High-pressure water jet filter and high-pressure water jet equipment

Abstract

The high-pressure water jet cutter filter comprises a filter body, a filter element assembly, a water inlet connector and a water outlet connector, a flow channel and a filter element mounting hole are formed in the filter body, the flow channel is communicated with the filter element mounting hole, the filter element assembly is detachably connected to the filter element mounting hole, the water inlet connector is connected to a water inlet of the flow channel, and the water outlet connector is connected to a water outlet of the flow channel. The water outlet connector is connected to the water outlet of the flow channel. When the filter element assembly needs to be maintained, the filter body does not need to be disassembled, and only the filter element assembly needs to be taken out from the filter element mounting hole to replace the filter element, so that the connection stability of the filter body and equipment can be ensured, and the problems of abrasion and leakage caused by frequent disassembly are avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and particularly relates to a high-pressure water jet filter and a high-pressure water jet device. Background Art

[0002] In the field of semiconductor manufacturing, there is currently a technology of applying a high-pressure water jet device to a wafer. For example, after wafer cutting, silicon chips and residues generated by cutting can be cleaned, or mold overflow attached to product pins before electroplating can be removed, etc.

[0003] The high-pressure water jet filter is a relatively important component in the high-pressure water jet device. After the high-pressure water jet filter is used for a period of time, the filter needs to be removed from the device, and then the filter screen is replaced and the filter is installed on the device again.

[0004] Currently, the filter is mainly connected to the device by threads. Since the filter screen needs to be frequently replaced, the disassembly and assembly of the filter are relatively frequent, which easily causes thread wear, resulting in problems such as poor sealing and leakage, and further increasing the maintenance cost.

[0005] Therefore, how to improve the service life of the high-pressure water jet filter to reduce the maintenance cost is a technical problem that needs to be solved by those skilled in the art at present. Summary of the Invention

[0006] The purpose of the present invention is to provide a high-pressure water jet filter and a high-pressure water jet device, which can effectively improve the service life of the high-pressure water jet filter, thereby reducing the maintenance cost.

[0007] To achieve the above purpose, the present invention provides the following technical solutions:

[0008] A high-pressure water jet filter includes: a filter body, a filter core assembly, a water inlet joint and a water outlet joint. A flow channel and a filter element mounting hole are provided in the filter body. The flow channel is communicated with the filter element mounting hole. The filter core assembly is detachably connected to the filter element mounting hole. The water inlet joint is connected to the water inlet of the flow channel, and the water outlet joint is connected to the water outlet of the flow channel.

[0009] In some technical solutions, the flow channel penetrates through the filter element mounting hole from the side of the filter element mounting hole.

[0010] In some technical solutions, the flow channel includes an inlet flow channel, an outlet flow channel and a filtering flow channel. The water inlet joint is connected to the water inlet of the inlet flow channel, the water outlet joint is connected to the water outlet of the outlet flow channel. The filtering flow channel communicates with the filter element mounting hole from the side of the filter element mounting hole. The axis of the filtering flow channel is parallel or coaxial with the axis of the inlet flow channel or the outlet flow channel.

[0011] In some technical solutions, the axes of the water inlet flow channel and the water outlet flow channel are parallel to each other or coaxial.

[0012] In some technical solutions, a plurality of filter element mounting holes are provided in the filter body, and the plurality of filter element mounting holes are distributed along the flow direction of the flow channel, and a filter element assembly is detachably connected in each filter element mounting hole.

[0013] In some technical solutions, the filter element assembly includes a filter element and a fastener, the filter element is detachably connected to one end of the fastener, and the fastener is sealingly connected to the filter element mounting hole.

[0014] In some technical solutions, a contraction channel is provided at one end of the filter element mounting hole away from its opening, the inner diameter of the contraction channel is smaller than the inner diameter of the flow channel, an internal thread is provided on the inner wall of the contraction channel, and an external thread that cooperates with the internal thread is provided at one end of the fastener extending into the filter body.

[0015] In some technical solutions, a filtering cavity is provided in the fastener, a filtering through groove communicating with the filtering cavity is provided on the side wall of the fastener, the filter element is a filter net, and the filter net is sleeved outside the fastener.

