Device and method for detecting laser output power

Abstract

The invention belongs to the technical field of laser equipment, and particularly relates to a laser output power detection device and method.The detection device is arranged on the light emitting side of a laser and comprises at least two optical elements, and each optical element is provided with a photoelectric probe matched with the optical element; measuring and calculating a range zero value and a range foot value of the photoelectric probe, and driving the optical element to switch between a first preset angle and a second preset angle according to an actual measurement value of the photoelectric probe so as to guide at least one part of laser to the next optical element or the photoelectric probe matched with the optical element. An optical signal is converted into an electric signal through the photoelectric probe, the electric signal is converted into power data to be output after being processed, and gradient measurement is performed, so that the detection process of the laser output power is rapid, stable and rapid.

Description

Technical Field

[0001] The present invention belongs to the technical field of laser devices, and particularly relates to a device and method for detecting the laser output power. Background Art

[0002] During the production process of lasers, it is necessary to detect and calibrate the output power of the lasers. The conventional method is to use a power meter to detect the output power of the laser and use the detected data to calibrate the laser.

[0003] The current laser power meter includes a laser probe. The laser probe is an absorber coated with a thermoelectric material. The thermoelectric material absorbs most of the light energy and converts it into heat. Since the laser probe generates a temperature change to form an electric current, the electric current is converted into a voltage signal through a thin-film ring resistor and transmitted out, thereby completing the detection of the laser power. However, since the laser energy is converted into heat during the detection process, it is necessary to cool down the power meter through a water cooling mechanism during the detection process. It is found in use that during the operation of the water cooling machine, it will cause fluctuations in the data of the power meter, thereby affecting the power detection result. Therefore, it is necessary to wait until the water cooling machine completes the cooling and stops working before the detection data of the power meter is stable.

[0004] It can be seen that the current process for detecting the laser output power is complex, unstable, and time-consuming. Summary of the Invention

[0005] In order to solve the above technical problems, the present invention discloses a device for detecting the laser output power, which converts an optical signal into an electrical signal through an optoelectronic probe. The electrical signal is processed and then converted into power data for output, and gradient measurement is performed, so that the detection process of the laser output power is fast, stable, and efficient. The present invention also discloses a method for detecting the laser output power.

[0006] The specific technical solution of the present invention is as follows: A device for detecting the laser output power is arranged on the light-emitting side of the laser and includes at least two optical elements, and each optical element is provided with an optoelectronic probe cooperating therewith; Wherein, the zero value and full value of the range of the optoelectronic probe are measured, and according to the actual measurement value of the optoelectronic probe, the optical element is driven to switch between a first preset angle and a second preset angle, so as to guide at least a part of the laser to the next optical element or the optoelectronic probe cooperating therewith.

[0007] Preferably, when the optical element is at the second preset angle, the optical element guides the laser to the photoelectric probe cooperating with it. If the measured value of the photoelectric probe is between the zero value and the full scale value of the range, the detection of the laser output power is completed. If the measured value of the photoelectric probe is greater than the full scale value of the range of the photoelectric probe it cooperates with, the optical element switches to the first preset angle and guides the laser to the next optical element.

[0008] Preferably, when measuring the full scale value of the photoelectric probe, the optical element is driven to rotate between the first measurement angle and the second measurement angle, and the maximum value obtained by the photoelectric probe between the first measurement angle and the second measurement angle is the full scale value of the range.

[0009] Preferably, the optical element is rotated between the first measurement angle and the second measurement angle, and the rotation angle corresponding to the position where the photoelectric probe obtains the full scale value of the range is configured as the second preset angle; the angle corresponding to the first measurement angle is configured as the zero value angle.

[0010] Preferably, the optical element is driven to rotate by a stepper motor, and the number of pulse outputs of the stepper motor, the microstep resolution, and the signal direction when the optical element rotates from the zero value angle to the second preset angle are obtained. According to the current angle of the optical element, the number of zeroing pulses required for the optical element to return to zero is calculated, and the optical element is rotated according to the number of zeroing pulses so that the optical element returns to zero before detecting the laser output power.

