Electronic-grade ammonia water purification and rectification equipment and rectification method

Abstract

The invention discloses electronic grade ammonia water purification rectification equipment and a rectification method, and relates to the technical field of rectification towers, the electronic grade ammonia water purification rectification equipment comprises an upper main tower, a lower main tower, a plurality of sealing assemblies, a top tower cylinder, a bottom tower cylinder, a wastewater pipe, a steam pipe and an output pipe, the bottom tower cylinder, the lower main tower, the upper main tower and the top tower cylinder are sequentially arranged from bottom to top; the bottom tower drum, the lower main tower, the upper main tower and the top tower drum are connected through sealing assemblies, an upper sealing plate is installed at the top of the top tower drum, a lower sealing plate is installed at the bottom of the bottom tower drum, the waste water pipe is connected to the lower portion of the lower sealing plate, the steam pipe is connected to the bottom tower drum, and the output pipe is connected to the upper portion of the upper sealing plate. A return pipe is communicated between the output pipe and the top tower drum, a plurality of support frames are arranged in the upper main tower and the lower main tower, a filler plate is arranged in each support frame, and the ammonia water is purified step by step and the doped solution is separated step by step by utilizing the characteristics that the boiling point of the ammonia water is low and the boiling point of the doped solution is high.

Description

Technical Field

[0001] The present invention relates to the technical field of distillation columns, and specifically to an electronic-grade ammonia water purification distillation device and a distillation method. Background Art

[0002] Electronic-grade ammonia water is a high-purity ammonia water dedicated to the electronic industry, such as semiconductor or integrated circuit manufacturing. It is mainly used in semiconductor manufacturing processes such as silicon wafer cleaning, photoresist removal, and wafer surface corrosion. It is often used in combination with hydrogen peroxide or hydrofluoric acid. Its electrical impurity content is extremely low to meet the stringent purity requirements of chemicals in electronic component manufacturing. Existing distillation columns use traditional rubber for sealing in terms of structure, which is prone to corrosion in a strong alkaline environment, affecting the quality of the purified ammonia water. Secondly, the temperature of the packing plates closer to the top of the distillation column is lower than that of the packing plates at the bottom, with a gradient decrease in temperature, resulting in a reduction in the distillation and purification efficiency of the distillation column. In addition, the distillation column needs to continuously consume a large amount of energy to maintain the temperature of steam vaporization, with low energy utilization rate. Summary of the Invention

[0003] The purpose of the present invention is to provide an electronic-grade ammonia water purification distillation device and a distillation method to solve the problems raised in the prior art.

[0004] To achieve the above purpose, the present invention provides the following technical solution: An electronic-grade ammonia water purification distillation device includes an upper main tower, a lower main tower, several sealing components, a top tower cylinder, a bottom tower cylinder, a waste water pipe, a steam pipe, and an output pipe. The bottom tower cylinder, the lower main tower, the upper main tower, and the top tower cylinder are arranged in sequence from bottom to top. The bottom tower cylinder, the lower main tower, the upper main tower, and the top tower cylinder are all connected through sealing components. An upper sealing plate is installed at the top of the top tower cylinder, and a lower sealing plate is installed at the bottom of the bottom tower cylinder. The waste water pipe is connected below the lower sealing plate, the steam pipe is connected to the bottom tower cylinder, the output pipe is connected above the upper sealing plate, and a reflux pipe is communicated between the output pipe and the top tower cylinder. Several support frames are arranged inside the upper main tower and the lower main tower, and each support frame is provided with a packing plate. The boiling point and evaporation point of liquid-phase ammonia water are low, while those of the doped solution are high. The steam flows upward in the distillation column, and the packing plate intercepts acid foams and particulate matters in the steam. The steam reaches the top of the distillation column and flows out through the output pipe, and is cooled by a heat dissipation pipe group in the output pipe. The high-boiling-point gas phase is first liquefied, and the doped solution liquid phase flows back into the distillation column through the reflux pipe. The low-boiling-point gas phase is the purified ammonia gas, and the ammonia water vapor is liquefied and transported from the output pipe to subsequent processes. The liquid phase of the refluxed doped solution is the original liquid phase, and the steam output from the steam pipe is the original gas phase. The original liquid phase flows downward along the rectification column and drops onto the Nth packing plate through the diversion of the deflector. It meets the original gas phase on the Nth packing plate. The cooled original liquid phase is reheated again. The low-boiling-point ammonia water solution in the original liquid phase is evaporated. The partially vaporized low-boiling-point ammonia water solution forms a new gas phase and rises with the original gas phase. The high-boiling-point impurity solution in the original gas phase is partially condensed. The partially condensed impurity solution forms a new liquid phase and descends with the original liquid phase. Through the rectification process, the ammonia water purity in the new gas phase is greater than that in the original gas phase, and the ammonia water concentration in the new liquid phase is less than that in the original liquid phase. The light components rise and the heavy components descend. Eventually, the ammonia water concentration in the newly generated liquid phase approaches zero, and the ammonia water concentration in the newly generated gas phase is close to 100%. Utilizing the characteristics of low boiling point of ammonia water and high boiling point of the doped solution, the ammonia water is purified step by step and the doped solution is separated step by step through the partial vaporization of the original liquid phase and the partial condensation of the original gas phase.

