Electron beam scanning positioning method, device and equipment and storage medium

Abstract

The invention provides an electron beam scanning positioning method and device, equipment and a storage medium. The scanning and positioning method of the electron beam comprises the following steps: acquiring scanning and positioning data of the electron beam in real time; based on a digital circuit, performing correction calculation on the scanning positioning data to obtain corrected scanning positioning data; determining an analog signal corresponding to the correction scanning positioning data; scanning positioning control of the electron beam is completed according to the analog signal. Visibly, through the method, the corrected scanning positioning data after correction can be quickly obtained through the correction operation based on the digital circuit, and compared with a scheme for correcting the scanning positioning signal by adopting an analog circuit, complex analog circuit design is not needed any more, the environmental noise influence caused by the complex analog circuit design is reduced, and the accuracy of scanning positioning signal correction is improved. And the scanning positioning efficiency and accuracy of the electron beam are improved.

Description

Technical Field

[0001] The present application relates to the field of electronic technologies, and particularly to a method, apparatus, device, and storage medium for scanning and positioning an electron beam. Background Art

[0002] An electron beam lithography machine can focus or project an electron beam onto a wafer substrate coated with an electron beam resist, and control the electron beam to scan and expose point by point according to the designed layout, directly writing out each graphic structure in the layout on the wafer substrate. During the process of processing graphic structures by the electron beam lithography machine, the electron beam needs to be accurately positioned according to the designed layout. The electron beam deflector cannot guarantee a perfect deflection field, which will bring deflection errors, including astigmatism, distortion, etc. At the same time, due to the processing errors of the electron beam deflector, deflection errors will also be brought. Therefore, how to correct the above errors in electron beam scanning and positioning is the key to ensuring the processing accuracy of electron beam lithography.

[0003] The existing technology for correcting the scanning and positioning of an electron beam is to correct the output data of the uncalibrated scanning and positioning data output by a pattern generator by using an analog circuit method, and use the analog circuit method for scanning and positioning the electron beam. On the one hand, the data is easily affected by the external electromagnetic environment and temperature, thereby introducing environmental noise, resulting in a low accuracy rate; on the other hand, it is difficult to correct high-order errors, such as second-order errors related to both data channels, which requires a more complex analog circuit design, resulting in a low efficiency of scanning and positioning of the electron beam. Summary of the Invention

[0004] In view of this, the purpose of the present application is to provide a method, apparatus, device, and storage medium for scanning and positioning an electron beam, so as to improve the efficiency and accuracy of scanning and positioning of the electron beam.

[0005] In a first aspect, an embodiment of the present application provides a method for scanning and positioning an electron beam, the method including:

[0006] Obtaining the scanning and positioning data of the electron beam in real time;

[0007] Based on a digital circuit, performing correction calculation on the scanning and positioning data to obtain corrected scanning and positioning data;

[0008] Determining the analog signal corresponding to the corrected scanning and positioning data;

[0009] Completing the scanning and positioning control of the electron beam according to the analog signal.

[0010] Optionally, the scanning and positioning data includes first coordinate data, second coordinate data, first scaling factor data, second scaling factor data, first rotation amount data, second rotation amount data, first offset amount data, and second offset amount data; the digital circuit includes: a scaling calculation multiplier, a rotation calculation multiplier, and a first-order correction calculation adder;

[0011] Then, based on the digital circuit, perform a correction calculation on the scanning and positioning data to obtain corrected scanning and positioning data, including:

[0012] Based on the scaling calculation multiplier, perform a scaling multiplication calculation on the first coordinate data and the first scaling factor data to obtain a first scaling correction value; based on the scaling calculation multiplier, perform a scaling multiplication calculation on the second coordinate data and the second scaling factor data to obtain a second scaling correction value;

[0013] Based on the rotation calculation multiplier, perform a rotation multiplication calculation on the second coordinate data and the first rotation amount data to obtain a first rotation correction value; based on the rotation calculation multiplier, perform a rotation multiplication calculation on the first coordinate data and the second rotation amount data to obtain a second rotation correction value;

[0014] Based on the first-order correction calculation adder, perform an addition calculation on the first scaling correction value, the first rotation correction value, and the first offset amount data to obtain a first correction data; based on the first-order correction calculation adder, perform an addition calculation on the second scaling correction value, the second rotation correction value, and the second offset amount data to obtain a second correction data;

[0015] Determine the corrected scanning and positioning data according to the first correction data and the second correction data.