[0016] In some technical solutions, multiple sections of filter nets are provided outside the fastener and are distributed along the axial direction of the fastener, and a spacer ring is provided between two adjacent filter nets.

[0017] In some technical solutions, the filter body is of a cuboid structure, the water inlet of the flow channel is located on the first side surface of the filter body, the water outlet of the flow channel is located on the second side surface of the filter body, the first side surface and the second side surface are two opposite surfaces of the filter body, the opening of the filter element mounting hole is located on the third side surface of the filter body, the third side surface is a surface adjacent to the first side surface and the second side surface, or at least one filter element mounting hole is provided on the third side surface and the fourth side surface of the filter body respectively, and the fourth side surface is a surface opposite to the third side surface.

[0018] In some technical solutions, at least one filter mounting hole is provided on the filter body.

[0019] In some technical solutions, the axes of the flow channel, the filter element mounting hole and the filter mounting hole are perpendicular to each other.

[0020] A high-pressure water jet device includes the high-pressure water jet filter according to any one of the above.

[0021] Compared with the prior art, the above technical solutions have the following advantages:

[0022] A high-pressure water jet filter and a high-pressure water jet device provided by the present invention include: a filter body, a filter element assembly, a water inlet joint, and a water outlet joint. A flow channel and a filter element mounting hole are provided inside the filter body, and the flow channel is communicated with the filter element mounting hole. The filter element assembly is detachably connected to the filter element mounting hole. The water inlet joint is connected to the water inlet of the flow channel, and the water outlet joint is connected to the water outlet of the flow channel. When maintenance of the filter element assembly is required, it is not necessary to remove the filter body. It is only necessary to take out the filter element assembly from the filter element mounting hole for filter element replacement. Therefore, the connection stability between the filter body and the device can be ensured, and problems such as wear and leakage caused by frequent disassembly can be avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the provided drawings.

[0024] Figure 1 An exploded view of a high-pressure water jet filter provided by a specific embodiment of the present invention;

[0025] Figure 2 A three-dimensional structural schematic diagram of the filter body;

[0026] Figure 3 A front view structural schematic diagram of the filter body;

[0027] Figure 4 A top view structural schematic diagram of the filter body;

[0028] Figure 5 A structural schematic diagram of a high-pressure water jet filter provided by another specific embodiment of the present invention;

[0029] Figure 6 A structural schematic diagram of a fastener;

[0030] Figure 7 A structural schematic diagram of a filter net;

[0031] The reference numerals are as follows:

[0032] 10 is the filter body, 11 is the flow channel, 111 is the water inlet flow channel, 112 is the water outlet flow channel, 113 is the filtering flow channel, 12 is the filter element mounting hole, and 13 is the filter mounting hole;

[0033] 20 is the filter element assembly, 21 is the filter element, 211 is the filter net, 212 is the isolation ring, 22 is the fastener, and 221 is the filtering through groove;

[0034] 30 is the water inlet joint;

[0035] 40 is the water outlet joint. Specific implementation manners

[0036] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0037] Please refer to Figures 1 to 7 .

[0038] A high-pressure water jet filter provided by an embodiment of the present invention includes: a filter body 10, a filter element assembly 20, a water inlet joint 30, and a water outlet joint 40. A flow channel 11 and a filter element installation hole 12 are provided in the filter body 10. The flow channel 11 and the filter element installation hole 12 are communicated. The water inlet and outlet of the flow channel 11 and the filter element installation hole 12 are located at different positions on the filter body 10. During installation, the filter element assembly 20 is detachably connected to the filter element installation hole 12. The water inlet joint 30 is connected to the water inlet of the flow channel 11, and the water outlet joint 40 is connected to the water outlet of the flow channel 11. When maintenance of the filter element assembly 20 is required, it is not necessary to remove the filter body 10, that is, the water inlet joint 30 and the water outlet joint 40 do not need to be separated from the filter body 10. Only the filter element assembly 20 needs to be taken out of the filter element installation hole 12 for replacing the filter element 21. Therefore, the connection stability between the filter body 10 and the device can be ensured to avoid problems of wear and leakage caused by frequent disassembly. In addition, the water inlet joint 30 is detachably connected to the water inlet of the flow channel 11. The water inlet joint 30 is preferably threadedly connected to the water inlet of the flow channel 11. The water outlet joint 40 is detachably connected to the water outlet of the flow channel 11. The water outlet joint 40 is preferably threadedly connected to the water outlet of the flow channel 11. When replacing the filter element 21, the water inlet joint 30 and the water outlet joint 40 are not disassembled, and only the filter element assembly 20 needs to be removed from the side of the filter body 10.