[0005] Furthermore, upper flanges and lower flanges are provided at the top and bottom of the upper main tower, lower main tower, top tower barrel and bottom tower barrel. The sealing assembly includes a rubber sealing ring and a spring sealing ring. The thickness of the inner ring of the spring sealing ring is less than that of the outer ring. An inclined edge is provided on each upper flange and lower flange. The upper flange and lower flange are in contact with the spring sealing ring. The rubber sealing ring is located on the outer ring of the spring sealing ring and is in sealing contact with the upper flange and lower flange. The upper flange and lower flange are connected by bolts and nuts. During the connection of the upper flange and lower flange by bolts and nuts, the rubber sealing ring and the spring sealing ring are simultaneously placed at the interface. The spring sealing ring is made of elastic metal. The inclined surfaces of the upper flange and lower flange squeeze the spring sealing ring, causing the spring sealing ring to slide and displace. The axis of the spring sealing ring is aligned with the axes of the upper flange and lower flange. The spring sealing ring is in close contact with the inclined surfaces of the upper flange and lower flange. The spring sealing ring is not easily corroded in a strong alkaline environment, increasing the connection tightness at the interface. The rubber sealing ring provides double sealing on the outer ring to prevent external dust from entering the interface, is more resistant to corrosion in a strong alkaline environment compared to directly using rubber sealing, enhances the tightness, and extends the service life.

[0006] Furthermore, a group of deflectors is provided below each support frame. The group of deflectors is arranged in a circumferential and evenly distributed manner. Each deflector is in contact with the inner wall of the upper main tower. Several winding coils are arranged in a circular and evenly distributed manner inside each support frame.

[0007] Furthermore, a rotating shaft is arranged between the interiors of the top tower barrel and the bottom tower barrel. The rotating shaft penetrates through each support frame and is rotatably connected to the support frame. A steam turbine is installed at the bottom of the rotating shaft. The height of the steam turbine is the same as that of the steam pipe. The top of the rotating shaft penetrates through the upper sealing plate. Magnets are arranged at positions corresponding to each support frame on the rotating shaft. The temperature of the packing plate closer to the tower top is lower than that of the packing plate at the tower bottom. The steam input into the steam pipe directly drives the steam turbine to rotate. The steam turbine drives the rotating shaft to rotate, and the magnets rotate synchronously. The magnetic induction lines of the magnets pass through each winding coil, and an oscillating induced magnetic field is generated in the winding coil through Lenz's law, thereby generating an induced current, causing the winding coil to generate heat, heating the support frame at the tower top, preventing the temperature attenuation at the tower top, and improving the efficiency of rectification and extraction.

[0008] Furthermore, a limiting column is arranged at the top of the upper sealing plate. A piston is arranged on the top of the upper sealing plate. The piston is slidably connected to the limiting column. An annular curve groove is formed inside the piston. A pin is arranged at the top of the rotating shaft. The pin is slidably installed in the curve groove.