[0016] Optionally, the scanning and positioning data further includes: first trapezoidal amount data and second trapezoidal amount data; the digital circuit further includes: a trapezoidal calculation multiplier and a second-order correction calculation adder;

[0017] Then, after obtaining the first correction data and the second correction data, based on the digital circuit, perform a correction calculation on the scanning and positioning data to obtain corrected scanning and positioning data, further including:

[0018] Based on the trapezoidal calculation multiplier, perform a cross-term multiplication calculation on the first coordinate data and the second coordinate data to obtain coordinate cross-value data;

[0019] Based on the trapezoidal computing multiplier, perform trapezoidal multiplication calculation on the first trapezoidal quantity data and the coordinate cross value data to obtain a first trapezoidal correction value; based on the trapezoidal computing multiplier, perform trapezoidal multiplication calculation on the second trapezoidal quantity data and the coordinate cross value data to obtain a second trapezoidal correction value;

[0020] Based on the second-order correction calculation adder, perform calculation on the first correction data and the first trapezoidal correction value to obtain third correction data; based on the second-order correction calculation adder, perform calculation on the second correction data and the second trapezoidal correction value to obtain fourth correction data;

[0021] Determine the correction scan positioning data according to the third correction data and the fourth correction data.

[0022] Optionally, after determining the analog signal corresponding to the correction scan positioning data, the method further includes:

[0023] Preprocess the analog signal, and the preprocessed analog signal is used to complete the scan positioning control of the electron beam. The preprocessing includes one or more of the following: filtering processing, current-voltage conversion processing, and signal amplification processing.

[0024] Optionally, the completing the scan positioning control of the electron beam according to the analog signal includes:

[0025] Determine the deflection current and / or deflection voltage according to the analog signal;

[0026] Control the deflection of the electron beam deflector according to the deflection current and / or deflection voltage to complete the scan positioning control of the electron beam.

[0027] In a second aspect, the present application provides an electron beam scan positioning device, and the device includes:

[0028] An acquisition unit, configured to acquire the scan positioning data of the electron beam in real time;

[0029] A correction unit, configured to perform correction calculation on the scan positioning data based on a digital circuit to obtain correction scan positioning data;

[0030] A determination unit, configured to determine the analog signal corresponding to the correction scan positioning data;

[0031] A control unit, configured to complete the scan positioning control of the electron beam according to the analog signal.

[0032] Optionally, the scanning and positioning data includes first coordinate data, second coordinate data, first scaling amount data, second scaling amount data, first rotation amount data, second rotation amount data, first offset amount data, and second offset amount data; the digital circuit includes: a scaling calculation multiplier, a rotation calculation multiplier, and a first-order correction calculation adder;

[0033] The correction unit includes:

[0034] A scaling calculation sub-unit, configured to perform scaling multiplication calculation on the first coordinate data and the first scaling amount data based on the scaling calculation multiplier to obtain a first scaling correction value; and perform scaling multiplication calculation on the second coordinate data and the second scaling amount data based on the scaling calculation multiplier to obtain a second scaling correction value;

[0035] A rotation calculation sub-unit, configured to perform rotation multiplication calculation on the second coordinate data and the first rotation amount data based on the rotation calculation multiplier to obtain a first rotation correction value; and perform rotation multiplication calculation on the first coordinate data and the second rotation amount data based on the rotation calculation multiplier to obtain a second rotation correction value;

[0036] An addition calculation sub-unit, configured to perform addition calculation on the first scaling correction value, the first rotation correction value, and the first offset amount data based on the first-order correction calculation adder to obtain a first correction data; and perform addition calculation on the second scaling correction value, the second rotation correction value, and the second offset amount data based on the first-order correction calculation adder to obtain a second correction data;

[0037] A determination sub-unit, configured to determine the corrected scanning and positioning data according to the third correction data and the fourth correction data.

[0038] Optionally, the scanning and positioning data further includes: first trapezoid amount data and second trapezoid amount data; the digital circuit further includes: a trapezoid calculation multiplier, a second-order correction calculation adder; the correction unit further includes:

[0039] A trapezoid calculation sub-unit, configured to perform calculation on the first coordinate data and the second coordinate data based on the trapezoid calculation multiplier to obtain coordinate cross value data;

[0040] The trapezoid calculation sub-unit is further configured to perform calculation on the first trapezoid amount data and the coordinate cross value data based on the trapezoid calculation multiplier to obtain a first trapezoid correction value; and perform calculation on the second trapezoid amount data and the coordinate cross value data based on the trapezoid calculation multiplier to obtain a second trapezoid correction value;

[0041] The addition calculation subunit is further configured to calculate the first correction data and the first trapezoidal correction value based on the second-order correction calculation adder to obtain third correction data; calculate the second correction data and the second trapezoidal correction value based on the second-order correction calculation adder to obtain fourth correction data;

[0042] The determination subunit is further configured to determine the correction scanning positioning data according to the third correction data and the fourth correction data.

