Electric heating system and horizontal gallium nitride reaction furnace

Abstract

The invention relates to the technical field of industrial electric heating, in particular to an electric heating system and a horizontal gallium nitride reacting furnace. In the electric heating system, an electric heating wire is electrically connected with a heating power supply module through a connecting mechanism. When the moving part is located at the first sliding stop point, the moving part is located at the end, close to the installation inner cavity, of the installation groove, the pushing arm abuts against the sliding block so that the sliding block can be pushed towards the power supply end, the power supply end is clamped by the sliding block, and the conductive block is electrically connected with the conductive layer. When the moving part is located at the second sliding stop point, the moving part is located at the end, away from the mounting inner cavity, of the mounting groove, the pushing arm is separated from the sliding block, and the control rope is tightened, so that the sliding block is pulled by the control rope towards the side away from the power supply end, and the sliding block is separated from the power supply end. According to the utility model, the electric heating wire and the power supply end can be conveniently disassembled and reassembled, and the convenience of inspection and maintenance is greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of industrial electric heating, and more particularly, to an electric heating system and a horizontal gallium nitride reaction furnace. Background Art

[0002] For electric heating devices, especially those with relatively high power, it is necessary to regularly check the power supply end of the heating wire of the electric heating device to ensure normal power supply to the heating wire and meet the requirements of safe operation at the same time. In the prior art, the connection method between the heating wire and the power supply end is not convenient for disassembly, so it is not convenient to check the connection stability and power supply safety between the heating wire and the power supply end.

[0003] In view of this, the present application is specifically proposed. Summary of the Invention

[0004] The first object of the present invention is to provide an electric heating system, which can conveniently realize the disassembly and reinstallation between the heating wire and the power supply end, greatly improving the convenience of inspection and maintenance. At the same time, it can realize the stable connection between the heating wire and the power supply end and reduce the mechanical damage to the power supply end during the connection process.

[0005] The second object of the present invention is to provide a horizontal gallium nitride reaction furnace, which can conveniently realize the disassembly and reinstallation between the heating wire and the power supply end, greatly improving the convenience of inspection and maintenance, contributing to ensuring the stability and safety of the gallium nitride production process, effectively reducing the probability of accidental interruption of production caused by the failure of the electric heating module, and reducing the accidental losses in production.

[0006] The embodiments of the present invention are implemented as follows: An electric heating system includes: a heating chamber, a heating wire, a heating power supply module, a connection mechanism, and a controller. The heating wire is arranged in the heating chamber, and the heating wire is electrically connected to the heating power supply module through the connection mechanism. The heating power supply module is electrically connected to the controller by an electrical signal.

[0007] The connection mechanism includes: a reference tube, a rotating sleeve, and a positioning tube.

[0008] An installation through-hole is formed in the side wall of the heating chamber. The positioning tube is accommodated in the installation through-hole. The positioning tube is made of a conductive material, and the end of the heating wire is fitted inside the positioning tube and electrically connected to the positioning tube.

[0009] The reference tube extends from the outside of the heating chamber into the installation through-hole, and the reference tube is connected to the positioning tube. The inner side wall of the reference tube has a conductive layer, and the conductive layer is electrically connected to the positioning tube.

[0010] The reference tube has an installation inner cavity and an installation groove which are arranged at intervals along its axial direction. The installation inner cavity is located on the side of the installation groove away from the heating chamber. A first through hole is provided on the groove wall of the installation groove close to the installation inner cavity. The first through hole extends along the axial direction of the reference tube and communicates the installation groove and the installation inner cavity.

[0011] On the inner wall of the installation inner cavity close to the central axis of the reference tube, a fitting notch is provided. The fitting notch penetrates through to the lumen of the reference tube. A slider is fitted in the fitting notch. Along the radial direction of the reference tube, the slider is slidably fitted in the fitting notch. On the side of the slider close to the central axis of the reference tube, there is a conductive block. The slider is provided with a second through hole arranged along the axial direction of the reference tube.

[0012] A moving part is accommodated in the installation groove. Along the axial direction of the reference tube, the moving part is slidably fitted in the installation groove. Along the circumferential direction of the reference tube, the moving part is fixedly fitted in the installation groove. The moving part is connected with a pushing arm. The pushing arm is slidably fitted in the first through hole. The end of the pushing arm is wedge-shaped.

[0013] The moving part is also connected with a control rope. The control rope passes through the second through hole and is fixedly connected to the inner wall of the installation inner cavity on the side away from the installation groove.

[0014] A rotating sleeve is sleeved on the end of the reference tube away from the heating chamber and is rotatably fitted on the reference tube. The rotating sleeve has an internal thread, and the moving part has an external thread. The rotating sleeve is in threaded fit with the moving part.

[0015] The end of the reference tube away from the heating chamber is for the power supply end of the heating and power supply module to be inserted.