[0009] Furthermore, a water pump body is also arranged at the top of the upper sealing plate. An inlet hole and an outlet hole are formed on the water pump body. The piston is slidably arranged in the water pump body. One-way valves are arranged at both the inlet hole and the outlet hole. A heat dissipation pipe group is connected to the inlet hole. A water suction pipe is connected to the outlet hole. The heat dissipation pipe group penetrates through the output pipe. The other end of the heat dissipation pipe group is connected to a circulation pipe. The rotating shaft drives the pin to rotate, and the pin drives the piston to slide up and down in the water pump body. The water in the water tank is pumped to the tower top. The output pipe is cooled through the heat dissipation pipe group to assist in the liquefaction of ammonia. The cooling water entering the circulation pipe quickly flows back to the water tank under the action of gravity. During the reflux process, air is sucked in through a capillary tube, causing the cooling water to generate dense bubbles, which helps the water to dissipate heat, reduces the density of the water, and makes the cooling water easier to pump and circulate.

[0010] Furthermore, a water tank is arranged on one side of the bottom tower barrel. A semiconductor plate is arranged in the middle of the water tank. The steam pipe penetrates through one side of the water tank close to the heating end of the semiconductor plate. The water suction pipe and the circulation pipe are located on one side of the water tank close to the cooling end of the semiconductor plate. A plurality of capillary tubes are arranged on the circulation pipe in a spiral shape. The semiconductor plate cools the cooling water, heats the water on the side of the steam pipe, and keeps the steam warm.

[0011] A rectification method applicable to an electronic-grade ammonia water purification and rectification device includes the following steps: S1: The mixed steam enters the rectification device and drives the steam turbine to rotate; S2: The mixed steam is rectified and purified through each layer of packing plate in the rectification device. The pure ammonia water flows out from the output pipe, and the doped solution is discharged from the waste water pipe; S3: The steam turbine drives the rotating shaft to rotate, and the rotating shaft drives the piston to slide up and down in the water pump body, driving the cooling water to circulate and flow, and cooling the output pipe.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. By utilizing the characteristics of low boiling point of ammonia water and high boiling point of the doped solution, the ammonia water is purified step by step and the doped solution is separated step by step through the way of partial vaporization of the original liquid phase and partial condensation of the original gas phase. 2. The spring seal ring is not easily corroded in a strong alkaline environment, increasing the connection tightness at the interface. The rubber seal ring provides double sealing on the outer circle to prevent external dust from entering the interface. Compared with directly using rubber sealing, it is more resistant to corrosion in a strong alkaline environment, enhances the tightness, and extends the service life. 3. The magnetic induction lines of the magnet pass through each winding coil, generating an oscillating induced magnetic field in the winding coil, and then generating an induced current, causing the winding coil to generate heat, heating the support frame at the top of the tower, preventing the temperature attenuation at the top of the tower, and improving the efficiency of rectification and extraction. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is the schematic diagram of the overall structure of the present invention Figure 1 ; Figure 2 is the schematic diagram of the overall structure of the present invention Figure 2 ; Figure 3 is the schematic diagram of the structure of the sealing assembly of the present invention; Figure 4 is the schematic diagram of the internal structure of the upper main tower of the present invention; Figure 5 is the schematic diagram of a partial structure of the present invention Figure 1 ; Figure 6 is the schematic diagram of a partial structure of the present invention Figure 2 ; Figure 7 is the schematic diagram of the structure of the piston of the present invention; Figure 8 is the schematic diagram of the structure of the circulation pipe of the present invention.

[0014] In the figure: 1. Upper main tower; 2. Lower main tower; 3. Sealing assembly; 4. Upper flange; 5. Lower flange; 6. Rubber seal ring; 7. Spring seal ring; 8. Top tower barrel; 9. Bottom tower barrel; 10. Waste water pipe; 11. Steam pipe; 12. Water tank; 13. Semiconductor plate; 14. Water suction pipe; 15. Circulation pipe; 16. Output pipe; 17. Return pipe; 18. Heat dissipation pipe group; 19. Upper sealing plate; 20. Lower sealing plate; 21. Support frame; 22. Packing plate; 23. Deflector plate; 24. Steam turbine; 25. Rotating shaft; 26. Magnet; 27. Pin; 28. Piston; 29. Water pump body; 30. Capillary tube. Detailed implementation manners

