Aluminum-based silicon carbide optical mirror surface processing equipment and method

Abstract

The invention relates to the technical field of optical mirror surfaces, and discloses aluminum-based silicon carbide optical mirror surface machining equipment and method.The aluminum-based silicon carbide optical mirror surface machining equipment comprises an equipment frame, an equipment bin arranged on the inner side of the equipment frame, a workbench arranged above the equipment bin, an operation table arranged above the workbench and a placement unit; and the polishing assembly is arranged above the placement unit. According to the aluminum-based silicon carbide optical mirror surface machining equipment, a plurality of polishing positions are arranged, and the rotating disc drives the optical mirror surface to rotate in the anticlockwise direction, so that the optical mirror surface is ground by different polishing discs at different stages, switching is convenient, the state is stable during switching, frequent assembly and disassembly are not needed, and the machining efficiency of the optical mirror surface is improved; and meanwhile, the equipment can polish the optical mirror surfaces at different stages at the same time, shutdown is not needed when the optical mirror surfaces are assembled and disassembled, and therefore the machining efficiency is further improved.

Description

Technical Field

[0001] The present invention relates to the technical field of optical mirrors, and particularly to an aluminum matrix silicon carbide optical mirror processing device and method. Background Art

[0002] With the rapid development of space optical technology, higher requirements are put forward for space optical systems, and the requirements for reflectors and optical elements are also getting higher and higher. In order to ensure the structural stability of the reflector during operation and processing, and considering the requirements of the space optical system for the quality of the reflector, the reflector material should meet the following physical index requirements: high elastic modulus, low density, low thermal expansion coefficient, no thermal stress, high thermal conductivity, and isotropy of thermal and mechanical properties.

[0003] Silicon carbide material, with a series of excellent physical properties such as a relatively high elastic modulus, moderate density, small thermal expansion coefficient, high thermal conductivity, heat shock resistance, high specific stiffness, and high dimensional stability, has become a widely used reflector material. Aluminum matrix silicon carbide is formed by combining silicon carbide particles and aluminum powder particles through hot pressing. Aluminum matrix silicon carbide integrates the advantages of silicon carbide, and its properties such as thermal conductivity and thermal expansion coefficient can be adjusted by changing its composition. The thermal conductivity is (180 W / mK - 240 W / mK) and the thermal expansion coefficient is (6.5 - 9.5×10-6 / K); thus, it has become a particularly promising reflector material.

[0004] A patent with the publication number CN116652754A discloses an optical mirror processing device; it includes a base, a clamping member, a placement cushion block, a polishing assembly, and a waste chip cleaning unit. The waste chip cleaning unit includes a dust suction fan, a filter box, an annular mounting frame, an annular pipeline, a plurality of dust suction hoods, and a connecting pipeline. The top of the annular mounting frame is provided with an annular pipeline, and the bottom of the annular pipeline is provided with a plurality of dust suction hoods in a through manner. During the process of polishing the mirror surface of the lens using a polishing disc, the dust suction fan is started, so that through the cooperation of the plurality of dust suction hoods, the annular pipeline, and the connecting pipeline, the waste chips generated during the polishing process are transported into the filter box, and the waste chips are blocked by a filter screen, so that the waste chips are collected in the filter box. With the above structure, by cleaning the waste chips during the polishing process, it is avoided that the waste chips escape into the external environment and cause harm to the health of the staff.

[0005] The prior art has the following defects:

[0006] Optical mirrors have extremely high requirements for their surface roughness. Therefore, when polishing, it is often necessary to use polishing materials of various different materials and mesh numbers. As the surface roughness of the optical mirror decreases, more suitable polishing materials are continuously replaced. Such frequent replacement of polishing materials or transfer of the optical mirror will affect the processing efficiency of the optical mirror. At the same time, too many replacements or transfers will increase the probability of the optical mirror being damaged by collision, which is not conducive to controlling the product defect rate.

[0007] Since aluminum matrix silicon carbide is a reinforced composite material, although it has characteristics such as dynamically adjustable hardness, thermal conductivity, and expansion coefficient, due to its being composed of two materials with different hardnesses, soft and hard, there are certain difficulties in its surface processing; when polishing this soft-hard composite material, due to the different surface hardnesses, the final polished product will form an uneven surface interface. The softer aluminum matrix material is polished into the pits earlier, while the silicon carbide hard phase has higher protrusions, which has a greater impact on the optical quality. Summary of the Invention

[0008] In view of the problem that the existing technology has frequent replacement of polishing materials or transfer of the optical mirror, which will affect the processing efficiency of the optical mirror, an aluminum matrix silicon carbide optical mirror processing device and method are proposed.

[0009] This application provides an aluminum matrix silicon carbide optical mirror processing device and method, and its purpose is to facilitate the polishing of the optical mirror.

[0010] The technical solution of the present invention is: an aluminum matrix silicon carbide optical mirror processing device for polishing an optical mirror, including a device frame, a device chamber arranged inside the device frame, a workbench arranged above the device chamber, an operating table and a placement unit arranged above the workbench, a polishing assembly arranged above the placement unit. The placement unit includes a rotating base arranged on the top of the workbench, a rotating disk arranged on the top of the rotating base, an adjusting motor and a rotating motor arranged inside the rotating base, an installation groove arranged on the top of the rotating disk, a through hole arranged on the bottom of the rotating disk, a fixing component arranged inside the installation groove, a rotating connection component arranged at the bottom of the fixing component, and an adjusting connection component arranged at the bottom of the rotating disk;

[0011] The upper surface of the rotating disk is flush with the upper surface of the operating table. The optical mirror is placed in the fixing component. The rotating motors are arranged in a circular array with the adjusting motor as the reference. The installation grooves are arranged in a circular array with the central axis of the rotating disk as the reference. The rotating connection component is connected between the rotating motor and the fixing component, and the adjusting connection component is connected between the adjusting motor and the rotating disk.