[0016] The moving part has a first sliding stop point and a second sliding stop point. When the moving part is at the first sliding stop point, the moving part is at the end of the installation groove close to the installation inner cavity. The pushing arm abuts against the slider to push the slider towards the power supply end, so that the slider clamps the power supply end, and the conductive block is electrically connected to the conductive layer. When the moving part is at the second sliding stop point, the moving part is at the end of the installation groove away from the installation inner cavity. The pushing arm is separated from the slider, and the control rope is tightened, so that the slider is pulled by the control rope towards the side away from the power supply end, so that the slider is separated from the power supply end.

[0017] Further, the side of the slider away from the power supply end is arc-shaped.

[0018] Further, along the circumferential direction of the reference tube, the installation groove continuously extends into a ring shape, and the moving part is ring-shaped.

[0019] Further, the reference tube is made of an insulating and heat-insulating material, and the conductive layer is made of a conductive and heat-insulating material.

[0020] Further, the reference tube is filled with heat-insulating blocks, and the heat-insulating blocks are located at the end of the reference tube close to the positioning tube.

[0021] Further, the positioning tube is made of a material that is electrically and thermally conductive.

[0022] The side wall of the heating chamber includes a heat insulation layer and a protective layer, and the protective layer is located outside the heat insulation layer. The positioning tube extends to the protective layer.

[0023] The protective layer has a heat dissipation inner cavity, the heat dissipation inner cavity is cylindrical, and the heat dissipation inner cavity is coaxially arranged with the installation through hole.

[0024] A heat conduction sleeve is arranged in the heat dissipation inner cavity, the heat conduction sleeve is rotationally matched with the positioning tube, and the inner side wall of the heat conduction sleeve is attached to the outer side wall of the positioning tube. The heat conduction sleeve is fixedly connected with a fan blade, and the fan blade is made of a heat conductive material.

[0025] The heat dissipation inner cavity is provided with an air inlet and an air outlet, the air inlet and the air outlet are arranged side by side and at intervals, and both the air inlet and the air outlet are arranged tangentially to the heat dissipation inner cavity. The air inlet is configured with a air supply component so that when the air supply component supplies air to the heat dissipation inner cavity from the air inlet, the heat conduction sleeve can rotate relative to the positioning tube.

[0026] Further, the moving part is provided with a third through hole arranged along the axial direction of the reference tube, a control rod is fitted in the third through hole, the control rod is slidably fitted in the third through hole with damping, and the control rope is connected to the control rod.

[0027] One end wall of the installation groove far from the installation inner cavity is provided with a fourth through hole and a fifth through hole, the fourth through hole and the fifth through hole are arranged in parallel at intervals, and both of them penetrate through the end wall of the reference tube.

[0028] One side of the moving part far from the installation inner cavity is fixedly connected with a push rod, and the push rod extends along the axial direction of the reference tube.

[0029] One end of the heat conduction sleeve close to the reference tube is coaxially fixedly connected with a fitting ring, a limiting ring is arranged in the fitting ring, the limiting ring is coaxially fixedly connected with the fitting ring, and the limiting ring is arranged at an interval from the heat conduction sleeve.

[0030] The positioning tube is also sleeved with a control ring, the control ring is fitted on the positioning tube, and the control rod extends to the end face of the reference tube through the fourth through hole. The end of the control rod has a telescopic joint, and in the natural state, the telescopic joint is received in the control rod, and the telescopic joint is fixedly connected with the control ring. Among them, the elastic force of the telescopic joint is greater than the sliding damping force of the control rod in the third through hole.

[0031] The limiting ring has internal threads.

[0032] The control ring is provided with a radial blind hole, a fitting block is slidably fitted in the radial blind hole, and a second elastic member is abutted between the fitting block and the bottom of the radial blind hole. The outer end of the fitting block is provided with an inclined groove for adapting to the internal threads of the limiting ring.

[0033] The mating block is provided with a mating through hole which is arranged along the axial direction of the control ring. A wedge block is arranged on the hole wall of the mating through hole close to the positioning tube.

[0034] The control ring is also provided with an axial through hole which is communicated with the radial blind hole so as to expose the mating through hole.

[0035] Wherein, the distance between the limit ring and the heat conducting sleeve matches the axial length of the control ring.

[0036] When the moving part is at the first sliding stop point, the control ring is in contact with the end face of the reference tube, the control ring is in contact with the end face of the control rod, and the mating block is in contact with one end of the limit ring close to the reference tube. During operation, the air supply component supplies air to the heat dissipation inner cavity from the air inlet, and the heat conducting sleeve rotates relative to the positioning tube, thereby driving the control ring to the side away from the reference tube. When the mating block moves to the side of the limit ring away from the reference tube, the control rope is tightened and the telescopic joint is pulled out.

[0037] During the process of the moving part moving towards the second sliding stop point, when the pushing arm is separated from the slider, the telescopic joint pulls the control rod towards the control ring, and the conductive block is separated from the power supply end.

