRTFGE' includes: a first field generation element section PRTFGE1' and a second field generation element section PRTFGE2', which include elongated portions ELP1A' to ELP1D' and ELP2A' to ELP2D' and end portions EDP1A' to EDP1D' and EDP2A' to EDP2D', and the elongated portions and the end portions form corresponding first half-loop paths FGE1FHL', FGE1SHL' and second half-loop paths FGE2FHL', FGE2SHL', having corresponding internal regions FGE1FHIA', FGE1SHIA', FGE2FHIA' and FGE2SHIA'.
[0083] The sensing section PRTSEN' includes a first sensing element section PRTSEN1' and a second sensing element section PRTSEN2'. The first sensing element section PRTSEN1' includes a first set of first sensing elements SET1SEN1' and a second set of first sensing elements SET2SEN1' (for example, which include corresponding sensing elements SEN1-A1' to SEN1-A12' and SEN1-B1' to SEN1-B12') and is arranged in a first track section TR1' together with a first scale element section PRTSC1'. The second sensing element section PRTSEN2' includes a first set of second sensing elements SET1SEN2' and a second set of second sensing elements SET2SEN2' (for example, which include corresponding sensing elements SEN2-A1' to SEN2-A6' and SEN2-B1' to SEN2-B6') and is arranged in a second track section TR2' together with a second scale element section PRTSC2'. The sections PRTFGE1', PRTSEN1' and PRTSC1' are included in a first transducer section PRTTDR1' (for example, as included in the first track section TR1'), while the sections PRTFGE2', PRTSEN2' and PRTSC2' are included in a second transducer section PRTTDR2' (for example, as included in the second track section TR2').
[0084] The first scale element portions PRTSC1' and PRTSC2' of the first track portion TR1' and the second track portion TR2' are linear and parallel to each other. The first signal modulation scale element SME1' is arranged along the first scale element portion PRTSC1' according to the first signal modulation element linear space step WSME1', and the second signal modulation scale element SME2' is arranged along the second scale element portion PRTSC2' according to a second signal modulation element linear space step WSME2' that is different from the first signal modulation element linear space step WSME1'.
[0085] The first sensing element portions PRTSEN1' and PRTSEN2' of the detector portion 167' generate corresponding detector signals SIG1A' and SIG1B' and SIG2A' and SIG2B'. The signal processing configuration can be configured to determine the position of the detector portion 167' relative to the scale portion 170' based on the detector signals input from the detector portion 167'.
[0086] Figure 6 is a diagram showing certain dimensions and aspects of the transducer TDR'. In Figure 6 the first scale element portion PRTSC1' and the second scale element portion PRTSC2' are each represented as a line (e.g., whose position can correspond to the center line or the position of other representations of corresponding components). In Figure 5 and Figure 6 the implementation, the transducer TDR' is configured to operate along the linear motion direction LIND' with a relative linear motion LINM' (such as corresponding to the relative movement between the detector portion 167' and the scale portion 170' (e.g., where the scale portion 170' includes the first scale element portion PRTSC1' and the second scale element portion PRTSC2')).
[0087] As Figure 6 shown, the first scale element portion PRTSC1' has a first central reference point REF1' and is located at the corresponding y-axis coordinate Y1'. The second scale element portion PRTSC2' has a second central reference point REF2' and is located at the corresponding y-axis coordinate Y2'. In addition, a reference point REF0' is indicated, which is located at the corresponding y-axis coordinate Y0'. In various implementations, the y-axis coordinates Y1' and Y2' can be referenced relative to the y-axis coordinate Y0' (e.g., according to a specific y-axis distance above or below the y-axis coordinate Y0'). In Figure 6In a specific example, the reference point REF0' and the y-axis coordinate Y0' are located at the midpoint between the central reference points REF1' and REF2', and the midpoint is correspondingly located at the midpoint between the first scale element portion PRTSC1' and the second scale element portion PRTSC2', etc.). In a specific numerical example, the y-axis coordinate Y0' = 0, Y1' = +4, and Y2' = -4. As will be described in more detail below, in some alternative implementations, the y-axis coordinate Y0' of the reference point REF0' can be specified / selected to be located at other positions (e.g., at other positions between Y1' and Y2', or above Y1' and Y2', or below Y1' and Y2').
[0088] As Figure 6 shown, the first scale element portion PRTSC1' has a first linear range RG1', and the second scale element portion PRTSC2' has a second linear range RG2'. In this configuration, the track ranges RG1' and RG2' can be substantially the same and can correspond to the absolute linear measurement range WABS' (e.g., RG1' = RG2' = WABS'). It can be understood that in various implementations, the range can be regarded as a mathematical construct and may not correspond to an exact physical scale length. The arrangement where the first scale element portion PRTSC1' has a first linear range RG1' and the second scale element portion PRTSC2' has a second linear range RG2' enables the operation of achieving the absolute linear measurement range WABS in combination. The scale direction SCD' is indicated (e.g., which can correspond to the x-axis direction in Figure 5 and Figure 6 the implementation) (e.g., the signal modulation elements SME' of the first scale element portion PRTSC1' and the second scale element portion PRTSC2' can be arranged along the scale direction, such as according to the corresponding linear space steps WSME1' and WSME2', such as Figure 5 shown).