[0043] Optionally, the device further includes:

[0044] A preprocessing unit, configured to preprocess the analog signal, and the preprocessed analog signal is used to complete the scanning positioning control of the electron beam. The preprocessing includes one or more of the following: filtering processing, current-voltage conversion processing, and signal amplification processing.

[0045] Optionally, the control unit includes:

[0046] A determination subunit, configured to determine a deflection current and / or a deflection voltage according to the analog signal;

[0047] A control subunit, configured to control the deflection of the electron beam deflector according to the deflection current and / or the deflection voltage to complete the scanning positioning control of the electron beam.

[0048] In a third aspect, the present application provides a scanning positioning device for an electron beam, including:

[0049] A memory, configured to store a computer program;

[0050] A processor, configured to execute the computer program stored in the memory to implement the steps of the scanning positioning method for an electron beam according to any one of the first aspects.

[0051] In a fourth aspect, the present application provides a computer-readable storage medium, on which a computer program is stored, and the computer program is executed by a processor to implement the steps of the scanning positioning method for an electron beam according to any one of the first aspects.

[0052] An electron beam scanning and positioning method, device, equipment and storage medium provided by the present application. In an electron beam scanning and positioning method, scanning and positioning data of the electron beam is obtained in real time; based on a digital circuit, correction calculation is performed on the scanning and positioning data to obtain corrected scanning and positioning data; an analog signal corresponding to the corrected scanning and positioning data is determined; and the scanning and positioning control of the electron beam is completed according to the analog signal. It can be seen that through the above method, the corrected scanning and positioning data can be quickly obtained by performing correction operations based on a digital circuit. Compared with the scheme of using an analog circuit to correct the scanning and positioning signal, there is no need for complex analog circuit design, the environmental noise influence caused by the complex analog circuit design is reduced, and the efficiency and accuracy of the electron beam scanning and positioning are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0054] Figure 1 is a flowchart of an electron beam scanning and positioning method provided by an embodiment of the present application;

[0055] Figure 2 is a logical diagram of the correction calculation of scanning and positioning data provided by an embodiment of the present application;

[0056] Figure 3 is another logical diagram of the correction calculation of scanning and positioning data provided by an embodiment of the present application;

[0057] Figure 4 is a structural diagram of an electron beam scanning and positioning device provided by an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0058] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0059] To facilitate understanding of the technical solutions provided by the present application, the following will describe an electron beam scanning and positioning method provided by the present application in conjunction with the drawings. Refer to Figure 1, This figure is a schematic flowchart of a method for scanning and positioning an electron beam provided by an embodiment of the present application. As Figure 1 shown, this method includes S101 - S104. The present application does not limit the specific application scenario of this method, and the present application can be applied to an electron beam scanning and positioning system.

[0060] S101: Obtain the scanning and positioning data of the electron beam in real time.

[0061] In the embodiment of the present application, the electron beam scanning and positioning system can obtain the scanning and positioning data from the pattern generator in real time through the scanning and positioning data interface. It can be understood that the pattern generator in the electron beam exposure device calculates the scanning and positioning data according to the layout designed for electron beam exposure.

[0062] The present application does not limit the specific content of the scanning and positioning data of the electron beam. As an example, the scanning and positioning data of the electron beam can include one or more of the following: first coordinate data, second coordinate data, first scaling factor data, second scaling factor data, first rotation amount data, second rotation amount data, first offset amount data, second offset amount data, first trapezoid amount data, and second trapezoid amount data. It can be understood that the first coordinate data and the second coordinate data refer to data in the Cartesian coordinate plane. The first coordinate data can refer to the abscissa data in the Cartesian coordinate plane, and the second coordinate data can refer to the ordinate data in the Cartesian coordinate plane. The first scaling factor data, the second scaling factor data, the first rotation amount data, the second rotation amount data, the first offset amount data, and the second offset amount data are signal calibration parameters, which are parameters used to calibrate the first coordinate data and the second coordinate data. The scaling factor data, the rotation amount data, the offset amount data, and the trapezoid amount data are concepts in geometric transformation. Among them, the scaling factor data, the rotation amount data, and the offset amount data can respectively indicate the magnification, rotation, and offset of one coordinate system relative to another coordinate system in a two-dimensional plane. The trapezoid amount data is, mathematically speaking, the coefficient of the quadratic cross-product term in the transformation equation and is a parameter used to indicate the transformation of the first coordinate data and the second coordinate data.

[0063] S102: Based on a digital circuit, perform a correction calculation on the scanning and positioning data to obtain corrected scanning and positioning data.

[0064] In the embodiment of the present application, after obtaining the scanning and positioning data, a correction calculation will be performed on the scanning and positioning data based on a digital circuit to obtain corrected scanning and positioning data. As an example, the present application can develop algorithm logic hardware through a Field Programmable Gate Array (FPGA) device in the electron beam scanning and positioning system to obtain the function of correcting the scanning and positioning data of the electron beam based on a digital circuit.