[0012] Further, the polishing assembly includes a suspension seat disposed on the equipment frame, a suspension rod disposed at the bottom of the suspension seat, a connecting member disposed at the bottom of the suspension rod, a mounting plate disposed below the connecting member, a threaded sleeve disposed below the mounting plate, a grinding motor disposed on the top of the mounting plate, an extension rod disposed at the bottom of the grinding motor, and a polishing disc disposed at the bottom of the extension rod;

[0013] The connecting member penetrates through the mounting plate to the lower side of the mounting plate. The threaded sleeve is threadedly connected to the bottom of the connecting member. The polishing disc is attached to the upper surface of the optical mirror. The mounting plate is located above the rotating disc. The grinding motors are distributed in an annular array with the suspension rod as the reference.

[0014] Further, a notch is provided on one side of the mounting plate close to the operation table, and a rotating motor is not provided on the side close to the operation table.

[0015] Further, the polishing disc and the optical mirror are arranged in a staggered manner, and the center point of the optical mirror is located on the edge line of the polishing disc.

[0016] Further, the rotational connection assembly includes an extension tube disposed at the bottom of the through hole, a sliding rod disposed at the bottom of the extension tube, a connection groove disposed at the top of the sliding rod, a fixed slot disposed at the bottom of the sliding rod, a connection spring disposed inside the connection groove, a storage groove disposed inside the fixed slot, a through hole disposed on the surface of the sliding rod, a push rod disposed inside the through hole, a clamping plate disposed inside the storage groove, a push ring sleeve disposed outside the sliding rod, and an annular plate disposed outside the push ring sleeve;

[0017] The upper end of the connection spring is fixedly connected to the fixing component. The power output end of the rotating motor is inserted into the fixed slot. The clamping plates are distributed in a circumferential array. The clamping plates clamp the outside of the power output end of the rotating motor. One end of the push rod is threadedly connected to the clamping plate, and the other end abuts against the inner wall of the push ring sleeve. The inner wall of the push ring sleeve has three sections, which are the upper vertical section, the outwardly expanding inclined section, and the lower vertical section from top to bottom.

[0018] Further, tooth teeth that mesh with each other are provided at the joint between the clamping plate and the power output end of the rotating motor, and the tooth teeth run vertically up and down.

[0019] Further, the adjustment connection assembly includes a card slot disposed at the bottom of the rotating disc, a card block disposed at the top of the power output end of the rotating motor, an outer ring disposed below the rotating disc, a pushing arc plate disposed outside the outer ring, a connecting rod disposed outside the card block, a docking hole disposed outside the outer ring, and a fixed joint disposed at the end of the connecting rod away from the card block;

[0020] The clamping block is composed of a cylindrical block and two sector blocks, and the two sector blocks are symmetrically distributed with the central axis of the cylindrical block as the reference. The clamping groove has the same shape as the clamping block, and the opening angle of the sector block of the clamping block is smaller than that of the sector block of the clamping groove. The connecting rod passes through the docking hole, and the connecting rod and the fixed joint are respectively distributed on both sides of the docking hole. The pushing arc plate is designed to be inclined, and the upper surface of the docking hole fits against the lower surface of the annular plate.

[0021] Further, the fixing assembly includes a mounting base disposed inside the mounting groove, a reinforcing ring disposed inside the mounting base, a fixing ring disposed outside the reinforcing ring, a displacement threaded hole disposed at the top of the mounting base, and a displacement member disposed at the top of the reinforcing ring;

[0022] The top of the reinforcing ring extends in two directions, inside and outside, covering the tops of the mounting base and the fixing ring respectively. The outer wall of the fixing ring is designed to be inclined, and the inclined surface inclines towards the optical mirror surface. The inside of the reinforcing ring is designed to be inclined, and the inclined surface here fits against the outer wall of the fixing ring. The extension pipe and the connecting spring are both fixedly connected to the mounting base.

[0023] A method for processing an aluminum-based silicon carbide optical mirror includes the following steps:

[0024] Step 1: Coarsely grind, finely grind, and finish polish the aluminum-based silicon carbide substrate using high-hardness diamond abrasives, and sequentially change the particle size of the diamond abrasives until the surface roughness is reduced to within 6 μm;

[0025] Step 2: Perform a first coating treatment on the sample polished for the first time. Use an aluminum and silicon mixture coating as the bottom layer. The coating air pressure is within 2E-4 Pa, the coating temperature is 25°C - 100°C, and the aluminum and silicon targets are co-deposited. The target power is 5 kw - 20 kw, the bias voltage is -50 V - -200 V, and the thickness of the film layer is 6 μm - 10 μm;

[0026] Step 3: Select metallographic sandpaper with more than 3000 meshes to perform a second finish polishing treatment on the sample coated for the first time, so that the surface roughness is reduced to within 500 nm;

[0027] Step 4: Perform a second coating treatment on the sample polished for the second time. Use targets such as silver, aluminum, and gold for sputtering treatment to serve as the optical functional layer. The coating air pressure is within 2E-4 Pa, the coating temperature is 25°C - 100°C, deposit using one of the materials such as silver, aluminum, and gold, the target power is 5 kw - 20 kw, the bias voltage is -50 V - -200 V, and the thickness of the film layer is 2 μm - 5 μm;

[0028] Step 5: Use a flannel cloth to perform a third finish polishing treatment on the sample coated for the second time, so that the surface roughness is reduced to within 6 nm;

[0029] Step 6: Perform three coating processes on the sample after three times of fine polishing. Use a mixture coating of aluminum, silver, and silicon as the primer layer. The coating air pressure is within 2E-4 Pa, the coating temperature is 25°C - 100°C. Adopt the co-deposition method of aluminum and silicon targets. The target power is 5 kw - 20 kw, and the bias voltage is -50 V - -200 V. The thickness of the film layer is 50 nm - 300 nm. Finally, deposit a 10 - 30 nm silicon oxide protective layer on its surface.