[0089] In various implementations, the ratio WSME2' / WSME1' of the linear spatial steps of the signal modulation elements can be expressed according to at least one of the following equations 5 to 8, where in each of the equations n and m are positive integers (e.g., and where equations 5 to 8 are noted to have certain similarities to equations 1 to 4). In certain implementations, m is a positive integer of at least 2 (e.g., where, in certain implementations, m can be 2, 3, 4, or 5, etc.). It should be noted that for configurations where m is 2 or greater, such relationships correspond to a relatively large difference between the linear spatial steps WSME1' and WSME2 of the signal modulation elements. In implementations where m = 1, the equations are noted to simplify to a simpler form (e.g., where the nm factor simplifies to n). Regarding these equations, it should be noted that one technique for encoding the absolute linear measurement range WABS' into an encoder utilizing linear motion is to use two scale element portions whose signal modulation element linear spatial steps satisfy certain relationships. For example, the following equations show certain relationships that the signal modulation element linear spatial steps WSME1' and WSME2' of the scale element portions PRTSC1' and PRTSC2' of the track portions TR1' and TR2' can satisfy.
[0090] WSME2' / WSME1' = (nm / (n - 1)) (Equation 5)
[0091] WSME2' / WSME1' = (nm / (n + 1)) (Equation 6)
[0092] WSME2′ / WSME1' = ((nm + 1) / n) (Equation 7)
[0093] WSME2′ / WSME1' = ((nm - 1) / n) (Equation 8)
[0094] As Figure 6 indicated, in various implementations, the first track portion TR1' has a first track range RG1', while the second track portion TR2' has a second track range RG2'. As noted above, in such a configuration, the track ranges RG1' and RG2' can generally be approximately equal (e.g., approximately the same), and can correspond to the absolute linear measurement range WABS' (e.g., RG1' = RG2' = WABS'). In various implementations, the absolute linear measurement range WABS' = nWSME1', or the absolute linear measurement range WABS' = nWSME2'. For example, in certain implementations, the configurations corresponding to equations 5 or 6 can satisfy the additional condition that the absolute linear measurement range WABS' = nWSME1', while the configurations corresponding to equations 7 or 8 can satisfy the additional condition that the absolute linear measurement range WABS' = nWSME2'.
[0095] In various implementations, the configuration corresponding to Equation 5 can satisfy the additional condition of an absolute linear measurement range WABS' = ((n - 1) / m) WSME2', the configuration corresponding to Equation 6 can satisfy the additional condition of an absolute linear measurement range WABS' = ((n + 1) / m) WSME2', the configuration corresponding to Equation 7 can satisfy the additional condition of an absolute linear measurement range WABS' = (nm + 1) WSME1', and the configuration corresponding to Equation 8 can satisfy the additional condition of an absolute linear measurement range WABS' = (nm - 1) WSME1'.
[0096] In accordance with such relationships, it should be understood that the method for selecting the linear spatial step of two signal modulation elements is to set an integer n of linear spatial steps (e.g., for WSME1' or WSME2') to be included within the absolute linear measurement range WABS', and wherein the linear spatial step of the other signal modulation element (e.g., for WSME2' or WSME1') can be determined according to relationships such as those indicated above. In various implementations, the linear spatial step WSME2' of the second signal modulation element is greater than the linear spatial step WSME1' of the first signal modulation element (e.g., in a configuration where m is 2 or greater, the linear spatial step WSME2' of the second signal modulation element can be close to the corresponding integer multiple of the linear spatial step WSME1').
[0097] As pointed out above, Figure 5 and Figure 6 the transducer TDR' (e.g., which is configured to be used in a measuring instrument with linear motion) can be similar to Figure 3 and Figure 4 the transducer TDR (e.g., which is configured to be used in a measuring instrument with arcuate motion) such that in some implementations, a certain type of conversion can be performed to change the design of one transducer to that of the other. To help illustrate the principles related to such conversion and to Equations 9 and 10 below, a specific numerical example related to the transducer TDR' is as follows.
[0098] In one implementation, the y-axis coordinate Y0' of the reference point REF0' can be specified as having a value of 0 mm (e.g., along the y-axis). The y-axis coordinate Y1' of the reference point REF1' can be specified as having a value of +4 mm (e.g., along the y-axis), and the y-axis coordinate Y2' of the reference point REF2' can be specified as having a value of -4 mm (e.g., along the y-axis), where as pointed out above, these values can be expressed according to their relative relationships. The linear spatial step WSME1' can be specified as having a value of 1.2 mm, and the linear spatial step WSME2' can be designed to have a value of 2.5 mm.
[0099] Regarding Equation 5, if n = 25 and m = 2, then WSME2' / WSME1' = (nm / (n - 1)) = 50 / 24 = 2.5 mm / 1.2 mm. Additionally, in the case where WABS' = nWSME1' = 25(1.2 mm) = 30 mm and in the case where WABS' = ((n - 1) / m)WSME2' = (24 / 2)2.5 mm = 30 mm, this corresponds to RG1' = RG2' = WABS' = 30 mm, where within the absolute linear measurement range WABS' there are 25 WSME1' (corresponding to 25 SME1') and 12 WSME2' (corresponding to 12 SME2'). It should be noted that the relationship of this configuration can alternatively be written according to Equation 7, where if n = 12 and m = 2, then WSME2' / WSME1' = ((nm + 1) / n) = (24 + 1) / 12 = 2.5 mm / 1.2 mm. Additionally, in the case where WABS' = nWSME2' = 12(2.5 mm) = 30 mm and WABS' = (nm + 1)WSME1' = (24 + 1)1.2 mm = 30 mm, this corresponds to RG2' = RG1' = WABS' = 30 mm, where within the absolute linear measurement range WABS' there are 25 WSME1' (corresponding to 25 SME1') and 12 WSME2' (corresponding to 12 SME2').