[0065] It can be understood that for different scanning and positioning data, the present application will perform calibration calculations on the scanning and positioning data through different digital circuits, and the specific calibration method will be described below.

[0066] S103: Determine the analog signal corresponding to the calibrated scanning and positioning data.

[0067] In the embodiments of the present application, after obtaining the calibrated scanning and positioning data, the analog signal corresponding to the calibrated scanning and positioning data can be determined through a digital-to-analog converter, and this analog signal is required for the scanning and positioning control of the electron beam.

[0068] S104: Complete the scanning and positioning control of the electron beam according to the analog signal.

[0069] In the embodiments of the present application, after determining the analog signal, the scanning and positioning control of the electron beam can be completed according to the analog signal.

[0070] The present application does not limit the specific method for completing the scanning and positioning control of the electron beam according to the analog signal. As an example, completing the scanning and positioning control of the electron beam according to the analog signal includes the following steps: determining the deflection current and / or deflection voltage according to the analog signal; controlling the deflection of the electron beam deflector according to the deflection current and / or deflection voltage to complete the scanning and positioning control of the electron beam.

[0071] The present application does not limit the specific method for determining the deflection current and / or deflection voltage according to the analog signal. The deflection current and / or deflection voltage can be determined according to the analog signal through conventional analog quantity conversion techniques in the art.

[0072] It can be understood that the present application will first determine the deflection current and / or deflection voltage required for the electron beam deflector of the electron beam exposure machine according to the analog signal, so that the electron beam deflector can perform the electron beam deflection action according to the deflection current and / or deflection voltage, and the electron beam deflector can be accurately controlled, improving the accuracy of the scanning and positioning control of the electron beam.

[0073] Obtain the scanning and positioning data of the electron beam in real time; based on a digital circuit, perform calibration calculations on the scanning and positioning data to obtain calibrated scanning and positioning data; determine the analog signal corresponding to the calibrated scanning and positioning data; complete the scanning and positioning control of the electron beam according to the analog signal. It can be seen that through the above method, the calibrated scanning and positioning data can be quickly obtained by performing calibration operations based on a digital circuit. Compared with the solution of using an analog circuit for scanning and positioning signal calibration, there is no longer a need for complex analog circuit design, reducing the influence of environmental noise caused by complex analog circuit design, and improving the efficiency and accuracy of the scanning and positioning of the electron beam.

[0074] Moreover, the specific algorithm for the correction calculation of the scanning and positioning data in this application can be flexibly adjusted according to actual needs, improving the flexibility of the scanning and positioning of the electron beam. And in this application, the correction of the scanning and positioning data is performed through a digital circuit, improving the anti-interference ability of the scanning and positioning of the electron beam and reducing the power consumption required for the scanning and positioning data of the electron beam.

[0075] As a possible implementation manner, when the scanning and positioning data includes first coordinate data, second coordinate data, first scaling amount data, second scaling amount data, first rotation amount data, second rotation amount data, first offset amount data, and second offset amount data; and the digital circuit includes: a scaling calculation multiplier, a rotation calculation multiplier, and a first-order correction calculation adder, S102 performs a correction calculation on the scanning and positioning data based on the digital circuit to obtain the corrected scanning and positioning data, including the following steps:

[0076] A1: Based on the scaling calculation multiplier, perform a scaling multiplication calculation on the first coordinate data and the first scaling amount data to obtain a first scaling correction value; based on the scaling calculation multiplier, perform a scaling multiplication calculation on the second coordinate data and the second scaling amount data to obtain a second scaling correction value.

[0077] A2: Based on the rotation calculation multiplier, perform a rotation multiplication calculation on the second coordinate data and the first rotation amount data to obtain a first rotation correction value; based on the rotation calculation multiplier, perform a rotation multiplication calculation on the first coordinate data and the second rotation amount data to obtain a second rotation correction value.

[0078] A3: Based on the first-order correction calculation adder, perform an addition calculation on the first scaling correction value, the first rotation correction value, and the first offset amount data to obtain a first correction data; based on the first-order correction calculation adder, perform an addition calculation on the second scaling correction value, the second rotation correction value, and the second offset amount data to obtain a second correction data.

[0079] A4: Determine the corrected scanning and positioning data according to the first correction data and the second correction data.