[0015] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0016] Embodiment: As Figures 1 - 8 shown, the present invention provides a technical solution. An electronic-grade ammonia water purification and rectification device includes an upper main tower 1, a lower main tower 2, several sealing components 3, a top tower barrel 8, a bottom tower barrel 9, a waste water pipe 10, a steam pipe 11, a water tank 12, and an output pipe 16. The bottom tower barrel 9, the lower main tower 2, the upper main tower 1, and the top tower barrel 8 are arranged in sequence from bottom to top. The bottom tower barrel 9, the lower main tower 2, the upper main tower 1, and the top tower barrel 8 are all connected by the sealing components 3. An upper sealing plate 19 is installed at the top of the top tower barrel 8, and a lower sealing plate 20 is installed at the bottom of the bottom tower barrel 9. The waste water pipe 10 is connected below the lower sealing plate 20, the steam pipe 11 is connected to the bottom tower barrel 9, the output pipe 16 is connected above the upper sealing plate 19, and a reflux pipe 17 is communicated between the output pipe 16 and the top tower barrel 8. Several support frames 21 are arranged inside the upper main tower 1 and the lower main tower 2. Each support frame 21 is provided with a packing plate 22. The boiling point of liquid-phase ammonia water is low, and the evaporation point is also low. The boiling point of the doped solution is high, and the evaporation point is also high. The steam flows upward in the rectification tower. The packing plate 22 intercepts acid foam and particulate matters in the steam. The steam reaches the top of the rectification tower and flows out through the output pipe 16, and is cooled by a heat dissipation pipe group 18 in the output pipe 16. The high-boiling-point gas phase is first liquefied, and the doped solution liquid phase flows back into the rectification tower through the reflux pipe 17. The low-boiling-point gas phase is purified ammonia gas. After the ammonia water vapor is liquefied, it is transported from the output pipe 16 to the subsequent process; The liquid phase of the refluxed doped solution is the original liquid phase, and the vapor output by the vapor pipe 11 is the original gas phase. The original liquid phase flows downward along the rectifying column and drops onto the Nth packing plate 22 through the diversion of the deflector 23. It meets the original gas phase on the Nth packing plate 22. The cooled original liquid phase is heated again, and the low-boiling ammonia aqueous solution in the original liquid phase is evaporated. The partially vaporized low-boiling ammonia aqueous solution forms a new gas phase and rises with the original gas phase. The high-boiling impurity solution in the original gas phase is partially condensed. The partially condensed impurity solution forms a new liquid phase and descends with the original liquid phase. Through the rectification process, the ammonia water purity in the new gas phase is greater than that in the original gas phase, and the ammonia water concentration in the new liquid phase is less than that in the original liquid phase. The light components rise, and the heavy components descend. Eventually, the ammonia water concentration in the newly generated liquid phase approaches zero, and the ammonia water concentration in the newly generated gas phase is close to 100%. Utilizing the characteristics of low boiling point of ammonia water and high boiling point of the doped solution, the ammonia water is purified step by step and the doped solution is separated step by step by means of partial vaporization of the original liquid phase and partial condensation of the original gas phase.

[0017] Upper main tower 1, lower main tower 2, top tower barrel 8 and bottom tower barrel 9 are provided with upper flanges 4 and lower flanges 5 at their tops and bottoms. The sealing assembly 3 includes a rubber sealing ring 6 and a spring sealing ring 7. The thickness of the inner ring of the spring sealing ring 7 is less than that of the outer ring. Each upper flange 4 and lower flange 5 are provided with bevels. The upper flange 4 and lower flange 5 are in contact with the spring sealing ring 7. The rubber sealing ring 6 is located on the outer ring of the spring sealing ring 7, and the rubber sealing ring 6 is in sealing contact with the upper flange 4 and lower flange 5. The upper flange 4 and lower flange 5 are connected by bolts and nuts. During the connection of the upper flange 4 and lower flange 5 by bolts and nuts, the rubber sealing ring 6 and the spring sealing ring 7 are placed at the interface simultaneously. The spring sealing ring 7 is made of elastic metal. The upper flange 4 and lower flange 5 squeeze the spring sealing ring 7 obliquely, causing the spring sealing ring 7 to slide and displace. The axis of the spring sealing ring 7 is aligned with the axes of the upper flange 4 and lower flange 5. The spring sealing ring 7 is in close contact with the bevels of the upper flange 4 and lower flange 5. The spring sealing ring 7 is not easily corroded in a strong alkaline environment, increasing the connection tightness at the interface. The rubber sealing ring 6 performs double sealing on the outer ring, preventing external dust from entering the interface, being more resistant to corrosion in a strong alkaline environment compared to directly using rubber sealing, enhancing the tightness and extending the service life.