[0011] Preferably, after rotating the optical element according to the number of zeroing pulses, the size between the adjusted angle after rotation and the zero value angle is judged. If the adjusted angle > zero value angle, the optical element is driven to rotate in a direction away from the second preset angle according to the microstep resolution. If the adjusted angle = zero value angle, stop rotating when in place. If the adjusted angle < zero value angle, the optical element is driven to rotate in a direction close to the second preset angle according to the microstep resolution.

[0012] Preferably, between any adjacent optical elements, when one optical element guides the laser to the next optical element, there is an angle difference between the adjacent optical elements. According to the angle difference, the step angle of the stepper motor, and the microstep resolution, the number of pulses required for the optical element to switch from the second preset angle to the first preset angle is obtained to guide the laser to the next optical element.

[0013] Preferably, the optical element is a reflector or a beam splitter. When the optical element is a beam splitter, the photoelectric probe obtains the actual power of the laser output based on the measured value and the loss coefficient.

[0014] Preferably, the optical elements include a first element and a first probe, a second element and a second probe, a third element and a third probe... an Nth element and an Nth probe that are paired with each other, where N is a positive integer; The first element, the second element... the Nth element guide the laser to form a detection optical path, and the Nth probe is used to detect the laser output power at the end of the detection optical path.

[0015] A method for detecting the laser output power includes: Configuring a plurality of optical elements, and using the relative rotation of the optical elements to make the laser have multiple emission paths to form a multi-stage detection optical path. Each stage of the detection optical path has a corresponding optoelectronic probe, and the measurement range of the optoelectronic probe increases gradually; Obtain the laser output power detected by the previous stage of the detection optical path. If the measured value of the optoelectronic probe of this stage of the detection optical path is greater than its full-scale value of the range, switch to the next stage of the detection optical path until the measured value of the optoelectronic probe of the Nth stage of the detection optical path is between the zero value and the full-scale value of its range.

[0016] Compared with the prior art, the present invention realizes the data detection of the laser output power by a solution different from the prior art. The device is simple and reliable, and can quickly obtain the detection result; since the measurement range of the optoelectronic probe corresponding to each stage of the detection optical path increases gradually, hierarchical measurement is realized to correspond to the detection of lasers with different powers, and a higher-precision detection result is obtained therefrom. Description of the Drawings

[0017] Figure 1 It is a schematic diagram of the 1st-stage detection optical path in the embodiment of the present invention; Figure 2 It is a schematic diagram of the 2nd-stage detection optical path in the embodiment of the present invention; Figure 3 It is a schematic diagram of the 3rd-stage detection optical path in the embodiment of the present invention; Figure 4 It is a hardware block diagram of the detection device in the embodiment of the present invention; Figure 5 It is a schematic diagram of the calibration process of the zero value and the full-scale value of the range of the first element in the embodiment of the present invention; Figure 6 It is a schematic diagram of the zeroing process of the first element in the embodiment of the present invention; Figure 7 It is a flowchart of the automatic calibration of the 1st-stage detection optical path in the embodiment of the present invention; Figure 8 It is a flowchart of the automatic calibration of the 2nd-stage detection optical path in the embodiment of the present invention; Figure 9 It is a flowchart of the detection of the 1st-stage detection optical path in the embodiment of the present invention; Figure 10It is the detection flow chart of the 2-level detection optical path in the embodiment of the present invention; Figure 11 It is the schematic flow chart of detection using the three-level detection optical path in the embodiment of the present invention. Specific implementation manners

[0018] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with specific implementation manners.