[0039] In some embodiments, the flow channel 11 penetrates through the filter element installation hole 12 from the side of the filter element installation hole 12. For example, the filter element installation hole 12 and the flow channel 11 can be vertically arranged. During filtration, water enters the flow channel 11 from the water inlet of the flow channel 11, then enters the filter element assembly 20 from the side of the filter element assembly 20 for filtration, and then the filtered water is discharged by the filter element assembly 20. This arrangement is beneficial to taking out the filter element assembly 20 from the side of the filter body 10.

[0040] It should be noted that passing the flow channel 11 through the side of the filter element mounting hole 12 is just one arrangement. In addition, the flow channel 11 can also be coaxially arranged with the filter element mounting hole 12. For example, an inlet water channel and an outlet water channel are provided in the filter body 10. One end of the inlet water channel is connected to the inlet joint 30, and the other end of the inlet water channel is communicated with the filter element mounting hole 12, or the filter element mounting hole 12 is arranged inside the other end of the inlet water channel. The outlet water channel is communicated with the filter element mounting hole 12 from the side of the filter element mounting hole 12. Specifically, an inlet water channel extending in the left-right direction and an outlet water channel extending in the up-down direction can be provided in the filter body 10. The left end of the inlet water channel is connected to the inlet interface 30, and the filter element mounting hole 12 is communicated with the inlet water channel from the right end of the inlet water channel. The filter element assembly 20 can be installed in the filter element mounting hole 12 from the right end of the filter body 10. The outlet of the outlet water channel and the filter element mounting hole 12 are at different positions on the filter body 10. Therefore, when disassembling, the filter element assembly 20 can be taken out of the filter element mounting hole 12 without disassembling the inlet joint 30 and the outlet joint 40.

[0041] In some embodiments, the flow channel includes an inlet flow channel 111, an outlet flow channel 112, and a filtering flow channel 113. The three flow channels are communicated in sequence. The inlet joint 30 is connected to the water inlet of the inlet flow channel 111, the outlet joint 40 is connected to the water outlet of the outlet flow channel 112, and the filtering flow channel 113 is communicated with the filter element mounting hole 12 from the side of the filter element mounting hole 12. The axis of the filtering flow channel 113 is parallel or coaxial with the axis of the inlet flow channel 111 or the outlet flow channel 112. The axes of the inlet flow channel 111 and the outlet flow channel 112 are parallel or coaxial with each other. As Figure 1 shown, the axes of the inlet flow channel 111 and the outlet flow channel 112 are parallel to each other. Specifically, two filtering flow channels 113 arranged parallel to each other are provided in the filter body 10. One of the filtering flow channels 113 is coaxially arranged with the inlet flow channel 111, and the other filtering flow channel 113 is coaxially arranged with the outlet flow channel 112; as Figure 5 shown, the axes of the inlet flow channel 111 and the outlet flow channel 112 are coaxial, and the filtering flow channel 113 is parallel to the inlet flow channel 111 or the outlet flow channel 112. By arranging the inlet flow channel 111 and the outlet flow channel parallel to each other, or arranging the filtering flow channel 113 parallel to the inlet flow channel 111 or the outlet flow channel 112, the water can flow in a stepped manner in the flow channel 11, which can increase the flow resistance, and further ensure that the water can fully pass through the filter element assembly 20.