[0038] When the moving part moves to the second sliding stop point, the push rod is inserted into the axial through hole through the fifth through hole and further inserted into the mating through hole. The push rod pushes the mating block into the radial blind hole through the wedge block, so that the mating block is separated from the limit ring, and the control ring is pulled towards the control rod by the telescopic joint.

[0039] Furthermore, a sealing ring is arranged in the rotating sleeve. The sealing ring is rotationally matched with the rotating sleeve and is adapted to the insulating layer of the power supply end.

[0040] A horizontal gallium nitride reactor, the electric heating module of the horizontal gallium nitride reactor includes the above-mentioned electric heating system.

[0041] The beneficial effects of the technical solution of the embodiment of the present invention include: When the electric heating system provided by the embodiment of the present invention is in use, the moving part can be adjusted between the first sliding stop point and the second sliding stop point only by rotating the rotating sleeve, so as to realize the locking and unlocking of the power supply end. In this way, the disassembly and assembly of the power supply end can be conveniently realized, and the maintenance efficiency is greatly improved.

[0042] Using a plurality of sliders to lock the power supply end not only improves the locking strength, but also can avoid the deformation of the power supply end and reduce the mechanical damage to the power supply end.

[0043] Generally speaking, the electric heating system provided by the embodiments of the present invention can conveniently realize the disassembly and reinstallation between the heating wire and the power supply end, greatly improving the convenience of inspection and maintenance. At the same time, it can achieve a stable connection between the heating wire and the power supply end and reduce the mechanical damage to the power supply end during the connection process.

[0044] The horizontal gallium nitride reaction furnace provided by the embodiments of the present invention can conveniently realize the disassembly and reinstallation between the heating wire and the power supply end, greatly improving the convenience of inspection and maintenance, contributing to ensuring the stability and safety of the gallium nitride production process, effectively reducing the probability of accidental interruption of production due to the failure of the electric heating module, and reducing the accidental losses in production. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0046] Figure 1 Schematic diagram of the overall composition of the electric heating system provided by the embodiments of the present invention; Figure 2 Schematic diagram of the state at the reference tube (when the moving part is at the first sliding stop point); Figure 3 Schematic diagram of the cooperation between the slider and the power supply end; Figure 4 Schematic diagram of the structure of the heat dissipation cavity; Figure 5 Schematic diagram of the structure of the connection between the reference tube and the positioning tube; Figure 6 Schematic diagram of the external structure of the control ring; Figure 7 Schematic diagram of the internal structure of the control ring; Figure 8 Schematic diagram of the internal structure of the control ring from another perspective; Figure 9 Schematic diagram of the state at the reference tube (when the mating block moves to the side of the limit ring away from the reference tube); Figure 10 Schematic diagram of the state at the reference tube (when the moving part is separated from the slider); Figure 11 Schematic diagram when the push rod triggers the mating block; Figure 12 Schematic diagram of the state at the reference tube (when the moving part is at the second sliding stop point).

[0047] Description of the reference numerals in the drawings: Mounting through-hole 110; heating wire 120; heat insulation layer 130; protective layer 140; heat dissipation inner cavity 141; air inlet 142; air outlet 143; heat conduction sleeve 150; fitting ring 151; limiting ring 152; fan blade 153; reference tube 200; conductive layer 210; mounting inner cavity 220; slider 222; conductive block 223; mounting groove 230; moving part 240; pushing arm 241; control rope 250; heat insulation block 260; rotating sleeve 300; sealing ring 310; positioning tube 400; first through-hole 510; second through-hole 520; third through-hole 530; fourth through-hole 540; fifth through-hole 550; control rod 610; telescopic joint 611; push rod 620; control ring 630; radial blind hole 631; fitting block 632; second elastic member 633; fitting through-hole 634; wedge-shaped block 635; axial through-hole 636; power supply end 700; insulating layer 710. Detailed implementation manners

[0048] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated in the drawings here can be arranged and designed in various different configurations.

[0049] Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed present invention, but merely represents the selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0050] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0051] The terms "first", "second", "third", "fourth", "fifth", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0052] In addition, the term "parallel" does not mean that the components are required to be absolutely parallel, but can be slightly inclined.

[0053] In the description of the present invention, it should also be noted that unless otherwise clearly specified and defined, the terms "arrangement", "installation", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] In order to overcome the deficiencies in the prior art, please refer to Figures 1 - 3 , this embodiment provides an electric heating system, which includes: a heating chamber, a heating wire 120, a heating power supply module (not shown in the figure), a connection mechanism, and a controller (not shown in the figure).

[0055] The heating wire 120 is arranged in the heating chamber for heating the heating chamber. It can be understood that during actual use, it can be flexibly selected whether to encapsulate the heating wire 120 according to actual needs.

[0056] Whether the heating wire 120 is encapsulated or not, the end of the heating wire 120 is electrically connected to the heating power supply module through the connection mechanism. The heating power supply module is electrically connected to the controller, so that the controller can adjust the working temperature of the heating wire 120 by regulating the power supply power of the heating power supply module.