[0019] As Figures 1 to 3 shown, a detection device for laser output power is provided on the light-emitting side of a laser, and includes at least two optical elements, and each optical element is provided with a photoelectric probe cooperating therewith; the zero value and full value of the range of the photoelectric probe are measured, and according to the actual measurement value of the photoelectric probe, the optical element is driven to switch between a first preset angle and a second preset angle, so as to guide at least a part of the laser to the next optical element or the photoelectric probe cooperating therewith. Specifically, the optical elements include element one and probe one, element two and probe two, element three and probe three... element N and probe N that are paired with each other, where N is a positive integer; element one, element two... element N guide the laser to form a detection optical path, and the laser output power is detected by using probe N at the end of the detection optical path.

[0020] Further, in this embodiment, when the optical element is at the second preset angle, the optical element guides the laser to the photoelectric probe cooperating therewith. Therefore, it can be known that when the optical element is at the first preset angle, the optical element guides the laser to the next optical element.

[0021] Specifically, when the laser is emitted by the laser, the laser is guided by element one to probe one, so that probe one detects the actual measurement value. Since the photoelectric probe is applicable to power measurement of one range, if the actual measurement value obtained by probe one is greater than the maximum value of the range, it indicates that probe one cannot complete the laser detection. At this time, element one switches from the second preset angle to the first preset angle, so that the laser enters the detection port of probe two through the guidance of element one and element two, that is, the power of the laser is detected by probe two. Generally speaking, for probe one, probe two... probe N, the ranges increase in sequence to improve the detection efficiency. Thus, when the corresponding photoelectric probe cannot meet the detection requirements, the corresponding optical element is driven to further guide the laser to the next photoelectric probe for detection until the measured value of the detection is within the range. In other words, if the measured value of the photoelectric probe is between the zero value and full value of the range, the detection of the laser output power is completed. If the measured value of the photoelectric probe is greater than the full value of the range of the photoelectric probe cooperating therewith, the optical element switches to the first preset angle to guide the laser to the next optical element.

[0022] Since laser is light with high energy density and has a certain degree of destructiveness, and the photosensitive intensity of the optoelectronic probe has certain limitations, it is necessary to split the laser beam to ensure that the laser entering the optoelectronic probe is within its range. Therefore, in this embodiment, the optical element is a beam splitter. Thus, for the final result, the optoelectronic probe is also required to obtain the actual power of the laser output based on the measured value and the loss coefficient of the beam splitter. Of course, in some embodiments, the optical element may also be a mirror.

[0023] Before measuring the output power of the laser, it is also necessary to calibrate the position of the range of the optoelectronic probe to improve the detection efficiency. As Figure 5 shown, specifically, when measuring the full-scale value of the range of the optoelectronic probe, the optical element is driven to rotate between a first measurement angle and a second measurement angle, and the maximum value obtained by the optoelectronic probe between the first measurement angle and the second measurement angle is the full-scale value. In this embodiment, in order to cover the entire rotation process of the optical element, the laser is emitted horizontally by the laser. Taking element one and probe one as an example, let element one be initially in a vertical position, or a position approaching vertical, and record the corresponding angle as the first measurement angle. Then rotate element one until it is horizontal, or a position approaching horizontal, and record the corresponding angle as the second measurement angle. Since the range of the first measurement angle and the second measurement angle covers the range of probe one, probe one will necessarily be able to detect the maximum value presented by the laser during the rotation of element one, and thus be able to determine the maximum measured value of probe one, and thereby obtain the full-scale value. During the process of probe one obtaining the full-scale value, since element one is constantly rotating, probe one will necessarily have a zero-scale reading before obtaining the full-scale value. Thus, during the rotation of element one, the zero-scale value and the full-scale value can be obtained, and the angles corresponding to these two values can be located, thereby determining an optimal rotation scheme. In other words, the optical element is rotated between the first measurement angle and the second measurement angle, and the rotation angle corresponding to the position where the optoelectronic probe obtains the full-scale value is configured as the second preset angle; the angle corresponding to the first measurement angle is configured as the zero-value angle. Further, the optical element is driven to rotate by a stepper motor, and the number of pulse outputs of the stepper motor when the optical element rotates from the zero-value angle to the second preset angle, as well as the microstep resolution and signal direction of the stepper motor, are obtained. When probe one obtains a zero reading, if the stepper motor outputs one more pulse and makes probe one obtain a non-zero reading, the rotation angle corresponding to the previous pulse is the angle corresponding to the zero-scale value, that is, the first measurement angle.

