Grinding fluid supply device for advanced-generation glass substrate grinding

Abstract

The invention provides a grinding fluid supply device for advanced-generation glass substrate grinding, which comprises a grinding bed base, a substrate connected onto the grinding bed base, a group of bottom plates covered on the substrate, a group of negative-pressure adsorption tanks, a group of liquid outlet holes and a group of negative-pressure adsorption tanks arranged on each bottom plate, and liquid inlet pipes communicated with the liquid outlet holes in the bottom plates. Each bottom plate is correspondingly covered with an aluminum plate, second liquid outlet holes distributed corresponding to the liquid outlet holes are formed in the aluminum plates, the aluminum plates are covered with grinding pads correspondingly matched with the aluminum plates, and third liquid outlet holes are formed in the grinding pads. The grinding machine is compact in structure and convenient to use, the liquid outlet amount and the liquid outlet pressure of each liquid outlet hole can be independently controlled, the grinding liquid utilization rate is increased, the yield is increased, and the production cost is reduced.

Description

Technical Field

[0001] The present invention relates to the field of glass processing, and specifically relates to a grinding fluid supply device for grinding high-generation glass substrates. Background Art

[0002] In the current high-generation glass production industry during the grinding process of glass substrates, the existing grinding machines generally have the following technical problems: uneven pressure, the single-point liquid outlet mode of the grinding fluid, and the pressure at the liquid outlet is much higher than the outside, which is not conducive to the grinding accuracy of the glass substrate. In addition, due to the uneven distribution of the grinding fluid outlet holes, the traditional single-point spraying results in a grinding fluid coverage rate < 60%, and the thickness difference of the grinding fluid in the edge area of the substrate reaches ±15%, resulting in waste of resources. Therefore, this open supply system causes the utilization rate of the grinding fluid ≤ 45%, resulting in great waste and increasing the production cost. In addition, due to the non-adjustable liquid outlet mode, the pressure division is uneven. Using a linear array nozzle, the defect is that the spraying parameters cannot be dynamically adjusted and other problems. Summary of the Invention

[0003] The present invention is to overcome the deficiencies in the prior art and provide a grinding fluid supply device for grinding high-generation glass substrates.

[0004] The present application provides the following technical solutions: A grinding fluid supply device for grinding high-generation glass substrates, which includes a grinding bed base, and a substrate is connected to the grinding bed base. It is characterized in that: a group of detachable bottom plates are covered on the substrate, and a group of negative pressure adsorption grooves and a group of liquid outlet holes are provided on each bottom plate. There is only a liquid inlet pipe connected to the liquid outlet holes one by one in the bottom plate. A piece of aluminum plate is correspondingly covered on each bottom plate, and second liquid outlet holes corresponding to the distribution of the liquid outlet holes are provided on the aluminum plate. A grinding pad is covered on the aluminum plate in a corresponding and matching manner, and third liquid outlet holes corresponding to the distribution of the second liquid outlet holes are also provided on the grinding pad.

[0005] On the basis of the above technical solutions, the following further technical solutions may be available: The substrate is circular, and the group of bottom plates is four or eight. The corners of the bottom plates close to the center of the substrate are distributed in a staggered manner in pairs.

[0006] A group of negative pressure adsorption grooves distributed on each bottom plate includes several straight grooves distributed in a straight line and several arc grooves distributed in an arc shape, and the straight grooves and the arc grooves are connected.

[0007] The number of liquid outlet holes on the bottom plate close to the center position of the substrate is more than the number of liquid outlet holes on the bottom plate far from the center of the substrate.

[0008] The several arc grooves distributed in an arc shape are distributed in concentric circles.

[0009] Among the several straight grooves linearly distributed on the bottom plate near the center of the substrate, there are horizontal straight grooves and obliquely distributed straight grooves.

[0010] Advantages of the invention: The structure of the present invention is compact and easy to use. The liquid output volume and output pressure of each liquid outlet hole can be controlled separately, which improves the utilization rate of the grinding liquid, increases the yield rate and reduces the production cost. Description of the drawings

[0011] Figure 1 is the three-dimensional structure schematic diagram of the device; Figure 2 is Figure 1 the schematic diagram of the bottom plate distribution in Figure 3 is the schematic diagram of the liquid supply principle of the device. Specific embodiments

[0012] As Figures 1-3 shown, a grinding liquid supply device for high-generation glass substrate grinding includes a grinding bed base 1. A circular substrate 2 is connected to the grinding bed base 1. Eight bottom plates 3 are detachably connected to the substrate 2 by countersunk bolts. The eight bottom plates 3 are spliced to form a circle that can completely cover the substrate 2.

[0013] A set of the bottom plates 3 is eight. The corners of the bottom plates 3 near the center of the substrate 2 are distributed in a staggered manner in pairs. Such a design effectively avoids the appearance of marks at the center of the back surface of the glass substrate placed on it after grinding.

[0014] On each bottom plate 3, there is a set of negative pressure adsorption grooves 4 and a set of negative pressure adsorption grooves 4. A set of liquid outlet holes 5 is arranged on the bottom plate 3. The number of liquid outlet holes 5 on the bottom plate 3 near the center of the substrate 2 is more than the number of liquid outlet holes 5 on the bottom plate 3 far from the center of the substrate 2.