[0100] As another example, it should be noted that in an alternative arrangement, where the absolute linear measurement range WABS' (maintained at 30 mm) includes 25 WSMEs (corresponding to 25 SME1'), where WSME1' is maintained at 1.2 mm and includes 13 WSME2's (corresponding to 13 SME2'), while WSME2' = 30 mm / 13 = 2.31 mm, these relationships can be expressed according to Equation 6 or 8. More specifically, in the case where n = 25 and m = 2, according to Equation 6, WSME2' / WSME1' = (nm / (n + 1)) = 50 / 26 = 2.31 mm / 1.20 mm. In the case where WABS' = nWSME1' = ((n + 1) / m)WSME2', there are 25 WSME1's (corresponding to 25 SME1') and 13 WSME2's (corresponding to 13 SME2') within the absolute linear measurement range. Alternatively, in the case where n = 13 and m = 2, according to Equation 8, WSME2'' / WSME1'' = ((nm - 1) / n) = 25 / 13 = 2.31 mm / 1.20 mm. In the case where WABS' = nWSME2' = (nm - 1)WSME1', there are 13 WSME2's (corresponding to 13 SME2') and 25 WSME1's (corresponding to 25 SME1') within the absolute linear measurement range.
[0101] The following relationship indicates one way in which a conversion can be performed from transducer TDR' to transducer TDR (and it is understood that this conversion can also be performed in reverse, where the relationship is reversed from transducer TDR to transducer TDR'). As an initial step in this conversion, the desired radius of the y-axis coordinate Y0' of the reference point REF0' can be selected / determined ( Figure 6 of). In a specific example, the radius of the y-axis coordinate Y0' of the reference point REF0' can be the radius RD0 (e.g., as Figure 4 indicated).
[0102] Once the radius RD0 of the y-axis coordinate Y0' of the reference point REF0' is selected / determined, the following Equations 9 and 10 indicate how the linear spatial steps WSME1' and WSME2' of the signal modulation elements of the transducer TDR' ( Figure 5 and Figure 6 ) can be converted to the angular spatial steps θ Figure 3 and Figure 4 of the signal modulation elements of the transducer TDR ( WSME1 and θ WSME2 ).
[0103] θ WSME1 = WSME1'′ / RD0 (Equation 9)
[0104] θWSME2 = WSME2' / RD0 (Equation 10)
[0105] In addition, a process can be performed to transform each coordinate of the layout of the transducer TDR' to become the layout of the transducer TDR (e.g., as shown by comparing the transducer TDR of Figure 3 with the transducer TDR' of Figure 5 ). A representation of the technique for performing such a transformation on each coordinate is as follows:
[0106]
[0107] Such conversions (e.g., according to Equations 9 to 11) will be further understood based on the following specific numerical examples (e.g., which include the example values described above for the transducer TDR').
[0108] In one implementation, if the radius RD0 = 40 mm, then according to Equation 9, θ WSME1 = WSME1' / RD0 = 1.2 mm / 40 mm = 0.03 radians = approximately 1.718873 degrees. According to Equation 10, θ WSME2 = WSME2' / RD0 = 2.5 mm / 40 mm = 0.0625 radians = approximately 3.580986 degrees. In various implementations, θ WSEN1 = θ WSME1 and θ WSEN2 = θ WSME2 , where the dimensions of the sensing elements SEN1 and SEN2 in the transducer TDR are also indicated to have been correspondingly transformed compared to the transducer TDR'. In various implementations, the lengths of the elongated portions ELP of the field generating element portions PRTFGE1 and PRTFGE2 in the transducer TDR can also be correspondingly transformed compared to the transducer TDR' (e.g., by a proportional amount similar to the transformation of the corresponding WSME), such as Figure 3 shown.
[0109] Regarding the above values and according to Equation 1, θ WSME2 / θ WSME1 = (nm / (n - 1)) = (50 / 24) = 3.58 degrees / 1.72 degrees. In addition, in various implementations, θ ABS = nθ WSME1 = 25(1.72 degrees) = 43 degrees and according to θ ABS = ((n - 1) / m)θ WSME2 = ((25 - 1) / 2)(3.58 degrees) = 43 degrees to determine θ ABS . According to these relationships, there are 25 θ ABS within the absolute angular measurement range θ WSME1(corresponding to 25 SME1s) and 12 θs WSME2 (corresponding to 12 SME2s). It should be noted that the relationship of this configuration can alternatively be written according to Equation 3, where if n = 12 and m = 2, then θ WSME2 / θ WSME1 = ((nm + 1) / n) = 25 / 12 = 3.58 degrees / 1.72 degrees. In addition, θ ABS = nθ WSME2 = 12(3.58 degrees) = 43 degrees and θ ABS = (nm + 1)θ WSME1 = (24 + 1)1.72 degrees = 43 degrees.
[0110] As another example, it should be noted that in an alternative arrangement, where the absolute angular measurement range θ ABS (remains at 43 degrees) includes 25 θs WSME1 (corresponding to 25 SME1s), where θ WSME1 remains at 1.72 degrees and includes 13 θs WSME2 (corresponding to 13 SME2s), while θ WSME2 = 43 degrees / 13 = 3.31 degrees. These relationships can be expressed according to Equation 2 or 4. More specifically, in the case of n = 25 and m = 2, according to Equation 2, θ WSME2 / θ WSME1 = (nm / (n + 1)) = 50 / 26 = 3.31 degrees / 1.72 degrees. In the case of θ ABS = nθ WSME1 = ((n + 1) / m)θ WSME2 in the absolute angular measurement range, there are 25 θs WSME1 (corresponding to 25 SME1s) and 13 θs WSME2 (corresponding to 13 SME2s). Alternatively, in the case of n = 13 and m = 2, according to Equation 4, θ WSME2 / θ WSME1 = ((nm - 1) / n) = 25 / 13 = 3.31 degrees / 1.72 degrees. In the case of θ ABS = nθ WSME2 = (nm - 1)θ WSME1 in the absolute angular measurement range, there are 13 θs WSME2 (corresponding to 13 SME2s) and 25 θs WSME1 (corresponding to 25 SME1s).