[0057] The connection mechanism includes: a reference tube 200, a rotating sleeve 300, and a positioning tube 400.

[0058] An installation through-hole 110 is formed in the side wall of the heating chamber, and the installation through-hole 110 penetrates the side wall of the heating chamber. The positioning tube 400 is received in the installation through-hole 110, and the positioning tube 400 extends from the inner end of the installation through-hole 110 towards its outer end. The outer tube wall of the positioning tube 400 is in contact with and fixedly connected to the hole wall of the installation through-hole 110. There is a gap between the outer end wall of the positioning tube 400 and the outer end of the installation through-hole 110.

[0059] The positioning tube 400 is made of a conductive material, and the end of the heating wire 120 is fitted inside the positioning tube 400 and electrically connected to the positioning tube 400.

[0060] The reference tube 200 extends from the outside of the heating chamber into the installation through-hole 110. The end wall of the reference tube 200 is in contact with and fixedly connected to the end wall of the positioning tube 400, and the reference tube 200 is fixedly connected to the side wall of the heating chamber.

[0061] The inner side wall of the reference tube 200 has a conductive layer 210, and the conductive layer 210 extends from one end of the reference tube 200 close to the positioning tube 400 towards the other end. The conductive layer 210 is electrically connected to the positioning tube 400.

[0062] The reference tube 200 has a mounting inner cavity 220 and a mounting groove 230 that are axially spaced along it. The mounting inner cavity 220 is located on the side of the mounting groove 230 away from the heating chamber. Both the mounting inner cavity 220 and the mounting groove 230 extend along the axial direction of the reference tube 200.

[0063] On the side wall of the mounting groove 230 close to the mounting inner cavity 220, a first through hole 510 is provided. The first through hole 510 extends along the axial direction of the reference tube 200 and communicates the mounting groove 230 and the mounting inner cavity 220.

[0064] On the inner wall of the mounting inner cavity 220 on the side close to the central axis of the reference tube 200, a fitting notch is provided. The fitting notch penetrates through to the lumen of the reference tube 200. The fitting notch is arranged radially along the reference tube 200, and a slider 222 is fitted in the fitting notch.

[0065] Along the radial direction of the reference tube 200, the slider 222 is slidably fitted in the fitting notch. On the side of the slider 222 close to the central axis of the reference tube 200, there is a conductive block 223. The slider 222 is provided with a second through hole 520 arranged along the axial direction of the reference tube 200.

[0066] A moving member 240 is disposed in the mounting groove 230. Along the axial direction of the reference tube 200, the moving member 240 is slidably fitted in the mounting groove 230. Along the circumferential direction of the reference tube 200, the moving member 240 is fixedly fitted in the mounting groove 230.

[0067] The moving member 240 is connected with a pushing arm 241. The pushing arm 241 is slidably fitted in the first through hole 510, and the end of the pushing arm 241 is wedge-shaped.

[0068] The moving member 240 is further connected with a control rope 250. The control rope 250 passes through the second through hole 520 and is fixedly connected to the inner wall of the mounting inner cavity 220 on the side away from the mounting groove 230. The control rope 250 is made of a low-elastic material.

[0069] A rotating sleeve 300 is sleeved on the end of the reference tube 200 away from the heating chamber and is rotatably fitted with the reference tube 200. Along the axial direction of the reference tube 200, the rotating sleeve 300 is fixedly fitted with the reference tube 200.

[0070] The rotating sleeve 300 has an internal thread, and the internal thread of the rotating sleeve 300 is located at the mounting groove 230. The moving member 240 has an external thread, and the rotating sleeve 300 is in threaded fit with the moving member 240.

[0071] The conductive layer 210 of the reference tube 200 extends to the fitting notch.

[0072] The end of the reference tube 200 away from the heating chamber is for the power supply end 700 of the heating power supply module to be inserted.

[0073] The moving part 240 has a first sliding stop point and a second sliding stop point.

[0074] When the moving part 240 is at the first sliding stop point, the moving part 240 is located at one end of the installation groove 230 close to the installation inner cavity 220. The pushing arm 241 abuts against the slider 222. The pushing arm 241 uses the wedge-shaped structure at its end to push the slider 222 towards the power supply end 700, so that the slider 222 clamps the power supply end 700. In this state, the conductive block 223 is attached to and electrically connected to the conductive layer 210.

[0075] When the moving part 240 is at the second sliding stop point, the moving part 240 is located at one end of the installation groove 230 away from the installation inner cavity 220. The pushing arm 241 is separated from the slider 222, and the control rope 250 is straightened, so that the slider 222 is pulled by the control rope 250 towards the side away from the power supply end 700, so that the slider 222 is separated from the power supply end 700. In this state, there is a gap between the slider 222 and the inner wall of the installation inner cavity 220 on the side away from the central axis of the reference tube 200.

