Method for manufacturing physical quantity detection device, and physical quantity detection device
By adjusting the weighting part of the driving vibrating arm in the physical quantity detection device and making specific electrical connections in the detection circuit, the problem of the detection of the useless signal generated by the vibration arm is solved, appropriate balance tuning and high sensitivity detection are achieved, and the performance stability of the gyroscope sensor is improved.
Patent Information
- Application Number
- CN202411879564.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-12-21
- Filing Date
- 2024-12-19
- Publication Date
- 2025-06-24
AI Technical Summary
In the existing physical quantity detection device, the detection vibration arm generates a useless signal, resulting in the inability to perform appropriate balance tuning, resulting in a deviation in the performance of the gyroscope sensor.
A physical quantity detection device is designed, which includes a base and a plurality of vibrating arms. By adjusting the weighting part of driving the vibrating arms, and electrically connecting the first detection electrode to the third detection electrode, the second detection electrode and the fourth detection electrode in the detection circuit, independent detection and balanced tuning are achieved.
Through this method, useless signals can be effectively suppressed, appropriate balance tuning can be achieved, detection sensitivity can be improved, performance deviation can be reduced, and vibration characteristics can be improved.
Smart Images
Figure CN120194672A_ABST
Abstract
Citation Information
Patent Citations
Physical quantity detection device, electronic equipment and mobile object
JP2015184124A