[0111] With respect to Figure 4 and Figure 6 the illustration, the following discussion is about the considerations for choosing the values of Y1' and Y2' relative to Y0'. If the choice is ( Figure 6If Y1' and Y2' are greater than (e.g., higher than) Y0', then Figure 4 the radii RD1 and RD2 will be greater than the radius RD0, and the scale element portions PRTSC1 and PRTSC2 (and corresponding scale track portions TR1 and TR2) will be relatively large (e.g., generally speaking and / or relative to the design of the transducer TDR'). In some implementations, it may be desirable for the transducer TDR to be within certain size limits, and for this purpose it may be desirable to limit the maximum values of Y1' and Y2'. Another consideration may relate to certain printed circuit board (PCB) design rules (e.g., such as those that may result in size limitations for the fabrication of certain components and / or hole / component spacings, etc.). For example, the transducer TDR' may have been designed to have a first scale element portion PRTSC1' and a corresponding relatively small signal modulation element SME1' and a linear space step WSME1' that is as small as can be fabricated according to the PCB design rules. In such cases, choosing a value of Y1' that is greater than Y0' can help ensure that the size design in the transducer TDR continues to comply with the PCB design rules.
[0112] In contrast, if Y1' and Y2' are chosen Figure 6 to be greater than (e.g., lower than) Y0', then Figure 4 the radii RD1 and RD2 will be less than the radius RD0, and the scale element portions PRTSC1 and PRTSC2 (and corresponding scale track portions TR1 and TR2) will be relatively small (e.g., generally speaking and / or relative to the design of the transducer TDR'). As noted above, in some configurations, smaller sizes may encounter problems with certain PCB design rules (e.g., such as those that may result in size limitations for the fabrication of certain components and / or hole / component spacings, etc.). Regarding the second scale element portions PRTSC2' and PRTSC2, and according to Equations 1 to 8, in implementations where the positive integer m is 2 or greater, it can be understood that the elements and spacings of the second scale element portions PRTSC2' and PRTSC2 are relatively large (e.g., relative to the elements and spacings of the first scale element portions PRTSC1' and PRTSC1). In this regard, the elements and spacings of the second scale element portions PRTSC2' and PRTSC2 may be able to better tolerate a certain degree of reduced size / shrinkage (e.g., Y2' is less than Y0') while still being within the size / spacing requirements of the PCB design rules.
[0113] In some implementations (e.g., as shown in the examples of Figure 5 and Figure 6 ), Y1' can be chosen to be greater than Y0', and Y2' can be chosen to be less than Y0'. More specifically, if Y1' is chosen Figure 6 to be greater than (e.g., higher than) Y0', thenFigure 4 The radius RD1 of ) will be greater than the radius RD0, and the scale element portion PRTSC1 (and the corresponding scale track portion TR1) will be relatively large (e.g., generally speaking and / or relative to the design of the transducer TDR'). As noted above, in some implementations, this choice can help ensure that the first scale element portion PRTSC1 and the corresponding relatively small signal modulation element SME1 continue to comply with PCB design rules. Additionally, if the selected ( Figure 6 of ) Y2' is greater than (e.g., lower than) Y0', then ( Figure 4 the radius RD2 of ) will be less than the radius RD0, and the scale element portion PRTSC2 (and the corresponding scale track portion TR2) will be relatively small (e.g., generally speaking and / or relative to the design of the transducer TDR'). As noted above, in some implementations, this choice may be acceptable because the components and pitch of the second scale element portion PRTSC2 (which can be relatively larger than the components and pitch of the first scale element portion PRTSC1 (e.g., especially in implementations where m = 2 or greater)) may be able to better tolerate a certain degree of smaller / reduced / shrunk dimensions while still within the size / pitch requirements of the PCB design rules.
[0114] In various implementations, certain considerations can also be applied to determine / select the radius RD0. One consideration is the product size / dimension requirements (i.e., for the measuring instrument 100) and / or the maximum angular movement range θ MAX (e.g., for the movement stroke of the movable encoder portion MEP). A larger value of the radius RD0 can generally correspond to better angular resolution of the encoder 101 / transducer TDR, but may also require a larger movement stroke of the movable encoder portion MEP to measure a given angular range. A smaller value of the radius RD0 will tend to exaggerate the increase / decrease effect noted above for the values of Y1' and Y2' relative to Y0'.
[0115] Figure 7 is a diagram showing certain signals generated due to operating the Figure 5 transducer TDR' with a linear movement between the detector portion 167' and the scale portion 170'. As Figure 7As shown, FIG. 710A shows the variation of the SEN1' signal with linear position (e.g., along the x-axis direction, which can also be characterized as the scale direction and / or the measurement axis direction). In various implementations, the signal in FIG. 710A can correspond to the detector signals SIG1A' and SIG1B' of the transducer portion PRTTDR1' of the first track portion TR1'. FIG. 720A similarly shows the variation of the SEN2' signal with linear position. In various implementations, the signal in FIG. 720A can correspond to the detector signals SIG2A' and SIG2B' of the transducer portion PRTTDR2' of the second track portion TR2'. FIGS. 710B and 720B show the phase signals (i.e., obtained by calculating arctan(SIGxB / SIGxA)) of the SEN1' and SEN2' signals in FIGS. 710A and 720A, respectively.