[0076] In this embodiment, along the circumferential direction of the reference tube 200, the installation groove 230 continuously extends into a ring shape, and the moving part 240 is also in a ring shape. The installation inner cavity 220 also continuously extends into a ring shape along the circumferential direction of the reference tube 200. A plurality of matching notches are formed in the installation inner cavity 220, and the plurality of matching notches are evenly spaced along the circumferential direction of the reference tube 200. Each matching notch is matched with a slider 222.

[0077] Through this design, only by rotating the rotating sleeve 300, the moving part 240 can be adjusted between the first sliding stop point and the second sliding stop point, so as to realize the locking and unlocking of the power supply end 700. In this way, the disassembly and assembly of the power supply end 700 can be conveniently realized, and the maintenance efficiency is greatly improved.

[0078] Using a plurality of sliders 222 to lock the power supply end 700 not only improves the locking strength, but also can prevent the power supply end 700 from deforming and reduce the mechanical damage to the power supply end 700.

[0079] Generally speaking, the electric heating system provided in this embodiment can conveniently realize the disassembly and reassembly between the heating wire 120 and the power supply end 700, greatly improving the convenience of inspection and maintenance. At the same time, it can realize the stable connection between the heating wire 120 and the power supply end 700, and can reduce the mechanical damage to the power supply end 700 during the connection process.

[0080] In this embodiment, the side of the slider 222 away from the power supply end 700 is arc-shaped. The arc-shaped structure design on the side of the slider 222 away from the power supply end 700 is matched with the wedge-shaped structure at the end of the pushing arm 241, so that the pushing arm 241 can drive the pushing arm 241 more smoothly.

[0081] The reference tube 200 is made of an insulating and heat-insulating material, and the conductive layer 210 is made of a conductive and heat-insulating material.

[0082] The reference tube 200 is filled with a heat-insulating block 260. The heat-insulating block 260 is located at one end of the reference tube 200 close to the positioning tube 400, and the heat-insulating block 260 is made of an insulating material.

[0083] Furthermore, the positioning tube 400 is made of a conductive and heat-conductive material.

[0084] The side wall of the heating chamber includes a heat-insulating layer 130 and a protective layer 140. The protective layer 140 is located outside the heat-insulating layer 130. The positioning tube 400 extends from the heat-insulating layer 130 to the protective layer 140.

[0085] Please refer to Figure 4 The protective layer 140 has a heat dissipation inner cavity 141. The heat dissipation inner cavity 141 is cylindrical, and the heat dissipation inner cavity 141 is coaxially arranged with the installation through hole 110, that is: both the positioning tube 400 and the reference tube 200 are coaxially arranged with the heat dissipation inner cavity 141.

[0086] A heat conduction sleeve 150 is arranged in the heat dissipation inner cavity 141. The heat conduction sleeve 150 is rotationally fitted to the positioning tube 400, and the inner side wall of the heat conduction sleeve 150 is attached to the outer side wall of the positioning tube 400. Optionally, a heat conduction lubricant is filled between the heat conduction sleeve 150 and the positioning tube 400, including but not limited to: heat conduction oil, grease.

[0087] The heat conduction sleeve 150 is fixedly connected with a fan blade 153, and the fan blade 153 is made of a heat conductive material.

[0088] The heat dissipation inner cavity 141 is provided with an air inlet 142 and an air outlet 143. The air inlet 142 and the air outlet 143 are arranged side by side and at intervals, and both the air inlet 142 and the air outlet 143 are arranged tangentially along the heat dissipation inner cavity 141. The air inlet 142 is configured with a air supply component (not shown in the figure), so that when the air supply component supplies air to the heat dissipation inner cavity 141 from the air inlet 142, the air flow can drive the heat conduction sleeve 150 to rotate relative to the positioning tube 400 through the fan blade 153.

[0089] Through this design, the temperature at the positioning tube 400 can be effectively controlled, so as to avoid the connection strength between the heating wire 120 and the positioning tube 400 being affected due to excessive temperature.

[0090] Furthermore, please refer to Figures 1 - 8 The moving part 240 is provided with a third through hole 530 arranged along the axial direction of the reference tube 200. A control rod 610 is fitted in the third through hole 530. The control rod 610 is slidably fitted in the third through hole 530 with damping, and the control rope 250 is connected to the control rod 610.

[0091] One end of the installation groove 230 away from the installation cavity 220 is provided with a fourth through hole 540 and a fifth through hole 550. The fourth through hole 540 and the fifth through hole 550 are arranged in parallel at intervals, and both penetrate to the end face of the reference tube 200.

[0092] One side of the moving part 240 away from the installation cavity 220 is fixedly connected with a push rod 620, and the push rod 620 extends along the axial direction of the reference tube 200.