[0030] Advantages of the present invention:

[0031] 1. By setting multiple polishing positions, the rotating disk drives the optical mirror to rotate counterclockwise, enabling it to be polished by different polishing disks at different stages. Such switching is convenient, and the state is stable during switching without frequent loading and unloading. This improves the processing efficiency of the optical mirror, reduces the probability of damage during processing. At the same time, the device can polish optical mirrors at different stages simultaneously, and there is no need to stop the machine when loading and unloading the optical mirror, thus further improving the processing efficiency.

[0032] 2. By setting the rotating connection component and the adjusting connection component, during polishing, the clamping plate surrounds the outside of the adjusting motor. The adjusting motor drives the fixing component and the optical mirror to rotate and cooperate with the polishing disk for polishing. During switching, the pushing arc plate lifts the push ring sleeve through the annular plate, and the clamping plate releases the adjusting motor. Subsequently, the sliding rod separates from the adjusting motor. After completion of the switching, it resets again. In this way, the switching can be smoothly completed, making the working process smoother and the processing uninterrupted, which is beneficial to improving the working efficiency.

[0033] 3. By setting the fixing component, when installing the optical mirror, the reinforcement ring is lifted by the displacement member, the inner diameter of the fixing ring expands. After placing the optical mirror, the reinforcement ring is pressed down, and the fixing ring tightens to fix the optical mirror. Such fixing is convenient, can achieve rapid disassembly and assembly, and the force applied to the optical mirror is more uniform, providing better protection for the optical mirror.

[0034] 4. Through the surface modification treatment of aluminum matrix silicon carbide, the surface roughness of the final product can reach within 6 nm, achieving the mirror reflectivity of pure metal, greatly improving the optical quality of the final product;

[0035] Adopting the method of multiple polishing and coating avoids the problem that it is difficult to polish due to the different hardnesses of the two materials of aluminum matrix silicon carbide. The final product has the advantages of short polishing cycle, high processing quality, and excellent imaging quality. Description of the Drawings

[0036] Figure 1 It is a three-dimensional view of the aluminum matrix silicon carbide optical mirror processing equipment of the present invention;

[0037] Figure 2 It is a schematic diagram of the polishing component of the present invention;

[0038] Figure 3 This is the disassembly diagram of the polishing component of the present invention;

[0039] Figure 4 This is the schematic diagram of the placement unit of the present invention;

[0040] Figure 5 This is the disassembly diagram of the placement unit of the present invention;

[0041] Figure 6 This is the schematic diagram of the fixing component of the present invention;

[0042] Figure 7 This is the disassembly diagram of the fixing component of the present invention;

[0043] Figure 8 This is the schematic diagram of the bottom of the rotating disk of the present invention;

[0044] Figure 9 This is the disassembly diagram of the adjusting connection component of the present invention;

[0045] Figure 10 This is the disassembly diagram of the rotating connection component of the present invention;

[0046] Figure 11 This is the bottom view of the rotating disk of the present invention;

[0047] Figure 12 This is the present invention Figure 11 Cross-sectional view taken along line A-A in;

[0048] Figure 13 This is the present invention Figure 12 Partial enlarged view in;

[0049] Figure 14 This is the schematic diagram of the optical mirror surface of the present invention.

[0050] In the figure:

[0051] 1. Equipment frame; 2. Equipment bin; 3. Workbench; 4. Operating table; 5. Placement unit; 51. Rotating base; 52. Rotating disk; 53. Adjusting motor; 54. Installation groove; 55. Through hole; 56. Fixing component; 561. Installation base; 562. Reinforcing ring; 563. Fixing ring; 564. Displacement threaded hole; 565. Displacement part; 57. Rotating connection component; 571. Extension pipe; 572. Sliding rod; 573. Connection groove; 574. Fixed slot; 575. Connection spring; 576. Storage groove; 577. Through hole; 578. Pushing rod; 579. Clamping plate; 5710. Pushing ring sleeve; 5711. Ring plate; 58. Rotating motor; 59. Adjusting connection component; 591. Card slot; 592. Card block; 593. Outer ring; 594. Pushing arc plate; 595. Connecting rod; 596. Docking hole; 597. Fixed joint; 6. Polishing component; 61. Hanging seat; 62. Hanging rod; 63. Connecting piece; 64. Installation plate; 65. Threaded sleeve; 66. Grinding motor; 67. Extension rod; 68. Polishing disc. Detailed implementation manners

[0052] To make the above objects, features, and advantages of the present invention more obvious and understandable, the following will give a detailed description of the specific implementation manners of the present invention with reference to the accompanying drawings of the specification.