[0018] A set of flow guiding plates 23 is arranged below each support frame 21. The set of flow guiding plates 23 is evenly distributed in a circular shape. Each flow guiding plate 23 is in contact with the inner wall of the upper main tower 1. Several winding coils are evenly distributed in a ring shape inside each support frame 21. A rotating shaft 25 is arranged between the inside of the top tower barrel 8 and the bottom tower barrel 9. The rotating shaft 25 passes through each support frame 21 and is rotatably connected to the support frame 21. A steam turbine 24 is installed at the bottom of the rotating shaft 25. The height of the steam turbine 24 is the same as the height of the steam pipe 11. The top of the rotating shaft 25 passes through the upper sealing plate 19. Magnets 26 are arranged at positions corresponding to each support frame 21 on the rotating shaft 25. The packing plate 22 closer to the top of the tower has a lower temperature than the packing plate 22 at the bottom of the tower. The steam input in the steam pipe 11 directly drives the steam turbine 24 to rotate. The steam turbine 24 drives the rotating shaft 25 to rotate. The magnets 26 rotate synchronously. The magnetic induction lines of the magnets 26 pass through each winding coil. An oscillating induced magnetic field is generated in the winding coil through Lenz's law, and then an induced current is generated, causing the winding coil to generate heat, heating the support frame 21 at the top of the tower, preventing the temperature decay at the top of the tower, and improving the efficiency of rectification and extraction.

[0019] Limit posts are arranged at the top of the upper sealing plate 19. A piston 28 is arranged at the top of the upper sealing plate 19. The piston 28 is slidably connected to the limit posts. An annular curve groove is opened inside the piston 28. A pin 27 is arranged at the top of the rotating shaft 25. The pin 27 is slidably installed in the curve groove. A water pump body 29 is also arranged at the top of the upper sealing plate 19. Water inlet holes and water outlet holes are opened on the water pump body 29. The piston 28 is slidably arranged in the water pump body 29. Check valves are arranged at both the water inlet hole and the water outlet hole. A heat dissipation pipe group 18 is connected to the water inlet hole. A water suction pipe 14 is connected to the water outlet hole. The heat dissipation pipe group 18 passes through the output pipe 16. The other end of the heat dissipation pipe group 18 is connected to a circulation pipe 15. A semiconductor plate 13 is arranged in the middle of the water tank 12. The steam pipe 11 passes through one side of the water tank 12 close to the heating end of the semiconductor plate 13. The water suction pipe 14 and the circulation pipe 15 are located on one side of the water tank 12 close to the cooling end of the semiconductor plate 13. Several capillary tubes 30 are arranged on the circulation pipe 15 in a spiral shape. The rotating shaft 25 drives the pin 27 to rotate. The pin 27 drives the piston 28 to slide up and down in the water pump body 29. The water in the water tank 12 is pumped to the top of the tower. The output pipe 16 is cooled through the heat dissipation pipe group 18 to assist in the liquefaction of ammonia. The cooling water entering the circulation pipe 15 quickly flows back to the water tank 12 under the action of gravity. Air is inhaled through the capillary tubes 30 during the reflux process, causing the cooling water to generate dense bubbles, which helps the water dissipate heat, reduces the density of the water, and makes the cooling water easier to pump and circulate. The semiconductor plate 13 cools the cooling water, heats the water on the side of the steam pipe 11, and keeps the steam warm.

[0020] Working principle of the present invention: The boiling point and evaporation point of liquid-phase ammonia water are low, while those of the doped solution are high. The steam flows upward in the rectifying column. The packing plate 22 intercepts acid foam and particulate matters in the steam. The steam reaches the top of the rectifying column and flows out through the output pipe 16, and is cooled by the heat dissipation pipe group 18 in the output pipe 16. The high-boiling-point gas phase is first liquefied, and the doped solution liquid phase flows back into the rectifying column through the reflux pipe 17. The low-boiling-point gas phase is the purified ammonia gas. After the ammonia water vapor is liquefied, it is transported from the output pipe 16 to the subsequent process.