[0116] FIG. 730 shows the absolute ABS' phase signal (e.g., generated by the combination of other signals such as those including FIGS. 710B and 720B). In various implementations, the absolute ABS' phase signal can be represented according to Φ ABS' = Φ SIG1' - mΦ SIG2' as shown. As indicated in FIG. 730, the absolute linear measurement range WABS extends to a range of -15 mm to +15 mm, corresponding to an absolute range of 30 mm. As pointed out above, within the 30 mm range, there can be 25 WSME1' (i.e., where WSME1' = 1.2 mm) and 12 WSME2' (i.e., where WSME2' = 2.5 mm). Correspondingly, in FIGS. 710A and 710B, 25 cycles are shown in the range of -15 mm to +15 mm, while in FIGS. 720A and 720B, 12 cycles are shown in the range of -15 mm to +15 mm.
[0117] Figure 8 is due to the operation of the transducer TDR' in an arc motion between the detector portion 167' and the scale portion 170' and is a graph of some less desirable signals that can be compared with Figure 5 the more desirable signals. An example of an implementation of the arc motion can be whether the transducer TDR' is used in Figure 7 the measuring instrument 100 and / or replaces the transducer TDR in the arc motion implementation of Figure 2 As pointed out above, the transducer TDR' is configured and designed to be used in a linear motion, and thus, the use in an arc motion will result in some undesirable effects, which will be described in more detail below. Figure 4 the arc motion implementation.
[0118] As Figure 8As shown, FIG. 810A shows that the SEN1' signal varies with angular position (e.g., along the arc scale direction). In various implementations, the signal of FIG. 810A can correspond to the detector signals SIG1A' and SIG1B' of the transducer portion PRTTDR1' of the first track portion TR1'. FIG. 820A similarly shows that the SEN2' signal varies with angular position. In various implementations, the signal of FIG. 820A can correspond to the detector signals SIG2A' and SIG2B' of the transducer portion PRTTDR2' of the second track portion TR2'. FIG. 810B and FIG. 820B show the phase signals of the SEN1' and SEN2' signals of FIG. 810A and FIG. 820A, respectively.
[0119] Graph 830 shows an absolute ABS′ phase signal (eg, as generated by a combination of other signals such as the signals comprising graphs 810B and 820B). In various implementations, the absolute ABS′ phase signal may be based on Φ ABS' =Φ SIG1' -mΦ SIG2' Compared to Figure 7 730, 830 indicate that the ABS' phase signal has a cycle of approximately 7 degrees (eg, which is significantly less than that described above for Figure 3 and Figure 4 The absolute angular measurement range of the TDR transducer is approximately 43 degrees θ ABS As an example, it is conceivable that if Figure 6 Substituting into Figure 4 In a configuration of , each arcuate motion angle will correspond to a relatively longer amount of the first scaling element portion PRTSC1 ' and a relatively shorter amount of the second scaling element portion PRTSC2'.
[0120] Compared to Figures 710A, 710B, 720A and 720B (and compared to Figure 9 910A, 910B, 920A and 920B, as described in more detail below), this effect can also be seen in Figures 810A, 810B, 820A and 820B. More specifically, in Figure 8 In the 43 degree relative angular movement range (for example, as described below with respect to Figure 9 In more detail (such as extending from -21.5 degrees to +21.5 degrees), it can be seen that for the SEN1' signal (i.e., the first track portion TR1'), relatively more cycles occur, while for the SEN2' signal (i.e., the second track portion TR2'), relatively fewer cycles occur. More specifically, in Figure 7and Figure 9 In the example, although the absolute measurement range (e.g., 30 mm and 43 degrees, respectively) has about 25 SEN1' signal cycles and 12 SEN2' signal cycles, in Figure 8 8, each graph shows a greater number of SEN1' signal cycles (e.g., more than 26) and a lesser number of SEN2' signal cycles (e.g., approximately 11). The ABS' phase signal of graph 830 shows the result of this effect, where the ABS' phase signal does not reach the desired absolute angle measurement range θ of approximately 43 degrees. ABS , but for a corresponding absolute angular measurement range θ of approximately 7 degrees ABS There are several cycles within this range. These issues illustrate some of the drawbacks / challenges of including a multi-track transducer configured / designed for use with linear motion in an application for arcuate motion.
[0121] Figure 9 is shown as operating with linear motion between the detector portion 167 and the scale portion 170 Figure 3 The transducer is generated and is indicated with Figure 7 The expected signal is similar to some signal graph. Figure 9 As shown, Figure 910A shows that the SEN1 signal varies with angular position. In various implementations, the signal of Figure 910A can correspond to the detector signals SIG1A and SIG1B of the transducer portion PRTTDR1 of the first track portion TR1. Figure 920A similarly shows that the SEN2 signal varies with angular position. In various implementations, the signal of Figure 920A can correspond to the detector signals SIG2A and SIG2B of the transducer portion PRTTDR2 of the second track portion TR2. Figures 910B and 920B show phase signals of the SEN1 and SEN2 signals of Figures 910A and 920A, respectively.
[0122] Graph 930 shows an absolute ABS phase signal (e.g., as generated by a combination of other signals (such as the signals including graphs 910B and 920B)). In various implementations, the absolute ABS phase signal can be based on Φ ABS =Φ SIG1 -mΦ SIG2 As indicated in Figure 930, the absolute angle measurement range θ ABSextends to a range of -21.5 degrees to +21.5 degrees, such as an absolute angle range corresponding to 43 degrees. Correspondingly, in FIGS. 910A and 910B, 25 cycles are shown within the -21.5 degrees to +21.5 degrees angular range (e.g., 25 SME1s in the first scale element portion PRTSC1 corresponding to the first track portion TR1), and in FIGS. 920A and 920B, 12 cycles are shown within the -21.5 degrees to +21.5 degrees angular range (e.g., 12 SME2s in the second scale element portion PRTSC2 corresponding to the second track portion TR2).