[0053] Example 1, referring to Figure 1-13 , which is the first embodiment of the present invention, provides an aluminum matrix silicon carbide optical mirror processing device for polishing an optical mirror, including an equipment frame 1, an equipment bin 2 arranged inside the equipment frame 1, a workbench 3 arranged above the equipment bin 2, an operating table 4 and a placement unit 5 arranged above the workbench 3, and a polishing component 6 arranged above the placement unit 5. The placement unit 5 includes a rotating base 51 arranged on the top of the workbench 3, a rotating disk 52 arranged on the top of the rotating base 51, an adjusting motor 53 and a rotating motor 58 arranged inside the rotating base 51, an installation groove 54 arranged on the top of the rotating disk 52, a through hole 55 arranged on the bottom of the rotating disk 52, a fixing component 56 arranged inside the installation groove 54, a rotating connection component 57 arranged at the bottom of the fixing component 56, and an adjusting connection component 59 arranged at the bottom of the rotating disk 52.

[0054] Specifically, the equipment frame 1 is assembled by splicing multiple sections of strip-shaped aluminum alloy materials distributed vertically and horizontally. The equipment bin 2 is placed inside the frame formed by the strip-shaped aluminum alloy materials. The operating table 4 is welded above the workbench 3. Control switches are provided on both sides of the operating table 4. The rotating base 51 is welded above the workbench 3. The rotating disk 52 is rotatably connected to the groove formed at the top of the rotating base 51, and rolling steel balls are embedded in the bottom wall and side walls of the groove. The upper surface of the rotating disk 52 is flush with the upper surface of the operating table 4. The through hole 55 communicates with the installation groove 54. The optical mirror is placed inside the fixing component 56. The rotating motors 58 are distributed in an annular array with the adjusting motor 53 as the reference. Both the rotating motors 58 and the adjusting motor 53 are fixed by bolts. The installation grooves 54 are distributed in an annular array with the central axis of the rotating disk 52 as the reference. The rotating connection component 57 is connected between the rotating motor 58 and the fixing component 56. The adjusting connection component 59 is connected between the adjusting motor 53 and the rotating disk 52. After the adjusting motor 53 is started once, it rotates a unit distance, specifically the distance between two adjacent installation grooves 54.

[0055] The polishing component 6 includes a suspension seat 61 provided on the equipment frame 1, a suspension rod 62 provided at the bottom of the suspension seat 61, a connecting piece 63 provided at the bottom of the suspension rod 62, a mounting plate 64 provided below the connecting piece 63, a threaded sleeve 65 provided below the mounting plate 64, a polishing motor 66 provided on the top of the mounting plate 64, an extension rod 67 provided at the bottom of the polishing motor 66, and a polishing disc 68 provided at the bottom of the extension rod 67.

[0056] Specifically, the suspension seat 61 is sleeved outside one of the horizontally distributed strip-shaped aluminum alloy materials and fixed by bolts. The suspension rod 62 is integrally welded with the suspension seat 61. A through connection hole is opened on the surface of the mounting plate 64. The connecting piece 63 penetrates through the mounting plate 64 to the lower side of the mounting plate 64. The threaded sleeve 65 is threadedly connected to the bottom of the connecting piece 63. The polishing disc 68 is attached to the upper surface of the optical mirror. The mounting plate 64 is located above the rotating disk 52. The polishing motors 66 are distributed in an annular array with the suspension rod 62 as the reference. A notch is provided on one side of the mounting plate 64 close to the operating table 4. No rotating motor 58 is provided on the side close to the operating table 4. In this way, the optical mirror on the side close to the operating table 4 does not participate in the polishing work, and the loading and unloading of the optical mirror are carried out here. The mesh number of the material of the polishing disc 68 gradually increases in the counterclockwise direction, and the polishing accuracy becomes higher and higher. The optical mirror rotates in the counterclockwise direction, and the surface roughness becomes lower and lower.

[0057] By setting multiple polishing positions, the rotating disk 52 drives the optical mirror to rotate counterclockwise, enabling it to be polished by different polishing disks 68 at different stages. This switching is convenient and stable during switching, without the need for frequent loading and unloading. As a result, the processing efficiency of the optical mirror is improved, the probability of damage during processing is reduced, and the device can polish optical mirrors at different stages simultaneously, and there is no need to stop the machine when loading and unloading the optical mirror, thus further improving the processing efficiency.

[0058] Specifically, the polishing disk 68 is arranged in a dislocation manner with the optical mirror, and the center point of the optical mirror is located on the edge line of the polishing disk 68, so that the polishing received by the optical mirror is more uniform.

[0059] The rotating connection assembly 57 includes an extension tube 571 arranged at the bottom of the through hole 55, a sliding rod 572 arranged at the bottom of the extension tube 571, a connection groove 573 arranged at the top of the sliding rod 572, a fixed slot 574 arranged at the bottom of the sliding rod 572, a connection spring 575 arranged inside the connection groove 573, a storage groove 576 arranged inside the fixed slot 574, a through hole 577 arranged on the surface of the sliding rod 572, a push rod 578 arranged inside the through hole 577, a clamping plate 579 arranged inside the storage groove 576, a push ring sleeve 5710 arranged outside the sliding rod 572, and an annular plate 5711 arranged outside the push ring sleeve 5710.