[0042] In some embodiments, a plurality of filter element mounting holes 12 are provided in the filter body 10, and the plurality of filter element mounting holes 12 are distributed along the flow direction of the flow channel 11, as Figure 1 and Figure 3As shown, two filter element mounting holes 12 are provided in the filter body 10. The filter element mounting holes 12 are blind holes, preferably perpendicular to the flow channel 11. A filter element assembly 20 is detachably connected in each filter element mounting hole 12. That is, the filter can achieve multi-stage filtration through multiple filter element assemblies 20, thereby ensuring the water quality of the outlet water and preventing the high-pressure nozzle from being frequently blocked and affecting its normal use.

[0043] In some embodiments, as Figure 3 shown, multiple filter element mounting holes 12 are respectively communicated with the inlet water flow channel 111 and the outlet water flow channel 112. That is, each filter element mounting hole 12 is communicated with the inlet water flow channel 111 and the outlet water flow channel 112. Specifically, after the water passes through the left section of the inlet water flow channel 111, it flows out from the filter element assembly 20 on the left side and is divided into two paths. One path passes through one of the filter flow channels 113, then passes through the filter element assembly 20 on the right side and is filtered, and finally flows out through the outlet water flow channel 112; the other path flows to the other filter flow channel 113, then passes through the filter element assembly 20 on the right side and is filtered, and flows out from the outlet water flow channel 112. The water flow direction can be referred to as Figure 1 indicated by the arrow in. For example Figure 3 shown, the inlet water flow channel 111 is disposed at the upper part of the filter body 10, and the outlet water flow channel 112 is disposed at the lower part of the filter body 10. Distributing the inlet water flow channel 111 and the outlet water flow channel 112 in this way can make the water flow in a stepped manner, increasing the filtration process of the water in the filter, thereby improving the filtration effect of the water.

[0044] In some embodiments, as Figure 5 shown, the axes of the inlet water flow channel 111 and the outlet water flow channel 112 are coaxial, the axis of the filter flow channel 113 is parallel to the inlet water flow channel 111. Two filter element mounting holes 12 are provided in the filter body 10. The left side of the lower end of the filter element mounting hole 12 on the left side is communicated with the right end of the inlet water flow channel 111, and the right side of the lower end of the filter element mounting hole 12 on the right side is communicated with the left end of the outlet water flow channel 112. Both ends of the filter flow channel 113 are respectively communicated with the side parts of the two filter element mounting holes 12. The water flow direction is as Figure 5 indicated by the arrow in. The filter element assembly 20 can be disassembled and assembled from the upper end of the filter body 10.

[0045] In some embodiments, the filter element assembly 20 includes a filter element 21 and a fastener 22. The filter element 21 is detachably connected to one end of the fastener 22 to facilitate the replacement of the filter element 21 after the filter element assembly 20 is removed. The fastener 22 is sealingly connected at the filter element mounting hole 12. The fastener 22 is preferably a threaded part. A threaded hole cooperating with the threaded part is provided at the opening of the filter element mounting hole 12. In addition, a sealing ring can be provided between the threaded part and the filter body 10 to improve the sealing performance.

[0046] In some embodiments, as Figure 5As shown, at one end of the filter element installation hole 12 away from its opening, there is a contraction channel 121. The inner diameter of the contraction channel 121 is smaller than that of the flow channel 11. When water passes through the contraction channel, due to the decrease in the inner diameter, the water pressure and flow rate will increase. The inner wall of the contraction channel 121 is provided with internal threads, and one end of the fastener 22 extending into the filter body 10 is provided with external threads that cooperate with the internal threads. By threadedly connecting one end of the fastener 22 inside the filter body 10, the installation stability of the filter element assembly 20 can be effectively improved.

[0047] In some embodiments, as Figure 6 shown, the fastener 22 is provided with a filtering cavity, that is, the fastener 22 is a hollow structure. The side wall of the fastener 22 is provided with a filtering through slot 221 communicating with the filtering cavity. The filter element 21 is a filter net 211, and the filter net 211 is sleeved outside the fastener 22, as Figure 5 and Figure 6 shown. After the water passes through the inlet flow channel 111, it enters the filtering cavity from the lower end of the fastener 22, and then only after passing through the filtering through slot 221, it flows out through the filter net 211. As Figure 1 and Figure 6 shown, the water can enter the filtering cavity from behind the filter net 211 and the filtering through slot 221, and then flow out of the filtering assembly 21 through the filtering through slot 221 and the filter net 211. That is, the filtering assembly 21 provided by the present invention can achieve two-way filtering.