[0080] See Figure 2 , Figure 2 which is a logic schematic diagram of the correction calculation of the scanning and positioning data provided by the embodiment of this application. Figure 2 only shows the process of determining the first correction data. As Figure 2As shown, the first correction data can be obtained through two - stage calculations. In the first - stage calculation, the first scaling correction value is calculated based on the first coordinate data X and the first scaling amount data MX, and the first rotation correction value is calculated based on the second coordinate data Y and the first rotation amount data RX. In the second - stage calculation, the first scaling correction value, the first rotation correction value, and the first offset amount data SX are added together to obtain the first correction data. Similarly, the method for calculating the second correction data is the same as the method for determining the first correction data.

[0081] The specific calculation processes of the first correction data and the second correction data can be seen in the following formulas:

[0082] Xc1 = MX * X+RX * Y + SX;

[0083] Yc1 = MY * Y+RY * X + SY;

[0084] Where X is the first coordinate data, MX is the first scaling amount data, RX is the first rotation amount data, Y is the second coordinate data, SX is the first offset amount data, Xc1 is the first correction data, MY is the second scaling amount data, RY is the second rotation amount data, SY is the second offset amount data, and Yc1 is the second correction data.

[0085] In the embodiments of the present application, after obtaining the first correction data and the second correction data, the first correction data and the second correction data can be used as the correction scan positioning data. Through the above - mentioned correction algorithm based on the scaling calculation multiplier, the rotation calculation multiplier, and the first - order correction calculation adder, the scan positioning data can be corrected quickly and accurately, improving the efficiency and accuracy of the electron beam scan positioning.

[0086] As another possible implementation, when the scan positioning data further includes: the first trapezoidal amount data and the second trapezoidal amount data; the digital circuit further includes: the trapezoid calculation multiplier and the second - order correction calculation adder.

[0087] After obtaining the first correction data and the second correction data through A3, S102 performs correction calculations on the scan positioning data based on the digital circuit to obtain the corrected scan positioning data, which further includes:

[0088] A5: Based on the trapezoid calculation multiplier, perform cross - term multiplication calculations on the first coordinate data and the second coordinate data to obtain the coordinate cross - value data.

[0089] A6: Based on the trapezoid calculation multiplier, perform trapezoid multiplication calculations on the first trapezoidal amount data and the coordinate cross - value data to obtain the first trapezoid correction value; based on the trapezoid calculation multiplier, perform trapezoid multiplication calculations on the second trapezoidal amount data and the coordinate cross - value data to obtain the second trapezoid correction value.

[0090] A7: Based on the second-order correction calculation adder, calculate the first correction data and the first trapezoidal correction value to obtain the third correction data; based on the second-order correction calculation adder, calculate the second correction data and the second trapezoidal correction value to obtain the fourth correction data.

[0091] A8: Determine the correction scan positioning data according to the third correction data and the fourth correction data.

[0092] See Figure 3 , Figure 3 which is a logical schematic diagram of another correction calculation of the scan positioning data provided by the embodiment of the present application. Figure 3 Only the process of determining the third correction data is shown in Figure 3 As shown in

[0093] The third correction data can be obtained through three-level calculations. Among them, the first-level calculation obtains the first scaling correction value. The calculation of the first rotation correction value is the same as above. The first-level calculation also performs a cross-term multiplication calculation on the first coordinate data X and the second coordinate data to obtain the coordinate cross-value data. The second-level calculation obtains the first correction data, which is the same as above. The second-level calculation also performs a trapezoidal multiplication calculation on the first trapezoidal quantity data and the coordinate cross-value data to obtain the first trapezoidal correction value. The third-level calculation is to calculate the first correction data and the first trapezoidal correction value to obtain the third correction data. The present application does not limit the specific order of the above calculation steps. Among them, the calculations at the same level can be executed simultaneously or in batches, and the calculations at the next level can only be performed after all the results of the calculations at the previous level are obtained. Similarly, the method of calculating the fourth correction data is the same as the method of calculating the third correction data.

[0093] The specific processes of calculating the third correction data and the fourth correction data can be seen in the following formulas:

[0094] Xc2 = MX * X + RX * Y + TX * X * Y + SX;

[0095] Yc2 = MY * Y + RY * X + TY * X * Y + SY;

[0096] Among them, Xc2 is the third correction data, Yc2 is the fourth correction data, TX is the first trapezoidal quantity data, and TY is the second trapezoidal quantity data.

[0097] It can be understood that, based on the calculation of the first correction data and the second correction data, the embodiments of the present application further calculate the trapezoidal correction value, and perform an addition operation in combination with the trapezoidal correction value to obtain the third correction data and the fourth correction data. Therefore, the third correction data and the fourth correction data can be used as the correction scan positioning data. Through the correction algorithm based on the scaling calculation multiplier, the rotation calculation multiplier, the first-order correction calculation adder, the trapezoidal calculation multiplier, and the second-order correction calculation adder, the accuracy of the correction scan positioning data can be further improved, and the accuracy of the electron beam scanning positioning can be improved.