[0060] Specifically, the sliding rod 572 is slidably inserted into the extension tube 571. Two annular limiting blocks are arranged on the outer side of the sliding rod 572, and the two limiting blocks are respectively located on the upper and lower sides of the push ring sleeve 5710. The upper end of the connection spring 575 is fixedly connected to the fixing component 56. The power output end of the rotating motor 58 is inserted into the fixed slot 574. The storage groove 576 is annular, and the clamping plates 579 are arranged in a circumferential array. The clamping plates 579 are arc-shaped, and the radius of the arc surface of the clamping plate 579 on the side close to the power output end of the rotating motor 58 is the same as the radius of the power output end of the rotating motor 58. The clamping plates 579 clamp the outside of the power output end of the rotating motor 58. One end of the push rod 578 is threadedly connected to the clamping plate 579, and the other end abuts against the inner wall of the push ring sleeve 5710. The inner wall of the push ring sleeve 5710 has three sections, which are the upper vertical section, the outwardly expanding inclined section, and the lower vertical section from top to bottom. Tooth profiles that mesh with each other are arranged at the contact positions between the clamping plates 579 and the power output end of the rotating motor 58, and the tooth profiles are arranged in the up and down direction, so that the contact between the two can be more sufficient and the power can be transmitted better.

[0061] The adjusting connection assembly 59 includes a clamping groove 591 provided at the bottom of the rotating disc 52, a clamping block 592 provided at the top of the power output end of the rotating motor 58, an outer ring 593 provided below the rotating disc 52, a pushing arc plate 594 provided on the outer side of the outer ring 593, a connecting rod 595 provided on the outer side of the clamping block 592, a docking hole 596 provided on the outer side of the outer ring 593, and a fixed joint 597 provided at one end of the connecting rod 595 away from the clamping block 592.

[0062] Specifically, the clamping block 592 is inserted into the clamping groove 591. The clamping block 592 is composed of a cylindrical block and two sector blocks, and the two sector blocks are symmetrically distributed with the central axis of the cylindrical block as the reference. The clamping groove 591 has the same shape as the clamping block 592. The opening angle of the sector block of the clamping block 592 is smaller than the opening angle of the sector block of the clamping groove 591. The outer ring 593 surrounds the outside of the clamping block 592. The connecting rod 595 is threadedly connected to the clamping block 592. The connecting rod 595 penetrates through the docking hole 596. The connecting rod 595 and the fixed joint 597 are respectively distributed on both sides of the docking hole 596, and the two are threadedly connected. The pushing arc plate 594 is integrally welded to the outer ring 593. The pushing arc plate 594 is designed to be inclined. The upper surface of the docking hole 596 is attached to the lower surface of the annular plate 5711.

[0063] By setting the rotating connection assembly 57 and the adjusting connection assembly 59, during polishing, the clamping plate 579 surrounds the outside of the adjusting motor 53. The adjusting motor 53 drives the fixing assembly 56 and the optical mirror to rotate, and cooperates with the polishing disc 68 for polishing. During switching, the pushing arc plate 594 pushes the pushing ring sleeve 5710 through the annular plate 5711 to lift it. The clamping plate 579 releases the adjusting motor 53. Subsequently, the sliding rod 572 is separated from the adjusting motor 53. After the switching is completed, it is reset again. In this way, the switching can be smoothly completed, making the working process smoother and the processing uninterrupted, which is beneficial to improving work efficiency.

[0064] The fixing assembly 56 includes a mounting base 561 provided inside the mounting groove 54, a reinforcing ring 562 provided inside the mounting base 561, a fixing ring 563 provided on the outer side of the reinforcing ring 562, a displacement threaded hole 564 provided at the top of the mounting base 561, and a displacement member 565 provided at the top of the reinforcing ring 562.

[0065] Specifically, the mounting base 561 is snap-connected in the mounting groove 54. The reinforcing ring 562 is annular and is slidably inserted into the mounting base 561. The top of the reinforcing ring 562 extends in both the inner and outer directions and respectively covers the tops of the mounting base 561 and the fixing ring 563. The fixing ring 563 is annular, the outer wall of the fixing ring 563 is inclined, and the inclined surface inclines towards the optical mirror surface. The inside of the reinforcing ring 562 is inclined, and the inclined surface here fits with the outer wall of the fixing ring 563. The fixing ring 563 is made of rubber material. The displacement member 565 is threadedly connected to the displacement threaded hole 564, and the displacement member 565 is rotatably connected to the reinforcing ring 562. The extension tube 571 and the connecting spring 575 are both fixedly connected to the mounting base 561.

[0066] By setting the fixing assembly 56, when installing the optical mirror, the displacement member 565 is rotated to drive the reinforcing ring 562 to move upward under the action of the thread. The pressing effect of the reinforcing ring 562 on the fixing ring 563 is weakened, the fixing ring 563 becomes loose, and the inner diameter becomes larger. Then, one of the optical mirrors is placed into the ring of the fixing ring 563. The displacement member 565 is rotated to drive the reinforcing ring 562 to move downward under the action of the thread. The reinforcing ring 562 presses the fixing ring 563 again to make it tighten, and the fixing ring 563 wraps and fixes the optical mirror in the mounting base 561. In this way, the fixing is convenient, rapid disassembly and assembly can be realized, and the force applied to the optical mirror is more uniform, and the protection effect on the optical mirror is better.

[0067] Combined with Embodiment 1, the working principle of an aluminum matrix silicon carbide optical mirror processing equipment of the present invention is as follows:

[0068] Place multiple optical mirrors above the operation table 4 for standby. Rotate the displacement member 565 to drive the reinforcing ring 562 to move upward under the action of the thread. After the reinforcing ring 562 moves upward, the pressing effect on the fixing ring 563 is weakened, the fixing ring 563 becomes loose, and the inner diameter becomes larger. Then, one of the optical mirrors is placed into the ring of the fixing ring 563. Rotate the displacement member 565 to drive the reinforcing ring 562 to move downward under the action of the thread. The reinforcing ring 562 presses the fixing ring 563 again to make it tighten, and the fixing ring 563 wraps and fixes the optical mirror in the mounting base 561.