[0123] It should be understood that Figure 7 and Figure 9 the signals shown in the respective figures of Figure 7 are substantially equivalent (i.e., as generated by Figure 9 the linear motion implementation of Figure 8 and the arc motion implementation of
[0124] It should be understood that, in accordance with the principles described herein, the absolute angle measurement range θ ABS can be customized / configured for a particular maximum angular movement range θ MAX of a particular application. The above specific numerical examples illustrate an arrangement configured for an absolute angle measurement range θ ABS corresponding to 43 degrees, but it should be understood that other arrangements can be configured for larger or smaller absolute angle measurement ranges in accordance with the principles described above. In some implementations, a smaller absolute angle measurement range (e.g., a range less than 15 degrees, or 10 degrees, or 5 degrees) can be utilized for a particular application.
[0125] It should be understood that the absolute angle measurement range θ is customized for a particular application ABSThe capabilities may have certain advantages. For example, for a multi-track transducer, designs for longer absolute angle measurement ranges typically require a certain level of resolution and precision in order to achieve the longer range (e.g., having appropriate and distinct signal levels across the full range, such as having a high level of information accuracy for each increment, particularly regarding the relationship between multiple track portions (e.g., TR1 and TR2) so that each increment is distinguishable across the full range). In contrast, for a relatively short absolute angle measurement range in a multi-track transducer (e.g., such as may be formed in accordance with the principles described herein), a relatively high level of resolution can be achieved over a smaller range (e.g., by using smaller and / or otherwise different increments / spatial steps between multiple tracks, which might otherwise be too fine and / or have other issues for a longer range) and / or sufficient accuracy can be achieved over a smaller range using an implementation with lower complexity / cost / power requirements, etc.
[0126] In some implementations, a comparison can be made with an absolute rotary encoder that has an integer number of angular space steps in each track portion over a full 360-degree absolute range (e.g., so as to be effectively used for continuous angular position measurement in an implementation where a full 360-degree rotation and greater rotations can be performed). According to such principles, if a portion of such a rotary encoder is used for an arc motion application (e.g., if 1 / 4 or 1 / 8 of such a rotary encoder is used for a 90-degree or 45-degree measurement range), the angular space steps in each track portion will still be evenly divided into 360 degrees correspondingly. For example, if a portion of such a rotary encoder is used, for each track portion in the transducer, 360 degrees divided by the given angular space step of the track portion will equal an integer.
[0127] Such implementations that utilize a portion of a rotary encoder are noted to have certain disadvantages (e.g., as noted above, designs for relatively long measurement ranges (such as a full 360-degree angular measurement range) typically require a certain level of resolution and precision in order to achieve the full 360-degree range, particularly regarding the relationship between track portions so that each increment is distinguishable). In contrast, as noted above, an arc motion encoder can be formed in accordance with the principles described herein having a relatively short absolute angle measurement range (i.e., less than 360 degrees, and in some implementations can be smaller, such as less than 45 degrees, or 15 degrees, or 5 degrees), and having certain advantages such as those noted above.
[0128] Figure 10is a flowchart showing a method 1000 for operating a measuring instrument with an arcuate movement between a detector part and a scale part. The method generally includes three boxes (steps). Box 1010 includes providing a drive signal to cause a field generating part PRTFGE to generate a varying magnetic flux. Box 1020 includes receiving a detector signal from a detector part 167, where the detector signal includes: a detector signal from a first set of first sensing elements SET1SEN1 operating in conjunction with a first signal modulating scale element SME1; and a detector signal from a first set of second sensing elements SET1SEN2 operating in conjunction with a second signal modulating scale element SME2. The first scale element portions PRTSC1 and second scale element portions PRTSC2 of a first track portion TR1 and a second track portion TR2 are arcuate and parallel to each other (e.g., form concentric arcs), where the second track portion TR2 is closer to a pivot portion PPN than the first track portion TR1. The first signal modulating scale element SME1 is arranged along the first scale element portion PRTSC1 according to a first signal modulating element angular space step θ WSME1 and the second signal modulating scale element SME2 is arranged along the second scale element portion PRTSC2 according to a second signal modulating element angular space step θ WSME1 different from the first signal modulating element angular space step θ WSME2 . Box 1030 includes determining the relative position between the detector part 167 and the scale part 170 at least in part based on the detector signal input from the detector part 167.
[0129] With respect to the operation in box 1030 for determining the relative position between the detector part (167) and the scale part (170) at least in part based on the detector signal from the detector part, various processing and / or signal combination techniques can be used (e.g., as will be understood by those skilled in the art and at least in part according to the teachings in the incorporated references). Briefly, in various implementations, two drive operations can be utilized to generate and process the signal from the detector part. In various implementations, the two drive operations can be performed simultaneously or at different timings.
[0130] More specifically, as part of a first driving operation, a first field generation element portion PRTFGE1 can be driven (e.g., using a corresponding drive signal from signal processing configuration 166). When driving the first field generation element portion PRTFGE1, corresponding signals (e.g., signals SIG1A and SIG1B) of a first sensing element SEN1 of a first sensing element portion PRTSEN1 from a detector portion can be read (e.g., received, processed, etc.). As part of a second driving operation, a second field generation element portion PRTFGE2 can be driven (e.g., using a corresponding drive signal from signal processing configuration 166). When driving the second field generation element portion PRTFGE2, corresponding signals (e.g., signals SIG2A and SIG2B) of a second sensing element SEN2 of a second sensing element portion PRTSEN2 from the detector portion can be read (e.g., received, processed, etc.). Detector signals (i.e., from the detector portion) generated during the first driving operation and the second driving operation can be used to determine a relative position (e.g., an absolute position between the detector portion and a scale portion). In various implementations, the detector signals can include four signals (e.g., SIG1A, SIG1B, SIG2A, SIG2B), and the four signals (such as signals SIG1A and SIG1B of the first driving operation and signals SIG2A and SIG2B of the second driving operation) can be used to determine the relative position.