[0098] As a possible implementation manner, after determining the analog signal corresponding to the correction scan positioning data in S103, a method for scanning and positioning an electron beam provided by the present application further includes:

[0099] Preprocess the analog signal, and the preprocessed analog signal is used to complete the scanning and positioning control of the electron beam. The preprocessing includes one or more of the following: filtering processing, current-voltage conversion processing, and signal amplification processing.

[0100] It can be understood that after the present application obtains the analog signal, it will preprocess the analog signal. Through one or more of filtering processing, current-voltage conversion processing, and signal amplification processing, the preprocessed analog signal can more accurately complete the scanning and positioning control of the electron beam.

[0101] See Figure 4 , Figure 4 which is a schematic structural diagram of a scanning and positioning device for an electron beam provided by an embodiment of the present application. The device includes an acquisition unit 401, a correction unit 402, a determination unit 403, and a control unit 404.

[0102] The acquisition unit 401 is configured to acquire the scanning and positioning data of the electron beam in real time;

[0103] The correction unit 402 is configured to perform correction calculation on the scanning and positioning data based on a digital circuit to obtain the correction scan positioning data;

[0104] The determination unit 403 is configured to determine the analog signal corresponding to the correction scan positioning data;

[0105] The control unit 404 is configured to complete the scanning and positioning control of the electron beam according to the analog signal.

[0106] Obtain the scanning and positioning data of the electron beam in real time; based on the digital circuit, perform correction calculations on the scanning and positioning data to obtain the corrected scanning and positioning data; determine the analog signal corresponding to the corrected scanning and positioning data; and complete the scanning and positioning control of the electron beam according to the analog signal. It can be seen that through the above method, the corrected scanning and positioning data can be quickly obtained by performing correction operations based on the digital circuit. Compared with the scheme of using an analog circuit to correct the scanning and positioning signal, there is no need for complex analog circuit design, reducing the influence of environmental noise caused by complex analog circuit design, and improving the efficiency and accuracy of the scanning and positioning of the electron beam.

[0107] As a possible implementation manner, the scanning and positioning data includes first coordinate data, second coordinate data, first scaling amount data, second scaling amount data, first rotation amount data, second rotation amount data, first offset amount data, and second offset amount data; the digital circuit includes: a scaling calculation multiplier, a rotation calculation multiplier, and a first-order correction calculation adder;

[0108] The correction unit includes:

[0109] The scaling calculation sub-unit is used to perform scaling multiplication calculations on the first coordinate data and the first scaling amount data based on the scaling calculation multiplier to obtain a first scaling correction value; and perform scaling multiplication calculations on the second coordinate data and the second scaling amount data based on the scaling calculation multiplier to obtain a second scaling correction value;

[0110] The rotation calculation sub-unit is used to perform rotation multiplication calculations on the second coordinate data and the first rotation amount data based on the rotation calculation multiplier to obtain a first rotation correction value; and perform rotation multiplication calculations on the first coordinate data and the second rotation amount data based on the rotation calculation multiplier to obtain a second rotation correction value;

[0111] The addition calculation sub-unit is used to perform addition calculations on the first scaling correction value, the first rotation correction value, and the first offset amount data based on the first-order correction calculation adder to obtain a first correction data; and perform addition calculations on the second scaling correction value, the second rotation correction value, and the second offset amount data based on the first-order correction calculation adder to obtain a second correction data;

[0112] The determination sub-unit is used to determine the corrected scanning and positioning data according to the third correction data and the fourth correction data.

[0113] As a possible implementation manner, the scanning and positioning data further includes: first trapezoid amount data and second trapezoid amount data; the digital circuit further includes: a trapezoid calculation multiplier, a second-order correction calculation adder; the correction unit further includes:

[0114] A trapezoid calculation sub - unit, configured to calculate the first coordinate data and the second coordinate data based on the trapezoid calculation multiplier to obtain coordinate cross - value data;

[0115] The trapezoid calculation sub - unit is further configured to calculate the first trapezoid correction value based on the trapezoid calculation multiplier for the first trapezoid quantity data and the coordinate cross - value data; calculate the second trapezoid correction value based on the trapezoid calculation multiplier for the second trapezoid quantity data and the coordinate cross - value data;

[0116] The addition calculation sub - unit is further configured to calculate the third correction data based on the second - order correction calculation adder for the first correction data and the first trapezoid correction value; calculate the fourth correction data based on the second - order correction calculation adder for the second correction data and the second trapezoid correction value;

[0117] The determination sub - unit is further configured to determine the correction scanning positioning data according to the third correction data and the fourth correction data.

[0118] As a possible implementation manner, the device further includes:

[0119] A pre - processing unit, configured to pre - process the analog signal, and the pre - processed analog signal is used to complete the scanning positioning control of the electron beam. The pre - processing includes one or more of the following: filtering processing, current - voltage conversion processing, and signal amplification processing.