[0093] One end of the heat conducting sleeve 150 close to the reference tube 200 is coaxially fixedly connected with a fitting ring 151. The inner diameter of the fitting ring 151 is larger than the inner diameter of the heat conducting sleeve 150. A limiting ring 152 is arranged inside the fitting ring 151. The limiting ring 152 is coaxially fixedly connected with the fitting ring 151. The limiting ring 152 is arranged at an interval from the heat conducting sleeve 150. The inner diameter of the limiting ring 152 is larger than the inner diameter of the heat conducting sleeve 150.

[0094] The positioning tube 400 is also sleeved with a control ring 630, and the control ring 630 is fitted to the positioning tube 400. Along the axial direction of the positioning tube 400, the control ring 630 is slidably fitted to the positioning tube 400. Along the circumferential direction of the positioning tube 400, the control ring 630 is fixedly fitted to the positioning tube 400.

[0095] The end of the control rod 610 is provided with a telescopic joint 611. The telescopic joint 611 is fitted with a first elastic member (not shown in the figure). In the natural state, the telescopic joint 611 is pulled by the first elastic member and is received in the control rod 610. The telescopic joint 611 is fixedly connected with the control ring 630. That is to say, in the natural state, the control ring 630 abuts against the end of the control rod 610.

[0096] Among them, the elastic force provided by the first elastic member to the telescopic joint 611 is greater than the sliding damping force received by the control rod 610 in the third through hole 530.

[0097] The limiting ring 152 has internal threads.

[0098] The control ring 630 is provided with a radial blind hole 631. A fitting block 632 is slidably fitted in the radial blind hole 631. A second elastic member 633 is abutted between the fitting block 632 and the bottom of the radial blind hole 631. The outer end of the fitting block 632 is provided with an inclined groove for adapting to the internal threads of the limiting ring 152. The inclined groove can be regarded as a part of the external threads adapted to the internal threads of the limiting ring 152. The fitting blocks 632 are arranged on both opposite sides of the control ring 630.

[0099] The fitting block 632 is provided with a fitting through hole 634. The fitting through hole 634 is arranged along the axial direction of the control ring 630. A wedge-shaped block 635 is arranged on the hole wall of the fitting through hole 634 close to the positioning tube 400.

[0100] The control ring 630 is also provided with an axial through hole 636 which communicates with the radial blind hole 631 so as to expose the mating through hole 634.

[0101] Wherein, the limiting ring 152 extends from the end of the mating ring 151 away from the heat conducting sleeve 150 towards the end close to the heat conducting sleeve 150, and there is a gap between the limiting ring 152 and the heat conducting sleeve 150, and the gap between the limiting ring 152 and the heat conducting sleeve 150 matches the axial length of the control ring 630.

[0102] When the moving part 240 is at the first sliding stop point, the control ring 630 is in contact with the end face of the reference tube 200, the control ring 630 is in contact with the end face of the control rod 610, and the mating block 632 is in contact with one end of the limiting ring 152 close to the reference tube 200, as Figure 2 shown. During operation, the air supply assembly supplies air from the air inlet 142 to the heat dissipation inner cavity 141, and the heat conducting sleeve 150 rotates relative to the positioning tube 400. After the heat conducting sleeve 150 rotates, the control ring 630 is driven towards the side away from the reference tube 200 through the thread until the mating block 632 moves to the side of the limiting ring 152 away from the reference tube 200. In this state, even if the heat conducting sleeve 150 continues to rotate, the control ring 630 will not move further. At this time, the control rope 250 is tightened. Since the slider 222 is still in contact with the power supply end 700, the control rope 250 cannot be fully straightened, and the telescopic joint 611 is partially pulled out from the control rod 610, as Figure 9 shown.

[0103] When the rotating sleeve 300 is rotated to unlock the power supply end 700, during the process of the moving part 240 moving towards the second sliding stop point, when the pushing arm 241 just separates from the slider 222, the telescopic joint 611 pulls the control rod 610 towards the control ring 630, thereby straightening the control rope 250, and the slider 222 is driven towards the side away from the power supply end 700, and the conductive block 223 separates from the power supply end 700, as Figure 10 shown. At this time, a part of the telescopic joint 611 is still outside the control rod 610.

[0104] When the moving part 240 moves to the second sliding stop point, the push rod 620 is inserted into the axial through hole 636 through the fifth through hole 550 and further inserted into the mating through hole 634. The push rod 620 pushes the mating block 632 into the radial blind hole 631 through the wedge-shaped block 635, so that the mating block 632 separates from the limiting ring 152, as Figure 11 and Figure 12 shown. At this time, the limiting ring 152 can no longer limit the mating block 632, and the control ring 630 is pulled towards the control rod 610 by the telescopic joint 611 so that the control ring 630 fits with the control rod 610 again.

[0105] When the rotating sleeve 300 is rotated to re-lock the power supply end 700, during the process of the moving part 240 moving towards the first sliding stop point, the moving part 240 drives the control rod 610 to move together, so that there is a surplus length of the control rope 250 on the side of the moving part 240 close to the slider 222 until the control ring 630 fits the reference tube 200 again. After the control ring 630 fits the reference tube 200, even if the moving part 240 continues to move, the control rod 610 can slide relative to the moving part 240 smoothly until the pushing arm 241 abuts the slider 222 against the power supply end 700 again (that is, until it moves to the first sliding stop point again).