[0024] As Figure 6As shown, in this embodiment, when detecting the laser output power, the position of the optical element needs to be reset to zero, that is, according to the current angle of the optical element, calculate the number of reset pulses required for the optical element to be reset to zero, and rotate the optical element according to the number of reset pulses so that the optical element is reset to zero before detecting the laser output power. Since the position determination of the full-scale zero value and the full-scale value has been carried out before the detection, therefore, after the first element is reset to zero, during the detection of the laser output power, the stepping motor can be directly driven to switch the first element to the second preset angle. At this time, there is a maximum value in the detection of the first probe. Read the value of the laser and compare this reading with the maximum value of the range of the first probe. If the actual reading is less than the maximum value of the range, the measurement is completed. During the reset process, after rotating the optical element according to the number of reset pulses, it is also necessary to judge the size between the adjusted angle after rotation and the zero value angle (the first measurement angle) to ensure accurate reset: (1) If the adjusted angle > zero value angle, drive the optical element to rotate in the direction away from the second preset angle according to the subdivision; (2) If the adjusted angle = zero value angle, stop rotating when in place; (3) If the adjusted angle < zero value angle, drive the optical element to rotate in the direction close to the second preset angle according to the subdivision.

[0025] In this embodiment, the angular position of the first element is determined according to the position of the absolute encoder of the stepping motor. In the determination of the full-scale value position before the detection, the position of the first element corresponding to the position of the absolute encoder can be used to obtain the position A1 of the zero value angle of the first element and the position A2 of the second preset angle of the first element. At this time, the direction control signal A3 of the stepping motor can also be known; at the same time, it can also be known that during the process of the first element rotating from the zero value position of the range to the full-scale value, the number of pulses A4 output by the stepping motor. Of course, according to the parameters of the stepping motor, its subdivision A5 can also be directly obtained. Thus, before resetting, the position X1 of the current absolute encoder can be obtained, and then the number of pulses Y1 required for the current first element to be reset to zero can be obtained: (Formula 1) According to Formula 1, that is, the stepping motor outputs Y1 pulses and the direction signal A3 is inverted, then the reset operation of the first element can be realized. At this time, the position X2 of the absolute encoder after the reset operation can be obtained. By comparing the position X2 of the absolute encoder at this time with the position A1 of the zero value angle, it can be judged whether the reset is completed.

[0026] According to (1), if X2 > A1, the stepping motor outputs another A5 pulses and the direction signal A3 is inverted. At this time, the position X21 of the absolute encoder is obtained. Compare X21 and A1 again. If X21 > A1, repeat the above operation until X2N = A1.

[0027] According to (3), if X2 < A1, the stepper motor outputs another A5 pulses, and the direction signal A3 is positive. At this time, the position X21 of the absolute encoder is obtained, and X21 and A1 are compared again. If X21 < A1, the above operation is repeated until X2N = A1.

[0028] It can be known that in the optical elements, each element is zeroed in this way.

[0029] As Figure 7 shown, when the range of the first probe meets the actual measurement value range, it is necessary to implement automatic calibration for the first element. In this process, the following steps are included: S101. Zero the first element, and clear the number of pulses of the stepper motor corresponding to the first element; S102. Turn on the laser and output it at a fixed power; S103. The stepper motor outputs A5 pulses each time in the positive direction signal A3 in stages, adding A5 pulses each time until the number of pulses output by the stepper motor is A4, that is, the first element rotates from the position of the zero value of the range to the full value position of the range. At this time, the position of its corresponding absolute encoder is L1; S104. Read the value of the first probe, that is, the actual measurement value of the current laser.