[0120] As a possible implementation manner, the control unit includes:

[0121] A determination sub - unit, configured to determine the deflection current and / or deflection voltage according to the analog signal;

[0122] A control sub - unit, configured to control the deflection of the electron beam deflector according to the deflection current and / or deflection voltage to complete the scanning positioning control of the electron beam.

[0123] This application also provides a scanning positioning device for an electron beam, which may include a memory and a processor. When the processor calls the computer program stored in the memory, the steps provided in the above - mentioned embodiments can be implemented. Of course, the device may further include various network interfaces, power supplies and other components.

[0124] It should be noted that the scanning positioning device for an electron beam provided in the embodiments of this application has the technical effects of any one of the above - mentioned embodiments, and the embodiments of this application will not be elaborated herein.

[0125] The present application also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed, the steps provided in the above embodiments can be implemented. The storage medium may include various media capable of storing program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disc.

[0126] It should be noted that the computer-readable storage medium provided in the embodiments of the present application has the technical effects of any one of the above embodiments, and the embodiments of the present application will not be elaborated herein.

[0127] In the present specification, the various embodiments are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts among the various embodiments can be referred to each other.

[0128] Those skilled in the art can understand that the flowchart shown in the figure is only an example in which the embodiments of the present application can be implemented, and the scope of application of the embodiments of the present application is not limited by any aspect of the flowchart.

[0129] In several embodiments provided by the present application, it should be understood that the disclosed methods, devices, and equipment can be implemented in other ways. For example, the device embodiments described above are only illustrative. For example, the division of the units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed mutual coupling or direct coupling or communication connection may be through some communication interfaces. The indirect coupling or communication connection of the device or unit can be in an electrical, mechanical, or other form.

[0130] The units described as separate components may or may not be physically separated. The components shown as units may or may not be physical units, that is, they may be located in one place, or may be distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment. In addition, the functional units in the various embodiments of the present application can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit.

[0131] When the above-mentioned functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of this application. The foregoing storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (ROM, Read-Only Memory), random access memories (RAM, Random Access Memory), magnetic disks, or optical discs that can store program codes.

[0132] The above description of the disclosed embodiments enables those skilled in the art to implement or use this application. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application will not be limited to the embodiments shown herein, but rather will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A method for scanning and positioning an electron beam, characterized in that, The method includes: Obtaining the scanning and positioning data of the electron beam in real time; Based on a digital circuit, performing correction calculation on the scanning and positioning data to obtain corrected scanning and positioning data; Determining the analog signal corresponding to the corrected scanning and positioning data; Completing the scanning and positioning control of the electron beam according to the analog signal.

2. The method according to claim 1, characterized in that, The scanning and positioning data includes first coordinate data, second coordinate data, first scaling amount data, second scaling amount data, first rotation amount data, second rotation amount data, first offset amount data, and second offset amount data; the digital circuit includes: a scaling calculation multiplier, a rotation calculation multiplier, and a first-order correction calculation adder; Then, based on the digital circuit, performing correction calculation on the scanning and positioning data to obtain corrected scanning and positioning data, including: Based on the scaling calculation multiplier, performing scaling multiplication calculation on the first coordinate data and the first scaling amount data to obtain a first scaling correction value; based on the scaling calculation multiplier, performing scaling multiplication calculation on the second coordinate data and the second scaling amount data to obtain a second scaling correction value; Based on the rotation calculation multiplier, performing rotation multiplication calculation on the second coordinate data and the first rotation amount data to obtain a first rotation correction value; based on the rotation calculation multiplier, performing rotation multiplication calculation on the first coordinate data and the second rotation amount data to obtain a second rotation correction value; Based on the first-order correction calculation adder, performing addition calculation on the first scaling correction value, the first rotation correction value, and the first offset amount data to obtain a first correction data; based on the first-order correction calculation adder, performing addition calculation on the second scaling correction value, the second rotation correction value, and the second offset amount data to obtain a second correction data; Determining the corrected scanning and positioning data according to the first correction data and the second correction data.