[0106] Through the above design, it can be ensured that no excessive torque is required when locking the slider 222, which is convenient for quick tightening. On the other hand, after locking, it can ensure that the control rope 250 smoothly enters the tensioned state, so that when unlocking, it can ensure that the control rope 250 can smoothly drive the slider 222 to separate from the power supply end 700.

[0107] Optionally, a sealing ring 310 is arranged in the rotating sleeve 300. The sealing ring 310 is rotationally fitted to the rotating sleeve 300, and the sealing ring 310 is adapted to the insulating layer 710 of the power supply end 700.

[0108] This embodiment also provides a horizontal gallium nitride reactor, and the electric heating module of the horizontal gallium nitride reactor adopts the above-mentioned electric heating system.

[0109] In summary, the electric heating system provided by the embodiment of the present invention can conveniently realize the disassembly and reinstallation between the heating wire 120 and the power supply end 700, greatly improving the convenience of inspection and maintenance. At the same time, it can realize the stable connection between the heating wire 120 and the power supply end 700, and can reduce the mechanical damage to the power supply end 700 during the connection process.

[0110] The horizontal gallium nitride reactor provided by the embodiment of the present invention can conveniently realize the disassembly and reinstallation between the heating wire 120 and the power supply end 700, greatly improving the convenience of inspection and maintenance, contributing to ensuring the stability and safety of the gallium nitride production process, effectively reducing the probability of accidental interruption of production due to electric heating module failures, and reducing accidental losses in production.

[0111] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An electric heating system, characterized in that, Comprising: A heating chamber, heating wires, a heating power supply module, a connecting mechanism, and a controller; the heating wires are arranged in the heating chamber, and the heating wires are electrically connected to the heating power supply module through the connecting mechanism; The heating power supply module is electrically connected to the controller by an electrical signal; The connecting mechanism includes: a reference tube, a rotating sleeve, and a positioning tube; An installation through hole is provided on the side wall of the heating chamber; the positioning tube is accommodated in the installation through hole, the positioning tube is made of a conductive material, and the end of the heating wire is fitted inside the positioning tube and electrically connected to the positioning tube; The reference tube extends from the outside of the heating chamber into the installation through hole, and the reference tube is connected to the positioning tube; a conductive layer is provided on the inner side wall of the reference tube, and the conductive layer is electrically connected to the positioning tube; The reference tube has an installation inner cavity and an installation groove provided at intervals along its axial direction, the installation inner cavity is located on the side of the installation groove away from the heating chamber, and a first through hole is provided on the groove wall of the installation groove close to the installation inner cavity, and the first through hole extends along the axial direction of the reference tube and communicates the installation groove and the installation inner cavity; A mating notch is provided on the inner wall of the installation inner cavity close to the central axis of the reference tube, and the mating notch penetrates through the lumen of the reference tube, and a slider is fitted in the mating notch; along the radial direction of the reference tube, the slider is slidably fitted in the mating notch; a conductive block is provided on the side of the slider close to the central axis of the reference tube; a second through hole is provided in the slider along the axial direction of the reference tube; A moving member is accommodated in the installation groove; along the axial direction of the reference tube, the moving member is slidably fitted in the installation groove; along the circumferential direction of the reference tube, the moving member is fixedly fitted in the installation groove; the moving member is connected with a pushing arm, and the pushing arm is slidably fitted in the first through hole, and the end of the pushing arm is wedge-shaped; The moving member is further connected with a control rope, and the control rope passes through the second through hole and is fixedly connected to the inner wall of the installation inner cavity away from the installation groove; The rotating sleeve is sleeved on the end of the reference tube away from the heating chamber and is rotatably fitted on the reference tube, the rotating sleeve has an internal thread, the moving member has an external thread, and the rotating sleeve is in threaded fit with the moving member; The end of the reference tube away from the heating chamber is for the power supply end of the heating power supply module to be inserted; The moving member has a first sliding stop point and a second sliding stop point; when the moving member is at the first sliding stop point, the moving member is at the end of the installation groove close to the installation inner cavity, the pushing arm abuts against the slider to push the slider towards the power supply end, so that the slider clamps the power supply end, and the conductive block is electrically connected to the conductive layer; when the moving member is at the second sliding stop point, the moving member is at the end of the installation groove away from the installation inner cavity, the pushing arm is separated from the slider, and the control rope is tightened, so that the slider is pulled by the control rope towards the side away from the power supply end, so that the slider is separated from the power supply end.

2. The electric heating system according to claim 1, characterized in that, The side of the slider away from the power supply end is arc-shaped.

3. The electric heating system according to claim 1, characterized in that, Along the circumference of the reference tube, the installation groove continuously extends into a ring shape, and the moving member is ring-shaped.