[0030] It can be seen from this that as Figure 9 shown, according to the intensity of the laser, when the cooperation between the first element and the first probe is satisfied, it has a process of automatic control. That is, after the first element is zeroed, the stepper motor outputs A5 pulses each time in the positive direction signal A3 in stages, adding A5 pulses each time until the position of the absolute encoder is L1, that is, the control of the laser emission path is completed, so that the first probe can receive the laser.

[0031] If during the actual measurement by the first probe, the actual measurement value it detects is greater than or equal to the maximum value of its range, it is also necessary to further detect using the second element. Therefore, it is necessary to drive the second element to achieve automatic calibration at this time.

[0032] As Figure 8 shown, further, when guiding the laser to the second element, it is necessary to switch the first element from its second preset angle to its first preset angle. Among any adjacent optical elements, when one optical element guides the laser to the next optical element, there is an angle difference between the adjacent optical elements. According to the angle difference, as well as the step angle and microstep division of the stepper motor, the number of pulses required for the optical element to switch from the second preset angle to the first preset angle is obtained to guide the laser to the next optical element.

[0033] Specifically, when the laser is guided from Component 1 to Component 2, there is an angular difference α between Component 1 and Component 2. According to the parameters of the stepper motor, its step angle is β, then the number of pulses N1 for the stepper motor to drive Component 1 to compensate for this angular difference can be calculated: (Formula 2) Let the position of the zero value angle obtained by Component 2 be B1, and the position of its second preset angle be B2, and the direction control signal of its stepper motor be B3; during the process of Component 2 rotating from the position of its range zero value to the position of its full range value, the number of pulses output by its stepper motor is B4, and the microstep division of this stepper motor is B5.

[0034] Therefore, the following steps are included in this process: S201. Component 1 and Component 2 are reset to zero, and the number of stepper motor pulses is cleared. S202. Based on Formula 2, control the stepper motor of Component 1 to output M3 pulses, and the direction signal is A3, so that Component 1 switches from the second preset angle to the first preset angle. At this time, the position L2 of the absolute encoder of the stepper motor corresponding to Component 1 can be known. S203. Turn on the laser and output it at a fixed power. S204. The stepper motor of Component 2 outputs B5 pulses each time in stages with the positive direction signal B3, and adds B5 pulses each time until the number of pulses output by the stepper motor is B4, that is, Component 2 rotates from the position of its range zero value to the position of its full range value. At this time, the position of its corresponding absolute encoder is L3. S205. Read the value of Probe 2, that is, the actual measurement value of the current laser.

[0035] Among them, when Component 1 rotates from the position of its range zero value to the position of its full range value, the number of pulses A4 output by the stepper motor is recorded as M1. Then the number of pulses M3 required to control Component 1 to switch from the second preset angle to the first preset angle is: (Formula 3) Based on Formula 3 and the direction signal A3 of the stepper motor of Component 1, Component 1 can be switched from the second preset angle to the first preset angle to guide the laser to Component 2.

[0036] It can be seen from this that as Figure 10As shown, according to the intensity of the laser, when the cooperation of Component 1, Component 2, and Probe 2 is satisfied, it has an automatic control process. That is, after Component 1 and Component 2 are reset, the stepping motor of Component 1 outputs A5 pulses each time in stages with the positive direction signal A3, and adds A5 pulses each time until the position of the absolute encoder of the stepping motor corresponding to Component 1 is L2, that is, the control of the laser output path at Component 1 is completed. Then, the stepping motor of Component 2 outputs B5 pulses each time in stages with the positive direction signal B3, and adds B5 pulses each time until the position of the absolute encoder of the stepping motor of Component 2 is L3, that is, the control of the laser output path at Component 2 is completed, so that Probe 2 can receive the laser.