[0048] In some embodiments, as Figure 7 shown, there are multiple filter nets 211 distributed along the axial direction of the fastener 22 outside the fastener 22, and a spacer ring 212 is provided between two adjacent filter nets 211. As Figure 1 and Figure 7 shown, the positions of the filter nets 211 correspond to those of the flow channel 11, and spacer rings are provided at positions where the filter nets 211 do not correspond to the flow channel 11. This structure can reduce the use of the filter nets 211.

[0049] In some embodiments, the filter body 10 is a cuboid structure. The water inlet of the flow channel 11 is located on the first side surface of the filter body 10, and the water outlet of the flow channel 11 is located on the second side surface of the filter body 10. The first side surface and the second side surface are two opposite surfaces of the filter body 10. The opening of the filter element installation hole 12 is located on the third side surface of the filter body 10, and the third side surface is a surface adjacent to the first side surface and the second side surface. As Figure 1As shown, the water inlet of the flow channel 11 is located at the upper position of the left side surface of the filter body 10, the water outlet of the flow channel 11 is located at the lower position of the right side surface of the filter body 10, and the opening of the filter element installation hole 12 is located on the upper surface of the filter body 10. Alternatively, at least one filter element installation hole 12 is provided on the third side surface and the fourth side surface of the filter body 10 respectively, and the fourth side surface is the side opposite to the third side surface. For example, one filter element installation hole 12 can be provided on the upper surface of the filter body 10, and one filter element installation hole 12 can be provided on the lower surface of the filter body 10, and the two filter element installation holes 12 are distributed staggeredly. For example, the axes of the two filter element installation holes 12 are parallel to each other, but the openings face in opposite directions.

[0050] In specific applications, the corresponding filter element installation hole 12 can be selected according to the installation environment to connect the filter element assembly 20, and the other unnecessary filter element installation holes 12 can be blocked by connecting the cover plate. For example, when there is only installation space on the upper surface of the filter body 10, one or more filter element assemblies 20 can be installed on the upper surface of the filter body 10, and the other filter element installation holes 12 are blocked; when there is installation space on both the upper surface and the lower surface of the filter body 10, one filter element assembly 20 can be connected to the upper surface and the lower surface of the filter body 10 respectively.

[0051] In some embodiments, at least one filter installation hole 13 is provided on the filter body 10, such as Figure 1 As shown, two filter installation holes 13 are provided on the filter body 10, and the two filter installation holes 13 are distributed at positions between the two filter element installation holes 12, or can also be distributed at the diagonal positions of the filter body 10. For example, one filter installation hole 13 is provided at the lower left position and the upper right position in Figure 1 to ensure the installation stability of the filter body 10.

[0052] In some embodiments, the axes of the flow channel 11, the filter element installation hole 12, and the filter installation hole 13 are perpendicular to each other. As Figure 1 shown, the flow channel 11 extends along the left-right direction of the filter body 10, the filter element installation hole 12 extends along the up-down direction of the filter body 10, and the filter installation hole 13 extends along the front-back direction of the filter body 10. That is, the flow channel 11, the filter element installation hole 12, and the filter installation hole 13 are arranged in different directions, which can avoid affecting each other during disassembly and assembly, thereby improving the convenience of disassembly and assembly.

[0053] The embodiment of the present invention also provides a high-pressure water jet device, including the high-pressure water jet filter provided in any one of the above embodiments. The high-pressure water jet device can be applied to the cutting operation or cleaning operation of wafers. For the beneficial effects of the high-pressure water jet device, reference can be made to the above high-pressure water jet filter, and details will not be described here.

[0054] It should be noted that in this specification, relational terms such as first and second are only used to distinguish one entity from several other entities, and do not necessarily require or imply any actual relationship or order between these entities.

[0055] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same or similar parts among the various embodiments, reference can be made to each other.