[0021] The refluxed doped solution liquid phase is the original liquid phase, and the steam output from the steam pipe 11 is the original gas phase. The original liquid phase flows downward along the rectifying column, and drips onto the Nth packing plate 22 through the diversion of the guide plate 23. It meets the original gas phase on the Nth packing plate 22. The cooled original liquid phase is heated again. The low-boiling-point ammonia water solution in the original liquid phase is evaporated. The partially vaporized low-boiling-point ammonia water solution forms a new gas phase and rises with the original gas phase. The high-boiling-point impurity solution in the original gas phase is partially condensed. The partially condensed impurity solution forms a new liquid phase and descends with the original liquid phase. Through the rectifying process, the ammonia water purity in the new gas phase is greater than that in the original gas phase, and the ammonia water concentration in the new liquid phase is less than that in the original liquid phase. The light components rise and the heavy components descend. Finally, the ammonia water concentration in the newly generated liquid phase approaches zero, and the ammonia water concentration in the newly generated gas phase is close to 100%. By utilizing the characteristics of low boiling point of ammonia water and high boiling point of the doped solution, the ammonia water is purified step by step by partial vaporization of the original liquid phase and partial condensation of the original gas phase, and the doped solution is separated step by step.

[0022] During the process of connecting the upper flange 4 and the lower flange 5 with bolts and nuts, the rubber sealing ring 6 and the spring sealing ring 7 are placed at the interface simultaneously. The spring sealing ring 7 is made of elastic metal. The upper flange 4 and the lower flange 5 squeeze the spring sealing ring 7 obliquely, causing the spring sealing ring 7 to have a sliding displacement. The axis of the spring sealing ring 7 is aligned with the axes of the upper flange 4 and the lower flange 5. The spring sealing ring 7 is in close contact with the inclined surfaces of the upper flange 4 and the lower flange 5. The spring sealing ring 7 is not easily corroded in a strong alkaline environment, increasing the connection tightness at the interface. The rubber sealing ring 6 performs double sealing on the outer circle, preventing external dust from entering the interface, being more resistant to corrosion in a strong alkaline environment compared with directly using rubber sealing, enhancing the tightness and extending the service life.

[0023] The temperature of the packing plate 22 closer to the top of the tower is lower than that of the packing plate 22 at the bottom of the tower. The steam input into the steam pipe 11 directly drives the turbine 24 to rotate. The turbine 24 drives the rotating shaft 25 to rotate, and the magnet 26 rotates synchronously. The magnetic induction lines of the magnet 26 pass through each winding coil, causing an oscillating induced magnetic field to be generated in the winding coil through Lenz's law, and then an induced current is generated, causing the winding coil to generate heat, heating the support frame 21 at the top of the tower, preventing the temperature attenuation at the top of the tower, and improving the rectifying and extraction efficiency.

[0024] The rotating shaft 25 drives the pin 27 to rotate. The pin 27 drives the piston 28 to slide up and down in the water pump body 29. The water in the water tank 12 is pumped to the top of the tower. The output pipe 16 is cooled by the heat dissipation pipe group 18 to assist in the liquefaction of ammonia. The cooling water entering the circulation pipe 15 quickly returns to the water tank 12 under the action of gravity. During the return process, air is inhaled through the capillary tube 30, making the cooling water generate dense bubbles, which helps the water dissipate heat, reduces the density of the water, and makes the cooling water easier to pump and circulate. The semiconductor plate 13 cools the cooling water, heats the water on the side of the steam pipe 11, and insulates the steam.

[0025] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be construed as limiting the claimed rights.

Claims

1. An electronic-grade ammonia water purification and rectification device, characterized in that: It includes an upper main tower (1), a lower main tower (2), several sealing components (3), a top tower barrel (8), a bottom tower barrel (9), a wastewater pipe (10), a steam pipe (11) and an output pipe (16). The bottom tower barrel (9), the lower main tower (2), the upper main tower (1) and the top tower barrel (8) are arranged in sequence from bottom to top. The bottom tower barrel (9), the lower main tower (2), the upper main tower (1) and the top tower barrel (8) are all connected by the sealing components (3). An upper sealing plate (19) is installed at the top of the top tower barrel (8), and a lower sealing plate (20) is installed at the bottom of the bottom tower barrel (9). The wastewater pipe (10) is connected below the lower sealing plate (20), the steam pipe (11) is connected to the bottom tower barrel (9), and the output pipe (16) is connected above the upper sealing plate (19). A reflux pipe (17) is communicated between the output pipe (16) and the top tower barrel (8). Several support frames (21) are arranged inside both the upper main tower (1) and the lower main tower (2), and a packing plate (22) is provided in each support frame (21).