[0015] Inside each bottom plate 3, there is a liquid inlet pipe 5a connected in one-to-one correspondence with the liquid outlet hole 5. One end of the liquid inlet pipe 5a is provided with a liquid inlet joint to communicate with the liquid inlet branch pipe 5b. A corresponding flow control valve 5c and a sensor are arranged on each liquid inlet branch pipe 5b. All the liquid inlet branch pipes 5b are connected in parallel with the liquid inlet main pipe 7, and the liquid inlet main pipe 7 is communicated with the grinding liquid tank 8.

[0016] A set of negative pressure adsorption grooves 4 distributed on each bottom plate 3 includes several straight grooves 4a linearly distributed and several arc grooves 4b arc-shaped distributed. Among the several straight grooves 4 linearly distributed, there are multiple horizontally distributed straight grooves and two obliquely distributed straight grooves that are parallel. An air inlet 4c is opened at the intersection of the horizontally distributed straight groove and the obliquely distributed straight groove. One end of the air inlet 4c is connected to a negative pressure fan on one side of the device (not shown in the figure) through a pipeline not shown in the figure.

[0017] The lengths of a pair of two obliquely distributed straight grooves on a pair of four bottom plates 3 away from the center of the substrate 2 are different, and the distance between the two is relatively large. The lengths of a pair of two obliquely distributed straight grooves on these four bottom plates 3 are the same, and the distance between the two is relatively small. The corners of the four bottom plates 3 close to the center of the substrate 2 are distributed in a staggered manner in pairs.

[0018] A number of arc grooves 4b distributed in an arc shape are distributed in concentric circles, and the distances between the arc grooves 4b are the same. All the arc grooves 4b on the eight bottom plates 3 can be made into four concentric circles, and the diameters of the concentric circles gradually increase from the inside to the outside.

[0019] On each bottom plate 3, an aluminum plate 6 with a shape similar to the corresponding bottom plate 3 is correspondingly covered. The aluminum plate 6 is connected to the bottom plate 3 by screws. Second liquid outlet holes 6a corresponding to the liquid outlet holes 5 are provided on the aluminum plate 6.

[0020] A polishing pad (not shown in the figure) with a shape corresponding to and covering the aluminum plate 6 is adhesively connected to the aluminum plate 6. The polishing pad is also provided with third liquid outlet holes (not shown in the figure) corresponding to the second liquid outlet holes 6a.

[0021] At the same time, 54 liquid outlet holes are drilled on 8 air - floating plates of 4 types. Each liquid outlet hole precisely controls the liquid output volume and the pressure during liquid output through a flow control valve and a pressure sensor. When grinding the glass substrate, according to the observation of the grinding effect by the staff, the range and angle of the grinding liquid for each liquid outlet hole are precisely controlled in real - time, achieving the effects of optimizing the uniform distribution of the grinding liquid, covering the edge of the grinding liquid, and the usage amount of the grinding liquid.

Claims

1. A grinding liquid supply device for grinding a high-generation glass substrate, comprising a grinding bed base (1), a substrate (2) being connected to the grinding bed base (1), characterized in that: A group of detachable bottom plates (3) are covered on the substrate (2); each bottom plate (3) is provided with a group of negative pressure adsorption grooves (4), a group of liquid outlet holes (5) and the negative pressure adsorption groove (4); only liquid inlet pipes (5a) are provided in the bottom plate (3) and are connected to the liquid outlet holes (5) in a one-to-one correspondence; each bottom plate (3) is correspondingly covered with an aluminum plate (6); a second liquid outlet hole (6a) is provided on the aluminum plate (6) and is distributed correspondingly to the liquid outlet hole (5); a correspondingly matched polishing pad is covered on the aluminum plate (6); and a third liquid outlet hole is provided on the polishing pad and is distributed correspondingly to the second liquid outlet hole (6a).

2. A grinding liquid supply device for grinding high-generation glass substrates according to claim 1, characterized in that: The base plate (2) is circular, the group of bottom plates (3) is four or eight, and the corners of the bottom plates (3) close to the center of the base plate (2) are staggered in pairs.

3. A grinding liquid supply device for grinding high-generation glass substrates according to claim 1, characterized in that: The group of negative pressure adsorption grooves (4) distributed on each bottom plate (3) comprises a plurality of straight grooves (4a) distributed in a straight line and a plurality of arc grooves (4b) distributed in an arc shape, and the straight grooves (4a) and the arc grooves (4b) are connected.

4. A grinding liquid supply device for grinding high-generation glass substrates according to claim 2, characterized in that: The number of the liquid outlet holes (5) on the bottom plate (3) close to the center of the substrate (2) is greater than the number of the liquid outlet holes (5) on the bottom plate (3) far from the center of the substrate (2).

5. A grinding liquid supply device for grinding high-generation glass substrates according to claim 3, characterized in that: The plurality of arc grooves (4b) distributed in an arc shape are distributed in a concentric circle shape.

6. A grinding liquid supply device for grinding high-generation glass substrates according to claim 3, characterized in that: The plurality of straight grooves (4a) distributed in a straight line on the bottom plate (3) close to the center of the base plate (2) include horizontally distributed straight grooves and obliquely distributed straight grooves.

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