3. The method according to claim 2, wherein The scanning and positioning data further includes: first trapezoidal amount data and second trapezoidal amount data; the digital circuit further includes: a trapezoidal calculation multiplier and a second-order correction calculation adder; Then, after obtaining the first correction data and the second correction data, based on the digital circuit, performing correction calculation on the scanning and positioning data to obtain corrected scanning and positioning data, further including: Based on the trapezoidal calculation multiplier, performing cross-term multiplication calculation on the first coordinate data and the second coordinate data to obtain coordinate cross-value data; Based on the trapezoidal calculation multiplier, performing trapezoidal multiplication calculation on the first trapezoidal amount data and the coordinate cross-value data to obtain a first trapezoidal correction value; based on the trapezoidal calculation multiplier, performing trapezoidal multiplication calculation on the second trapezoidal amount data and the coordinate cross-value data to obtain a second trapezoidal correction value; Based on the second-order correction calculation adder, performing calculation on the first correction data and the first trapezoidal correction value to obtain a third correction data; based on the second-order correction calculation adder, performing calculation on the second correction data and the second trapezoidal correction value to obtain a fourth correction data; Determining the corrected scanning and positioning data according to the third correction data and the fourth correction data.

4. The method according to claim 1, characterized in that, After determining the analog signal corresponding to the calibrated scanning positioning data, the method further includes: Preprocessing the analog signal, and the preprocessed analog signal is used to complete the scanning positioning control of the electron beam. The preprocessing includes one or more of the following: filtering processing, current-voltage conversion processing, and signal amplification processing.

5. The method according to claim 1, characterized in that Completing the scanning positioning control of the electron beam according to the analog signal includes: Determining the deflection current and / or deflection voltage according to the analog signal; Controlling the deflection of the electron beam deflector according to the deflection current and / or deflection voltage to complete the scanning positioning control of the electron beam.

6. An electronic beam scanning and positioning device, characterized in that The device includes: An acquisition unit, configured to acquire the scanning positioning data of the electron beam in real time; A calibration unit, configured to perform calibration calculation on the scanning positioning data based on a digital circuit to obtain calibrated scanning positioning data; A determination unit, configured to determine the analog signal corresponding to the calibrated scanning positioning data; A control unit, configured to complete the scanning positioning control of the electron beam according to the analog signal.

7. The device according to claim 6, characterized in that, The scanning positioning data includes first coordinate data, second coordinate data, first scaling amount data, second scaling amount data, first rotation amount data, second rotation amount data, first offset amount data, and second offset amount data; The digital circuit includes: a scaling calculation multiplier, a rotation calculation multiplier, and a first-order calibration calculation adder; The calibration unit includes: A scaling calculation sub-unit, configured to perform scaling multiplication calculation on the first coordinate data and the first scaling amount data based on the scaling calculation multiplier to obtain a first scaling calibration value; and perform scaling multiplication calculation on the second coordinate data and the second scaling amount data based on the scaling calculation multiplier to obtain a second scaling calibration value; A rotation calculation sub-unit, configured to perform rotation multiplication calculation on the second coordinate data and the first rotation amount data based on the rotation calculation multiplier to obtain a first rotation calibration value; and perform rotation multiplication calculation on the first coordinate data and the second rotation amount data based on the rotation calculation multiplier to obtain a second rotation calibration value; An addition calculation sub-unit, configured to perform addition calculation on the first scaling calibration value, the first rotation calibration value, and the first offset amount data based on the first-order calibration calculation adder to obtain a first calibration data; and perform addition calculation on the second scaling calibration value, the second rotation calibration value, and the second offset amount data based on the first-order calibration calculation adder to obtain a second calibration data; A determination sub-unit, configured to determine the calibrated scanning positioning data according to the third calibration data and the fourth calibration data.

8. The device according to claim 7, wherein The scanning positioning data further includes: first trapezoidal amount data and second trapezoidal amount data; the digital circuit further includes: a trapezoidal calculation multiplier, a second-order calibration calculation adder; the calibration unit further includes: A trapezoidal calculation sub-unit, configured to perform calculation on the first coordinate data and the second coordinate data based on the trapezoidal calculation multiplier to obtain coordinate cross value data; The trapezoid calculation sub-unit is further configured to calculate, based on the trapezoid calculation multiplier, the first trapezoid quantity data and the coordinate cross value data to obtain a first trapezoid correction value; and calculate, based on the trapezoid calculation multiplier, the second trapezoid quantity data and the coordinate cross value data to obtain a second trapezoid correction value; The addition calculation sub-unit is further configured to calculate, based on the second-order correction calculation adder, the first correction data and the first trapezoid correction value to obtain third correction data; and calculate, based on the second-order correction calculation adder, the second correction data and the second trapezoid correction value to obtain fourth correction data; The determination sub-unit is further configured to determine the correction scanning positioning data according to the third correction data and the fourth correction data.

9. An electronic beam scanning and positioning device, characterized in that, Comprising: A memory for storing a computer program; A processor for executing the computer program stored in the memory to implement the steps of the electron beam scanning and positioning method according to any one of claims 1 to 5.

10. A computer-readable storage medium, on which a computer program is stored, characterized in that, The computer program is executed by the processor to implement the steps of the electron beam scanning and positioning method according to any one of claims 1 to 5.

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