2. The purification rectification equipment for electronic-grade ammonia water according to claim 1, characterized in that: Upper flanges (4) and lower flanges (5) are provided at the top and bottom of the upper main tower (1), the lower main tower (2), the top tower barrel (8) and the bottom tower barrel (9). The sealing component (3) includes a rubber sealing ring (6) and a spring sealing ring (7). The thickness of the inner ring of the spring sealing ring (7) is less than that of the outer ring. An inclined edge is provided on each upper flange (4) and lower flange (5). The upper flange (4) and the lower flange (5) are in contact with the spring sealing ring (7). The rubber sealing ring (6) is located on the outer ring of the spring sealing ring (7), and the rubber sealing ring (6) is in sealing contact with the upper flange (4) and the lower flange (5). The upper flange (4) and the lower flange (5) are connected by bolts and nuts.

3. An electronic-grade ammonia purification rectification device according to claim 1, characterized in that: A group of flow guiding plates (23) is provided below each support frame (21). A group of the flow guiding plates (23) is evenly distributed in a circumferential shape. Each flow guiding plate (23) is in contact with the inner wall of the upper main tower (1). Several winding coils are evenly distributed in a ring shape inside each support frame (21).

4. An electronic-grade ammonia water purification and rectification device according to claim 3, characterized in that: A rotating shaft (25) is provided between the inside of the top tower barrel (8) and the bottom tower barrel (9). The rotating shaft (25) penetrates through each support frame (21), and the rotating shaft (25) is rotatably connected to the support frame (21). A steam turbine (24) is installed at the bottom of the rotating shaft (25). The height of the steam turbine (24) is the same as the height of the steam pipe (11). The top of the rotating shaft (25) penetrates through the upper sealing plate (19), and magnets (26) are provided at positions corresponding to each support frame (21) on the rotating shaft (25).

5. An electronic-grade ammonia purification rectification device according to claim 4, characterized in that: Limit columns are provided at the top of the upper sealing plate (19). A piston (28) is provided at the top of the upper sealing plate (19). The piston (28) is slidably connected to the limit columns. An annular curve groove is formed inside the piston (28). A pin (27) is provided at the top of the rotating shaft (25), and the pin (27) is slidably installed in the curve groove.

6. An electronic-grade ammonia purification rectification device according to claim 5, characterized in that: A water pump body (29) is further provided at the top of the upper sealing plate (19). An inlet hole and an outlet hole are formed in the water pump body (29). The piston (28) is slidably arranged in the water pump body (29). Check valves are arranged at both the inlet hole and the outlet hole. A heat dissipation pipe group (18) is connected to the inlet hole, and a water suction pipe (14) is connected to the outlet hole. The heat dissipation pipe group (18) penetrates through the output pipe (16), and the other end of the heat dissipation pipe group (18) is connected to a circulation pipe (15).

7. An electronic-grade ammonia purification rectification device according to claim 6, characterized in that: A water tank (12) is arranged on one side of the bottom tower cylinder (9). A semiconductor plate (13) is arranged in the middle of the water tank (12). The steam pipe (11) penetrates through one side of the water tank (12) close to the heating end of the semiconductor plate (13). The water suction pipe (14) and the circulation pipe (15) are located on one side of the water tank (12) close to the cooling end of the semiconductor plate (13). A plurality of capillary tubes (30) are arranged on the circulation pipe (15) in a spiral shape.

8. A rectification method applicable to an electronic-grade ammonia water purification rectification device according to any one of claims 1-7, characterized in that: It includes the following steps: S1: The mixed steam enters the rectification device and drives the steam turbine (24) to rotate; S2: The mixed steam is rectified and purified through each packing plate (22) in the rectification device. The pure ammonia water flows out from the output pipe (16), and the doped solution is discharged from the waste water pipe (10); S3: The steam turbine (24) drives the rotating shaft (25) to rotate. The rotating shaft (25) drives the piston (28) to slide up and down in the water pump body (29), driving the cooling water to circulate and cool the output pipe (16).

Images