[0131] As used herein, the term "nominally" encompasses variations in which one or more parameters fall within an acceptable tolerance range. As an example, in one implementation, terms such as "nominally" can correspond to a minimum variation from a specified value (e.g., a variation such as less than 5% or less than 2% or less than 1%, such as according to an acceptable tolerance, etc.).
[0132] It should be understood that the principles disclosed and claimed herein can be readily and desirably combined with various features disclosed in the incorporated references. The various implementations described above can be combined to provide additional implementations. All U.S. patents and U.S. patent applications cited in this specification are incorporated herein by reference in their entirety. If desired, aspects of the implementations can be modified to incorporate the concepts of the various patents and applications to provide yet further implementations. These and other changes can be made to the implementations in light of the above detailed description. Generally, in the appended claims, the terms used should not be construed as limiting the claims to the specific implementations disclosed in the specification and claims, but should be construed to include all possible implementations and the full scope of equivalents to such claims.
Claims
1. A measuring instrument, comprising: a movable portion configured to rotate in an arcuate motion about a pivot portion, the movable portion including a movable encoder portion, wherein a maximum range of motion of the arcuate motion of the movable encoder portion is less than 360 degrees; and An electronic position encoder configured to measure an absolute relative position between a detector portion and a scale portion, wherein the movable encoder portion comprises one of the detector portion or the scale portion, the electronic position encoder comprising: The scale portion extends along a scale direction, and the scale portion includes: a first scaling element portion including a first signal modulating scaling element; and a second scaling element portion including a second signal modulating scaling element; and a detector portion configured to be proximate to the scale portion, wherein the arcuate motion of the movable encoder portion causes relative movement between the detector portion and the scale portion, the detector portion comprising: a field generating portion configured to generate a varying magnetic flux in response to a drive signal; and The sensing part comprises: a first sensing element portion comprising a first set of first sensing elements and arranged in a first track portion together with the first scale element portion; and a second sensing element portion including a first set of second sensing elements and arranged in a second track portion together with the second scale element portion; in: The first and second scale element portions of the first and second track portions are arcuate and parallel to each other, wherein the second track portion is closer to the pivot portion than the first track portion; and The first signal modulation scaling element modulates the angular space step length θ of the first signal modulation element. WSME1 The second signal modulation scaling element is arranged along the first scaling element portion, and the second signal modulation scaling element is arranged according to an angular space step size θ different from the first signal modulation element WSME1 The second signal modulation element angular space step length θ WSME2 And it is arranged along the second scale element portion.
2. The measuring instrument according to claim 1 further comprises a signal processing configuration, which is operably connected to the detector part to provide the drive signal and is configured to determine the absolute relative position between the detector part and the scale part based at least in part on a detector signal input from the detector part, wherein the detector signal includes a detector signal from the first group of first sensing elements and a detector signal from the first group of second sensing elements.
3. The measuring instrument according to claim 1, wherein the field generating portion comprises: a first field generating element portion disposed in the first track portion and configured to operate in conjunction with a first signal modulating scale element of the first scale element portion and the first sensing element of the first sensing element portion; as well as A second field generating element portion is disposed in the second track portion and is configured to operate in conjunction with a second signal modulating scale element of the second scale element portion and the second sensing element of the second sensing element portion.
4. A measuring instrument according to claim 1, wherein the first scale element portion is arranged with its center line located at a first radius RD1 from the pivot portion, and the second scale element portion is arranged with its center line located at a second radius RD2 from the pivot portion, wherein the first radius RD1 is greater than the second radius RD2.
5. The measuring instrument of claim 1 , wherein the first scale element portion and the second scale element portion define a corresponding absolute angular range θ ABS .
6. The measuring instrument according to claim 5, wherein the ratio of the angular space step length of the signal modulation element θ WSME2 / WSME1 can be expressed according to at least one of the following equations: (nm / (n-1)); (nm / (n+1)); ((nm+1) / n); ((nm-1) / n); Wherein n and m are positive integers.
7. The measuring instrument according to claim 6, wherein m is a positive integer of at least 2.
8. The measuring instrument according to claim 5, wherein the absolute angle range θ ABS Equal to nθ WSME1 or nθ WSME2 One of, wherein n is a positive integer, and the absolute angle range θ ABS Less than 360 degrees.
9. A measuring instrument according to claim 1, wherein the first scale element portion has an arc length ARC1 and is arranged at a first radius RD1 from the pivot portion, and the second scale element portion has an arc length ARC2 and is arranged at a second radius RD2 from the pivot portion, wherein ARC2 / ARC1=RD2 / RD1.
10. The measuring instrument according to claim 1, wherein θ WSME2 Greater than θ WSME1 .
11. The measuring instrument according to claim 1, wherein: Operation of the first track portion includes the first set of first sensing elements providing a detector signal responsive to a localized effect on a varying magnetic flux provided by a first signal modulating scaling element of the first scaling element portion; and Operation of the second track portion includes the first set of second sensing elements providing detector signals responsive to localized effects on a changing magnetic flux provided by a second signal modulating scaling element of the second scaling element portion.
12. The measuring instrument according to claim 1, wherein: The first sensing element portion further includes one or more additional groups of first sensing elements, wherein each additional group of first sensing elements has a spatial phase offset relative to the first group of first sensing elements; and The second sensing element portion further includes one or more additional groups of second sensing elements, wherein each additional group of second sensing elements has a spatial phase offset relative to the first group of second sensing elements.