[0069] By controlling the switch, the adjustment motor 53 rotates one unit. The adjustment motor 53 drives the clamping block 592 to rotate in the card slot 591. First, the clamping block 592 drives the outer ring 593 to rotate through the connecting rod 595. During the rotation of the outer ring 593, the pushing arc plate 594 will lift the annular plate 5711 upward. The annular plate 5711 drives the pressing ring sleeve 5710 to move upward. After the pressing ring sleeve 5710 moves upward, the push rod 578 separates from the upper vertical area, making the lower vertical area flush with the push rod 578. The push rod 578 loses the pressing force, and the clamping plate 579 releases the output end of the rotation motor 58. When the pressing ring sleeve 5710 contacts the limit block, it starts to drive the sliding rod 572 to move upward. The sliding rod 572 gradually separates from the output end of the rotation motor 58. When the two are completely separated, the sector block on the outside of the clamping block 592 slides to the end of the sector area of the card slot 591, and the clamping block 592 starts to drive the rotating disk 52 to rotate. The rotating disk 52 rotates one unit accordingly. Subsequently, the rotation motor 58 stops. The output shaft of the rotation motor 58 becomes an unrestricted unlocking state. The weights of the sliding rod 572 and the pressing ring sleeve 5710 press on the upper surface of the pushing arc plate 594, and it is pushed back to its original position through the arc surface above the pushing arc plate 594. The outer ring 593 and the clamping block 592 return to their original positions. The sliding rod 572 and the pressing ring sleeve 5710 first move downward synchronously and are sleeved outside the output end of the adjustment motor 53. When the sliding rod 572 moves to the limit and stops moving, the pressing ring sleeve 5710 moves. The push rod 578 is pushed inward into the fixed slot 574 through the outward expanding inclined area. The push rod 578 pushes the clamping plate 579 to hold the output end of the adjustment motor 53 tightly. After the upper vertical area moves to the position of the push rod 578, it presses it tightly to maintain stability. At this time, the fixing component 56 is fixed to the rotation motor 58 again, and the rotating disk 52 is fixed to the adjustment motor 53 again.

[0070] The rotating disk 52 drives the optical mirror to rotate counterclockwise and moves to the next polishing area. The polishing motor 66 is started to drive the polishing disc 68 to rotate through the extension rod 67 to polish the optical mirror. According to the above method, the optical mirrors are placed into the installation slots 54 one by one. The optical mirrors continuously switch polishing areas. When the optical mirror is polished and returns to the operating table 4 again, the optical mirror is removed and a new optical mirror is replaced.

[0071] Example 2, referring to Figure 14 , which is the second embodiment of the present invention. An aluminum matrix silicon carbide optical mirror includes four layers A, B, C, and D, namely a substrate, an underlayer, a functional layer, and a protective layer. The surface of the substrate is the underlayer, and the underlayer is a mixed film layer plated with aluminum / silicon. The material of the substrate can specifically be aluminum matrix silicon carbide; the surface of the underlayer is the functional layer, and the functional layer is an optical functional film layer with a certain thickness plated with silicon, silver, and aluminum as sputtering targets; on the surface of the functional layer is a transparent silicon oxide protective layer.

[0072] Example 3, the third example of the present invention, provides a method for processing an aluminum-based silicon carbide optical mirror, comprising the following steps:

[0073] Step 1: Substrate polishing. Using aluminum-based silicon carbide as the substrate, the aluminum-based silicon carbide substrate is roughly polished with high-hardness diamond abrasive. The particle size of the diamond abrasive is changed in sequence, and the aluminum-based silicon carbide substrate is coarsely ground, finely ground, and finely polished until the surface roughness is reduced to within 6 microns.

[0074] Pretreatment before coating. The clean substrate is placed in a vacuum chamber after ultra-washing and drying, evacuated to 8E-4 Pa, filled with high-purity argon, and the substrate is cleaned using an ion source with a power of 1.5 kW.

[0075] Step 2: Deposition of the bottom layer. The sample after the first polishing is subjected to a first coating treatment. An aluminum-silicon mixture coating is used as the bottom layer. The coating pressure is within 2E-4 Pa, the coating temperature is 80 °C, and the aluminum and silicon targets are co-deposited. The power of the aluminum target is 8 kW, the power of the silicon target is 12 kW, and the bias voltage is -50 V. The thickness of the film layer is 7 μm.

[0076] Step 3: Secondary fine polishing treatment. At this time, metallographic sandpaper with a mesh size of more than 3000 is selected to polish the sample after the first coating, and then fine polishing is carried out to reduce the surface roughness to within 500 nm.

[0077] Step 4: Secondary coating treatment. The sample after the secondary fine polishing is subjected to a secondary coating treatment. A silver target is used for sputtering treatment to serve as the optical functional layer. The coating pressure is within 2E-4 Pa, the coating temperature is 60 °C, silver is used for sputtering deposition, the target power is 10 kW, and the bias voltage is -50 V. The thickness of the film layer is 4 μm.

[0078] Step 5: Tertiary fine polishing treatment. The sample after the secondary coating treatment is polished with a flannel cloth for the tertiary fine polishing treatment to reduce the surface roughness to within 6 nm.