[0037] Similarly, it can be known that when using Probe 3... Probe N, automatic calibration can be achieved through the above method to complete the measurement of the laser output power.

[0038] Based on the above embodiments, this embodiment also discloses a method for detecting the laser output power, including: Configure multiple optical elements, and use the relative rotation of the optical elements to make the laser have multiple output paths to form a multi-stage detection optical path. Each stage of the detection optical path has a corresponding optoelectronic probe, and the measurement range of the optoelectronic probe increases gradually; Obtain the laser output power detected by the previous stage of the detection optical path. If the measured value of the optoelectronic probe of this stage of the detection optical path is greater than its full-scale range value, switch to the next stage of the detection optical path until the measured value of the optoelectronic probe of the Nth stage of the detection optical path is between its zero-scale value and full-scale range value.

[0039] Specifically, as Figure 4 shown, the detection device in this embodiment includes a power laser control unit, an MCU, a stepping motor drive unit, an encoder data reading unit, and an optoelectronic conversion acquisition unit. The power laser control unit is used to control the start and stop of the laser and output a 0-10V analog signal to control the size of the laser output power; the MCU is used for data processing and outputting control signals; the stepping motor drive unit is matched with the corresponding component and is used to control the corresponding rotation direction and feed amount according to the control signal output by the MCU; the encoder data reading unit is used to read the position data of the stepping motor; the optoelectronic conversion acquisition unit is used to convert and amplify the current signal of the optoelectronic probe into a voltage signal for the MCU to collect.

[0040] Thus, as Figure 11 shown, a method for detecting the laser output power specifically includes the following steps: S1. Control to form a first-stage detection optical path; S2. Control the laser to emit light; S3. Read the data F1 of Probe 1; S4. If F1 is less than the maximum value of the measuring range of probe 1, obtain the actual measured value; if F1 is greater than or equal to the maximum value of the measuring range of probe 1, stop the laser from emitting light and switch to the second-level detection optical path. S5. Control the formation of the second-level detection optical path. S6. Control the laser to emit light. S7. Read the data F2 of probe 2. S8. If F2 is less than the maximum value of the measuring range of probe 2, obtain the actual measured value; if F2 is greater than or equal to the maximum value of the measuring range of probe 2, stop the laser from emitting light and switch to the third-level detection optical path. …… Sm. If Fn is less than the maximum value of the measuring range of probe N, obtain the actual measured value; if Fn is greater than or equal to the maximum value of the measuring range of probe N, stop the laser from emitting light and prompt that the laser power exceeds the maximum range of this detection device.

[0041] Thus, assuming that the detection device in this embodiment can form a three-level detection optical path, and the detection device includes component 1, component 2, component 3, probe 1, probe 2, and probe 3, then component 1, component 2, and component 3 control their rotation angles through corresponding stepping motors. When component 1, component 2, and component 3 are at different angles respectively, a first-level detection optical path, a second-level detection optical path, and a third-level detection optical path can be formed respectively. Finally, the laser enters the corresponding probe 1 or probe 2 or probe 3 through these three paths, so as to realize the detection of the output power of the laser. In general operations, the first-level detection optical path can be used for measuring the laser power within 1KW, the second-level detection optical path can be used for measuring the laser power within 5KW, and the third-level detection optical path can be used for measuring the laser power within 10KW. When the actual power of the laser whose output power needs to be detected exceeds 10KW, the system prompts an alarm.

[0042] The above is only the preferred embodiment of the present invention. It should be noted that the above preferred embodiment should not be regarded as a limitation of the present invention. The protection scope of the present invention should be subject to the scope defined by the claims. For those of ordinary skill in the art in this technical field, without departing from the spirit and scope of the present invention, several improvements and retouches can also be made, and these improvements and retouches should also be regarded as the protection scope of the present invention.