4. The electric heating system according to claim 1, characterized in that, The reference tube is made of an insulating and heat-insulating material, and the conductive layer is made of a conductive and heat-insulating material.

5. The electric heating system according to claim 1, characterized in that, The reference tube is filled with heat-insulating blocks, and the heat-insulating blocks are located at one end of the reference tube close to the positioning tube.

6. The electric heating system according to claim 1, characterized in that, The positioning tube is made of a conductive and heat-conductive material; The side wall of the heating chamber includes a heat-insulating layer and a protective layer, and the protective layer is located outside the heat-insulating layer; the positioning tube extends to the protective layer; The protective layer has a heat-dissipating inner cavity, the heat-dissipating inner cavity is cylindrical, and the heat-dissipating inner cavity is coaxially arranged with the installation through hole; A heat-conductive sleeve is arranged in the heat-dissipating inner cavity, the heat-conductive sleeve is rotationally fitted with the positioning tube, and the inner side wall of the heat-conductive sleeve is attached to the outer side wall of the positioning tube; a fan blade is fixedly connected to the heat-conductive sleeve, and the fan blade is made of a heat-conductive material; An air inlet and an air outlet are formed in the heat-dissipating inner cavity, the air inlet and the air outlet are arranged side by side and at intervals, and both the air inlet and the air outlet are arranged tangentially along the heat-dissipating inner cavity; the air inlet is configured with a air supply component so that when the air supply component supplies air into the heat-dissipating inner cavity from the air inlet, the heat-conductive sleeve can rotate relative to the positioning tube.

7. The electric heating system according to claim 6, characterized in that, The moving member is provided with a third through hole arranged along the axial direction of the reference tube, a control rod is fitted in the third through hole, the control rod is slidably fitted in the third through hole with damping, and the control rope is connected to the control rod; At one end of the groove wall of the installation groove away from the installation inner cavity, a fourth through hole and a fifth through hole are formed, the fourth through hole and the fifth through hole are arranged in parallel and at intervals, and both of them penetrate through the end wall of the reference tube; One side of the moving member away from the installation inner cavity is fixedly connected with a push rod, and the push rod extends along the axial direction of the reference tube; A matching ring is coaxially and fixedly connected to one end of the heat-conductive sleeve close to the reference tube, a limiting ring is arranged in the matching ring, the limiting ring is coaxially and fixedly connected with the matching ring, and the limiting ring is arranged at an interval from the heat-conductive sleeve; The positioning tube is also sleeved with a control ring, the control ring is fitted with the positioning tube, and the control rod extends to the end face of the reference tube through the fourth through hole; the end of the control rod has a telescopic joint, and in the natural state, the telescopic joint is received in the control rod, and the telescopic joint is fixedly connected with the control ring; wherein, the elastic force of the telescopic joint is greater than the sliding damping force of the control rod in the third through hole; The limiting ring has an internal thread; The control ring is provided with a radial blind hole, a matching block is slidably fitted in the radial blind hole, and a second elastic member is abutted between the matching block and the bottom of the radial blind hole; an inclined groove for adapting to the internal thread of the limiting ring is arranged at the outer end of the matching block; The matching block is provided with a matching through hole, the matching through hole is arranged along the axial direction of the control ring, and a wedge block is arranged on the hole wall of the matching through hole close to the positioning tube; The control ring is also provided with an axial through hole, and the axial through hole communicates with the radial blind hole to expose the mating through hole; Wherein, the distance between the limiting ring and the heat conducting sleeve matches the axial length of the control ring; When the moving member is at the first sliding stop point, the control ring is in contact with the end face of the reference tube, the control ring is in contact with the end face of the control rod, and the mating block is in contact with one end of the limiting ring close to the reference tube; during operation, the air supply component supplies air from the air inlet to the heat dissipation inner cavity, and the heat conducting sleeve rotates relative to the positioning tube, thereby driving the control ring to the side away from the reference tube; when the mating block moves to the side of the limiting ring away from the reference tube, the control rope is tightened, and the telescopic joint is pulled out; During the process of the moving member moving towards the second sliding stop point, when the pushing arm separates from the slider, the telescopic joint pulls the control rod towards the control ring, and the conductive block separates from the power supply end; When the moving member moves to the second sliding stop point, the push rod is inserted into the axial through hole through the fifth through hole and further inserted into the mating through hole, and the push rod pushes the mating block into the radial blind hole through the wedge-shaped block, so that the mating block separates from the limiting ring, and the control ring is pulled towards the control rod by the telescopic joint.

8. The electric heating system according to claim 1, wherein, A sealing ring is arranged in the rotating sleeve, the sealing ring is rotationally matched with the rotating sleeve, and the sealing ring is adapted to the insulating layer of the power supply end.

9. A horizontal gallium nitride reactor, wherein, The electric heating module of the horizontal gallium nitride reactor comprises the electric heating system according to any one of claims 1 to 8.

Images