[0079] Step 6: Tertiary coating treatment. The sample after the tertiary fine polishing is subjected to a tertiary coating treatment. The coating pressure is within 2E-4 Pa, the coating temperature is 80 °C, the target is selected as a silver target, the target power is 9 kW, the bias voltage is -80 V, and the thickness of the film layer is 60 nm; finally, a 30-nm silicon oxide protective layer is deposited on its surface.

[0080] Example 4, the fourth example of the present invention, provides a method for processing an aluminum-based silicon carbide optical mirror, comprising the following steps:

[0081] Step 1: Substrate polishing. Use aluminum-based silicon carbide as the substrate, and use high-hardness diamond abrasive to perform rough polishing on the aluminum-based silicon carbide substrate. Sequentially change the particle size of the diamond abrasive, and perform rough grinding, fine grinding, and finish polishing on the aluminum-based silicon carbide substrate until its surface roughness is reduced to within 5 microns.

[0082] Pretreatment before coating. The clean substrate is placed in a vacuum chamber after ultra-washing and drying, evacuated to 8E-4 Pa, and high-purity argon is introduced. Use an ion source to clean the substrate at a power of 1.5 kW.

[0083] Step 2: Deposition of the bottom layer. Perform a first coating treatment on the sample polished once. Use an aluminum-silicon mixture coating as the bottom layer. The coating pressure is within 2E-4 Pa, the coating temperature is 80 °C. Adopt the co-deposition method of aluminum and silicon targets. The power of the aluminum target is 9 kW, the power of the silicon target is 11 kW, the bias voltage is -100 V, and the thickness of the film layer is 8 μm.

[0084] Step 3: Secondary finish polishing treatment. At this time, select metallographic sandpaper with more than 3000 meshes to polish the sample coated once, and then perform finish polishing to reduce its surface roughness to within 400 nm.

[0085] Step 4: Secondary coating treatment. Perform a secondary coating treatment on the sample polished twice. Use a silver target for sputtering treatment to make it an optical functional layer. The coating pressure is within 2E-4 Pa, the coating temperature is 60 °C. Adopt silver for sputtering deposition. The power of the target is 9 kW, the bias voltage is -80 V, and the thickness of the film layer is 3 μm.

[0086] Step 5: Tertiary finish polishing treatment: Use a flannel to perform tertiary finish polishing on the sample treated by secondary coating to reduce its surface roughness to within 6 nm.

[0087] Step 6: Tertiary coating treatment: Perform a tertiary coating treatment on the sample polished three times. The coating pressure is within 2E-4 Pa, the coating temperature is 100 °C. The target is selected as a silver target. The power of the target is 10 kW, the bias voltage is -100 V, and the thickness of the film layer is 200 nm; finally, deposit a 10-nm silicon oxide protective layer on its surface.

[0088] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. An aluminum-based silicon carbide optical mirror processing device for polishing an optical mirror, comprising a device frame (1), a device compartment (2) arranged inside the device frame (1), a workbench (3) arranged above the device compartment (2), an operating table (4) and a placement unit (5) arranged above the workbench (3), and a polishing assembly (6) arranged above the placement unit (5), characterized in that: The placement unit (5) comprises a rotating base (51) arranged on the top of the workbench (3), a rotating disk (52) arranged on the top of the rotating base (51), an adjusting motor (53) and a rotating motor (58) arranged inside the rotating base (51), a mounting groove (54) arranged on the top of the rotating disk (52), a through hole (55) arranged at the bottom of the rotating disk (52), a fixing component (56) arranged inside the mounting groove (54), a rotating connection component (57) arranged at the bottom of the fixing component (56), and an adjusting connection component (59) arranged at the bottom of the rotating disk (52); The upper surface of the rotating disk (52) is flush with the upper surface of the operating table (4); the optical mirror is placed in the fixed component (56); the rotating motor (58) is distributed in a ring array with the adjusting motor (53) as a reference; the mounting grooves (54) are distributed in a ring array with the central axis of the rotating disk (52) as a reference; the rotating connection component (57) is connected between the rotating motor (58) and the fixed component (56); and the adjusting connection component (59) is connected between the adjusting motor (53) and the rotating disk (52).

2. The aluminum-based silicon carbide optical mirror processing equipment according to claim 1, characterized in that: The polishing assembly (6) comprises a suspension seat (61) arranged on the equipment frame (1), a suspension rod (62) arranged at the bottom of the suspension seat (61), a connecting piece (63) arranged at the bottom of the suspension rod (62), a mounting plate (64) arranged below the connecting piece (63), a threaded sleeve (65) arranged below the mounting plate (64), a polishing motor (66) arranged at the top of the mounting plate (64), an extension rod (67) arranged at the bottom of the polishing motor (66), and a polishing disc (68) arranged at the bottom of the extension rod (67); The connecting member (63) passes through the mounting plate (64) to the bottom of the mounting plate (64), the threaded sleeve (65) is threadedly connected to the bottom of the connecting member (63), the polishing disc (68) is attached to the upper surface of the optical mirror, the mounting plate (64) is located above the rotating disc (52), and the polishing motors (66) are distributed in a ring array with the suspension rod (62) as a reference.

3. The aluminum-based silicon carbide optical mirror processing equipment according to claim 2, characterized in that: A recess is provided on one side of the mounting plate (64) close to the operating table (4).

4. The aluminum-based silicon carbide optical mirror processing equipment according to claim 3, characterized in that: The polishing disc (68) and the optical mirror surface are arranged in a staggered manner, and the center point of the optical mirror surface is located on the edge line of the polishing disc (68).