[0056] The above has introduced in detail a high-pressure water jet filter and a high-pressure water jet device provided by the present invention. Specific examples are used in this article to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the core idea of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A high-pressure water jet filter, characterized in that: include: A filter body (10), a filter core assembly (20), a water inlet joint (30) and a water outlet joint (40); a flow channel (11) and a filter core mounting hole (12) are provided in the filter body (10); the flow channel (11) and the filter core mounting hole (12) are in communication; the filter core assembly (20) is detachably connected to the filter core mounting hole (12); the water inlet joint (30) is connected to the water inlet of the flow channel (11); and the water outlet joint (40) is connected to the water outlet of the flow channel (11).

2. The high-pressure water jet filter according to claim 1, characterized in that: The flow channel (11) is connected to the filter element mounting hole (12) from a side portion of the filter element mounting hole (12).

3. The high-pressure water jet filter according to claim 2, characterized in that: The flow channel (11) comprises an inlet flow channel (111), an outlet flow channel (112) and a filter flow channel (113); the inlet joint (30) is connected to the water inlet of the inlet flow channel (111); the outlet joint (40) is connected to the water outlet of the outlet flow channel (112); the filter flow channel (113) is connected to the filter element mounting hole (12) from the side of the filter element mounting hole (12); and the axis of the filter flow channel (113) is parallel to or coaxial with the axis of the inlet flow channel (111) or the outlet flow channel (112).

4. The high-pressure water jet filter according to claim 3, characterized in that: The axes of the water inlet flow channel (111) and the water outlet flow channel (112) are parallel to or coaxial with each other.

5. The high-pressure water jet filter according to claim 2, characterized in that: A plurality of filter element mounting holes (12) are provided in the filter body (10), the plurality of filter element mounting holes (12) are distributed along the flow direction of the flow channel (11), and a filter element assembly (20) is detachably connected to each of the filter element mounting holes (12).

6. The high-pressure water jet filter according to claim 1, characterized in that: The filter element assembly (20) comprises a filter element (21) and a fastener (22); the filter element (21) is detachably connected to one end of the fastener (22); and the fastener (22) is sealingly connected to the filter element mounting hole (12).

7. The high-pressure water jet filter according to claim 6, characterized in that: A contraction channel (121) is provided at one end of the filter element mounting hole (12) away from the opening thereof, the inner diameter of the contraction channel (121) being smaller than the inner diameter of the flow channel (11), the inner wall of the contraction channel (121) being provided with an internal thread, and the end of the fastener (22) extending into the filter body (10) being provided with an external thread that cooperates with the internal thread.

8. The high-pressure water jet filter according to claim 7, characterized in that: A filter cavity is provided in the fastener (22), a filter slot (221) communicating with the filter cavity is provided on the side wall of the fastener (22), the filter element (21) is a filter screen (211), and the filter screen (211) is sleeved outside the fastener (22).

9. The high-pressure water jet filter according to claim 8, characterized in that: The fastener (22) is provided with a plurality of filter screens (211) distributed along the axial direction of the fastener (22), and a spacer ring (212) is provided between two adjacent filter screens (211).

10. The high-pressure water jet filter according to claim 1, characterized in that: The filter body (10) is a rectangular parallelepiped structure, the water inlet of the flow channel (11) is located on a first side surface of the filter body (10), the water outlet of the flow channel (11) is located on a second side surface of the filter body (10), the first side surface and the second side surface are two opposite sides of the filter body (10), the opening of the filter element mounting hole (12) is located on a third side surface of the filter body (10), the third side surface is a side adjacent to the first side surface and the second side surface, or the third side surface and the fourth side surface of the filter body (10) are respectively provided with at least one filter element mounting hole (12), and the fourth side surface is a side opposite to the third side surface.

11. The high-pressure water jet filter according to claim 1, characterized in that: At least one filter installation hole (13) is provided on the filter body (10).

12. The high-pressure water jet filter according to claim 11, characterized in that: The axes of the flow channel (11), the filter element mounting hole (12) and the filter mounting hole (13) are perpendicular to each other.

13. A high-pressure water jet device, characterized in that: The high-pressure water jet filter comprises the high-pressure water jet filter according to any one of claims 1 to 12.

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