Claims

1. A laser output power detection device, characterized in that: It is arranged at the light output side of the laser and includes at least two optical elements, each of which has a photoelectric probe matched therewith; Among them, the zero value and full value of the range of the photoelectric probe are calculated, and according to the actual measurement value of the photoelectric probe, the optical element is driven to switch between the first preset angle and the second preset angle to guide at least a part of the laser to the next optical element or the photoelectric probe cooperating therewith.

2. A laser output power detection device as claimed in claim 1, characterized in that: When the optical element is at the second preset angle, the optical element guides the laser to the photoelectric probe that cooperates with it. If the measurement value of the photoelectric probe is between the zero value and the full value of the range, the laser output power detection is completed. If the measurement value of the photoelectric probe is greater than the full value of the range of the photoelectric probe that cooperates with it, the optical element switches to the first preset angle and guides the laser to the next optical element.

3. A laser output power detection device as claimed in claim 1, characterized in that: When measuring the full range value of the photoelectric probe, the optical element is driven to rotate between the first measuring angle and the second measuring angle, and the maximum value obtained by the photoelectric probe between the first measuring angle and the second measuring angle is the full range value.

4. A laser output power detection device as claimed in claim 3, characterized in that: The optical element is rotated between a first measuring angle and a second measuring angle so that the rotation angle corresponding to the position where the photoelectric probe obtains a full range value is configured as a second preset angle; the angle corresponding to the first measuring angle is configured as a zero value angle.

5. A laser output power detection device as claimed in claim 4, characterized in that: The optical element is driven to rotate by a stepper motor, and the number of pulse outputs of the stepper motor when the optical element rotates from a zero angle to a second preset angle, as well as the number of subdivisions of the stepper motor and the signal direction are obtained; According to the current angle of the optical element, the number of zeroing pulses required for the optical element to return to zero is calculated, and the optical element is rotated according to the number of zeroing pulses so that the optical element returns to zero before detecting the laser output power.

6. A laser output power detection device as claimed in claim 5, characterized in that: After rotating the optical element according to the number of zeroing pulses, the size between the adjusted angle after rotation and the zero value angle is determined; If the adjustment angle is greater than the zero value angle, the optical element is driven to rotate in a direction away from the second preset angle according to the subdivision number; If the adjustment angle = zero value angle, the machine will stop when it reaches the position; If the adjustment angle is less than the zero-value angle, the optical element is driven to rotate in a direction close to the second preset angle according to the subdivision number.

7. A laser output power detection device as claimed in claim 5, characterized in that: Among any adjacent optical elements, when one optical element guides the laser to the next optical element, there is an angle difference between the adjacent optical elements; According to the angle difference, the step angle and the subdivision number of the stepping motor, the number of pulses required for the optical element to switch from the second preset angle to the first preset angle is obtained to guide the laser to the next optical element.

8. A laser output power detection device as claimed in claim 1, characterized in that: The optical element is a reflector or a beam splitter; When the optical element is a beam splitter, the photoelectric sensor obtains the actual power of the laser output based on the measured value and the loss coefficient.

9. A laser output power detection device as claimed in claim 1, characterized in that: The optical element includes a paired element 1 and probe 1, element 2 and probe 2, element 3 and probe 3... element N and probe N, where N is a positive integer; The element 1, element 2 ... element N guide the laser to form a detection light path, and the probe N is used to detect the laser output power at the end of the detection light path.

10. A method for detecting laser output power, characterized in that: include: Multiple optical elements are configured, and the relative rotation of the optical elements is utilized to make the laser have multiple emission paths to form a multi-level detection optical path. Each level of the detection optical path has a corresponding photoelectric probe, and the measurement range of the photoelectric probe increases step by step. The laser output power detected by the previous detection optical path is obtained. If the measurement value of the photoelectric probe of the detection optical path of this level is greater than its full range value, switch to the next detection optical path until the measurement value of the photoelectric probe of the N-level detection optical path is between its range zero value and full range value.

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