5. The aluminum-based silicon carbide optical mirror processing equipment according to claim 4, characterized in that: The rotating connection assembly (57) comprises an extension tube (571) arranged at the bottom of the through hole (55), a sliding rod (572) arranged at the bottom of the extension tube (571), a connecting groove (573) arranged at the top of the sliding rod (572), a fixing slot (574) arranged at the bottom of the sliding rod (572), a connecting spring (575) arranged inside the connecting groove (573), a receiving groove (576) arranged inside the fixing slot (574), a through hole (577) arranged on the surface of the sliding rod (572), a pushing rod (578) arranged inside the through hole (577), a clamping plate (579) arranged inside the receiving groove (576), a pushing ring sleeve (5710) arranged outside the sliding rod (572), and an annular plate (5711) arranged outside the pushing ring sleeve (5710); The upper end of the connecting spring (575) is fixedly connected to the fixing assembly (56), the power output end of the rotating motor (58) is inserted into the fixing slot (574), the clamping plates (579) are distributed in a circular array, the clamping plates (579) are clamped on the outer side of the power output end of the rotating motor (58), one end of the ejector rod (578) is threadedly connected to the clamping plate (579), and the other end contacts the inner wall of the pushing ring sleeve (5710), and the inner wall of the pushing ring sleeve (5710) is provided with three sections, which are, from top to bottom, an upper vertical area, an outwardly expanding inclined area, and a lower vertical area.

6. The aluminum-based silicon carbide optical mirror processing equipment according to claim 5, characterized in that: The clamping plate (579) and the power output end of the rotating motor (58) are both provided with teeth that mesh with each other, and the teeth are oriented up and down.

7. The aluminum-based silicon carbide optical mirror processing equipment according to claim 6, characterized in that: The adjusting connection assembly (59) comprises a slot (591) arranged at the bottom of the rotating disk (52), a block (592) arranged at the top of the power output end of the rotating motor (58), an outer ring (593) arranged below the rotating disk (52), a push arc plate (594) arranged outside the outer ring (593), a connecting rod (595) arranged outside the block (592), a docking hole (596) arranged outside the outer ring (593), and a fixed joint (597) arranged at the end of the connecting rod (595) away from the block (592); The clamping block (592) is composed of a cylindrical block and two fan-shaped blocks, and the two fan-shaped blocks are symmetrically distributed with the central axis of the cylindrical block as a reference. The clamping slot (591) and the clamping block (592) have the same shape, and the opening angle of the fan-shaped block of the clamping block (592) is smaller than the opening angle of the fan-shaped block of the clamping slot (591). The connecting rod (595) passes through the docking hole (596), and the connecting rod (595) and the fixed joint (597) are respectively distributed on both sides of the docking hole (596). The pushing arc plate (594) adopts an inclined design, and the upper surface of the docking hole (596) is in contact with the lower surface of the annular plate (5711).

8. The aluminum-based silicon carbide optical mirror processing equipment according to claim 7, characterized in that: The fixing assembly (56) comprises a mounting base (561) arranged inside the mounting groove (54), a reinforcement ring (562) arranged inside the mounting base (561), a fixing ring (563) arranged outside the reinforcement ring (562), a displacement threaded hole (564) arranged at the top of the mounting base (561), and a displacement member (565) arranged at the top of the reinforcement ring (562); The top of the reinforcement ring (562) extends inward and outward directions, respectively covering the top of the mounting base (561) and the fixing ring (563); the outer wall of the fixing ring (563) is designed to be inclined, and the inclined surface is inclined in the direction of the optical mirror surface; the interior of the reinforcement ring (562) is designed to be inclined, and the inclined surface is in contact with the outer wall of the fixing ring (563); the extension tube (571) and the connection spring (575) are both fixedly connected to the mounting base (561).

9. A method for processing an aluminum-based silicon carbide optical mirror surface, characterized in that: The following steps are involved: Step 1: Use high-hardness diamond abrasives to perform coarse grinding, fine grinding, and fine polishing on the aluminum-based silicon carbide substrate, and change the diamond abrasive particle size in sequence until its surface roughness is reduced to within 6μm; Step 2: The sample that has been polished once is subjected to a coating treatment, using an aluminum and silicon mixture coating as a base layer, the coating pressure is within 2E-4Pa, the coating temperature is 25℃-100℃, and the aluminum and silicon target co-deposition method is adopted. The target power is 5kw-20kw, the bias voltage is -50V--200V, and the film thickness is 6μm-10μm; Step 3: Select metallographic sandpaper with mesh size of 3000 or above to perform secondary polishing on the sample coated once, so that the surface roughness is reduced to within 500nm; Step 4: Perform secondary coating treatment on the sample after secondary polishing, use silver, aluminum, gold and other target materials for sputtering treatment, so that it serves as an optical functional layer, the coating pressure is within 2E-4Pa, the coating temperature is 25℃-100℃, and one of silver, aluminum, gold and other materials is used for deposition. The target power is 5kw-20kw, the bias voltage is -50V--200V, and the thickness of the film layer is 2μm-5μm; Step 5: Use flannel cloth to perform three times of fine polishing on the sample treated with secondary coating to reduce its surface roughness to within 6nm; Step six: The samples that have been polished three times are subjected to three coating treatments, using a mixture of aluminum, silver and silicon as a base layer, the coating pressure is within 2E-4Pa, the coating temperature is 25℃-100℃, and the aluminum and silicon targets are co-deposited. The target power is 5kw-20kw, the bias voltage is -50V--200V, and the thickness of the film layer is 50nm-300nm. Finally, a 10-30nm silicon oxide protective layer is plated on its surface.

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