13. The measurement instrument of claim 1, wherein the first signal modulating scale element and the second signal modulating scale element comprise conductive plates and the first sensing element and the second sensing element comprise conductive loops.
14. The measuring instrument according to claim 1, wherein the field generating portion comprises: a first field generating element portion arranged in the first track portion and configured to operate in conjunction with the first sensing element portion and with a first signal modulating scaling element of the first scaling element portion, the first field generating element portion comprising: a first field generating element first half loop having an inner region configured to be aligned with a first half pattern portion of said first scale element portion; and a first field generating element second half loop having an inner region configured to be aligned with the second half pattern portion of the first scale element portion, wherein the first field generating element first half loop and the first field generating element second half loop are configured to cause current to flow in opposite directions around the respective loops; and a second field generating element portion arranged in the second track portion and configured to operate in conjunction with the second sensing element portion and with a second signal modulating scaling element of the second scaling element portion, the second field generating element portion comprising: a second field generating element first half loop having an inner region configured to be aligned with the first half pattern portion of the second scale element portion; and A second field generating element second half loop having an inner region configured to be aligned with the second half pattern portion of the second scale element portion, wherein the second field generating element first half loop and the second field generating element second half loop are configured to cause current to flow in opposite directions around the respective loops.
15. A method for operating a measuring instrument, The measuring instrument comprises: a movable portion that rotates in an arcuate motion about a pivot portion, the movable portion including a movable encoder portion, wherein a maximum range of motion of the arcuate motion of the movable encoder portion is less than 360 degrees; An electronic position encoder configured to measure an absolute relative position between a detector portion and a scale portion, wherein the movable encoder portion of the movable portion comprises one of the detector portion or the scale portion, the electronic position encoder comprising: The scale portion extends along a scale direction, and the scale portion includes: a first scaling element portion including a first signal modulating scaling element; and a second scaling element portion including a second signal modulating scaling element; and a detector portion configured to be proximate to the scale portion, wherein the arcuate motion of the movable encoder portion causes relative movement between the detector portion and the scale portion, the detector portion comprising: a field generating portion configured to generate a varying magnetic flux in response to a drive signal; and The sensing part comprises: a first sensing element portion comprising a first set of first sensing elements and arranged in a first track portion together with the first scale element portion; and a second sensing element portion including a first set of second sensing elements and arranged in a second track portion together with the second scale element portion; The method comprises: providing a drive signal to cause the field generating portion to generate a varying magnetic flux; and receiving a detector signal from the detector portion, the detector signal comprising: a detector signal from said first set of first sensing elements operating in conjunction with a first signal modulation scale element; and detector signals from said first set of second sensing elements operating in conjunction with a second signal modulating scaling element, in: The first and second scale element portions of the first and second track portions are arcuate and parallel to each other, wherein the second track portion is closer to the pivot portion than the first track portion; and The first signal modulation scaling element modulates the angular space step length θ of the first signal modulation element. WSME1 The second signal modulation scaling element is arranged along the first scaling element portion, and the second signal modulation scaling element is arranged according to an angular space step size θ different from the first signal modulation element WSME1 The second signal modulation element angular space step length θ WSME2 And it is arranged along the second scale element portion.
16. The method of claim 15, further comprising determining a relative position between the detector portion and the scale portion based at least in part on the detector signal input from the detector portion.
17. The method of claim 15, wherein: The operation of the first set of first sensing elements in combination with the first signal modulating scale element comprises: the first set of first sensing elements providing a detector signal responsive to a localized effect on a varying magnetic flux provided by the first signal modulating scale element of the first scale element portion; and The operation of the first set of second sensing elements in combination with the second signal modulating scale element includes the first set of second sensing elements providing a detector signal responsive to a local effect on a changing magnetic flux provided by the second signal modulating scale element part of the second scale element.
18. The method of claim 15, wherein θ WSME2 Greater than θ WSME1 .
19. The method of claim 15, wherein: The first sensing element portion further includes one or more additional groups of first sensing elements, wherein each additional group of first sensing elements has a spatial phase offset relative to the first group of first sensing elements; and The second sensing element portion further includes one or more additional groups of second sensing elements, wherein each additional group of second sensing elements has a spatial phase offset relative to the first group of second sensing elements.
20. An electronic position encoder configured to measure the absolute relative position between a detector portion and a scale portion and for use in a measuring instrument including a movable portion configured to rotate in an arcuate motion, the electronic position encoder comprising: The scale portion extends along a scale direction, and the scale portion includes: a first scaling element portion including a first signal modulating scaling element; and a second scaling element portion including a second signal modulating scaling element; and a detector portion, which is arranged to be close to the scale portion, wherein the arcuate movement of the movable portion causes a relative movement between the detector portion and the scale portion, wherein the maximum movement range of the arcuate movement is less than 360 degrees, the detector portion comprising: a field generating portion configured to generate a varying magnetic flux in response to a drive signal; and The sensing part comprises: a first sensing element portion comprising a first set of first sensing elements and arranged in a first track portion together with the first scale element portion; and a second sensing element portion including a first set of second sensing elements and arranged in a second track portion together with the second scale element portion; in: The first and second scale element portions of the first and second track portions are arcuate and parallel to each other, wherein the second track portion is closer to the pivot portion than the first track portion; and The first signal modulation scaling element modulates the angular space step length θ of the first signal modulation element. WSME1 The second signal modulation scaling element is arranged along the first scaling element portion, and the second signal modulation scaling element is arranged according to an angular space step size θ different from the first signal modulation element WSME1 The second signal modulation element angular space step length θ WSME2 And it is arranged along the second scale element portion.
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